CN113900166A - Compensator for high-order aspheric surface detection - Google Patents
Compensator for high-order aspheric surface detection Download PDFInfo
- Publication number
- CN113900166A CN113900166A CN202111020463.0A CN202111020463A CN113900166A CN 113900166 A CN113900166 A CN 113900166A CN 202111020463 A CN202111020463 A CN 202111020463A CN 113900166 A CN113900166 A CN 113900166A
- Authority
- CN
- China
- Prior art keywords
- compensator
- aspheric surface
- lens
- aspheric
- light incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/06—Simple or compound lenses with non-spherical faces with cylindrical or toric faces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/04—Simple or compound lenses with non-spherical faces with continuous faces that are rotationally symmetrical but deviate from a true sphere, e.g. so called "aspheric" lenses
Abstract
The invention relates to a compensator for high-order aspheric surface detection, wherein the main body of the compensator is a single lens, the side surface of the lens is a cylindrical surface, the light incident surface on one side of the lens is a concave polished high-order aspheric surface, the c value expressed by a standard aspheric surface equation of the light incident surface is slightly smaller than the c value expressed by an aspheric surface to be detected, and the aspheric surface degree of the light incident surface is smaller than the aspheric surface to be detected; the optical axis of the high-order polished aspheric surface is in a rotationally symmetric structure, and the light-emitting surface on the other side of the lens is a polished plane vertical to the side surface. The invention has the advantages of easy processing, reducing the number of lenses required by the compensator, saving the cost, avoiding the complex mechanical assembly process of the lens group and shortening the processing period compared with the traditional compensator in the form of the spherical lens group.
Description
Technical Field
The invention relates to the technical field of high-precision aspheric surface shape detection, in particular to a compensator design for high-order aspheric surface detection.
Background
In optical design, the spherical surface can be optimized by only the radius of curvature, while the aspherical surface has conic constants and higher-order coefficient in addition to the vertex radius of curvature. The aspheric surface is adopted in the optical system, so that the effects of correcting aberration, improving the relative caliber of the system, enlarging the view field angle, simplifying the system structure, reducing weight and reducing volume can be achieved. Although aspheric surfaces have excellent optical properties, aspheric surface detection, especially high-precision aspheric surface shape detection, is a problem in the field of optical detection.
The compensation method is the most effective means for aspheric surface profile detection due to its simple structure, large compensation range, small number of elements, easy control, etc. The compensation method usually adopts two or three spherical lens groups to convert spherical waves emitted by the interferometer into aspheric waves matched with an aspheric surface, thereby realizing zero position detection of the aspheric surface. In order to obtain a high-precision aspheric surface shape, high requirements are placed on the machining and assembling precision of the spherical lens group, which results in a long whole design and machining process.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and solve the problems of difficult processing and long processing flow of the matching parts detected by the conventional compensation method.
In order to achieve the above object, a compensator for high-order aspheric surface detection is provided, in which an aspheric surface to be measured of a compensation target is expressed by a standard aspheric equation
The compensator comprises a compensator main body and a compensator, wherein the compensator main body is a single lens, the side surface of the lens is a cylindrical surface, the light incoming surface on one side of the lens is an inwards concave polished high-order aspheric surface, the c value of the light incoming surface expressed by a standard aspheric surface equation is slightly smaller than the c value of the aspheric surface to be detected, and the aspheric surface degree of the light incoming surface is smaller than the aspheric surface to be detected; the optical axis of the high-order polished aspheric surface is in a rotationally symmetric structure, and the light-emitting surface on the other side of the lens is a polished plane vertical to the side surface.
In standard aspherical equations
R is the vertexRadius of curvature, k, is a quadratic constant. The standard aspheric equation for the input surface is expressed as
Where A, B, C, D is a high order aspheric coefficient.
Preferably, the edge of the light incident surface of the lens is provided with a plane step perpendicular to the side surface, and the plane step is arranged around the axis of the lens cylinder in a surrounding manner.
Preferably, the compensator is a fused quartz material, and the compensator is manufactured by adopting an optical cold working process.
Preferably, the aspheric surface to be measured of the compensation target is expressed by a standard aspheric equation
R-250.3, k-0.213; the light incident surface is expressed by a standard aspheric equation
R＝-306.401，A＝-4.5503E-8，B＝1.259E-11，C＝-3.9388E-16，D＝1.1231E-20。
In the process of detecting the light path, the light-emitting surface of the lens is close to the aspheric surface to be detected, and the light-entering surface of the lens is close to the interferometer lens.
