CN105203561A - Multilayer graphene stain laser detection device - Google Patents
Multilayer graphene stain laser detection device Download PDFInfo
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- CN105203561A CN105203561A CN201510689299.0A CN201510689299A CN105203561A CN 105203561 A CN105203561 A CN 105203561A CN 201510689299 A CN201510689299 A CN 201510689299A CN 105203561 A CN105203561 A CN 105203561A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 69
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 69
- 238000001514 detection method Methods 0.000 title abstract description 11
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 50
- 238000012546 transfer Methods 0.000 claims description 45
- 229910052757 nitrogen Inorganic materials 0.000 claims description 27
- 230000000740 bleeding effect Effects 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 21
- 239000007789 gas Substances 0.000 claims description 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 239000001307 helium Substances 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 6
- 150000002829 nitrogen Chemical class 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000010408 sweeping Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 14
- 230000002776 aggregation Effects 0.000 abstract 1
- 238000004220 aggregation Methods 0.000 abstract 1
- 230000002265 prevention Effects 0.000 abstract 1
- 239000000428 dust Substances 0.000 description 9
- 230000009471 action Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
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- 230000000149 penetrating effect Effects 0.000 description 2
- 241000282326 Felis catus Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
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- 238000003672 processing method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to a multilayer graphene stain laser detection device. The multilayer graphene stain laser detection device comprises a stander, and a scanning mechanism, a controller, an operating mechanism, a photographing mechanism, an image processor, a seal cover, an air blower and a vacuumizing device, which are arranged on the stander; the laser with better aggregation property is used for gradual scanning, the precision and error prevention performance are higher, a laser sensor is used for acquiring a laser signal, the laser signal is analyzed by a control unit, the non-transparency characteristic can be convenient for the test, and the interference by other light on a test result is prevented; two or more laser generators are used for generating different laser to scan, the primary flat laser has higher scanning speed, the scanning time can be prevented from being reduced at the same time, the secondary scanning is used for positioning a position having a problem discovered in the primary scanning, the cylindrical laser is used for scanning the position, so that the precision in positioning is realized; the repeated labor on repeat positioning is avoided.
Description
Technical field
The present invention relates to a kind of multi-layer graphene stain laser detector.
Background technology
Graphene is the two dimensional crystal only having one deck atomic thickness being stripped out from graphite material, being made up of carbon atom.Graphene is the thinnest material, is also the most tough material, more taller than best steel 200 times of fracture strength.It has again good elasticity simultaneously, and stretch range can reach 20% of own dimensions.If make hammock with the Graphene of one piece of area 1 square metre, own shortage in weight 1 milligram can bear the cat of a kilogram.Graphene is almost completely transparent, only absorbs the light of 2.3%.On the other hand, it is very fine and close, even minimum gas atom also cannot penetrate.These features make it be suitable as very much the raw material of transparent electron product, as transparent touch display screen, luminous plaque and solar panel.
Due to the excellent performance of Graphene, Graphene becomes the main points of a breakthrough bottleneck of current development in science and technology, although China is upper at the forefront in the world in the paper studies of Graphene, but in the application and detection of Graphene, also there is many deficiencies, in the application of Graphene, whether multi-layer graphene, in coincidence process, reaches the requirement of use, needs good detection means and checkout equipment.
Summary of the invention
The object of the invention is to: for above-mentioned Problems existing, a kind of multi-layer graphene stain laser detector is provided, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and have stronger accuracy and mistake proofing, laser sensor gathers laser signal, has control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result; Camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, by two or more laser generator, produce different laser, scan, primary flat laser, sweep velocity faster can be had, can avoid the time reducing scanning, second time scanning positions the position of the first scanning discovery problem, its location simultaneously, utilize Column laser to scan, can realize accurate location; Avoid the duplication of labour of resetting.
The accuracy that impact detects.
