CN113930738A - Metal vapor modulation device for vacuum coating and modulation method thereof - Google Patents
Metal vapor modulation device for vacuum coating and modulation method thereof Download PDFInfo
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- CN113930738A CN113930738A CN202010602512.0A CN202010602512A CN113930738A CN 113930738 A CN113930738 A CN 113930738A CN 202010602512 A CN202010602512 A CN 202010602512A CN 113930738 A CN113930738 A CN 113930738A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/24—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of resistance of resistors due to contact with conductor fluid
- G01F23/241—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of resistance of resistors due to contact with conductor fluid for discrete levels
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
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Abstract
The invention discloses a metal vapor modulation device for vacuum coating and a control method thereof, wherein the metal vapor modulation device comprises a vacuum cavity, a metal vapor modulator, a metal vapor ejector and an intelligent processor; the metal steam modulator and the metal steam ejector are arranged in the vacuum cavity; the metal vapor modulator comprises a crucible for placing metal liquid, a crucible heater is arranged on the crucible, and a metal vapor pressure detection device and a metal liquid level detection device are arranged in the crucible; the crucible is connected with the metal steam ejector through a metal steam outlet pipeline, and a metal steam outlet control valve is arranged on the metal steam outlet pipeline; a molten metal conveying pipeline is connected to the crucible, and a molten metal inlet control valve is arranged on the molten metal conveying pipeline; the intelligent processor is used for receiving the detection data and performing calculation and judgment through the intelligent processor. The invention realizes the control of the evaporation temperature, the evaporation rate and the injection rate of the metal vapor, thereby stabilizing the basic coating thickness and the process and improving the quality of the coating product.
Description
Technical Field
The invention relates to a vacuum coating technology, in particular to a metal vapor modulation device for vacuum coating and a modulation method thereof.
Background
Physical vapor deposition is a widely used material surface treatment technology, and metal, alloy or compound is evaporated in a vacuum environment, and the formed metal vapor is solidified and deposited on a substrate. The technology is adopted to carry out film coating on the surface of the material, and the coating has better wear resistance, corrosion resistance, hardness and wettability, and can obviously improve the performance of the material and prolong the service life. The technology is adopted for coating treatment, no three wastes are generated, and no pollution is caused to the environment. The technology is widely applied to the fields of materials such as machinery, electronics, hardware, aerospace, chemical engineering and the like, and becomes an important application technology for green manufacturing.
In the application of the physical vapor deposition technology, coating materials are various, such as zinc, aluminum, magnesium, chromium and the like, the coating speed is generally high and can reach 1-3 m/s, and in order to obtain good coating surface quality and spraying effect, the flow rate and pressure of metal vapor in the spraying process are required to be kept relatively constant. In addition, different materials have different requirements on the thickness of the coating, and in order to obtain reasonable coating thickness, the process matching of the coating thickness and the evaporation capacity is realized by setting the running speed of the material to be coated. Therefore, in the vacuum coating process, the modulation generator of the metal vapor is the core equipment of the coating process and has a crucial influence on the coating quality.
In the prior patent application, for example, patent application No. 200820115896.0 proposes an industrial steam generator, in which a crucible for evaporating metal steam is placed outside a vacuum chamber, and the metal steam is transported into the vacuum chamber through a pipeline and sprayed from an injector onto a metal steel plate for deposition. In this technique, the crucible is placed outside the vacuum chamber, which is advantageous for operations such as maintenance, but increases the distance from the crucible to the ejector, which brings about some adverse effects. The extension of the metal steam pipeline increases the length of the heater on one hand, so that the energy consumption is increased. In addition, the extension of the steam delivery pipe leads to the increase of the loss of the metal steam pressure, and if the steam pressure at the inlet of the pipe needs to be increased to reach the same steam pressure condition at the outlet of the ejector in the vacuum cavity, the metal steam pressure in the crucible is required to be increased. Since the crucible is arranged outside the vacuum chamber, once leakage occurs, metal vapor is easily oxidized.
