CN113877352B

CN113877352B - Dust filter and system thereof

Info

Publication number: CN113877352B
Application number: CN202111332118.0A
Authority: CN
Inventors: 沈文武; 周贤忠
Original assignee: Sichuan Leicester Vacuum Technology Co ltd
Current assignee: Sichuan Leicester Vacuum Technology Co ltd
Priority date: 2021-11-11
Filing date: 2021-11-11
Publication date: 2023-06-02
Anticipated expiration: 2041-11-11
Also published as: CN113877352A

Abstract

The embodiment of the invention provides a dust filter and a system thereof, and relates to the technical field of dust filtration. The dust filter comprises an upper cavity, turbine blades, a water filter, a lower cavity and an air outlet channel, wherein the upper cavity is provided with an air inlet; the turbine blades are arranged in the air inlet and coaxially arranged with the air inlet, and are used for guiding the air entering the air inlet to the inner wall of the upper cavity; the water filter is arranged on the inner wall of the upper cavity and is used for filtering water in the gas; the lower cavity is detachably connected with the upper cavity; the air outlet channel is arranged in the middle of the lower cavity and communicated with the outside, the upper end of the air outlet channel is provided with an air outlet inlet, the air outlet inlet is provided with a filtering component, and the side wall of the air outlet channel and the outer wall of the lower cavity enclose a dust collecting cavity. The dust filter and the system thereof can efficiently and thoroughly filter moisture and dust in gas and prevent the dust from adhering to the filter assembly.

Description

Dust filter and system thereof

Technical Field

The invention relates to the technical field of dust filtration, in particular to a dust filter and a system thereof.

Background

With the rise of industries such as photovoltaics, semiconductors, pharmacy and the like, a large amount of dust particles can be generated in various manufacturing processes, and the dust is a main cause for the failure and maintenance of a vacuum pump, and also pollutes the environment and is harmful to health. In order to avoid such a situation, a device for filtering dust is generally required to be connected to the vacuum pump to prevent dust from entering the vacuum pump, but the filtering equipment in the current market still cannot perform filtering well, and part of tiny dust still flows out after filtering.

Disclosure of Invention

The invention aims to provide a dust filter and a system thereof, which can efficiently and thoroughly filter moisture and dust in gas and prevent dust from adhering to a filter assembly.

Embodiments of the invention may be implemented as follows:

in a first aspect, the present invention provides a dust filter comprising:

the upper cavity is provided with an air inlet;

the turbine blade is arranged in the air inlet and coaxially arranged with the air inlet, and is used for guiding the air entering the air inlet to the inner wall of the upper cavity;

the water filter is arranged on the inner wall of the upper cavity and is used for filtering moisture in the gas;

the lower cavity is detachably connected with the upper cavity;

the air outlet channel is arranged in the middle of the lower cavity and communicated with the outside, the upper end of the air outlet channel is provided with an air outlet inlet, the air outlet inlet is provided with a filtering component, and the side wall of the air outlet channel and the outer wall of the lower cavity enclose a dust collecting cavity.

The dust filter provided in this embodiment at least includes the following technical effects:

1. the turbine blades can guide the gas entering the gas inlet to the inner wall of the upper cavity, so that moisture in the gas is thoroughly filtered by the water filter, and dust is prevented from adhering to the filtering component;

2. dust in the gas can be guided to the dust collecting cavity through the turbine blade, and the dust is beneficial to being concentrated into the dust collecting cavity under the self gravity and the filtering action of the filtering component, so that the dust collecting efficiency is improved;

3. the dust collection cavity and the filter component are both positioned on the lower cavity, the lower cavity is detachably connected with the upper cavity, the lower cavity is convenient to detach, the dust collection cavity is cleaned, and the filter component is also convenient to detach for cleaning or replacement.

In an alternative embodiment, the dust filter further comprises:

and the motor is arranged in the air inlet and connected with the turbine blade.

Like this, set up motor drive turbine blade, be favorable to improving the flow rate of gas to turbine blade drives gas rotation, and gas can reach the inner wall of last cavity completely under the effect of centrifugal force, makes gas pass through the filtration of water purifier completely, and the dust in the gas also reaches the top of dust collection chamber completely.

In an alternative embodiment, the dust filter further comprises:

the support is arranged in the air inlet, the motor is arranged on the support, and the motor is connected with the turbine blade through the transmission shaft.

