CN107462978B - Large-view-field high-resolution objective lens - Google Patents
Large-view-field high-resolution objective lens Download PDFInfo
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- CN107462978B CN107462978B CN201710878584.6A CN201710878584A CN107462978B CN 107462978 B CN107462978 B CN 107462978B CN 201710878584 A CN201710878584 A CN 201710878584A CN 107462978 B CN107462978 B CN 107462978B
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- G—PHYSICS
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- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
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Abstract
The invention discloses a large-field-of-view high-resolution objective lens which is used for imaging a graph in an object plane into an image plane, and sequentially comprises a first lens group and a second lens group from one side of the object plane to one side of the image plane along the optical axis direction of the object plane. The first lens group and the second lens group both have positive focal power, the first lens group is a catadioptric lens group with at least 2 refraction surfaces and at least 2 reflection surfaces, and the central parts of at least 2 reflection surfaces of the catadioptric lens group have no reflection characteristic and can allow light rays to pass through. Light rays emitted by the object plane form an intermediate image after passing through the first lens group, the intermediate image is imaged to the image plane after passing through the second lens group, and the relation is satisfied: 1.2 < | Rm |/f1 < 2.8, wherein f1 is the combined focal length of the first lens group; rm is the radius of curvature of the reflecting surface with the smallest radius of curvature among all the reflecting surfaces of the first lens group. The invention can effectively correct various aberrations of a large-caliber system, especially high-grade spherical aberration.
Description
Technical Field
The invention relates to a wide-spectrum large-field high-resolution objective lens, in particular to a large-field high-resolution objective lens with wide spectrum and high magnification and a corresponding optical device, wherein the large-field high-resolution objective lens is used in a deep ultraviolet wavelength range of 200nm to 350 nm.
Background
As the integration density of semiconductor chips and devices increases, the inspection optical system thereof is required to have high resolution in order to detect more precise details. In order to improve the resolution of the inspection optical system, the optical system is required to use illumination light of a shorter wavelength; a larger numerical aperture of the detection objective is required. In the ultraviolet wavelength region, especially the deep ultraviolet wavelength region of 200nm to 350nm, the absorption of the common optical material is very large, and the light transmittance is very low. As the numerical aperture increases, it is also difficult to correct aberrations using only a refractive optical system.
With the development of detection technology, the requirements and the demands of high-resolution large-field optical detection are increasingly enhanced. Meanwhile, the design and manufacture of the objective lens with wide spectrum, high resolution and large field performance are very difficult, and few cases exist at present.
Disclosure of Invention
The invention provides a large-field high-resolution objective lens for effectively correcting various aberrations of a large-aperture system, and the structure of the invention can effectively correct various aberrations of the large-aperture system, especially high-level spherical aberration.
The invention is realized by adopting the following technical scheme: the objective lens with the large field of view and the high resolution is used for imaging a graph in an object plane into an image plane, and sequentially comprises a first lens group and a second lens group from one side of the object plane to one side of the image plane along the direction of an optical axis of the objective lens; the first lens group and the second lens group both have positive focal power, the first lens group is a catadioptric lens group with at least 2 refraction surfaces and at least 2 reflection surfaces, and the central parts of at least 2 reflection surfaces of the catadioptric lens group have no reflection characteristic and can allow light rays to pass through; light rays emitted by the object plane form an intermediate image after passing through the first lens group, the intermediate image is imaged to the image plane after passing through the second lens group, and the relation is satisfied:
1.2 < | Rm |/f1 < 2.8 formula (1)
Wherein f1 is the combined focal length of the first lens group; rm is the radius of curvature of the reflecting surface with the smallest radius of curvature among all the reflecting surfaces of the first lens group.
This configuration can effectively correct various aberrations of a large aperture system, especially high order spherical aberration. The power of the first lens group is mainly provided by the reflecting surface with the smallest radius of curvature, and the other refracting and reflecting surfaces have the functions of correcting various aberrations of the system, and if the power of the first lens group is beyond the range, the problems of excessive or insufficient correction can occur when various aberrations are corrected.
As a further improvement of the above solution, there are at least 1 refractive lens distributed among 2 reflective surfaces in the first lens group, and light emitted from the object plane passes through the at least 1 refractive lens 3 times in the first lens group after passing through the first lens group and before forming an intermediate image; an element closest to the object plane on a surface on a side close to the object plane, the central portion having a transmission refractive property, the peripheral portion having a reflection property, and the central portion and the peripheral portion having the same radius of curvature and satisfying a relation:
R1/Rm > 3 type (2)
Where R1 is the element closest to the object plane, the radius of curvature of the surface on the side closest to the object plane.
