CN113985064A - Flow velocity detection device, method and system - Google Patents
Flow velocity detection device, method and system Download PDFInfo
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- CN113985064A CN113985064A CN202111262732.4A CN202111262732A CN113985064A CN 113985064 A CN113985064 A CN 113985064A CN 202111262732 A CN202111262732 A CN 202111262732A CN 113985064 A CN113985064 A CN 113985064A
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- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
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- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave
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Abstract
The application provides a flow velocity detection device, a flow velocity detection method and a flow velocity detection system, and relates to the field of instruments. The flow velocity detection device includes: a light emitting element for emitting light; the reflecting foil is opposite to the light-emitting element and is arranged at an interval with the light-emitting element, the reflecting foil is an elastic foil, and the reflecting foil is used for reflecting the light; and the photoelectric conversion element is arranged around the light-emitting element and used for receiving the light reflected by the reflecting foil and generating an electric signal for measuring and calculating the flow rate. The flow velocity detection device has the characteristics of simple structure, small volume, low manufacturing cost and high sensitivity to flow velocity change.
Description
Technical Field
The application relates to the field of instruments and meters, in particular to a flow velocity detection device, a flow velocity detection method and a flow velocity detection system.
Background
There are various conventional methods for detecting the velocity of a fluid (including gas and liquid), for example, wind velocity detection methods such as a cup measurement method based on a rotational speed signal, a hot-wire measurement method based on a heat dissipation rate, and a measurement method based on ultrasonic waves, and water velocity detection methods such as a measurement method using a current meter, a float method, and a volume method.
However, in the existing flow rate measurement, because the measurement instrument is large in size and expensive, the applicable conditions of the measurement method are limited, and the factors influencing the result are too many, so that the measurement instrument cannot be widely used.
Disclosure of Invention
In view of the above, the present invention is directed to a flow velocity detection apparatus, a flow velocity detection method and a flow velocity detection system, which are used to solve the problems of expensive price and large volume of the conventional measurement instrument for measuring the fluid velocity.
In order to achieve the above object, embodiments of the present application are implemented as follows:
in a first aspect, the present application provides a flow rate detection device, comprising: a light emitting element for emitting light; the reflecting foil is opposite to the light-emitting element and is arranged at an interval with the light-emitting element, the reflecting foil is an elastic foil, and the reflecting foil is used for reflecting the light; and the photoelectric conversion element is arranged around the light-emitting element and used for receiving the light reflected by the reflecting foil and generating an electric signal for measuring and calculating the flow rate.
In the embodiment of the application, the reflecting foil is an elastic foil, when the reflecting foil is opposite to the fluid and is positioned at the downstream of the fluid flowing direction, the reflecting foil is easily influenced by the fluid to deform or displace, the reflecting result of light is influenced, the quantity of reflected light received by the photoelectric conversion element changes, and the flow velocity can be measured and calculated through the electric signal generated by the photoelectric conversion element. The flow velocity detection device has the advantages that the light-emitting element and the photoelectric conversion element are used for acquiring the electric signal for measuring and calculating the flow velocity, so that the flow velocity detection device is simple in structure and small in size, and meanwhile, the cost for manufacturing the flow velocity detection device is reduced.
In one embodiment, the light emitting element is integrated with the photoelectric conversion element.
In the embodiment of the application, the light-emitting element and the photoelectric conversion element are integrated into a whole, namely, in a monolithic integration mode, the size of the device can be further reduced, and meanwhile, the cost of the device is reduced.
In one embodiment, the light emitting element and the photoelectric conversion element are located on the same plane.
In the embodiment of the present application, the light emitting element and the photoelectric conversion element are disposed in the same plane, which is convenient for disposing the light emitting source and the photoelectric conversion element, and is helpful for further reducing the volume of the flow rate detection device.
In one embodiment, the light emitting element and the photoelectric conversion element are coaxially arranged.