The technical solution used in the present invention is as follows:
The invention discloses a kind of multi-layer graphene stain laser detector, comprising: frame and the scanning mechanism be arranged in frame, controller, operating mechanism, mechanism of taking pictures, image processor, seal closure, air blown producer and apparatus for vacuum producing;
Scanning mechanism comprises scanning support and be fixed on laser instrument on scanning support, lifter, and laser instrument comprises the laser pick-off groove of a flat laser generator, a round end laser generator and spill, is provided with some laser sensors inside laser pick-off groove; Laser sensor, two laser generators and lifter are electrically connected with controller respectively;
Fixator, catoptron and optical screen that operating mechanism comprises transfer table and arranges on a mobile station, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Optical screen is arranged on the side of transfer table, for generation of the light of single color; The below of fixator is located at by catoptron;
Mechanism of taking pictures comprises the fixed mount be fixed in frame, the camera be arranged on fixed mount; Be provided with retractor device at the camera lens place of camera, below retractor device, be provided with moveable magnifier; This mechanism of taking pictures is connected with controller;
Image processor is arranged and machine frame inside, is connected, for image procossing with controller;
Seal closure is located at above frame, and forms lighttight confined space with frame, is provided with sealing ring in the edge of seal closure; Described seal closure is opaque seal closure; Seal closure is provided with observation panel to be opened/closed;
Apparatus for vacuum producing is arranged with in frame, comprises vacuum motor, gas outlet and bleeding point; Retaining valve is provided with between gas outlet and bleeding point;
Air blown producer with setting and frame comprises the nitrogen pot, solenoid valve and the air blast head that are connected successively; Also this nitrogen pot is connected by solenoid valve and pipeline at bleeding point place.
Further, the air blast head of described air blown producer has flat nozzle.
Further, described vacuum motor adopts the three-phase alternating current stepper motor of 220v; Described gas outlet is greater than bleeding point.
Further, the nitrogen of 88%, the helium of 5% and 7% hydrogen is comprised in described nitrogen pot.
Further, the partially flat laser that described flat laser generator generation is wide is 1mm, thickness is 10um; It is the Column laser of 10um that described round end laser generator produces radius.
Further, high, medium and low three gears of described lifter, respectively corresponding friction speed; The translational speed of low or first gear is 5cm/min.
Due to said structure, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and there is stronger accuracy and mistake proofing, laser sensor gathers laser signal, have control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result; Camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, more photo can be taken instantaneously, image processor detects, and has better anti-error property, improves accuracy, subnormal ambient in seal closure, can reduce air flowing, on the impact of laser beam, its air blown producer can clean this confined space, the dust in air is avoided to drop on Graphene to be detected, the accuracy that impact detects.
Further, the control system of multi-layer graphene stain laser detector comprises:
Control module, comprises controller;
Scanning element, comprises scanning mechanism, and scanning mechanism comprises laser instrument, lifter, the laser pick-off groove that laser instrument comprises a flat laser generator, a round end laser generator and spill and the some laser sensors be located at inside laser pick-off groove; Laser instrument is elevated to assigned address, the partially flat laser that the generation of band shape laser instrument is wide is 1mm, thickness is 10um, and laser is received by the laser sensor of appointed area in laser pick-off groove after Graphene reflection; Laser sensor in non-designated region receives laser intensity change that the laser sensor in laser or appointed area receives when exceeding setting value, then opening round end laser generator generation radius is the Column laser of 10um, Column laser is along the Width scanning of band shape laser, Column laser, on Graphene and catoptron reflects laser sensor, is convenient to calculate the position with stain on Graphene;
Operating unit, comprise transfer table and upper setting fixator on a mobile station and catoptron, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Fixator is used for fixing Graphene, and catoptron is located at below Graphene, and optical screen is located at the side of fixator, for generation of monochromatic light; When transfer table moves, the Graphene be located on fixator is moved horizontally, and reflects laser is to laser sensor;
Photographing unit, comprises mechanism of taking pictures, and mechanism of taking pictures comprises camera, be located at the retractor device at camera lens place and moveable magnifier and optical screen; Magnifier is movable to retractor device front end, is convenient to take pictures; The monochromatic light that reflection optical screen produces is taken pictures by camera;
Vacuum unit, comprises seal closure, apparatus for vacuum producing and air blown producer; The retaining valve that apparatus for vacuum producing comprises vacuum motor, gas outlet, bleeding point and is arranged between gas outlet and bleeding point; Air blown producer comprises nitrogen pot, solenoid valve and air blast head, and air blast head is controlled to rotate by controller; At bleeding point, place is also connected with nitrogen pot by solenoid valve; Seal closure coordinates frame scanning element, operating unit and photographing unit to be sealed; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot;
Graphics processing unit, carries out image procossing for the picture collected photographing unit;
Control module is connected with scanning element, operating unit, photographing unit and vacuum unit, graphics processing unit respectively, and for controlling each unit.
