CN113983135B - ALD (atomic layer deposition) flexible lead screw nut connector for equipment - Google Patents
ALD (atomic layer deposition) flexible lead screw nut connector for equipment Download PDFInfo
- Publication number
- CN113983135B CN113983135B CN202111259243.3A CN202111259243A CN113983135B CN 113983135 B CN113983135 B CN 113983135B CN 202111259243 A CN202111259243 A CN 202111259243A CN 113983135 B CN113983135 B CN 113983135B
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- magnetic ring
- sliding table
- screw nut
- telescopic sleeve
- sleeve
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- 238000000231 atomic layer deposition Methods 0.000 title description 11
- 238000007667 floating Methods 0.000 claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 10
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 9
- 239000010959 steel Substances 0.000 claims abstract description 9
- 238000003825 pressing Methods 0.000 claims description 16
- 210000003437 trachea Anatomy 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 9
- 230000008859 change Effects 0.000 abstract description 5
- 230000002035 prolonged effect Effects 0.000 abstract description 5
- 239000000428 dust Substances 0.000 description 35
- 239000012535 impurity Substances 0.000 description 21
- 238000002347 injection Methods 0.000 description 10
- 239000007924 injection Substances 0.000 description 10
- 238000005461 lubrication Methods 0.000 description 9
- 238000005096 rolling process Methods 0.000 description 9
- 238000007789 sealing Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000004804 winding Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 238000003754 machining Methods 0.000 description 6
- 238000005507 spraying Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
- F16H25/2418—Screw seals, wipers, scrapers or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
- F16H2025/2445—Supports or other means for compensating misalignment or offset between screw and nut
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention belongs to the technical field of connectors, in particular to a flexible lead screw nut connector for ALD equipment, which comprises a screw lever, wherein a lead screw nut is arranged on the screw lever; an inner floating sleeve is connected to the outer wall of the screw nut, an outer floating sleeve is movably connected to the outer part of the inner floating sleeve, arc grooves are formed in the inner floating sleeve and the outer floating sleeve, steel balls are arranged in the arc grooves, a fixing seat is connected to the outer floating sleeve, and a sliding table is fixedly connected to the fixing seat; according to the invention, the inner floating sleeve and the outer floating sleeve which can be movably adjusted along the radial direction are arranged on the screw nut, so that the radial load of the screw, which is generated by the change of the distance between the screw nut and the guide rail of the sliding table in the movement process of the screw, can be effectively reduced, the processing and assembling precision requirements of the screw can be effectively reduced, the assembling time is shortened, the radial load of the screw is reduced, the service life of the screw is prolonged, and the use cost of the screw can be reduced.
Description
Technical Field
The invention belongs to the technical field of connectors, and particularly relates to a flexible lead screw nut connector for ALD equipment.
Background
The existing screw nut and the sliding table are rigidly connected, so that in the reciprocating motion process of the sliding table, the screw is subjected to excessive radial load, the root of the screw support end is subjected to alternating stress, and the screw is easy to fatigue crack under extreme conditions, so that the service life of the screw is greatly reduced.
The existing ALD equipment can not lift the screw rod support of the lifting door and the sliding table guide rail due to technical requirements, the single rigidity can not be improved, the machining precision can also reach the limit of economy and rationality, the parallelism of the screw rod and the sliding table guide rail is low, the screw rod is excessively loaded in the radial direction in the reciprocating motion process of the sliding table due to rigid connection, the screw rod specification has to be improved, the motor power is improved, the design machining precision and the assembly precision are improved as much as possible, and the use cost is increased.
Accordingly, the present invention provides a flexible lead screw nut connector for an ALD apparatus.
Disclosure of Invention
In order to overcome the deficiencies of the prior art, at least one technical problem presented in the background art is solved.
The technical scheme adopted for solving the technical problems is as follows: the invention relates to a flexible lead screw nut connector for ALD equipment, which comprises a screw lever, wherein a lead screw nut is arranged on the screw lever; an inner floating sleeve is connected to the outer wall of the screw nut, an outer floating sleeve is movably connected to the outer portion of the inner floating sleeve, arc grooves are formed in the side walls of the inner floating sleeve and the outer floating sleeve respectively, steel balls are arranged in the arc grooves, a fixing seat is connected to the outer floating sleeve, and a sliding table is fixedly connected to the fixing seat; the existing ALD equipment has the defects that the single-piece rigidity cannot be improved, the machining precision also reaches the limit of economy and rationality due to technical requirements, the parallelism of the screw rod and the sliding table guide rail is low, the screw rod is excessively loaded in the radial direction in the reciprocating motion process of the sliding table due to rigid connection, the screw rod specification has to be improved, the motor power is improved, the design machining precision and the assembly precision are improved as much as possible, and the use cost is increased; when the flexible lead screw nut connector is used, the inner floating sleeve and the outer floating sleeve which can be movably adjusted along the radial direction of the lead screw nut are arranged on the lead screw nut, so that the radial load of the lead screw caused by the change of the distance between the lead screw nut and the guide rail of the sliding table in the movement process of the lead screw can be effectively weakened, the arrangement of the steel balls can limit the lead screw nut to generate angular movement, the processing and assembling precision requirements of the lead screw can be effectively reduced, the assembling time is shortened, the radial load of the lead screw is reduced, the service life of the lead screw is prolonged, and the use cost of the lead screw is reduced.
