CN113874317A - Ozone supply device and ozone supply method - Google Patents
Ozone supply device and ozone supply method Download PDFInfo
- Publication number
- CN113874317A CN113874317A CN201980096748.7A CN201980096748A CN113874317A CN 113874317 A CN113874317 A CN 113874317A CN 201980096748 A CN201980096748 A CN 201980096748A CN 113874317 A CN113874317 A CN 113874317A
- Authority
- CN
- China
- Prior art keywords
- ozone
- adsorption
- desorption
- concentrated
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 544
- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000002336 sorption--desorption measurement Methods 0.000 claims abstract description 165
- 238000003795 desorption Methods 0.000 claims abstract description 51
- 238000001179 sorption measurement Methods 0.000 claims abstract description 46
- 230000001276 controlling effect Effects 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 77
- 239000003463 adsorbent Substances 0.000 description 17
- 238000002347 injection Methods 0.000 description 12
- 239000007924 injection Substances 0.000 description 12
- 239000002994 raw material Substances 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000001514 detection method Methods 0.000 description 8
- 239000012141 concentrate Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 208000028659 discharge Diseases 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
The purpose of the present application is to provide an ozone supply device and an ozone supply method that can suppress a decrease in the utilization rate of concentrated ozone. The ozone supply device according to one aspect is an ozone supply device that supplies concentrated ozone by adsorbing and desorbing ozone generated by an ozone generator in the 1 st adsorption/desorption column, and includes a receiving unit, an adsorption control unit, and a desorption control unit. The receiving part receives the 1 st concentrated ozone amount indicating the amount of concentrated ozone to be supplied. The adsorption control unit causes the 1 st adsorption/desorption tower to adsorb the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received by the receiving unit from the ozone generated by the ozone generator. The desorption control unit desorbs the 1 st ozone adsorbed by the 1 st adsorption/desorption tower from the 1 st adsorption/desorption tower. The 1 st ozone desorbed by the desorption control unit is supplied as concentrated ozone.
Description
Technical Field
The present invention relates to an ozone supply device and an ozone supply method for supplying ozone, and more particularly, to an ozone supply device and an ozone supply method for concentrating and supplying ozone.
Background
Ozone is a strong oxidizing agent and has been used in various fields such as water environmental purification and semiconductor cleaning. Due to the recent increase in environmental awareness, an ozone supply technology capable of supplying ozone at a high concentration has been demanded.
At present, when a general ozone generator is used, the upper limit of the ozone generation concentration is about 20% by volume fraction. When a high-concentration ozone supply with a volume fraction exceeding about 20% is required, a technique and an apparatus for concentrating ozone using an adsorption/desorption column have been proposed. Specifically, an adsorption/desorption column capable of preferentially adsorbing ozone, and a technique and an apparatus for concentrating ozone are proposed.
In the above-described technique and apparatus for concentrating ozone, ozone is generated using an ozone generator, and an ozone-containing gas containing the generated ozone at a volume fraction of about 20% is injected into an adsorption/desorption column. In the injected gas, ozone is adsorbed in the adsorption/desorption column, and the remaining gas is discharged from the adsorption/desorption column. The concentrated ozone in the adsorption/desorption column, which is concentrated as the surplus gas is discharged, is desorbed from the adsorption/desorption column by injecting the desorption gas such as oxygen into the adsorption/desorption column. The desorbed concentrated ozone is supplied to the concentrated ozone using device as high-concentration ozone. When the supply of concentrated ozone to be concentrated is continuously required, such adsorption/desorption treatment is repeated (for example, patent documents 1 to 3).
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. H09-235104
Patent document 2: international publication No. 2009/069774
Patent document 3: japanese laid-open patent publication No. 11-240703
Disclosure of Invention
Problems to be solved by the invention
However, in the above-described conventional techniques, there is room for improvement in the continuous supply of concentrated ozone. For example, in a case where an ozone-containing gas related to the next supply of concentrated ozone is injected into the adsorption/desorption column in a state where a part of the concentrated ozone is adsorbed in the adsorption/desorption column, there is a possibility that the adsorbed concentrated ozone is unintentionally desorbed from the adsorption/desorption column and discharged as the ozone-containing gas is injected.
