CN113945885A - Self-heating micro-optical fiber vector sensing device and manufacturing method thereof - Google Patents

Self-heating micro-optical fiber vector sensing device and manufacturing method thereof Download PDF

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CN113945885A
CN113945885A CN202111205382.8A CN202111205382A CN113945885A CN 113945885 A CN113945885 A CN 113945885A CN 202111205382 A CN202111205382 A CN 202111205382A CN 113945885 A CN113945885 A CN 113945885A
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optical fiber
axis direction
doped
micro
fiber group
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高然
叶建森
忻向军
刘达
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Changzhou Beiyou New Generation Information Technology Research Institute Co ltd
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Changzhou Beiyou New Generation Information Technology Research Institute Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/80Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using ultrasonic, sonic or infrasonic waves
    • G01S3/802Systems for determining direction or deviation from predetermined direction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
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Abstract

The invention provides a self-heating micro-optical fiber vector sensing device and a manufacturing method thereof2+The Y-axis direction optical fiber group comprises two parallel but non-contact Co-doped optical fibers2+The doped micro optical fiber of (1); the optical fiber module comprises a square metal plane, a Y-axis direction optical fiber group, an X-axis direction optical fiber group, a Y-axis direction optical fiber group and a Y-axis direction optical fiber group, wherein the center of the square metal plane is provided with a square through hole, the middle of each side of the square metal plane is provided with two parallel rectangular grooves, the X-axis direction optical fiber group is placed in the rectangular grooves along the X-axis direction, the Y-axis direction optical fiber group is placed in the rectangular grooves along the Y-axis direction, the X-axis direction optical fiber group is placed at the upper part of the Y-axis direction optical fiber group, and the X-axis direction optical fiber group and the Y-axis direction optical fiber group are mutually perpendicularly crossed but not contacted. Therefore, the method has the advantage of small size, can realize the detection of the direction of the sound source signal, and realizes the detection of the directional sound signal under the environment of remote detection or strong electromagnetic interference.

Description

Self-heating micro-optical fiber vector sensing device and manufacturing method thereof
Technical Field
The invention relates to the technical field of optical fiber sound source direction finding, in particular to a self-heating micro optical fiber vector sensing device and a manufacturing method of the self-heating micro optical fiber vector sensing device.
Background
The sound source direction measuring technology is widely applied to the fields of sonar detection, intelligent structure monitoring, public safety and the like. The sound source direction finding technology is a technology that an acoustic sensor is adopted to receive sound waves, and then electronic equipment is utilized to process sound wave signals, so that the sound source direction is detected. Compared with the traditional electronic method, the optical fiber acoustic vector sensor has the advantages of high sensitivity, small volume, electromagnetic interference resistance and the like. The time delay differences between the signals received by the different sensors can be used to calculate the direction and position of the sound source. Accordingly, fiber optic acoustic sensor arrays, such as sagnac sensor arrays and diaphragm-based fabry-perot interferometer arrays, have been investigated. However, to improve the accuracy of sound source orientation, the fiber optic sensor array must be larger than a critical dimension because the directional resolution depends on the distance between the two sensors. To improve the orientation accuracy, the distance between any two sensors is as large as possible. Therefore, especially for low frequency acoustic signals, the distance between the sensors in the sensor array is required to be very large. Therefore, the sound source orientation system in the related art has the defect of large size.
Disclosure of Invention
In order to overcome the size limitation of the traditional sound source directional system, the invention adopts the method that the speed of sound particles describes the vibration motion of the particles in a medium under the action of an acoustic signal to realize the measurement of the direction of a sound source. The speed of the sound particles is a vector physical quantity containing the size and the direction of sound, and the sound source direction measuring sensor can be miniaturized by a method for detecting the speed of the sound particles.
The technical scheme adopted by the invention is as follows:
the invention provides a self-heating micro optical fiber vector sensing device in a first aspect, which is characterized by comprising: square metal plane, X-axis direction optical fiberAnd a Y-axis direction optical fiber group, wherein the X-axis direction optical fiber group comprises two parallel non-contact Co-doped optical fibers2+The Y-axis direction optical fiber group comprises two parallel non-contact Co-doped optical fibers2+The doped micro optical fiber of (1);
the optical fiber array comprises a square metal plane, wherein a square through hole is formed in the center of the square metal plane, two parallel rectangular grooves are formed in the middle of each side of the square metal plane, an X-axis direction optical fiber group is placed in the rectangular grooves along the X-axis direction, a Y-axis direction optical fiber group is placed in the rectangular grooves along the Y-axis direction, the X-axis direction optical fiber group is placed at the upper part of the Y-axis direction optical fiber group, the X-axis direction optical fiber group and the Y-axis direction optical fiber group are mutually perpendicular and crossed but not contacted, so that the X-axis direction optical fiber group and the Y-axis direction optical fiber group form a crossed structure, and the Co-doped structure of the crossed structure is a Co-doped structure 2+Placed in the square through hole.
In addition, the self-heating micro optical fiber vector sensing device provided by the above embodiment of the invention may further have the following additional technical features:
according to one embodiment of the invention, the Co2+The doped micro-optical fiber is fixed in the corresponding rectangular groove through polyamide.
According to one embodiment of the invention, the size of the rectangular trench and the corresponding Co-doping2+The doped micro-fibers of (a) are of the same size.
According to one embodiment of the invention, the side length of the square metal plane is 2 mm, and the side length of the square through hole is 1 mm.
According to an embodiment of the present invention, the self-heating micro optical fiber vector sensing device further includes: single mode optical fiber with two Co-doped fibers along X-axis2+The doped micro-fibers of (a) are spliced together.
According to one embodiment of the invention, the interference light intensity of the device in operation is:
Figure BDA0003306673510000031
wherein I is interference light intensity of temperature change caused by particle acoustic velocity, I1And I2Is the light intensity of two fiber cores, n is the refractive index of the Co-doped fiber, L is the distance length between two fibers, alpha is the thermal expansion coefficient of the Co-doped fiber, delta T is the temperature difference, lambda is the wavelength, phi 0For MZI interferometer initial phase, μ0Is the particle acoustic velocity of the acoustic wave, P is the dissipation power, x is the radius in polar coordinates, i is the imaginary unit, f is the frequency of the acoustic wave, K1Is in a Bessel function first order differential form, theta is the included angle between the sound source and the X axis, k is the thermal conductivity, and l is Co-doped2+D is the thermal diffusivity.
The embodiment of the second aspect of the invention provides a manufacturing method of a self-heating micro optical fiber vector sensing device, which is used for manufacturing the self-heating micro optical fiber vector sensing device provided by the embodiment of the first aspect of the invention, and the method comprises the following steps:
manufacturing a square metal plane, and forming a square through hole in the center of the square metal plane;
forming two parallel rectangular grooves in the middle of each side of the square metal plane by using a laser micromachining technology to obtain a rectangular groove along the X-axis direction and a rectangular groove along the Y-axis direction;
two pieces along the X-axis direction are doped with Co2+The doped micro optical fiber and the single mode optical fiber are spliced together;
two parallel non-contact Co-doped bodies along the X-axis direction2+Is placed in a rectangular groove along the X-axis direction, is fixed in the groove by polyamide, and is doped with Co 2+The doped micro-optical fiber passes through the square through hole;
two parallel non-contact Co-doped bodies along the Y-axis direction2+Is placed in a rectangular groove along the Y-axis direction, is fixed in the groove by polyamide, and is doped with Co2+The doped micro-optical fiber passes through the square through hole, the optical fiber group in the X-axis direction is placed at the upper part of the optical fiber group in the Y-axis direction, and the doped micro-optical fiber passes through the square through holeThe optical fiber group in the X-axis direction is arranged in the optical fiber group in the Y-axis direction and is mutually vertically crossed but not contacted, so that the optical fiber group in the X-axis direction and the optical fiber group in the Y-axis direction form a crossed structure, and Co-doped in the crossed structure2+Placed in the square through hole.
Further, the size of the rectangular trench and the corresponding Co-doping2+The doped micro-fibers of (a) are of the same size.
Furthermore, the side length of the square metal plane is 2 mm, and the side length of the square through hole is 1 mm.
According to the technical scheme of the embodiment of the invention, two parallel Co-doped pipes are adopted2+The micro-fibers are perpendicular to each other, so that two parallel Co-doped fibers2+The temperature effect of the micro-fiber in different axial directions is the same. Therefore, the micro optical fiber vector sensing device has the direction identification capability of the acoustic signal, has small size, and can realize the detection of the direction of the acoustic source signal.
Drawings
Fig. 1 is a schematic structural diagram of a self-heating micro optical fiber vector sensing device according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic structural diagram of a self-heating micro optical fiber vector sensing device according to an embodiment of the present invention.
As shown in fig. 1, the self-heating micro optical fiber vector sensing device includes: a square metal plane 1 (such as an aluminum alloy plane), an X-axis direction optical fiber group 2 and a Y-axis direction optical fiber group 3, wherein the X-axis direction optical fiber group 2 comprises two parallel but non-contact Co-doped optical fibers2+The Y-axis direction optical fiber group 3 comprises two parallel but non-contact Co-doped optical fibers2+The doped micro-fiber of (1).
Wherein, the center of the square metal plane 1 is provided with a square through hole 4, two parallel rectangular grooves (for placing optical fibers) are arranged in the middle of each side of the square metal plane 1, the optical fiber group 2 in the X-axis direction is arranged in the rectangular groove along the X-axis direction, the optical fiber group 3 in the Y-axis direction is arranged in the rectangular groove along the Y-axis direction, the optical fiber group 2 in the X-axis direction is arranged on the upper part of the optical fiber group 3 in the Y-axis direction, the optical fiber group 2 in the X-axis direction and the optical fiber group 3 in the Y-axis direction are mutually vertical and crossed but not contacted, so that the optical fiber group 2 in the X-axis direction and the optical fiber group 3 in the Y-axis direction form a cross structure, and the Co-doped optical fiber group in the cross structure is in a Co-doped structure 2+Are placed in the square through-holes 4.
The side length of the square metal plane can be 2 millimeters, and the side length of the square through hole can be 1 millimeter.
Specifically, the embodiment of the invention adopts Co doping2+Using Co-doped micro-fibers2+And the acoustic-thermal action mechanism between the optical fiber heat source and the particle acoustic velocity realizes the measurement of the vector acoustic signal direction. The device is made on a square aluminum alloy plane and comprises a square through hole 4 in the center. Two rectangular grooves (for placing optical fibers) are manufactured in the middle of each side of the square through hole 4 by utilizing a laser micromachining technology, and then two pieces of Co-doped optical fibers2+The doped micro-fiber of (a) is placed in a rectangular groove along the X-axis and fixed in the groove using polyamide. The rectangular groove and the two optical fibers have the same size, and two Co-doped fibers in the X-axis direction2+The doped micro-fiber is parallel to the rectangular groove in the X-axis direction. Two other parallel doped with Co2+The doped micro-fiber is placed along the Y axis and vertically crossed with the two fibers in the groove along the other X axis direction, and the two doped fibers along the X axis direction in the rectangular groove are positioned at the upper parts of the two doped fibers along the Y axis direction. Thus, two parallel micro-fibers are respectively arranged on the X axis and the Y axis to form a cross configuration, and the Co-doped structure of the cross configuration 2+Is placed in the square through hole 4. Since the two parallel doped micro-fibers are perpendicular to each other, the temperature effect of the two parallel doped micro-fibers in different axial directions is the same.
Influence on acoustic signalsLower, two parallel Co-doped2+The optical length of the doped micro-fiber can be changed, so that an interference effect is generated, and the function of measuring the direction of a sound source is realized.
In particular, by Co-doping of the matches2+Co-doped micro-fiber detection and self-heating micro-fiber vector sensing device2+Temperature difference between both sides of the micro-fiber, doped with Co2+The temperature of the micro-fiber is not uniformly distributed under the action of the acoustic signal, which causes two Co-doped micro-fibers2+The difference of the optical lengths of the doped micro optical fibers can realize the measurement of the sound source direction; the temperature difference between the two heat sources can be detected by detecting the intensity of the interference light, and the direction of the sound source can be further detected. The embodiment of the invention can realize the omnibearing sound source direction measurement within the range of 360 degrees.
Therefore, the self-heating micro optical fiber vector sensing device provided by the embodiment of the invention can realize the detection of the direction of a sound source signal, has the advantage of small size, and can realize the detection of a directional sound signal in a remote detection or strong electromagnetic interference environment.
