CN113900289B - Preparation method of light source integrated physical unclonable function device - Google Patents

Preparation method of light source integrated physical unclonable function device Download PDF

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CN113900289B
CN113900289B CN202111211499.7A CN202111211499A CN113900289B CN 113900289 B CN113900289 B CN 113900289B CN 202111211499 A CN202111211499 A CN 202111211499A CN 113900289 B CN113900289 B CN 113900289B
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liquid crystal
sol
light
laser chip
gel layer
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CN113900289A (en
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王文杰
黄锋
袁浚
廖明乐
李倩
康健彬
万永彪
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Institute of Electronic Engineering of CAEP
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • B29D11/0048Moulds for lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133526Lenses, e.g. microlenses or Fresnel lenses

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
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Abstract

The invention discloses a preparation method of a light source integrated physical unclonable function device.A first micro lens is directly arranged at a light outlet of a laser chip, so that laser generated by the laser chip can be directly shaped, and a light spot with a proper size is formed through a propagation gap, so that the area of a liquid crystal box irradiated by the laser can be increased; and finally, generating light rays with physical unclonable properties through a granular disordered medium, thereby manufacturing the light source integrated physical unclonable function device. The laser spot is shaped, so that the alignment requirements of a laser chip and a liquid crystal box can be reduced, the performance and stability of a device are improved, and the miniaturization and integration of a light source are facilitated.

Description

Preparation method of light source integrated physical unclonable function device
Technical Field
The invention relates to the technical field of physical unclonable functions, in particular to a preparation method of a light source integrated physical unclonable function device.
Background
An optical PUF (physical unclonable function) is a PUF which is only proved to have mathematical unclonability so far, and can be combined with a quantum-state excitation response, so that an authentication system has the unclonability of a physical key and the quantum-unclonability of the excitation response at the same time, the absolute security of authentication is ensured physically and technically, and the optical PUF is the most secure PUF form at present. The optical PUF comprises a large number of disordered micro-nano structures, and optical characteristics (such as refractive index and absorption coefficient) of the optical PUF are distributed in a disordered manner along with space change. When incident light (excitation) enters the PUF, due to interaction of scattering, interference, diffraction, absorption and the like of the micro-nano structure, a random speckle pattern with alternate light and shade can be generated, and therefore the response can be achieved. Furthermore, optical PUFs typically have both a transmission response and a reflection response and thus can serve as both quantum authentication and quantum key generators.
However, the currently used optical PUFs are all of a substrate structure, which is bulky, not flexible and convenient to use, and particularly has poor compatibility in integrated microsystems. In practical applications, a stable and reliable integrated PUF for a light source is often needed, so that the integrated PUF can be directly integrated in a microchip system to meet the practical requirement of miniaturization of a quantum authentication system. It is therefore an urgent problem for the skilled person to provide a way to integrate a PUF with a miniaturized light source.
Disclosure of Invention
The invention aims to provide a preparation method of a light source integrated physical unclonable function device, which is beneficial to the small integration of the light source integrated physical unclonable function device.
In order to solve the above technical problem, the present invention provides a method for preparing a light source integrated physical unclonable function device, comprising:
arranging a first micro lens on the surface of a light outlet of the laser chip;
arranging a particle disordered medium on the light emergent side of the liquid crystal box;
arranging a light outlet of a laser chip provided with the first micro lens towards the liquid crystal box, and aligning the light spot shaped by the first micro lens of the laser chip with a preset pixel point in the liquid crystal box;
and bonding the laser chip and the liquid crystal box which are aligned with each other to form a bonding column with preset height between the laser chip and the liquid crystal box, so that a light propagation gap is formed between the first micro lens and the liquid crystal box.
Optionally, the step of disposing the first microlens on the light exit surface of the laser chip includes:
spin-coating a first sol-gel layer on the surface of a light outlet of the laser chip;
pressing a first template on the first sol-gel layer to enable the first sol-gel layer to overflow into a first micro-lens groove arranged on the first template and facing the first sol-gel layer, wherein the shape of the first micro-lens groove corresponds to that of the first micro-lens;
curing the first sol-gel layer after compressing the first template to form the first microlens.
Optionally, the first sol-gel layer is a first sol-gel sensitive layer;
the curing the first sol-gel layer to form the first microlens after the compressing the first template includes:
after compressing the first template, exposing the first photosensitive sol-gel layer to convert the first photosensitive sol-gel layer into a glassy state;
and stripping the first template after exposing the first sol-gel photosensitive layer to form the first micro lens.
