CN113874317B - Ozone supply device and ozone supply method - Google Patents
Ozone supply device and ozone supply method Download PDFInfo
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- CN113874317B CN113874317B CN201980096748.7A CN201980096748A CN113874317B CN 113874317 B CN113874317 B CN 113874317B CN 201980096748 A CN201980096748 A CN 201980096748A CN 113874317 B CN113874317 B CN 113874317B
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 541
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000002336 sorption--desorption measurement Methods 0.000 claims abstract description 170
- 238000003795 desorption Methods 0.000 claims abstract description 46
- 238000001179 sorption measurement Methods 0.000 claims abstract description 44
- 230000001276 controlling effect Effects 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000002360 preparation method Methods 0.000 claims 2
- 230000009467 reduction Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 76
- 239000003463 adsorbent Substances 0.000 description 17
- 230000008569 process Effects 0.000 description 13
- 239000002994 raw material Substances 0.000 description 11
- 238000002347 injection Methods 0.000 description 10
- 239000007924 injection Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000012141 concentrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 208000028659 discharge Diseases 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000006385 ozonation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
The purpose of the present application is to provide an ozone supply device and an ozone supply method that can suppress the reduction in the utilization rate of concentrated ozone. An ozone supply device according to one aspect is an ozone supply device for supplying concentrated ozone by adsorbing and desorbing ozone generated by an ozone generator in a 1 st adsorption/desorption column, and includes a receiving unit, an adsorption control unit, and a desorption control unit. The receiving unit receives the 1 st concentrated ozone amount indicating the amount of the concentrated ozone to be supplied. The adsorption control unit causes the 1 st adsorption/desorption column to adsorb the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received by the receiving unit, from among the ozone generated by the ozone generator. The desorption control unit causes the 1 st ozone adsorbed by the 1 st adsorption/desorption column to be desorbed from the 1 st adsorption/desorption column by the adsorption control unit. The 1 st ozone desorbed by the desorption control unit is supplied as concentrated ozone.
Description
Technical Field
The present invention relates to an ozone supply device and an ozone supply method for supplying ozone, and more particularly, to an ozone supply device and an ozone supply method for supplying concentrated ozone.
Background
Ozone is a strong oxidizing agent and is used in various fields such as water environmental purification and semiconductor cleaning. In recent years, environmental awareness has increased, and an ozone supply technology capable of supplying ozone at a high concentration has been demanded.
In the case of using a general ozone generator, the upper limit value of the ozone generation concentration is about 20% by volume. In the case where high-concentration ozone supply with a volume fraction exceeding about 20% is required, a technology and an apparatus for concentrating ozone using an adsorption/desorption column have been proposed. Specifically, a technique and an apparatus for preparing an adsorption/desorption column capable of preferentially adsorbing ozone and concentrating ozone are proposed.
In the above-described technology and apparatus for concentrating ozone, ozone is generated using an ozone generator, and an ozone-containing gas containing the generated ozone at a volume fraction of about 20% is injected into an adsorption/desorption column. Ozone is adsorbed in the adsorption/desorption column of the injected gas, and the remaining gas is discharged from the adsorption/desorption column. In the case of concentrated ozone in the adsorption/desorption column which is concentrated as the surplus gas is discharged, desorption gas such as oxygen is injected into the adsorption/desorption column, and is desorbed from the adsorption/desorption column. The desorbed concentrated ozone is supplied as high-concentration ozone to a concentrated ozone using device. When the supply of concentrated ozone to be concentrated is continuously required, such adsorption/desorption processes are repeated (for example, patent documents 1 to 3).
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open No. 09-235104
Patent document 2: international publication No. 2009/069774
Patent document 3: japanese patent laid-open No. 11-240703
Disclosure of Invention
Problems to be solved by the invention
However, the above-described conventional technique has room for improvement in continuous supply of concentrated ozone. For example, in a state in which a part of the concentrated ozone is adsorbed in the adsorption/desorption column, when the ozone-containing gas related to the supply of the next concentrated ozone is injected into the adsorption/desorption column, the concentrated ozone in the adsorbed state may be unintentionally desorbed from the adsorption/desorption column and may be discharged as the ozone-containing gas is injected.
When concentrated ozone is used in the field of water environmental purification in which inflow amount of wastewater and water quality change at time, the required supply amount of concentrated ozone also changes at time. Therefore, in the case of using concentrated ozone in a field where a large environmental change can occur, the amount of unintended desorption and the amount of emission of concentrated ozone described above can also be increased. Therefore, the utilization rate of the concentrated ozone may be reduced and increased.
The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide an ozone supply device and an ozone supply method that can suppress a decrease in the utilization rate of concentrated ozone.
