CN113960169A - Multilayer graphene detection system based on ultrasonic waves - Google Patents
Multilayer graphene detection system based on ultrasonic waves Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 157
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8874—Taking dimensions of defect into account
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Abstract
The invention discloses an ultrasonic-based multilayer graphene detection system, which comprises a workbench and a sealing detection box arranged on the workbench, wherein the sealing detection box is fixedly arranged above the workbench and forms a light-tight sealing space together with the workbench, a controller is arranged in the workbench, a defect detection mechanism, an air blowing mechanism and a negative pressure mechanism are arranged on the sealing detection box, the defect detection mechanism comprises an ultrasonic detection device and an optical detection device, the ultrasonic detection device comprises a first guide rail, a first sliding block and an ultrasonic detector, the first guide rail is fixedly arranged on the inner wall of the sealing detection box, a first groove is arranged on the first guide rail, the position and the type of a defect can be accurately identified, the area size of the defect can be calculated, and then whether the defect needs to be repaired or not can be identified according to the area size, or whether the cripple criteria have been met.
Description
Field of application
The invention relates to the field of sound wave detection, in particular to an ultrasonic-based multilayer graphene detection system.
Background
Graphene is a new material of a single-layer two-dimensional honeycomb lattice structure consisting of carbon atoms, which is exfoliated from graphite materials. The graphene has excellent optical, electrical and mechanical properties, has important application prospects in the aspects of materials science, micro-nano processing, energy, biomedicine, drug delivery and the like, and is considered to be a revolutionary material in the future. Graphene has chemical properties similar to graphite, and can adsorb and desorb various atoms and molecules. When the atoms or molecules are used as donors or acceptors, the concentration of graphene carriers can be changed, and graphene can keep good conductivity. The nitrogen atoms are introduced into the graphene crystal lattices and then become the nitrogen-doped graphene, the generated nitrogen-doped graphene shows more excellent performance than pure graphene, is in a disordered, transparent and folded gauze shape, and is partially laminated together to form a multilayer structure, so that the high specific capacitance and the good cycle life can be displayed, therefore, the multilayer graphene is used for manufacturing a flexible transparent display screen, and becomes the development trend of the display screen of the future mobile equipment. However, there are many defects in the application and detection of graphene, and in the application of graphene, if the multilayer graphene meets the use requirement in the overlapping process, a good detection method and detection equipment are needed.
Disclosure of Invention
The invention overcomes the defects of the prior art and provides an ultrasonic-based multilayer graphene detection system.
In order to achieve the aim, the invention adopts the technical scheme that: a multilayer graphene detection system based on ultrasonic waves comprises a workbench and a sealing detection box arranged on the workbench;
the sealing detection box is fixedly arranged above the workbench and forms a light-tight sealing space with the workbench, and a controller is arranged in the workbench;
the sealed detection box is provided with a defect detection mechanism, an air blowing mechanism and a negative pressure mechanism, and the defect detection mechanism comprises an ultrasonic detection device and an optical detection device;
the ultrasonic detection device comprises a first guide rail, a first sliding block and an ultrasonic detector, wherein the first guide rail is fixedly arranged on the inner wall of the sealed detection box, a first groove is formed in the first guide rail, a first bump is arranged on the first sliding block, the first groove and the first bump are in sliding fit, so that the first sliding block can slide along the first guide rail, a first rotating mechanism is fixedly connected to the first sliding block, the ultrasonic detector is fixedly arranged on the first rotating mechanism, the first rotating mechanism is used for driving the ultrasonic detector to rotate, and the ultrasonic detector is electrically connected with the controller;
the optical detection device comprises a second guide rail, a second sliding block, a third sliding block, an optical camera and an optical amplifier, wherein the second guide rail is fixedly installed on the inner wall of the sealed detection box, a second groove is formed in the second guide rail, a second convex block is arranged on the second sliding block, the second groove is in sliding fit with the second convex block so that the second sliding block can slide along the second guide rail, a second rotating mechanism is fixedly connected to the second sliding block, the optical camera is fixedly installed on the second rotating mechanism, the second rotating mechanism is used for driving the optical camera to rotate, and the optical camera is electrically connected with the controller.
Further, in a preferred embodiment of the present invention, the optical amplifier is fixedly mounted on the third slider, the third slider is further provided with a third protrusion, the third protrusion is in sliding fit with the second groove, so that the third slider can slide along the second guide rail, and the bottom of the optical amplifier is further provided with an optical compensation device, and the optical compensation device can emit monochromatic light.