In the embodiment of the application, the light-emitting element and the photoelectric conversion element are coaxially arranged, and the positions of the light-emitting element and the photoelectric conversion element are reasonably distributed, so that the volume of the flow velocity detection device is further reduced while the functions of the flow velocity detection device are completed.
In one embodiment, the flow rate detection device further includes: and the light coupling layer is arranged on the surfaces of the light-emitting element and the photoelectric conversion element and is used for coupling the light rays reflected by the reflecting foil to the photoelectric conversion element.
In the embodiment of the application, the optical coupling layer is arranged on the integrated piece of the light-emitting element and the photoelectric conversion element, so that the flow velocity detection device can complete the coupling of light without adding a coupling lens, and the volume and the manufacturing cost of the flow velocity detection device are reduced.
In one embodiment, the flow rate detection device further includes: the light-emitting element and the photoelectric conversion element are both arranged on the substrate.
In one embodiment, the flow rate detection device further includes: a package forming a cavity with the substrate, the light emitting element and the photoelectric conversion element being disposed in the cavity.
In this embodiment, after the device is packaged, the device can be directly placed in a measurement environment for measurement, and the package can protect the light-emitting element and the photoelectric conversion element, which is beneficial to prolonging the service life of the flow rate detection device by the packaging shaft.
In one embodiment, the package is made of an elastic material, and the reflective foil is disposed on a surface of the package.
In the embodiment of the application, the package is made of an elastic material, so that the package can also deform under the action of the fluid, and the deformation of the package can drive the reflective foil to shift, which can also affect the amount of reflected light reaching the photoelectric conversion element. The flow velocity is measured and calculated by combining the deformation of the reflecting foil and the packaging part under the action of the fluid, so that the measurable range of the flow velocity detection device is improved.
In a second aspect, the present application provides a flow rate detection method applied to the flow rate detection device of the first aspect, the method including: when the reflecting foil is opposite to the fluid and is arranged at the downstream of the fluid flowing direction, the light-emitting element is controlled to emit light to the reflecting foil; acquiring an electric signal which is generated by a photoelectric conversion element receiving the light reflected by the reflecting foil and is used for measuring and calculating the flow speed; a flow rate of the fluid is determined based on the electrical signal.
In a third aspect, the present application provides a flow rate detection system comprising: the flow rate detection device according to the first aspect; a processor for acquiring a flow rate based on the electrical signal of the photoelectric conversion element.
In the embodiment of the application, the flow velocity detection device generates the electric signal for calculating the flow velocity, so that the electric signal is processed by the processor and converted into the value of the flow velocity of the fluid, and the flow velocity result is obtained more intuitively and accurately.
Additional features and advantages of the disclosure will be set forth in the description which follows, or in part may be learned by the practice of the above-described techniques of the disclosure, or may be learned by practice of the disclosure.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a structural diagram of a flow rate detection device provided in an embodiment of the present application;
FIG. 2 is a flow chart of a flow rate detection method provided in an embodiment of the present application;
FIG. 3 is a schematic diagram of a flow rate detection method provided in an embodiment of the present application;
fig. 4 is a block diagram of a flow rate detection system according to an embodiment of the present application.
Icon: a flow rate detection device 100; a light emitting element 110; a reflective foil 120; a photoelectric conversion element 130; a substrate 140; a package 150; a light coupling layer 160; a processor 200.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
Referring to fig. 1, fig. 1 is a block diagram of a flow rate detection device according to an embodiment of the present disclosure, in which the flow rate detection device 100 includes: a light emitting element 110, a reflective foil 120 and a photoelectric conversion element 130.
And a light emitting element 110 for emitting light.
In the present embodiment, in order to reduce the volume of the flow rate detection device 100, the light emitting element 110 should have a smaller volume, and may be, for example, an LED (light emitting diode) chip.
In this embodiment, each time the flow velocity detection apparatus 100 measures the flow velocity of the fluid, the light emitted by the light emitting element 110 is kept consistent, for example, the light emitting angle, the light emitting intensity, and the total number of emitted photons are all the same.