The peripheral part of the surface close to the object plane has structurally an important function of changing the direction of the light, which is not expected to bring about excessive aberrations, or to reduce the working distance, so that this effect can be achieved with a surface having a larger radius of curvature.
As a further improvement of the above scheme, the second lens group does not include a non-planar reflecting surface, and when the intermediate image passes through the second lens group and is imaged again to an image plane at infinity, the relationship is satisfied:
0.25 < f1/f2 < 1.5 formula (3)
0.25 < D2/D1 < 1.2 formula (4)
Wherein f2 is the combined focal length of the second lens group;
d2 is the maximum clear aperture of the second lens group;
d1 is the maximum clear aperture of the first lens group.
The combined structure of the first lens group and the second lens group needs to effectively correct various aberrations of the system, so that the final image surface is close to an ideal image surface. The first lens group and the second lens group can correct various aberrations of the system to the maximum extent only under the conditions of the focal length combination and the maximum clear aperture combination, so that the final image surface is close to the ideal image surface.
As a further improvement of the above solution, the intermediate image satisfies the relation:
1.2 < | β 1| < 3.5 formula (5)
Wherein β 1 is the magnification of the first lens group.
Under the condition of large aperture, when the magnification of the first lens group is in the range, the residual various aberrations, especially high-order spherical aberration, of the first lens group are proper. The second lens group does not comprise a non-planar reflecting surface and consists of refractive lenses, and can well correct various residual aberrations, especially high-order spherical aberration, of the first lens group.
As a further improvement of the above solution, the intermediate image satisfies the relation:
| WD1/Rm | < 0.3 formula (6)
WD1 is the distance between the intermediate image and the reflecting surface of the first lens group with radius of curvature Rm.
Under the condition of large aperture, | WD1/Rm | affects the clear aperture of the reflective surface with radius of curvature Rm in the first lens group, and too large decreases the clear aperture of the reflective surface with radius of curvature Rm, which not only decreases the resolution of the optical system, but also decreases the brightness of the optical system.
As a further improvement of the above solution, all lenses are made of the same material.
As a further improvement of the above scheme, all the lenses are made of quartz or calcium fluoride crystal.
In the ultraviolet wavelength region, especially the deep ultraviolet wavelength region of 200nm to 350nm, the absorption of the common optical material is very large, the light transmittance is very low, and the light transmittance of the optical system can be improved by using quartz glass or calcium fluoride crystals. With the increase of the numerical aperture, the lens structure can effectively correct various optical aberrations of the system.
As a further improvement of the above, the surfaces of all the lenses do not include an aspherical surface.
The lens has small caliber and does not contain an aspheric lens, thereby greatly reducing the difficulty and cost of processing, detection and installation and correction.
As a further improvement of the above scheme, the central parts of all the refractive lenses in the catadioptric group are free of light-passing holes.
The light-transmitting hole is not required to be processed in the central part of the lens by adopting a refraction and reflection structure, so that the difficulty and cost of processing, detection, assembly and calibration are greatly reduced.
As a further improvement of the above, the reflection surface has a reflection characteristic formed by adding a thin film having a reflection function to the lens surface.
Drawings
Fig. 1 is a schematic structural diagram of a large-field high-resolution objective lens according to a preferred embodiment of the present invention.
Fig. 2 is a graph of the transfer function MTF of the optical system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention aims to provide a large-field high-resolution objective lens in an ultraviolet wavelength region, particularly a deep ultraviolet wavelength region of 200nm to 350nm, only uses limited types of optical materials, adopts a refraction and reflection structure and does not need to process a light-passing hole in the central part of the lens, thereby achieving the effect of well correcting various aberrations of an optical system. The structure is simple, the number of optical devices is small, and the difficulty and the cost of processing, testing and assembling and correcting the lens are reduced.
The large-field high-resolution objective lens is used for imaging a graph in an object plane O into an image plane I, and sequentially comprises a first lens group G1 and a second lens group G2 along the optical axis direction from the object plane O side to the image plane I side.
