CN113945318A - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN113945318A CN113945318A CN202110746466.6A CN202110746466A CN113945318A CN 113945318 A CN113945318 A CN 113945318A CN 202110746466 A CN202110746466 A CN 202110746466A CN 113945318 A CN113945318 A CN 113945318A
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- Prior art keywords
- pressure
- sensor
- connecting portion
- base portion
- pressure chamber
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- 239000012530 fluid Substances 0.000 claims abstract description 31
- 238000007789 sealing Methods 0.000 claims abstract description 26
- 239000007788 liquid Substances 0.000 claims abstract description 23
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a pressure sensor which is not easily affected by installation and can be miniaturized. The pressure sensor of the present invention includes: a base part (14) that is mounted on a sensor mounting seat (5) in a superimposed manner with a sealing member (11) therebetween, the sensor mounting seat (5) having a pressure guide port (6) that transmits the pressure of a fluid to be measured (3); a pressure chamber part (17) supported by the base part (14) via a cylindrical connecting part (16), the pressure chamber part (17) including a pressure chamber (20) in which a pressure receiving diaphragm (19) becomes a part of the wall; and a pressure guide unit (22) having one end connected to the pressure chamber unit (17) and the other end connected to the pressure detection sensor element (13), wherein pressure is transmitted from the pressure receiving diaphragm (19) to the sensor element (13) via a pressure transmission liquid (21), wherein the connection unit (16) functions as a pressure guide path (24) filled with the fluid to be measured (3) or the pressure transmission liquid (21) and transmitting the pressure, and wherein the outer diameter of the connection unit (16) is smaller than the outer diameter of the pressure receiving diaphragm.
Description
Technical Field
The present invention relates to a pressure sensor including a pressure receiving diaphragm that receives a pressure of a fluid to be measured.
Background
A conventional pressure sensor has a structure in which a pressure of a fluid to be measured is received by a pressure receiving diaphragm, and the pressure is transmitted from the pressure receiving diaphragm to a sensor element via a pressure transmitting liquid. Such a pressure sensor is attached to a pressure guide port that transmits the pressure of a fluid to be measured by fastening with a bolt or the like. In this pressure sensor, when the bolt is tightened, the tightening force is transmitted to the pressure receiving diaphragm, and the 0 point may be displaced, which may deteriorate the characteristics.
As conventional pressure sensors that suppress the influence of such tightening force to a small extent, patent documents 1 and 2, for example, both disclose pressure sensors. In the pressure sensor described in patent document 1, the pressure receiving diaphragm is disposed at a position away from the sealing surface connected to the pressure receiving port, thereby reducing the influence of fastening. In the pressure sensor described in patent document 2, the influence of the fastening is reduced by providing a stress absorbing portion between the pressure receiving diaphragm and the sealing portion in the same plane as the pressure receiving diaphragm.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open No. 2003-294563
Patent document 2: japanese patent laid-open publication No. 2011-252739
Disclosure of Invention
Problems to be solved by the invention
In the pressure sensor disclosed in patent document 1, in order to prevent the pressure receiving diaphragm from being affected by the fastening force, it is necessary to sufficiently separate the pressure receiving diaphragm from the sealing surface, and it is difficult to reduce the size of the pressure receiving diaphragm due to restrictions on the arrangement position and size of other mechanism parts. In addition, the member provided with the pressurized membrane must be formed large. In the pressure sensor disclosed in patent document 2, in order to prevent the pressure receiving diaphragm from being affected by the fastening force, it is necessary to form a sufficiently large stress absorbing portion on the pressure receiving diaphragm or on the outer side in the in-plane direction of the pressure receiving diaphragm. Therefore, if both the pressure sensor shown in patent document 1 and the pressure sensor shown in patent document 2 are not affected by the fastening force, it is difficult to reduce the size.
In recent years, demands for higher precision and smaller size have been increasing in a differential pressure type mass flow controller for the semiconductor market, and further higher precision and smaller size have been demanded also for a pressure sensor as one of its components.
The invention aims to provide a pressure sensor which is not easily affected by installation and can be miniaturized.