When concentrated ozone is used in the field of water environment purification in which the inflow amount of wastewater and the water quality change every moment, the required supply amount of concentrated ozone also changes every moment. Therefore, in the case of using concentrated ozone in a field where a large environmental change can occur, the desorption amount and the discharge amount of the above-mentioned unintended concentrated ozone can be increased. Therefore, the decrease in the utilization rate of the concentrated ozone may also increase.
The present invention has been made in view of the above circumstances, and an object thereof is to provide an ozone supply device and an ozone supply method capable of suppressing a decrease in the utilization rate of concentrated ozone.
Means for solving the problems
An ozone supply device according to an aspect of the present invention is an ozone supply device for supplying concentrated ozone that is concentrated by adsorbing and desorbing ozone generated by an ozone generator in a 1 st adsorption/desorption column, the ozone supply device including: the device comprises a receiving part, an adsorption control part and an desorption control part. The receiving part receives the 1 st concentrated ozone amount indicating the amount of concentrated ozone to be supplied. The adsorption control unit causes the 1 st adsorption/desorption tower to adsorb the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received by the receiving unit from the ozone generated by the ozone generator. The desorption control unit desorbs the 1 st ozone adsorbed in the 1 st adsorption/desorption tower by the adsorption control unit from the 1 st adsorption/desorption tower. The 1 st ozone desorbed by the desorption control unit is supplied as concentrated ozone.
An ozone supply method according to an aspect of the present invention is an ozone supply method for supplying concentrated ozone concentrated by adsorbing and desorbing ozone generated by an ozone generator in a 1 st adsorption/desorption column, the ozone supply method including: a receiving step, a 1 st adsorption control step, a 1 st desorption control step, and a supplying step. In the receiving step, the 1 st concentrated ozone amount indicating the amount of concentrated ozone to be supplied is received. In the 1 st adsorption control step, the 1 st adsorption/desorption column is caused to adsorb the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received in the receiving step, of the ozone generated by the ozone generator. In the 1 st desorption control step, the 1 st ozone adsorbed by the 1 st adsorption/desorption column in the 1 st adsorption/desorption step is desorbed from the 1 st adsorption/desorption column. In the supply step, the 1 st ozone desorbed by the 1 st desorption control step is supplied as concentrated ozone.
ADVANTAGEOUS EFFECTS OF INVENTION
In one aspect of the present invention, an ozone supply device and an ozone supply method capable of suppressing a decrease in the utilization rate of concentrated ozone can be provided.
Drawings
Fig. 1 is a schematic diagram showing an ozone supply device according to embodiment 1.
Fig. 2 is a flowchart showing an ozone supply process of the ozone supply device according to embodiment 1.
Fig. 3 is a schematic diagram showing an ozone supply device according to embodiment 2.
Fig. 4 is a schematic diagram showing an ozone supply device according to embodiment 3.
Detailed Description
Hereinafter, embodiments of the ozone supply device and the ozone supply method disclosed in the present application will be described in detail with reference to the drawings. The embodiments described below are examples, and the present invention is not limited to these embodiments.
Fig. 1 is a schematic diagram showing an ozone supply device 1 according to embodiment 1. The ozone supply device 1 is connected to an ozone generator 2 and a concentrated ozone using device 3. The ozone supply device 1 concentrates ozone generated by the ozone generator 2 to generate concentrated ozone, and supplies the generated concentrated ozone to the concentrated ozone using device 3.
The ozone generator 2 is connected to the raw material gas storage device 4 and the ozone supply device 1. The ozone generator 2 applies an electric discharge treatment to a raw material gas supplied from a raw material gas storage device 4 described later to ozonize the raw material gas, thereby generating an ozone-containing gas containing ozone. The ozone generator 2 supplies the generated ozone-containing gas to the ozone supply device 1. The ozone generator 2 is, for example, an ozone generator in which the upper limit value of the volume fraction of the ozone generation concentration in the generated ozone-containing gas is about 20%.
The concentrated ozone using device 3 is a device for reacting the concentrated ozone supplied from the ozone supply device 1 with a treatment target to be treated with ozone. The concentrated ozone using device 3 is configured to bring the concentrated ozone supplied from the ozone supply device 1 into contact with the treatment target as a gas or as a liquid dissolved in water as an ozone water, the concentrated ozone being supplied from the ozone supply device 1. The concentrated ozone using apparatus 3 is, for example, in contact with concentrated ozone as a treatment target of the upper water, the lower water, or the sludge.