Means for solving the problems
An ozone supply device according to an aspect of the present invention is an ozone supply device for supplying concentrated ozone, which is concentrated by adsorbing and desorbing ozone generated by an ozone generator in a 1 st adsorption/desorption column, comprising: a receiving part, an adsorption control part and a desorption control part. The receiving unit receives the 1 st concentrated ozone amount indicating the amount of the concentrated ozone to be supplied. The adsorption control unit causes the 1 st adsorption/desorption column to adsorb the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received by the receiving unit, from among the ozone generated by the ozone generator. The desorption control unit causes the 1 st ozone adsorbed to the 1 st adsorption/desorption column by the adsorption control unit to be desorbed from the 1 st adsorption/desorption column. The 1 st ozone desorbed by the desorption control unit is supplied as concentrated ozone.
An ozone supply method according to an aspect of the present invention is an ozone supply method for supplying concentrated ozone obtained by adsorbing and desorbing ozone generated by an ozone generator in an adsorption/desorption column 1, comprising: a receiving step, a 1 st adsorption control step, a 1 st desorption control step, and a supplying step. In the receiving step, the 1 st concentrated ozone amount indicating the amount of the concentrated ozone to be supplied is received. In the 1 st adsorption control step, the 1 st adsorption/desorption column is caused to adsorb 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received in the receiving step, from among the ozone generated by the ozone generator. In the 1 st desorption control step, the 1 st ozone adsorbed by the 1 st adsorption/desorption column in the 1 st adsorption/desorption control step is desorbed from the 1 st adsorption/desorption column. In the supply step, the 1 st ozone desorbed in the 1 st desorption control step is supplied as concentrated ozone.
ADVANTAGEOUS EFFECTS OF INVENTION
In one aspect of the present invention, an ozone supply device and an ozone supply method that can suppress a decrease in the utilization rate of concentrated ozone can be provided.
Drawings
Fig. 1 is a schematic view showing an ozone supply device according to embodiment 1.
Fig. 2 is a flowchart showing an ozone supply process of the ozone supply device according to embodiment 1.
Fig. 3 is a schematic view showing an ozone supply device according to embodiment 2.
Fig. 4 is a schematic diagram showing an ozone supply device according to embodiment 3.
Detailed Description
Embodiments of an ozone supply device and an ozone supply method disclosed in the present application are described in detail below with reference to the drawings. The embodiments described below are examples, and the present invention is not limited to these embodiments.
Embodiment 1.
Fig. 1 is a schematic diagram showing an ozone supply device 1 according to embodiment 1. The ozone supply device 1 is connected to an ozone generator 2 and a concentrated ozone using device 3. The ozone supply device 1 concentrates ozone generated by the ozone generator 2 to generate concentrated ozone, and supplies the generated concentrated ozone to the concentrated ozone using device 3.
The ozone generator 2 is connected to the raw material gas storage device 4 and the ozone supply device 1. The ozone generator 2 performs ozonization of a raw material gas supplied from a raw material gas storage device 4 described later by applying discharge treatment to the raw material gas, thereby generating an ozone-containing gas containing ozone. The ozone generator 2 supplies the generated ozone-containing gas to the ozone supply device 1. The ozone generator 2 is, for example, an ozone generator in which the upper limit value of the volume fraction of the ozone generation concentration in the generated ozone-containing gas is about 20%.
The concentrated ozone using apparatus 3 is an apparatus for reacting the concentrated ozone supplied from the ozone supply apparatus 1 with a treatment target to be treated with ozone. The concentrated ozone using device 3 is brought into contact with the treatment object by using the concentrated ozone supplied from the ozone supplying device 1 as a gas or by using the concentrated ozone supplied from the ozone supplying device 1 as a liquid which becomes ozone water dissolved in water. The concentrated ozone using apparatus 3 is in contact with concentrated ozone, for example, with water supply, water discharge, or sludge as a treatment target.
The raw material gas storage device 4 is a device for storing raw material gas. The raw material gas storage device 4 is connected to the ozone generator 2, and supplies the stored raw material gas to the ozone generator 2. The raw material gas storage device 4 is, for example, a liquefied gas cylinder, a PSA (Pressure Swing Adsorption) device, or the like. Examples of the raw material gas include oxygen, nitrogen oxides, and mixed gases thereof.
The ozone supply device 1 is a device for supplying concentrated ozone in which the upper limit value of the volume fraction of ozone in the ozone-containing gas exceeds about 20%. As shown in fig. 1, the ozone supply device 1 includes a receiving section 5, an adsorption/desorption column 6, a desorption gas injection section 7, and a control section 8. The ozone supply device 1 uses the receiving unit 5, the adsorption/desorption column 6, the desorption gas injection unit 7, and the control unit 8 to concentrate ozone contained in the ozone-containing gas supplied from the ozone generator 2 to generate concentrated ozone, and supplies the generated concentrated ozone to the concentrated ozone using device 3.
The receiving unit 5 is a device for receiving the amount of concentrated ozone to be supplied from the ozone supply device 1 to the concentrated ozone using device 3. The receiving unit 5 is connected to a control unit 8 described later, and transmits concentrated ozone amount information on the amount of the received concentrated ozone to the control unit 8. The receiving unit 5 according to embodiment 1 is an input device for an operator who operates the ozone supply device 1 to manually input information on the amount of concentrated ozone.
The adsorption/desorption column 6 is a device for concentrating by adsorbing and desorbing ozone generated by the ozone generator 2. The adsorption/desorption column 6 is provided with an adsorbent for adsorbing ozone. The adsorbent is a member having high adsorption characteristics for ozone, and is, for example, silica gel.
In the adsorption/desorption column 6, when an ozone-containing gas containing ozone is supplied from the ozone generator 2, the upper limit of the volume fraction of which is about 20%, ozone in the ozone-containing gas is adsorbed. In the ozone-containing gas to be supplied, the components that have not been adsorbed on the adsorbent are discharged to the outside of the adsorption/desorption column 6. With such a configuration, the adsorption/desorption column 6 is configured to concentrate ozone so as to increase the ozone concentration in the ozone-containing gas, thereby generating concentrated ozone.
The desorption gas injection unit 7 is a device for injecting a desorption gas into the adsorption/desorption column 6 in order to desorb concentrated ozone adsorbed on the adsorbent in the adsorption/desorption column 6 from the adsorbent. The desorption gas is, for example, oxygen.
The control unit 8 is connected to the receiving unit 5 and the desorption gas injection unit 7, and controls the operation of each unit of the ozone supply device 1. The control unit 8 is, for example, a processor that performs arithmetic processing. The control unit 8 is further connected to the ozone generator 2, and controls the amount of ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1, that is, the amount of ozone-containing gas adsorbed to the adsorption/desorption column 6. For example, the control unit 8 controls the output of the ozone generator 2, a flow rate control valve provided between the ozone generator 2 and the ozone supply device 1, and the like, and controls the amount of ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1.
When receiving the concentrated ozone amount information on the amount of concentrated ozone to be supplied from the ozone supply device 1 to the concentrated ozone using device 3 from the receiving unit 5, the control unit 8 controls the amount of ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1 so that ozone corresponding to the received concentrated ozone amount information is adsorbed by the adsorbent in the adsorption/desorption column 6.
When ozone corresponding to the received concentrated ozone amount information is adsorbed by the adsorbent in the adsorption/desorption column 6, the control unit 8 controls the desorption gas injection unit 7 to desorb the adsorbed concentrated ozone, and injects the desorption gas into the adsorption/desorption column 6. The concentrated ozone desorbed by injecting the desorption gas is supplied to the concentrated ozone using device 3 by the ozone supplying device 1.
As described above, in the ozone supply device 1 according to embodiment 1, the adsorption/desorption column 6 adsorbs and concentrates ozone in an amount corresponding to the amount of concentrated ozone received by the receiving unit 5, the desorption gas is injected into the adsorption/desorption column 6 having the concentrated ozone adsorbed thereto and desorbed, and the desorbed concentrated ozone is supplied to the concentrated ozone using device 3. When ozone is supplied in an amount corresponding to the received ozone amount, the supply of concentrated ozone to the concentrated ozone using device 3 will be completed. Therefore, leakage of the concentrated ozone to the outside during ozone adsorption can be avoided as much as possible, and a decrease in the utilization rate of the concentrated ozone can be suppressed.
In the concentrated ozone using device 3, after the use of the concentrated ozone supplied from the ozone supply device 1 as described above, the next concentrated ozone may be required. Therefore, in the ozone supply device 1 according to embodiment 1, when the supply of the concentrated ozone is required after the supply of the concentrated ozone, the receiving unit 5 receives the amount of the concentrated ozone to be supplied. When the receiving unit 5 receives the subsequent amount of concentrated ozone, the control unit 8 causes the adsorption/desorption column 6 to adsorb ozone in an amount corresponding to the subsequent amount of concentrated ozone received by the receiving unit 5 by controlling the amount of ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1 after desorbing the preceding concentrated ozone from the adsorption/desorption column 6. Then, the control unit 8 controls the desorption gas injection unit 7 to desorb the adsorbed concentrated ozone, and injects the desorption gas into the adsorption/desorption column 6. The next concentrated ozone desorbed by injecting the desorption gas is supplied to the concentrated ozone using device 3 by the ozone supplying device 1.
When concentrated ozone is used in the field of water environmental purification in which inflow amount of wastewater and water quality change at time, the required supply amount of concentrated ozone also changes at time. As described above, in the ozone supply device 1 according to embodiment 1, after the concentrated ozone in front is desorbed from the adsorption/desorption column 6, the adsorption/desorption column 6 is allowed to adsorb ozone in an amount corresponding to the amount of the concentrated ozone to be next. Therefore, in the ozone supply device 1 according to embodiment 1, after the previous concentrated ozone is desorbed from the adsorption/desorption column 6 and discharged, the previous concentrated ozone is not yet adsorbed by the adsorption/desorption column 6, and then the adsorption/desorption column 6 is allowed to adsorb ozone in an amount corresponding to the amount of the next concentrated ozone. With this configuration, even when the required supply amount of the concentrated ozone is changed from time to time, leakage of the concentrated ozone to the outside during ozone adsorption can be avoided as much as possible, and a decrease in the utilization rate of the concentrated ozone can be suppressed.
Fig. 2 is a flowchart showing an ozone supply process of the ozone supply device 1 according to embodiment 1. In the ozone supply process, the control unit 8 determines whether or not the receiving unit 5 has received the ozone amount of ozone to be supplied to the concentrated ozone using device 3 (step S1). If it is not determined that the receiving unit 5 has received the amount of ozone to be supplied to the concentrated ozone using apparatus 3 (no in S1), the control unit 8 repeats step S1.
When it is determined that the receiving unit 5 has received the amount of ozone to be supplied to the concentrated ozone using apparatus 3 (yes in step S1), the control unit 8 acquires information on the amount of ozone received by the receiving unit 5 (step S2).
After acquiring the information on the amount of ozone, the control unit 8 performs control of concentrating the amount of ozone that matches the acquired amount of ozone by adsorbing and desorbing the ozone in the adsorption and desorption column 6 (step S3), and determines whether or not the amount of ozone that matches the acquired amount of ozone is adsorbed by the adsorption and desorbing column 6 (step S4).
If it is not determined that the amount of ozone corresponding to the obtained amount of ozone is adsorbed by the adsorption/desorption column 6 (S4: NO), the control unit 8 returns to step S3, and continues the control of concentrating the amount of ozone corresponding to the obtained amount of ozone adsorbed by the adsorption/desorption column 6. When it is determined that the amount of ozone corresponding to the obtained amount of ozone is adsorbed by the adsorption/desorption column 6 (yes in step S4), the control unit 8 performs control to stop the operation of supplying the ozone-containing gas from the ozone generator 2 to the ozone supply device 1, and controls the desorption gas injection unit 7 so that the desorption gas corresponding to the obtained amount of ozone is injected into the adsorption/desorption column 6, thereby desorbing the adsorbed ozone from the adsorption/desorption column 6 (step S5), and determines whether or not the ozone corresponding to the obtained amount of ozone is desorbed from the adsorption/desorption column 6 (step S6).
If it is not determined that the ozone corresponding to the obtained ozone amount is desorbed from the adsorption/desorption column 6 (S6: no), the control unit 8 returns to step S5 and continues the control of desorbing the adsorbed ozone from the adsorption/desorption column 6. When it is determined that the ozone corresponding to the obtained ozone amount is desorbed from the adsorption/desorption column 6 (yes in step S6), the control unit 8 performs control to supply the desorbed and concentrated ozone to the concentrated ozone using device 3 (step S7), and determines whether or not the receiving unit 5 has received the subsequent amount of concentrated ozone to be supplied to the concentrated ozone using device 3 (step S8).
If it is not determined that the receiving unit 5 has received the subsequent amount of ozone to be supplied to the concentrated ozone using apparatus 3 (no in S8), the control unit 8 ends the ozone supply process, and after a predetermined time period has elapsed, the process proceeds to step S1.
When it is determined that the receiving unit 5 has received the amount of the subsequent ozone to be supplied to the concentrated ozone using apparatus 3 (yes in S8), the control unit 8 acquires information on the amount of the subsequent ozone received by the receiving unit 5, returns to step S2, and repeats the subsequent processing.
As shown in fig. 1, the ozone supply device 1 according to embodiment 1 is provided with an ozone sensor 9. The ozone sensor 9 is provided in a path through which the ozone-containing gas generated by the ozone generator 2 is supplied to the ozone supply device 1, and detects the amount of ozone passing through the path. The ozone sensor 9 is connected to the control unit 8, and transmits the detection result to the control unit 8. Based on the detection result of the ozone sensor 9, the control unit 8 determines whether or not the requested amount of ozone is adsorbed by the adsorption/desorption column 6 in step S4 of the ozone supply process.
As shown in fig. 1, the ozone supply device 1 according to embodiment 1 is provided with an ozone sensor 9' in the adsorption/desorption column 6. The ozone sensor 9' is a device for detecting the amount of ozone present in the adsorption/desorption column 6 for desorption. The ozone sensor 9' is connected to the control unit 8, and transmits the detection result to the control unit 8. Based on the detection result of the ozone sensor 9', the control unit 8 determines whether or not the requested amount of ozone is desorbed from the adsorption/desorption column 6 in step S6 of the ozone supply process.