Further, in a preferred embodiment of the present invention, the air blowing mechanism is disposed at the top of the sealed detection box, the air blowing mechanism includes an air blowing pump, a first air pipe, and an air blowing head, one end of the first air pipe is hermetically connected to an output end of the air blowing pump, the first air pipe is provided with a first one-way valve, the other end of the first air pipe is hermetically connected to the air blowing head, and the air blowing head is fixedly mounted on an inner wall of the top of the sealed detection box.
Further, in a preferred embodiment of the present invention, the negative pressure mechanism is disposed in the workbench, the negative pressure mechanism includes an air pump, a second air pipe, and an air pumping head, one end of the second air pipe is hermetically connected to an output end of the air pump, the second air pipe is provided with a second one-way valve, the other end of the second air pipe is hermetically connected to the air pumping head, and the air pumping head is fixedly mounted on an inner wall of the bottom of the sealed detection box.
Further, in a preferred embodiment of the present invention, the workbench is further provided with a conveyor belt and a fixing mechanism, the conveyor belt is used for driving the fixing mechanism to move, the fixing mechanism is used for fixing graphene, and the bottom of the fixing mechanism is further provided with a reflecting plate.
Further, in a preferred embodiment of the present invention, a pressure sensor is further disposed on an inner wall of the sealing detection box, a photoelectric sensor is disposed at an interval on the conveyor belt, and both the pressure sensor and the photoelectric sensor are electrically connected to the controller.
The invention also provides a defect detection method of the ultrasonic-based multilayer graphene detection system, which is applied to any one of the ultrasonic-based multilayer graphene detection systems and is characterized by comprising the following steps of:
calibrating the ultrasonic detector to determine an incident angle, a longitudinal wave refraction angle and a transverse wave refraction angle of the ultrasonic detector, wherein the longitudinal wave refraction angle and the transverse wave refraction angle are complementary angles;
controlling the first sliding block to slide along the first guide rail so as to drive the ultrasonic detector to the outer surface of the graphene;
controlling an ultrasonic detector to be started, and detecting the graphene through ultrasonic waves emitted by the ultrasonic detector;
and judging whether the graphene has a defect or not and the position of the corresponding defect according to the reflected wave received by the ultrasonic detector.
Further, in a preferred embodiment of the present invention, the detecting graphene by using ultrasonic waves emitted by an ultrasonic detector further includes:
when ultrasonic waves emitted by an ultrasonic detector are emitted to the upper surface of graphene, generating a first transverse wave with a refraction angle a and a first longitudinal wave with a refraction angle b so as to detect the defects of the graphene;
when the first transverse wave is conducted to the lower surface of the graphene, generating a second transverse wave with a reflection angle a and a first deformation longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
when the first longitudinal wave is conducted to the lower surface of the graphene, generating a first deformed transverse wave with a reflection angle a and a second longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
when the second transverse wave is conducted to the upper surface of the graphene, generating a third transverse wave with an emission angle a and a second deformation longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
when the third transverse wave is conducted to the lower surface of the graphene, generating a fourth transverse wave with a reflection angle a and a third deformed longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
a first intersection wave is formed by a part where the first transverse wave and the second longitudinal wave intersect, and when the first intersection wave is transmitted to the lower surface of the graphene, a first detection wave generated carries out defect detection on the graphene;
and when the second intersection wave is transmitted to the upper surface of the graphene, the generated second detection wave carries out defect detection on the graphene.
Further, in a preferred embodiment of the present invention, the ultrasonic detector receives the reflected wave and determines whether the graphene has a defect and a position corresponding to the defect, further including:
the method comprises the following steps: any reflected wave received by the ultrasonic detector is generated by reflecting a transverse wave, a longitudinal wave or a detection wave;
step two: when a certain reflected wave received by the ultrasonic detector is generated by transverse wave reflection, determining that the reflected wave received by the ultrasonic detector is generated by transmitting a first transverse wave, a second transverse wave, a first deformed transverse wave, a third transverse wave and a fourth transverse wave according to the difference of the sound path and the propagation time of the first transverse wave, the second transverse wave, the first deformed transverse wave, the third transverse wave and the fourth transverse wave;
when a certain reflected wave received by the ultrasonic detector is generated by longitudinal wave reflection, determining that the reflected wave received by the ultrasonic detector is generated by the first longitudinal wave or the first deformed longitudinal wave, the second deformed longitudinal wave and the third deformed longitudinal wave reflection according to the difference of the sound path and the propagation time of the first longitudinal wave, the first deformed longitudinal wave, the second deformed longitudinal wave and the third deformed longitudinal wave;
when a certain reflected wave received by the ultrasonic detector is generated by the detection wave, determining that the reflected wave received by the ultrasonic detector is generated by the reflection of the first detection wave or the second detection wave according to the difference of the depth distance of the first detection wave or the second detection wave;
step three: and determining whether the graphene has defects and positions of corresponding defects according to the determination result of the second step and the reflected wave waveform.