Optionally, the height of the bonding column is matched with the focal length of the first microlens.
Optionally, the height of the bond post ranges from 20um to 1000um, inclusive.
Optionally, the setting of the light outlet of the laser chip provided with the first microlens toward the liquid crystal cell, so that the mutual alignment of the light spot shaped by the first microlens of the laser chip and the preset pixel point in the liquid crystal cell includes:
and aligning the first bonding graph arranged on the surface of the laser chip and the second bonding graph arranged on the surface of the liquid crystal box, so that the light spot shaped by the first micro lens of the laser chip and a preset pixel point in the liquid crystal box are aligned with each other.
Optionally, before the first microlens is disposed on the light exit surface of the laser chip, the method further includes:
and cleaning the laser chip.
Optionally, before the particle disordered medium is disposed on the light exit side of the liquid crystal cell, the method further includes:
arranging a second micro lens on the light-emitting side surface of the liquid crystal box;
the step of arranging the particle disordered medium on the light-emitting side of the liquid crystal box comprises the following steps:
and arranging a particle disordered medium covering the second micro lens on the light-emitting side surface of the liquid crystal box.
Optionally, the disposing a second microlens on the light exit side surface of the liquid crystal cell includes:
spin-coating a second sol-gel layer on the light-emitting side surface of the liquid crystal box;
pressing a second template on the second sol-gel layer to enable the second sol-gel layer to overflow into a second micro-lens groove arranged on the second template and facing the second sol-gel layer, wherein the shape of the second micro-lens groove corresponds to that of the second micro-lens;
curing the second sol-gel layer after compressing the second template to form the second microlens.
Optionally, the second sol-gel layer is a second sol-gel photosensitive layer;
after the second template is compacted, exposing the second photosensitive sol-gel layer to convert the second photosensitive sol-gel layer into a glassy state;
and stripping the second template after exposing the second sol-gel photosensitive layer to form the second micro lens.
The invention provides a preparation method of a light source integrated physical unclonable function device, which comprises the steps of arranging a first micro lens on the surface of a light outlet of a laser chip; arranging a particle disordered medium on the light emergent side of the liquid crystal box; arranging a light outlet of a laser chip provided with a first micro lens towards a liquid crystal box, and aligning a light spot of the laser chip shaped by the first micro lens with a preset pixel point in the liquid crystal box; and mutually bonding the laser chip and the liquid crystal box which are mutually aligned to form a bonding column with preset height between the laser chip and the liquid crystal box, so that a light propagation gap is formed between the first micro lens and the liquid crystal box.
The first micro lens is directly arranged at the light outlet of the laser chip, so that the laser generated by the laser chip can be directly shaped, and light spots with the same size are formed through the propagation gap, so that the area of the liquid crystal box irradiated by the laser can be increased; and finally, generating light rays with physical unclonable properties through a granular disordered medium, thereby manufacturing the light source integrated physical unclonable function device. The laser spot is shaped, so that the alignment requirement of a laser chip and a liquid crystal box can be reduced, the performance and stability of a device can be improved, and the miniaturization and integration of a light source can be facilitated.
Drawings
In order to more clearly illustrate the embodiments or technical solutions of the present invention, the drawings used in the embodiments or technical solutions of the present invention will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a flowchart of a method for manufacturing a light source integrated physical unclonable function device according to an embodiment of the present invention;
fig. 2 is a flowchart of a specific method for manufacturing a light source integrated physical unclonable function device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a light source integrated physical unclonable function device manufactured by the method provided in fig. 2.
In the figure: 1. the laser chip comprises a laser chip, 2. A first micro lens, 3. A liquid crystal box, 4. A particle disordered medium, 5. A bonding column and 6. A second micro lens.
Detailed Description
The core of the invention is to provide a preparation method of a light source integrated physical unclonable function device. In the prior art, all currently used optical PUFs are of a substrate structure, are large in size, are not flexible and convenient to use, and are poor in compatibility particularly in integrated microsystems.
