CN113959376A - Surface roughness measurement system based on few mode optical fiber - Google Patents
Surface roughness measurement system based on few mode optical fiber Download PDFInfo
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- CN113959376A CN113959376A CN202111186344.2A CN202111186344A CN113959376A CN 113959376 A CN113959376 A CN 113959376A CN 202111186344 A CN202111186344 A CN 202111186344A CN 113959376 A CN113959376 A CN 113959376A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
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Abstract
The invention provides a surface roughness measuring system based on a few-mode optical fiber. The device consists of a multi-channel light source, a single-mode optical fiber, a motion control device, a few-mode optical fiber detection device, a photoelectric detector array, a multi-channel data acquisition unit and a computer. The few-mode optical fiber detection device comprises an optical fiber circulator array, a photon lantern and few-mode optical fibers. The reflected signal containing the surface information of the object can be obtained by scanning the optical fiber mode in sequence, and the high-precision surface roughness measurement can be realized by calculating through a corresponding algorithm. The invention has the advantages that the incident light path and the detection light path are the same optical fiber, thereby reducing the size of the detection device and improving the integration level of the device.
Description
Technical Field
The invention relates to a surface roughness measurement system, in particular to a surface roughness measurement system based on a few-mode optical fiber, and belongs to the technical field of analysis and measurement control.
Background
The surface roughness is the most common parameter for describing the micro-topography of the surface of an object, represents the shape error of the surface of the object, and is a direct reflection of the surface quality. The amplitude and the density of the shape errors have great influence on the properties of the object such as wear resistance, fit stability, fatigue resistance, corrosion resistance, sealing property and the like, and the influence is important in the fields of precision machining, electronics, medicine, optics and the like. Therefore, how to realize high-precision measurement of the surface roughness of an object has been a subject of academic research.
After decades of development, there are two main types of methods for measuring the surface roughness of an object at the present stage: contact measurement and non-contact measurement. The contact measurement is a method of directly contacting a measuring probe of a measuring device with the surface of an object to be measured and recording geometrical information of the plane to be measured. The contact measurement method is not suitable for measuring the surface of a micro-nano size device because the contact measurement method can directly obtain the geometric information of the plane to be measured without calibration, but the rigidity of the plane to be measured must be considered during measurement, and the contact measurement method can damage the plane to be measured.
The non-contact measurement method is characterized in that the principle of interference, scattering and the like in optics is utilized, and the non-contact measurement method does not need to be in direct contact with a plane to be measured in the measurement process, so that the plane to be measured cannot be damaged in the measurement process, and measurement errors caused by the contact of a measurement instrument and the plane to be measured can be avoided. The non-contact measurement method mainly comprises a scattering method, an interference method, a confocal microscopic method, a speckle measurement method and the like, is suitable for measuring geometric parameters of the surfaces of soft metal materials, waveguide fibers or ultra-precise devices, has the characteristics of high speed, high efficiency, high resolution and the like, and can be used for on-line measurement.
However, most of the existing methods are only suitable for roughness measurement on the external surface of a large object, but it is still difficult to perform roughness measurement on the surface of a micron-sized object and the surface in the deep part of other gaps which are difficult to enter, and especially, it is more difficult to detect the surface of a groove on some small-sized components.
In order to solve the above problems, the patent of application No. 201310150620.9 proposes a fiber bundle type surface roughness measuring device, which comprises a main emission fiber, a plurality of collection fibers, an auxiliary emission fiber and two reflectors to form an optical cavity, wherein the reflectors are used to adjust the direction of the emergent light, receive the reflected light data after the main emission fiber and the auxiliary emission fiber emit laser, and measure the surface roughness of the object according to the reflected data. The integration level of the optical fiber bundle for measurement is greatly improved compared with a space optical path measuring device, the size of the device can be designed to be smaller, and the measurement cannot be carried out on the surfaces of some narrow and deep grooves.