Preferably, the two ends of the screw rod are respectively provided with a supporting plate, the middle part of the sliding table is provided with an avoidance groove, the screw rod penetrates through the avoidance groove, a telescopic sleeve is respectively connected between the end face of the sliding table and the corresponding supporting plate, and the side wall of the telescopic sleeve is arranged in a wave shape and can stretch along the axial direction of the screw rod; because current lead screw pole and lead screw nut connector are in non-operating condition for a long time, and expose under external environment for a long time, receive the pollution of dust impurity easily, especially when the dust falls in the clearance lubrication position department of two floating sleeves, lead to the lubrication medium of lubrication position to go bad or inefficacy easily, the flexible cover that sets up this moment can wrap up the protection to lead screw pole and two structures such as floating sleeve, reduce the contact of lead screw and external dust moisture, the life of lead screw and connector has been improved, simultaneously when the axial motion of slip table along the screw lever, the slip table can compress and make it folding to the flexible cover of direction of motion one side this moment, the slip table can drive another flexible cover simultaneously and stretch for flexible cover also can carry out effectual protection to the lead screw at the slip table during operation.
Preferably, one ends of the two telescopic sleeves, which are close to the end face of the sliding table, are respectively provided with a magnetic ring, the magnetic rings can attract the sliding table, and the magnetic poles of one ends of the two magnetic rings, which are close to each other, are opposite; the magnetic ring can be fixed on the slip table respectively with slip table looks attractive form with flexible cover tip, make things convenient for the staff to open flexible cover and maintain the connector, simultaneously when the slip table drives the flexible cover of one side and elongates to certain state, this flexible cover can drive the magnetic ring of connection and slip table and break away from mutually this moment, and like the spring atress, extension and compression that can be repeated, thereby can tremble the clearance that falls off surface pile up dust impurity, simultaneously when the slip table moves to a certain distance to one side that is close to this flexible cover, this moment the magnetic ring on this flexible cover can adsorb the laminating with the slip table terminal surface again under the attraction of slip table and another magnetic ring, thereby can wrap up and protect the lead screw again.
Preferably, the outer walls of the free ends of the two telescopic sleeves are respectively fixedly connected with an arc-shaped pull rod, and the other ends of the pull rods respectively extend into the concave parts of the opposite telescopic sleeves; when one of the telescopic sleeves stretches gradually, the free end of the pull rod on the other telescopic sleeve can squeeze and slide on the concave part on the telescopic sleeve, when the end part of the pull rod instantaneously slides to the other concave part from one concave part, the pull rod can drive the telescopic sleeve on the concave part to shake, so that dust and impurities on the surface of the telescopic sleeve can be shaken off, and the cleaning capacity of dust and impurities on the surface of the telescopic sleeve is further improved.
Preferably, the pull rod consists of a support rod and a shaking block, one end of the support rod is fixedly connected with the telescopic sleeve, the shaking block is rotationally connected with the other end of the support rod through a torsion spring, a limiting block is arranged at the end part of the support rod at one side of the shaking block, and the limiting block can limit the rotation of the free end of the shaking block to the side far away from the telescopic sleeve; when one of them flexible cover is stretched gradually, the shake piece of the bracing piece tip of another flexible cover can extrude the slip with corresponding depressed part under the effect of stopper this moment to can reach the effect that above-mentioned flexible cover shakes, when the flexible cover of being stretched contracts gradually and resets simultaneously, the stopper is no longer spacing to the reverse rotation of shake piece this moment, thereby makes the shake piece can not carry out spacingly to the flexible cover depressed part under the shrink state, makes the reset of flexible cover can effectively go on, and makes the work of shake piece can reciprocate.
Preferably, a plurality of mutually communicated pressure bags are arranged at the concave position of the inner wall of the free end of the telescopic sleeve, a first one-way valve is arranged on the pressure bags, an air injection groove is formed in the outer side wall of the magnetic ring, a second one-way valve is arranged in the air injection groove, and the inner end of the air injection groove is communicated with the pressure bag positioned at the outermost end of the telescopic sleeve through an air pipe; when the telescopic sleeve is straightened and the magnetic ring at the end part is separated from the sliding table, the telescopic sleeve can stretch repeatedly, when the telescopic sleeve contracts, the telescopic sleeve can extrude the pressing bag, the first one-way valve is in a closed state, the second one-way valve is in an open state, so that gas in the pressing bag can be sprayed out from the air spraying groove, dust impurities shaken off on the telescopic sleeve are blown to one side far away from the screw rod, and the situation that the dust impurities scattered everywhere are contacted with the screw rod is reduced.
Preferably, a group of annular uniformly-distributed spiral winding pipes are connected to the upper end face of the fixed seat close to the screw nut, the winding pipes can be opened when being inflated, a sealing cavity for wrapping the inner floating sleeve and the outer floating sleeve can be formed, and air passages for communicating the ends of the winding pipes with the air injection groove are formed in the fixed seat, the sliding table and the inner part of the magnetic ring at the bottom of the sliding table; the roll-up pipe is similar to a 'blow dragon' structure, when the telescopic sleeve at the bottom end of the sliding table is gradually compressed, namely, when the telescopic sleeve at the top of the sliding table is gradually straightened, the gas of the pressure bag in the telescopic sleeve at the bottom can be gradually pressed into the roll-up pipe through the air passage, so that the roll-up pipe is gradually opened, the two floating sleeves are wrapped, the situation that dust and impurities fall at the two floating sleeves when the telescopic sleeve at the subsequent top is separated from the sliding table and shakes dust is reduced, and the cleanliness of the connector is further improved.