In an alternative embodiment, the dust filter further comprises:

the sealing cover is covered on the motor and is connected with the bracket.

In this way, the sealing cover can prevent the motor from contacting with the gas, and prevent the motor from contacting with impurities in the gas, in particular from contacting with corrosive substances.

In an alternative embodiment, a turbine blade includes:

the guide base is in a horn shape, and the outer surface of the guide base is used for guiding gas to the inner wall of the upper cavity;

and the guide piece is connected to the outer surface of the guide base and is used for driving the gas to spirally descend.

Therefore, the turbine blade has a simple structural form, has a better guiding effect on the gas, can flow in the direction of the inner wall of the upper cavity, and flows downwards under the action of self gravity.

In an alternative embodiment, the plurality of water filters are installed at intervals uniformly on the inner wall of the upper chamber, and the filters are perpendicular to the inner wall of the upper chamber.

Like this, a plurality of water filters can guarantee the filter effect to moisture, and gas is the spiral downwardly directed removal on the inner wall of last cavity, and the whole filtration surface of the filter of perpendicular setting all can be used for filtering the moisture in the gas, and filtration efficiency is higher.

In an alternative embodiment, a plurality of air outlet inlets are uniformly formed along the outer peripheral surface of the air outlet channel at intervals, and the filter assembly is annular, is sleeved on the outer peripheral surface of the air outlet channel and shields the air outlet inlets.

In this way, the total area of the air outlet inlet is large, and the air outlet is completely covered by the filter assembly, so that the condition that the flowing air does not pass through the filter assembly does not exist, and particularly, the surface area of the filter assembly can be designed to be large, and the filter efficiency is improved.

In an alternative embodiment, a through hole is formed in the outer wall of the lower cavity, and observation glass is installed in the through hole.

Like this, through observing glass, make the user can look over the collection volume of dust in the dust collection chamber and the state of filter component at any time to in time clear up the dust collection chamber or maintain filter component.

In a second aspect, the present invention provides a dust filtration system comprising the dust filter of any of the preceding embodiments.

Therefore, the dust filter is arranged in the dust filtering system, so that moisture and dust in gas can be efficiently and thoroughly filtered, and the dust is prevented from adhering to the filtering component.

In an alternative embodiment, the dust filtration system further comprises:

the first three-way valve comprises an A port, a B port and a C port, wherein the A port is used for communicating an air inlet pipe;

the second three-way valve comprises a D port, an E port and an F port, wherein the F port is used for communicating an air outlet pipe;

the inlet of the first filtering device is communicated with the port B, and the outlet of the first filtering device is communicated with the port E;

the inlet of the second filtering device is communicated with the C port, and the outlet of the second filtering device is communicated with the D port;

wherein at least one of the first filter device and the second filter device is a dust filter.

Therefore, the first filtering device and the second filtering device in the dust filtering system can be used alternately or simultaneously, and when one filtering device needs to be maintained, the other filtering device can be enabled to work continuously, so that the system keeps the filtering function, and the effect of maintaining the filtering device without stopping is achieved in an actual application scene.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is an overall schematic view of a dust filter according to a first embodiment of the present invention;

FIG. 2 is a schematic view in full section of a dust filter according to a first embodiment of the invention;

FIG. 3 is a schematic structural view of a turbine blade;

fig. 4 is a schematic diagram of a dust filtering system according to a second embodiment of the present invention.

Icon: a 100-dust filter; 110-upper cavity; 111-air inlet; 120-bracket; 130-an electric motor; 140-sealing cover; 150-a transmission shaft; 160-turbine blades; 161-guiding the base; 162-guide plate; 170-a water filter; 180-lower cavity; 190-outlet channel; 191-an outlet gas inlet; 200-dust collection chamber; 210-a filter assembly; 211-filtering cotton; 212-stainless steel sintered filter element; 220-viewing glass; 230-dust filtration system; 231-an air inlet pipe; 232-barometer; 233-a pressure relief valve; 234-a first three-way valve; 235-a second three-way valve; 236-a first filtration device; 237-a second filtration device; 238-outlet duct; 240-cover cap.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present invention and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present invention.

Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.

It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.