Two types of microstructure fiber-based surface roughness detection devices are proposed in patent applications No. 201911047046.8 and No. 201911047074.X, which use a ring core fiber and a multi-core fiber, respectively, and focus the outgoing light at one point by micromachining the end faces of the fibers, and perform surface roughness measurement by reflected light. Two kinds of devices all adopt single optic fibre as the probe end, very big reduction the probe size for the probe can go deep into some depths of slot and measure. However, in both methods, the end of the optical fiber needs to be micro-machined to form a taper angle on the end surface, and in the machining process, the parameters of the taper angle are difficult to control accurately, so that batch production is difficult to realize at the present stage.
Aiming at the advantages and the defects of the prior art, the invention provides a surface roughness measuring system based on a few-mode optical fiber. The method can be used for measuring the roughness of the surface of an object on line and is suitable for detecting the surface roughness of the deeper part of some grooves. The system uses a single light as the detection end, improves the integration level of the whole detection system, can detect the surface of an object in a smaller area, and has a simple detection end structure and convenient batch production.
Disclosure of Invention
The invention aims to provide a surface roughness measuring system based on a few-mode optical fiber, which has a simple and compact structure and is convenient to operate.
The purpose of the invention is realized as follows:
the measuring system consists of a multi-channel light source 1, a single-mode optical fiber 2, a motion control device 3, a few-mode optical fiber detecting device 4, a photoelectric detector array 5, a multi-channel data acquisition unit 6 and a computer 7. The few-mode fiber detection device comprises fiber circulator arrays 4011, 4012 … … 401N, a photon lantern 402 and few-mode fibers 403. In the system, a multi-channel light source 1 is connected with a port a of each circulator in fiber circulator arrays 4011 and 4012 … … 401N through a single-mode fiber 2, a port b of each circulator is connected with each input end of a photon lantern 402, the output end of the photon lantern is connected with a section of few-mode fiber 403, and a motion control device 3 controls the movement of the few-mode fiber.
Light emitted by one channel of the multi-channel light source 1 is transmitted to one incident end of the photon lantern 402 through a circulator (such as 4011) connected with the light, passes through the photon lantern 402, excites a certain corresponding mode in the few-mode optical fibers 403, and is emitted to the surface 404 of the object to be measured through the few-mode optical fibers 403. The light reflected by the surface of the object is incident on the at least one mode fiber 403, and due to different incidence angles, the reflected light excites different modes in the at least one mode fiber, each excitation mode is transmitted to the corresponding incident fiber through the photon lantern and transmitted to the photodetector array 5 through the c port of the corresponding circulator, the multi-channel data collector 6 collects information detected by each photodetector, and finally the information is resolved through a related algorithm, and the surface roughness of the object is displayed on the computer 7.
The measuring system mainly utilizes the transmission characteristic of the optical fiber to the light. When a beam of light is incident on the surface of an object to be measured at a certain angle, the surface is supposed to be ideal and smooth, and the incident light is totally reflected along the specular reflection direction; when the surface is not smooth, part or all of the light incident on the surface is diffusely scattered and deviates from the specular reflection angle, so that the light energy change within a certain angle in space can reflect the characteristics of the surface roughness. For specular reflection, the reflected light satisfies the fresnel law, and the smoother the surface of the object, the greater the reflected energy. Accordingly, if the optical signal reflected (including scattered) from the surface to be measured is received, the roughness of the surface can be evaluated by the intensity of the reflected light.
For the few-mode fiber detection device, when a certain mode is incident on a non-smooth object surface, specular reflection and diffuse scattering occur simultaneously, as shown in fig. 3, the reflected light and the scattered light are received by the few-mode fibers again, and due to different incident angles, the received light is transmitted in different modes in the few-mode fibers, and information carried by each mode can be analyzed through the photon lantern 402, the photodetector array 5, the multi-channel data collector 6 and the computer 7 to obtain the roughness of the position on the object surface. And then the motion control device 3 controls the few-mode optical fiber 403 to move, so that different positions of the surface of the object are measured, and finally the roughness information of the whole surface is obtained. The motion control device 3 of the system is a high-precision three-dimensional displacement device, and the size and the direction of movement can be controlled by a computer.