In addition, in the evaporation process of the molten metal, the evaporation rate of the metal vapor may change and needs to be adjusted quickly and stably; when zinc vapor is sprayed to a substrate for coating, the thickness of the coating has different requirements due to different process requirements, and the flow of the metal vapor at a spraying outlet needs to be accurately controlled to ensure the stability of the flow of the vapor. The process requirements put high requirements on evaporation devices and regulation technologies of metal steam, and currently common metal steam generators usually adopt independent control functions, and no metal steam modulation device and corresponding control technology are available.
Disclosure of Invention
In view of the above-mentioned defects in the prior art, the present invention aims to provide a metal vapor modulation apparatus for vacuum coating and a modulation method thereof, which can control the evaporation temperature, evaporation rate and injection rate of metal vapor, thereby stabilizing the basic coating thickness and process and improving the quality of the coated product.
In order to achieve the purpose, the invention adopts the following technical scheme:
on one hand, the metal vapor modulation device for vacuum coating comprises a vacuum cavity, a metal vapor modulator, a metal vapor ejector and an intelligent processor;
the metal steam modulator and the metal steam ejector are both arranged in the vacuum cavity;
the metal vapor modulator comprises a crucible for holding molten metal, a crucible heater is arranged on the crucible, and a metal vapor pressure detection device and a metal liquid level detection device are arranged in the crucible;
the crucible is connected with the metal steam ejector through a metal steam outlet pipeline, and a metal steam outlet control valve is arranged on the metal steam outlet pipeline;
a molten metal conveying pipeline is connected to the crucible, and a molten metal inlet control valve is arranged on the molten metal conveying pipeline;
the intelligent processor is used for receiving detection data of the metal vapor pressure detection device and the metal liquid level detection device, and controlling the opening and closing of the crucible heater and the opening degree of the metal vapor outlet control valve and the metal liquid inlet control valve through calculation and judgment of the intelligent processor.
Preferably, one or two vacuum chambers are provided.
Preferably, when two vacuum chambers are provided, the metal vapor modulator and the metal vapor injector are respectively provided in the corresponding vacuum chambers.
Preferably, a pressure release valve is arranged on the crucible.
Preferably, the crucible heater is a sectional control type crucible heater.
Preferably, the metal liquid level detection device adopts a high-sensitive resistance array type metal liquid level detection device.
On the other hand, the metal vapor modulation method for the metal vapor modulation device for vacuum coating is characterized in that the metal liquid level detection device is used for detecting the metal liquid level data in the crucible, the intelligent processor is used for controlling the heating power of each section of the crucible heater, so that the metal liquid in the crucible is at the set temperature, and the metal vapor is formed;
and the metal vapor pressure detection device is used for detecting the metal vapor pressure data in the crucible, and the intelligent processor is used for controlling the opening degrees of the metal vapor outlet control valve and the metal liquid inlet control valve, so that the accurate modulation control between the metal vapor pressure in the crucible and the metal vapor flow is realized.
Preferably, the method further comprises the steps of:
1) starting the crucible heater to preheat to a set temperature TaOpening the molten metal inlet control valve, inputting molten metal into the crucible, and closing the metal steam outlet control valve;
2) when the molten metal in the crucible reaches a set liquid level position, the crucible heater corresponding to the molten metal area adopts full-power heating to heat the molten metal to a target temperature TmThen, forming metal steam, reducing the heating power of the crucible heater, and continuously preserving the temperature of the crucible position in the molten metal area;
3) when the metal steam pressure in the crucible reaches a target pressure range, opening the metal steam outlet control valve, conveying the metal steam to the metal steam ejector along the metal steam outlet pipeline, and spraying the metal steam to the surface of the running strip steel by the metal steam ejector to form a metal coating;
4) and closing the molten metal inlet control valve after the molten metal level in the crucible is adjusted immediately before the production of the metal coating is finished, and closing the metal steam outlet control valve after the molten metal in the crucible is completely evaporated.
