CN113983135A - Flexible lead screw nut connector for ALD (atomic layer deposition) equipment - Google Patents
Flexible lead screw nut connector for ALD (atomic layer deposition) equipment Download PDFInfo
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- CN113983135A CN113983135A CN202111259243.3A CN202111259243A CN113983135A CN 113983135 A CN113983135 A CN 113983135A CN 202111259243 A CN202111259243 A CN 202111259243A CN 113983135 A CN113983135 A CN 113983135A
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- screw nut
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- slip table
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- 238000000231 atomic layer deposition Methods 0.000 title description 11
- 238000007667 floating Methods 0.000 claims abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 10
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 9
- 239000010959 steel Substances 0.000 claims abstract description 9
- 230000005389 magnetism Effects 0.000 claims description 14
- BGOFCVIGEYGEOF-UJPOAAIJSA-N helicin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC=CC=C1C=O BGOFCVIGEYGEOF-UJPOAAIJSA-N 0.000 claims 1
- 238000005096 rolling process Methods 0.000 claims 1
- 210000003437 trachea Anatomy 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 9
- 230000008859 change Effects 0.000 abstract description 5
- 230000002035 prolonged effect Effects 0.000 abstract description 5
- 238000012545 processing Methods 0.000 abstract description 3
- 239000000428 dust Substances 0.000 description 31
- 239000012535 impurity Substances 0.000 description 24
- 230000000903 blocking effect Effects 0.000 description 23
- 238000003825 pressing Methods 0.000 description 13
- 238000002347 injection Methods 0.000 description 9
- 239000007924 injection Substances 0.000 description 9
- 238000007789 sealing Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000003754 machining Methods 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 206010044565 Tremor Diseases 0.000 description 4
- 230000000994 depressogenic effect Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000002337 anti-port Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
- F16H25/2418—Screw seals, wipers, scrapers or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
- F16H2025/2445—Supports or other means for compensating misalignment or offset between screw and nut
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Transmission Devices (AREA)
Abstract
The invention belongs to the technical field of connectors, and particularly relates to a flexible lead screw nut connector for an ALD device, which comprises a lead screw lever, wherein a lead screw nut is arranged on the lead screw lever; the outer wall of the lead screw nut is connected with an inner floating sleeve, the outer part of the inner floating sleeve is movably connected with an outer floating sleeve, arc-shaped grooves are formed in the inner floating sleeve and the outer floating sleeve, steel balls are arranged in the arc-shaped grooves, the outer floating sleeve is connected with a fixed seat, and the fixed seat is fixedly connected with a sliding table; according to the invention, the inner floating sleeve and the outer floating sleeve which can be movably adjusted along the radial direction of the screw nut are arranged on the screw nut, so that the radial load of the screw generated by the change of the distance between the screw nut and the guide rail of the sliding table in the movement process of the screw can be effectively weakened, the requirements on the processing and assembling precision of the screw can be effectively reduced, the assembling time is reduced, the radial load of the screw is reduced, the service life of the screw is prolonged, and the use cost of the screw can be reduced.
Description
Technical Field
The invention belongs to the technical field of connectors, and particularly relates to a flexible lead screw nut connector for an ALD device.
Background
The existing screw nut and the sliding table are rigidly connected, so that the screw is subjected to overlarge radial load in the reciprocating motion process of the sliding table, the root of the support end of the screw is subjected to alternating stress, fatigue cracking is easy to occur under extreme conditions, and the service life of the screw is greatly reduced.
And because the single piece rigidity can not be promoted in the screw rod support and the sliding table guide rail of the lifting door of the existing ALD equipment, the machining precision also reaches the limit of economic rationality, the parallelism between the screw rod and the sliding table guide rail is not high, rigid connection is adopted, and in the reciprocating motion process of the sliding table, the screw rod is excessively loaded in the radial direction, the specification of the screw rod has to be improved, the power of a motor is improved, the design machining precision and the assembly precision are improved as much as possible, and the use cost is increased.
Accordingly, the present invention provides a flexible lead screw nut connector for an ALD apparatus.
Disclosure of Invention
To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.
The technical scheme adopted by the invention for solving the technical problems is as follows: the invention discloses a flexible lead screw nut connector for ALD equipment, which comprises a lead screw lever, wherein a lead screw nut is arranged on the lead screw lever; the outer wall of the lead screw nut is connected with an inner floating sleeve, the outer part of the inner floating sleeve is movably connected with an outer floating sleeve, the side walls of the inner floating sleeve and the outer floating sleeve are respectively provided with an arc-shaped groove, steel balls are arranged in the arc-shaped grooves, the outer floating sleeve is connected with a fixed seat, and the fixed seat is fixedly connected with a sliding table; according to the traditional ALD equipment, a single piece of lead screw support and a sliding table guide rail cannot be lifted due to technical requirements, the machining precision also reaches the limit of economic rationality, the parallelism between the lead screw and the sliding table guide rail is not high, rigid connection is adopted, and the lead screw is subjected to overlarge radial load in the reciprocating motion process of the sliding table, so that the specification of the lead screw is forced to be improved, the power of a motor is improved, the design machining precision and the assembly precision are improved as much as possible, and the use cost is increased; when the flexible lead screw nut connector is used, the lead screw nut is provided with the inner floating sleeve and the outer floating sleeve which can be movably adjusted along the radial direction of the lead screw nut, so that the radial load of the lead screw generated by the change of the distance between the lead screw nut and the guide rail of the sliding table in the motion process of the lead screw can be effectively weakened, and the lead screw nut can be limited to generate angular motion by the arrangement of the steel ball.