Further, in a preferred embodiment of the present invention, the defect detecting method further includes:
acquiring area and density parameters of defects in graphene to generate a detection result;
comparing the detection result with a preset threshold value;
if the current graphene is less than or equal to a first preset threshold value, transmitting the current graphene to the next processing step;
if the current graphene production step is larger than the second preset threshold and smaller than the third preset threshold, stopping the current graphene production step, and transmitting the current graphene production step to a repair line for a repair step;
and if the current graphene generation step is larger than or equal to the third preset threshold, stopping the current graphene generation step and scrapping the graphene generation step.
According to the ultrasonic-based multilayer graphene detection system disclosed by the invention, the sliding block and the guide rail are in meshing transmission through the gear and the rack, so that the system has good stability and control precision; photographing the defects through an optical camera, calculating the area size of the defects through an image processing technology, and identifying whether the defects need to be repaired or whether the defects meet a scrapping standard or not according to the area size; impurities attached to the surface of the graphene can be blown away through the blowing mechanism, so that the detection result is more accurate; the position and the type of the defect can be accurately identified by an ultrasonic detection method; through negative pressure mechanism, can take out the air in the sealed detection case, can reduce the air and flow to reduce the influence of air ion to ultrasonic strength and refractivity, improve the degree of accuracy that the defect detected.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings of the embodiments can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic perspective view of another embodiment of the present invention;
FIG. 3 is a schematic diagram of a conveyor belt configuration;
FIG. 4 is a schematic view of the internal structure of the sealed detection box;
FIG. 5 is a schematic view of the blowing mechanism;
FIG. 6 is a schematic structural view of a negative pressure mechanism;
the reference numerals are explained below: 101. a work table; 102. sealing the detection box; 103. a defect detection mechanism; 104. a blowing mechanism; 105. a negative pressure mechanism; 106. an ultrasonic detection device; 107. an optical detection device; 108. a first guide rail; 109. a first slider; 201. an ultrasonic detector; 202. a first groove; 203. a first rotating mechanism; 204. a second guide rail; 205. a second slider; 206. a third slider; 207. an optical camera; 208. an optical amplifier; 209. a second groove; 301. a second rotating mechanism; 302. an optical compensation device; 303. an air blower; 304. a first air pipe; 305. a blowing head; 306. an air pump; 307. a second air pipe; 308. an air pumping head; 309. a conveyor belt; 401. and a fixing mechanism.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and the detailed description, wherein the drawings are simplified schematic drawings and only the basic structure of the present invention is illustrated schematically, so that only the structure related to the present invention is shown, and it is to be noted that the embodiments and features of the embodiments in the present application can be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
The first embodiment is as follows:
as shown in fig. 1, 2 and 3, an ultrasonic-based multilayer graphene detection system includes a worktable 101 and a sealed detection box 102 mounted on the worktable 101;
the sealing detection box 102 is fixedly arranged above the workbench 101, and forms a light-tight sealing space with the workbench 101, and a controller is arranged in the workbench 101;
the sealed detection box 102 is provided with a defect detection mechanism 103, an air blowing mechanism 104 and a negative pressure mechanism 105, wherein the defect detection mechanism 103 comprises an ultrasonic detection device 106 and an optical detection device 107;
as shown in fig. 1 and 4, the ultrasonic detection device 106 includes a first guide rail 108, a first slider 109, and an ultrasonic detector 201, wherein the first guide rail 108 is fixedly mounted on an inner wall of the seal detection box 102, the first guide rail 108 is provided with a first groove 202, the first slider 109 is provided with a first protrusion, the first groove 202 and the first protrusion are in sliding fit, so that the first slider 109 can slide along the first guide rail 108, the first slider 109 is fixedly connected with a first rotating mechanism 203, the ultrasonic detector 201 is fixedly mounted on the first rotating mechanism 203, the first rotating mechanism 203 is used for driving the ultrasonic detector to rotate, and the ultrasonic detector is electrically connected with the controller.
In order to ensure the detection accuracy of the ultrasonic detector, the ultrasonic detector needs to be moved to the vicinity of the surface of the graphene when detecting the defects of the graphene. First, first recess 202 on first guide rail 108 sets up to two, and is corresponding, and first lug on first slider 109 also sets up to two for first slider 109 is more steady when driving ultrasonic detector and reciprocates, possesses better stability. Secondly, a rack is installed in the first guide groove, a gear is installed on the first bump, and the gear is connected with the driving motor in a matching manner through a coupler, so that after the driving motor is started, the first slider 109 can slide along the first guide rail 108 through the meshing transmission relationship between the gear and the rack, and the control precision is high. In addition, still be provided with infrared sensor on first slider 109, infrared sensor can be real-time feeds back the positional information of first slider 109 to the controller for the controller can master the real-time positional information of first slider 109, with the operating position of more accurate control ultrasonic wave detection instrument.