Preferably, in the step 3), the intelligent processor controls the opening K of the valve according to the metal vapor outlet while the metal vapor injector injects the metal vaporoutAnd maximum metal vapor flow rate QoutAnd calculating the amount K of the liquid supplement required by the balance of the molten metal in the crucible in real timeout×QoutAnd then according to the maximum flow Q of the molten metal in the molten metal conveying pipelineinControlling the opening K of the molten metal inlet control valve in real timeinSo that K isin×Qin＝Kout×Qout。
Preferably, in the step 3), when the metal vapor pressure detection device detects that the variation range of the metal vapor pressure in the crucible exceeds a set value, the intelligent processor performs calculation and makes the following judgment:
if the metal vapor pressure is reduced and the reduction amplitude exceeds a set value, increasing the power of the crucible heater corresponding to the molten metal area until the metal vapor pressure in the crucible is restored to the set value;
if the metal vapor pressure is reduced and the reduction amplitude exceeds a set value, increasing the power of the crucible heater corresponding to the metal liquid area, and if the metal vapor pressure in the crucible still cannot be recovered to the set value, the intelligent processor sends a low-pressure alarm to a coating unit, if the metal vapor pressure cannot meet the coating process requirement, the metal vapor outlet control valve is closed, and when the metal vapor pressure is recovered to meet the coating process requirement, the metal vapor outlet control valve is opened;
if the metal vapor pressure is increased and the amplification exceeds a set value, reducing the power of the crucible heater corresponding to the molten metal area until the metal vapor pressure in the crucible is restored to the set value;
if the metal vapor pressure exceeds the highest critical value of the safe pressure range, reducing the power of the crucible heater corresponding to the metal liquid area, closing the metal liquid inlet control valve until the metal vapor pressure in the crucible is restored to a set value, and then opening the metal liquid inlet control valve to increase the power of the crucible heater; if the power of the crucible heater is reduced to the minimum and the metal steam pressure cannot be reduced, the intelligent processor sends a pressure relief signal to the coating machine set, the pressure relief valve is opened, and the pressure relief valve is closed when the metal steam pressure in the crucible is relieved to a set value.
The metal vapor modulation device and the modulation method thereof for vacuum coating provided by the invention also have the following beneficial effects:
1) the evaporation rate of the metal vapor and the outlet jet flow can be independently regulated and controlled, the stability of a film coating product and a process is facilitated, and the dynamic optimization regulation and control of the process are facilitated;
2) the metal vapor modulator is positioned in the vacuum cavity, so that the metal liquid and the metal vapor are not easy to oxidize, and the quality of a coated product is improved;
3) the device of the invention has relatively simple structure and control method, and is easy to realize automatic control.
Drawings
FIG. 1 is a schematic diagram of a structure in which a metal vapor modulator and a metal vapor injector are disposed in the same vacuum chamber in the apparatus of the present invention;
FIG. 2 is a schematic view of the structure of the device of the present invention in which the metal vapor modulator and the metal vapor injector are disposed in the corresponding independent vacuum chamber;
FIG. 3 is an electrical schematic of the metal level detection device of the apparatus of the present invention.
Detailed Description
The technical scheme of the invention is further explained by combining the drawings and the embodiment.
Referring to fig. 1 to 2, a metal vapor modulator for vacuum deposition according to the present invention includes a vacuum chamber 1, a metal vapor modulator 2, a metal vapor injector 3, and an intelligent processor. Wherein, one or two vacuum cavities 1 are provided.
In the case where one vacuum chamber 1 is provided, the metal vapor modulator 2 and the metal vapor injector 3 are placed in the vacuum chamber 1 (as shown in fig. 1).
Under the condition that vacuum cavity 1, 4 were equipped with two, metal steam modulator 2 and metal steam injector 3 were arranged in corresponding independent vacuum cavity 1, 4 respectively (as shown in fig. 2), guarantee like this that metal steam modulator 2 is in under the prerequisite of vacuum cavity 1 environment, realize key equipment and key technology separation, the operation of being convenient for is maintained.
