CN113930727B - 一种全方位翻边金属化薄膜的蒸镀装置 - Google Patents
一种全方位翻边金属化薄膜的蒸镀装置 Download PDFInfo
- Publication number
- CN113930727B CN113930727B CN202111097270.5A CN202111097270A CN113930727B CN 113930727 B CN113930727 B CN 113930727B CN 202111097270 A CN202111097270 A CN 202111097270A CN 113930727 B CN113930727 B CN 113930727B
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- evaporation
- film
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- omnibearing
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Links
- 230000008020 evaporation Effects 0.000 title claims abstract description 62
- 238000001704 evaporation Methods 0.000 title claims abstract description 62
- 239000011104 metalized film Substances 0.000 title claims abstract description 29
- 239000010408 film Substances 0.000 claims abstract description 64
- 239000011248 coating agent Substances 0.000 claims abstract description 39
- 238000000576 coating method Methods 0.000 claims abstract description 39
- 238000007740 vapor deposition Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 abstract description 19
- 239000000463 material Substances 0.000 abstract description 9
- 238000007747 plating Methods 0.000 abstract description 9
- 238000005507 spraying Methods 0.000 abstract description 9
- 239000003990 capacitor Substances 0.000 abstract description 7
- 238000004804 winding Methods 0.000 abstract description 6
- 230000006872 improvement Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000011888 foil Substances 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111097270.5A CN113930727B (zh) | 2021-09-18 | 2021-09-18 | 一种全方位翻边金属化薄膜的蒸镀装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111097270.5A CN113930727B (zh) | 2021-09-18 | 2021-09-18 | 一种全方位翻边金属化薄膜的蒸镀装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN113930727A CN113930727A (zh) | 2022-01-14 |
CN113930727B true CN113930727B (zh) | 2023-12-15 |
Family
ID=79276140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202111097270.5A Active CN113930727B (zh) | 2021-09-18 | 2021-09-18 | 一种全方位翻边金属化薄膜的蒸镀装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN113930727B (zh) |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004200588A (ja) * | 2002-12-20 | 2004-07-15 | Matsushita Electric Ind Co Ltd | 金属化フィルムコンデンサ |
JP2008124245A (ja) * | 2006-11-13 | 2008-05-29 | Matsushita Electric Ind Co Ltd | 金属化フィルムの製造装置と金属化フィルムの製造方法 |
CN101484608A (zh) * | 2006-06-23 | 2009-07-15 | 株式会社爱发科 | 卷绕式真空蒸镀装置 |
JP2012077375A (ja) * | 2010-09-09 | 2012-04-19 | Panasonic Corp | 真空蒸着装置 |
JP2012214851A (ja) * | 2011-04-01 | 2012-11-08 | Panasonic Corp | 真空蒸着装置 |
JP2013185252A (ja) * | 2012-03-12 | 2013-09-19 | Hitachi High-Technologies Corp | 蒸発源装置及び真空蒸着装置及び有機el表示装置の製造方法 |
CN103649364A (zh) * | 2011-07-07 | 2014-03-19 | 松下电器产业株式会社 | 真空蒸镀装置 |