Means for solving the problems
In order to achieve the object, a pressure sensor according to the present invention includes: a base part which is mounted on a sensor mounting seat through a sealing member in a superposed manner, the sensor mounting seat having a pressure guide port for transmitting the pressure of the fluid to be measured; a pressure chamber section supported by the base section via a cylindrical connecting section, the pressure chamber section including a pressure chamber that is formed so that a pressure receiving diaphragm that receives the pressure of the fluid to be measured forms a part of a wall thereof and is separated from the fluid to be measured; and a pressure guide portion having one end connected to the pressure chamber portion and the other end connected to a pressure detection sensor element, and transmitting pressure from the pressure receiving diaphragm to the sensor element via a pressure transmission liquid, wherein the connection portion functions as a pressure guide path for transmitting pressure by filling the inside thereof with the fluid to be measured or the pressure transmission liquid, and an outer diameter of the connection portion is smaller than an outer diameter of the pressure receiving diaphragm.
In the pressure sensor of the present invention, the pressure chamber portion is disposed in the pressure guide port so that the pressure receiving diaphragm receives pressure from the fluid to be measured in the pressure guide port, the connecting portion is formed to protrude from a sealing surface of the base portion facing the sensor mount toward the sensor mount, the sensor element is supported by the base portion, the pressure guide portion is configured to transmit pressure by the pressure-transmitting liquid filling the pressure chamber portion and the connecting portion and a passage hole formed in the base portion so as to extend from the connecting portion to the sensor element.
In the pressure sensor of the present invention, the connection portion is formed integrally with the base portion.
In the pressure sensor of the present invention, the connection portion is formed separately from the base portion and is fixed to the base portion.
In the pressure sensor of the present invention, the pressure chamber portion is disposed on the side opposite to the sensor mounting seat with respect to the base portion, the connecting portion is formed to protrude from the base portion in the direction opposite to the sensor mounting seat, the sensor element is supported by the pressure chamber portion, the pressure guide portion is configured to transmit pressure through a through hole penetrating a wall of the pressure chamber portion, the base portion has a pressure guide hole extending from a sealing surface opposite to the sensor mounting seat to the connecting portion, and the pressure of the fluid to be measured is transmitted to the pressure receiving diaphragm through the pressure guide hole and the inside of the connecting portion.
In the pressure sensor of the present invention, the pressure receiving diaphragm is formed to be perpendicular to the sealing surface.
In the pressure sensor of the present invention, the projecting side end portion of the connecting portion is formed to extend in a direction perpendicular to the sealing surface and is connected to the pressure chamber portion.
Effects of the invention
In the present invention, since the deformation of the base portion is blocked by the connecting portion and is less likely to be transmitted to the pressure receiving diaphragm, it is not necessary to increase the distance between the pressure receiving diaphragm and the sealing surface, and it is possible to prevent the influence of the fastening force on the pressure receiving diaphragm without making the base portion large. It is not necessary to provide a deformation absorbing structure on the in-plane direction outer side of the pressure receiving diaphragm or the pressure receiving diaphragm. Therefore, according to the present invention, it is possible to provide a pressure sensor that is less susceptible to the effect of the mounting of the base portion to the sensor mounting seat and that can be miniaturized.
Drawings
Fig. 1 is a sectional view of a pressure sensor of a first embodiment.
Fig. 2 is a cross-sectional view showing a modification of the connecting portion.
Fig. 3 is a sectional view of a pressure sensor of a second embodiment.
Fig. 4 is a sectional view of a pressure sensor of a third embodiment.
Fig. 5 is a sectional view of a pressure sensor of a third embodiment.
Fig. 6 is a cross-sectional view showing a modification of the connecting portion.
Detailed Description
First embodiment
Hereinafter, an embodiment of the pressure sensor according to the present invention will be described in detail with reference to fig. 1. The pressure sensor shown in fig. 1 is applied to the inventions described in technical solutions 1 to 3.
The pressure sensor 1 shown in fig. 1 is mounted on a pressure port 2 depicted lowermost in fig. 1, and detects the pressure of a fluid to be measured 3 in the pressure port 2. The pressure port 2 is formed of a metal material into a predetermined shape, and includes a pressure guide passage 4 branched from a flow passage (not shown) through which the fluid to be measured 3 flows, and a flat sensor mounting seat 5 on which the pressure sensor 1 is mounted. The pressure guide passage 4 is filled with the fluid to be measured 3. The fluid 3 to be measured is depicted as a liquid in fig. 1, but may also be a gas. The sensor mount 5 has a pressure guide port 6 formed by an opening of the pressure guide passage 4.