Due to said system, make unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviates the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action; Its scanning element, produces two kinds of different laser, carries out respectively, preliminary scan and accurate scan to laser, avoids the accuracy because of individualized reasons impact scanning; Operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; Photographing unit shows after stain can being amplified intuitively, can be convenient to observe and show; Vacuum unit, reduce seal closure can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; Meanwhile, its air blown producer, can discharge the gas that in air, particle is large, and the dust simultaneously reducing seal closure is avoided, and the dust in seal closure is on the impact of testing result.
Further, the Laser Scanning of control system:
(1), open scanning element, control laser instrument lifting high to distance transfer table 20cm-22cm, control flat laser generator and produce the band shape laser that width is 1mm, thickness is 10um;
(2), control module control transfer table move with the speed transverse horizontal of 60cm/min, make reflective mirror move to band shape laser place, reflective mirror will be with shape laser reflection to laser sensor place;
(3), the position of adjustment transfer table, band shape laser, with the velocity sweeping catoptron of 2.5cm/min, scans reflective mirror, and laser sensor receives band shape laser; The position of control module record move platform, and the position and the laser intensity that record the laser sensor of receiving belt shape laser simultaneously; ;
(4), by the fixator above Graphene horizontal positioned to reflective mirror, adjustment transfer table utilizes band shape laser to carry out transversal scanning with the speed of 2.5cm/min to Graphene, and control module again detects and records the position of the laser sensor of receiving belt shape laser and the position of laser intensity and transfer table; The data of record before and after control module contrast, when the position of the laser sensor of receiving belt shape laser deflects or laser intensity change is greater than 2.75%, stop transfer table moving and close flat laser generator; Record current flat laser-scanning position;
(5), open Column laser, the scanning position of Column laser to laser flat before Graphene carries out longitudinal scanning with the speed of 0.2cm/min; When the position of the laser sensor receiving Column laser deflects or laser intensity variable quantity is greater than 6%, close laser instrument; The scanning position of control module mark Column laser on Graphene is stain position.
Due to above-mentioned Laser Scanning, by two or more laser generator, produce different laser, scan, primary flat laser, sweep velocity faster can be had, can avoid the time reducing scanning, second time scanning positions the position of the first scanning discovery problem, its location simultaneously, utilize Column laser to scan, can realize accurate location; Avoid the duplication of labour of resetting.
In sum, owing to have employed technique scheme, the invention has the beneficial effects as follows:
1, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and there is stronger accuracy and mistake proofing, laser sensor gathers laser signal, there is control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result;
2, camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, more photo can be taken instantaneously, image processor detects, and has better anti-error property, improves accuracy, subnormal ambient in seal closure, can reduce air flowing, on the impact of laser beam, its air blown producer can clean this confined space, the dust in air is avoided to drop on Graphene to be detected, the accuracy that impact detects;
3, unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviate the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action;
4, operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; The dust reducing seal closure is avoided, and the dust in seal closure is on the impact of testing result; Improve the accuracy of result and accuracy rate, for test provides an excellent environment.