Preferably, the two ends of the wire lever are respectively provided with a supporting plate, the middle part of the sliding table is provided with an avoiding groove, the wire lever penetrates through the avoiding groove, a telescopic sleeve is respectively connected between the end surface of the sliding table and the corresponding supporting plate, and the side wall of the telescopic sleeve is wave-shaped and can be telescopic along the axial direction of the wire lever; because current screw lever and lead screw nut connector are in the non-operating condition for a long time, and expose under external environment for a long time, easily wet or receive the pollution of dust impurity, especially drop in the lubricated position department in clearance of two cover that float when the dust, lead to the lubricated medium deterioration or inefficacy at lubricated position easily, the telescopic sleeve that sets up this moment can wrap up the protection to screw lever and two cover isotructures that float, reduce the contact of lead screw and external dust moisture, the life of lead screw and connector has been improved, simultaneously when the axial motion of screw lever is followed to the slip table, the slip table can compress the telescopic sleeve on one side of the direction of motion this moment and make it folding, the slip table can drive another telescopic sleeve and stretch simultaneously, make the telescopic sleeve also can carry out effectual protection to the screw when the slip table is worked.
Preferably, magnetic rings are respectively arranged at one ends of the two telescopic sleeves close to the end face of the sliding table, the magnetic rings can attract the sliding table, and the magnetic poles at the ends of the two magnetic rings close to each other are opposite; the magnetic ring can be fixed respectively on the slip table with the form that the slip table attracted mutually flexible cover end, make things convenient for the staff to open the flexible cover and maintain the connector, simultaneously when the slip table drives the flexible cover extension of one side to when certain condition, this time flexible cover can drive the magnetic ring of connection and break away from mutually with the slip table, and like the spring atress, extension and the compression that can relapse, thereby can shake off the clearance with accumulational dust impurity in surface, simultaneously when the slip table to a side motion to certain distance near this flexible cover, the magnetic ring on this flexible cover can adsorb the laminating with the slip table terminal surface again under the attraction of slip table and another magnetic ring this moment, thereby can wrap up and protect the lead screw once more.
Preferably, the outer walls of the free ends of the two telescopic sleeves are fixedly connected with arc-shaped pull rods respectively, and the other ends of the pull rods extend into the concave positions of the corresponding telescopic sleeves respectively; when one of them flexible cover gradually extended, the depression that the pull rod free end on another flexible cover can be sheathe in this flexible this moment carries out the extrusion and slides, slides to another depression department when the pull rod tip from one of them depression is in the twinkling of an eye, and the pull rod can drive the flexible cover of depression department and shake this moment to can shake off its surperficial dust impurity, further improved the cleaning capacity of flexible cover surface dust impurity.
Preferably, the pull rod is composed of a support rod and a shaking block, one end of the support rod is fixedly connected with the telescopic sleeve, the shaking block is rotatably connected with the other end of the support rod through a torsion spring, a limit block is arranged at the end part of the support rod at one side of the shaking block, and the limit block can limit the rotation of the free end of the shaking block to one side far away from the telescopic sleeve; when one of them telescope tube is stretched gradually, the shaking piece of another telescope tube's the support rod tip this moment can slide with the depressed part extrusion that corresponds under the effect of stopper, thereby can reach the effect of above-mentioned telescope tube shake, when being stretched telescope tube shrink gradually and reseing simultaneously, the stopper is no longer spacing to the counter rotation who trembles the piece this moment, thereby make the shaking piece can not carry on spacingly to the telescope tube depressed part under the shrink state, make the reseing of telescope tube can effectively go on, and make the work of trembling the piece go on to reciprocate.
Preferably, a plurality of mutually communicated pressing bags are arranged at the sunken positions of the inner wall of the free end of the telescopic sleeve, a first check valve is arranged on each pressing bag, an air injection groove is formed in the outer side wall of each magnetic ring, a second check valve is arranged in each air injection groove, and the inner end of each air injection groove is communicated with the pressing bag positioned at the outermost end of the telescopic sleeve through an air pipe; when the magnetic ring of being flare-out and tip breaks away from with the slip table as the telescope tube, the telescope tube can stretch out and draw back repeatedly, when the telescope tube shrink, the telescope tube can extrude the pressure bag, and check valve is in the closed condition this moment, and No. two check valves are in the open mode to make the inside gas of pressure bag can follow jet-propelled groove blowout, and blow the dust impurity that shakes off on the telescope tube to the one side of keeping away from the lead screw, reduce the dust impurity that scatters everywhere and the condition of lead screw contact.