First embodiment

Referring to fig. 1 and 2, the present embodiment provides a dust filter 100 that can be used in all fields where dust or moisture is required to be filtered from gas, particularly in the semiconductor field, and for filtering the gas in a vacuum pump.

The dust filter 100 includes an upper chamber 110, a support 120, a motor 130, a seal cap 140, turbine blades 160, a water filter 170, a shroud 240, a lower chamber 180, a filter assembly 210, and an air outlet channel 190.

Specifically, the upper cavity 110 is a revolving structure, the middle of the top end of the upper cavity 110 is provided with an air inlet 111, the bracket 120 is installed in the air inlet 111, the motor 130 is installed on the bracket 120, the sealing cover 140 is covered on the motor 130 and connected with the bracket 120, and a sealing ring can be clamped between the sealing cover 140 and the bracket 120 to avoid corrosive gas passing through. In this way, the sealing cover 140 can prevent the motor 130 from contacting the gas, and prevent the motor 130 from contacting impurities in the gas, in particular, corrosive substances.

The turbine blade 160 is installed in the air inlet 111, the turbine blade 160 and the air inlet 111 are coaxially arranged, the motor 130 is connected with the turbine blade 160 through the transmission shaft 150, the turbine blade 160 is used for guiding the gas entering the air inlet 111 to the inner wall of the upper cavity 110, in this way, the motor 130 is arranged to drive the turbine blade 160, the flow rate of the gas is improved, and the turbine blade 160 drives the gas to rotate, the gas can completely reach the inner wall of the upper cavity 110 under the action of centrifugal force, and as the water filter 170 is installed on the inner wall of the upper cavity 110, the gas is completely filtered by the water filter 170, and dust in the gas also completely reaches the upper part of the dust collecting cavity 200.

It will be appreciated that in other embodiments, the motor 130 may not be provided to drive the turbine blades 160, and the turbine blades 160 may be driven by the kinetic energy of the gas, so that the turbine blades 160 may also be capable of directing the gas, and the turbine blades 160 themselves may be capable of directing the gas even if they are not rotating.

The water filter 170 is installed on an inner wall of the upper chamber 110, and the water filter 170 serves to filter moisture in the gas. In the present embodiment, the plurality of water filters 170 are uniformly installed on the inner wall of the upper chamber 110 at intervals, and the water filters 170 are perpendicular to the inner wall of the upper chamber 110. Thus, the plurality of water filters 170 can ensure the filtering effect on the moisture, and the gas moves in a spiral downward direction on the inner wall of the upper chamber 110, so that the whole filtering surface of the vertically arranged water filters 170 can be used for filtering the moisture in the gas, and the filtering efficiency is higher.

The cover 240 is connected to the top ends of the plurality of water filters 170 to block the passages between the water filters 170, thereby ensuring that all the gas guided through the turbine blades 160 can pass through the water filters 170, and improving the filtering effect. In this embodiment, the cover 240 may have a flat plate structure, an umbrella structure, or a trapezoid structure.

The lower cavity 180 is also a solid of revolution structure, and the lower cavity 180 is detachably connected with the upper cavity 110. The air outlet channel 190 is arranged in the middle of the lower cavity 180 and is communicated with the outside, the upper end of the air outlet channel 190 is provided with an air outlet inlet 191, the air outlet inlet 191 is provided with a filter assembly 210, and the side wall of the air outlet channel 190 and the outer wall of the lower cavity 180 enclose a dust collecting cavity 200.

In this embodiment, the plurality of air outlet inlets 191 are uniformly spaced along the outer peripheral surface of the air outlet channel 190, and the filter assembly 210 is annular, is sleeved on the outer peripheral surface of the air outlet channel 190, and shields the air outlet inlets 191. In this way, the total area of the outlet gas inlet 191 is large and is completely covered by the filter assembly 210, and there is no case where the discharged gas does not pass through the filter assembly 210, and in particular, the surface area of the filter assembly 210 can be designed to be large, thereby improving the filtration efficiency.

Wherein, filter assembly 210 includes filter cotton 211 and stainless steel sintering filter core 212, filter cotton 211 and stainless steel sintering filter core 212 are the annular structure, and stainless steel sintering filter core 212 cover is established on the outer peripheral face of air outlet channel 190, and filter cotton 211 cover is established on the outer peripheral face of stainless steel sintering filter core 212, and gas will get into in the air outlet channel 190 through filter cotton 211 and stainless steel sintering filter core 212 in proper order, and wherein, filter cotton 211 can specifically select for use glass fiber filter cotton, has high temperature resistant, anti chemical corrosion's performance.