Accompanying drawing explanation
Fig. 1 is image processing method front view in the present invention.
Mark in figure: 1-frame, 2-transfer table, 3-takes pictures mechanism, 4-air blast head, 5-scanning mechanism, 6-optical screen, 7-seal closure, 8-nitrogen pot, 9-vacuum motor.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
specific embodiment 1:
As shown in Figure 1, a kind of multi-layer graphene stain laser detector of the present invention, comprising: frame 1 and be arranged on scanning mechanism 5, controller, the operating mechanism in frame 1, mechanism 3 of taking pictures, image processor, seal closure 7, air blown producer and apparatus for vacuum producing;
Scanning mechanism 5 comprises scanning support and be fixed on laser instrument on scanning support, lifter, and laser instrument comprises the laser pick-off groove of a flat laser generator, a round end laser generator and spill, is provided with some laser sensors inside laser pick-off groove; Laser sensor, two laser generators and lifter are electrically connected with controller respectively;
Fixator, catoptron and the optical screen 6 that operating mechanism comprises transfer table 2 and is arranged on transfer table 2, transfer table 2 be provided with transverse shifting device and vertically move device, transfer table 2 and optical screen 6 are electrically connected with controller; Optical screen 6 is arranged on the side of transfer table 2, for generation of the light of single color; The below of fixator is located at by catoptron;
Mechanism 3 of taking pictures comprises the fixed mount be fixed in frame 1, the camera be arranged on fixed mount; Be provided with retractor device at the camera lens place of camera, below retractor device, be provided with moveable magnifier; This mechanism 3 of taking pictures is connected with controller;
Image processor arranges with frame 1 inner, is connected, for image procossing with controller;
Seal closure 7 is located at above frame 1, and forms lighttight confined space with frame 1, is provided with sealing ring in the edge of seal closure 7;
Apparatus for vacuum producing is arranged with in frame 1, comprises vacuum motor 9, gas outlet and bleeding point; Retaining valve is provided with between gas outlet and bleeding point;
Air blown producer with arrange with frame 1 comprises be connected successively nitrogen pot 8, solenoid valve and air blast 4; Also this nitrogen pot 8 is connected by solenoid valve and pipeline at bleeding point place.
The partially flat laser that flat laser generator generation is wide is 1mm, thickness is 10um; It is the Column laser of 10um that round end laser generator produces radius.
High, medium and low three gears of lifter, respectively corresponding friction speed; The translational speed of low or first gear is 5cm/min.
Seal closure 7 is opaque seal closure 7; Seal closure 7 is provided with observation panel to be opened/closed.
The air blast of air blown producer 4 has flat nozzle.
Vacuum motor 9 adopts the three-phase alternating current stepper motor of 220v; Gas outlet is greater than bleeding point.
The nitrogen of 88%, the helium of 5% and 7% hydrogen is comprised in nitrogen pot 8.
Due to said structure, the principle utilizing laser to be refracted detects the stain on Graphene, there is higher accuracy, adopt the better laser of polymerism to scan one by one and there is stronger accuracy and mistake proofing, laser sensor gathers laser signal, have control module analysis, its lighttight characteristic can be convenient to test, has and prevents the interference of other light and affect test result; Camera is high definition camera, and can take a picture to the carrying out of amplification 500 times-1000 times, it has continuous shooting function, more photo can be taken instantaneously, image processor detects, and has better anti-error property, improves accuracy, subnormal ambient in seal closure 7, can reduce air flowing, on the impact of laser beam, its air blown producer can clean this confined space, the dust in air is avoided to drop on Graphene to be detected, the accuracy that impact detects.