CN104319099A (zh) * | 2014-10-31 | 2015-01-28 | 东丽薄膜加工(中山)有限公司 | 金属化薄膜及其制造方法、制造装置和电容器 |
CN106244996A (zh) * | 2016-09-22 | 2016-12-21 | 铜陵市铜创电子科技有限公司 | 一种金属化薄膜加工用加厚镀膜装置 |
CN108660420A (zh) * | 2018-07-25 | 2018-10-16 | 华夏易能(广东)新能源科技有限公司 | 真空蒸镀设备及蒸发源装置 |
CN109461582A (zh) * | 2018-11-26 | 2019-03-12 | 安徽华威新能源有限公司 | 一种全方位翻边金属化薄膜的加工装置 |
CN210736874U (zh) * | 2019-09-29 | 2020-06-12 | 浙江七星电子股份有限公司 | 一种用于电容器金属膜蒸镀的镀膜装置 |
CN112210757A (zh) * | 2020-09-23 | 2021-01-12 | 铜陵市超越电子有限公司 | 金属化薄膜蒸镀用带式隔离装置 |
CN112301394A (zh) * | 2020-10-30 | 2021-02-02 | 西北工业大学 | 一种可以提高环形件内表面电镀层均匀性的镀腔 |
CN113249770A (zh) * | 2021-06-07 | 2021-08-13 | 重庆金美新材料科技有限公司 | 一种用于柔性薄膜基材表面电镀加工的水电镀设备 |
-
2021
- 2021-09-18 CN CN202111097270.5A patent/CN113930727B/zh active Active
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004200588A (ja) * | 2002-12-20 | 2004-07-15 | Matsushita Electric Ind Co Ltd | 金属化フィルムコンデンサ |
CN101484608A (zh) * | 2006-06-23 | 2009-07-15 | 株式会社爱发科 | 卷绕式真空蒸镀装置 |
JP2008124245A (ja) * | 2006-11-13 | 2008-05-29 | Matsushita Electric Ind Co Ltd | 金属化フィルムの製造装置と金属化フィルムの製造方法 |
JP2012077375A (ja) * | 2010-09-09 | 2012-04-19 | Panasonic Corp | 真空蒸着装置 |
JP2012214851A (ja) * | 2011-04-01 | 2012-11-08 | Panasonic Corp | 真空蒸着装置 |
CN103649364A (zh) * | 2011-07-07 | 2014-03-19 | 松下电器产业株式会社 | 真空蒸镀装置 |
JP2013185252A (ja) * | 2012-03-12 | 2013-09-19 | Hitachi High-Technologies Corp | 蒸発源装置及び真空蒸着装置及び有機el表示装置の製造方法 |
CN104319099A (zh) * | 2014-10-31 | 2015-01-28 | 东丽薄膜加工(中山)有限公司 | 金属化薄膜及其制造方法、制造装置和电容器 |
CN106244996A (zh) * | 2016-09-22 | 2016-12-21 | 铜陵市铜创电子科技有限公司 | 一种金属化薄膜加工用加厚镀膜装置 |
CN108660420A (zh) * | 2018-07-25 | 2018-10-16 | 华夏易能(广东)新能源科技有限公司 | 真空蒸镀设备及蒸发源装置 |
CN109461582A (zh) * | 2018-11-26 | 2019-03-12 | 安徽华威新能源有限公司 | 一种全方位翻边金属化薄膜的加工装置 |
CN210736874U (zh) * | 2019-09-29 | 2020-06-12 | 浙江七星电子股份有限公司 | 一种用于电容器金属膜蒸镀的镀膜装置 |
CN112210757A (zh) * | 2020-09-23 | 2021-01-12 | 铜陵市超越电子有限公司 | 金属化薄膜蒸镀用带式隔离装置 |
CN112301394A (zh) * | 2020-10-30 | 2021-02-02 | 西北工业大学 | 一种可以提高环形件内表面电镀层均匀性的镀腔 |
CN113249770A (zh) * | 2021-06-07 | 2021-08-13 | 重庆金美新材料科技有限公司 | 一种用于柔性薄膜基材表面电镀加工的水电镀设备 |
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CN113930727A (zh) | 2022-01-14 |
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Address after: 244000, Floor 1, Building 15, Science and Technology Innovation Park, East of Tongjingshan Avenue and North of Tongjing East Road, Shizishan High tech Zone, Tongguan District, Tongling City, Anhui Province Patentee after: Tongling Chaoyue Electronics Co.,Ltd. Country or region after: China Address before: 244000 No. 1111, east section of Weiyi Road, Shizishan District, Tongling City, Anhui Province (1 plant and 2 warehouse) Patentee before: TONGLING BEYOND ELECTRONICS Co.,Ltd. Country or region before: China |
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