The first lens group G1 and the second lens group G2 both have positive focal power, the first lens group G1 is a catadioptric lens group having at least 2 refractive surfaces and at least 2 reflective surfaces, and the central portions of the at least 2 reflective surfaces of the catadioptric lens group have no reflective properties and allow light to pass through. The light emitted by the object plane O passes through the first lens group G1 to form an intermediate image M, the intermediate image M passes through the second lens group G2 to be imaged on the image plane I, and the relation is satisfied:
1.2 < | Rm |/f1 < 2.8 formula (1)
Wherein f1 is the combined focal length of the first lens group G1;
rm is the radius of curvature of the smallest radius of curvature of all the reflective surfaces in the first lens group G1.
This configuration can effectively correct various aberrations of a large aperture system, especially high order spherical aberration. The power of the first lens group is mainly provided by the reflecting surface with the smallest radius of curvature, and the other refracting and reflecting surfaces have the functions of correcting various aberrations of the system, and if the power of the first lens group is beyond the range, the problems of excessive or insufficient correction can occur when various aberrations are corrected.
Referring to fig. 1, taking the objective lens structure shown in fig. 1 as an example, the first lens group G1 includes two lenses and two mirrors, and the second lens group G2 includes 6 lenses.
Parameter values of the objective lens:
NA＝0.9；
object space field diameter: 1.2 mm;
wavelength: 330 nm.
NA is the numerical aperture of the object.
At least 1 refractive lens distributed among 2 reflective surfaces of the first lens group G1 is present, and light emitted from the object plane O passes through the first lens group G1 and then passes through the at least 1 refractive lens 3 times in the first lens group G1 before forming the intermediate image M.
An element closest to the object plane O on a surface on a side close to the object plane O, the central portion having a transmission refractive property, the peripheral portion having a reflection property, and the central portion and the peripheral portion having the same radius of curvature and satisfying a relation:
R1/Rm > 3 type (2)
Where R1 is the element closest to the object plane O, the radius of curvature of the surface on the side closest to the object plane O.
The peripheral part of the surface close to the object plane O has a reflective property and has an important function of changing the direction of the light rays structurally at the same time. This effect can be achieved by using a surface with a larger radius of curvature, since it is not desirable to introduce excessive aberrations, or to reduce the working distance.
The optical parameters of the elements of the two mirror groups are shown in table 1.
TABLE 1
| Surface of | Radius of | Thickness/spacing | Material | Light-transmitting caliber |
| [mm] | [mm] | [mm] | ||
| (noodle) | ∞ | 0.658 | 1.2 | |
| (1) | ∞ | 8.304219 | SILICA | 3.9 |
| (2) | -100.4465 | 3.85824 | 16.2 | |
| (3) | -119.6492 | 6.622884 | SILICA | 27.2 |
| (4) | -382.5189 | 20.02554 | 38.2 | |
| (5) | -46.43246 | -20.02554 | MIRROR | 65.3 |
| (6) | -382.5189 | -6.622884 | SILICA | 57.5 |
| (7) | -119.6492 | -3.85824 | 51.6 | |
| (8) | -100.4465 | -8.304219 | SILICA | 48.3 |
| (9) | ∞ | 8.304219 | MIRROR | 44.5 |
| (10) | -100.4465 | 3.85824 | 40.2 | |
| (11) | -119.6492 | 6.622884 | SILICA | 33.1 |
| (12) | -382.5189 | 20.02554 | 27.4 | |
| (13) | ∞ | 0.02 | 1.5 | |
| (intermediate image) | ∞ | 7.737298 | 1.5 | |
| (15) | -1701.837 | 3.051645 | SILICA | 12.1 |
| (16) | -25.1197 | 1.87192 | 13.8 | |
| (17) | 82.15039 | 4 | SILICA | 16.9 |
| (18) | -48.60268 | 2.899619 | 18.4 | |
| (19) | 41.34442 | 5 | SILICA | 21.5 |
| (20) | -645.4405 | 33.1677 | 22.2 | |
| (21) | -135.6802 | 6 | SILICA | 32.2 |
| (22) | -34.69112 | 0.2 | 33.2 | |
| (23) | 234.2426 | 4 | SILICA | 32.6 |
| (24) | 42.85436 | 4.5 | 33.0 | |
| (25) | 424.1275 | 6 | SILICA | 33.6 |
| (26) | -66.94973 | ∞ | 34.3 | |
| (image plane) | ∞ |
The characteristic parameters are shown in table 2.