The metal vapor modulator 2 comprises a crucible 6 for placing the metal liquid 5, a crucible heater 7 is arranged on the outer side of the crucible 6, and a metal vapor pressure detection device 8 and a metal liquid level detection device 9 are arranged in the crucible 6.
The top of the crucible 6 is connected with the metal vapor injector 3 through a metal vapor outlet pipe 10, and the metal vapor outlet pipe 10 is provided with a metal vapor outlet control valve 11.
The bottom of the crucible 6 is connected with a molten metal conveying pipeline 12, and the molten metal conveying pipeline 12 is provided with a molten metal inlet control valve 13.
A pressure relief valve 14 is also mounted on the crucible 6.
The crucible heater 7 adopts a sectional control type crucible heater, and the temperature of each section can be independently adjusted.
Independent heaters are arranged on the molten metal conveying pipeline 12, the molten metal inlet control valve 13, the metal steam outlet pipeline 10, the metal steam outlet control valve 11 and the metal steam ejector 3.
The intelligent processor is used for receiving the numerical value of the metal vapor pressure in the crucible 6 measured by the metal vapor pressure detection device 8 and the numerical value of the liquid level of the metal liquid 5 in the crucible 6 measured by the metal liquid level detection device 9, and controlling the sectional regulation of the power of the crucible heater 7 and the opening degrees of the metal vapor outlet control valve 11 and the metal vapor inlet control valve 13 through the calculation and judgment of the intelligent processor, so that the supplement of the metal liquid 5 and the control of the ejection flow of the metal vapor in the vacuum coating process are realized, and the accurate modulation control of the metal vapor in the vacuum coating process is completed.
Referring to fig. 3, the metal level detecting device 9 is a high-sensitivity resistor array type metal level detecting device. In the metal coating process, the high sensitive resistor array is used for detecting the metal liquid level in the crucible 6, a plurality of same small resistors are arranged in the height direction of the crucible 6, the resistors are in an off state, a parallel circuit is packaged on the other side of the resistors, a current detection meter is arranged on a main loop, one end of each independent small resistor is connected with a power supply, and a small gap is arranged on an independent loop at the other end, which is equivalent to a switch. When no molten metal 5 is filled in the gap, the circuit loop where the small resistor is located is in an off state, which is equal to that the resistor is not connected into the circuit; when the molten metal 5 rises, the gap on the circuit of the resistor is filled with the molten metal 5, the resistor circuit is conducted, a current I is formed on the circuit, and the height of the crucible 6 on which the resistor is positioned is h. When the liquid level of the molten metal 5 rises continuously, the conducted parallel resistors are more and more, if n resistors are conducted and connected, the total current signal after parallel connection is n multiplied by I, the total current value is related to the height of the liquid level of the molten metal 5, and the corresponding liquid level height in the crucible 6 is n multiplied by h. The intelligent processor determines the position of the metal liquid level according to the measured current signals of the parallel circuit, the gas phase area is arranged above the liquid level, and the molten metal area is arranged below the liquid level, so that the crucible heater 7 in the liquid phase area and the crucible heater 7 in the gas phase area can be independently controlled in power regulation. When the liquid level position of the molten metal 5 in the crucible 6 changes, the intelligent processor timely judges the gas-liquid interface position and determines the heating power required by each section of heater on the crucible heater 7.
The invention also provides a metal vapor modulation method for vacuum coating, which comprises the steps of measuring the liquid level data of the metal liquid 5 in the crucible 6 by using the metal liquid level detection device 9 in the device, controlling the heating power of each section of the corresponding liquid phase and position gas phase on the crucible heater 7 by using the intelligent processor, and realizing that the metal liquid 6 in the crucible 6 is at the set temperature to form the metal vapor.