Through the arrangement of the light incident surface of the aspheric surface of the optimization compensator, spherical waves emitted from the interferometer are converted into aspheric waves which are matched with the aspheric surface to be detected after passing through the compensator, and therefore detection of the surface type of the aspheric surface to be detected is achieved.
The arrangement of the plane steps can prevent the section of the lens from being broken due to the acute angle in the complex aspheric surface processing process, and the proportion of waste reporting parts is reduced.
The invention has the advantages of easy processing, reducing the number of lenses required by the compensator, saving the cost, avoiding the complex mechanical assembly process of the lens group and shortening the processing period compared with the traditional compensator in the form of the spherical lens group.
Drawings
FIG. 1 is a front lens view of a compensator of the present invention;
FIG. 2 is a right side view of a lens of the compensator of the present invention;
FIG. 3 is a left side lens view of the compensator of the present invention;
FIG. 4 is a cross-sectional view of a lens of the compensator of the present invention;
FIG. 5 is a schematic perspective view of a lens of the compensator of the present invention;
FIG. 6 is a diagram of the detection path of the compensator of the present invention;
wherein:
1-light incident surface 2-light emergent surface 3-side surface
4-plane step 5-aspheric surface to be measured
Detailed Description
The invention is further described below with reference to the following figures and specific examples.
According to a compensator for high-order aspheric surface detection shown in fig. 1 to 5, an aspheric surface 5 to be measured of a compensation target is expressed by a standard aspheric surface equation
R-250.3, k-0.213; the main body of the compensator is a single lens, the side surface 3 of the lens is a cylindrical surface, the light incident surface 1 on one side of the lens is a concave polished high-order aspheric surface, and the light incident surface 1 is expressed by a standard aspheric surface equation
R-306.401, a-4.5503E-8, B-1.259E-11, C-3.9388E-16, D-1.1231E-20. The optical axis of the high-order polished aspheric surface is in a rotationally symmetric structure, and the light emitting surface 2 on the other side of the lens is a polished plane vertical to the side surface 3. The edge of the light incident surface 1 of the lens is provided with a plane step 4 vertical to the side surface 3, and the plane step 4 is arranged around the axis of the lens cylinder in a surrounding manner.
The compensator is made of fused quartz materials and is manufactured by adopting an optical cold machining process.
In the detection light path in the use process of the present embodiment, referring to fig. 6, in the detection light path, the light emitting surface 2 is close to the aspheric surface 5 to be measured, and the light incident surface 1 is close to the interferometer lens.
While the preferred embodiments of the present invention have been described in detail, it will be understood by those skilled in the art that the invention is not limited to the embodiments disclosed, but is capable of numerous equivalents and substitutions, all of which are within the scope of the invention as defined by the appended claims.
Claims (4)
1. A compensator for high-order aspheric surface detection is characterized in that an aspheric surface to be detected of a compensation target is expressed by a standard aspheric surface equation
The compensator is characterized in that the main body of the compensator is a single lens, the side surface of the lens is a cylindrical surface, the light incident surface on one side of the lens is an inwards concave polished high-order aspheric surface, the c value of the light incident surface expressed by a standard aspheric surface equation is slightly smaller than the c value of the aspheric surface to be measured, and the aspheric surface degree of the light incident surface is smaller than the aspheric surface to be measured; the optical axis of the high-order polished aspheric surface is in a rotationally symmetric structure, and the light-emitting surface on the other side of the lens is a polished plane vertical to the side surface.
2. The compensator of claim 1, wherein the edge of the light incident surface of the lens is provided with a plane step perpendicular to the side surface, and the plane step is arranged around the axis of the lens cylinder.
3. The compensator of claim 1, wherein the compensator is a fused quartz material and the compensator is made using an optical cold working process.