Preferably, the magnetic ring is arranged in a cone shape, the section width of the magnetic block is gradually reduced from one side close to the telescopic sleeve to one side far away from the telescopic sleeve, and clamping rings matched with the sliding table in shape are respectively arranged on the end surfaces of the sliding table and the magnetic ring; through setting up shape and the snap ring of magnetic ring for the magnetic ring can be accurate reset under the effect of snap ring, and make the stable alignment intercommunication of air flue in bottom magnetic ring and the air flue on the slip table, when the slip table compresses the flexible cover of bottom simultaneously, the flexible cover of bottom compressed can support the magnetic ring of connection at the snap ring inside this moment, thereby reduces the condition that gas in the press bag was revealed from between magnetic ring and the slip table when the air flue flowed.
Preferably, the end part of the air passage in the magnetic ring at the bottom of the sliding table is rotationally connected with a plugging plate through a torsion spring, the end part of the sliding table, which is close to the air passage on the plugging plate, is slidably connected with a sliding block, the magnetic ring can attract the sliding block, an elastic piece is connected between the sliding block and the inner end of the corresponding air passage, a communicating groove communicated with the end part of the inner end of the sliding block is formed in the side wall of the outer end of the sliding block, and the outer end of the sliding block is connected with a push rod; when the magnetic ring at the bottom of the sliding table is clamped with the clamping ring, the magnetic ring attracts the sliding block at the moment, so that the sliding block moves to one side close to the plugging plate until the outer end of a communicating groove on the sliding block is communicated with an air passage on the magnetic ring, meanwhile, the sliding block can drive the push rod to extrude the end part of the plugging plate and enable the push rod to rotate and open, so that gas in the pressure bag can flow into the rolling pipe through the communicated air passage, when the magnetic ring at the bottom of the sliding table is separated from the clamping ring, the sliding block slides into the air passage on the sliding table under the action of the elastic block, and the communicating groove is plugged by the inner wall of the air passage of the sliding table, so that the rolling pipe is in a plugging state, the loss of gas in the rolling pipe is reduced, the air passage on the magnetic ring can be plugged by the plugging plate after the sliding block is rotated and reset, the gas in the subsequent pressure bag is reduced from the air passage, the gas in the pressure bag can be ejected from the air injection groove, and the dust shaken off by the telescopic sleeve can be blown away effectively.
Preferably, the end part of the air passage on the sliding table, which is close to the plugging plate, is connected with an arc-shaped elastic sheet, the free end of the elastic sheet is bent towards one end, which is close to the sliding block, of the sliding table, one side, which is close to the plugging plate, of the elastic sheet is connected with an annular sealing bag, and a pull rope is connected between the free end of the elastic sheet and the outer end of the sliding block; when the slider moves to shutoff board one side, the slider can extrude the elastic piece tip this moment for the free end of elastic piece can be crooked in the twinkling of an eye to shutoff board one side after warp to certain state, and extrudees sealed bag, makes sealed bag can seal the faying face between magnetic ring and the snap ring, reduces the gaseous condition of revealing from this department in the press bag when flowing, and simultaneously when the slider resets, the slider can be through the stay cord with the elastic piece tensile to initial state, thereby makes the work of elastic piece can reciprocate.
The beneficial effects of the invention are as follows:
1. according to the invention, the inner floating sleeve and the outer floating sleeve which can be movably adjusted along the radial direction are arranged on the screw nut, so that the radial load of the screw, which is generated by the change of the distance between the screw nut and the guide rail of the sliding table, can be effectively weakened in the movement process of the screw, and the arrangement of the steel ball can limit the screw nut to generate angular movement.
2. According to the invention, the telescopic sleeves are arranged, when the sliding table moves along the axial direction of the screw lever, the sliding table can compress and fold the telescopic sleeves at one side of the moving direction, and meanwhile, the sliding table can drive the other telescopic sleeve to stretch, so that the structures such as the screw rod and the two floating sleeves can be wrapped and protected, the contact between the screw rod and external dust and moisture is reduced, and the service life of the screw rod and the connector is prolonged.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic structural view of a first embodiment;
FIG. 2 is a schematic diagram of the structure of a second embodiment;
FIG. 3 is an enlarged view at A in FIG. 2;
fig. 4 is a schematic structural view of the second embodiment in an unfolded state of the winding tube;
fig. 5 is a schematic view of a partial structure of the inside of the bottom end of the slide table in the second embodiment;
FIG. 6 is an enlarged view at B in FIG. 5;
in the figure: the device comprises a screw lever 1, a screw nut 2, an inner floating sleeve 3, an outer floating sleeve 4, an arc-shaped groove 5, a steel ball 6, a fixed seat 7, a sliding table 8, a supporting plate 9, an avoidance groove 10, a telescopic sleeve 11, a magnetic ring 12, a pull rod 13, a supporting rod 14, a shaking block 15, a limiting block 16, a pressing bag 17, a first check valve 18, an air injection groove 19, a second check valve 20, an air pipe 21, a furling pipe 22, an air passage 23, a clamping ring 24, a blocking plate 25, a sliding block 26, an elastic piece 27, a communicating groove 28, a push rod 29, an elastic piece 30, a sealing bag 31 and a pull rope 32.