Preferably, a group of spirally wound pipes which are uniformly distributed in an annular mode are connected to the upper end face, close to the screw nut, of the fixed seat, the inner parts of the wound pipes can be opened when being inflated, a sealed cavity for wrapping the inner floating sleeve and the outer floating sleeve can be formed, and air passages communicated with the end parts of the wound pipes and the air injection grooves are formed in the magnetic rings at the bottoms of the fixed seat, the sliding table and the sliding table; roll up and receive the pipe and be similar to "blow dragon" structure, when the telescope tube that is located the slip table bottom compresses gradually, be located the telescope tube at slip table top when flare-outing gradually promptly, the gas of bottom telescope tube middling pressure bag can be impressed through the air flue gradually and receive in the pipe this moment, thereby make the roll-up pipe open gradually, and wrap up two cover that float, reduce the telescope tube at follow-up top and slip table and break away from and tremble when grey, dust impurity drops the condition in two cover departments that float, the cleanliness of connector has further been improved.
Preferably, the magnetic ring is arranged in a conical shape, the width of the cross section of the magnetic block is gradually reduced from one side close to the telescopic sleeve to one side far away from the telescopic sleeve, and the end faces of the sliding table corresponding to the magnetic ring are respectively provided with clamping rings matched with the sliding table in shape; through the shape and the snap ring that set up the magnetism ring for the magnetism ring can be accurate under the effect of snap ring reset, and make the stable intercommunication that aligns of air flue on air flue in the bottom magnetism ring and the slip table, when the slip table compressed the flexible cover in bottom simultaneously, the flexible cover of bottom compressed this moment can support the magnetism ring of connecting and press inside the snap ring, thereby reduce the condition of revealing from between magnetism ring and the slip table when the air flue flows in the pressure bag.
Preferably, the end part of the air passage in the magnetic ring at the bottom of the sliding table is rotatably connected with a plugging plate through a torsion spring, the end part of the sliding table, which is close to the air passage on the plugging plate, is slidably connected with a sliding block, the magnetic ring can attract the sliding block, an elastic piece is connected between the sliding block and the inner end of the corresponding air passage, a communicating groove communicated with the end part of the inner end of the sliding block is formed in the side wall of the outer end of the sliding block, and the outer end of the sliding block is connected with a push rod; when the magnetic ring at the bottom of the sliding table is clamped with the clamping ring, the magnetic ring attracts the sliding block to enable the sliding block to move towards one side close to the blocking plate until the outer end of the communication groove on the sliding block is communicated with the air passage on the magnetic ring, meanwhile, the sliding block can drive the push rod to extrude the end part of the blocking plate and enable the end part to rotate to be opened, so that gas in the compression bag can flow into the furling pipe through the communicated air passage, when the magnetic ring at the bottom end of the sliding table is separated from the clamping ring, the sliding block slides downwards to the inside of the air passage on the sliding table under the action of the elastic block and utilizes the inner wall of the air passage of the sliding table to block the communication groove, so that the furling pipe is in a blocking state, the loss of gas in the furling pipe is reduced, meanwhile, the blocking plate can block the air passage on the magnetic ring after rotating and resetting, the gas in the subsequent compression bag is reduced from flowing out of the air passage, and further the gas in the compression bag can be sprayed out from the gas spraying groove, and effectively blow off dust and impurities shaken off by the telescopic sleeve.
Preferably, the end part, close to the plugging plate, of the air passage on the sliding table is connected with an arc-shaped elastic sheet, the free end of the elastic sheet is bent towards one end, close to the sliding block, one side, close to the plugging plate, of the elastic sheet is connected with an annular sealing bag, and a pull rope is connected between the free end of the elastic sheet and the outer end of the sliding block; when the slider moved to shutoff board one side, the slider can extrude the flexure strip tip this moment, make the free end of flexure strip can be crooked in the twinkling of an eye to shutoff board one side after warping to the certain state, and extrude the sealing bag, make the sealing bag can seal the binding face between magnetic ring and the snap ring, reduce the condition of revealing from this when flowing of the gas in the pressure bag, when the slider resets simultaneously, the slider can stretch the flexure strip to initial condition through the stay cord, thereby make the work of flexure strip go on to and fro.
The invention has the following beneficial effects:
1. according to the invention, the inner floating sleeve and the outer floating sleeve which can be movably adjusted along the radial direction of the screw nut are arranged on the screw nut, so that the radial load of the screw nut generated by the change of the distance between the screw nut and the guide rail of the sliding table in the movement process of the screw can be effectively weakened, and the arrangement of the steel balls can limit the screw nut to generate angular movement.
2. According to the invention, by arranging the telescopic sleeves, when the sliding table moves along the axial direction of the screw rod, the sliding table can compress and fold the telescopic sleeves on one side in the moving direction, and simultaneously can drive the other telescopic sleeve to stretch, so that the screw rod, the two floating sleeves and other structures can be wrapped and protected, the contact between the screw rod and external dust and moisture is reduced, and the service life of the screw rod and the connector is prolonged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic structural diagram of the first embodiment;
FIG. 2 is a schematic structural view of the second embodiment;
FIG. 3 is an enlarged view at A in FIG. 2;
FIG. 4 is a schematic structural view of the second embodiment in a state where the rolled tube is unwound;
FIG. 5 is a schematic view of a partial structure of the interior of the bottom end of the second exemplary embodiment of the present invention;
FIG. 6 is an enlarged view at B in FIG. 5;
in the figure: the device comprises a screw rod 1, a screw nut 2, an inner floating sleeve 3, an outer floating sleeve 4, an arc-shaped groove 5, a steel ball 6, a fixed seat 7, a sliding table 8, a supporting plate 9, an avoiding groove 10, a telescopic sleeve 11, a magnetic ring 12, a pull rod 13, a supporting rod 14, a shaking block 15, a limiting block 16, a pressing bag 17, a one-way valve 18, an air injection groove 19, a two-way valve 20, an air pipe 21, a furling pipe 22, an air passage 23, a clamping ring 24, a blocking plate 25, a sliding block 26, an elastic piece 27, a communicating groove 28, a push rod 29, an elastic piece 30, a sealing bag 31 and a pull rope 32.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
referring to fig. 1, a flexible lead screw nut 2 connector for an ALD apparatus according to an embodiment of the present invention includes a screw lever 1, where the screw lever 1 is provided with a lead screw nut 2; an inner floating sleeve 3 is connected to the outer wall of the lead screw nut 2, an outer floating sleeve 4 is movably connected to the outer portion of the inner floating sleeve 3, arc-shaped grooves 5 are formed in the side walls of the inner floating sleeve 3 and the outer floating sleeve 4 respectively, steel balls 6 are arranged inside the arc-shaped grooves 5, a fixed seat 7 is connected to the outer floating sleeve 4, and a sliding table 8 is fixedly connected to the fixed seat 7; according to the traditional ALD equipment, a single piece of lead screw support of a lifting door and a sliding table 8 guide rail cannot be lifted due to technical requirements, the machining precision also reaches the limit of economic rationality, the parallelism between the lead screw and the sliding table 8 guide rail is not high, rigid connection is adopted, and the lead screw is subjected to overlarge radial load in the reciprocating motion process of the sliding table 8, so that the specification of the lead screw has to be improved, the power of a motor is improved, the design machining precision and the assembly precision are improved as much as possible, and the use cost is increased; when the flexible lead screw nut 2 connector is used, the lead screw nut 2 is provided with the inner floating sleeve 3 and the outer floating sleeve 4 which can be movably adjusted along the radial direction of the lead screw nut, so that the radial load of the lead screw generated by the change of the distance between the lead screw nut 2 and the guide rail of the sliding table 8 in the motion process of the lead screw can be effectively weakened, the arrangement of the steel balls can limit the lead screw nut 2 to generate angular motion, the processing and assembling precision requirements of the lead screw can be effectively reduced, the assembling time is shortened, the radial load of the lead screw is reduced, the service life of the lead screw is prolonged, and the use cost of the lead screw can be reduced.
Example two:
as shown in fig. 2 to 6, a first comparative example, in which another embodiment of the present invention is:
supporting plates 9 are respectively arranged at two ends of the wire lever 1, an avoiding groove 10 is formed in the middle of the sliding table 8, the wire lever 1 penetrates through the avoiding groove 10, telescopic sleeves 11 are respectively connected between the end faces of the sliding table 8 and the corresponding supporting plates 9, and the side walls of the telescopic sleeves 11 are arranged in a wave shape and can be stretched and retracted along the axial direction of the wire lever 1; because current screw lever 1 is in the inoperative condition with lead screw nut 2 connector for a long time, and expose under external environment for a long time, easily wet or receive the pollution of dust impurity, especially drop in the lubricated position department in clearance of two cover that float when the dust, lead to the lubricated medium of lubricated position to deteriorate or lose efficacy easily, the telescope tube 11 that sets up this moment can wrap up the protection to screw lever 1 and two cover isotructures that float, reduce the contact of lead screw and external dust moisture, the life of lead screw and connector has been improved, simultaneously when slip table 8 along screw lever 1's axial motion, slip table 8 can compress and make it folding to the telescope tube 11 of direction of motion one side this moment, slip table 8 can drive another telescope tube 11 and stretch simultaneously, make telescope tube 11 also can carry out effectual protection to the screw when slip table 8 works.
One ends of the two telescopic sleeves 11, which are close to the end face of the sliding table 8, are respectively provided with a magnetic ring 12, the magnetic rings 12 can attract the sliding table 8, and the magnetic poles of the ends, which are close to each other, of the two magnetic rings 12 are opposite; magnetic ring 12 can be fixed respectively on slip table 8 with the form that slip table 8 attracts mutually 11 tip of flexible cover, make things convenient for the staff to open flexible cover 11 and maintain the connector, simultaneously when slip table 8 drives the flexible cover 11 extension of one side to when certain state, this flexible cover 11 can drive the magnetic ring 12 and the slip table 8 of connection and break away from mutually this moment, and as the spring atress is the same, extension and the compression that can relapse, thereby can shake off the clearance with accumulational dust impurity in surface, simultaneously when slip table 8 moves to certain distance to one side near this flexible cover 11, magnetic ring 12 on this flexible cover 11 can adsorb the laminating with slip table 8 terminal surface again under slip table 8 and another magnetic ring 12's attraction this moment, thereby can wrap up and protect the lead screw once more.