The metal vapor pressure detection device 8 is used for detecting the metal vapor pressure data formed in the crucible 6, and the intelligent processor is used for controlling the opening degrees of the metal vapor outlet control valve 11 and the metal liquid inlet control valve 13, so that the accurate modulation control among the amount of the metal liquid 5 in the crucible 6, the metal vapor pressure and the metal vapor jet flow is realized.
The metal vapor modulation method further comprises the following steps:
1) starting the heaters on the parts and the crucible heater 7, preheating to the set temperature TaOpening a molten metal inlet control valve 13, inputting molten metal 5 which is melted into a liquid state in a pre-melting crucible into a crucible 6, and closing a metal steam outlet control valve 11;
2) when the molten metal 5 in the crucible 6 reaches the set liquid level position, the crucible heater 7 corresponding to the molten metal 5 area adopts full-power heating to heat the molten metal 5 to the target temperature TmThen, forming metal steam, reducing the heating power of a crucible heater 7, and continuously preserving the heat of the crucible 6 in the molten metal 5 area;
3) when the metal steam pressure in the crucible 6 reaches a target pressure range, opening a metal steam outlet control valve 11, conveying the metal steam to a metal steam ejector 3 along a metal steam outlet pipeline 10, and spraying the metal steam to the surface of a running strip steel 15 by the metal steam ejector 3 to form a metal coating;
in the metal coating process, if the metal vapor pressure is kept relatively constant, the maximum metal vapor flow is QoutThe flow rate of the metal sprayed and the opening K of the metal vapor outlet control valve 11outCorrelation, opening KoutThe value range is 0-100%. By setting the opening degree K of the metal vapor outlet control valve 11outAnd obtaining the real-time metal steam flow to realize the metal steam flow modulation control.
4) When the liquid metal level in the crucible 6 is adjusted immediately before the production of the metal coating film is completed, the liquid metal inlet control valve 13 is closed, and after the liquid metal in the crucible 6 is completely evaporated, the metal vapor outlet control valve 11 is closed.
In step 3), in order to maintain the liquid level in the crucible 6 relatively constant during the metal plating process, the intelligent processor controls the opening K of the valve 11 according to the metal vapor outletoutAnd maximum metal vapor flow rate QoutAnd calculating the amount K of the liquid supplement required for maintaining the balance of the molten metal 5 in the crucible 6 in real timeout×QoutAnd simultaneously according to the maximum flow Q of the molten metal in the molten metal conveying pipeline 12inAnd the opening degree K of the molten metal inlet control valve 13inCalculating the flow of the inlet molten metal 5 in real time, wherein the flow of the evaporated molten metal is equal to the amount of the replenished molten metal 5, namely Kin×Qin＝Kout×QoutThereby controlling the molten metal 5 in the crucible 6 to maintain dynamic balance. In the process, if the metal evaporation amount is required to be adjusted, the opening K of the molten metal inlet control valve 13 can be controlledinThe amount of the molten metal 5 in the crucible 6 is adjusted. Meanwhile, the intelligent processor adjusts the heating power of each section of crucible heater 7 according to the judged liquid level position of the molten metal 5. Through the adjustment, the modulation control of the metal vapor evaporation amount can be realized.