TABLE 2
| f1 | 24.8 |
| f2 | 32.2 |
| R1 | ∞ |
| Rm | -46.43 |
| D1 | 65.3 |
| D2 | 33.0 |
| β1 | -1.78 |
| WD1 | 0.02 |
The calculated values of the relational expressions are shown in table 3, respectively.
TABLE 3
| (1) | |Rm|/f1 | 1.87 |
| (2) | |R1/Rm| | ∞ |
| (3) | f1/f2 | 0.77 |
| (4) | D2/D1 | 0.51 |
| (5) | |β1| | 1.78 |
| (6) | |WD1/Rm| | 0.00043 |
The first lens group G1 satisfies the relation:
1.2 < | Rm |/f1 < 2.8 formula (1)
Wherein f1 is the combined focal length of the first lens group G1; rm is the radius of curvature of the smallest radius of curvature of all the reflective surfaces in the first lens group G1.
R1/Rm > 3 type (2)
Where R1 is the element closest to the object plane O, the radius of curvature of the surface on the side closest to the object plane O.
The second lens group G2 does not include a non-planar reflective surface, and when the intermediate image M passes through the second lens group G2 and is imaged again on the image plane I at infinity, the relationship is satisfied:
0.25 < fl/f2 < 1.5 formula (3)
0.25 < D2/D1 < 1.2 formula (4)
Wherein f2 is the combined focal length of the second lens group G2;
d2 is the maximum clear aperture of the second lens group G2;
d1 is the maximum clear aperture of the first lens group G1.
The combined structure of the first lens group G1 and the second lens group G2 needs to effectively correct various aberrations of the system so that the final image plane I approaches the ideal image plane. The first lens group G1 and the second lens group G2 can maximally correct various aberrations of the system only under the combination of the focal length and the maximum clear aperture, so that the final image plane I approaches the ideal image plane.
The intermediate image satisfies the relation:
1.2 < | β 1| < 3.5 formula (5)
WD1/Rm | < 0.3 formula (6)
Wherein β 1 is the magnification of the first lens group G1;
WD1 is the distance between the intermediate image and the reflecting surface of the first mirror group G1 with radius of curvature Rm.
Under the condition of large aperture, the magnification of the first lens group G1 is in this range, and the residual various aberrations, especially high-order spherical aberration, of the first lens group G1 are relatively moderate. The second lens group G2 does not include a non-planar reflecting surface, and is composed of refractive lenses, and can correct various residual aberrations, especially high-order spherical aberration, of the first lens group G1 well. If | WD1/Rm | affects the clear aperture of the Rm reflective surface in the first lens group G1, the clear aperture of the Rm reflective surface will be reduced too much, which not only reduces the resolution of the optical system, but also reduces the brightness of the optical system.
In the MTF graph of the optical system of fig. 2, the horizontal axis represents the resolution in units of line pairs/mm (1p/mm), two lines one black and one white are a line pair, and the number of line pairs that can be resolved per mm is the value of the resolution. The vertical axis represents the modulation Transfer function (mtf), which is a quantitative description of the resolution of the lens.
The curves in fig. 2 show that the MTF values for a representative 0.5 field, 0.75 field and maximum field are already very close to the diffraction limit. The diffraction limit means that when an ideal object point is imaged by an optical system, due to the limitation of diffraction of light of physical optics, an ideal image point cannot be obtained, but a fraunhofer diffraction image is obtained, and the diffraction image is the diffraction limit, namely the maximum value, of the physical optics.
It can be seen that the present invention can approach the diffraction limit of physical optics over the entire field of view.
The results of the analysis by the professional optical design software show that the wave aberration wfe (rms) over the entire field of view is less than 0.035 wavelengths.
All the lenses can be made of the same material, for example, all the lenses are made of one of quartz or calcium fluoride crystals; or is made of two materials of quartz and calcium fluoride crystal. In the ultraviolet wavelength region, especially the deep ultraviolet wavelength region of 200nm to 350nm, the absorption of the common optical material is very large, the light transmittance is very low, and the light transmittance of the optical system can be improved by using quartz glass or calcium fluoride crystals. With the increase of the numerical aperture, the lens structure can effectively correct various optical aberrations of the system.
The surfaces of all the lenses do not comprise aspheric surfaces, so that the difficulty and cost of processing, detection and assembly and calibration can be greatly reduced.
The central parts of all the refracting lenses in the catadioptric group are not provided with light through holes. The light-transmitting hole is not required to be processed in the central part of the lens by adopting a refraction and reflection structure, so that the difficulty and cost of processing, detection, assembly and calibration are greatly reduced.