The raw material gas storage device 4 is a device for storing a raw material gas. The raw material gas storage device 4 is connected to the ozone generator 2, and supplies the stored raw material gas to the ozone generator 2. The raw material gas storage device 4 is, for example, a liquefied gas cylinder, a psa (pressure Swing adsorption) device, or the like. The raw material gas is, for example, oxygen, nitrogen oxide, a mixed gas thereof, or the like.
The ozone supply device 1 is a device for supplying concentrated ozone having an upper limit value of the volume fraction of ozone in the ozone-containing gas exceeding about 20%. The ozone supply device 1 includes, as shown in fig. 1, a receiving unit 5, an adsorption/desorption tower 6, a desorption gas injection unit 7, and a control unit 8. The ozone supply device 1 uses the receiving unit 5, the adsorption/desorption tower 6, the desorption gas injection unit 7, and the control unit 8 to concentrate ozone contained in the ozone-containing gas supplied from the ozone generator 2 to generate concentrated ozone, and supplies the generated concentrated ozone to the concentrated ozone using device 3.
The receiving unit 5 is a device for receiving the amount of concentrated ozone to be supplied from the ozone supply device 1 to the concentrated ozone using device 3. The receiver 5 is connected to a controller 8 described later, and transmits ozone concentration amount information related to the received amount of concentrated ozone to the controller 8. The receiving unit 5 according to embodiment 1 is an input device for an operator who operates the ozone supply device 1 to manually input information on the amount of concentrated ozone.
The adsorption/desorption column 6 is a device for adsorbing and desorbing ozone generated by the ozone generator 2 to perform concentration. The adsorption/desorption column 6 is provided with an adsorbent for adsorbing ozone. The adsorbent is a member having a high adsorption property for ozone, and is, for example, silica gel.
The adsorption/desorption column 6 adsorbs ozone in the ozone-containing gas when the ozone-containing gas containing ozone with an upper limit value of about 20% by volume fraction is supplied from the ozone generator 2. In the supplied ozone-containing gas, components that are not adsorbed by the adsorbent are discharged to the outside of the adsorption/desorption column 6. With such a configuration, the adsorption/desorption column 6 concentrates ozone so as to increase the concentration of ozone in the ozone-containing gas, thereby generating concentrated ozone.
The desorption gas injection unit 7 is a device for injecting the desorption gas into the adsorption/desorption tower 6 in order to desorb the concentrated ozone adsorbed on the adsorbent in the adsorption/desorption tower 6 from the adsorbent. The desorption gas is, for example, oxygen.
The control unit 8 is connected to the receiving unit 5 and the desorbed gas injection unit 7, and controls the operations of the respective units of the ozone supply device 1. The control unit 8 is, for example, a processor that performs arithmetic processing. The control unit 8 is connected to the ozone generator 2, and controls the amount of the ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1, that is, the amount of the ozone-containing gas adsorbed by the adsorption/desorption tower 6. For example, the control unit 8 controls the amount of the ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1 by adjusting the output of the ozone generator 2, a flow rate adjustment valve provided between the ozone generator 2 and the ozone supply device 1, and the like.
When receiving the concentrated ozone amount information on the amount of concentrated ozone to be supplied from the ozone supply device 1 to the concentrated ozone using device 3 from the receiving unit 5, the control unit 8 controls the amount of the ozone-containing gas to be supplied from the ozone generator 2 to the ozone supply device 1 so that the ozone corresponding to the received concentrated ozone amount information is adsorbed by the adsorbent of the adsorption/desorption tower 6.
When the ozone corresponding to the received information on the amount of concentrated ozone is adsorbed by the adsorbent in the adsorption/desorption column 6, the control unit 8 controls the desorption gas injection unit 7 to desorb the adsorbed concentrated ozone and inject the desorption gas into the adsorption/desorption column 6. The concentrated ozone desorbed by the injection of the desorption gas is supplied to the concentrated ozone using device 3 by the ozone supply device 1.