It should be noted that, first rotary mechanism 203 can drive the ultrasonic detection instrument to move along a certain set plane, has realized the omnidirectional scanning of graphite alkene to adopt a probe to detect, practiced thrift the cost. Secondly, the angle between the ultrasonic detector and the horizontal plane of the graphene can be adjusted through the first rotating mechanism 203, so that the incident angle of ultrasonic waves can be adjusted, then the defect detection is performed on the graphene through the generated transverse waves, longitudinal waves and detection waves, and the function of tandem flaw detection can be achieved by adopting one ultrasonic detector 201.
As shown in fig. 1 and 4, the optical detection device 107 includes a second guide rail 204, a second slider 205, a third slider 206, an optical camera 207, and an optical amplifier 208, the second guide rail 204 is fixedly mounted on the inner wall of the sealed detection box 102, a second groove 209 is provided on the second guide rail 204, a second protrusion is provided on the second slider 205, the second groove 209 and the second protrusion realize sliding fit, so that the second slider 205 can slide along the second guide rail 204, a second rotation mechanism 301 is fixedly connected to the second slider 205, the optical camera 207 is fixedly mounted on the second rotation mechanism 301, the second rotation mechanism 301 is used for driving the optical camera 207 to rotate, and the optical camera 207 is electrically connected to the controller. It should be noted that the second slider 205 is used for driving the optical detection device 107 to move up and down, and the working principle and structure of the second guide rail 204 and the second slider 205 are the same as those of the first guide rail 108 and the first slider 109, and will not be described here.
The optical amplifier 208 is fixedly mounted on the third slider 206, a third protruding block is further disposed on the third slider 206, the third protruding block and the second groove 209 are in sliding fit, so that the third slider 206 can slide along the second guide rail 204, an optical compensation device 302 is further disposed at the bottom of the optical amplifier 208, and the optical compensation device 302 can emit monochromatic light.
It should be noted that the structure and the operation principle of the third slider 206 are the same as those of the first slider 109, and the third slider 206 is disposed below the second slider 205. The third slider 206 can drive the optical amplifier 208 to move up and down along the second guide rail 204, so that the optical amplifier 208 can amplify the graphene by 500-1500 times. After the position of the graphene defect is detected by the ultrasonic detector, the system can automatically calibrate the position of the defect to generate a coordinate position of the defect, then photograph the defect by the optical camera 207, calculate the area size of the defect by an image processing technology, and then identify whether the defect needs to be repaired or whether the defect meets a scrapping standard according to the area size. In addition, the optical compensation device 302 is used for generating monochromatic light, and when the optical camera 207 photographs graphene, the optical compensation function is achieved, so that the photographed image has higher definition, and the detection accuracy is improved.
As shown in fig. 1 and 5, the air blowing mechanism 104 is disposed at the top of the sealed detection box 102, the air blowing mechanism 104 includes an air blowing pump 303, a first air pipe 304, and an air blowing head 305, one end of the first air pipe 304 is hermetically connected with an output end of the air blowing pump 303, a first check valve is disposed on the first air pipe 304, the other end of the first air pipe 304 is hermetically connected with the air blowing head 305, and the air blowing head 305 is fixedly mounted on an inner wall of the top of the sealed detection box 102.
It should be noted that, during the production process, some impurity particles or dust are inevitably deposited on the surface of the graphene, which may have a large influence on the detection result. Therefore, before defect detection, impurities or dust attached to the surface of the graphene are blown up through the air blowing mechanism 104, and then the dust or the impurities are sucked away through the negative pressure mechanism 105, so that the graphene is cleaned through the air blowing mechanism 104, and the detection result is more accurate.
As shown in fig. 1 and 6, the negative pressure mechanism 105 includes an air pump 306, a second air pipe 307, and an air suction head 308, wherein one end of the second air pipe 307 is connected to an output end of the air pump 306 in a sealing manner, a second one-way valve is disposed on the second air pipe 307, the other end of the second air pipe 307 is connected to the air suction head 308 in a sealing manner, and the air suction head 308 is fixedly mounted on an inner wall of the bottom of the sealing detection box 102. Still be provided with pressure sensor on the inner wall of sealed detection case 102, the interval is provided with photoelectric sensor on the conveyer belt 309, pressure sensor with photoelectric sensor all with controller electric connection.