In the present embodiment, the reflective foil 120 is disposed opposite to the light emitting element 110, for example, the reflective foil 120 is disposed facing the light emitting surface of the light emitting element 110. The reflective foil 120 is spaced apart from the light emitting element 110, that is, the reflective foil 120 is spaced apart from the light emitting element 110, whereby the reflective foil 120 faces the light emitting element 110 and is spaced apart from the light emitting element 110.
In this embodiment, the reflective foil 120 has good light reflection performance for reflecting the light emitted from the light emitting element 110. The reflective foil 120 may be an elastic foil, that is, made of an elastic material. The reflective foil 120 has good ductility so that it is elastically deformed when being affected by a fluid and is rapidly restored without an external force after being elastically deformed, and thus, the reflective foil 120 has a high sensitivity to a flow change of the fluid. Illustratively, the reflective foil 120 may be an aluminum foil, a silver foil, or the like having similar properties.
And a photoelectric conversion element 130 disposed around the light emitting element 110 for receiving the light reflected by the reflective foil 120 and generating an electrical signal for measuring and calculating a flow rate.
In this embodiment, the photosensitive surface of the photoelectric conversion element 130 is disposed facing the reflective foil 120.
In this embodiment, the light emitting device 110 is a point light source, so that the emitted light is not incident perpendicularly to the reflective foil, and the incident direction of a portion of the light forms an included angle with the reflective foil 120, so that when the reflective foil 120 reflects the light, the included angle between the incident direction of the light and the reflective foil is within a certain range, and the reflected light is reflected to the photoelectric conversion device 130, so as to be converted into an electrical signal by the photoelectric conversion device 130. The range of the included angle may be determined according to the ratio of the sizes of the light emitting element 110 and the photoelectric conversion element 130, and particularly, the included angle is different in different setting manners, which is not limited in this application and is only described here for convenience of understanding. When the reflective foil is pressed or deformed, the distance between the reflective foil 120 and the light emitting element 110 and the photoelectric conversion element 130 becomes short, and thus, the reflective foil 120 can reflect more light onto the photoelectric conversion element 130, so that the electrical signal of the photoelectric conversion element 130 is changed, that is, the luminous flux reflected by the reflective foil 120 back to the photoelectric conversion element 130 is changed. The change in flow rate can be calculated from the changing electrical signal in combination with the relationship between flow rate and electrical signal obtained experimentally in advance.
In this embodiment, since the interval between the reflective foil 120 and the light emitting element 110 and the photoelectric conversion element 130 affects the refraction of light and the total amount of photons received by the photoelectric conversion element 130, the interval can be set according to actual requirements, so as to adjust the measurement range of the flow rate detection apparatus 100. Specifically, when the reflective foil 120 is force-fitted to the light emitting element 110 and the photoelectric conversion element 130, the reflection of light cannot be changed any more, and the flow velocity detection apparatus 100 reaches the maximum measurement range, so that the maximum measurement range can be increased by increasing the size of the gap before measurement. In the present embodiment, the photoelectric conversion element 130 needs to be capable of receiving light and converting the received photons into an electrical signal, and therefore, the photoelectric conversion element 130 may be a PD (photo sensor).
In one embodiment, the light emitting device 110 is integrated with the photoelectric conversion device 130.
In this embodiment, in order to reduce the volume of the flow velocity detection apparatus 100, the light emitting element 110 and the photoelectric conversion element 130 are integrated into the same chip, i.e., a single integrated chip, and the manufacturing cost can be reduced by using the integrated chip. Specifically, in order to further reduce the device size and the cost of the device, a micron-scale integrated chip may be used, and further, in order to reduce the weight of the integrated chip, a gallium nitride integrated chip may be used.
In one embodiment, the light emitting device 110 and the photoelectric conversion device 130 are located on the same plane.
In this embodiment, the light emitting element 110 and the photoelectric conversion element 130 are disposed on the same plane, which is helpful for further reducing the volume of the flow rate detection device.