The reflecting surface has reflecting characteristic formed by adding a film with reflecting function on the surface of the lens, so that the system has simple and compact structure and is easy to process and assemble and correct.
In summary, the present invention only uses limited kinds of optical materials in the ultraviolet wavelength region, especially in the deep ultraviolet wavelength region of 200nm to 350nm, so as to achieve the effect of well correcting various aberrations of the optical system, and at the same time, the present invention has high resolution and large field of view characteristics, and there are few cases. Meanwhile, the lens has a small caliber, does not comprise an aspheric lens, adopts a refraction and reflection structure, does not need to process a light-passing hole in the central part of the lens, and greatly reduces the difficulty and cost of processing, detection, assembly and calibration.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A large-field high-resolution objective lens for imaging a pattern in an object plane into an image plane, the large-field high-resolution objective lens comprising, in order in an optical axis direction thereof from an object plane side to an image plane side, a first lens group (G1), a second lens group (G2); the method is characterized in that:
the first lens group (G1) and the second lens group (G2) both have positive focal power, the first lens group (G1) is a catadioptric lens group with at least 2 refraction surfaces and at least 2 reflection surfaces, and the central parts of at least 2 reflection surfaces of the catadioptric lens group have no reflection characteristics and can allow light rays to pass through;
light rays emitted by the object plane form an intermediate image after passing through the first lens group (G1), the intermediate image is imaged to the image plane after passing through the second lens group (G2), and the relation is satisfied:
1.2 < | Rm |/f1 < 2.8 formula (1)
Wherein f1 is the combined focal length of the first lens group (G1); rm is the radius of curvature of the reflecting surface with the smallest radius of curvature among all the reflecting surfaces in the first lens group (G1).
2. The large-field high-resolution objective lens of claim 1, wherein: at least 1 refractive lens distributed among 2 reflecting surfaces is arranged in the first lens group (G1), and light rays emitted by an object plane pass through the first lens group (G1) and pass through the at least 1 refractive lens 3 times in the first lens group (G1) before an intermediate image is formed;
an element closest to the object plane on a surface on a side close to the object plane, the central portion having a transmission refractive property, the peripheral portion having a reflection property, and the central portion and the peripheral portion having the same radius of curvature and satisfying a relation:
| R1/Rm | ═ infinity formula (2)
Where R1 is the element closest to the object plane, the radius of curvature of the surface on the side closest to the object plane.
3. The large-field high-resolution objective lens of claim 1 or 2, wherein: the second lens group (G2) does not include a non-planar reflecting surface, and when the intermediate image passes through the second lens group (G2) and is imaged again to an image plane at infinity, the relationship is satisfied:
0.25 < f1/f2 < 1.5 formula (3)
0.25 < D2/D1 < 1.2 formula (4)
Wherein f2 is the combined focal length of the second lens group (G2);
d2 is the maximum clear aperture of the second lens group (G2);
d1 is the maximum clear aperture of the first lens group (G1).
4. The large-field high-resolution objective lens of claim 1 or 2, wherein: the intermediate image satisfies the relation:
1.2 < | β 1| < 3.5 formula (5)
Wherein β 1 is the magnification of the first lens group (G1).
5. The large-field high-resolution objective lens of claim 1 or 2, wherein: the intermediate image satisfies the relation:
| WD1/Rm | < 0.3 formula (6)
WD1 is the distance between the intermediate image and the reflecting surface with radius of curvature Rm in the first lens group (G1).
6. The large-field high-resolution objective lens of claim 1 or 2, wherein: all lenses are made of the same material.
7. The large-field high-resolution objective lens of claim 1 or 2, wherein: all the lenses are made of quartz or calcium fluoride crystal; or is made of two materials of quartz and calcium fluoride crystal.
8. The large-field high-resolution objective lens of claim 1 or 2, wherein: the surfaces of all lenses do not contain aspherical surfaces.
9. The large-field high-resolution objective lens of claim 1 or 2, wherein: the central parts of all the refracting lenses in the catadioptric group are not provided with light through holes.
10. The large-field high-resolution objective lens of claim 1 or 2, wherein: the reflection surface has a reflection characteristic formed by adding a thin film having a reflection function to the surface of the lens.
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|---|---|---|---|---|
| CN110824669B (en) * | 2019-11-25 | 2021-11-09 | 杭州环峻科技有限公司 | 8K high-resolution panoramic annular optical lens |
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