CN113955499B - Transfer device is used in monocrystalline silicon production with protection mechanism - Google Patents

Transfer device is used in monocrystalline silicon production with protection mechanism Download PDF

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Publication number
CN113955499B
CN113955499B CN202111303452.3A CN202111303452A CN113955499B CN 113955499 B CN113955499 B CN 113955499B CN 202111303452 A CN202111303452 A CN 202111303452A CN 113955499 B CN113955499 B CN 113955499B
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wall
monocrystalline silicon
fixedly connected
protection mechanism
box body
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CN113955499A (en
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陈伟鹏
皇甫振东
边疆
李鹏
张美军
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Inner Mongolia Saibaolun Technology Co ltd
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Inner Mongolia Saibaolun Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Silicon Compounds (AREA)

Abstract

The invention belongs to the technical field of monocrystalline silicon production, and particularly relates to a transfer device with a protection mechanism for monocrystalline silicon production. According to the invention, the rubber moving block is arranged, so that a certain buffering force can be given to the monocrystalline silicon, the monocrystalline silicon is prevented from being cracked in the production process, and the production cost is guaranteed.

Description

Transfer device is used in monocrystalline silicon production with protection mechanism
Technical Field
The invention relates to the technical field of monocrystalline silicon production, in particular to a transfer device provided with a protection mechanism and used for monocrystalline silicon production.
Background
Crystalline silicon is a relatively active non-metallic element, is an important component of a crystal material, and is at the front of the development of new materials. The solar photovoltaic power generation and heat supply semiconductor material is mainly used as a semiconductor material and utilizes solar photovoltaic power generation, heat supply and the like. Since solar energy has the advantages of cleanness, environmental protection, convenience and the like, in recent thirty years, solar energy utilization technology has been developed greatly in the aspects of research and development, commercial production and market development, and becomes one of the emerging industries of rapid and stable development in the world.
The monocrystalline silicon can be used for the production and deep processing manufacture of diode-level, rectifier device-level, circuit-level and solar cell-level monocrystalline products, and the subsequent products of integrated circuits and semiconductor separation devices are widely applied to various fields and also play an important role in military electronic equipment.
One of the disadvantages of single crystal silicon is its fragility, and the most notable problem of single crystal silicon in the production process, especially in the finished product transportation process, is its fragility, which is likely to cause the single crystal silicon to crack once it is not operated properly, thus increasing the production cost, and how to better ensure the quality of single crystal silicon in the production process is the problem that needs to be solved at present.
Disclosure of Invention
Based on the technical problems in the background art, the invention provides a transfer device provided with a protection mechanism and used for monocrystalline silicon production.
The invention provides a transfer device with a protection mechanism for monocrystalline silicon production, which comprises a box body, wherein a transmission groove is formed in the inner wall of the box body, the transmission groove surrounds the box body for a circle, an article transmission mechanism is arranged at the center of the transmission groove and comprises a rubber moving block, a supporting rod is fixedly connected to the outer wall of the bottom end of the rubber moving block, a limiting plate is fixedly connected to the outer wall of one side of the supporting rod, the diameter of the limiting plate is larger than that of the transmission groove, positioning teeth are distributed on the outer wall of the bottom end of the supporting rod in an equal density mode, a connecting rod is fixedly connected to the inner wall of one side of the box body, a fixing block is fixedly connected to the outer wall of one side of the connecting rod, a conveying belt is arranged on the outer wall of one side of the fixing block, bayonets are distributed on the outer wall of one side of the conveying belt in an equal density mode, and are the bayonets are the same in specification as the positioning teeth and can be tightly clamped.
Preferably, the outer wall of one side of the fixed block is fixedly connected with a plurality of stepping motors.
Preferably, a cutting lower material plate is arranged at the upper left of the box body.
Preferably, a protection mechanism is arranged at the lower right of the box body and comprises a supporting plate, the supporting plate can contact a rubber moving block located below the box body under normal conditions, a groove is formed in the outer wall of one side of the supporting plate and penetrates through the supporting plate, a second supporting rod is fixedly connected to the inner wall of one side of the groove, a torsion spring is movably connected to the outer wall of one side of the second supporting rod, two ends of the torsion spring are movably connected to the upper end of the supporting plate, a ring fixing block is movably connected to the outer wall of one side of the second supporting rod, and the ring fixing block is located on two sides of the torsion spring.
Preferably, the outer wall of the bottom end of the support plate is fixedly connected with a second support leg, and the outer wall of one side of the support plate is fixedly connected with a displacement plate.
Preferably, the right side of protection mechanism is provided with the second box, one side inner wall of second box is provided with the quad slit, the quad slit runs through the second box, the height that highly is less than the quad slit a little of displacement board, the bottom inner wall of second box is provided with the spring dog.
Preferably, the spring stop block comprises a stop block, a spring is fixedly connected to the outer wall of the bottom end of the stop block, a circular support plate is fixedly connected to the bottom end of the spring, and the outer wall of the top end of the circular support plate is fixedly connected to the outer wall of the bottom end of the second box body.
Preferably, the bottom outer wall of the second box body is fixedly connected with a third supporting leg, a material collecting box is arranged below the right side of the protection mechanism, a drainage plate is fixedly connected with the outer wall of one side of the second box body, and the drainage plate is consistent with the box body in height.
The beneficial effects of the invention are as follows:
1. this transfer device is used in monocrystalline silicon production with protection mechanism, through being provided with the rubber movable block, monocrystalline silicon is in the production process, especially in the finished product transportation, the problem that most need notice is exactly its fragile speciality, in case the operation just easily causes the cracked increase in production cost of monocrystalline silicon, closely joint positioning tooth makes the rubber movable block along with the transmission recess motion of box a week through the bayonet socket on the conveyer belt, make cut monocrystalline silicon piece when falling the upper end of contacting the box, the rubber movable block can be as the buffering support, the one end that supports monocrystalline silicon piece is incompletely fallen, promote monocrystalline silicon piece to move forward simultaneously, until make it drop to the collection thing incasement through the drainage of drainage plate, the material on box surface is the very high rubber of surface smoothness, also can produce the buffering effect to monocrystalline silicon, both combine together, make monocrystalline silicon almost impossible cracked in the transportation, article transmission device can increase or reduce according to the production needs simultaneously, or move its interval, have good variety and suitability.
2. This transfer device is used in monocrystalline silicon production with protection mechanism, blanking plate under cutting through being provided with, current monocrystalline silicon production can be packed its transmission through very long transmission band after cutting, blanking plate directly sets up in the box top under this device will cutting, make the monocrystalline silicon after cutting directly through this device vanning, the long conveyer belt under the current device has been shortened, the high suitability of rubber movable block can change interval and conveyer belt transfer speed according to cutting speed simultaneously, the cost is saved, make whole production vanning in one go.
3. The transfer device is provided with the protection mechanism and used for monocrystalline silicon production, the protection mechanism is arranged, a second box body in the protection mechanism is used for storing a buffer pad, when a rubber moving block moves along with a transmission groove in the periphery of the box body through a bayonet tightly clamped positioning tooth on a conveyor belt, the rubber moving block below the box body can contact a support plate and give a certain force to the support plate, the support plate drives a displacement plate to give a certain force to the buffer pad positioned at the bottommost layer of the second box body, the buffer pad passes through a spring stop block and falls into an object collecting box, the support plate obtains power according to the moving speed of the rubber moving block, the buffer pad immediately falls and is laid above monocrystalline silicon wafers right after each monocrystalline silicon wafer falls down, after each round is finished, a torsion spring can drive the support plate to return to the original position to wait for the contact of the support plate and the rubber moving block of the next round, the buffer pad is placed in the middle of each monocrystalline silicon, and the safety and the quality of the monocrystalline silicon in the transmission process of places are effectively guaranteed.
4. This transfer device is used in monocrystalline silicon production with protection mechanism, through being provided with the spring dog, the spring of spring dog is the high resistance spring, gives less power and can make its motion to its resilience force is higher, can kick-back rapidly after first blotter falls, in time stops next piece of blotter, and accurate only a piece blotter that falls of control once, with other part cooperations, the more perfect that makes the protection work of monocrystalline silicon go on.
The parts of the device not involved are the same as or can be implemented using prior art.
Drawings
FIG. 1 is a schematic overall structure diagram of a transfer device for producing monocrystalline silicon, provided with a protection mechanism, according to the invention;
FIG. 2 is a schematic view of the overall internal structure of a transfer device for producing monocrystalline silicon provided with a protection mechanism according to the present invention;
FIG. 3 is a schematic view of an article transfer mechanism of a transfer device for producing monocrystalline silicon, which is provided with a protection mechanism and is provided with the protection mechanism;
FIG. 4 is a schematic diagram of a protection mechanism of a transfer device for producing monocrystalline silicon, provided with the protection mechanism;
FIG. 5 is a schematic structural diagram of a spring stop block of a transfer device for producing monocrystalline silicon, provided with a protection mechanism.
In the figure: 1. cutting a lower material plate; 2. a box body; 3. a support leg; 4. a protection mechanism; 5. a collection box; 6. a transmission groove; 7. an article transport mechanism; 8. a fixed block; 9. a conveyor belt; 10. a bayonet; 11. a stepping motor; 12. a connecting rod; 701. a rubber moving block; 702. a strut; 703. a limiting plate; 704. positioning teeth; 401. a support plate; 402. a circular ring fixing block; 403. a torsion spring; 404. a second support bar; 405. a groove; 406. a second leg; 407. a displacement plate; 408. a third leg; 409. a spring stop; 410. a square hole; 411. a second case; 412. a drainage plate; 4091. a stopper; 4092. a spring; 7093. and a circular support plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, are used in the orientations and positional relationships indicated in the drawings, which are based on the orientations and positional relationships indicated in the drawings, and are used for convenience of description and simplicity of description, but do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Referring to fig. 1-5, a transfer device with a protection mechanism for monocrystalline silicon production comprises a box body 2, a transmission groove 6 is arranged on the inner wall of the box body 2, the transmission groove 6 surrounds the box body 2 for a circle, an article transmission mechanism 7 is arranged at the central position of the transmission groove 6, the article transmission mechanism 7 comprises a rubber moving block 701, a support rod 702 is fixedly connected with the outer wall of the bottom end of the rubber moving block 701, a limit plate 703 is fixedly connected with the outer wall of one side of the support rod 702, the diameter of the limit plate 703 is larger than that of the transmission groove 6, positioning teeth 704 are distributed on the outer wall of the bottom end of the support rod 702 in an equal density manner, a connecting rod 12 is fixedly connected with the inner wall of one side of the box body 2, a fixing block 8 is fixedly connected with the outer wall of one side of the fixing block 8, a conveyor belt 9 is arranged on the outer wall of one side of the conveyor belt 9 in an equal density manner, bayonets 10 are distributed on the outer wall of one side of the conveyor belt 9, the bayonets 10 have the same specification as the positioning teeth 704, and can be tightly clamped, in the production process of monocrystalline silicon, particularly in the finished product transferring process, the most