In order to better control the excited mode in the few-mode fiber, the light source 1 used in the system is a multi-channel light source, the number of channels is not less than the mode number of the few-mode fiber, and each channel is connected with a fiber circulator. In addition, the switch and incident light power of each channel of the light source can be controlled independently for the convenience of the comparative analysis of the received signals, and can be displayed on a computer in real time.
The few-mode fiber 403 used in the system is a weak intermodal coupling few-mode fiber, which can also be called a low intermodal crosstalk few-mode fiber, and is characterized in that each mode in the fiber core can be transmitted independently and is not influenced by other modes.
The photon lantern 402 described in this system is a mode selective photon lantern, i.e., each mode in the few-mode fiber can be excited individually by one of the incident ends of the photon lantern. The incident end of the photon lantern is a single-mode fiber, the number of the incident ends is the same as the number of modes which can be transmitted by the few-mode fiber, and the emergent end is matched with the few-mode fiber used by the system, so that the photon lantern has lower insertion loss and mode-related loss.
The few-mode fiber detection device 4 of the present system may be composed of a single few-mode fiber 403 and a photon lantern 402, or may be composed of a multi-core few-mode fiber and a plurality of photon lanterns. Compared with a system formed by a single few-mode optical fiber, the multiple fiber cores of the multi-core few-mode optical fiber can receive the reflected signals, so that the object surface information carried by the signals can be analyzed in more detail. The multi-core few-mode fiber can be used for measuring the surface roughness, and the detection of the texture direction of the surface of an object can be realized through the design of multi-core few-mode fiber core arrangement or the processing of the end surface.
The photoelectric detector array 5 of the system is responsible for receiving signals emitted from c ports of all the optical fiber circulators, the detection array can be a multi-port detection system formed by integrating a plurality of detection modules, or an array formed by a plurality of detectors, and the number of the detection ports of the array is not less than the mode number of few-mode optical fibers.
The invention has the beneficial effects that:
the invention provides a surface roughness measuring system based on few-mode optical fibers according to the requirements of surface roughness non-contact measurement and by combining the advantages of the existing surface roughness measuring device. On one hand, a single optical fiber is used as a detection end, so that the integration level of the measurement end is improved, and the surface of an object in a micro area is detected; on the other hand, the detection end does not need to be processed, the preparation process of the system is simplified, and batch production becomes possible.
Drawings
Fig. 1 is a schematic structural diagram of a surface roughness measurement system based on a few-mode optical fiber.
Fig. 2 is a schematic structural diagram of a few-mode optical fiber detection device.
Fig. 3 is a working principle diagram of a few-mode optical fiber detection end.
Fig. 4 is a flow chart of system measurements.
In the figure:
1 is a multi-channel light source; 2 is a single mode optical fiber; 3 is a motion control device; 4 is a few-mode optical fiber detection device, 4011 and 4012 … … 401N are optical fiber circulator arrays; 402 is a photon lantern; 403 is a few-mode fiber; 404 is the surface of the object to be measured; 5 is a photoelectric detector array; 6 is a multi-channel data acquisition unit; and 7, a computer.
Detailed Description
The invention will be further elucidated with reference to the drawings and specific embodiments, without however being limited thereto.
Taking a six-mode fiber as an example, the few-mode fiber 403 in this embodiment includes a LP01，LP11a，LP11b，LP21a，LP21b，LP02The structure of the surface roughness measuring system based on the few-mode optical fiber is shown in figure 1. The system consists of a multi-channel light source 1, a single-mode fiber 2, a motion control device 3, a few-mode fiber detection device 4, a photoelectric detector array 5, a multi-channel data acquisition device 6 and a computer 7. The few-mode optical fiber detection device is shown in FIG. 2 and comprises optical fiber circulator arrays 4011, 4012 … … 401N,Photon lantern 402 and few-mode fiber 403, since six-mode fiber is used, so N is 6 in this embodiment, photon lantern 402 has 6 entrance ports, each of which can excite one mode of the few-mode fiber.
In the system, each channel of the multi-channel light source 1 is used as an incident end and is connected with a port a of each circulator in the fiber circulator arrays 4011 and 4012 … … 4016 through a single mode fiber 2, ports b of the 6 circulators are connected with 6 input ends of a photon lantern 402, the output end of the photon lantern is connected with a section of six-mode fiber 403, and the motion control device 3 is responsible for controlling the movement of few-mode fibers.