In step 3), when the metal vapor pressure detecting device 8 detects that the variation range of the metal vapor pressure in the crucible 6 exceeds a set value, the intelligent processor calculates and makes the following judgment:
if the metal vapor pressure is reduced and the amplitude of the reduction exceeds a set value, the power of the crucible heater 7 corresponding to the area of the molten metal 5 is increased until the metal vapor pressure in the crucible 6 is restored to the set value;
if the metal vapor pressure is reduced and the reduction amplitude exceeds a set value, increasing the power of a crucible heater 7 corresponding to the area of the metal liquid 5, and the metal vapor pressure in a crucible 6 still cannot be recovered to the set value, sending a low-pressure alarm to a coating machine set by an intelligent processor, if the metal vapor pressure cannot meet the coating process requirement, closing a metal vapor outlet control valve 11, and when the metal vapor pressure is recovered to meet the coating process requirement, opening the metal vapor outlet control valve 11;
if the metal vapor pressure is increased and the amplification exceeds a set value, reducing the power of the crucible heater 7 corresponding to the area of the molten metal 5 until the metal vapor pressure in the crucible 6 is restored to the set value;
if the metal vapor pressure exceeds the highest critical value of the safe pressure range, reducing the power of the crucible heater 7 corresponding to the area of the molten metal 5, closing the molten metal inlet control valve 13 until the metal vapor pressure in the crucible 6 is restored to a set value, and then opening the molten metal inlet control valve 13 to increase the power of the crucible heater 7; if the power of the crucible heater 7 is reduced to the minimum and the metal vapor pressure cannot be reduced, the intelligent processor sends a pressure relief signal to the coating machine set, the pressure relief valve 14 is opened, and the pressure relief valve 14 is closed when the metal vapor pressure in the crucible 6 is relieved to a set value.
Through the regulation and control, the regulation and control of the metal steam flow in the crucible 6 are realized, the stable control of the metal steam pressure in the film coating process is ensured, and the stability and the improvement of the film coating quality are facilitated.
The metal steam modulation method specifically comprises the following modulation control:
first, the heaters and crucible heaters 7 of the respective parts preheat the molten metal delivery pipe 12, the molten metal inlet control valve 13, the molten metal vapor outlet pipe 10, the molten metal vapor outlet control valve 11, the metal vapor injector 3, and the crucible 6 to the target temperature Ta，TaThe temperature range of (A) is 600-800 ℃.
Next, the metal vapor outlet control valve 11 is closed, the molten metal inlet control valve 13 is opened, and the molten metal 5 is supplied into the crucible 6 from the molten metal supply line 12. The metal liquid level detection device 9 measures the liquid level position of the metal liquid 5 in real time, and when the liquid level reaches a set value, the metal liquid inlet control valve 13 is closed.
Thirdly, according to the liquid level position detected by the metal liquid level detection device 9, the intelligent processor adjusts the heating power of each section of the sectional type crucible heater 7. The crucible heater 7 above the liquid level is maintained at a constant temperature with low power, so that the temperature of the crucible 6 is kept at the target temperature Ta. For the crucible heater 7 below the liquid level, the crucible 6 is heated to the target temperature T by adopting high-power rapid heatingm. When the crucible 6 is heated to the target temperature TmThe crucible heating power 7 of the molten metal area is reduced, and the constant temperature is maintained by adopting low power. When the metal pressure value detected by the metal steam pressure detection device 8 meets the coating process requirement, the coating conditions are met. Wherein, TmThe temperature range of (A) is 700-1000 ℃.
Then, the metal vapor outlet control valve 11 is opened, and the metal vapor is delivered to the metal vapor injector 3 through the metal vapor outlet pipe 10 and is injected to the surface of the strip steel 15 to form a coating layer. At the same time, the opening K of the valve 11 is controlled according to the metal vapor outletoutAnd maximum molten metal vapor flow rate QoutCalculating the amount of the liquid supplement K required for maintaining the balance of the molten metal 5 in the crucible 6 in real timeout×Qout. The maximum flow rate of molten metal in the molten metal transport pipe 12 is QinThen, the opening K of the molten metal inlet control valve 13 is adjusted in real timeinSo that K isin×Qin＝Kout×QoutThereby keeping the metal liquid 5 to be stably evaporated and realizing the stable control of the steam pressure and the flow.
In the metal vapor modulation method, if the metal vapor pressure needs to be increased, and the target pressure value range of the metal vapor pressure detection device 8 can be adjusted, the intelligent processor can improve the heating power of the crucible heater 7 in the metal liquid 5 area, and when the metal vapor pressure value reaches the target pressure range, the metal vapor pressure is maintained at constant power; if the metal vapor pressure needs to be reduced, the intelligent processor reduces the heating power of the crucible heater 7 in the metal liquid 5 area, and when the metal vapor pressure value reaches the target pressure range, the constant power maintains the metal vapor pressure; when the metal vapor pressure fluctuates, the stable modulation of the metal vapor pressure can be realized by adjusting the heating power of the crucible heater 7 in the region of the molten metal 5.
