CN113903366A - 一种适用于直写光刻机的高速数据传输系统 - Google Patents
一种适用于直写光刻机的高速数据传输系统 Download PDFInfo
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- CN113903366A CN113903366A CN202111169407.3A CN202111169407A CN113903366A CN 113903366 A CN113903366 A CN 113903366A CN 202111169407 A CN202111169407 A CN 202111169407A CN 113903366 A CN113903366 A CN 113903366A
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 29
- 238000001459 lithography Methods 0.000 title claims abstract description 18
- 239000013307 optical fiber Substances 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 239000000284 extract Substances 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract description 3
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000006837 decompression Effects 0.000 description 3
- 239000005441 aurora Substances 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
- G11B7/0045—Recording
- G11B7/00456—Recording strategies, e.g. pulse sequences
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F13/00—Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units
- G06F13/38—Information transfer, e.g. on bus
- G06F13/40—Bus structure
- G06F13/4063—Device-to-bus coupling
- G06F13/4068—Electrical coupling
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CN202111169407.3A CN113903366A (zh) | 2021-10-08 | 2021-10-08 | 一种适用于直写光刻机的高速数据传输系统 |
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CN202111169407.3A CN113903366A (zh) | 2021-10-08 | 2021-10-08 | 一种适用于直写光刻机的高速数据传输系统 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114510448A (zh) * | 2022-02-17 | 2022-05-17 | 安徽国芯智能装备有限公司 | 一种基于高速光纤以太网络的超高速数据传输系统及方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080165633A1 (en) * | 2007-01-05 | 2008-07-10 | Yi-Long Hsiao | Device and method for compensating signal in a light-scribe system |
CN101231474A (zh) * | 2008-02-27 | 2008-07-30 | 芯硕半导体(中国)有限公司 | 具有超高强度led光源的无掩膜直写光刻机 |
US20140097362A1 (en) * | 2012-10-01 | 2014-04-10 | Kla-Tencor Corporation | System and Method for Compressed Data Transmission in a Maskless Lithography System |
CN107065442A (zh) * | 2016-12-31 | 2017-08-18 | 江苏九迪激光装备科技有限公司 | 一种激光直写的数据处理方法及系统 |
WO2017206954A1 (zh) * | 2016-06-03 | 2017-12-07 | 中兴通讯股份有限公司 | 一种光口实现方法、装置及现场可编程门阵列器件 |
CN110824862A (zh) * | 2019-12-05 | 2020-02-21 | 合肥芯碁微电子装备股份有限公司 | 一种直写光刻设备图形数据高速传输装置及其传输方法 |
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2021
- 2021-10-08 CN CN202111169407.3A patent/CN113903366A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080165633A1 (en) * | 2007-01-05 | 2008-07-10 | Yi-Long Hsiao | Device and method for compensating signal in a light-scribe system |
CN101231474A (zh) * | 2008-02-27 | 2008-07-30 | 芯硕半导体(中国)有限公司 | 具有超高强度led光源的无掩膜直写光刻机 |
US20140097362A1 (en) * | 2012-10-01 | 2014-04-10 | Kla-Tencor Corporation | System and Method for Compressed Data Transmission in a Maskless Lithography System |
WO2017206954A1 (zh) * | 2016-06-03 | 2017-12-07 | 中兴通讯股份有限公司 | 一种光口实现方法、装置及现场可编程门阵列器件 |
CN107065442A (zh) * | 2016-12-31 | 2017-08-18 | 江苏九迪激光装备科技有限公司 | 一种激光直写的数据处理方法及系统 |
CN110824862A (zh) * | 2019-12-05 | 2020-02-21 | 合肥芯碁微电子装备股份有限公司 | 一种直写光刻设备图形数据高速传输装置及其传输方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114510448A (zh) * | 2022-02-17 | 2022-05-17 | 安徽国芯智能装备有限公司 | 一种基于高速光纤以太网络的超高速数据传输系统及方法 |
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Effective date of registration: 20220725 Address after: 230000 5th floor, building B4, xiezhihui Park, Zhongguancun, Baohe Economic Development Zone, Hefei, Anhui Province Applicant after: Anhui Guoxin Lithography Technology Co.,Ltd. Address before: 230051 1st floor, building D3, Zhongguancun collaborative innovation Zhihui Park, intersection of Chongqing Road and Lanzhou Road, Baohe Economic Development Zone, Hefei City, Anhui Province Applicant before: Anhui Guoxin Intelligent Equipment Co.,Ltd. |
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