The outer wall of the lower cavity 180 is provided with a through hole, and the observation glass 220 is installed in the through hole. Thus, by observing the glass 220, a user can view the collection amount of dust in the dust collection cavity 200 and the state of the filter assembly 210 at any time, so as to clean the dust collection cavity 200 or maintain the filter assembly 210 in time.

Referring to fig. 3, the turbine blade 160 includes a guide base 161 and a guide piece 162, wherein the guide base 161 has a horn shape, and an outer surface of the guide base 161 is used for guiding the gas to an inner wall of the upper cavity 110. The guide plate 162 is coupled to an outer surface of the guide base 161, and the guide plate 162 is used to drive the gas to spirally descend. In this way, the turbine blade 160 has a simple structure and a good guiding effect on the gas, and can flow in the direction of the inner wall of the cavity 110, and then flow downwards under the action of self gravity.

The working procedure of the dust filter 100 provided in this embodiment is as follows:

firstly, the motor 130 is started to drive the turbine blades 160 to rotate, gas enters the gas inlet 111, and under the guiding action of the turbine blades 160, the gas flows towards the inner wall of the upper cavity 110 and flows downwards in a spiral manner, and meanwhile, large particle dust in the gas can directly fall into the dust collecting cavity 200 along the inner wall of the upper cavity 110;

then, the gas flows through the water filter 170, and moisture in the gas is filtered by the water filter 170;

finally, the gas passes through the filter assembly 210 and out the gas outlet channel 190, and small particle dust in the gas is filtered by the filter assembly 210 and falls into the dust collection chamber 200.

The dust filter 100 provided in this embodiment has the following advantages:

1. the gas entering the gas inlet 111 can be guided to the inner wall of the upper cavity 110 through the turbine blade 160, so that moisture in the gas is thoroughly filtered by the water filter 170, and dust is prevented from adhering to the filter assembly 210;

2. dust in the gas can be guided to the dust collecting cavity 200 through the turbine blade 160, and the dust is beneficial to being concentrated into the dust collecting cavity 200 under the self gravity and the filtering action of the filtering component 210, so that the dust collecting efficiency is improved;

3. the dust collecting cavity 200 and the filter assembly 210 are both positioned on the lower cavity 180, the lower cavity 180 is detachably connected with the upper cavity 110, so that the lower cavity 180 is convenient to detach, the dust collecting cavity 200 is convenient to clean, and the filter assembly 210 is convenient to detach, clean or replace;

4. the motor 130 is arranged to drive the turbine blades 160, so that the flow rate of the gas is improved, the turbine blades 160 drive the gas to rotate, the gas can completely reach the inner wall of the upper cavity 110 under the action of centrifugal force, the gas is completely filtered by the water filter 170, and dust in the gas also completely reaches the upper part of the dust collecting cavity 200;

5. the turbine blade 160 has simple structure and better guiding effect on the gas, and can flow towards the inner wall of the upper cavity 110, and then flow downwards under the action of self gravity;

6. by observing the glass 220, a user can view the collection amount of dust in the dust collection cavity 200 and the state of the filter assembly 210 at any time, so as to clean the dust collection cavity 200 or maintain the filter assembly 210 in time.

Second embodiment

Referring to fig. 4, the present embodiment provides a dust filtering system 230, where the dust filtering system 230 includes an air inlet pipe 231, a barometer 232, a pressure release valve 233, a first three-way valve 234, a second three-way valve 235, a first filtering device 236, a second filtering device 237, and an air outlet pipe 238. Wherein the first three-way valve 234 includes ports a, B and C and the second three-way valve 235 includes ports D, E and F.

Specifically, the inlet pipe 231, the barometer 232, the pressure release valve 233 and the opening a of the first three-way valve 234 are sequentially communicated, the inlet of the first filter 236 is communicated with the opening B, the outlet of the first filter 236 is communicated with the opening E, the inlet of the second filter 237 is communicated with the opening C, the outlet of the second filter 237 is communicated with the opening D, and the opening F of the second three-way valve 235 is communicated with the outlet pipe 238. Thus, the gas passes through the barometer 232 and the relief valve 233, and the gas pressure in the filter device can be prevented from becoming too high, thereby improving safety.