The outer walls of the free ends of the two telescopic sleeves 11 are fixedly connected with arc-shaped pull rods 13 respectively, and the other ends of the pull rods 13 extend into the concave parts of the corresponding telescopic sleeves 11 respectively; when one of the telescopic sleeves 11 is gradually extended, the free end of the pull rod 13 on the other telescopic sleeve 11 can be extruded and slid at the concave part on the telescopic sleeve 11, and when the end part of the pull rod 13 slides to the other concave part from one of the concave parts instantly, the pull rod 13 can drive the telescopic sleeve 11 at the concave part to shake, so that dust and impurities on the surface of the telescopic sleeve can be shaken off, and the cleaning capability of the dust and impurities on the surface of the telescopic sleeve 11 is further improved.
The pull rod 13 consists of a support rod 14 and a shaking block 15, one end of the support rod 14 is fixedly connected with the telescopic sleeve 11, the shaking block 15 is rotatably connected with the other end of the support rod 14 through a torsion spring, a limit block 16 is arranged at the end part of the support rod 14 at one side of the shaking block 15, and the limit block 16 can limit the rotation of the free end of the shaking block 15 to one side far away from the telescopic sleeve 11; when one of them telescope tube 11 is stretched gradually, the shake piece 15 of the bracing piece 14 tip of another telescope tube 11 this moment can slide with the depressed part extrusion that corresponds under stopper 16's effect, thereby can reach the effect of above-mentioned telescope tube 11 shake, when being stretched telescope tube 11 and contracting gradually and reseing simultaneously, stopper 16 no longer carries on spacingly to the antiport of shake piece 15 this moment, thereby make shake piece 15 can not carry on spacingly to the telescope tube 11 depressed part under the shrink state, make the reseing of telescope tube 11 can effectively go on, and make the work of shaking piece 15 go on to and fro.
A plurality of mutually communicated pressing bags 17 are arranged at the sunken positions of the inner wall of the free end of the telescopic sleeve 11, a first check valve 18 is arranged on each pressing bag 17, an air injection groove 19 is formed in the outer side wall of the magnetic ring 12, a second check valve 20 is arranged in each air injection groove 19, and the inner end of each air injection groove 19 is communicated with the pressing bag 17 positioned at the outermost end of the telescopic sleeve 11 through an air pipe 21; when the telescopic sleeve 11 is straightened and the magnetic ring 12 at the end part is separated from the sliding table 8, the telescopic sleeve 11 can stretch out and draw back repeatedly, when the telescopic sleeve 11 contracts, the telescopic sleeve 11 can extrude the pressing bag 17, the first check valve 18 is in a closed state, and the second check valve 20 is in an open state, so that gas in the pressing bag 17 can be sprayed out from the gas spraying groove 19, dust impurities shaken off the telescopic sleeve 11 are blown to one side away from the screw rod, and the contact condition of the dust impurities and the screw rod scattered around is reduced.
A group of spiral winding pipes 22 which are annularly and uniformly distributed are connected to the upper end face, close to the screw nut 2, of the fixed seat 7, the winding pipes 22 can be opened when inflated and can form a sealed cavity for wrapping the inner floating sleeve 3 and the outer floating sleeve 4, and air passages 23 for communicating the end parts of the winding pipes 22 with the air injection grooves 19 are formed in the fixed seat 7, the sliding table 8 and the magnetic rings 12 at the bottoms of the sliding table 8; roll up tub 22 and be similar to "blow dragon" structure, when the telescope tube 11 that is located the 8 bottoms of slip table compresses gradually, when being located the telescope tube 11 at slip table 8 top and flare-out gradually, the gas of pressure bag 17 can be impressed gradually through air flue 23 in the telescope tube 11 of bottom this moment, thereby make roll up tub 22 and open gradually, and wrap up two unsteady covers, reduce the telescope tube 11 at follow-up top and slip table 8 and break away from and tremble when grey, the condition that dust impurity falls in two unsteady cover departments, further improve the cleanliness of connector.
The magnetic ring 12 is arranged in a conical shape, the width of the cross section of the magnetic block is gradually reduced from one side close to the telescopic sleeve 11 to one side far away from the telescopic sleeve 11, and the end surfaces of the sliding table 8 corresponding to the magnetic ring 12 are respectively provided with a snap ring 24 matched with the shape of the end surface; through the shape and the snap ring 24 that set up magnetic ring 12, make the reseing that magnetic ring 12 can be accurate under snap ring 24's effect, and make the stable intercommunication that aligns of air flue 23 in bottom magnetic ring 12 and air flue 23 on the slip table 8, when slip table 8 compresses bottom telescope tube 11 simultaneously, the telescope tube 11 of bottom compressed this moment can support the magnetic ring 12 of connecting inside snap ring 24, thereby reduce the condition of revealing from between magnetic ring 12 and the slip table 8 when air flue 23 flows in the pressure bag 17.