In one embodiment of the invention, the size of the rectangular trench and the corresponding Co-doping2+The doped micro-fibers of (a) are of the same size to enable Co-doping2+Are placed in the corresponding rectangular trenches.
In this example, Co2+The doped micro-optical fiber is fixed in the corresponding rectangular groove through polyamide.
Specifically, the rectangular trench and the corresponding two optical fibers have the same size, and the two Co-doped fibers in the X-axis direction2+The doped micro-fiber is parallel to the rectangular groove in the X-axis direction, so that Co is doped2+The doped micro-fibers of (a) are placed in corresponding rectangular grooves and fixed in the grooves by polyamide.
In an embodiment of the present invention, the self-heating micro optical fiber vector sensing apparatus may further include: single mode optical fiber, single mode optical fiber and two Co-doped optical fibers along X-axis direction2+The doped micro-light is spliced together.
Specifically, Single Mode Fiber (SMF) and Single Mode Fiber (SMF) can be used along the X-axis directionCo doped with Co2+The doped micro optical fiber is spliced.
In one embodiment of the invention, the self-heating micro optical fiber vector sensing device has interference light intensity during operation as follows:
Figure BDA0003306673510000061
wherein I is interference light intensity of temperature change caused by particle acoustic velocity, I1And I 2Is the light intensity of two fiber cores, n is the refractive index of the Co-doped fiber, L is the distance length between two fibers, alpha is the thermal expansion coefficient of the Co-doped fiber, delta T is the temperature difference, lambda is the wavelength, phi0For MZI (Mach-Zehnder Interferometer) Interferometer initial phase, μ0Is the particle acoustic velocity of the acoustic wave, P is the dissipation power, x is the radius in polar coordinates, i is the imaginary unit, f is the frequency of the acoustic wave, K1Is in a Bessel function first order differential form, theta is the included angle between the sound source and the X axis, k is the thermal conductivity, and l is Co-doped2+D is the thermal diffusivity.
Specifically, self-heating Co-doping2+The thermal spatial distribution of the doped micro-fiber changes with the different sound source directions, so that two doped Co fibers2+The doped ultramicrofiber wave changes relative to the optical length. A small-size all-fiber acoustic particle velocity vector sensor is adopted for detecting directional acoustic signals in a detection or strong electromagnetic interference environment. In contrast to Acoustic pressure, the Acoustic Particle Velocity (APV) describes the oscillatory motion of particles in a medium under the influence of an Acoustic signal. The acoustic particle velocity is a vector physical quantity that contains the magnitude and direction of sound. Therefore, the sound source direction measurement for detecting the speed of the acoustic particles can minimize the sound source direction finding device. In the embodiment of the invention, two Co-doped devices are respectively arranged in parallel in the X-axis direction and the Y-axis direction 2+The doped micro optical fiber has symmetrical temperature distribution in space. Under the action of acoustic signals, the spatial temperature distribution is asymmetric, so that two pieces of Co-doped material are mixed2+The doped micro-fiber changes relative to the optical length. The speed of sound particles can be dried by two paths of light wavesMeasured with respect to the amount of wavelength drift. Demodulating sound source direction by interference method, different Co doping2+Interference light intensity of fiber length difference. The wavelength is adjusted to the quadrature operating point by adjusting the signal light. When the sound action intensity of the particle sound velocity is maximum when the particle sound velocity is parallel to the X axis (cos theta is 1, theta is the included angle of the sound source and the X axis), the Co-doped particle sound velocity is maximum2+The interference light intensity of the optical fiber increases accordingly. When the included angle between the particle sound velocity and the X axis is larger than 0 degrees (cos theta is less than 1), the sound effect intensity is gradually reduced, and then Co is doped2+The intensity of the interference light detected by the fiber MZI is reduced accordingly. Therefore, the method for detecting the particle sound velocity and the fiber vector sound direction can be realized by detecting the interference intensity.
The embodiment of the invention mixes Co in spontaneous heating2+Experimental verification is carried out on the basis of the micro optical fiber. Self-heating Co2+The thermal spatial distribution of the doped micro-fibers changes with the difference of the sound source directions, so that the relative optical lengths of the two micro-fibers change, and it should be noted that, since the velocity of the acoustic particles is a vector physical quantity, when the sound source position changes, the temperature difference also changes. The sound source direction vector sensor and the small-size all-fiber sound particle velocity vector sensor can realize remote detection or directional sound signal detection in strong electromagnetic interference environment.
