CN113218564A - Optical cavity air pressure sensor - Google Patents
Optical cavity air pressure sensor Download PDFInfo
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- CN113218564A CN113218564A CN202110400817.8A CN202110400817A CN113218564A CN 113218564 A CN113218564 A CN 113218564A CN 202110400817 A CN202110400817 A CN 202110400817A CN 113218564 A CN113218564 A CN 113218564A
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- disordered
- nanoclusters
- optical cavity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
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Abstract
The invention relates to an optical cavity air pressure sensor.A closed shell comprises a first outer wall, a second outer wall, a third outer wall and a pressure sensing film which are sequentially connected end to end; an inner wall is arranged in the closed shell, one end of the inner wall is connected with the first outer wall, and the other end of the inner wall is connected with the second outer wall through disordered nanoclusters; the first outer wall, the inner wall, the disordered nanoclusters, the second outer wall, the third outer wall and the pressure sensing film form a second closed cavity; the reflecting part is arranged on the third outer wall, and a space is reserved between the reflecting part and the disordered nanoclusters; the pressure sensing membrane receives external atmospheric pressure to take place deformation, and the atmospheric pressure in the second closed cavity can change, and the interval size can change. The invention detects the air pressure according to the difference of the optical cavity thickness formed by the disordered nanoclusters, the reflecting part and the air chamber between the disordered nanoclusters and the reflecting part and the difference of the wavelength of the reflected light. The invention has extremely high detection sensitivity and detection accuracy because the wavelength of the reflected light is very sensitive to the thickness variation of the optical cavity.
Description
Technical Field
The invention relates to the technical field of air pressure detection, in particular to an optical cavity air pressure sensor.
Background
The existing optical cavity air pressure sensor structure generally comprises a plastic frame and an optical cavity air pressure sensor chip, wherein the plastic frame is used as a carrier of the optical cavity air pressure sensor chip, the optical cavity air pressure sensor chip is fixed by glue, when air pressure is transmitted to the optical cavity air pressure sensor chip, a thin film on the optical cavity air pressure sensor chip is deformed, and a resistance value on the thin film is immediately changed to output a voltage signal. However, the optical cavity air pressure sensor chip packaged by the plastic frame has a larger output error due to the difference of thermal expansion and cold contraction at different temperatures because of the different materials of the plastic material and the optical cavity air pressure sensor chip material, which affects the detection accuracy and sensitivity of the optical cavity air pressure sensor.
Disclosure of Invention
The invention aims to provide an optical cavity air pressure sensor which can detect the air pressure more accurately and sensitively.
In order to achieve the purpose, the invention provides the following scheme:
an optical cavity barometric sensor comprising a closed housing, a disordered nanocluster, a reflector, a laser, and a detector;
the disordered nanoclusters, the reflector, the laser, and the detector are disposed within the closed housing;
the closed shell comprises a first outer wall, a second outer wall, a third outer wall and a pressure sensing film which are sequentially connected end to end; an inner wall is arranged in the closed shell, one end of the inner wall is connected with the first outer wall, and the other end of the inner wall is connected with the second outer wall through the disordered nanoclusters; the first outer wall, the second outer wall, the disordered nanoclusters, and the inner wall form a first enclosed cavity; the first outer wall, the inner wall, the disordered nanoclusters, the second outer wall, the third outer wall and the pressure sensing film form a second closed cavity;
the reflecting part is arranged on the third outer wall, and a distance is reserved between the reflecting part and the disordered nanoclusters; the pressure sensing film deforms under the external air pressure, the air pressure in the second closed cavity changes, and the size of the gap changes;
the laser and the detector are arranged in the first closed cavity; the detector is used for detecting the reflected light of the light emitted by the laser on the reflecting part.
Optionally, the optical cavity barometric sensor further comprises a substrate disposed within the closed housing, the substrate being located over the disordered nanoclusters.
Optionally, the thickness of the middle portion of the substrate is smaller than the thickness of the two side portions of the substrate.
Optionally, the substrate is made of a transparent and elastic material.
Optionally, the disordered nanoclusters are made of silver nanoparticles.
Optionally, the reflective portion is made of silver.
Optionally, the laser and the detector are disposed on the first outer wall.