In one embodiment, the light emitting device 110 is disposed coaxially with the photoelectric conversion device 130.
In this embodiment, when the light emitting element 110 and the photoelectric conversion element 130 are coaxially disposed, the light emitting element 110 is on the inner side, and the photoelectric conversion element 130 is on the outer side. Specifically, the light emitting element 110 and the photoelectric conversion element 130 may be integrally formed in a circular shape, the light emitting element 110 is an inner circle portion, and the photoelectric conversion element 130 is an annular portion. The integrated chip may also be shaped like a squared figure with the light emitting element 110 in the central lattice portion and the photoelectric conversion elements 130 distributed around the light emitting element 110. It is to be understood that the foregoing is illustrative only and is not to be construed as limiting the present application, as numerous specific embodiments are possible.
In one embodiment, the flow rate detection device further includes: the light coupling layer 160 is disposed on the surfaces of the light emitting device 110 and the photoelectric conversion device 130, and the light coupling layer 160 is used for coupling the light reflected by the reflective foil to the photoelectric conversion device 130.
In this embodiment, since the light is emitted and received on the same plane, in order to make the photoelectric conversion element 130 better receive the light reflected by the reflective foil, the surfaces of the integrated chips of the light emitting element 110 and the photoelectric conversion element 130 are covered with the optical coupling layer 160, so that the flow velocity detection device can complete the coupling of light without adding a coupling lens, and the light coupling can be realized, thereby reducing the volume and the manufacturing cost of the flow velocity detection device. Specifically, the light coupling layer 160 may be made of a sapphire substrate (aluminum oxide).
In an embodiment, the flow velocity detection apparatus 100 further includes a substrate 140, and the light emitting device 110 and the photoelectric conversion device 130 are disposed on the substrate 140.
In this embodiment, when the light-emitting element 110 and the photoelectric conversion element 130 are packaged as an integrated chip, the integrated chip is disposed on the substrate 140.
In one embodiment, the flow rate detection device further includes: the package 150, the package 150 and the substrate 140 form a cavity, and the light emitting device 110 and the photoelectric conversion device 130 are disposed in the cavity.
In this embodiment, the light emitting element 110 and the photoelectric conversion element 130 are protected by the package 150 in the cavity formed with the substrate 140, so that the light emitting element 110 and the photoelectric conversion element 130 can be effectively protected, which is helpful for prolonging the service life of the flow rate detection apparatus 100.
In one embodiment, the package 150 is made of an elastic material, and the reflective foil is disposed on the surface of the package 150.
In this embodiment, since the package 150 and the substrate 140 form a cavity, a certain space is also formed between the top of the package 150 and the integrated chip, so that the reflective foil can be disposed on the surface of the package, and further, in order to avoid the influence of the environment on the reflective foil, thereby affecting the light reflection performance of the reflective foil 120, the reflective foil can also be disposed on the inner surface of the package 150.
In this embodiment, when the reflective foil 120 is disposed on the inner surface of the package 150, the reflective foil 120 cannot be directly affected by the fluid, and therefore, the package 150 needs to be made of an elastic material, so that the package 150 can deform under the action of the fluid, and the deformation of the package can drive the reflective foil 120 to shift, which also affects the amount of reflected light reaching the photoelectric conversion element 130. Illustratively, package 150 may be made of a film of elastomeric material PMDS (polydimethylsiloxane film). When the deformation of the reflective foil reaches the maximum, the package 150 is also made of an elastic material, and therefore, a certain amount of deformation may occur, so that the position of the reflective foil changes to a certain extent, and the reflected light is affected again, and therefore, the flow rate is measured and calculated by combining the deformation of the reflective foil and the package under the action of the fluid, which is helpful for improving the measurable range, and it can be understood that the maximum of the measurable range of the flow rate detection apparatus 100 is determined by the maximum elastic deformation of the reflective foil 120 or the package 150.
In this embodiment, since the package 150 is made of an elastic material, the package may be deformed by a fluid, and thus, the reflective foil 120 may be made of other materials having high reflectivity.
In this embodiment, the cavity may be filled with fluid media of different materials. Specifically, to change the refractive index of light within the cavity, media of different densities may be filled, thereby increasing the total amount of photons received by the photoelectric conversion element 130. In order to enlarge the maximum measurement range of the flow rate detection device 100, a support material may be further added in the cavity, and for example, a liquid medium may be further filled in the cavity, and the liquid medium may support the package to a certain extent, so as to increase the maximum elastic deformation amount of the package 150, and thus, the maximum measurement range of the flow rate detection device 100 may be increased. It is understood that different media can be selected for filling according to different implementation situations, so as to achieve different effects.
In this embodiment, since the reflective foil 120 is an elastic foil, when the reflective foil 120 faces the fluid and is located downstream in the fluid flowing direction, the reflective foil is susceptible to deformation or displacement caused by the fluid, and the reflection result of light is affected, so that the amount of reflected light received by the photoelectric conversion element changes, and the flow velocity can be measured and calculated by generating an electrical signal through the photoelectric conversion element. By acquiring the electrical signal for measuring and calculating the flow rate using the light emitting element 110 and the photoelectric conversion element 130, the flow rate detection device 100 is made simple in structure and small in size, while the cost for manufacturing the flow rate detection device 100 is reduced.
Next, a method for measuring a flow rate by the flow rate detection device and an implementation principle thereof provided by the present application will be described. Referring to fig. 2, based on the same inventive concept, fig. 2 is a flowchart of a flow rate detection method according to an embodiment of the present application, including:
s210, when the reflecting foil faces the fluid and is located at the downstream of the fluid flowing direction, the light-emitting element is controlled to emit light to the reflecting foil.
Referring to fig. 3, fig. 3 is a schematic diagram of a flow velocity detection method according to an embodiment of the present application, where (a) in fig. 3 is a case where the flow velocity detection device emits light and receives light when the flow velocity is not measured, and (b) is a case where the reflection foil deforms and the photoelectric conversion element receives light when the flow velocity detection device measures the flow velocity.
In this embodiment, in a normal condition, that is, when the flow velocity is not measured, as shown in (a) of fig. 3, the reflective foil is not deformed, and since the light emitted by the light emitting element is consistent and does not change every time, the light reflected back by the photoelectric conversion element is also consistent every time, the total amount of received photons is not changed, and the received photons are converted into corresponding electrical signals, which correspond to the electrical signals when the flow velocity is 0.
In this embodiment, when measuring the flow velocity, the surface of the reflective foil facing away from the light emitting element is disposed opposite to the fluid and downstream in the flow direction of the fluid, that is, in the flow direction of the fluid, so that the reflective foil receives the pressure of the fluid. As shown in fig. 3 (b), when the fluid moves, the reflective foil is pressed to be deformed, and when the light is emitted toward the reflective foil, the path that the light travels is shortened, and the position where the light is reflected is changed, so that the position where the light is reflected is also changed. For example, light that should be reflected to the outer edge of the photoelectric conversion element may be reflected to the middle portion of the photoelectric conversion element after the change of the reflective foil.
In this embodiment, the larger the flow velocity, the larger the force applied to the reflective foil, and the more significant the deformation occurs, thereby resulting in the closer the distance between the reflective foil and the photoelectric conversion element.
And S220, acquiring an electric signal which is generated by the photoelectric conversion element receiving the light reflected by the reflecting foil and is used for measuring and calculating the flow rate.
In this embodiment, the reflected light is changed due to the change of the reflective foil, and therefore, the light received by the photoelectric conversion element is also changed, that is, the total amount of received photons is changed, specifically, the larger the flow velocity is, the more the deformation of the reflective foil is obvious, the more the reflected light is received by the photoelectric conversion element, the larger the total amount of received photons is, and thus the larger the converted electrical signal is, and further, the change amount of the electrical signal before and after the flow velocity is measured may also be obtained. Illustratively, when wind speeds are measured, and the wind speeds are 5.5m/s, 15.4m/s and 24.6m/s, respectively, the corresponding change electric signals are respectively 0.38uA, 2.32uA and 5.46 uA.