As described above, in the ozone supply device 1 according to embodiment 1, the adsorption/desorption tower 6 is caused to adsorb ozone in an amount corresponding to the amount of concentrated ozone received by the receiving unit 5 and concentrate the ozone, the gas for desorption is injected into the adsorption/desorption tower 6 in which the concentrated ozone is adsorbed and desorbs the gas, and the concentrated ozone thus desorbed is supplied to the concentrated ozone using device 3. When supplying an amount of ozone corresponding to the received amount of ozone, the supply of concentrated ozone to the concentrated ozone using device 3 will be completed. Therefore, leakage of concentrated ozone to the outside during ozone adsorption can be avoided as much as possible, and a decrease in the utilization rate of the concentrated ozone can be suppressed.
The concentrated ozone using apparatus 3 may need to concentrate ozone next after the concentrated ozone supplied from the ozone supply apparatus 1 is used as described above. Therefore, in the ozone supply device 1 according to embodiment 1, when the next supply of concentrated ozone is required after the previous supply of concentrated ozone, the receiving unit 5 receives the next amount of concentrated ozone that needs to be supplied. When the receiving unit 5 receives the next amount of concentrated ozone, the control unit 8 controls the amount of ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1 after the previous amount of concentrated ozone is desorbed from the adsorption/desorption tower 6, and causes the adsorption/desorption tower 6 to adsorb an amount of ozone corresponding to the next amount of concentrated ozone received by the receiving unit 5. Then, the control unit 8 controls the desorption gas injection unit 7 to desorb the next concentrated ozone that is adsorbed, and injects the desorption gas into the adsorption/desorption tower 6. The next concentrated ozone desorbed by the injection of the desorption gas is supplied to the concentrated ozone using device 3 by the ozone supply device 1.
In the case of using concentrated ozone in the field of water environment purification where the inflow amount of wastewater and the water quality change every moment, the required supply amount of concentrated ozone also changes every moment. As described above, in the ozone supply device 1 according to embodiment 1, after the previous concentrated ozone is desorbed from the adsorption/desorption column 6, the adsorption/desorption column 6 is caused to adsorb an amount of ozone corresponding to the next amount of concentrated ozone. Therefore, in the ozone supply device 1 according to embodiment 1, after the previous concentrated ozone is desorbed from the adsorption/desorption tower 6 and discharged, and the previous concentrated ozone is not adsorbed by the adsorption/desorption tower 6, the adsorption/desorption tower 6 is caused to adsorb an amount of ozone corresponding to the next amount of concentrated ozone. With this configuration, even in a situation where the required supply amount of concentrated ozone changes from moment to moment, leakage of concentrated ozone to the outside during ozone adsorption can be avoided as much as possible, and a decrease in the utilization rate of concentrated ozone can be suppressed.
Fig. 2 is a flowchart showing an ozone supply process of the ozone supply device 1 according to embodiment 1. In the ozone supply process, the control unit 8 determines whether or not the receiving unit 5 has received the ozone amount of the ozone to be supplied to the concentrated ozone using device 3 (step S1). If it is not determined that the receiving unit 5 has received the amount of ozone of the ozone to be supplied to the concentrated ozone using device 3 (S1: no), the control unit 8 repeats step S1.
When it is determined that the receiving unit 5 has received the amount of ozone of the ozone to be supplied to the concentrated ozone using device 3 (yes at S1), the control unit 8 acquires information on the amount of ozone received by the receiving unit 5 (step S2).
After acquiring the information on the amount of ozone, the controller 8 performs control to cause the adsorption/desorption tower 6 to adsorb and concentrate an amount of ozone corresponding to the acquired amount of ozone (step S3), and determines whether or not the amount of ozone corresponding to the acquired amount of ozone is adsorbed by the adsorption/desorption tower 6 (step S4).
If it is not determined that the amount of ozone corresponding to the obtained amount of ozone is adsorbed by the adsorption/desorption tower 6 (no in S4), the control unit 8 returns to step S3 to continue the control of causing the adsorption/desorption tower 6 to adsorb the amount of ozone corresponding to the obtained amount of ozone and perform concentration. When it is determined that the amount of ozone corresponding to the obtained amount of ozone is adsorbed by the adsorption/desorption tower 6 (yes in S4), the control unit 8 performs control for stopping the supply of the ozone-containing gas from the ozone generator 2 to the ozone supply device 1, controls the desorption gas injection unit 7 so that the desorption gas corresponding to the obtained amount of ozone is injected into the adsorption/desorption tower 6, desorbs the adsorbed ozone from the adsorption/desorption tower 6 (step S5), and determines whether the amount of ozone corresponding to the obtained amount of ozone is desorbed from the adsorption/desorption tower 6 (step S6).