Optionally, an optical gain gas is disposed within the second enclosed cavity.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention discloses an optical cavity air pressure sensor which comprises a closed shell, a disordered nanocluster, a reflecting part, a laser and a detector, wherein the closed shell is provided with a plurality of grooves; the disordered nanoclusters, the reflector, the laser, and the detector are disposed within the closed housing; the closed shell comprises a first outer wall, a second outer wall, a third outer wall and a pressure sensing film which are sequentially connected end to end; an inner wall is arranged in the closed shell, one end of the inner wall is connected with the first outer wall, and the other end of the inner wall is connected with the second outer wall through the disordered nanoclusters; the first outer wall, the second outer wall, the disordered nanoclusters, and the inner wall form a first enclosed cavity; the first outer wall, the inner wall, the disordered nanoclusters, the second outer wall, the third outer wall and the pressure sensing film form a second closed cavity; the reflecting part is arranged on the third outer wall, and a distance is reserved between the reflecting part and the disordered nanoclusters; the pressure sensing film deforms under the external air pressure, the air pressure in the second closed cavity changes, and the size of the gap changes; the laser and the detector are arranged in the first closed cavity; the detector is used for detecting the reflected light of the light emitted by the laser on the reflecting part.
The invention detects the air pressure according to the difference of the optical cavity thickness formed by the disordered nanoclusters, the reflecting part and the air chamber between the disordered nanoclusters and the reflecting part and the difference of the wavelength of the reflected light. The invention has extremely high detection sensitivity and detection accuracy because the wavelength of the reflected light is very sensitive to the thickness variation of the optical cavity.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a block diagram of an optical cavity pressure sensor provided by an embodiment of the present invention;
FIG. 2 is a schematic diagram of a substrate with a thin middle and thick sides according to an embodiment of the present invention;
fig. 3 is a schematic diagram of the optical gain gas provided in the embodiment of the invention.
Description of the symbols:
11-first outer wall, 12-second outer wall, 13-third outer wall, 14-pressure sensitive film, 2-disordered nanoclusters, 3-reflector, 4-laser, 5-detector, 6-substrate.
Detailed Description
Technical contents, structural features, objects, and technical effects of the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In particular, the terminology used in the embodiments of the present invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
As shown in fig. 1, the optical cavity barometric sensor comprises a closed housing, disordered nanoclusters 2, a reflector 3, a laser 4, and a detector 5. The disordered nanoclusters 2, the reflector 3, the laser 4 and the detector 5 are arranged within a closed housing. The closed shell comprises a first outer wall 11, a second outer wall 12, a third outer wall 13 and a pressure sensing film 14 which are sequentially connected end to end. An inner wall is arranged in the closed shell, one end of the inner wall is connected with the first outer wall 11, and the other end of the inner wall is connected with the second outer wall 12 through the disordered nanoclusters 2. The first outer wall 11, the second outer wall 12, the disordered nanoclusters 2 and the inner wall constitute a first closed cavity. The first outer wall 11, the inner wall, the disordered nanoclusters 2, the second outer wall 12, the third outer wall 13, and the pressure sensing film 14 constitute a second closed cavity. The reflective portion 3 is disposed on the third outer wall 13 with a space between the reflective portion 3 and the disordered nanoclusters 2. The pressure sensing film 14 is deformed by the external air pressure, the air pressure in the second closed cavity is changed, and the distance is changed. A laser 4 and a detector 5 are arranged within the first closed cavity. The disordered nanoclusters 2 are irradiated with light from a laser 4 and reach the reflection portion 3, and a detector 4 detects light reflected from the reflection portion 3 by the light from the laser 5. Wherein the laser 4 and the detector 5 are arranged on the first outer wall 11.
In this embodiment the optical cavity air pressure sensor further comprises a substrate 6, the substrate 6 being arranged within the closed housing, the substrate 6 being located above the disordered nanoclusters 2. Wherein the substrate 6 is made of a transparent and elastic material. The disordered nanoclusters 2 are made of silver nanoparticles. The reflection portion 3 is made of silver.
In use, the disordered nanoclusters 2 are irradiated with light generated by the laser 4 and reach the reflective portion 3. The external air pressure acts on the pressure sensing film 14 to deform the pressure sensing film 14, air in the second closed cavity is compressed, the air pressure in the second closed cavity is changed, the distance between the reflecting part 3 and the disordered nanoclusters 2 is changed, namely, the distance from the disordered nanoclusters 2 to the reflecting part 3 is changed, the wavelength of reflected light generated by the reflecting part 3 is different, and finally the air pressure can be detected by detecting the wavelength of the reflected light through the detector 5.