Detailed Description
The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Embodiment one:
referring to fig. 1, a flexible lead screw nut 2 connector for ALD equipment according to an embodiment of the present invention includes a screw lever 1, wherein a lead screw nut 2 is provided on the screw lever 1; an inner floating sleeve 3 is connected to the outer wall of the screw nut 2, an outer floating sleeve 4 is movably connected to the outer part of the inner floating sleeve 3, arc grooves 5 are respectively formed in the side walls of the inner floating sleeve 3 and the outer floating sleeve 4, steel balls 6 are arranged in the arc grooves 5, a fixed seat 7 is connected to the outer floating sleeve 4, and a sliding table 8 is fixedly connected to the fixed seat 7; the existing ALD equipment can not lift the screw rod support of the door and the guide rail of the sliding table 8 due to technical requirements, the single rigidity can not be lifted, the machining precision can also reach the economical and reasonable limit, the parallelism between the screw rod and the guide rail of the sliding table 8 is low, the screw rod is excessively loaded in the radial direction in the reciprocating motion process of the sliding table 8 due to rigid connection, the screw rod specification can not be improved, the motor power can be improved, the design machining precision and the assembly precision can be improved as much as possible, and the use cost can be increased; when the flexible lead screw nut 2 connector is used, the inner floating sleeve 3 and the outer floating sleeve 4 which can be movably adjusted along the radial direction of the lead screw nut 2 are arranged on the lead screw nut 2, so that the radial load of the lead screw generated by the change of the distance between the lead screw nut 2 and the guide rail of the sliding table 8 in the movement process of the lead screw can be effectively weakened, and the arrangement of the steel balls can limit the lead screw nut 2 to generate angular movement.
Embodiment two:
as shown in fig. 2-6, comparative example one, in which another embodiment of the present invention is:
the two ends of the screw rod 1 are respectively provided with a supporting plate 9, the middle part of the sliding table 8 is provided with an avoidance groove 10, the screw rod 1 penetrates through the avoidance groove 10, a telescopic sleeve 11 is respectively connected between the end surface of the sliding table 8 and the corresponding supporting plate 9, and the side wall of the telescopic sleeve 11 is arranged in a wave shape and can stretch along the axial direction of the screw lever 1; because current lead screw pole 1 is in non-operating condition with lead screw nut 2 connector for a long time, and expose under external environment for a long time, be liable to wet or receive dust impurity's pollution, especially when the dust falls in the clearance lubrication position department of two floating sleeves, lead to lubrication medium deterioration or the inefficacy of lubrication position easily, telescopic cover 11 that sets up this moment can wrap up the protection to lead screw pole 1 and two structures such as floating sleeves, lead screw and external dust moisture's contact has been reduced, the life of lead screw and connector has been improved, simultaneously when the axial motion of slip table 8 along lead screw pole 1, slip table 8 can compress and make folding to the telescopic cover 11 of direction of motion one side this moment, slip table 8 can drive another telescopic cover 11 simultaneously and stretch, make telescopic cover 11 also can carry out effectual protection to the lead screw at slip table 8 during operation.
The two telescopic sleeves 11 are respectively provided with a magnetic ring 12 at one end close to the end face of the sliding table 8, the magnetic rings 12 can attract the sliding table 8, and the magnetic poles at one end close to the two magnetic rings 12 are opposite; the magnetic ring 12 can be fixed the telescopic sleeve 11 tip respectively on slip table 8 with slip table 8 attractive form, make things convenient for the staff to open telescopic sleeve 11 and maintain the connector, simultaneously when slip table 8 drives the telescopic sleeve 11 of one side to lengthen to certain state, this telescopic sleeve 11 can drive the magnetic ring 12 of connection and slip table 8 and break away from mutually this moment, and like the spring atress, extension and compression that can be repeated, thereby can shake off the clearance with surface pile up dust impurity, simultaneously when slip table 8 moves to a certain distance to the one side that is close to this telescopic sleeve 11, the magnetic ring 12 on this telescopic sleeve 11 can adsorb the laminating with slip table 8 terminal surface again under the attraction of slip table 8 and another magnetic ring 12 this moment, thereby can wrap up and protect the lead screw again.
The outer walls of the free ends of the two telescopic sleeves 11 are respectively fixedly connected with an arc-shaped pull rod 13, and the other ends of the pull rods 13 respectively extend into the concave parts of the opposite telescopic sleeves 11; when one of the telescopic sleeves 11 gradually stretches, the free end of the pull rod 13 on the other telescopic sleeve 11 can squeeze and slide on the concave part on the telescopic sleeve 11, and when the end part of the pull rod 13 instantaneously slides to the other concave part from one concave part, the pull rod 13 can drive the telescopic sleeve 11 at the concave part to shake, so that dust and impurities on the surface of the telescopic sleeve can be shaken off, and the cleaning capacity of dust and impurities on the surface of the telescopic sleeve 11 is further improved.
The pull rod 13 consists of a support rod 14 and a shaking block 15, one end of the support rod 14 is fixedly connected with the telescopic sleeve 11, the shaking block 15 is rotatably connected with the other end of the support rod 14 through a torsion spring, a limiting block 16 is arranged at the end part of the support rod 14 at one side of the shaking block 15, and the limiting block 16 can limit the rotation of the free end of the shaking block 15 to the side far away from the telescopic sleeve 11; when one of the telescopic sleeves 11 is gradually stretched, the shaking block 15 at the end part of the supporting rod 14 of the other telescopic sleeve 11 can be extruded and slid with the corresponding concave part under the action of the limiting block 16, so that the shaking effect of the telescopic sleeve 11 can be achieved, and meanwhile, when the stretched telescopic sleeve 11 is gradually contracted and reset, the limiting block 16 does not limit the reverse rotation of the shaking block 15, so that the shaking block 15 does not limit the concave part of the telescopic sleeve 11 in a contracted state, the resetting of the telescopic sleeve 11 can be effectively carried out, and the shaking block 15 can work in a reciprocating manner.