The invention provides a preparation method of a light source integrated physical unclonable function device, which comprises the steps of arranging a first micro lens on the surface of a light outlet of a laser chip; arranging a particle disordered medium on the light emergent side of the liquid crystal box; arranging a light outlet of a laser chip provided with a first micro lens towards a liquid crystal box, and aligning light spots of the laser chip shaped by the first micro lens with preset pixel points in the liquid crystal box; and mutually bonding the laser chip and the liquid crystal box which are mutually aligned to form a bonding column with preset height between the laser chip and the liquid crystal box, so that a light propagation gap is formed between the first micro lens and the liquid crystal box.
The first micro lens is directly arranged at the light outlet of the laser chip, so that the laser generated by the laser chip can be directly shaped, and a light spot with a proper size is formed through a propagation gap, so that the area of the liquid crystal box irradiated by the laser can be increased; and finally, generating light rays with physical unclonable property through a granular disordered medium, thereby manufacturing the light source integrated physical unclonable function device. The laser spot is shaped, so that the alignment requirements of a laser chip and a liquid crystal box can be reduced, the performance and stability of a device are improved, and the miniaturization and integration of a light source are facilitated.
In order that those skilled in the art will better understand the disclosure, the invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a flowchart illustrating a method for manufacturing a light source integrated physical unclonable function device according to an embodiment of the present invention.
Referring to fig. 1, in an embodiment of the present invention, a method for manufacturing a light source integrated physical unclonable function device includes:
s101: a first micro lens is arranged on the surface of a light outlet of the laser chip.
In the embodiment of the invention, a laser chip and a liquid crystal box need to be prepared in advance, wherein the laser chip is generally a vertical cavity surface emitting laser chip VCSEL, and the volume of a light source integrated physical unclonable function device can be effectively reduced and the integration level of the light source integrated physical unclonable function device can be increased by using the VCSEL.
In this step, a first microlens is disposed on a surface of the light exit of the laser chip, and the first microlens at least needs to cover a part of the light exit, and usually needs to cover the entire light exit, so that the first microlens can modulate the light emitted from the light exit of the laser chip. Specifically, the first microlens needs to be a convex microlens or a concave microlens, so that the first microlens can shape the light emitted from the light outlet. Generally, the first microlens needs to expand the laser light so that the laser light can be expanded into a beam with a proper size. The detailed process of disposing the first microlens on the light exit surface of the laser chip will be described in detail in the following embodiments of the invention, and will not be described herein again. The specific size range of the first microlens can be referred to in the prior art, and needs to be set according to actual conditions.
S102: and a particle disordered medium is arranged on the light emergent side of the liquid crystal box.
In an embodiment of the present invention, the liquid crystal cell includes an incident side and an emergent side, where the incident side is a side where light enters. In the embodiment of the present invention, the liquid crystal cell may receive an externally output control signal to modulate the phase and polarization of the laser entering the liquid crystal cell, that is, in the embodiment of the present invention, the liquid crystal cell generally needs to be provided with a TFT, that is, a thin film transistor, and a liquid crystal, so that the liquid crystal cell may receive an external control signal through the TFT to control the liquid crystal cell to modulate the phase and polarization of the laser.
Specifically, the liquid crystal box is also required to be provided with two alignment films and liquid crystal positioned between the two alignment films; the liquid crystal cell may further be provided with a polarizer or the like, so that the liquid crystal cell may realize modulation of the phase and polarization of the laser light. In other words, compared with the existing liquid crystal display, the structure of the liquid crystal cell in the embodiment of the present invention needs to remove the backlight and other related structures, and the light source of the liquid crystal cell in the embodiment of the present invention is the laser chip. Further, compared with the existing liquid crystal display, the structure of the liquid crystal box can also remove protective structures such as a cover plate, and other structures are determined according to specific conditions and are not specifically limited herein.
The particle disordered medium is generally specifically a nanoparticle disordered medium in the embodiment of the invention, and disordered particles, generally nano-sized particles, are distributed in the medium layer. The refractive index of the particulate material needs to be different from the refractive index of the continuous phase material, typically a transparent material, in the dielectric layer. The particle disordered medium can be a material with a refractive index higher than that of the transparent medium film, a material with a refractive index lower than that of the transparent medium film, or a mixture of multiple materials with refractive indexes higher and lower than that of the transparent medium film. For example, if the wavelength emitted from the laser chip is at 633nm, if aluminum oxide is used as the transparent dielectric film and the refractive index at 633nm is 1.76, the disordered micro/nano particles can be simultaneously made of zinc oxide with high refractive index and the refractive index at 633nm is 1.99; silicon nitride having a refractive index at 633nm of 2.0, and titanium dioxide having a refractive index at 633nm of 2.6, etc., or silicon dioxide having a low refractive index, having a refractive index at 633nm of 1.46, magnesium fluoride, having a refractive index at 633nm of 1.38, etc., may be used together, or a mixture of materials having high and low refractive indices may be used. The particle size of the disordered micro-nano particles is in the order of the using wavelength, and the particle size of the disordered micro-nano particles is distributed between one tenth wavelength and ten times wavelength. The disordered micro-nano particles are formed by particles in various shapes, and can be spherical, ellipsoidal, cylindrical, cubic, polyhedral, irregular and the like.