The first filtering device 236 and the second filtering device 237 are equivalent to parallel connection, so that the first filtering device 236 and the second filtering device 237 in the dust filtering system 230 can be used alternatively or simultaneously, and when one filtering device needs maintenance, the other filtering device can be enabled to continuously work, so that the system keeps the filtering function, the effect of maintaining the filtering devices without stopping is achieved in the actual application scene, and the production period of a user is not influenced.

At least one of the first filter device 236 and the second filter device 237 is the dust filter 100, and of course, the dust filter 100 may be selected for each of the first filter device 236 and the second filter device 237, if the cost allows. In this way, the dust filter 100 is provided in the dust filter system 230, so that moisture and dust in the gas can be efficiently and thoroughly filtered, and the dust can be prevented from adhering to the filter unit 210.

The present invention is not limited to the above embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the invention is subject to the protection scope of the claims.

Claims

1. A dust filter, the dust filter comprising:

the upper cavity (110) is provided with an air inlet (111);

a turbine blade (160) installed inside the gas inlet (111), the turbine blade (160) and the gas inlet (111) being coaxially arranged, the turbine blade (160) being used for guiding gas entering the gas inlet (111) to the inner wall of the upper cavity (110), the turbine blade (160) comprising a guiding base (161) and guiding sheets (162), the guiding base (161) being in a horn shape, the outer surface of the guiding base (161) being used for guiding the gas to the inner wall of the upper cavity (110); the guide piece (162) is connected to the outer surface of the guide base (161), and the guide piece (162) is used for driving the gas to spirally descend;

a water filter (170) mounted on an inner wall of the upper chamber (110), the water filter (170) being for filtering moisture in the gas, a plurality of the water filters (170) being uniformly mounted on the inner wall of the upper chamber (110) at intervals, and the water filters (170) being perpendicular to the inner wall of the upper chamber (110);

a lower cavity (180) detachably connected with the upper cavity (110);

the air outlet channel (190) is arranged in the middle of the lower cavity (180) and is communicated with the outside, an air outlet inlet (191) is formed in the upper end of the air outlet channel (190), a filter assembly (210) is arranged on the air outlet inlet (191), and the side wall of the air outlet channel (190) and the outer wall of the lower cavity (180) form a dust collecting cavity (200);

and a cover (240) connected to the top ends of the plurality of water filters (170) to block the passages between the water filters (170), thereby ensuring that all the gas guided through the turbine blades (160) can pass through the water filters (170).

2. The dust filter of claim 1, further comprising:

and a motor (130) installed in the air inlet (111) and connected to the turbine blade (160).

3. The dust filter of claim 2, further comprising:

the support (120) is arranged in the air inlet (111), the motor (130) is arranged on the support (120), and the motor (130) is connected with the turbine blade (160) through a transmission shaft (150).

4. A dust filter according to claim 3, further comprising:

and a sealing cover (140) which is covered on the motor (130) and is connected with the bracket (120).

5. The dust filter of claim 1, wherein the plurality of air outlet inlets (191) are uniformly spaced along the outer peripheral surface of the air outlet channel (190), and the filter assembly (210) is annular, is sleeved on the outer peripheral surface of the air outlet channel (190), and shields the air outlet inlets (191).

6. The dust filter of claim 1, wherein the outer wall of the lower chamber (180) is provided with a through hole, and wherein an observation glass (220) is installed in the through hole.

7. A dust filtration system, characterized in that it comprises a dust filter according to any one of claims 1 to 6.

8. The dust filtration system of claim 7, further comprising:

a first three-way valve (234) comprising an A port, a B port and a C port, wherein the A port is used for communicating an air inlet pipe (231);

the second three-way valve (235) comprises a D port, an E port and an F port, wherein the F port is used for communicating an air outlet pipe (238);

-a first filtering means (236), the inlet of the first filtering means (236) being in communication with the port B, the outlet of the first filtering means (236) being in communication with the port E;

-a second filtering means (237), the inlet of the second filtering means (237) being in communication with the C-port, the outlet of the second filtering means (237) being in communication with the D-port;

wherein at least one of the first filter device (236) and the second filter device (237) is the dust filter.