The inner wall depression of the free end of the telescopic sleeve 11 is provided with a plurality of mutually communicated pressure bags 17, the pressure bags 17 are provided with a first check valve 18, the outer side wall of the magnetic ring 12 is provided with an air injection groove 19, the air injection groove 19 is internally provided with a second check valve 20, and the inner end of the air injection groove 19 is communicated with the pressure bag 17 positioned at the outermost end of the telescopic sleeve 11 through an air pipe 21; when the telescopic sleeve 11 is straightened and the magnetic ring 12 at the end part is separated from the sliding table 8, the telescopic sleeve 11 can stretch repeatedly, when the telescopic sleeve 11 contracts, the telescopic sleeve 11 can extrude the pressing bag 17, the first check valve 18 is in a closed state, the second check valve 20 is in an open state, so that gas in the pressing bag 17 can be sprayed out from the air spraying groove 19, dust impurities shaken off on the telescopic sleeve 11 are blown to one side far away from the screw rod, and the situation that the dust impurities scattered everywhere are contacted with the screw rod is reduced.
The fixed seat 7 is connected with a group of annular uniformly-distributed spiral winding pipes 22 near the upper end face of the screw nut 2, the winding pipes 22 can be opened when being inflated, a sealing cavity for wrapping the inner floating sleeve 3 and the outer floating sleeve 4 can be formed, and air passages 23 for communicating the ends of the winding pipes 22 with the air injection grooves 19 are formed in the fixed seat 7, the sliding table 8 and the magnetic ring 12 at the bottom of the sliding table 8; the roll-up pipe 22 is similar to a 'blowing dragon' structure, when the telescopic sleeve 11 positioned at the bottom end of the sliding table 8 is gradually compressed, namely, when the telescopic sleeve 11 positioned at the top of the sliding table 8 is gradually straightened, gas of the pressure bag 17 in the bottom telescopic sleeve 11 can be gradually pressed into the roll-up pipe 22 through the air passage 23, so that the roll-up pipe 22 is gradually opened, the two floating sleeves are wrapped, the situation that dust and impurities fall at the two floating sleeves when the telescopic sleeve 11 at the subsequent top is separated from the sliding table 8 and shakes dust is reduced, and the cleanliness of the connector is further improved.
The magnetic ring 12 is arranged in a cone shape, the cross section width of the magnetic block is gradually reduced from one side close to the telescopic sleeve 11 to one side far away from the telescopic sleeve 11, and clamping rings 24 matched with the shapes of the sliding table 8 and the magnetic ring 12 are respectively arranged on the end surfaces of the sliding table 8 and the magnetic ring 12; through setting up the shape and the snap ring 24 of magnetic ring 12 for magnetic ring 12 can accurate reset under the effect of snap ring 24, and make the stable alignment intercommunication of air flue 23 in bottom magnetic ring 12 and the air flue 23 on slip table 8, when slip table 8 compresses bottom telescopic sleeve 11 simultaneously, the telescopic sleeve 11 that the bottom was compressed can support the magnetic ring 12 of connection at this moment inside snap ring 24, thereby reduces the condition that the gas in the press bag 17 was revealed from between magnetic ring 12 and slip table 8 when air flue 23 flowed.
The end part of an air passage 23 in the magnetic ring 12 at the bottom of the sliding table 8 is rotationally connected with a plugging plate 25 through a torsion spring, the end part of the sliding table 8, which is close to the air passage 23 on the plugging plate 25, is slidably connected with a sliding block 26, the magnetic ring 12 can attract the sliding block 26, an elastic piece 27 is connected between the sliding block 26 and the inner end of the corresponding air passage 23, a communicating groove 28 communicated with the end part of the inner end of the sliding block 26 is formed in the side wall of the outer end of the sliding block 26, and the outer end of the sliding block 26 is connected with a push rod 29; when the magnetic ring 12 at the bottom of the sliding table 8 is clamped with the clamping ring 24, the magnetic ring 12 attracts the sliding block 26 at the moment, so that the sliding block 26 moves to one side close to the plugging plate 25 until the outer end of the communicating groove 28 on the sliding block 26 is communicated with the air passage 23 on the magnetic ring 12, meanwhile, the sliding block 26 can drive the push rod 29 to extrude the end part of the plugging plate 25 and enable the end part of the plugging plate 25 to rotate and open, so that gas in the pressing bag 17 can flow into the interior of the furling pipe 22 through the communicated air passage 23, when the magnetic ring 12 at the bottom of the sliding table 8 is separated from the clamping ring 24, the sliding block 26 slides into the air passage 23 on the sliding table 8 under the action of the elastic block at the moment, and the communicating groove 28 is plugged by the inner wall of the air passage 23 of the sliding table 8, so that the furling pipe 22 is in a plugging state, the loss of gas in the furling pipe 22 is reduced, and meanwhile, the plugging plate 25 can plug the air passage 23 on the magnetic ring 12 after rotating and resetting, the gas in the subsequent pressing bag 17 flows out of the air passage 23, so that the gas in the pressing bag 17 can be sprayed out of the air spraying groove 19 and can shake the air passage 19, and effectively shake dust and dirt and dust.