In this step, two specific methods for preparing the above-mentioned particle-disordered medium are provided. Firstly, mixing micro-nano particles into curable transparent liquid, stirring and dispersing, growing the micro-nano particles on the light-emitting side surface of a liquid crystal box by spraying and spin coating, and finally curing to form a particle disordered medium; secondly, mixing the micro-nano particles with sol-gel precursor liquid for preparing the transparent medium by adopting a sol-gel method, and growing the mixture on the light-emitting side surface of the liquid crystal box by spraying and spin-coating to obtain the particle disordered medium. Of course, the particle disordered medium may be disposed in other manners in the embodiment of the present invention, and is not limited specifically herein.
It should be noted that, this step and the above-mentioned embodiments of the present invention may be executed in parallel, or any step may be executed first, and is not limited specifically herein, depending on the specific situation.
S103: and arranging a light outlet of the laser chip provided with the first micro lens towards the liquid crystal box, so that the light spot shaped by the first micro lens of the laser chip is aligned with the preset pixel point in the liquid crystal box.
In the embodiment of the present invention, since the laser light emitted from the laser chip is shaped by the first microlens, the alignment accuracy at the time of alignment in this step can be significantly reduced, and only coarse alignment is required.
S104: and mutually bonding the laser chip and the liquid crystal box which are mutually aligned to form a bonding column with preset height between the laser chip and the liquid crystal box, so that a light propagation gap is formed between the first micro lens and the liquid crystal box.
In this step, the laser chip and the liquid crystal cell that are aligned with each other are bonded to each other by forming a bonding column, and the height of the bonding column is the bonding height between the laser chip and the liquid crystal cell. Specifically, in this step, when the laser chip and the liquid crystal cell are bonded, a light propagation gap is reserved between the first microlens and the liquid crystal cell, and the gap is used to enable light emitted from the first microlens to propagate in a space so as to form a light spot of a predetermined size on a light incident side surface of the liquid crystal cell.
In general, in the embodiment of the present invention, the height of the bonding column and the focal length of the first microlens are matched with each other. Namely, the bonding height between the laser chip and the liquid crystal box needs to be matched with the focal length of the first micro lens, so that the appearance of the light spot can be controlled conveniently. Typically, the height of the bond post in embodiments of the invention ranges from 20um to 1000um, inclusive. Namely, the bonding height between the laser chip and the liquid crystal box ranges from 20um to 1000um, including the endpoint value. It should be noted that, by bonding the laser chip and the liquid crystal cell through the bonding column, the distance between the laser chip and the liquid crystal cell can be conveniently adjusted, and only the height of the bonding column needs to be adjusted.
According to the light source integrated physical unclonable function device provided by the embodiment of the invention, the VCSEL laser spot shaped by the first micro lens irradiates the liquid crystal box, and is modulated by the polaroid and the liquid crystal of the liquid crystal box, so that the modulated laser spot is irradiated on a particle disordered medium to form an optical speckle, and the speckle can be particularly collected by an external CCD (charge coupled device). The identity authentication and identification of the PUF can be completed by distinguishing the optical speckle image. If the laser irradiated on the particle disordered medium is diversified, the formed optical speckles are also diversified, because the excitation sources are diversified, the registrable samples are more, the information quantity is large, the safety is high, and the liquid crystal box is used for modulating the phase and the polarization of the laser.