The pressure sensor 1 of the present embodiment includes a base member 12 that is overlapped with the sensor mounting seat 5 via a seal member 11. The base member 12 is formed of a metal material into a predetermined shape, and has a sealing surface 12a facing the sensor mount 5 and a sensor mounting surface 12b on the opposite side of the sealing surface 12 a. The seal member 11 is formed of an O-ring, and is sandwiched between the seal surface 12a and the sensor mount 5. A sensor element 13 for pressure detection is bonded to the sensor attachment surface 12 b. The sensor element 13 may employ an element using a sensor diaphragm, such as a strain gauge, an electrostatic capacitance type, a magnetostriction type, an optical type, or the like, which outputs a signal corresponding to a pressure difference that one surface and the other surface are subjected to. The portion between the sealing surface 12a and the sensor mounting surface 12b of the base member 12 of the present embodiment is formed in a disc shape. Hereinafter, the disk-shaped portion is referred to as a base portion 14. The shape of the base portion 14 is not limited to a circular plate shape, and may be a square plate shape.
The base member 12 is attached to the sensor mount 5 by a plurality of attachment bolts 15 so that the seal member 11 is compressed between the seal surface 12a and the sensor mount 5. The mounting bolt 15 is disposed outside the seal member 11. The mounting method is not limited to bolt fastening, and may be a structure in which mounting is performed by clamping, screwing, or the like.
A connecting portion 16 protruding from the sealing surface 12a toward the sensor mounting seat 5 and a pressure chamber 17 connected to a protruding end of the connecting portion 16 are provided in a central portion of the base member 12.
The connecting portion 16 is formed in a cylindrical shape and has a through hole 16a therein. The connecting portion 16 of the present embodiment is integrally formed with the base portion 14 in a tubular shape having a circular cross section. The shape of the connection portion 16 is not limited to a tubular shape having a circular cross section, and may be formed in a square tubular shape, for example.
The pressure chamber portion 17 is supported by the base portion 14 via the connecting portion 16. The pressure chamber portion 17 of the present embodiment is composed of a bottomed cylindrical case 18 that opens in the direction opposite to the base portion 14, and a pressure receiving diaphragm 19 that closes the opening of the case 18. A pressure chamber 20 surrounded by a housing 18 and a pressure-receiving diaphragm 19 is formed in the pressure chamber portion 17. The pressure chamber 20 is formed as a part of the pressure-receiving diaphragm 19 and is separated from the fluid 3 to be measured.
The pressure chamber 20 is filled with a pressure transmission liquid 21, and is connected to the sensor element 13 through a pressure guide portion 22, which will be described later, provided at the center of the base member 12.
The pressure receiving diaphragm 19 is formed in a disc shape from a metal plate material, and deforms when receiving the pressure of the fluid to be measured 3, thereby changing the volume of the pressure chamber 20. Therefore, the pressure of the fluid to be measured 3 is transmitted to the pressure transmitting liquid 21 in the pressure chamber 20 via the pressure receiving diaphragm 19. The pressure chamber portion 17 of the present embodiment is disposed in the pressure guide port 6 so that the pressure receiving diaphragm 19 receives pressure from the fluid to be measured 3 in the pressure guide port 6.
The pressure guide portion 22 of the present embodiment is composed of a through hole 18a of the housing 18, a through hole 16a inside the connecting portion 16, a passage hole 23 formed in the base portion 14 so as to extend from the connecting portion 16 to the sensor element 13, and a pressure transmitting liquid 21 filling these holes. The pressure guide 22 has one end connected to the pressure chamber 17 and the other end connected to the pressure detection sensor element 13, and transmits pressure from the pressure receiving diaphragm 19 to the sensor element 13 via the pressure transmission liquid 21. More specifically, the pressure guide portion 22 is configured to transmit pressure via the pressure transmission liquid 21, and the pressure transmission liquid 21 fills the pressure chamber portion 17 and the connecting portion 16, and a passage hole 23 formed in the base portion 14 so as to extend from the connecting portion 16 to the sensor element 13. The sealing holes for filling the sealing liquid are provided in the base part 14, the pressure chamber part 17, and the sensor element 13, for example, and can be sealed by welding of steel balls, soldering, or the like. The connection portion 16 of the present embodiment functions as a pressure guide path 24 filled with the pressure transmission liquid 21 to transmit pressure. The connecting portion 16 has an outer diameter smaller than the outer diameter of the pressure diaphragm 19.