The negative pressure mechanism 105 can draw out air in the sealed detection box 102, so that the environment with negative pressure in the sealed detection box 102 can reduce air flow, reduce the influence of air ions on the ultrasonic intensity and the refraction degree, and improve the accuracy of defect detection. In addition, in order to ensure the reliability of the detection result, the control controls the defect detecting mechanism 103 to start the detection when the pressure of the pressure sensor reaches a certain threshold value.
As shown in fig. 1 and 3, a conveyor belt 309 and a fixing mechanism 401 are further disposed on the workbench 101, the conveyor belt 309 is used for driving the fixing mechanism 401 to move, the fixing mechanism 401 is used for fixing graphene, and a reflection plate is further disposed at the bottom of the fixing mechanism 401.
The working flow of the system is that after the graphene is conveyed to the sealed detection box 102 by the conveying belt 309, the sealed detection box 102 is closed; the controller controls the blowing pump 303 to work so as to blow up impurities or dust on the surface of the graphene; the controller controls the air pump 306 to work so as to pump air out of the sealing detection box 102, so that the air pressure in the sealing detection box 102 is not more than 70 kpa; after 1-2 minutes, the controller controls the blowing pump 303 to be closed, and the pressure of the sealing detection box 102 is continuously reduced to 30 kpa; when the pressure sensor detects that the pressure reaches 30kpa, the controller controls the ultrasonic detector 201 to descend to the upper surface of the graphene; the controller controls the ultrasonic detector to detect the defects of the graphene, and judges the defect positions of the graphene and records the defect positions according to the reflected waves received by the ultrasonic detector 201; the conveyor belt conveys the graphene below the optical detection device 107; controlling the movement of the optical magnifier 208 by the third slider 206 so that the optical camera focuses on the defect location; the controller controls the optical compensation device 302 to be started, and the optical camera 207 continuously takes pictures of the defect position to obtain 15 pictures; processing the picture to calculate the size of the defect area; and generating a corresponding processing scheme according to the size of the defect area.
It should be noted that, the controller controls the ultrasonic detector 201 to descend to the upper surface of the graphene, and the method further includes the following steps: acquiring position information of the upper surface of the graphene through a photoelectric sensor on a conveyor belt 309; acquiring the position information of the ultrasonic detector in real time through an infrared sensor on the first sliding block 109; carrying out difference calculation on the position information of the ultrasonic detector and the upper surface of the graphene in real time to obtain a real-time distance difference value between the ultrasonic detector and the upper surface of the graphene; judging whether the distance difference value is larger than the first distance and smaller than the second distance, if so, generating a first operation mode, and moving the ultrasonic detector according to the first operation mode; and judging whether the distance difference is greater than the second distance, if so, generating a second operation mode, and moving the ultrasonic detector according to the second operation mode. The first operation mode is uniform acceleration motion, and the second operation mode is uniform deceleration motion. Therefore, the moving speed of the ultrasonic detector is adjusted in real time according to the difference of the distances, the moving time of the ultrasonic detector can be intelligently shortened, the working efficiency is improved, the distance of the ultrasonic detector on the upper surface of the graphene can be more accurately controlled, the error of the first sliding block 109 caused by inertial movement is eliminated, and the detection precision is greatly improved.
Example two:
the invention also provides a defect detection method of the ultrasonic-based multilayer graphene detection system, which is applied to any one of the ultrasonic-based multilayer graphene detection systems and comprises the following steps:
s102: calibrating the ultrasonic detector to determine an incident angle, a longitudinal wave refraction angle and a transverse wave refraction angle of the ultrasonic detector, wherein the longitudinal wave refraction angle and the transverse wave refraction angle are complementary angles;
s104: controlling the first sliding block to slide along the first guide rail so as to drive the ultrasonic detector to the outer surface of the graphene;
s106: controlling an ultrasonic detector to be started, and detecting the graphene through ultrasonic waves emitted by the ultrasonic detector;
s108: and judging whether the graphene has a defect or not and the position of the corresponding defect according to the reflected wave received by the ultrasonic detector.
Further, in a preferred embodiment of the present invention, the detecting graphene by using ultrasonic waves emitted by an ultrasonic detector further includes:
s202: when ultrasonic waves emitted by an ultrasonic detector are emitted to the upper surface of graphene, generating a first transverse wave with a refraction angle a and a first longitudinal wave with a refraction angle b so as to detect the defects of the graphene;
s204: when the first transverse wave is conducted to the lower surface of the graphene, generating a second transverse wave with a reflection angle a and a first deformation longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
s206: when the first longitudinal wave is conducted to the lower surface of the graphene, generating a first deformed transverse wave with a reflection angle a and a second longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
s208: when the second transverse wave is conducted to the upper surface of the graphene, generating a third transverse wave with an emission angle a and a second deformation longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
s210: when the third transverse wave is conducted to the lower surface of the graphene, generating a fourth transverse wave with a reflection angle a and a third deformed longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
s212: a first intersection wave is formed by a part where the first transverse wave and the second longitudinal wave intersect, and when the first intersection wave is transmitted to the lower surface of the graphene, a first detection wave generated carries out defect detection on the graphene;
s214: and when the second intersection wave is transmitted to the upper surface of the graphene, the generated second detection wave carries out defect detection on the graphene.