The size of the pixel points in the liquid crystal box can be adjusted, the size of the pixel points can be matched with the optical speckle image received and processed on the CCD, but the pixel points in the liquid crystal box are expected to be small, and therefore laser modulation information is large. The light spot which is irradiated into the liquid crystal cell at the present stage and which can be received by the liquid crystal cell is suitably a circular laser spot having a diameter of 1mm to 5mm, inclusive, the spot diameter preferably being 2mm. Of course, the size of the light spot can be adjusted and matched with the LCD and the CCD. Specifically, the laser spot is too large, the speckle image on the CCD after passing through the particle disordered medium is small, the requirement on the resolution of the CCD is high, and it is difficult to process the speckle image for identity registration and authentication. It is not easy to implement the authentication process with high accuracy. The laser spot is too small, the amplitude and the range of the laser modulated by the liquid crystal box are small, the change of the generated optical speckle is little, the number of registered samples is few, the identity authentication is extremely easy to be simulated and attacked, when the registered samples are stolen, the identity authentication rejection rate cannot be effectively ensured, and the safety is not high. In general, therefore, in embodiments of the invention, the spot of light ultimately applied to the particulate disordered medium is controlled to be between 1mm and 5mm, inclusive, and preferably 2mm in diameter.
The embodiment of the invention provides a preparation method of a light source integrated physical unclonable function device, which comprises the steps of arranging a first micro lens on the surface of a light outlet of a laser chip; arranging a particle disordered medium on the light emergent side of the liquid crystal box; arranging a light outlet of a laser chip provided with a first micro lens towards a liquid crystal box, and aligning a light spot of the laser chip shaped by the first micro lens with a preset pixel point in the liquid crystal box; and mutually bonding the laser chip and the liquid crystal box which are mutually aligned to form a bonding column with preset height between the laser chip and the liquid crystal box, so that a light propagation gap is formed between the first micro lens and the liquid crystal box.
The first micro lens is directly arranged at the light outlet of the laser chip, so that the laser generated by the laser chip can be directly shaped, and light spots with the same size are formed through the propagation gap, so that the area of the liquid crystal box irradiated by the laser can be increased; and finally, generating light rays with physical unclonable property through a granular disordered medium, thereby manufacturing the light source integrated physical unclonable function device. The laser spot is shaped, so that the alignment requirements of a laser chip and a liquid crystal box can be reduced, the performance and stability of a device are improved, and the miniaturization and integration of a light source are facilitated.
The details of the method for manufacturing a light source integrated physical unclonable function device provided by the present invention will be described in detail in the following embodiments of the invention.
Referring to fig. 2 and fig. 3, fig. 2 is a flowchart illustrating a method for manufacturing a physical unclonable function device integrated with a light source according to an embodiment of the present invention; fig. 3 is a schematic structural diagram of a light source integrated physical unclonable function device manufactured by the method provided in fig. 2.
Referring to fig. 2 and fig. 3, in an embodiment of the present invention, a method for manufacturing a light source integrated physical unclonable function device includes:
s201: and cleaning the laser chip.
It should be noted that the laser chip 1 cleaned in this step may specifically be a laser epitaxial wafer that is not dissociated, and correspondingly, after the cleaning in this step, the laser epitaxial wafer may also be dissociated after the first microlens 2 is subsequently prepared, so that the dissociated laser chip 1 and the liquid crystal cell 3 are bonded to each other.
Specifically, the cleaning process in this step may specifically include: sequentially cleaning the laser chip 1 in an acetone solution for 5min by using 20KHz-90KHz ultrasonic waves, cleaning in an isopropanol solution for 5min by using 20KHz-90KHz ultrasonic waves, and cleaning in deionized water for 10min by using 20KHz-90KHz ultrasonic waves, wherein the steps are repeated for 3 times; then, the mixture is blown dry by high-purity nitrogen. Of course, in the embodiment of the present invention, the laser chip 1 may also be cleaned by using other solutions, and both the ultrasonic frequency and the cleaning time used in the cleaning process may be set according to actual situations, which is not specifically limited herein. In the embodiment of the present invention, the light emitting wavelength of the laser chip 1 is generally 600nm to 700nm, inclusive.
S202: and spin-coating a first sol-gel layer on the surface of a light outlet of the laser chip.
In this step, a sol-gel material may be spin-coated on the light exit surface of the laser chip 1, so as to form a first sol-gel layer. At this time, the first sol-gel layer has a certain fluidity and can be molded in its shape.
S203: and pressing the first template on the first sol-gel layer to enable the first sol-gel layer to overflow into a first micro-lens groove arranged on the first template and facing the first sol-gel layer.