In the pressure sensor 1 configured as described above, the pressure of the fluid to be measured 3 is transmitted from the pressure receiving diaphragm 19 to the sensor element 13 via the pressure transmitting liquid 21, and the pressure is detected by the sensor element 13. The pressure sensor 1 is mounted on the sensor mount 5 of the pressure port 2 in a state where all the components are mounted on the base member 12 and the pressure transmission liquid 21 is sealed in the pressure sensor 1. When the attachment bolt 15 is tightened for this attachment, a portion of the base portion 14 outside the sealing member 11 is pressed toward the sensor attachment seat 5, and the base portion 14 may be deformed so as to protrude upward in fig. 1. In the case where the pressure receiving diaphragm is provided on the base portion as in the conventional pressure sensor, the base member needs to be formed large so that the pressure receiving diaphragm is largely separated from the fastening joint portion because the pressure receiving diaphragm deforms in accordance with the deformation of the base portion.
However, in the pressure sensor 1 of the present embodiment, since the pressure chamber portion 17 having the pressure receiving diaphragm 19 is supported by the base portion 14 via the thin connecting portion 16, the deformation of the base portion 14 is blocked by the connecting portion 16 and is less likely to be transmitted to the pressure receiving diaphragm 19. That is, even when the base portion 14 is deformed, the pressure receiving diaphragm 19 is not deformed.
Therefore, in the pressure sensor 1, the influence of the fastening force on the pressure receiving diaphragm 19 can be prevented without making the base portion 14 large as compared with the conventional pressure sensor. The compression diaphragm 19 need not be provided with a deformation absorbing structure. Therefore, according to this embodiment, it is possible to provide the pressure sensor 1 which is less susceptible to the effect of the mounting of the base portion 14 to the sensor mount 5 and which can be downsized.
The pressure chamber portion 17 of the pressure sensor 1 according to the present embodiment is disposed in the pressure guide port 6 so that the pressure receiving diaphragm 19 receives pressure from the fluid to be measured 3 in the pressure guide port 6. The connecting portion 16 is formed to protrude from a sealing surface 12a of the base portion 14 facing the sensor mount 5 toward the sensor mount 5. The sensor element 13 is supported by the base portion 14. The pressure guide portion 22 is configured to transmit pressure via the pressure transmission liquid 21, and the pressure transmission liquid 21 fills the pressure chamber portion 17 and the connecting portion 16, and a passage hole 23 formed in the base portion 14 so as to extend from the connecting portion 16 to the sensor element 13.
Therefore, according to this embodiment, since the pressure chamber portion 17 having the pressure receiving diaphragm 19 can be accommodated in the pressure guide port 6, a small and compact pressure sensor having a small portion protruding from the sensor mount 5 can be realized.
The connecting portion 16 of the present embodiment is formed integrally with the base portion 14 of the base member 12. Since the connection portion 16 can be formed simply by machining, the pressure sensor 1 having a structure in which the pressure chamber 17 is separated from the base member 12 can be manufactured easily.
Modification of connecting part
The connection portion may be configured as shown in fig. 2. In fig. 2, the same or equivalent components as those described in fig. 1 are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate. The invention described in claim 4 is applied to the pressure sensor 31 shown in fig. 2. The connecting portion 16 shown in fig. 2 is formed of a tube 32 formed separately from the base portion 14, and is fixed to the base portion 14. The connection portion 16 of the present embodiment is welded to the base portion 14. The housing 18 of the pressure chamber 17 according to the present embodiment is formed separately from the base portion 14 and the connecting portion 16, and is welded to the connecting portion 16. The joining method may be applied to soldering, diffusion joining, press fitting, caulking, bonding, and the like, in addition to welding.