Specifically, the disordered nanoclusters 2, the reflective portion 3, and the gas cell therebetween constitute an optical cavity, and the reflective portion 3 confines light in the optical cavity, enhancing the interaction of light with the disordered nanoclusters 2. When the thicknesses of the air chambers between the disordered nanoclusters 2 and the reflecting part 3 are different, the coupling efficiency of the optical modes is different, so that the conversion of the limited bandwidth of the disordered nanoclusters 2 to the bandwidth reflection is different, and further, the wavelengths of the reflected light are different. Since the wavelength of the reflected light is very sensitive to the change in the path of the light through the gas cell, a small air pressure acting on the pressure-sensitive film 14 can be detected by the wavelength of the reflected light, and thus the sensor has extremely high detection sensitivity and detection accuracy.
On the other hand, when the gas in the second closed cavity is compressed, the gas also affects the disordered nanoclusters 2, so that the particle concentration in the disordered nanoclusters 2 is changed, the wavelength change of the reflected light is larger, and the detection sensitivity is further improved.
As shown in fig. 2, the thickness of the middle portion of the substrate 6 is smaller than the thickness of the both side portions of the substrate 6. This causes a more significant deformation in the middle of the substrate 6, which makes the change in the distance between the disordered nanoclusters 2 and the reflective portion 3 on the optical path more significant, further improving the detection sensitivity.
As shown in fig. 3, a light gain gas is disposed within the second enclosed cavity. The optical gain gas is arranged, so that the transmission loss of light can be reduced, the light intensity is increased, and the detection precision is improved.
The invention detects the tension according to the different thicknesses of the optical cavities formed by the disordered nanoclusters, the reflecting part and the air chamber between the disordered nanoclusters and the reflecting part and the different wavelengths of the reflected light, and the wavelength of the reflected light is very sensitive to the thickness change of the optical cavity, so the invention has extremely high detection sensitivity and detection precision.
While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various arrangements made without departing from the scope of the broadest interpretation of the appended claims.
Claims (8)
1. An optical cavity baroceptor, comprising a closed housing, a disordered nanocluster, a reflector, a laser, and a detector;
the disordered nanoclusters, the reflector, the laser, and the detector are disposed within the closed housing;
the closed shell comprises a first outer wall, a second outer wall, a third outer wall and a pressure sensing film which are sequentially connected end to end; an inner wall is arranged in the closed shell, one end of the inner wall is connected with the first outer wall, and the other end of the inner wall is connected with the second outer wall through the disordered nanoclusters; the first outer wall, the second outer wall, the disordered nanoclusters, and the inner wall form a first enclosed cavity; the first outer wall, the inner wall, the disordered nanoclusters, the second outer wall, the third outer wall and the pressure sensing film form a second closed cavity;
the reflecting part is arranged on the third outer wall, and a distance is reserved between the reflecting part and the disordered nanoclusters; the pressure sensing film deforms under the external air pressure, the air pressure in the second closed cavity changes, and the size of the gap changes;
the laser and the detector are arranged in the first closed cavity; the detector is used for detecting the reflected light of the light emitted by the laser on the reflecting part.
2. The optical cavity air pressure sensor of claim 1, further comprising a substrate disposed within the enclosed housing, the substrate being located over the disordered nanoclusters.
3. The optical cavity pressure sensor of claim 2, wherein the thickness of the middle portion of the substrate is less than the thickness of the two side portions of the substrate.
4. The optical cavity barometric sensor of claim 2, wherein the substrate is made of a transparent and resilient material.
5. The optical cavity barometric sensor of claim 1, wherein the disordered nanoclusters are made of silver nanoparticles.
6. The optical cavity barometric sensor of claim 1, wherein the reflective portion is made of silver.
7. The optical cavity barometric sensor of claim 1, wherein the laser and the detector are disposed on the first outer wall.
8. The optical cavity gas pressure sensor of claim 1, wherein an optical gain gas is disposed within the second enclosed cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110400817.8A CN113218564A (en) | 2021-04-14 | 2021-04-14 | Optical cavity air pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110400817.8A CN113218564A (en) | 2021-04-14 | 2021-04-14 | Optical cavity air pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113218564A true CN113218564A (en) | 2021-08-06 |
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ID=77087273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110400817.8A Withdrawn CN113218564A (en) | 2021-04-14 | 2021-04-14 | Optical cavity air pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113218564A (en) |
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2021
- 2021-04-14 CN CN202110400817.8A patent/CN113218564A/en not_active Withdrawn
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Application publication date: 20210806 |
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