4. The compensator of claim 1, wherein the aspheric surface to be measured of the compensation target is expressed by a standard aspheric equation
R-250.3, k-0.213; the light incident surface is expressed by a standard aspheric equation
R＝-306.401，A＝-4.5503E-8，B＝1.259E-11，C＝-3.9388E-16，D＝1.1231E-20。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111020463.0A CN113900166A (en) | 2021-09-01 | 2021-09-01 | Compensator for high-order aspheric surface detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111020463.0A CN113900166A (en) | 2021-09-01 | 2021-09-01 | Compensator for high-order aspheric surface detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113900166A true CN113900166A (en) | 2022-01-07 |
Family
ID=79188281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111020463.0A Pending CN113900166A (en) | 2021-09-01 | 2021-09-01 | Compensator for high-order aspheric surface detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113900166A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050083537A1 (en) * | 2003-10-20 | 2005-04-21 | Michael Kuchel | Reconfigurable interferometer system |
| CN105445931A (en) * | 2015-12-21 | 2016-03-30 | 中国科学院长春光学精密机械与物理研究所 | Compensator optical system used for ultrahigh precision concave aspheric detection |
| CN106052583A (en) * | 2016-05-24 | 2016-10-26 | 中国人民解放军国防科学技术大学 | Aspheric surface shape interference measuring method and device based on variable compensation lens |
| CN106871819A (en) * | 2017-01-12 | 2017-06-20 | 北京理工大学 | Aspherical vertex curvature radius error measurement method based on the optimal compensation position |
| CN107443201A (en) * | 2017-08-01 | 2017-12-08 | 上海现代先进超精密制造中心有限公司 | A kind of fast and convenient automatic grinding aspherical frock and method |
-
2021
- 2021-09-01 CN CN202111020463.0A patent/CN113900166A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050083537A1 (en) * | 2003-10-20 | 2005-04-21 | Michael Kuchel | Reconfigurable interferometer system |
| CN105445931A (en) * | 2015-12-21 | 2016-03-30 | 中国科学院长春光学精密机械与物理研究所 | Compensator optical system used for ultrahigh precision concave aspheric detection |
| CN106052583A (en) * | 2016-05-24 | 2016-10-26 | 中国人民解放军国防科学技术大学 | Aspheric surface shape interference measuring method and device based on variable compensation lens |
| CN106871819A (en) * | 2017-01-12 | 2017-06-20 | 北京理工大学 | Aspherical vertex curvature radius error measurement method based on the optimal compensation position |
| CN107443201A (en) * | 2017-08-01 | 2017-12-08 | 上海现代先进超精密制造中心有限公司 | A kind of fast and convenient automatic grinding aspherical frock and method |
Non-Patent Citations (2)
| Title |
|---|
| 卢劲丰: "光学面形误差的可变补偿检测技术", 《中国优秀博硕士学位论文全文数据库(硕士) 工程科技Ⅱ辑》 * |
| 李景镇 主编: "《光学手册 下》", 31 July 2010 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104035188A (en) | Low-cost refracting-reflecting athermalizing medium wave infrared lens | |
| CN105445918A (en) | Free-form surface off-axis three-mirror optical system | |
| CN109253864B (en) | Optical system for detecting ultra-large caliber convex hyperboloid reflector | |
| CN102590988B (en) | Compensator camera lens for aspheric surface detection | |
| CN115598818B (en) | Industrial detection dry microscope objective | |
| CN105676430A (en) | Star sensor optical imaging system | |
| CN105278089A (en) | Coaxial three-mirror optical system | |
| CN113739719B (en) | Surface shape detection system and method of high-precision Schmidt correction plate | |
| CN106199935A (en) | Zoom lens | |
| CN102621683A (en) | Improved reflective/diffractive hybrid wide field Cassegrain telescope | |
| CN104048596B (en) | Compensator and the compensator control method coaxial with interferometer | |
| CN107462978B (en) | Large-view-field high-resolution objective lens | |
| CN113900166A (en) | Compensator for high-order aspheric surface detection | |
| CN108873305B (en) | Design method of large-field-of-view two-trans Golay3 sparse aperture telescope | |
| CN115166952B (en) | Uncooled long-wave infrared continuous zoom lens | |
| CN207571372U (en) | Monitoring camera | |
| CN110515185A (en) | A kind of large aperture fixed-focus optical system | |
| CN104501805B (en) | Object lens of large relative aperture catadioptric emitting optical system of star sensor in high precision | |
| CN211236419U (en) | Optical lens | |
| CN110262023B (en) | Quadruple continuous zooming 4K high-definition optical system | |
| CN109471244B (en) | Large-view-field double-telecentric lens based on machine vision | |
| CN209606697U (en) | A kind of long wave uncooled ir camera lens | |
| Guo et al. | Design and certification of a null corrector to test hyperboloid convex mirror | |
| CN107402435B (en) | Fixed-focus infrared lens for all-weather auxiliary driving | |
| CN110703433A (en) | Method for calculating closest comparative spherical curvature radius of annular aperture quadric |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |