CN113993263B - Atmospheric pressure plasma generator, preparation method and plasma generating device - Google Patents
Atmospheric pressure plasma generator, preparation method and plasma generating device Download PDFInfo
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- CN113993263B CN113993263B CN202111358288.6A CN202111358288A CN113993263B CN 113993263 B CN113993263 B CN 113993263B CN 202111358288 A CN202111358288 A CN 202111358288A CN 113993263 B CN113993263 B CN 113993263B
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- wire electrode
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- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 50
- 239000002184 metal Substances 0.000 claims abstract description 50
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000002844 melting Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 15
- 230000000694 effects Effects 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 abstract description 4
- 238000002679 ablation Methods 0.000 abstract description 3
- 238000004093 laser heating Methods 0.000 abstract description 3
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- 210000002381 plasma Anatomy 0.000 description 61
- 239000003570 air Substances 0.000 description 27
- 239000011521 glass Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000012080 ambient air Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 102000002151 Microfilament Proteins Human genes 0.000 description 1
- 108010040897 Microfilament Proteins Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical compound OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 210000003632 microfilament Anatomy 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 239000002096 quantum dot Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses an atmospheric pressure plasma generator, a preparation method and a plasma generating device, wherein the atmospheric pressure plasma generator is provided with a tubular porous medium tube microneedle, the porous medium tube microneedle comprises a metal wire electrode channel arranged at an axis position and a plurality of microneedle air inlet channels uniformly distributed around the axis as a center, and a molten metal ultrafine wire electrode is embedded in the metal wire electrode channel; the atmospheric pressure plasma generator is prepared by a laser heating and drawing method after molten metal is injected into the porous medium pipe, and has the advantages of simple preparation method, low plasma excitation power, and the like; and the molten metal ultrafine wire electrode in the plasma generator is separated from the working gas, so that the influence of the electrode on the working gas is avoided, and the bombardment and ablation effects of the plasma on the electrode are avoided, so that the stability of plasma discharge is greatly improved, and the service life of the electrode is prolonged.
Description
Technical Field
The invention relates to the technical field of low-temperature plasmas, in particular to an atmospheric pressure plasma generator, a preparation method and a plasma generating device.
Background
Atmospheric low temperature plasma is a normal pressure low temperature plasma with higher electron energy and lower ion energy and temperatures between room temperature and several hundred degrees celsius. The method has the advantages of low temperature, multiple active particle types, large quantity, strong activity, no need of a complex vacuum system and the like, and has wide application prospect in the fields of material surface processing and biomedicine. By controlling the diameter of the atmospheric pressure low-temperature plasma beam spot, the atmospheric pressure superfine plasma with the diameter of tens of micrometers or even nanometer magnitude can be obtained, so that the limitation on a mask plate can be eliminated during the patterning processing of the material surface, and the direct-writing micro-nano processing can be realized. In addition, in some special applications of atmospheric pressure low temperature plasmas, such as single quantum dot modification, single cell targeting treatment, and the like, atmospheric pressure ultra-fine plasmas with beam spot diameters on the order of micrometers or even nanometers are also required. However, the preparation of stable discharge atmospheric pressure plasma generators is a major challenge in the current atmospheric pressure low temperature plasma field.
The existing method mainly comprises the steps of heating and drawing a glass tube to obtain a capillary glass tube with an outlet diameter of a few micrometers, inserting a metal wire electrode, and introducing working gas to generate atmospheric pressure superfine plasma. However, the method is unstable in discharge and high in excitation voltage, and the capillary glass tube tip is easily broken down or ablated. The wire electrode is directly inserted into the air inlet channel and can also influence the working air flow, so that the plasma discharge stability is greatly influenced. In addition, it is difficult to ensure that the wire electrode is at the centerline of the capillary glass tube, and that the direct exposure of the wire electrode to the plasma discharge region also has an impact on the wire electrode lifetime. In addition to the heat drawn glass tube method, the silicon wafer-based deep silicon etching method is also a common method for generating atmospheric pressure ultra-fine plasma. After the needed micropores are etched on the silicon chip through a deep silicon etching process, the silicon chip and the glass tube are connected through glue, so that plasmas generated in the glass tube can be sprayed out through the micropores on the silicon chip, and atmospheric pressure ultrafine plasmas are generated. However, this method requires expensive processing equipment, and has a long processing cycle and high cost. In addition, the bonding part of the silicon chip and the glass tube is difficult to treat, and the plasma spraying and stability can be greatly influenced.
In view of the above drawbacks, the present inventors have finally achieved the present invention through long-time studies and practices.
Disclosure of Invention
In order to solve the technical defects, the technical scheme adopted by the invention is that the atmospheric pressure plasma generator is provided and is provided with a tubular porous medium tube microneedle, the porous medium tube microneedle comprises a metal wire electrode channel arranged at the axis position and a plurality of microneedle air inlet channels uniformly distributed with the axis as the center circumference, and a molten metal ultrafine wire electrode is embedded in the metal wire electrode channel.
Preferably, a method for preparing the atmospheric pressure plasma generator comprises the steps of:
s1, injecting molten metal into a central channel of a porous medium pipe and cooling;
s2, heating the middle part of the porous medium pipe through laser, and simultaneously applying axial tension to the two ends of the porous medium pipe;
s3, necking and breaking the porous medium tube and the molten metal from a heating position to form two sections of porous medium tube microneedles embedded with the molten metal ultrafine wire electrodes; the two porous medium tube microneedles are the atmospheric pressure plasma generators, and the central channels in which the molten metal is arranged form the metal wire electrode channels.
Preferably, the porous medium tube comprises a central channel arranged at the axis position and a plurality of air inlet channels uniformly distributed around the axis as the center, and the air inlet channels after necking and breaking form the micro-needle air inlet channels.
Preferably, the melting point of the molten metal is lower than the melting point of the porous medium tube.
Preferably, the molten metal is gold or silver or platinum.
Preferably, the device for generating the atmospheric pressure superfine plasma comprises the atmospheric pressure plasma generator, a power source and a gas source, wherein the power source is connected with the molten metal superfine filament electrode, the gas source is connected with the microneedle air inlet channel, working gas in the gas source flows in through the microneedle air inlet channel and forms a micro-air flow at the tip of the porous medium tube microneedle, and the tip of the molten metal superfine filament electrode generates an atmospheric pressure superfine plasma jet.
Preferably, the number of the microneedle air inlet channels is 2, and the microneedle air inlet channels are symmetrically arranged on two sides of the metal wire electrode channel respectively.
Compared with the prior art, the invention has the beneficial effects that: 1, after molten metal is injected into a porous medium pipe, the atmospheric pressure plasma generator is prepared by a laser heating and drawing method, and the method has the advantages of simple preparation method, low plasma excitation power, and the like; the molten metal ultrafine wire electrode in the plasma generator is separated from the working gas, so that the influence of the electrode on the working gas is avoided, and the bombardment and ablation effects of the plasma on the electrode can be avoided, so that the stability of plasma discharge is greatly improved, and the service life of the electrode can be prolonged; 2, the microneedle air inlet channels are uniformly distributed around the metal wire electrode channels, so that the influence of ambient air on the generated atmospheric pressure ultrafine plasma can be reduced while working gas is provided, and the state of micro-air flow can be regulated by reasonably designing the number and the positions of the microneedle air inlet channels, so that the regulation and control of the plasma characteristics are realized.
Drawings
FIG. 1 is a schematic flow chart of a method for preparing the atmospheric pressure plasma generator;
FIG. 2 is a structural view of the porous media tube;
FIG. 3 is a cross-sectional view of the porous media tube;
FIG. 4 is a view showing the structure of the porous medium tube after step S1 is completed;
FIG. 5 is a cross-sectional view of the porous medium tube after step S1 is completed;
fig. 6 is a structural view of the atmospheric pressure plasma generator;
FIG. 7 is a sectional view showing the structure of the atmospheric pressure plasma generator;
FIG. 8 is a view showing the structure of an atmospheric pressure ultra-fine plasma generator.