attention needs to be paid to the fragile characteristic of the monocrystalline silicon, the monocrystalline silicon is easy to crack and increase the production cost once the operation is not proper, the rubber moving block 701 moves along with the conveying groove on the periphery of the box body through the bayonet 10 tightly clamped and connected with the positioning teeth 704 on the conveying belt 9, when the cut monocrystalline silicon falls down and contacts the upper end of the box body, the rubber moving block 701 can be used as a buffer support to support one end of the monocrystalline silicon not to fall completely, meanwhile, the monocrystalline silicon is pushed to move forwards until the monocrystalline silicon falls into the collection box, the surface of the box body 2 is made of rubber with high surface smoothness, the buffer effect can also be generated on the monocrystalline silicon, the two are combined, the monocrystalline silicon is almost impossible to crack in the transferring process, meanwhile, the article conveying mechanisms 7 can be increased or reduced according to the production needs, or the distance between the two is shifted, so that the method has excellent diversity and adaptability.
In the invention, the outer wall of one side of the fixed block 8 is fixedly connected with a plurality of stepping motors 11.
According to the invention, the cut-off material plate 1 is arranged at the upper left of the box body 2, the existing monocrystalline silicon production can be conveyed to be boxed through a long conveying belt after being cut, the cut-off material plate 1 is directly arranged above the box body 2 by the device, so that the cut-off monocrystalline silicon is directly boxed through the device, the long conveying belt of the existing device is shortened, meanwhile, the high adaptability of the rubber moving block 701 can change the distance and the conveying speed of the conveying belt 9 according to the cutting speed, the cost is saved, and the whole production and boxing are facilitated at one time.
In the invention, a protection mechanism 4 is arranged at the lower right of a box body 2, the protection mechanism 4 comprises a support plate 401, the support plate 401 can contact a rubber moving block 701 positioned below the box body 2 under normal conditions, a groove 405 is arranged on the outer wall of one side of the support plate 401, the groove 405 penetrates through the support plate 401, a second support rod 404 is fixedly connected to the inner wall of one side of the groove 405, a torsion spring 403 is movably connected to the outer wall of one side of the second support rod 404, two ends of the torsion spring 403 are movably connected to the upper end of the support plate 401, a circular ring fixing block 402 is movably connected to the outer wall of one side of the second support rod 404, and the circular ring fixing block 402 is positioned at two sides of the torsion spring 403.
In the invention, the outer wall of the bottom end of the support plate 401 is fixedly connected with a second support leg 406, and the outer wall of one side of the support plate 401 is fixedly connected with a displacement plate 407.
In the invention, the right side of the protection mechanism 4 is provided with a second box 411, the inner wall of one side of the second box 411 is provided with a square hole 410, the square hole 410 penetrates through the second box 411, the height of the displacement plate 407 is slightly smaller than that of the square hole 410, and the inner wall of the bottom end of the second box 411 is provided with a spring stop block 409.
According to the invention, the spring stop block 409 comprises a stop block 4091, the outer wall of the bottom end of the stop block 4091 is fixedly connected with a spring 4092, the bottom end of the spring 4092 is fixedly connected with a circular support plate 4093, the outer wall of the top end of the circular support plate 4093 is fixedly connected with the outer wall of the bottom end of the second box 411, the spring of the spring stop block 409 is a high-resistance spring, the spring can move with less force, the resilience force is high, the first cushion can rebound rapidly after falling, the next cushion can be stopped in time, and the control is accurately performed by only falling one cushion at a time and is matched with other parts, so that the protection work of the monocrystalline silicon is more perfect.
In the invention, the outer wall of the bottom end of the second box body 411 is fixedly connected with the third supporting leg 408, the right lower part of the protection mechanism 4 is provided with the object collecting box 5, the outer wall of one side of the second box body 411 is fixedly connected with the drainage plate 412, and the height of the drainage plate 412 is consistent with that of the box body 2.
The working principle is as follows: firstly, the quantity and the distance of the article transmission mechanisms 7 are set according to the cutting speed of monocrystalline silicon and the specification of the monocrystalline silicon, a buffer pad is filled in the second box 411, the cutting procedure of the monocrystalline silicon is to cut the cutting blanking plate 1 and directly drop to the top end of the box 2, the box 2 firstly buffers the monocrystalline silicon, then a conveyor belt 9 on the periphery of the surface of a fixed block 8 moves clockwise under the action of a stepping motor 11, the fixed block 8 in the box 2 moves clockwise through the conveyor belt 9 to drive the article transmission mechanism 7 with a positioning tooth 704 tightly clamped with a bayonet 10 on the surface of the conveyor belt 9 to move clockwise, wherein a rubber moving block 701 penetrates through a transmission groove 6 of the box 2, and a limiting plate 703 on the outer wall of a support rod 702 ensures that the whole article transmission mechanism 7 cannot drop or shift, the rubber moving block 701 positioned above the box body 2 is connected with the other end of the monocrystalline silicon piece and provides supporting force for the other end of the monocrystalline silicon piece, meanwhile, the rubber moving block 701 drives the monocrystalline silicon piece to move, the monocrystalline silicon piece is enabled to move through the drainage plate 412 and enter the inside of the collection box 5, the rubber moving block 701 continues to move, the rubber moving block 701 which moves to the lower right at the moment is in contact with the support plate 401 and provides certain force for the support plate 401 to drive the displacement plate 407 to move, one end of the displacement plate 407, passing through the square hole 410, penetrates through one side of the second box body 411, one end of the cushion positioned at the bottom end is provided with certain force to enable the cushion to pass through the spring stop, the cushion passes through the second box body 411 and falls into the inside of the collection box 5, the purpose of one layer of monocrystalline silicon piece and one layer of cushion is achieved, then the support plate 401 returns to the original position under the action of the torsion spring 403, and the spring stop 409 also returns to the original position to continue to block the next cushion.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims (8)