As shown in this embodiment, when the connection portion 16 is formed separately from the base portion 14, the material forming the connection portion 16 may be a material having lower rigidity than the material of the base portion 14. In the case where the connecting portion 16 is formed of a material having low rigidity in this way, the deformation of the base portion 14 is more difficult to be transmitted to the pressure receiving diaphragm 19. In addition, when the connection portion 16 is difficult to be integrally formed due to the shapes of the base portion 14 and the pressure chamber portion 17, it is preferable to form and join them separately.
Second embodiment
The pressure sensor of the present invention may be constructed as shown in fig. 3. In fig. 3, the same or equivalent components as those described in fig. 1 are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate. The invention described in claim 5 is applied to the pressure sensor shown in fig. 3.
The position of the pressure chamber 17 of the pressure sensor 41 shown in fig. 3 is different from that of the pressure sensor of the first embodiment. The pressure chamber portion 17 of the present embodiment is disposed on the side opposite to the sensor mount 5 with respect to the base portion 14. The housing 18 of the pressure chamber 17 has an annular cover 42 that covers the pressure receiving diaphragm 19 to connect the pressure receiving diaphragm side to the connection portion 16.
The connecting portion 16 is formed to protrude from the base portion 14 in a direction opposite to the sensor mount 5 to connect the cover 42 and the base portion 14. The connecting portion 16 shown in fig. 3 is described as being formed integrally with the base portion 14 and the housing 18, but may be formed separately from the base portion 14 and the housing 18 as shown in fig. 2. The connection portion 16 of the present embodiment functions as a pressure guide path 43 that is filled with the fluid to be measured 3 and transmits pressure through the through hole 16a inside.
The sensor element 13 of the present embodiment is supported by the housing 18 of the pressure chamber 17. A through hole 44 is formed in the housing 18 at a position corresponding to the sensor element 13 so as to transmit pressure from the inside of the pressure chamber 20 to the sensor element 13. The pressure guide section 22 of the present embodiment is configured to transmit pressure through a pressure guide path 45 including a through hole 44 of the housing 18 (a through hole penetrating the wall of the pressure chamber 17).
The base portion 14 has a pressure guide hole 46 extending from the seal surface 12a facing the sensor mount 5 toward the connecting portion 16. In this case, the pressure of the fluid to be measured 3 is transmitted to the pressure receiving diaphragm 19 via the pressure guide hole 46 and the through hole 16a inside the connecting portion 16.
Thus, even in the case of the configuration in which the pressure chamber portion 17 is positioned on the opposite side of the sensor mount 5 with respect to the base portion 14, the pressure sensor 41 is less susceptible to the influence of the mounting of the base portion 14 on the sensor mount 5, and can be downsized.
Third embodiment
The pressure sensor of the present invention may be constructed as shown in fig. 4 and 5. In fig. 4 and 5, the same or equivalent components as those described in fig. 1 are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate. The pressure sensor shown in fig. 4 and 5 employs the invention described in claim 6. The fracture site of fig. 5 is the site shown by line V-V in fig. 4.
The pressure chamber 17 of the pressure sensor 51 shown in fig. 4 and 5 is different from the pressure sensor 1 shown in the first embodiment in configuration. The pressure chamber 17 of the present embodiment is disposed on the opposite side of the sensor mount 5 with respect to the base portion 14, and the pressure receiving diaphragm 19 is perpendicular to the sealing surface 12a of the base portion 14.
The housing 18 of the pressure chamber portion 17 is formed in a hollow disk shape, and has a pressure receiving chamber 52 facing the pressure chamber 20 via a pressure receiving diaphragm 19. The pressure receiving chamber 52 is connected to a pressure guide hole 53 of the base portion 14 via the inside of the connecting portion 16. The pressure guide hole 53 extends from the sealing surface 12a of the base portion 14 toward the connecting portion 16. In this case, the pressure of the fluid to be measured 3 is transmitted to the pressure receiving diaphragm 19 via the pressure guide hole 53, the through hole 16a in the connecting portion 16, and the pressure receiving chamber 52.