And S230, determining the flow rate of the fluid based on the electric signal.
In this embodiment, the flow rate detection device may obtain the corresponding electrical signal by measuring in an environment with a preset flow rate, and establish a relationship between the flow rate and the corresponding electrical signal, so that in subsequent measurement, after obtaining the electrical signal, the corresponding flow rate may be obtained according to the corresponding relationship.
In this embodiment, the fluid includes gas and liquid, and different fluids have different deformation caused by different forces applied to the reflective foil when the velocities are the same, so that a relationship between the flow velocity of different fluids and the electrical signal can be established before the different fluids are measured, and during measurement, different corresponding relationships can be selected according to the type of the measured fluid, so as to obtain the flow velocity result according to the measured electrical signal.
Referring to fig. 4, based on the same inventive concept, fig. 4 is a block diagram of a flow rate detection system according to an embodiment of the present application, including: a flow rate detection device 100 and a processor 200.
In this embodiment, since the flow rate detection device generates the electrical signal for calculating the flow rate, in order to obtain the flow rate result more intuitively and accurately, the processor 200 processes the electrical signal, that is, obtains the flow rate through the electrical signal and the corresponding relationship calculation, and outputs the result.
In an embodiment, the flow rate detection system may further include a display device for displaying the calculated flow rate result.
In one embodiment, the flow rate detection system may further include a memory, where the memory stores the corresponding relationship between the electrical signal and the flow rate, and the memory may be further configured to record the measurement result, and may be called from the memory when the user needs the measurement result, and may be displayed on the display device.
In the embodiments provided in the present application, it should be understood that the disclosed method and apparatus may be implemented in other ways. The above-described apparatus embodiments are merely illustrative. The functional modules in the embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A flow rate detection device, comprising:
a light emitting element for emitting light;
the reflecting foil is opposite to the light-emitting element and is arranged at an interval with the light-emitting element, the reflecting foil is an elastic foil, and the reflecting foil is used for reflecting the light;
and the photoelectric conversion element is arranged around the light-emitting element and used for receiving the light reflected by the reflecting foil and generating an electric signal for measuring and calculating the flow rate.
2. The flow rate detection device according to claim 1, wherein the light emitting element is integrated with the photoelectric conversion element.
3. The flow rate detection device according to claim 2, wherein the light emitting element and the photoelectric conversion element are located on the same plane.
4. The flow rate detection device according to claim 3, wherein the light emitting element is provided coaxially with the photoelectric conversion element.
5. The flow rate detection device according to claim 3, further comprising: and the light coupling layer is arranged on the surfaces of the light-emitting element and the photoelectric conversion element and is used for coupling the light rays reflected by the reflecting foil to the photoelectric conversion element.
6. The flow rate detection device according to claim 1, further comprising:
the light-emitting element and the photoelectric conversion element are both arranged on the substrate.
7. The flow rate detection device according to claim 6, further comprising: a package forming a cavity with the substrate, the light emitting element and the photoelectric conversion element being disposed in the cavity.
8. The flow rate sensing device according to claim 7, wherein the package is made of an elastic material, and the reflective foil is disposed on a surface of the package.
9. A flow rate detection method applied to the flow rate detection device according to any one of claims 1 to 7, the method comprising:
when the reflecting foil faces the fluid and is positioned at the downstream of the fluid flow direction, controlling the light-emitting element to emit light to the reflecting foil;
acquiring an electric signal which is generated by a photoelectric conversion element receiving the light reflected by the reflecting foil and is used for measuring and calculating the flow speed;
a flow rate of the fluid is determined based on the electrical signal.
10. A flow rate sensing system, comprising:
a flow rate detection device according to any one of claims 1 to 7;
a processor for acquiring a flow rate based on the electrical signal of the photoelectric conversion element.
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