If it is not determined that ozone corresponding to the acquired amount of ozone is desorbed from the adsorption/desorption column 6 (no in S6), the control unit 8 returns to step S5 to continue the control of desorbing the adsorbed ozone from the adsorption/desorption column 6. When it is determined that the ozone corresponding to the acquired amount of ozone is desorbed from the adsorption/desorption tower 6 (yes in S6), the control unit 8 controls the concentrated ozone, which is desorbed and concentrated, to be supplied to the concentrated ozone using device 3 (step S7), and determines whether or not the receiving unit 5 receives the next amount of concentrated ozone to be supplied to the concentrated ozone using device 3 (step S8).
If it is not determined that the receiving unit 5 has received the next amount of ozone to be supplied to the concentrated ozone using device 3 (S8: no), the control unit 8 ends the ozone supply process and executes step S1 after a predetermined time has elapsed.
When determining that the receiving unit 5 has received the next amount of ozone to be supplied to the concentrated ozone using device 3 (yes in S8), the control unit 8 acquires information on the next amount of ozone received by the receiving unit 5, returns to step S2, and repeats the subsequent processing.
The ozone supply device 1 according to embodiment 1 is provided with an ozone sensor 9 as shown in fig. 1. The ozone sensor 9 is provided in a path for supplying the ozone-containing gas generated by the ozone generator 2 to the ozone supply device 1, and detects the amount of ozone passing through the path. The ozone sensor 9 is connected to the control unit 8, and sends the detection result to the control unit 8. Based on the detection result of the ozone sensor 9, the control unit 8 determines whether or not the desired amount of ozone is adsorbed by the adsorption/desorption tower 6 in step S4 of the ozone supply process.
As shown in fig. 1, the ozone supply device 1 according to embodiment 1 is provided with an ozone sensor 9' in the adsorption/desorption column 6. The ozone sensor 9' is a device that detects the amount of ozone present in the adsorption/desorption tower 6 upon desorption. The ozone sensor 9' is connected to the control unit 8, and sends the detection result to the control unit 8. Based on the detection result of the ozone sensor 9', the control unit 8 determines whether or not the desired amount of ozone is desorbed from the adsorption/desorption tower 6 in step S6 of the ozone supply process.
As shown in fig. 1, the ozone supply device 1 according to embodiment 1 is provided with an ozone sensor 9 ″. The ozone sensor 9 ″ is provided in a supply path through which concentrated ozone is desorbed from the adsorption/desorption tower 6 and supplied from the ozone supply device 1 to the concentrated ozone using device 3, and detects the amount of ozone passing through the supply path. Ozone sensor 9 ″ is connected to control unit 8, and sends the detection result to control unit 8. Based on the detection result of ozone sensor 9 ″, control unit 8 determines whether or not the desired amount of ozone is supplied to concentrated ozone using device 3 in step S8 of the ozone supply process.
In the ozone supply device 1 described above, the control unit 8 controls the adsorption/desorption tower 6 to adsorb ozone in an amount corresponding to the amount of concentrated ozone received by the receiving unit 5 from the ozone generated by the ozone generator 2. Therefore, the control unit 8 of the ozone supply device 1 can function as an adsorption control unit.
In the ozone supply device 1 described above, the control unit 8 performs control to desorb the ozone adsorbed in the adsorption/desorption column 6 from the adsorption/desorption column 6. Therefore, the control unit 8 of the ozone supply device 1 can function as a desorption control unit.
In the above-described example of the present invention, the input device in which the operator manually inputs information on the amount of concentrated ozone is described as the receiving unit 5. However, the present invention is not limited to this example. The receiving unit 5 may be an input device that automatically receives information on the amount of concentrated ozone based on a detection value of a detection unit such as a sensor provided in the concentrated ozone using apparatus 3, or may be an input device that automatically receives information on the amount of concentrated ozone based on a calculation result obtained using Al. By using an input device that automatically receives information on the amount of concentrated ozone as the receiving section, the labor load of the operator can be reduced. In addition, by using an input device that automatically receives information on the amount of concentrated ozone as the receiving section, the flexibility in designing the ozone supply device 1 can be improved.