As shown in fig. 1, the ozone supply device 1 according to embodiment 1 is provided with an ozone sensor 9 ". The ozone sensor 9″ is provided in a supply path for desorbing the concentrated ozone from the adsorption/desorption column 6 and supplying the concentrated ozone from the ozone supply device 1 to the concentrated ozone using device 3, and is provided in a device for detecting the amount of ozone passing through the supply path. The ozone sensor 9″ is connected to the control unit 8, and transmits the detection result to the control unit 8. Based on the detection result of the ozone sensor 9″, the control section 8 determines whether or not the requested amount of ozone is supplied to the concentrated ozone using device 3 in step S8 of the ozone supply process.
In the ozone supply device 1 described above, the control unit 8 controls the adsorption/desorption column 6 to adsorb ozone in an amount corresponding to the amount of concentrated ozone received by the receiving unit 5, among the ozone generated by the ozone generator 2. Therefore, the control unit 8 of the ozone supply device 1 can function as an adsorption control unit.
In the ozone supply device 1 described above, the control unit 8 performs control to desorb ozone adsorbed in the adsorption/desorption column 6 from the adsorption/desorption column 6. Therefore, the control unit 8 of the ozone supply device 1 can function as a desorption control unit.
In the above-described example of the present invention, the receiving unit 5 is described as an input device for an operator to manually input information on the amount of concentrated ozone. However, the present invention is not limited to this example. The receiving unit 5 may be an input device that automatically receives information on the amount of concentrated ozone based on a detection value using a detection unit such as a sensor provided in the concentrated ozone using apparatus 3, or may be an input device that automatically receives information on the amount of concentrated ozone based on an operation result obtained using Al. By using an input device that automatically receives information about the amount of concentrated ozone as a receiving portion, the labor load of the operator can be reduced. In addition, by using an input device that automatically receives information about the amount of concentrated ozone as a receiving portion, the design flexibility of the ozone supply device 1 can be improved.
In the above-described example of the present invention, the control unit 8 is configured to have a function as an adsorption control unit and a function as a desorption control unit. However, the present invention is not limited to this example. The present invention can be modified so as to include a processor having a function as an adsorption control unit and a processor having a function as a desorption control unit as independent bodies. By adopting a modified configuration having the adsorption control unit and the desorption control unit as independent bodies, the design flexibility of the ozone supply device 1 can be improved.
In the above-described example of the present invention, the configuration in which the control unit 8 determines whether the receiving unit 5 has received the subsequent amount of concentrated ozone (step S8) after the execution of the control of supplying concentrated ozone to the concentrated ozone using apparatus 3 in the ozone supply process (step S7) has been described. However, the present invention is not limited to this example. The present invention may be modified to determine whether or not the receiving unit 5 has received the subsequent amount of concentrated ozone (step S8) before the control of supplying concentrated ozone to the concentrated ozone using apparatus 3 is performed (step S7). By adopting this modified configuration, the interval between the front concentrated ozone supply and the rear concentrated ozone supply is shortened, and the continuity of the concentrated ozone supply is improved, in addition to suppressing the reduction in the utilization rate of the concentrated ozone.
In the above-described example of the present invention, the following configuration is explained: in the ozone supply process, the control unit 8 makes a determination as to whether or not to desorb the ozone corresponding to the obtained ozone amount from the adsorption/desorption column 6 (step S5) by desorbing the adsorbed ozone from the adsorption/desorption column 6 (step S6), and then performs control of supplying the concentrated ozone to the concentrated ozone using apparatus 3 (step S7). However, the present invention is not limited to this example. The control may be changed to the desorption of ozone from the adsorption/desorption column 6 (step S5) and the control of supplying concentrated ozone to the concentrated ozone using apparatus 3 (step S7) so that the adsorption is performed at the same timing. By adopting the modified configuration in which desorption and supply are performed simultaneously, in addition to suppressing a decrease in the utilization rate of concentrated ozone, the interval between the preceding concentrated ozone supply and the following concentrated ozone supply is shortened, and the continuity of the concentrated ozone supply is improved.
Embodiment 2.
In embodiment 1, an ozone supply device 1 including 1 adsorption/desorption column 6 will be described as an example. In embodiment 2, an ozone supply device 1 further provided with an additional adsorption/desorption column 6' will be described as an example. The same constituent devices and members as those of the ozone supply device 1 according to embodiment 1 are denoted by the same reference numerals, and unless otherwise specified, descriptions thereof are omitted.
Fig. 3 is a schematic diagram showing an ozone supply device 1 according to embodiment 2. The ozone supply device 1 according to embodiment 2 is further provided with an adsorption/desorption column 6' and a switching unit 10, as compared with the ozone supply device 1 according to embodiment 1.