The sensor element 13 of the present embodiment is supported by the housing 18 of the pressure chamber 17 via a pressure-guiding pipe 54. One end of the pressure guide tube 54 is connected to the pressure chamber 20 via a through hole 55 of the housing 18, and the other end is connected to the sensor element 13. Therefore, the pressure guide section 22 of the present embodiment is configured to transmit pressure through the pressure guide path 56 including the through hole 55 of the housing 18 (the through hole penetrating the wall of the pressure chamber 17).
In the pressure sensor 51 configured as described above, the base portion 14 is fastened and coupled to the sensor mount 5 by the mounting bolt 15, whereby the base portion 14 is deformed in the direction indicated by the arrow in fig. 4. The deformation direction is an oblique direction approaching the sensor mount 5 and facing the side of the base member 12.
In this case, the connecting portion 16 is pulled in a direction in which the base portion 14 expands outward in the radial direction. The direction of the force pulling the connecting portion 16, in other words, the direction of the force transmitted from the connecting portion 16 to the housing 18 to deform the housing 18 is different from the direction along the surface of the pressure receiving diaphragm 19. Therefore, the force generated by the fastening does not deform the pressure receiving diaphragm 19.
Therefore, according to this embodiment, the base portion 14 is less likely to be affected when the sensor mount 5 is attached.
Modification of connecting part
When the pressure chamber 17 is disposed as shown in fig. 4 and 5, the connection portion 16 can be configured as shown in fig. 6. In fig. 6, the same or equivalent components as those described with reference to fig. 1, 4 and 5 are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate. The invention described in claim 6 is applied to the pressure sensor shown in fig. 6.
The connection portion 16 of the pressure sensor 61 shown in fig. 6 includes: a base portion 62 extending from the base portion 14 in a direction opposite to the sensor mount 5; and a protruding side end portion 63 extending from the front end of the base portion 62 in a direction perpendicular to the sealing surface 12a of the base portion 14. The tip of the protruding side end 63 is connected to the center of the hollow disc-shaped case 18.
With this embodiment, since the deformation of the base portion 14 is hardly transmitted to the pressure chamber portion 17, it is possible to provide a pressure sensor which hardly receives the influence of the attachment of the base portion 14 to the sensor mount 5.
Description of the symbols
1. 31, 41, 51, 61 … pressure sensors, 3 … fluid to be measured, 5 … sensor mount, 6 … pressure guide port, 11 … seal member, 12a … seal surface, 13 … sensor element, 14 … base portion, 15 … mounting bolt (fastening member), 16 … connecting portion, 17 … pressure chamber portion, 19 … pressure-sensitive diaphragm, 20 … pressure chamber, 21 … pressure-transmitting liquid, 22 … pressure-transmitting portion, 23 … passage hole, 44, 55 … penetration hole, 24, 45, 56 … pressure-transmitting path, 46, 53 … pressure-transmitting hole, 63 … projecting side end portion.
Claims (7)
1. A pressure sensor is characterized by comprising:
a base part which is mounted on a sensor mounting seat through a sealing member in a superposed manner, the sensor mounting seat having a pressure guide port for transmitting the pressure of the fluid to be measured;
a pressure chamber section supported by the base section via a cylindrical connecting section, the pressure chamber section including a pressure chamber formed so that a pressure receiving diaphragm that receives the pressure of the fluid to be measured forms a part of a wall thereof, the pressure chamber being separated from the fluid to be measured; and
a pressure guide part having one end connected to the pressure chamber part and the other end connected to a pressure detection sensor element, the pressure guide part transmitting pressure from the pressure receiving diaphragm to the sensor element via a pressure transmission liquid,
the connecting portion functions as a pressure guide path for transmitting pressure by filling the inside of the connecting portion with the fluid to be measured or the liquid for transmitting pressure,
the connecting portion has an outer diameter smaller than an outer diameter of the pressurized membrane.
2. The pressure sensor of claim 1,
the pressure chamber portion is disposed in the pressure guide port so that the pressure receiving diaphragm receives pressure from the fluid to be measured in the pressure guide port,
the connecting portion is formed to protrude from a sealing surface of the base portion that faces the sensor mount toward the sensor mount,
the sensor element is supported on the base part,
the pressure guide portion is configured to transmit pressure by the pressure transmission liquid filling the pressure chamber portion and the interior of the connecting portion and a passage hole formed in the base portion so as to extend from the connecting portion to the sensor element.