It should be noted that, in the present invention, the horizontal distance from the first transverse wave to the upper surface of the graphene is one third of the horizontal distance from the first longitudinal wave to the upper surface of the graphene, and the horizontal distance from the second transverse wave to the lower surface of the graphene is one third of the horizontal distance from the deformed longitudinal wave to the lower surface of the graphene, specifically as follows: when the first transverse wave strikes the lower surface of the graphene, the second transverse wave with the reflection angle a is reflected, and the first deformed longitudinal wave with the reflection angle b is also reflected, and although the first deformed longitudinal wave with the reflection angle b is not the reflection of the first longitudinal wave, the first deformed longitudinal wave can be regarded as the reflection of the first longitudinal wave, so that the depth data of the reflection of the second transverse wave and the reflection of the first deformed longitudinal wave are consistent. According to the conditions, the included angle between the ultrasonic detector and the horizontal plane of the graphene is adjusted according to the angle of the first longitudinal wave with the reflection angle b, and when the depth data reflected by the first longitudinal wave is determined, the horizontal distance can be determined. If it is determined that the reflected wave is depth data of the first shear wave, the horizontal distance data is one third of the horizontal distance of the same depth longitudinal wave, and similarly, if it is determined that the reflected wave is depth data of the second shear wave, the horizontal distance data is one third of the horizontal distance of the same primary longitudinal wave.
Further, in a preferred embodiment of the present invention, the ultrasonic detector receives the reflected wave and determines whether the graphene has a defect and a position corresponding to the defect, further including:
the method comprises the following steps: any reflected wave received by the ultrasonic detector is generated by reflecting a transverse wave, a longitudinal wave or a detection wave;
step two: when a certain reflected wave received by the ultrasonic detector is generated by transverse wave reflection, determining that the reflected wave received by the ultrasonic detector is generated by transmitting a first transverse wave, a second transverse wave, a first deformed transverse wave, a third transverse wave and a fourth transverse wave according to the difference of the sound path and the propagation time of the first transverse wave, the second transverse wave, the first deformed transverse wave, the third transverse wave and the fourth transverse wave;
when a certain reflected wave received by the ultrasonic detector is generated by longitudinal wave reflection, determining that the reflected wave received by the ultrasonic detector is generated by the first longitudinal wave or the first deformed longitudinal wave, the second deformed longitudinal wave and the third deformed longitudinal wave reflection according to the difference of the sound path and the propagation time of the first longitudinal wave, the first deformed longitudinal wave, the second deformed longitudinal wave and the third deformed longitudinal wave;
when a certain reflected wave received by the ultrasonic detector is generated by the detection wave, determining that the reflected wave received by the ultrasonic detector is generated by the reflection of the first detection wave or the second detection wave according to the difference of the depth distance of the first detection wave or the second detection wave;
step three: and determining whether the graphene has defects and positions of corresponding defects according to the determination result of the second step and the reflected wave waveform.
It should be noted that, if there is a defect in the graphene, due to the existence of the defect, an interface between the defect and the graphene is formed, acoustic impedances between the interfaces are different, when the transmitted ultrasonic wave encounters the interface, the ultrasonic wave is reflected, the reflected energy is received by the probe, a waveform of a reflected wave is displayed at a certain position on the abscissa in the display screen, and the position on the abscissa is the depth of the defect in the graphene, so that the property of the defect can be reflected by the waveform of the reflected wave. For example: when the defect is an air hole, the height of the reflected wave is lower, and the waveform is stable in a single peak; when the defect is a crack, the height of the reflected wave is large, the wave amplitude is wide, multiple peaks can appear, and the wave crest can move up and down; when the defect is slag inclusion, the reflected wave is mostly dendritic, and a small peak is arranged on the main peak edge.
Further, in a preferred embodiment of the present invention, the defect detecting method further includes:
s302: acquiring area and density parameters of defects in graphene to generate a detection result;
s304: comparing the detection result with a preset threshold value;
s306: if the current graphene is less than or equal to a first preset threshold value, transmitting the current graphene to the next processing step;
s308: if the current graphene production step is larger than the second preset threshold and smaller than the third preset threshold, stopping the current graphene production step, and transmitting the current graphene production step to a repair line for a repair step;
s310: and if the current graphene generation step is larger than or equal to the third preset threshold, stopping the current graphene generation step and scrapping the graphene generation step.