specific embodiment 2:
According to the control system of the multi-layer graphene stain laser detector of embodiment 1, comprising:
Control module, comprises controller;
Scanning element, comprises scanning mechanism 5, and scanning mechanism 5 comprises laser instrument, lifter, the laser pick-off groove that laser instrument comprises a flat laser generator, a round end laser generator and spill and the some laser sensors be located at inside laser pick-off groove; Laser instrument is elevated to assigned address, the partially flat laser that the generation of band shape laser instrument is wide is 1mm, thickness is 10um, and laser is received by the laser sensor of appointed area in laser pick-off groove after Graphene reflection; Laser sensor in non-designated region receives laser intensity change that the laser sensor in laser or appointed area receives when exceeding setting value, then opening round end laser generator generation radius is the Column laser of 10um, Column laser is along the Width scanning of band shape laser, Column laser, on Graphene and catoptron reflects laser sensor, is convenient to calculate the position with stain on Graphene;
Operating unit, comprises transfer table 2 and the fixator be above arranged on transfer table 2 and catoptron, and transfer table 2 be provided with transverse shifting device and vertically move device, transfer table 2 and optical screen 6 are electrically connected with controller; Fixator is used for fixing Graphene, and catoptron is located at below Graphene, and optical screen 6 is located at the side of fixator, for generation of monochromatic light; When transfer table 2 moves, the Graphene be located on fixator is moved horizontally, and reflects laser is to laser sensor;
Photographing unit, comprises mechanism 3 of taking pictures, and mechanism 3 of taking pictures comprises camera, be located at the retractor device at camera lens place and moveable magnifier and optical screen 6; Magnifier is movable to retractor device front end, is convenient to take pictures; The monochromatic light that reflection optical screen 6 produces is taken pictures by camera;
Vacuum unit, comprises seal closure 7, apparatus for vacuum producing and air blown producer; The retaining valve that apparatus for vacuum producing comprises vacuum motor 9, gas outlet, bleeding point and is arranged between gas outlet and bleeding point; Air blown producer comprises nitrogen pot 8, solenoid valve and air blast 4, and air blast 4 is controlled to rotate by controller; Also nitrogen pot 8 is connected with by solenoid valve at bleeding point place; Seal closure 7 coordinates frame 1 scanning element, operating unit and photographing unit to be sealed; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot 8;
Graphics processing unit, carries out image procossing for the picture collected photographing unit;
Control module is connected with scanning element, operating unit, photographing unit and vacuum unit, graphics processing unit respectively, and for controlling each unit.
Due to said system, make unit precise match, reach better Detection results, can according to its using method, it is effectively detected, alleviates the workload of manual detection, accurately can control the unified allocation of resources work of each unit, avoid the action conflict between unit, affect its accuracy of action; Its scanning element, produces two kinds of different laser, carries out respectively, preliminary scan and accurate scan to laser, avoids the accuracy because of individualized reasons impact scanning; Operating unit, moves Graphene, can displacement less, avoid laser move mode, excessive velocities, the defect that sweep velocity should not control; Photographing unit shows after stain can being amplified intuitively, can be convenient to observe and show; Vacuum unit, reduce seal closure 7 can air, reduce the impact of air ion on laser intensity and degree of penetrating partially; Meanwhile, its air blown producer, can discharge the gas that in air, particle is large, and the dust simultaneously reducing seal closure 7 is avoided, and the dust in seal closure 7 is on the impact of testing result.
specific embodiment 3:
Laser Scanning according to the control system of specific embodiment 2:
(1), open scanning element, control laser instrument lifting high to distance transfer table 220cm-22cm, control flat laser generator and produce the band shape laser that width is 1mm, thickness is 10um;
(2), control module control transfer table 2 move with the speed transverse horizontal of 60cm/min, make reflective mirror move to band shape laser place, reflective mirror will be with shape laser reflection to laser sensor place;
(3), the position of adjustment transfer table 2, band shape laser, with the velocity sweeping catoptron of 2.5cm/min, scans reflective mirror, and laser sensor receives band shape laser; The position of control module record move platform 2, and the position and the laser intensity that record the laser sensor of receiving belt shape laser simultaneously; ;
(4), by the fixator above Graphene horizontal positioned to reflective mirror, adjustment transfer table 2 utilizes band shape laser to carry out transversal scanning with the speed of 2.5cm/min to Graphene, and control module again detects and records the position of the laser sensor of receiving belt shape laser and the position of laser intensity and transfer table 2; The data of record before and after control module contrast, when the position of the laser sensor of receiving belt shape laser deflects or laser intensity change is greater than 2.75%, stop transfer table 2 move and close flat laser generator; Record current flat laser-scanning position;
(5), open Column laser, the scanning position of Column laser to laser flat before Graphene carries out longitudinal scanning with the speed of 0.2cm/min; When the position of the laser sensor receiving Column laser deflects or laser intensity variable quantity is greater than 6%, close laser instrument; The scanning position of control module mark Column laser on Graphene is stain position.