The end part of an air passage 23 in a magnetic ring 12 at the bottom of the sliding table 8 is rotatably connected with a blocking plate 25 through a torsion spring, the end part of the sliding table 8, which is close to the air passage 23 on the blocking plate 25, is slidably connected with a sliding block 26, the magnetic ring 12 can attract the sliding block 26, an elastic part 27 is connected between the sliding block 26 and the inner end of the corresponding air passage 23, a communicating groove 28 communicating with the end part of the inner end of the sliding block 26 is formed in the side wall of the outer end of the sliding block 26, and the outer end of the sliding block 26 is connected with a push rod 29; when the magnetic ring 12 at the bottom of the sliding table 8 is engaged with the snap ring 24, the magnetic ring 12 attracts the slider 26, so that the slider 26 moves toward one side close to the blocking plate 25 until the outer end of the communicating groove 28 on the slider 26 is communicated with the air passage 23 on the magnetic ring 12, and meanwhile, the slider 26 can drive the push rod 29 to squeeze the end of the blocking plate 25 and open the blocking plate in a rotating manner, so that the gas in the pressure bag 17 can flow into the interior of the reeling tube 22 through the communicating air passage 23, when the magnetic ring 12 at the bottom end of the sliding table 8 is separated from the snap ring 24, the slider 26 slides downwards under the action of the elastic block to the interior of the air passage 23 on the sliding table 8, and the communicating groove 28 is blocked by using the inner wall of the air passage 23 of the sliding table 8, so that the reeling tube 22 is in a blocking state, the loss of the gas in the reeling tube 22 is reduced, and the air passage 23 on the magnetic ring 12 can be blocked by the blocking plate 25 after the rotating reset, the gas in the subsequent pressure bag 17 is reduced to flow out of the gas channel 23, so that the gas in the pressure bag 17 can be sprayed out of the gas spraying groove 19, and dust and impurities shaken off by the telescopic sleeve 11 are effectively blown away.
An arc-shaped elastic sheet 30 is connected to the end part, close to the blocking plate 25, of the air passage 23 on the sliding table 8, the free end of the elastic sheet 30 is bent towards one end, close to the sliding block 26, one side, close to the blocking plate 25, of the elastic sheet 30 is connected with an annular sealing bag 31, and a pull rope 32 is connected between the free end of the elastic sheet 30 and the outer end of the sliding block 26; when the sliding block 26 moves towards one side of the blocking plate 25, the sliding block 26 can extrude the end part of the elastic piece 30, so that the free end of the elastic piece 30 can be instantly bent towards one side of the blocking plate 25 after being deformed to a certain state, the sealing bag 31 is extruded, the sealing bag 31 can seal the joint surface between the magnetic ring 12 and the clamping ring 24, the leakage of gas in the pressing bag 17 from the joint surface during flowing is reduced, and meanwhile, when the sliding block 26 is reset, the sliding block 26 can stretch the elastic piece 30 to an initial state through the pull rope 32, so that the work of the elastic piece 30 can be carried out in a reciprocating mode.
The working principle is as follows: because the inner floating sleeve 3 and the outer floating sleeve 4 which can be movably adjusted along the radial direction of the lead screw nut 2 are arranged on the lead screw nut 2, the radial load of the lead screw generated by the change of the distance between the lead screw nut 2 and the guide rail of the sliding table 8 in the motion process of the lead screw can be effectively weakened, and the arrangement of the steel ball can limit the lead screw nut 2 to generate angular motion, so that the processing and assembling precision requirements of the lead screw can be effectively reduced, the assembling time is reduced, the radial load of the lead screw is reduced, the service life of the lead screw is prolonged, and the use cost of the lead screw can be reduced; because the existing connector of the screw rod 1 and the screw nut 2 is in a non-working state for a long time and is exposed in an external environment for a long time, the connector is easily affected with damp or polluted by dust and impurities, especially when dust falls on a gap lubrication part of two floating sleeves, a lubrication medium at the lubrication part is easily deteriorated or lost, the telescopic sleeve 11 arranged at the moment can wrap and protect the screw rod 1 and the two floating sleeves and other structures, the contact of the screw rod and external dust and moisture is reduced, the service life of the screw rod and the connector is prolonged, and meanwhile, when the sliding table 8 moves along the axial direction of the screw rod 1, the sliding table 8 can compress and fold the telescopic sleeve 11 at one side of the moving direction, and meanwhile, the sliding table 8 can drive the other telescopic sleeve 11 to stretch, so that the telescopic sleeve 11 can also effectively protect the screw rod when the sliding table 8 works; the end parts of the telescopic sleeves 11 can be respectively fixed on the sliding table 8 in a manner that the magnetic rings 12 can attract the sliding table 8, so that workers can conveniently open the telescopic sleeves 11 and maintain the connector, and meanwhile, when the sliding table 8 drives the telescopic sleeves 11 on one side to extend to a certain state, the telescopic sleeves 11 can drive the connected magnetic rings 12 to be separated from the sliding table 8 and can repeatedly extend and compress as springs are stressed, so that dust impurities accumulated on the surface can be shaken off and cleaned, and meanwhile, when the sliding table 8 moves to a certain distance to one side close to the telescopic sleeves 11, the magnetic rings 12 on the telescopic sleeves 11 can be attracted and attached to the end face of the sliding table 8 again under the attraction of the sliding table 8 and the other magnetic ring 12, so that the lead screw can be wrapped and protected again; when one of the telescopic sleeves 11 is gradually extended, the free end of the pull rod 13 on the other telescopic sleeve 11 can be extruded