It should be noted that the acquiring area and density parameters of the defect in the graphene to generate the detection result further includes: moving the position of the graphene with the defects detected by the ultrasonic detection device to the lower part of the optical detection device through a conveying line; the controller controls the third sliding block to slide along the second sliding rail, so that the optical amplifier amplifies the defects and focuses the defects; supplementing light to the place with insufficient light in the field environment through an optical compensation device; the optical camera takes a picture of the area with the defect so as to acquire an image; denoising the image, specifically, jointly processing the image by adopting Gaussian filtering and median filtering to filter a Gaussian white noise point and a stray point; stretching a gray histogram of the image to highlight a defect area; carrying out binarization processing on the image to generate a binarized image so as to obtain a defect area to be selected and position information; extracting the characteristics of the binary image, and screening out a defect area through area, length and curvature parameters; template matching is carried out on the extracted defect area, and a target defect is found out; and calculating the characteristic value of the extracted defect region to obtain the parameters of the area, the type, the length-width ratio and the area ratio of the target defect, and generating a detection result.
It should be noted that the defect is divided into three states according to the detection result, namely, the defect does not need to be repaired, the defect needs to be repaired and the defect needs to be scrapped. Therefore, the defects of the graphene can be correspondingly processed according to the set threshold, so that the production quality of the graphene is ensured, and the production cost can be saved.
While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The utility model provides a multilayer graphite alkene detecting system based on ultrasonic wave, includes the workstation and installs the sealed detection case on the workstation, its characterized in that:
the sealing detection box is fixedly arranged above the workbench and forms a light-tight sealing space with the workbench, and a controller is arranged in the workbench;
the sealed detection box is provided with a defect detection mechanism, an air blowing mechanism and a negative pressure mechanism, and the defect detection mechanism comprises an ultrasonic detection device and an optical detection device;
the ultrasonic detection device comprises a first guide rail, a first sliding block and an ultrasonic detector, wherein the first guide rail is fixedly arranged on the inner wall of the sealed detection box, a first groove is formed in the first guide rail, a first bump is arranged on the first sliding block, the first groove and the first bump are in sliding fit, so that the first sliding block can slide along the first guide rail, a first rotating mechanism is fixedly connected to the first sliding block, the ultrasonic detector is fixedly arranged on the first rotating mechanism, the first rotating mechanism is used for driving the ultrasonic detector to rotate, and the ultrasonic detector is electrically connected with the controller;
the optical detection device comprises a second guide rail, a second sliding block, a third sliding block, an optical camera and an optical amplifier, wherein the second guide rail is fixedly installed on the inner wall of the sealed detection box, a second groove is formed in the second guide rail, a second convex block is arranged on the second sliding block, the second groove is in sliding fit with the second convex block so that the second sliding block can slide along the second guide rail, a second rotating mechanism is fixedly connected to the second sliding block, the optical camera is fixedly installed on the second rotating mechanism, the second rotating mechanism is used for driving the optical camera to rotate, and the optical camera is electrically connected with the controller.
2. The ultrasonic-based multi-layer graphene detection system of claim 1, wherein: the optical amplifier is fixedly installed on the third sliding block, a third protruding block is further arranged on the third sliding block, the third protruding block is in sliding fit with the second groove, so that the third sliding block can slide on the second guide rail, an optical compensation device is further arranged at the bottom of the optical amplifier, and monochromatic light can be emitted out of the optical compensation device.
3. The ultrasonic-based multi-layer graphene detection system of claim 1, wherein: the air blowing mechanism is arranged at the top of the sealed detection box and comprises an air blowing pump, a first air pipe and an air blowing head, one end of the first air pipe is connected with the output end of the air blowing pump in a sealing mode, a first check valve is arranged on the first air pipe, the other end of the first air pipe is connected with the air blowing head in a sealing mode, and the air blowing head is fixedly installed on the inner wall of the top of the sealed detection box.
4. The ultrasonic-based multi-layer graphene detection system of claim 1, wherein: the negative pressure mechanism set up in the workstation, negative pressure mechanism includes aspiration pump, second trachea, head of bleeding, the tracheal one end of second with the output sealing connection of aspiration pump, just be provided with the second check valve on the second trachea, the tracheal other end of second with head of bleeding sealing connection, just head of bleeding fixed mounting in on the inner wall of sealed detection bottom of the case portion.