The end, close to the plugging plate 25, of the air channel 23 on the sliding table 8 is connected with an arc-shaped elastic sheet 30, the free end of the elastic sheet 30 is bent towards one end, close to the sliding block 26, of the elastic sheet 30, one side, close to the plugging plate 25, of the elastic sheet 30 is connected with an annular sealing bag 31, and a pull rope 32 is connected between the free end of the elastic sheet 30 and the outer end of the sliding block 26; when the slider 26 moves to the plugging plate 25 side, the slider 26 can squeeze the end of the elastic sheet 30 at this time, so that the free end of the elastic sheet 30 can be instantly bent to the plugging plate 25 side after being deformed to a certain state, and the sealing bag 31 is squeezed, so that the sealing bag 31 can seal the joint surface between the magnetic ring 12 and the clamping ring 24, the leakage of the gas in the pressure bag 17 from the joint surface during flowing is reduced, and meanwhile, when the slider 26 is reset, the slider 26 can stretch the elastic sheet 30 to an initial state through the pull rope 32, so that the operation of the elastic sheet 30 can be performed reciprocally.
Working principle: the inner floating sleeve 3 and the outer floating sleeve 4 which can be movably adjusted along the radial direction of the screw nut 2 are arranged on the screw nut, so that the radial load of the screw, which is generated by the change of the distance between the screw nut 2 and the guide rail of the sliding table 8 in the movement process of the screw, can be effectively weakened, the arrangement of the steel balls can limit the screw nut 2 to generate angular movement, the processing and assembly precision requirements of the screw can be effectively reduced, the assembly time is shortened, the radial load of the screw is reduced, the service life of the screw is prolonged, and the use cost of the screw can be reduced; because the existing connector of the screw rod 1 and the screw nut 2 is in a non-working state for a long time and is exposed to the external environment for a long time, the connector is easy to be affected with damp or polluted by dust impurities, especially when dust falls at the gap lubrication part of the two floating sleeves, the lubrication medium of the lubrication part is easy to deteriorate or lose efficacy, at the moment, the telescopic sleeve 11 can wrap and protect the structures of the screw rod 1 and the two floating sleeves and the like, the contact of the screw rod with the external dust moisture is reduced, the service life of the screw rod and the connector is prolonged, meanwhile, when the sliding table 8 moves along the axial direction of the screw rod 1, the sliding table 8 can compress and fold the telescopic sleeve 11 at one side of the moving direction, and meanwhile, the sliding table 8 can drive the other telescopic sleeve 11 to stretch, so that the telescopic sleeve 11 can also effectively protect the screw rod when the sliding table 8 works; the magnetic ring 12 can be attracted to the sliding table 8 to fix the end parts of the telescopic sleeves 11 on the sliding table 8 respectively, so that workers can conveniently open the telescopic sleeves 11 and maintain the connector, meanwhile, when the sliding table 8 drives one side of the telescopic sleeves 11 to stretch to a certain state, the telescopic sleeves 11 can drive the connected magnetic rings 12 to be separated from the sliding table 8, and can repeatedly stretch and compress like a spring, so that dust impurities accumulated on the surface can be shaken off and cleaned, and meanwhile, when the sliding table 8 moves to a certain distance to one side close to the telescopic sleeves 11, the magnetic rings 12 on the telescopic sleeves 11 can be adsorbed and attached to the end surface of the sliding table 8 again under the attraction of the sliding table 8 and the other magnetic ring 12, and thus, the lead screw can be wrapped and protected again; when one telescopic sleeve 11 is gradually stretched, the free end of the pull rod 13 on the other telescopic sleeve 11 can squeeze and slide on the concave part on the telescopic sleeve 11, and when the end part of the pull rod 13 instantaneously slides from one concave part to the other concave part, the pull rod 13 can drive the telescopic sleeve 11 at the concave part to shake, so that dust and impurities on the surface of the telescopic sleeve can be shaken off, and the cleaning capacity of dust and impurities on the surface of the telescopic sleeve 11 is further improved; when one of the telescopic sleeves 11 is gradually stretched, the shaking block 15 at the end part of the supporting rod 14 of the other telescopic sleeve 11 can squeeze and slide with the corresponding concave part under the action of the limiting block 16, so that the shaking effect of the telescopic sleeve 11 can be achieved, and meanwhile, when the stretched telescopic sleeve 11 is gradually contracted and reset, the limiting block 16 does not limit the reverse rotation of the shaking block 15, so that the shaking block 15 does not limit the concave part of the telescopic sleeve 11 in a contracted state, the resetting of the telescopic sleeve 11 can be effectively carried out, and the work of the shaking block 15 can be carried out in a reciprocating manner; when the telescopic sleeve 11 is straightened and the magnetic ring 12 at the end part is separated from the sliding table 8, the telescopic sleeve 11 can repeatedly stretch, when the telescopic sleeve 11 is contracted, the telescopic sleeve 11 can squeeze the pressing bag 17, the first one-way valve 18 is in a closed state, the second one-way valve 20 is in an open state, so that gas in the pressing bag 17 can be sprayed out from the air spraying groove 19, dust impurities shaken off on the telescopic sleeve 11 are blown to one side far away from the screw rod, and the situation that the dust impurities scattered everywhere are contacted with the screw rod is reduced; the rolling tube 22 is similar to a 'blowing dragon' structure, when the telescopic sleeve 11 positioned at the bottom end of the sliding table 8 is gradually compressed, namely, the telescopic sleeve 11 positioned at the top of the sliding table 8 is gradually straightened, gas of the pressure bag 17 in the telescopic sleeve 11 at the bottom can be gradually pressed into the rolling