The figures represent the numbers:
1-a porous medium tube; 2-molten metal; 3-porous media tube microneedles; 4-a molten metal microfilament electrode; 5-atmosphere ultra-fine plasma jet; 6-micro-airflow; 7-a power source; 8-air source; 101-a central channel; 102-an intake passage; 301-wire electrode channels; 302-microneedle air inlet channel.
Detailed Description
The above and further technical features and advantages of the present invention are described in more detail below with reference to the accompanying drawings.
Example 1
As shown in fig. 1 to 7, fig. 1 is a schematic flow chart of a method for preparing the atmospheric pressure plasma generator; FIG. 2 is a structural view of the porous media tube; FIG. 3 is a cross-sectional view of the porous media tube; FIG. 4 is a view showing the structure of the porous medium tube after step S1 is completed; FIG. 5 is a cross-sectional view of the porous medium tube after step S1 is completed; fig. 6 is a structural view of the atmospheric pressure plasma generator; fig. 7 is a structural sectional view of the atmospheric pressure plasma generator.
The atmospheric pressure plasma generator is provided with a tubular porous medium tube microneedle 3, the porous medium tube microneedle 3 comprises a metal wire electrode channel 301 arranged at the axis position and a plurality of microneedle air inlet channels 302 which are circumferentially and uniformly distributed with the axis as the center, and a molten metal superfine wire electrode 4 is embedded in the metal wire electrode channel 301.
The preparation method of the atmospheric pressure plasma generator comprises the following steps:
s1, injecting molten metal 2 into a central channel 101 of a porous medium tube 1 and cooling;
s2, heating the middle part of the porous medium tube 1 by laser, applying axial tension to the two ends of the porous medium tube 1, and determining laser power, heating time and tension values of the two ends of the porous medium tube 1 according to the diameter processing requirement of an atmospheric pressure superfine plasma beam spot;
s3, necking and breaking the porous medium tube 1 and the molten metal 2 from the center to form two sections of porous medium tube microneedles 3 embedded with the molten metal ultrafine wire electrodes 4; both of the porous medium tube microneedles 3 are the atmospheric pressure plasma generators, and the central passage 101 in which the molten metal 2 is disposed forms the wire electrode passage 301.
The porous medium tube 1 comprises the central channel 101 arranged at the axis position and a plurality of air inlet channels 102 which are uniformly distributed around the axis as the center, wherein the air inlet channels 102 after necking and breaking form the micro-needle air inlet channels 302.
Specifically, the melting point of the molten metal 2 is lower than the melting point of the porous medium tube 1.
Preferably, the molten metal 2 may be gold, silver or platinum.
The atmospheric pressure plasma generator is prepared by a laser heating and drawing method after molten metal is injected into the porous medium pipe, and has the advantages of simple preparation method, low plasma excitation power, and the like; and the molten metal ultrafine wire electrode in the plasma generator is separated from the working gas, so that the influence of the electrode on the working gas is avoided, and the bombardment and ablation effects of the plasma on the electrode are avoided, so that the stability of plasma discharge is greatly improved, and the service life of the electrode is prolonged.
Example two
As shown in fig. 8, fig. 8 is a structural view of an atmospheric pressure ultra-fine plasma generating apparatus; the atmospheric pressure superfine plasma generating device comprises the atmospheric pressure plasma generator, a power source 7 and a gas source 8, wherein the power source 7 is connected with the molten metal superfine filament electrode 4, the gas source 8 is connected with the micro-needle air inlet channel 302, and working gas in the gas source 8 flows in through the micro-needle air inlet channel 302 and forms micro-gas flow 6 at the tip of the micro-needle 3 of the porous medium tube.
In particular, the micro-gas flow 6 may provide a working gas for plasma generation, and may also act as a shielding gas to protect the generated plasma from ambient air.
By switching on the power source 7 and supplying a working gas, an atmospheric pressure very fine plasma jet 5 can be generated at the tip of the very fine wire electrode 4.