Due to above-mentioned Laser Scanning, by two laser generators, produce different laser, scan, primary flat laser, sweep velocity faster can be had, can avoid the time reducing scanning, second time scanning positions the position of the first scanning discovery problem, its location simultaneously, utilize Column laser to scan, can realize accurate location; Avoid the duplication of labour of resetting.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. a multi-layer graphene stain laser detector, is characterized in that, comprising: frame and the scanning mechanism be arranged in frame, controller, operating mechanism, mechanism of taking pictures, image processor, seal closure, air blown producer and apparatus for vacuum producing;
Scanning mechanism comprises scanning support and be fixed on laser instrument on scanning support, lifter, and laser instrument comprises the laser pick-off groove of a flat laser generator, a round end laser generator and spill, is provided with some laser sensors inside laser pick-off groove; Laser sensor, two laser generators and lifter are electrically connected with controller respectively;
Fixator, catoptron and optical screen that operating mechanism comprises transfer table and arranges on a mobile station, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Optical screen is arranged on the side of transfer table, for generation of the light of single color; The below of fixator is located at by catoptron;
Mechanism of taking pictures comprises the fixed mount be fixed in frame, the camera be arranged on fixed mount; Be provided with retractor device at the camera lens place of camera, below retractor device, be provided with moveable magnifier; This mechanism of taking pictures is connected with controller;
Image processor is arranged and machine frame inside, is connected, for image procossing with controller;
Seal closure is located at above frame, and forms lighttight confined space with frame, is provided with sealing ring in the edge of seal closure; Described seal closure is opaque seal closure; Seal closure is provided with observation panel to be opened/closed;
Apparatus for vacuum producing is arranged with in frame, comprises vacuum motor, gas outlet and bleeding point; Retaining valve is provided with between gas outlet and bleeding point;
Air blown producer with setting and frame comprises the nitrogen pot, solenoid valve and the air blast head that are connected successively; Also this nitrogen pot is connected by solenoid valve and pipeline at bleeding point place.
2. multi-layer graphene stain laser detector according to claim 1, is characterized in that, the air blast head of described air blown producer has flat nozzle.
3. multi-layer graphene stain laser detector according to claim 1, is characterized in that, described vacuum motor adopts the three-phase alternating current stepper motor of 220v; Described gas outlet is greater than bleeding point.
4. multi-layer graphene stain laser detector according to claim 1, is characterized in that, comprises the nitrogen of 88%, the helium of 5% and 7% hydrogen in described nitrogen pot.
5. multi-layer graphene stain laser detector according to claim 4, is characterized in that, the partially flat laser that described flat laser generator generation is wide is 1mm, thickness is 10um; It is the Column laser of 10um that described round end laser generator produces radius.
6. multi-layer graphene stain laser detector according to claim 4, is characterized in that, high, medium and low three gears of described lifter, respectively corresponding friction speed; The translational speed of low or first gear is 5cm/min.