The adsorption/desorption column 6' is a device for adsorbing and desorbing ozone generated by the ozone generator 2 and concentrating the ozone, and is configured in the same manner as the adsorption/desorption column 6 according to embodiment 1. The switching unit 10 is configured to be capable of switching between a 1 st guide line for guiding ozone generated by the ozone generator 2 to the adsorption/desorption column 6 and a 2 nd guide line for guiding ozone generated by the ozone generator 2 to the adsorption/desorption column 6, and a connecting member for connecting the ozone generator 2 to the adsorption/desorption column 6 and the adsorption/desorption column 6'. The switching unit 10 is, for example, a three-way valve connected to the control unit 8, and switches between the 1 st guide route and the 2 nd guide route under the control of the control unit 8.
When it is determined that the amount of ozone corresponding to the obtained amount of ozone is adsorbed by the adsorption/desorption column 6 (yes in S4), the control unit 8 performs the following control: that is, the switching unit 10 is used to switch from the 1 st guide route to the adsorption/desorption column 6 to the 2 nd guide route to the adsorption/desorption column 6'. The control unit 8 controls the desorption gas injection unit 7 so that the desorption gas corresponding to the amount of the obtained ozone is injected into the adsorption/desorption column 6 in a state in which the operation of supplying the ozone-containing gas from the ozone generator 2 to the ozone supply device 1 is continued by using the adsorption/desorption column 6', and the adsorbed ozone is desorbed from the adsorption/desorption column 6 (step S5).
As described above, in the ozone supply device 1 according to embodiment 2, the additional adsorption/desorption column 6' can be made to adsorb ozone for the subsequent concentrated ozone supply without an operation of supplying the ozone-containing gas from the ozone generator 2 to the ozone supply device 1. Therefore, in addition to suppressing the decrease in the utilization rate of the concentrated ozone, the load on the ozone generator 2 caused by the repetition of the stop and start of the operation can be reduced. In addition, the interval between the front concentrated ozone supply and the rear concentrated ozone supply is shortened, and the continuity of the concentrated ozone supply is further improved.
In the above-described example of the present invention, the configuration in which the ozone generator 2 is connected to the adsorption/desorption column 6 and the adsorption/desorption column 6' has been described. However, the present invention is not limited to this example. Can be changed into the following constitution: the adsorption/desorption column 6 is connected in series with the adsorption/desorption column 6 'so that the gas discharged from the adsorption/desorption column 6 at the time of adsorption can be injected into the adsorption/desorption column 6'. By injecting the gas discharged from the adsorption/desorption column 6 during adsorption into the adsorption/desorption column 6', ozone contained in the discharged gas can be re-adsorbed by the adsorption/desorption column 6', and therefore, a decrease in the utilization rate of the concentrated ozone can be further suppressed.
Embodiment 3.
In embodiment 1, an ozone supply device 1 including the following control unit 8 is described as an example: the control unit 8 controls the output of the ozone generator 2, a flow rate control valve provided between the ozone generator 2 and the ozone supply device 1, and the like, and controls the amount of ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1. In embodiment 3, an ozone supply device 1 including a control unit 8, which controls the amount of ozone-containing gas adsorbed by an adsorption/desorption column 6 by adjusting a pressure regulator 11 that adjusts the pressure in the adsorption/desorption column 6 or a temperature regulator 12 that adjusts the temperature in the adsorption/desorption column 6, will be described below as an example. The same constituent devices and members as those of the ozone supply device 1 according to embodiment 1 are denoted by the same reference numerals, and unless otherwise specified, the description thereof is omitted.
Fig. 4 is a schematic diagram showing an ozone supply device 1 according to embodiment 3. The ozone supply device 1 according to embodiment 3 is further provided with a pressure regulator 11 and a temperature regulator 12, as compared with the ozone supply device 1 according to embodiment 1.
The pressure regulator 11 is provided for regulating the pressure in the adsorption/desorption column 6, and the pressure loss before and after the pressure regulator 11 is regulated by opening and closing a regulating valve, thereby controlling the pressure in the adsorption/desorption column 6. The type of the valve is not limited as long as the pressure loss can be regulated, and the use of the back pressure valve can control the pressure in the adsorption/desorption column 6 with higher accuracy.
The temperature regulator 12 is provided for controlling the temperature in the adsorption/desorption column 6. As an example, the temperature regulator 12 regulates the temperature of the low-temperature refrigerant so as to be a temperature set value input from the outside, and controls the temperature of the adsorbent in the adsorption/desorption column 6 by bringing the regulated low-temperature refrigerant into contact with the adsorbent in the adsorption/desorption column 6.
In the ozone supply device 1 of embodiment 1, the amount of ozone-containing gas adsorbed by the adsorption/desorption column 6 is controlled by controlling the amount of ozone-containing gas supplied to the ozone supply device 1. On the other hand, in the ozone supply device 1 according to embodiment 3, by controlling the adsorption capacity (adsorption amount and saturation adsorption amount of ozone gas per unit weight) of the adsorbent in the adsorption/desorption column 6, the amount of ozone-containing gas adsorbed by the adsorption/desorption column 6 can be controlled while the adsorbent is saturated. Since the adsorption capacity of the adsorbent is controlled, the adsorption state of the adsorbent at the end of the adsorption process can be maintained in a state close to the saturated adsorption state for a long period of time. Therefore, the amount of adsorption of the gas other than ozone (mainly oxygen) in the adsorption/desorption column can be kept small, and the amount of the diluted component that inhibits concentration of ozone during desorption can be reduced. Therefore, in addition to suppressing the reduction in the utilization rate of the concentrated ozone, stable ozone gas supply at ozone concentration is possible.