When light emitted by one channel of the multi-channel light source 1 is transmitted to the incident end of the photon lantern through the circulator connected with the light, the light can excite a corresponding mode in the few-mode optical fibers 403 after passing through the photon lantern 402, and the light is emitted to the surface 404 of the object to be measured through the few-mode optical fibers 403. Light reflected by the surface of the object is incident on at least one mode fiber 403, and is reflected and scattered due to the fact that the surface of the object is not a smooth mirror surface, as shown in fig. 3, the reflected light and the scattered light are incident on the at least one mode fiber at different angles, different transmission modes are excited in the at least one mode fiber, each mode is reversely transmitted to the corresponding incident fiber through a photon lantern, then transmitted to a photodetector array 5 through a port c of each circulator, information detected by each photodetector is collected by a multi-channel data collector 6, and finally calculated through a related algorithm, and the surface roughness of the object is displayed on a computer.
During actual detection, firstly a roughness detection model of the system needs to be established, firstly a series of roughness standard components are selected, then reflection signals detected by all channels when different modes are incident to a certain standard component are measured, information carried by the different modes after reflection is different, such as the size of surface particles, the direction of surface grooves and the like, and finally the roughness detection model of the system is established for the signals measured under different roughness by combining depth learning according to a related algorithm.
The specific measurement procedure is shown in the flow chart of FIG. 4, and initially, for LP of a photon lantern01End input intensity of I0Optical signalAnd related information is received and recorded by the photoelectric detector array and the data acquisition unit and is processed by a computer. Then, detecting whether all modes of the few-mode optical fiber are detected, if not, inputting the intensity of the other port of the photon lantern to be I0Detecting the optical signal; and if all the modes are detected, calculating the surface roughness of the position according to the established roughness detection model. And then detecting whether the scanning of the whole plane is finished or not, if not, moving the few-mode optical fiber to the next detection point by using the motion control device, repeating the steps until the detection of the whole plane is finished, and finally restoring the roughness condition of the surface of the whole object by using a roughness detection model according to the detected information of each position.
The present invention is not limited to the above-described embodiments, and any obvious improvements, substitutions or modifications can be made by those skilled in the art without departing from the spirit of the present invention.
Claims (5)
1. A surface roughness measurement system based on few mode fiber, characterized by: the system consists of a multi-channel light source, a single-mode optical fiber, a motion control device, a few-mode optical fiber detection device, a photoelectric detector array, a multi-channel data acquisition device and a computer, wherein the few-mode optical fiber detection device comprises an optical fiber circulator array, a photon lantern and a few-mode optical fiber; in the system, a multi-channel light source is connected with a port a of each circulator in an optical fiber circulator array through a single-mode optical fiber, a port b of each circulator is connected with an input end of a photon lantern, an output end of the photon lantern is connected with a section of few-mode optical fiber, a motion control device controls the movement of the few-mode optical fiber, light reflected by a surface to be detected is transmitted to a photoelectric detector array through a port c of each circulator, a multi-channel data acquisition unit collects detected information, and the detected information is resolved through a related algorithm to display the surface roughness of an object on a computer.
2. The few-mode fiber based surface roughness measurement system of claim 1, wherein: the number of channels of the multi-channel light source is not less than the mode number of the few-mode optical fiber, and the incident light power of each channel can be independently controlled.
3. The few-mode fiber based surface roughness measurement system of claim 1, wherein: the few-mode optical fiber is weak mode-to-mode coupling few-mode optical fiber, and each mode in the fiber core can be transmitted independently and is not influenced by other modes.
4. The few-mode fiber based surface roughness measurement system of claim 1, wherein: the photon lantern is a mode selection type photon lantern, and each mode in the few-mode optical fiber can be independently excited through one incident end of the photon lantern.
5. The few-mode fiber based surface roughness measurement system of claim 1, wherein: the few-mode optical fiber detection device can be composed of a single few-mode optical fiber and a photon lantern, and can also be composed of a multi-core few-mode optical fiber and a plurality of photon lanterns.
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