5. The ultrasonic-based multi-layer graphene detection system of claim 1, wherein: still be provided with conveyer belt and fixed establishment on the workstation, the conveyer belt is used for driving fixed establishment removes, fixed establishment is used for fixed graphite alkene, the fixed establishment bottom still is provided with the reflecting plate.
6. The ultrasonic-based multi-layer graphene detection system according to claim 1 or 5, wherein: still be provided with pressure sensor on the inner wall of sealed detection case, the interval is provided with photoelectric sensor on the conveyer belt, pressure sensor with photoelectric sensor all with controller electric connection.
7. A defect detection method of an ultrasonic-based multilayer graphene detection system is applied to the ultrasonic-based multilayer graphene detection system of any one of claims 1 to 6, and is characterized by comprising the following steps:
calibrating the ultrasonic detector to determine an incident angle, a longitudinal wave refraction angle and a transverse wave refraction angle of the ultrasonic detector, wherein the longitudinal wave refraction angle and the transverse wave refraction angle are complementary angles;
controlling the first sliding block to slide along the first guide rail so as to drive the ultrasonic detector to the outer surface of the graphene;
controlling an ultrasonic detector to be started, and detecting the graphene through ultrasonic waves emitted by the ultrasonic detector;
and judging whether the graphene has a defect or not and the position of the corresponding defect according to the reflected wave received by the ultrasonic detector.
8. The method of claim 7, wherein the detecting graphene is detected by ultrasonic waves emitted by an ultrasonic detector, and further comprising:
when ultrasonic waves emitted by an ultrasonic detector are emitted to the upper surface of graphene, generating a first transverse wave with a refraction angle a and a first longitudinal wave with a refraction angle b so as to detect the defects of the graphene;
when the first transverse wave is conducted to the lower surface of the graphene, generating a second transverse wave with a reflection angle a and a first deformation longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
when the first longitudinal wave is conducted to the lower surface of the graphene, generating a first deformed transverse wave with a reflection angle a and a second longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
when the second transverse wave is conducted to the upper surface of the graphene, generating a third transverse wave with an emission angle a and a second deformation longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
when the third transverse wave is conducted to the lower surface of the graphene, generating a fourth transverse wave with a reflection angle a and a third deformed longitudinal wave with a reflection angle b so as to detect the defects of the graphene;
a first intersection wave is formed by a part where the first transverse wave and the second longitudinal wave intersect, and when the first intersection wave is transmitted to the lower surface of the graphene, a first detection wave generated carries out defect detection on the graphene;
and when the second intersection wave is transmitted to the upper surface of the graphene, the generated second detection wave carries out defect detection on the graphene.
9. The method of claim 7, wherein the ultrasonic detector receives the reflected waves and determines whether the graphene is defect-free and the corresponding defect location, and further comprising:
the method comprises the following steps: any reflected wave received by the ultrasonic detector is generated by reflecting a transverse wave, a longitudinal wave or a detection wave;
step two: when a certain reflected wave received by the ultrasonic detector is generated by transverse wave reflection, determining that the reflected wave received by the ultrasonic detector is generated by transmitting a first transverse wave, a second transverse wave, a first deformed transverse wave, a third transverse wave and a fourth transverse wave according to the difference of the sound path and the propagation time of the first transverse wave, the second transverse wave, the first deformed transverse wave, the third transverse wave and the fourth transverse wave;
when a certain reflected wave received by the ultrasonic detector is generated by longitudinal wave reflection, determining that the reflected wave received by the ultrasonic detector is generated by the first longitudinal wave or the first deformed longitudinal wave, the second deformed longitudinal wave and the third deformed longitudinal wave reflection according to the difference of the sound path and the propagation time of the first longitudinal wave, the first deformed longitudinal wave, the second deformed longitudinal wave and the third deformed longitudinal wave;
when a certain reflected wave received by the ultrasonic detector is generated by the detection wave, determining that the reflected wave received by the ultrasonic detector is generated by the reflection of the first detection wave or the second detection wave according to the difference of the depth distance of the first detection wave or the second detection wave;
step three: and determining whether the graphene has defects and positions of corresponding defects according to the determination result of the second step and the reflected wave waveform.
10. The defect detection method of claim 7, further comprising:
acquiring area and density parameters of defects in graphene to generate a detection result;
comparing the detection result with a preset threshold value;
if the current graphene is less than or equal to a first preset threshold value, transmitting the current graphene to the next processing step;
if the current graphene production step is larger than the second preset threshold and smaller than the third preset threshold, stopping the current graphene production step, and transmitting the current graphene production step to a repair line for a repair step;
and if the current graphene generation step is larger than or equal to the third preset threshold, stopping the current graphene generation step and scrapping the graphene generation step.
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