1. The utility model provides a transfer device is used in monocrystalline silicon production with protection mechanism, includes box (2), its characterized in that, the inner wall of box (2) is provided with transmission recess (6), transmission recess (6) encircle box (2) round, the central point of transmission recess (6) puts and is provided with article transmission device (7), article transmission device (7) are including rubber movable block (701), the bottom outer wall fixedly connected with branch (702) of rubber movable block (701), one side outer wall fixedly connected with limiting plate (703) of branch (702), the diameter of limiting plate (703) is greater than the diameter of transmission recess (6), the bottom outer wall isopycnic distribution of branch (702) has location tooth (704), one side inner wall fixedly connected with connecting rod (12) of box (2), one side outer wall fixedly connected with fixed block (8) of connecting rod (12), one side outer wall of fixed block (8) is provided with conveyer belt (9), one side outer wall isopycnic distribution of conveyer belt (9) has bayonet socket (10), bayonet socket (10) are the same with the specification of location tooth (704), can inseparable joint.
2. The transfer device provided with the protection mechanism for monocrystalline silicon production is characterized in that a plurality of stepping motors (11) are fixedly connected to the outer wall of one side of the fixing block (8).
3. The transfer device provided with the protection mechanism for the production of monocrystalline silicon is characterized in that the cutting blanking plate (1) is arranged at the upper left of the box body (2).
4. The transfer device provided with the protection mechanism and used for monocrystalline silicon production is characterized in that the protection mechanism (4) is arranged at the lower right of the box body (2), the protection mechanism (4) comprises a support plate (401), the support plate (401) can contact a rubber moving block (701) located below the box body (2) under normal conditions, a groove (405) is formed in the outer wall of one side of the support plate (401), the groove (405) penetrates through the support plate (401), a second support rod (404) is fixedly connected to the inner wall of one side of the groove (405), a torsion spring (403) is movably connected to the outer wall of one side of the second support rod (404), two ends of the torsion spring (403) are movably connected to the upper end of the support plate (401), a circular ring fixing block (402) is movably connected to the outer wall of one side of the second support rod (404), and the circular ring fixing block (402) is located on two sides of the torsion spring (403).
5. The transfer device provided with the protection mechanism for the production of monocrystalline silicon is characterized in that the outer wall of the bottom end of the support plate (401) is fixedly connected with a second support leg (406), and the outer wall of one side of the support plate (401) is fixedly connected with a displacement plate (407).
6. The transfer device provided with the protection mechanism and used for monocrystalline silicon production is characterized in that a second box body (411) is arranged on the right side of the protection mechanism (4), a square hole (410) is formed in the inner wall of one side of the second box body (411), the square hole (410) penetrates through the second box body (411), the height of the displacement plate (407) is slightly smaller than that of the square hole (410), and a spring stop block (409) is arranged on the inner wall of the bottom end of the second box body (411).
7. The transfer device provided with the protection mechanism and used for monocrystalline silicon production is characterized in that the spring stop block (409) comprises a stop block (4091), a spring (4092) is fixedly connected to the outer wall of the bottom end of the stop block (4091), a circular support plate (4093) is fixedly connected to the bottom end of the spring (4092), and the outer wall of the top end of the circular support plate (4093) is fixedly connected to the outer wall of the bottom end of the second box body (411).
8. The transfer device provided with the protection mechanism for monocrystalline silicon production of claim 7, wherein the outer wall of the bottom end of the second box body (411) is fixedly connected with a third leg (408), the right lower part of the protection mechanism (4) is provided with a material collecting box (5), the outer wall of one side of the second box body (411) is fixedly connected with a flow guiding plate (412), and the height of the flow guiding plate (412) is consistent with that of the box body (2).
CN202111303452.3A 2021-11-05 2021-11-05 Transfer device is used in monocrystalline silicon production with protection mechanism Active CN113955499B (en)