In summary, the self-heating micro optical fiber vector sensing device of the embodiment of the invention adopts the method that the speed of the acoustic particles describes the vibration motion of the particles in the medium under the action of the acoustic signal to realize the measurement of the direction of the sound source. The speed of the acoustic particles is a vector physical quantity comprising the size and the direction of sound, and the sound source vector sensor can be miniaturized by a method for detecting the speed of the acoustic particles, so that the size limit of a sound source direction-finding system is overcome.
In order to manufacture the self-heating micro optical fiber vector sensing device of the above embodiment, the embodiment of the invention provides a manufacturing method of the self-heating micro optical fiber vector sensing device.
The manufacturing method includes the following steps S1 to S5.
S1, manufacturing a square metal plane, and forming a square through hole in the center of the square metal plane.
The side length of the square metal plane can be 2 millimeters, and the side length of the square through hole can be 1 millimeter.
And S2, forming two parallel rectangular grooves (for placing corresponding micro optical fibers) in the middle of each side of the square metal plane by using a laser micromachining technology so as to obtain the rectangular grooves along the X-axis direction and the rectangular grooves along the Y-axis direction.
Wherein the size of the rectangular trench and the corresponding Co-doping2+The doped micro-fibers of (a) are of the same size.
S3, two Co-doped bodies along the X-axis direction2+The doped micro-fiber is spliced with a single-mode fiber.
S4, two parallel non-contact Co-doped bodies along the X-axis direction2+Is placed in a rectangular groove along the X-axis direction, is fixed in the groove by polyamide, and is doped with Co2+The doped micro-fiber of (a) passes through the square via.
S5, two parallel non-contact Co-doped bodies along the Y-axis direction2+Is placed in a rectangular groove along the Y-axis direction, is fixed in the groove by polyamide, and is doped with Co2+The doped micro-optical fiber passes through the square through hole, the optical fiber group in the X-axis direction is arranged at the upper part of the optical fiber group in the Y-axis direction, and the optical fiber group in the X-axis direction is arranged at the optical fiber group in the Y-axis direction and is mutually vertical and crossed but not contacted, so that the optical fiber group in the X-axis direction and the optical fiber group in the Y-axis direction form a crossed structure, and the Co-doped micro-optical fiber in the crossed structure is in a Co-doped structure2+Placed in the square through hole.
The method for manufacturing the self-heating micro-optical-fiber vector sensing device can manufacture the small-sized self-heating micro-optical-fiber vector sensing device, can realize the detection of the direction of a sound source signal, has the advantage of small size, and can realize remote detection or the detection of a directional sound signal in a strong electromagnetic interference environment.
The embodiment of the invention provides a sound source orientation system which comprises a self-heating micro optical fiber vector sensing device and a direction finding device.
Self-heating micro-fiber vectorA quantity sensing device for two parallel Co-doped bodies under the influence of an acoustic signal2+The optical length of the doped micro-fiber is changed to generate interference effect, wherein two parallel Co-doped micro-fibers2+The temperature effect of the doped micro-fiber in different axial directions is the same; and the direction-finding device is used for detecting the temperature difference of the two heat sources by detecting the intensity of the interference light and measuring the direction of the sound source according to the temperature difference so as to realize the function of detecting the direction of the sound source.
The sound source orientation system provided by the embodiment of the invention can realize the detection of the direction of a sound source signal through the self-heating micro optical fiber vector sensing device provided by the embodiment of the invention, has the advantage of small size, and can realize remote detection or orientation sound signal detection in an environment with strong electromagnetic interference.
In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. The meaning of "plurality" is two or more unless specifically limited otherwise.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.