In the metal vapor modulation method, if the metal vapor pressure needs to be increased and the heating power of the crucible heater 7 is adjusted to the maximum, the metal vapor pressure cannot reach the target pressure, the metal vapor pressure does not meet the coating process requirement, the intelligent processor temporarily closes the metal vapor outlet control valve 11, and simultaneously sends a metal vapor pause signal to the coating machine set. When the metal vapor pressure meets the coating process, a metal vapor delivery recovery signal is sent to the coating unit, and the metal vapor outlet control valve 11 is opened.
When the metal vapor modulation method is adopted in the metal vapor modulation control process, if the metal vapor pressure needs to be reduced and the heating power of the crucible heater 7 is reduced to the minimum and the metal vapor pressure still exceeds the safety critical value, the intelligent processor sends a metal vapor transmission suspension signal to the coating machine set, closes the metal vapor outlet control valve 11, closes the metal liquid inlet control valve 13 and opens the pressure release valve 14. And when the metal vapor pressure in the crucible 6 is restored to the normal set range, closing the pressure release valve 14, opening the metal vapor outlet control valve 11 and the metal liquid inlet control valve 13, and restoring the metal vapor conveying and spraying.
When the metal vapor modulation method is adopted in the metal vapor modulation control process, if the evaporation capacity of the metal vapor in unit time needs to be increased, the opening degree K of the molten metal inlet flow control valve 13 can be increasedinThe metal liquid level detection device 9 detects the liquid level change of the crucible 6 in real time, the intelligent processor adjusts the heating power of each section of the crucible heater 7, and when the crucible heater 7 is originally in a gas phase region and the metal liquid level rises to cover the section of the crucible heater 7, the intelligent processor increases the heating power of the section of the crucible heater 7. Through the regulation, the regulation and control of the evaporation capacity of the metal vapor can be realized.
It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that changes and modifications to the above described embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.
Claims (10)
1. A metal vapor modulation device for vacuum coating is characterized in that: the device comprises a vacuum cavity, a metal steam modulator, a metal steam ejector and an intelligent processor;
the metal steam modulator and the metal steam ejector are both arranged in the vacuum cavity;
the metal vapor modulator comprises a crucible for holding molten metal, a crucible heater is arranged on the crucible, and a metal vapor pressure detection device and a metal liquid level detection device are arranged in the crucible;
the crucible is connected with the metal steam ejector through a metal steam outlet pipeline, and a metal steam outlet control valve is arranged on the metal steam outlet pipeline;
a molten metal conveying pipeline is connected to the crucible, and a molten metal inlet control valve is arranged on the molten metal conveying pipeline;
the intelligent processor is used for receiving detection data of the metal vapor pressure detection device and the metal liquid level detection device, and controlling the opening and closing of the crucible heater and the opening degree of the metal vapor outlet control valve and the metal liquid inlet control valve through calculation and judgment of the intelligent processor.
2. The metal vapor modulation device according to claim 1, wherein: one or two vacuum cavities are arranged.
3. The metal vapor modulation device according to claim 2, wherein: when two vacuum cavities are arranged, the metal steam modulator and the metal steam ejector are respectively arranged in the corresponding vacuum cavities.
4. The metal vapor modulation device according to claim 1, wherein: and a pressure release valve is arranged on the crucible.
5. The metal vapor modulation device according to claim 1, wherein: the crucible heater adopts a sectional control type crucible heater.
6. The metal vapor modulation device according to claim 1, wherein: the metal liquid level detection device adopts a high-sensitive resistance array type metal liquid level detection device.