tube 22 through the air passage 23, so that the rolling tube 22 is gradually opened, the two floating sleeves are wrapped, the situation that dust and impurities fall at the two floating sleeves when the telescopic sleeve 11 at the subsequent top is separated from the sliding table 8 and shakes dust is reduced, and the cleanliness of the connector is further improved; through setting the shape of the magnetic ring 12 and the snap ring 24, the magnetic ring 12 can be accurately reset under the action of the snap ring 24, and the air passage 23 in the bottom magnetic ring 12 and the air passage 23 on the sliding table 8 are stably aligned and communicated, meanwhile, when the sliding table 8 compresses the bottom telescopic sleeve 11, the telescopic sleeve 11 with the compressed bottom can press the connected magnetic ring 12 inside the snap ring 24, so that the condition that gas in the pressure bag 17 leaks from the magnetic ring 12 to the sliding table 8 when the air passage 23 flows is reduced; when the magnetic ring 12 at the bottom of the sliding table 8 is clamped with the clamping ring 24, the magnetic ring 12 attracts the sliding block 26 at the moment, so that the sliding block 26 moves to one side close to the plugging plate 25 until the outer end of the communicating groove 28 on the sliding block 26 is communicated with the air passage 23 on the magnetic ring 12, meanwhile, the sliding block 26 can drive the push rod 29 to extrude the end part of the plugging plate 25 and enable the end part of the plugging plate 25 to rotate and open, so that gas in the pressing bag 17 can flow into the interior of the rolling pipe 22 through the communicated air passage 23, when the magnetic ring 12 at the bottom of the sliding table 8 is separated from the clamping ring 24, the sliding block 26 slides into the air passage 23 on the sliding table 8 under the action of the elastic block at the moment, and the communicating groove 28 is plugged by utilizing the inner wall of the air passage 23 of the sliding table 8, so that the rolling pipe 22 is in a plugging state, the loss of gas in the rolling pipe 22 is reduced, and meanwhile, the plugging plate 25 can plug the air passage 23 on the magnetic ring 12 after rotating and resetting, the gas in the subsequent pressing bag 17 can flow out from the air passage 23, so that the gas in the pressing bag 17 can be sprayed out of the air spraying groove 19 and can shake dust and dirt effectively from the air passage 11; when the slider 26 moves to the plugging plate 25 side, the slider 26 can squeeze the end of the elastic sheet 30 at this time, so that the free end of the elastic sheet 30 can be instantly bent to the plugging plate 25 side after being deformed to a certain state, and the sealing bag 31 is squeezed, so that the sealing bag 31 can seal the joint surface between the magnetic ring 12 and the clamping ring 24, the leakage of the gas in the pressure bag 17 from the joint surface during flowing is reduced, and meanwhile, when the slider 26 is reset, the slider 26 can stretch the elastic sheet 30 to an initial state through the pull rope 32, so that the operation of the elastic sheet 30 can be performed reciprocally.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the foregoing embodiments, and that the foregoing embodiments and description are merely illustrative of the principles of this invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, and these changes and modifications fall within the scope of the invention as hereinafter claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. The flexible lead screw nut (2) connector for the ALD equipment comprises a screw lever (1), wherein the lead screw nut (2) is arranged on the screw lever (1); the method is characterized in that: an inner floating sleeve (3) is connected to the outer wall of the screw nut (2), an outer floating sleeve (4) is movably connected to the outer portion of the inner floating sleeve (3), arc grooves (5) are respectively formed in the side walls of the inner floating sleeve (3) and the outer floating sleeve (4), steel balls (6) are arranged in the arc grooves (5), a fixing seat (7) is connected to the outer floating sleeve (4), and a sliding table (8) is fixedly connected to the fixing seat (7);
the novel screw rod is characterized in that support plates (9) are respectively arranged at two ends of the screw rod (1), an avoidance groove (10) is formed in the middle of the sliding table (8), the screw rod (1) penetrates through the avoidance groove (10), a telescopic sleeve (11) is respectively connected between the end face of the sliding table (8) and the corresponding support plate (9), and the side wall of the telescopic sleeve (11) is arranged to be wavy and can stretch along the axial direction of the screw rod (1);
one end of each telescopic sleeve (11) close to the end face of the sliding table (8) is provided with a magnetic ring (12), each magnetic ring (12) can attract the sliding table (8), and the magnetic poles of one end of each magnetic ring (12) close to each other are opposite;
the outer walls of the free ends of the two telescopic sleeves (11) are respectively fixedly connected with an arc-shaped pull rod (13), and the other ends of the pull rods (13) respectively extend into the concave parts of the opposite telescopic sleeves (11);
the pull rod (13) consists of a support rod (14) and a shaking block (15), one end of the support rod (14) is fixedly connected with the telescopic sleeve (11), the shaking block (15) is rotationally connected with the other end of the support rod (14) through a torsion spring, a limiting block (16) is arranged at the end part of the support rod (14) at one side of the shaking block (15), and the limiting block (16) can limit the rotation of the free end of the shaking block (15) to the side far away from the telescopic sleeve (11);
the inner wall concave part of flexible cover (11) free end is equipped with a plurality of pressing bags (17) of intercommunication each other, be equipped with check valve (18) No. one on pressing bag (17), jet-propelled groove (19) have been seted up on the lateral wall of magnetic ring (12), jet-propelled groove (19) are inside to be equipped with No. two check valves (20), and jet-propelled groove (19) inner is linked together through trachea (21) with pressing bag (17) that are located flexible cover (11) outer end.