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CN113955499B true CN113955499B (en) 2023-02-03

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744594A (en) * 1985-12-10 1988-05-17 Recif (Societe Anonyme) Vacuum handling especially for the use in handling silicon wafers
WO1999013496A1 (en) * 1997-09-10 1999-03-18 Tec-Sem Ag Transfer assembly for semiconductor wafers
KR100740334B1 (en) * 2006-03-24 2007-07-19 이강우 Apparatus for automatically assembling disposable gas lighters and filling them up with gas fuel
CN201188427Y (en) * 2008-04-23 2009-01-28 中茂电子(深圳)有限公司 Guiding machine for solar silicium chip detection panel conveying device and the conveying device
DE102011055255A1 (en) * 2010-11-12 2012-05-16 Schott Solar Ag Arrangement i.e. turning device, for transporting and turning wafers to manufacture e.g. solar cell, has detour elements arranged at preset distance from shafts, where one shaft is connected with drive arranged outside device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744594A (en) * 1985-12-10 1988-05-17 Recif (Societe Anonyme) Vacuum handling especially for the use in handling silicon wafers
WO1999013496A1 (en) * 1997-09-10 1999-03-18 Tec-Sem Ag Transfer assembly for semiconductor wafers
KR100740334B1 (en) * 2006-03-24 2007-07-19 이강우 Apparatus for automatically assembling disposable gas lighters and filling them up with gas fuel
CN101054132A (en) * 2006-03-24 2007-10-17 李康羽 Apparatus for automatically assembling disposable gas lighters and filling them up with gas fuel
CN201188427Y (en) * 2008-04-23 2009-01-28 中茂电子(深圳)有限公司 Guiding machine for solar silicium chip detection panel conveying device and the conveying device
DE102011055255A1 (en) * 2010-11-12 2012-05-16 Schott Solar Ag Arrangement i.e. turning device, for transporting and turning wafers to manufacture e.g. solar cell, has detour elements arranged at preset distance from shafts, where one shaft is connected with drive arranged outside device
CN202518794U (en) * 2010-11-12 2012-11-07 肖特太阳能股份公司 Device for conveying and turning over flat articles

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