In the above-described example of the present invention, the control unit 8 is configured to have a function as an adsorption control unit and a function as a desorption control unit. However, the present invention is not limited to this example. The present invention may be modified to include a processor having a function as an adsorption control unit and a processor having a function as a desorption control unit as separate bodies. By adopting a modified structure having the adsorption control unit and the desorption control unit as separate bodies, the flexibility of the design of the ozone supply device 1 can be improved.
In the above-described example of the present invention, the configuration in which the controller 8 performs the control of supplying the concentrated ozone to the concentrated ozone using device 3 in the ozone supply process (step S7), and then determines whether or not the receiving unit 5 receives the next amount of concentrated ozone (step S8) has been described. However, the present invention is not limited to this example. It is also possible to perform a judgment as to whether or not the receiving unit 5 has received the next amount of concentrated ozone (step S8) before execution of the control of supplying the concentrated ozone to the concentrated ozone using device 3 (step S7). By adopting this modified configuration, in addition to suppressing a decrease in the utilization rate of the concentrated ozone, the interval between the preceding concentrated ozone supply and the following concentrated ozone supply is shortened, and the continuity of the concentrated ozone supply is improved.
In the above-described example of the present invention, the following configuration is explained: in the ozone supply process, the controller 8 desorbs the adsorbed ozone from the adsorption/desorption tower 6 (step S5), determines whether or not the ozone corresponding to the obtained amount of ozone is desorbed from the adsorption/desorption tower 6 (step S6), and executes control to supply the concentrated ozone to the concentrated ozone using device 3 (step S7). However, the present invention is not limited to this example. It is also possible to change the desorption of the adsorbed ozone from the adsorption/desorption tower 6 at the same timing (step S5) and the execution of the control of supplying the concentrated ozone to the concentrated ozone using apparatus 3 (step S7). By adopting the modified constitution in which desorption and supply are simultaneously performed, in addition to suppressing a decrease in the utilization rate of concentrated ozone, the interval between the former concentrated ozone supply and the latter concentrated ozone supply is shortened, and the continuity of concentrated ozone supply is improved.
In embodiment 1, an ozone supply device 1 including 1 adsorption/desorption column 6 will be described as an example. In embodiment 2, the following description will be given by taking an example of an ozone supply apparatus 1 further including an additional adsorption/desorption column 6'. The same constituent devices and members as those of the ozone supply device 1 according to embodiment 1 are denoted by the same reference numerals, and description thereof is omitted unless otherwise specified.
Fig. 3 is a schematic diagram showing the ozone supply device 1 according to embodiment 2. The ozone supply device 1 according to embodiment 2 further includes an adsorption/desorption column 6' and a switching unit 10, compared to the ozone supply device 1 according to embodiment 1.
The adsorption/desorption column 6' is a device for adsorbing and desorbing the ozone generated by the ozone generator 2 to concentrate the ozone, and is configured in the same manner as the adsorption/desorption column 6 according to embodiment 1. The switching unit 10 is a connecting member connected to the ozone generator 2, the adsorption/desorption column 6, and the adsorption/desorption column 6 ', and is configured to be switchable between a 1 st guide line for guiding the ozone generated by the ozone generator 2 to the adsorption/desorption column 6 and a 2 nd guide line for guiding the ozone generated by the ozone generator 2 to the adsorption/desorption column 6'. The switching unit 10 is, for example, a three-way valve connected to the control unit 8, and switches the 1 st guide route and the 2 nd guide route under the control of the control unit 8.
When determining that the amount of ozone corresponding to the obtained amount of ozone is adsorbed by the adsorption/desorption column 6 (yes at S4), the control unit 8 performs the following control: that is, the control is performed by switching the 1 st guide route to the adsorption/desorption column 6 to the 2 nd guide route to the adsorption/desorption column 6' using the switching unit 10. The control unit 8 controls the desorption gas injection unit 7 so that the desorption gas corresponding to the acquired amount of ozone is injected into the adsorption/desorption tower 6 and the adsorbed ozone is desorbed from the adsorption/desorption tower 6, in a state where the ozone-containing gas is continuously supplied from the ozone generator 2 to the ozone supply device 1 by using the adsorption/desorption tower 6' (step S5).