2. A flexible lead screw nut (2) connector for ALD equipment according to claim 1, characterized in that: the utility model discloses a magnetic ring (12) of fixing base (7), slip table (8) and slip table (8) bottom is connected with a set of annular equipartition and is spiral roll-up pipe (22), roll-up pipe (22) inside can open when inflating to can form the sealed cavity that carries out the parcel to interior floating cover (3) and outer floating cover (4), air flue (23) of intercommunication roll-up pipe (22) tip and jet-propelled groove (19) have been seted up to inside fixing base (7), slip table (8) and slip table (8) bottom's magnetic ring (12).
3. A flexible lead screw nut (2) connector for ALD equipment according to claim 2, characterized in that: the magnetic ring (12) is arranged in a cone shape, the cross section width of the magnetic ring (12) gradually reduces from one side close to the telescopic sleeve (11) to one side far away from the telescopic sleeve (11), and clamping rings (24) matched with the sliding table (8) in shape are respectively arranged on the end faces of the sliding table (8) and the magnetic ring (12).
4. A flexible lead screw nut (2) connector for ALD equipment according to claim 3, characterized in that: air flue (23) tip in slip table (8) bottom magnetic ring (12) is connected with shutoff board (25) through the torsional spring rotation, slip table (8) are close to air flue (23) tip sliding connection on shutoff board (25) have slider (26), magnetic ring (12) can attract slider (26), be connected with elastic component (27) between slider (26) and the inner of corresponding air flue (23), set up intercommunication groove (28) of intercommunication its inner tip on the lateral wall of slider (26) outer end, just slider (26) outer end is connected with push rod (29).
5. A flexible lead screw nut (2) connector for ALD equipment according to claim 4, characterized by: the end connection that air flue (23) on slip table (8) are close to shutoff board (25) has curved elastic sheet (30), the free end of elastic sheet (30) is crooked to the one end that is close to slider (26), one side that elastic sheet (30) is close to shutoff board (25) is connected with annular seal bag (31), be connected with stay cord (32) between the free end of elastic sheet (30) and slider (26) outer end.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111259243.3A CN113983135B (en) | 2021-10-28 | 2021-10-28 | ALD (atomic layer deposition) flexible lead screw nut connector for equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111259243.3A CN113983135B (en) | 2021-10-28 | 2021-10-28 | ALD (atomic layer deposition) flexible lead screw nut connector for equipment |
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| CN113983135A CN113983135A (en) | 2022-01-28 |
| CN113983135B true CN113983135B (en) | 2024-02-23 |
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| CN202111259243.3A Active CN113983135B (en) | 2021-10-28 | 2021-10-28 | ALD (atomic layer deposition) flexible lead screw nut connector for equipment |
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| CN115237170B (en) * | 2022-07-05 | 2023-08-04 | 连城凯克斯科技有限公司 | Protective gas flow control equipment during silicon carbide production |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4074587A (en) * | 1976-07-27 | 1978-02-21 | Roltra S.P.A. | Screw-nut screw transmission coupling |
| CN201866191U (en) * | 2010-08-31 | 2011-06-15 | 芜湖市长江起重设备制造有限公司 | Spherical nut sliding lead screw transmission device |
| CN206368951U (en) * | 2017-01-05 | 2017-08-01 | 东莞市宝康机械设备有限公司 | A kind of protection device of leading screw |
| DE102016104819A1 (en) * | 2016-03-16 | 2017-09-21 | Hiwin Technologies Corp. | Dust-protected device for a ball screw drive |
| CN207705973U (en) * | 2017-12-28 | 2018-08-07 | 沈阳邦嘉科技有限公司 | A kind of ball-screw serial motors seat |
| CN208295067U (en) * | 2018-06-15 | 2018-12-28 | 大连连城数控机器股份有限公司 | A kind of nut swivel slide feed arrangement |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9334937B2 (en) * | 2013-07-03 | 2016-05-10 | Pacific Bearing Company | Floating nut and carriage assembly |
-
2021
- 2021-10-28 CN CN202111259243.3A patent/CN113983135B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4074587A (en) * | 1976-07-27 | 1978-02-21 | Roltra S.P.A. | Screw-nut screw transmission coupling |
| CN201866191U (en) * | 2010-08-31 | 2011-06-15 | 芜湖市长江起重设备制造有限公司 | Spherical nut sliding lead screw transmission device |
| DE102016104819A1 (en) * | 2016-03-16 | 2017-09-21 | Hiwin Technologies Corp. | Dust-protected device for a ball screw drive |
| CN206368951U (en) * | 2017-01-05 | 2017-08-01 | 东莞市宝康机械设备有限公司 | A kind of protection device of leading screw |
| CN207705973U (en) * | 2017-12-28 | 2018-08-07 | 沈阳邦嘉科技有限公司 | A kind of ball-screw serial motors seat |
| CN208295067U (en) * | 2018-06-15 | 2018-12-28 | 大连连城数控机器股份有限公司 | A kind of nut swivel slide feed arrangement |
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