7. the multi-layer graphene stain laser detector according to any one of claim 1-6, is characterized in that, the control system of multi-layer graphene stain laser detector comprises:
Control module, comprises controller;
Scanning element, comprises scanning mechanism, and scanning mechanism comprises laser instrument, lifter, the laser pick-off groove that laser instrument comprises a flat laser generator, a round end laser generator and spill and the some laser sensors be located at inside laser pick-off groove; Laser instrument is elevated to assigned address, the partially flat laser that the generation of band shape laser instrument is wide is 1mm, thickness is 10um, and laser is received by the laser sensor of appointed area in laser pick-off groove after Graphene reflection; Laser sensor in non-designated region receives laser intensity change that the laser sensor in laser or appointed area receives when exceeding setting value, then opening round end laser generator generation radius is the Column laser of 10um, Column laser is along the Width scanning of band shape laser, Column laser, on Graphene and catoptron reflects laser sensor, is convenient to calculate the position with stain on Graphene;
Operating unit, comprise transfer table and upper setting fixator on a mobile station and catoptron, transfer table be provided with transverse shifting device and vertically move device, transfer table and optical screen are electrically connected with controller; Fixator is used for fixing Graphene, and catoptron is located at below Graphene, and optical screen is located at the side of fixator, for generation of monochromatic light; When transfer table moves, the Graphene be located on fixator is moved horizontally, and reflects laser is to laser sensor;
Photographing unit, comprises mechanism of taking pictures, and mechanism of taking pictures comprises camera, be located at the retractor device at camera lens place and moveable magnifier and optical screen; Magnifier is movable to retractor device front end, is convenient to take pictures; The monochromatic light that reflection optical screen produces is taken pictures by camera;
Vacuum unit, comprises seal closure, apparatus for vacuum producing and air blown producer; The retaining valve that apparatus for vacuum producing comprises vacuum motor, gas outlet, bleeding point and is arranged between gas outlet and bleeding point; Air blown producer comprises nitrogen pot, solenoid valve and air blast head, and air blast head is controlled to rotate by controller; At bleeding point, place is also connected with nitrogen pot by solenoid valve; Seal closure coordinates frame scanning element, operating unit and photographing unit to be sealed; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot; The nitrogen of 88%, the helium of 5% and 7% hydrogen is included in nitrogen pot;
Graphics processing unit, carries out image procossing for the picture collected photographing unit;
Control module is connected with scanning element, operating unit, photographing unit and vacuum unit, graphics processing unit respectively, and for controlling each unit.
8. multi-layer graphene stain laser detector according to claim 7, is characterized in that, the Laser Scanning of control system:
(1), open scanning element, control laser instrument lifting high to distance transfer table 20cm-22cm, control flat laser generator and produce the band shape laser that width is 1mm, thickness is 10um;
(2), control module control transfer table move with the speed transverse horizontal of 60cm/min, make reflective mirror move to band shape laser place, reflective mirror will be with shape laser reflection to laser sensor place;
(3), the position of adjustment transfer table, band shape laser, with the velocity sweeping catoptron of 2.5cm/min, scans reflective mirror, and laser sensor receives band shape laser; The position of control module record move platform, and the position and the laser intensity that record the laser sensor of receiving belt shape laser simultaneously; ;
(4), by the fixator above Graphene horizontal positioned to reflective mirror, adjustment transfer table utilizes band shape laser to carry out transversal scanning with the speed of 2.5cm/min to Graphene, and control module again detects and records the position of the laser sensor of receiving belt shape laser and the position of laser intensity and transfer table; The data of record before and after control module contrast, when the position of the laser sensor of receiving belt shape laser deflects or laser intensity change is greater than 2.75%, stop transfer table moving and close flat laser generator; Record current flat laser-scanning position;
(5), open Column laser, the scanning position of Column laser to laser flat before Graphene carries out longitudinal scanning with the speed of 0.2cm/min; When the position of the laser sensor receiving Column laser deflects or laser intensity variable quantity is greater than 6%, close laser instrument; The scanning position of control module mark Column laser on Graphene is stain position.
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| CN113960169A (en) * | 2021-10-21 | 2022-01-21 | 山东天亚达新材料科技有限公司 | Multilayer graphene detection system based on ultrasonic waves |
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