3. The pressure sensor of claim 2,
the connecting portion is formed integrally with the base portion.
4. The pressure sensor of claim 2,
the connecting portion is formed separately from the base portion and is fixed to the base portion.
5. The pressure sensor of claim 1,
the pressure chamber portion is disposed on the side opposite to the sensor mount with respect to the base portion,
the connecting portion is formed to protrude from the base portion in a direction opposite to the sensor mount,
said sensor element being supported on said pressure chamber portion,
the pressure guide part is configured to transmit pressure through a pressure guide path including a through hole penetrating through a wall of the pressure chamber part,
the base portion has a pressure guide hole extending from a sealing surface opposite to the sensor mount toward the connecting portion,
the pressure of the fluid to be measured is transmitted to the pressure receiving diaphragm through the pressure receiving hole and the inside of the connecting portion.
6. The pressure sensor of claim 5,
the pressurized membrane is configured to be perpendicular relative to the sealing surface.
7. The pressure sensor of claim 6,
the projecting end of the connecting portion is formed to extend in a direction perpendicular to the sealing surface and is connected to the pressure chamber portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020-121856 | 2020-07-16 | ||
| JP2020121856A JP2022018624A (en) | 2020-07-16 | 2020-07-16 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113945318A true CN113945318A (en) | 2022-01-18 |
Family
ID=79327582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110746466.6A Pending CN113945318A (en) | 2020-07-16 | 2021-07-01 | Pressure sensor |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2022018624A (en) |
| KR (1) | KR20220009871A (en) |
| CN (1) | CN113945318A (en) |
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| JPH08178783A (en) * | 1994-12-26 | 1996-07-12 | Yokogawa Electric Corp | Differential pressure/pressure transmitter |
| KR101583711B1 (en) * | 2014-07-30 | 2016-01-11 | 세종공업 주식회사 | Pressure sensor having diaphragm |
| CN105829853A (en) * | 2013-12-18 | 2016-08-03 | 恩德莱斯和豪瑟尔两合公司 | Pressure sensor |
| JP2017116457A (en) * | 2015-12-25 | 2017-06-29 | アズビル株式会社 | Pressure sensor |
| CN107110727A (en) * | 2014-10-07 | 2017-08-29 | 日立金属株式会社 | Pressure sensor and differential pressure pick-up and use their mass flow control appts |
| CN109642844A (en) * | 2016-08-16 | 2019-04-16 | 恩德莱斯和豪瑟尔欧洲两合公司 | For reducing the obturator of the volume of pressure measurement room |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6675655B2 (en) | 2002-03-21 | 2004-01-13 | Rosemount Inc. | Pressure transmitter with process coupling |
| JP5427113B2 (en) | 2010-06-01 | 2014-02-26 | 長野計器株式会社 | Pressure detection device |
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2020
- 2020-07-16 JP JP2020121856A patent/JP2022018624A/en active Pending
-
2021
- 2021-06-21 KR KR1020210080066A patent/KR20220009871A/en not_active Application Discontinuation
- 2021-07-01 CN CN202110746466.6A patent/CN113945318A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08178783A (en) * | 1994-12-26 | 1996-07-12 | Yokogawa Electric Corp | Differential pressure/pressure transmitter |
| CN105829853A (en) * | 2013-12-18 | 2016-08-03 | 恩德莱斯和豪瑟尔两合公司 | Pressure sensor |
| KR101583711B1 (en) * | 2014-07-30 | 2016-01-11 | 세종공업 주식회사 | Pressure sensor having diaphragm |
| CN107110727A (en) * | 2014-10-07 | 2017-08-29 | 日立金属株式会社 | Pressure sensor and differential pressure pick-up and use their mass flow control appts |
| JP2017116457A (en) * | 2015-12-25 | 2017-06-29 | アズビル株式会社 | Pressure sensor |
| CN109642844A (en) * | 2016-08-16 | 2019-04-16 | 恩德莱斯和豪瑟尔欧洲两合公司 | For reducing the obturator of the volume of pressure measurement room |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2022018624A (en) | 2022-01-27 |
| KR20220009871A (en) | 2022-01-25 |
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