In the embodiment of the present invention, the shape of the first microlens groove corresponds to the first microlens 2. In the embodiment of the present invention, a first mold plate may be manufactured in advance, and the shape of the groove in the first mold plate specifically corresponds to the first microlens 2. In this step, the first template is fastened to the first sol-gel layer and compressed, so that the first sol-gel layer overflows into the first microlens recess, which needs to be disposed toward the first sol-gel layer in the first template. The first template may be a template made of PDMS (polydimethylsiloxane). The specific material of the first template may be set according to the actual situation, and is not limited specifically herein.
S204: after the first template is compressed, the first sol-gel layer is cured to form first microlenses.
In this step, the first sol-gel layer pressed with the first template is cured, thereby forming the usable first microlenses 2. Specifically, in the embodiment of the present invention, the first sol-gel layer is a first sol-gel photosensitive layer, that is, the material used for the first sol-gel layer may be a sol-gel photosensitive material, and the sol-gel photosensitive material may be cured by exposure. In the embodiment of the present invention, the sol-gel photosensitive material, i.e., the material of the first sol-gel photosensitive layer, may be HfO 2 With SiO 2 The mixture ratio of the photosensitive mixed sol of the two inorganic components is adjustable. Typical mixed sols use Si: hf = 3: 1 molarThe mixture was stirred vigorously at room temperature for 10 hours. Adding the photosensitizer into the sol in a proportion of 5wt% to obtain HfO with good ultraviolet sensitization performance 2 /SiO 2 A sol material.
In this case, the step may specifically be: after compressing the first template, exposing the first photosensitive sol-gel layer to convert the first photosensitive sol-gel layer into a glassy state; the first template is peeled off after the first sol-gel photosensitive layer is exposed to form the first microlens 2. In this step, the first photosensitive sol-gel layer pressed against the first template is typically exposed by an ultraviolet exposure machine, and the first photosensitive sol-gel layer is polymerized into a glass state, and the exposure time is typically 10min to 60min, inclusive.
After that, the first template needs to be peeled off, thereby obtaining the first microlenses 2. The focal length of the first microlens 2 is typically 20 μm to 1000um, inclusive, and the first microlens 2 is typically required to completely cover the light emitting aperture of the laser chip 1.
In this step, after the first microlenses 2 are disposed on the surface of the laser epitaxial wafer that has not undergone dissociation, the laser epitaxial wafer may be dissociated again in this step, so that the light exit surfaces of the dissociated laser chips 1 are all provided with the corresponding first microlenses 2.
In the embodiment of the present invention, when the light spot transmitted to the liquid crystal cell 3 through the first microlens 2 reaches 1mm to 5mm, no other microlens structure is provided to shape the light in the finally manufactured light source integrated physical unclonable function device. When the light spot irradiated to the liquid crystal cell 3 is smaller than 1mm or larger than 5mm, a second micro lens 6 may be further disposed on the light-emitting side surface of the liquid crystal cell 3, and the second micro lens 6 may be a convex micro lens or a concave micro lens, as the case may be, to further shape the light incident into the granular disordered medium 4. When the second microlenses 6 need to be provided, S205 described below also needs to be performed in the embodiment of the present invention in general. Preferably, the spot diameter is 2mm at the present stage.
S205: and arranging a second micro lens on the light-emitting side surface of the liquid crystal box.
In this step, a second microlens 6 is provided on the light exit side surface of the liquid crystal cell 3, the second microlens 6 serving to further shape the light before it enters the granular disordered medium 4.
Specifically, the step may specifically include:
s2051: and spin-coating a second sol-gel layer on the light emergent side surface of the liquid crystal box.
S2052: and pressing a second template on the second sol-gel layer to enable the second sol-gel layer to overflow into a second micro-lens groove arranged on the second template and facing the second sol-gel layer, wherein the shape of the second micro-lens groove corresponds to that of the second micro-lens.
S2053: curing the second sol-gel layer after compressing the second template to form the second microlens.
The specific contents of S2051 to S2053 may refer to the contents of S202 to S204, and the difference is that the second microlenses 6 are specifically formed on the light-exit side surface of the liquid crystal cell 3 in S2051 to S2053, and the rest of the contents may refer to the above contents, which is not described herein again.
Specifically, in the embodiment of the present invention, the second sol-gel layer may be a second sol-gel photosensitive layer; wherein S2053 may specifically include: after the second template is pressed, exposing the second photosensitive sol-gel layer to convert the second photosensitive sol-gel layer into a glassy state; the second template is peeled off after the exposure of the second sol-gel photosensitive layer to form the second microlens 6. The specific content may also refer to the corresponding content in S204, which is not described herein again. The specific size range of the second microlens can be referred to in the prior art, and needs to be set according to actual conditions.