and slid on the concave part on the telescopic sleeve 11, and when the end part of the pull rod 13 instantaneously slides to the other concave part from one of the concave parts, the pull rod 13 can drive the telescopic sleeve 11 at the concave part to shake, so that dust and impurities on the surface of the telescopic sleeve can be shaken off, and the cleaning capability of the dust and impurities on the surface of the telescopic sleeve 11 is further improved; when one of the telescopic sleeves 11 is gradually stretched, the shaking block 15 at the end of the supporting rod 14 of the other telescopic sleeve 11 can be extruded and slide with the corresponding concave part under the action of the limiting block 16, so that the shaking effect of the telescopic sleeves 11 can be achieved, and meanwhile, when the stretched telescopic sleeves 11 are gradually contracted and reset, the limiting block 16 does not limit the reverse rotation of the shaking block 15 any more, so that the shaking block 15 does not limit the concave part of the telescopic sleeves 11 in the contracted state, the resetting of the telescopic sleeves 11 can be effectively carried out, and the work of the shaking block 15 can be carried out in a reciprocating manner; when the telescopic sleeve 11 is straightened and the magnetic ring 12 at the end part is separated from the sliding table 8, the telescopic sleeve 11 can be repeatedly stretched and contracted, when the telescopic sleeve 11 is contracted, the telescopic sleeve 11 can extrude the pressing bag 17, the first check valve 18 is in a closed state, and the second check valve 20 is in an open state, so that gas in the pressing bag 17 can be sprayed out from the gas spraying groove 19, dust impurities shaken off from the telescopic sleeve 11 are blown to one side far away from the screw rod, and the condition that the dust impurities flying around are contacted with the screw rod is reduced; the winding pipe 22 is similar to a 'blowing dragon' structure, when the telescopic sleeve 11 at the bottom end of the sliding table 8 is gradually compressed, namely the telescopic sleeve 11 at the top of the sliding table 8 is gradually straightened, at the moment, gas in the pressure bag 17 in the telescopic sleeve 11 at the bottom can be gradually pressed into the winding pipe 22 through the air passage 23, so that the winding pipe 22 is gradually opened, the two floating sleeves are wrapped, the condition that dust and impurities fall at the two floating sleeves when the telescopic sleeve 11 at the top is separated from the sliding table 8 and ash is shaken is reduced, and the cleanliness of the connector is further improved; through the arrangement of the shape of the magnetic ring 12 and the clamping ring 24, the magnetic ring 12 can be accurately reset under the action of the clamping ring 24, the air passages 23 in the magnetic ring 12 at the bottom and the air passages 23 on the sliding table 8 are stably aligned and communicated, and meanwhile, when the sliding table 8 compresses the bottom telescopic sleeve 11, the telescopic sleeve 11 with the compressed bottom can press the connected magnetic ring 12 inside the clamping ring 24, so that the leakage of gas in the pressure bag 17 from the magnetic ring 12 to the sliding table 8 when the air passages 23 flow is reduced; when the magnetic ring 12 at the bottom of the sliding table 8 is engaged with the snap ring 24, the magnetic ring 12 attracts the slider 26, so that the slider 26 moves toward one side close to the blocking plate 25 until the outer end of the communicating groove 28 on the slider 26 is communicated with the air passage 23 on the magnetic ring 12, and meanwhile, the slider 26 can drive the push rod 29 to squeeze the end of the blocking plate 25 and open the blocking plate in a rotating manner, so that the gas in the pressure bag 17 can flow into the interior of the reeling tube 22 through the communicating air passage 23, when the magnetic ring 12 at the bottom end of the sliding table 8 is separated from the snap ring 24, the slider 26 slides downwards under the action of the elastic block to the interior of the air passage 23 on the sliding table 8, and the communicating groove 28 is blocked by using the inner wall of the air passage 23 of the sliding table 8, so that the reeling tube 22 is in a blocking state, the loss of the gas in the reeling tube 22 is reduced, and the air passage 23 on the magnetic ring 12 can be blocked by the blocking plate 25 after the rotating reset, the gas in the subsequent pressure bag 17 is reduced to flow out of the gas channel 23, so that the gas in the pressure bag 17 can be sprayed out of the gas spraying groove 19, and dust and impurities shaken off by the telescopic sleeve 11 are effectively blown away; when the sliding block 26 moves towards one side of the blocking plate 25, the sliding block 26 can extrude the end part of the elastic piece 30, so that the free end of the elastic piece 30 can be instantly bent towards one side of the blocking plate 25 after being deformed to a certain state, the sealing bag 31 is extruded, the sealing bag 31 can seal the joint surface between the magnetic ring 12 and the clamping ring 24, the leakage of gas in the pressing bag 17 from the joint surface during flowing is reduced, and meanwhile, when the sliding block 26 is reset, the sliding block 26 can stretch the elastic piece 30 to an initial state through the pull rope 32, so that the work of the elastic piece 30 can be carried out in a reciprocating mode.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are given by way of illustration of the principles of the present invention, and that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A flexible lead screw nut (2) connector for an ALD device comprises a lead screw lever (1), wherein the lead screw nut (2) is arranged on the lead screw lever (1); the method is characterized in that: the lead screw nut is connected with interior cover (3) that floats on (2) the outer wall, interior cover (3) outside swing joint that floats has outer cover (4) that floats, arc wall (5) have been seted up respectively on interior cover (3) that floats and the outer cover (4) lateral wall that floats, arc wall (5) inside is equipped with steel ball (6), be connected with fixing base (7) on outer cover (4) that floats, slip table (8) have been linked firmly on fixing base (7).