In this embodiment, the number of the microneedle air inlet channels 302 is 2, and the microneedle air inlet channels are symmetrically arranged on two sides of the wire electrode channel 301.
In other embodiments, the number and arrangement of the microneedle inlet channels 302 may be increased or decreased to produce an atmospheric pressure plasma generator having a different configuration.
The microneedle air inlet channels are uniformly distributed around the metal wire electrode channels, so that the influence of ambient air on the generated atmospheric pressure ultrafine plasma can be reduced while working gas is provided, and the state of micro-air flow can be regulated by reasonably designing the number and the positions of the microneedle air inlet channels, so that the regulation and control of the plasma characteristics are realized.
According to the invention, the atmospheric pressure plasma generators with different tip diameters (several nanometers to hundreds of micrometers) can be manufactured by adjusting laser drawing parameters such as laser power, heating time, applied pulling force and the like, so that the ultra-fine plasmas with different beam spot diameters can be generated in an atmospheric pressure environment, the preparation method is flexible, related parameters can be flexibly selected according to actual processing requirements, and the application range of the atmospheric pressure low-temperature plasmas is greatly increased.
The foregoing description of the preferred embodiment of the invention is merely illustrative of the invention and is not intended to be limiting. It will be appreciated by persons skilled in the art that many variations, modifications, and even equivalents may be made thereto without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (6)
1. The atmospheric pressure plasma generator is characterized by being provided with a tubular porous medium tube microneedle, wherein the porous medium tube microneedle comprises a metal wire electrode channel and a plurality of microneedle air inlet channels, wherein the metal wire electrode channel is arranged at the axis position, the microneedle air inlet channels are circumferentially and uniformly distributed with the axis as the center, and a molten metal ultrafine wire electrode is embedded in the metal wire electrode channel;
the preparation method of the atmospheric pressure plasma generator comprises the following steps:
s1, injecting molten metal into a central channel of a porous medium pipe and cooling;
s2, heating the middle part of the porous medium pipe through laser, and simultaneously applying axial tension to the two ends of the porous medium pipe;
s3, necking and breaking the porous medium tube and the molten metal from a heating position to form two sections of porous medium tube microneedles embedded with the molten metal ultrafine wire electrodes; the two porous medium tube microneedles are the atmospheric pressure plasma generators, and the central channels in which the molten metal is arranged form the metal wire electrode channels.
2. An atmospheric pressure plasma generator as defined in claim 1 wherein the porous medium tube comprises the central passage disposed at the axial location and a plurality of air intake passages circumferentially distributed about the axis, the air intake passages after neck-down stretch-out forming the microneedle air intake passages.
3. An atmospheric pressure plasma generator as defined in claim 1 wherein the melting point of the molten metal is lower than the melting point of the porous dielectric tube.
4. An atmospheric pressure plasma generator as defined in claim 1 wherein the molten metal is gold or silver or platinum.
5. An atmospheric pressure ultra-fine plasma generating device, comprising the atmospheric pressure plasma generator of claim 1, a power source and a gas source, wherein the power source is connected with the molten metal ultra-fine wire electrode, the gas source is connected with the micro-needle air inlet channel, working gas in the gas source flows in through the micro-needle air inlet channel and forms micro-air flow at the tip of the micro-needle of the porous medium tube, and the tip of the molten metal ultra-fine wire electrode generates an atmospheric pressure ultra-fine plasma jet.
6. The atmospheric pressure ultra-fine plasma generating apparatus according to claim 5, wherein the number of the micro-needle air inlet channels is 2, and the micro-needle air inlet channels are symmetrically arranged at both sides of the wire electrode channel, respectively.
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| EP2755453B1 (en) * | 2011-09-09 | 2019-08-07 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Plasma generator and cvd device |
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| US6417625B1 (en) * | 2000-08-04 | 2002-07-09 | General Atomics | Apparatus and method for forming a high pressure plasma discharge column |
| CN104025719A (en) * | 2011-11-09 | 2014-09-03 | 道康宁法国公司 | Plasma treatment of substrates |
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