7. A metal vapor preparation method for use in the metal vapor preparation apparatus for vacuum deposition according to claims 1 to 6, characterized in that:
the metal liquid level detection device is used for detecting the metal liquid level data in the crucible, and the intelligent processor is used for controlling the heating power of each section of the crucible heater so as to realize that the metal liquid in the crucible is at a set temperature and form metal steam;
and the metal vapor pressure detection device is used for detecting the metal vapor pressure data in the crucible, and the intelligent processor is used for controlling the opening degrees of the metal vapor outlet control valve and the metal liquid inlet control valve, so that the accurate modulation control between the metal vapor pressure in the crucible and the metal vapor flow is realized.
8. The metal vapor conditioning method according to claim 7, further comprising the steps of:
1) starting the crucible heater to preheat to a set temperature TaOpening the molten metal inlet control valve, inputting molten metal into the crucible, and closing the metal steam outlet control valve;
2) when the molten metal in the crucible reaches a set liquid level position, the crucible heater corresponding to the molten metal area adopts full-power heating to heat the molten metal to a target temperature TmAfter that, the air conditioner is started to work,forming metal steam, reducing the heating power of the crucible heater, and continuously preserving the temperature of the crucible position in the molten metal area;
3) when the metal steam pressure in the crucible reaches a target pressure range, opening the metal steam outlet control valve, conveying the metal steam to the metal steam ejector along the metal steam outlet pipeline, and spraying the metal steam to the surface of the running strip steel by the metal steam ejector to form a metal coating;
4) and closing the molten metal inlet control valve after the molten metal level in the crucible is adjusted immediately before the production of the metal coating is finished, and closing the metal steam outlet control valve after the molten metal in the crucible is completely evaporated.
9. The metal vapor modulation method according to claim 8, wherein: in the step 3), the intelligent processor controls the opening K of the valve according to the metal steam outlet while the metal steam injector sprays the metal steamoutAnd maximum metal vapor flow rate QoutAnd calculating the amount K of the liquid supplement required by the balance of the molten metal in the crucible in real timeout×QoutAnd then according to the maximum flow Q of the molten metal in the molten metal conveying pipelineinControlling the opening K of the molten metal inlet control valve in real timeinSo that K isin×Qin＝Kout×Qout。
10. The metal vapor modulation method according to claim 8, wherein: in the step 3), when the metal vapor pressure detection device detects that the metal vapor pressure variation range in the crucible exceeds a set value, the intelligent processor calculates and makes the following judgment:
if the metal vapor pressure is reduced and the reduction amplitude exceeds a set value, increasing the power of the crucible heater corresponding to the molten metal area until the metal vapor pressure in the crucible is restored to the set value;
if the metal vapor pressure is reduced and the reduction amplitude exceeds a set value, increasing the power of the crucible heater corresponding to the metal liquid area, and if the metal vapor pressure in the crucible still cannot be recovered to the set value, the intelligent processor sends a low-pressure alarm to a coating unit, if the metal vapor pressure cannot meet the coating process requirement, the metal vapor outlet control valve is closed, and when the metal vapor pressure is recovered to meet the coating process requirement, the metal vapor outlet control valve is opened;
if the metal vapor pressure is increased and the amplification exceeds a set value, reducing the power of the crucible heater corresponding to the molten metal area until the metal vapor pressure in the crucible is restored to the set value;
if the metal vapor pressure exceeds the highest critical value of the safe pressure range, reducing the power of the crucible heater corresponding to the metal liquid area, closing the metal liquid inlet control valve until the metal vapor pressure in the crucible is restored to a set value, and then opening the metal liquid inlet control valve to increase the power of the crucible heater; if the power of the crucible heater is reduced to the minimum and the metal steam pressure cannot be reduced, the intelligent processor sends a pressure relief signal to the coating machine set, the pressure relief valve is opened, and the pressure relief valve is closed when the metal steam pressure in the crucible is relieved to a set value.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114875364A (en) * | 2022-05-13 | 2022-08-09 | 武汉华星光电半导体显示技术有限公司 | Evaporation source device |
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