Embodiment 4.
In embodiment 1, an ozone supply device 1 having a control unit 8 is described as an example, and the control unit 8 controls the output of the ozone generator 2, a flow rate control valve provided between the ozone generator 2 and the ozone supply device 1, and the like, and controls the amount of ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1. In embodiment 4, an ozone supply device 1 provided with a control unit 8 for controlling the amount of ozone-containing gas adsorbed by adsorption/desorption columns 6 by adjusting a plurality of adsorption/desorption columns 6 and a switching unit 10 for controlling inflow of ozone-containing gas into each adsorption/desorption column 6 will be described below as an example. The same constituent devices and members as those of the ozone supply device 1 according to embodiment 1 are denoted by the same reference numerals, and unless otherwise specified, the description thereof is omitted.
The switching unit 10 is provided in each of the plurality of adsorption/desorption columns 6, and controls the alignment of the ozone-containing gas injection into each adsorption/desorption column 6 during the adsorption, thereby changing the amount of the adsorbent used for the adsorption and controlling the amount of the ozone-containing gas adsorbed by the adsorption/desorption column 6. Since the amount of the adsorbent itself used in the adsorption/desorption column 6 is changed, the ozone adsorption amount can be changed without changing the adsorption capacity of the adsorbent. Therefore, as in embodiment 2, the adsorption state of the adsorbent at the time of completion of the adsorption process can be maintained in a state close to the saturated adsorption state for a long period of time, and the amount of the diluted component that inhibits concentration of ozone can be reduced during desorption, so that stable ozone gas supply at a stable ozone concentration is possible in addition to suppression of a decrease in the utilization rate of the concentrated ozone.
In the above example, the constitution of the ozone generator 2 using the ozone generation concentration in the generated ozone-containing gas, in which the upper limit value of the volume fraction is about 20%, has been described. However, the present invention is not limited to this example. The upper limit value of the volume fraction of the ozone generation concentration may be 20% or more, or 20% or less, as long as the ozone supply device 1 is configured to increase the ozone concentration in the ozone-containing gas generated by the ozone generator 2.
The present invention is not limited to the specific details and the representative embodiments described and illustrated above. Further modifications and effects which can be easily derived by a person skilled in the art are also included in the present invention. Accordingly, various changes may be made without departing from the spirit or scope of the general inventive concept as defined by the appended patent claims and their equivalents.
Description of the reference numerals
1 ozone supply device, 2 ozone generator, 3 concentrated ozone using device, 4 raw material gas storage device, 5 receiving part, 6 adsorption/desorption tower, 7 desorption gas injection part, 8 control part, 9 ozone sensor, 10 switching part, 11 pressure regulator and 12 temperature regulator
Claims (15)
1. An ozone supply device for supplying concentrated ozone by adsorbing and desorbing ozone generated by an ozone generator in a 1 st adsorption/desorption column, comprising:
a receiving unit that receives a 1 st concentrated ozone amount indicating the amount of the concentrated ozone to be supplied;
an adsorption control unit that causes a 1 st adsorption/desorption column to adsorb 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received by the receiving unit, from among the ozone generated by the ozone generator; and
a desorption control unit configured to desorb the 1 st ozone adsorbed to the 1 st adsorption/desorption column by the adsorption control unit from the 1 st adsorption/desorption column,
the 1 st ozone desorbed by the desorption control unit is supplied as the concentrated ozone.
2. The ozone supply device according to claim 1, wherein when the receiving unit receives the 2 nd concentrated ozone amount as the amount of the concentrated ozone to be supplied after the 1 st ozone is supplied, the adsorption control unit causes the 1 st adsorption/desorption tower to adsorb the 2 nd ozone in an amount corresponding to the 2 nd concentrated ozone amount received by the receiving unit after the desorption control unit causes the 1 st ozone to be desorbed from the 1 st adsorption/desorption tower.
3. The ozone supply device according to claim 1, comprising:
a 2 nd adsorption/desorption column that adsorbs/desorbs the 2 nd ozone from the 1 st ozone adsorbed by the 1 st adsorption/desorption column, out of the ozone generated by the ozone generator;
a connection member connected to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column, the connection member being capable of guiding the ozone generated by the ozone generator to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column; and
and a switching unit that switches between a 1 st guide for guiding the ozone to the 1 st adsorption/desorption column via the connection member and a 2 nd guide for guiding the ozone to the 2 nd adsorption/desorption column via the connection member, based on the 1 st concentrated ozone amount received by the receiving unit.