S206: and arranging a particle disordered medium covering the second micro lens on the light-emitting side surface of the liquid crystal box.
In this step, the second dielectric layer needs to cover the second microlens 6 to ensure that light can enter the particle disordered medium 4 through the second microlens 6. And when the second microlens 6 is not provided, the details of the above S102 may be performed here. The rest of the step is substantially the same as that of S102 in the above embodiment of the present invention, and the details are already described in the above embodiment of the present invention and will not be described herein again.
S207: and aligning the first bonding pattern arranged on the surface of the laser chip and the second bonding pattern arranged on the surface of the liquid crystal box, so that the light spot shaped by the first micro lens of the laser chip and the preset pixel point in the liquid crystal box are aligned with each other.
In the embodiment of the present invention, the surface of the laser chip 1 is provided with a first bonding pattern, and the surface of the liquid crystal cell 3 is provided with a second bonding pattern, and the first bonding pattern and the second bonding pattern generally need to correspond to each other. In this step, the first bonding pattern and the second bonding pattern need to be aligned with each other, so that the light spot shaped by the first microlens 2 of the laser chip 1 and the preset pixel point in the liquid crystal box 3 are aligned with each other. In addition to the second bonding pattern used for bonding the laser chip 1 and the liquid crystal cell 3 to each other in this step, the liquid crystal cell 3 itself needs to be provided with an alignment pattern for alignment of different film layers during manufacturing. The second bonding pattern itself may thus serve as an alignment function when fabricating the liquid crystal cell 3. The specific shapes of the first bonding pattern and the second bonding pattern may be set according to actual situations, and are not limited specifically herein.
Specifically, in the embodiment of the present invention, the size of the pixel point in the liquid crystal cell 3 generally needs to be smaller than 126um × 144um, the second bonding pattern may be specifically located at four corners of the front surface protection film of the liquid crystal cell 3, and the second bonding pattern may be formed by depositing metal on a mask. The second bonding patterns may be disposed on both the front and back sides of the liquid crystal cell 3, so as to facilitate alignment of the film layer when the liquid crystal cell 3 is manufactured.
S208: and mutually bonding the laser chip and the liquid crystal box which are mutually aligned to form a bonding column with preset height between the laser chip and the liquid crystal box, so that a light propagation gap is formed between the first micro lens and the liquid crystal box.
This step is substantially the same as S104 in the above embodiment of the present invention, and the details are already described in the above embodiment of the present invention, and are not described herein again.
It should be noted that, in the methods provided in the embodiments of the present invention, when the size of the light spot needs to be changed and the bonding height needs to be changed, only the height of the bonding post 5 needs to be changed and the size of the groove in the template needs to be adjusted, which is very simple, and meanwhile, the alignment requirement can be reduced, the performance and stability of the device can be improved, and the miniaturization and integration of the light source can be facilitated. The divergence angle of the laser emitted by the laser chip 1 can be adjusted through the first micro lens 2 and the second micro lens 6, the sizes of an incident light spot and an emergent light spot on the liquid crystal box 3 are controlled, and the requirement for diversification of an authentication light source is met. The template is used for manufacturing the micro lens, so that the micro lens manufacturing process is simplified, the manufacturing period is shortened, the production cost is reduced, and the quality of the micro lens is ensured. Due to the fact that the bonding technology with the bonding height matched with the focal length of the micro lens is used in the embodiment of the invention, the integrated chip of various PUFs under different light spot requirements can be realized, and a differentiated customization solution is realized.
According to the preparation method of the light source integrated physical unclonable function device provided by the embodiment of the invention, the first micro lens 2 is directly arranged at the light outlet of the laser chip 1, so that the laser generated by the laser chip 1 can be directly shaped, and a light spot with a proper size is formed through a propagation gap, so that the area of the liquid crystal box 3 irradiated by the laser is obviously increased; and then modulating the laser through a pixel point in a liquid crystal box 3, and finally generating light rays with physical unclonable properties through a granular disordered medium 4 to manufacture a light source integrated physical unclonable function device. The laser spot is shaped, so that the alignment requirements of the laser chip 1 and the liquid crystal box 3 can be reduced, the performance and stability of a device can be improved, and the miniaturization and integration of a light source are facilitated.