Claims (9)

1. A self-heating micro optical fiber vector sensing device is characterized by comprising: a square metal plane, an X-axis direction optical fiber group and a Y-axis direction optical fiber group, wherein the X-axis direction optical fiber group comprises two parallel non-contact Co-doped optical fibers2+The Y-axis direction optical fiber group comprises two parallel non-contact Co-doped optical fibers 2+The doped micro optical fiber of (1);
the optical fiber array comprises a square metal plane, wherein a square through hole is formed in the center of the square metal plane, two parallel rectangular grooves are formed in the middle of each side of the square metal plane, an X-axis direction optical fiber group is placed in the rectangular grooves along the X-axis direction, a Y-axis direction optical fiber group is placed in the rectangular grooves along the Y-axis direction, the X-axis direction optical fiber group is placed at the upper part of the Y-axis direction optical fiber group, the X-axis direction optical fiber group and the Y-axis direction optical fiber group are mutually perpendicular and crossed but not contacted, so that the X-axis direction optical fiber group and the Y-axis direction optical fiber group form a crossed structure, and the Co-doped structure of the crossed structure is a Co-doped structure2+Placed in the square through hole.
2. The self-heating micro-fiber vector sensing device according to claim 1, wherein the Co2+The doped micro-optical fiber is fixed in the corresponding rectangular groove through polyamide.
3. The self-heating micro optical fiber vector sensing device according to claim 1, wherein the size of the rectangular trench and the corresponding Co-doped size2+The doped micro-fibers of (a) are of the same size.
4. The self-heating micro-optical fiber vector sensing device according to claim 1, wherein the side length of the square metal plane is 2 mm, and the side length of the square through hole is 1 mm.
5. The self-heating micro optical fiber vector sensing device according to claim 1, further comprising: single mode optical fiber, said single mode optical fiber and the optical fiber along X-axis directionTwo doped with Co2+The doped micro-fibers of (a) are spliced together.
6. The self-heating micro-fiber vector sensing device according to claim 1, wherein the interference light intensity of the device during operation is:
Figure FDA0003306673500000021
wherein I is interference light intensity of temperature change caused by particle acoustic velocity, I1And I2Is the light intensity of two fiber cores, n is the refractive index of the Co-doped fiber, L is the distance length between two fibers, alpha is the thermal expansion coefficient of the Co-doped fiber, delta T is the temperature difference, lambda is the wavelength, phi0For MZI interferometer initial phase, μ0Is the particle acoustic velocity of the acoustic wave, P is the dissipation power, x is the radius in polar coordinates, i is the imaginary unit, f is the frequency of the acoustic wave, K1Is in the form of first order differential of Bessel function, theta is the included angle between sound source and X axis, k is thermal conductivity, and l is Co-doped2+D is the thermal diffusivity.
7. A method of manufacturing a self-heating micro optical fiber vector sensing device for manufacturing the self-heating micro optical fiber vector sensing device according to any one of claims 1 to 6, the method comprising:
Manufacturing a square metal plane, and forming a square through hole in the center of the square metal plane;
forming two parallel rectangular grooves in the middle of each side of the square metal plane by using a laser micromachining technology to obtain a rectangular groove along the X-axis direction and a rectangular groove along the Y-axis direction;
two pieces along the X-axis direction are doped with Co2+The doped micro optical fiber and the single mode optical fiber are spliced together;
two parallel non-contact Co-doped bodies along the X-axis direction2+Is placed in a rectangular groove along the X-axis direction,fixing in a tank with polyamide and doping said Co2+The doped micro-optical fiber passes through the square through hole;
two parallel non-contact Co-doped bodies along the Y-axis direction2+Is placed in a rectangular groove along the Y-axis direction, is fixed in the groove by polyamide, and is doped with Co2+The doped micro-optical fiber passes through the square through hole, the optical fiber group in the X-axis direction is arranged at the upper part of the optical fiber group in the Y-axis direction, the optical fiber group in the X-axis direction is arranged at the optical fiber group in the Y-axis direction and is mutually vertical and crossed but not contacted, so that the optical fiber group in the X-axis direction and the optical fiber group in the Y-axis direction form a crossed structure, and Co-doped micro-optical fibers in the crossed structure are in a Co-doped structure 2+Placed in the square through hole.
8. The method of claim 7, wherein the rectangular trench size and corresponding Co-doped dimension2+The doped micro-fibers of (a) are of the same size.
9. The method for manufacturing the self-heating micro optical fiber vector sensing device according to claim 7, wherein the side length of the square metal plane is 2 mm, and the side length of the square through hole is 1 mm.
CN202111205382.8A 2021-10-15 2021-10-15 Self-heating micro-optical fiber vector sensing device and manufacturing method thereof Pending CN113945885A (en)

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