2. A flexible lead screw nut (2) connector for ALD equipment according to claim 1, characterized in that: the wire lever (1) both ends are equipped with backup pad (9) respectively, slip table (8) middle part has been seted up and has been dodged groove (10), just wire lever (1) runs through and dodges groove (10), be connected with flexible cover (11) between the terminal surface of slip table (8) and corresponding backup pad (9) respectively, the lateral wall of flexible cover (11) sets to the wave and can stretch out and draw back along the axial of wire lever (1).
3. A flexible lead screw nut (2) connector for ALD equipment according to claim 2, characterized in that: two one end that flexible cover (11) are close to slip table (8) terminal surface is equipped with magnetism ring (12) respectively, magnetism ring (12) homoenergetic attracts mutually with slip table (8), and the one end magnetic pole that two magnetism rings (12) are close to each other is opposite.
4. A flexible lead screw nut (2) connector for ALD equipment according to claim 3, characterized in that: the outer wall of the free end of each of the two telescopic sleeves (11) is fixedly connected with an arc-shaped pull rod (13), and the other end of each pull rod (13) extends into the corresponding concave position of each telescopic sleeve (11).
5. A flexible lead screw nut (2) connector for an ALD apparatus according to claim 4, characterized in that: pull rod (13) comprise bracing piece (14) and shake piece (15), the one end and the telescope tube (11) of bracing piece (14) link firmly mutually, shake piece (15) and rotate with the other end of bracing piece (14) through the torsional spring and link to each other, just bracing piece (14) tip of shaking piece (15) one side is equipped with stopper (16), stopper (16) can be spacing to the rotation of keeping away from telescope tube (11) one side shaking piece (15) free end.
6. A flexible lead screw nut (2) connector for ALD equipment according to claim 3, characterized in that: the inner wall of flexible cover (11) free end is sunken to be equipped with a plurality of pressure sacs (17) that communicate each other, be equipped with check valve (18) No. one on pressure sack (17), air-jet groove (19) have been seted up on the lateral wall of magnetism ring (12), air-jet groove (19) inside is equipped with No. two check valves (20), and air-jet groove (19) inner is linked together through trachea (21) with pressure sack (17) that are located flexible cover (11) outermost end.
7. A flexible lead screw nut (2) connector for an ALD apparatus according to claim 6, characterized in that: fixing base (7) are close to the up end department of screw nut (2) and are the spiral helicine pipe (22) of rolling up that is connected with a set of annular equipartition, it can open when aerifing to roll up pipe (22) inside to can form the sealed cavity that covers up to floating cover (3) and outer floating cover (4) internally, fixing base (7), slip table (8) and magnetic ring (12) of slip table (8) bottom are inside to be seted up the intercommunication and to roll up air flue (23) of pipe (22) tip and jet-propelled groove (19).
8. A flexible lead screw nut (2) connector for an ALD apparatus according to claim 7, characterized in that: magnetism ring (12) set up into the toper form, just the cross-sectional width of magnetism piece is dwindled by one side of being close to flexible cover (11) to the one side of keeping away from flexible cover (11) gradually, seted up on slip table (8) and the corresponding terminal surface of magnetism ring (12) respectively with its shape assorted snap ring (24).
9. A flexible lead screw nut (2) connector for an ALD apparatus according to claim 8, characterized in that: air flue (23) tip in slip table (8) bottom magnetism ring (12) is connected with shutoff board (25) through the torsional spring rotation, air flue (23) tip sliding connection on slip table (8) is close to shutoff board (25) has slider (26), magnetism ring (12) can attract slider (26), be connected with elastic component (27) between slider (26) and the inner that corresponds air flue (23), set up intercommunication groove (28) of its inner tip of intercommunication on the lateral wall of slider (26) outer end, just slider (26) outer end is connected with push rod (29).
10. A flexible lead screw nut (2) connector for ALD equipment according to claim 9, characterized in that: end connection that air flue (23) on slip table (8) are close to shutoff board (25) has curved flexure strip (30), the free end of flexure strip (30) is crooked to the one end that is close to slider (26), one side that flexure strip (30) are close to shutoff board (25) is connected with annular sealed bag (31), be connected with stay cord (32) between the free end of flexure strip (30) and slider (26) outer end.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111259243.3A CN113983135B (en) | 2021-10-28 | 2021-10-28 | ALD (atomic layer deposition) flexible lead screw nut connector for equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111259243.3A CN113983135B (en) | 2021-10-28 | 2021-10-28 | ALD (atomic layer deposition) flexible lead screw nut connector for equipment |
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| CN113983135A true CN113983135A (en) | 2022-01-28 |
| CN113983135B CN113983135B (en) | 2024-02-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115237170A (en) * | 2022-07-05 | 2022-10-25 | 连城凯克斯科技有限公司 | Protective gas flow control equipment during silicon carbide production |
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| CN113983135B (en) | 2024-02-23 |
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