In the present specification, the embodiments are described in a progressive manner, and each embodiment focuses on differences from other embodiments, and the same or similar parts between the embodiments are referred to each other.
Those of skill would further appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware, computer software, or combinations of both, and that the various illustrative components and steps have been described above generally in terms of their functionality in order to clearly illustrate this interchangeability of hardware and software. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the implementation. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
The steps of a method or algorithm described in connection with the embodiments disclosed herein may be embodied directly in hardware, in a software module executed by a processor, or in a combination of the two. A software module may reside in Random Access Memory (RAM), memory, read Only Memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art.
Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of another identical element in a process, method, article, or apparatus that comprises the element.
The method for manufacturing the light source integrated physical unclonable function device provided by the invention is described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.

Claims (10)

1. A method for preparing a light source integrated physical unclonable function device is characterized by comprising the following steps:
arranging a first micro lens on the surface of a light outlet of the laser chip;
arranging a particle disordered medium on the light emergent side of the liquid crystal box;
arranging a light outlet of a laser chip provided with the first micro lens towards the liquid crystal box, and aligning a light spot of the laser chip shaped by the first micro lens with a preset pixel point in the liquid crystal box;
and bonding the laser chip and the liquid crystal box which are aligned with each other to form a bonding column with preset height between the laser chip and the liquid crystal box, so that a light propagation gap is formed between the first micro lens and the liquid crystal box.
2. The method of claim 1, wherein disposing the first micro-lens on the light exit surface of the laser chip comprises:
spin-coating a first sol-gel layer on the surface of a light outlet of the laser chip;
pressing a first template on the first sol-gel layer to enable the first sol-gel layer to overflow into a first micro-lens groove arranged on the first template and facing the first sol-gel layer, wherein the shape of the first micro-lens groove corresponds to that of the first micro-lens;
curing the first sol-gel layer after compressing the first template to form the first microlens.
3. The method of claim 2, wherein the first sol-gel layer is a first sol-gel photosensitive layer;
the curing the first sol-gel layer to form the first microlens after the compressing the first template includes:
after compressing the first template, exposing the first photosensitive sol-gel layer to convert the first photosensitive sol-gel layer into a glassy state;
and stripping the first template after exposing the first photosensitive sol-gel layer to form the first micro lens.
4. The method of claim 1, wherein the height of the bonding post and the focal length of the first microlens are matched.
5. The method of claim 4, wherein the height of the bond post ranges from 20um to 1000um, inclusive.
6. The method according to claim 1, wherein the disposing a light outlet of the laser chip provided with the first microlens toward the liquid crystal cell so that a light spot shaped by the first microlens of the laser chip is aligned with a predetermined pixel point in the liquid crystal cell comprises:
and aligning the first bonding graph arranged on the surface of the laser chip and the second bonding graph arranged on the surface of the liquid crystal box, so that the light spot shaped by the first micro lens of the laser chip and a preset pixel point in the liquid crystal box are aligned with each other.
7. The method according to claim 1, wherein before the disposing the first microlens on the light exit surface of the laser chip, the method further comprises:
and cleaning the laser chip.
8. The method according to claim 1, wherein before disposing the particle-disordered medium on the light-exit side of the liquid crystal cell, further comprising:
arranging a second micro lens on the light-emitting side surface of the liquid crystal box;
the step of arranging the particle disordered medium on the light-emitting side of the liquid crystal box comprises the following steps:
and arranging a particle disordered medium covering the second micro lens on the light-emitting side surface of the liquid crystal box.
9. The method of claim 8, wherein providing a second microlens on a light exit side surface of the liquid crystal cell comprises:
spin-coating a second sol-gel layer on the light-emitting side surface of the liquid crystal box;
pressing a second template on the second sol-gel layer to enable the second sol-gel layer to overflow into a second micro-lens groove arranged on the second template and facing the second sol-gel layer, wherein the shape of the second micro-lens groove corresponds to that of the second micro-lens;
curing the second sol-gel layer after compressing the second template to form the second microlens.
10. The method of claim 9, wherein the second sol-gel layer is a second sol-gel sensitive layer;
after the second template is compacted, exposing the second photosensitive sol-gel layer to convert the second photosensitive sol-gel layer into a glassy state;
and stripping the second template after exposing the second photosensitive sol-gel layer to form the second micro lens.
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