4. The ozone supply device according to claim 3, wherein the switching section is configured in such a manner that: after the 1 st adsorption/desorption column adsorbs the 1 st ozone in an amount corresponding to the amount of the concentrated ozone, the 1 st guide is switched to the 2 nd guide, the 1 st guide guides the ozone to the 1 st adsorption/desorption column, and the 2 nd guide guides the ozone to the 2 nd adsorption/desorption column.
5. The ozone supply device according to claim 4, wherein the desorption control unit causes the 1 st ozone to be desorbed from the 1 st adsorption/desorption column after the switching unit is switched to the 2 nd guide.
6. The ozone supply device according to claim 1, comprising a pressure regulator provided in the 1 st adsorption/desorption column and regulating the pressure in the 1 st adsorption/desorption column,
the adsorption control unit causes the 1 st adsorption/desorption column to adsorb the 1 st ozone by adjusting the pressure in the 1 st adsorption/desorption column using the pressure regulator.
7. The ozone supply device according to claim 1, comprising a temperature regulator provided in the 1 st adsorption/desorption column and regulating the temperature in the 1 st adsorption/desorption column,
the adsorption control unit causes the 1 st adsorption/desorption column to adsorb the 1 st ozone by using temperature regulation in the 1 st adsorption/desorption column having the temperature regulator.
8. The ozone supply device according to claim 1, comprising:
a 2 nd adsorption/desorption column for adsorbing and desorbing the ozone generated by the ozone generator; and
and a switching unit for switching the adsorption position of the ozone between the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column.
9. An ozone supply method for supplying concentrated ozone by adsorbing and desorbing ozone generated by an ozone generator in a 1 st adsorption/desorption column, the method comprising:
a receiving step of receiving a 1 st concentrated ozone amount indicating an amount of the concentrated ozone to be supplied;
a 1 st adsorption control step of causing a 1 st adsorption/desorption column to adsorb 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received in the receiving step, among the ozone generated by the ozone generator;
a 1 st desorption control step in which the 1 st ozone adsorbed by the 1 st adsorption/desorption column through the 1 st adsorption/desorption control step is desorbed from the 1 st adsorption/desorption column; and
a supply step of supplying the 1 st ozone desorbed by the 1 st desorption control step as the concentrated ozone.
10. The ozone supply method according to claim 9, wherein when the amount of 2 nd concentrated ozone is received as the amount of the concentrated ozone to be supplied after the supply of the 1 st ozone, the 1 st ozone is desorbed from the 1 st adsorption/desorption column, and then the 1 st adsorption/desorption column is allowed to adsorb the 2 nd ozone in an amount corresponding to the 2 nd concentrated ozone amount.
11. The ozone supply method according to claim 9, comprising:
a 2 nd adsorption/desorption column preparation step in which a 2 nd adsorption/desorption column capable of adsorbing and desorbing the ozone generated by the ozone generator is prepared;
a connection member preparation step of preparing a connection member which is connected to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column and which can guide the ozone generated by the ozone generator to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column;
a 2 nd adsorption control step of causing the 2 nd adsorption/desorption column to adsorb 2 nd ozone from the 1 st ozone generated by the ozone generator, the 1 st ozone being adsorbed by the 1 st adsorption/desorption column; and
a switching step of switching between a 1 st guide in which the ozone is guided to the 1 st adsorption/desorption column by the connection member and a 2 nd guide in which the ozone is guided to the 2 nd adsorption/desorption column by the connection member, based on the 1 st concentrated ozone amount received in the receiving step.
12. The ozone supply method according to claim 11, wherein in the switching step, after the 1 st adsorption/desorption column adsorbs 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount, the 1 st guide is switched to a 2 nd guide, the 1 st guide guides the ozone to the 1 st adsorption/desorption column, and the 2 nd guide guides the ozone to the 2 nd adsorption/desorption column.
13. The ozone supply method according to claim 12, wherein in the 1 st desorption control step, the 1 st ozone is desorbed from the 1 st adsorption/desorption column after being switched to the 2 nd guide by the switching step.
14. The ozone supply method according to claim 9, wherein in the 1 st adsorption/desorption column, the 1 st adsorption/desorption column is caused to adsorb 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received in the receiving step by controlling the pressure inside the 1 st adsorption/desorption column.
15. The ozone supply method according to claim 9, wherein in the 1 st adsorption/desorption column, the 1 st adsorption/desorption column is caused to adsorb 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received in the receiving step by controlling the temperature inside the 1 st adsorption/desorption column.
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| PCT/JP2019/022021 WO2020245885A1 (en) | 2019-06-03 | 2019-06-03 | Ozone supply device and ozone supply method |
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| JP6607337B1 (en) | 2019-11-20 |
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