As described above, in the ozone supply device 1 according to embodiment 2, the additional adsorption/desorption column 6' can adsorb ozone for the next concentrated ozone supply without an operation of supplying an ozone-containing gas from the ozone generator 2 to the ozone supply device 1. Therefore, in addition to suppressing a decrease in the utilization rate of the concentrated ozone, the load on the ozone generator 2 due to repetition of the stop and start of the operation can be reduced. In addition, the interval between the previous concentrated ozone supply and the next concentrated ozone supply is shortened, and the continuity of the concentrated ozone supply is further improved.
In the above-described example of the present invention, the structure in which the ozone generator 2 is connected to the adsorption/desorption column 6 and the adsorption/desorption column 6' is explained. However, the present invention is not limited to this example. The following constitution may be changed: the adsorption-desorption column 6 is connected in series with the adsorption-desorption column 6 'so that the gas discharged from the adsorption-desorption column 6 at the time of adsorption can be injected into the adsorption-desorption column 6'. By injecting the gas discharged from the adsorption/desorption column 6 at the time of adsorption into the adsorption/desorption column 6 ', the ozone contained in the discharged gas can be adsorbed again by the adsorption/desorption column 6', and therefore, the decrease in the utilization rate of the concentrated ozone can be further suppressed.
In embodiment 1, the ozone supply device 1 including the following control unit 8 is explained as an example: the control unit 8 controls the amount of the ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1 by adjusting the output of the ozone generator 2, a flow rate adjustment valve provided between the ozone generator 2 and the ozone supply device 1, and the like. In embodiment 3, the ozone supply apparatus 1 including the following control unit 8 will be described as an example, and the control unit 8 controls the amount of the ozone-containing gas adsorbed by the adsorption/desorption column 6 by adjusting the pressure regulator 11 that adjusts the pressure in the adsorption/desorption column 6 or the temperature regulator 12 that adjusts the temperature in the adsorption/desorption column 6. The same constituent devices and members as those of the ozone supply device 1 according to embodiment 1 are denoted by the same reference numerals, and description thereof will be omitted unless otherwise particularly required.
Fig. 4 is a schematic diagram showing the ozone supply device 1 according to embodiment 3. The ozone supply device 1 according to embodiment 3 further includes a pressure regulator 11 and a temperature regulator 12, compared to the ozone supply device 1 according to embodiment 1.
The pressure regulator 11 is provided for regulating the pressure in the adsorption/desorption column 6, and the pressure loss before and after the pressure regulator 11 is regulated by opening and closing the regulator valve, thereby controlling the pressure in the adsorption/desorption column 6. The valve is not limited in kind as long as the pressure loss can be adjusted, and by using a back pressure valve, the pressure control of the adsorption/desorption column 6 can be performed with higher accuracy.
The temperature controller 12 is provided to control the temperature in the adsorption/desorption column 6. For example, the temperature regulator 12 regulates the temperature of the low-temperature refrigerant so as to be a temperature set value inputted from the outside, and controls the temperature of the adsorbent in the adsorption/desorption column 6 by bringing the regulated low-temperature refrigerant into contact with the adsorbent in the adsorption/desorption column 6.
In the ozone supply device 1 of embodiment 1, the amount of the ozone-containing gas adsorbed by the adsorption/desorption tower 6 is controlled by controlling the amount of the ozone-containing gas supplied to the ozone supply device 1. On the other hand, in the ozone supply device 1 according to embodiment 3, by controlling the adsorption capacity (the adsorption amount and the saturation adsorption amount of the ozone gas per unit weight) of the adsorbent in the adsorption/desorption tower 6, the amount of the ozone-containing gas adsorbed by the adsorption/desorption tower 6 can be controlled while the adsorbent is saturated and adsorbed. Since the adsorption capacity of the adsorbent is controlled, the adsorption state of the adsorbent at the end of the adsorption step can be maintained in a state close to the saturated adsorption state for a long period of time. Therefore, the amount of gas (mainly oxygen) other than ozone adsorbed in the adsorption/desorption column can be kept small, and the amount of diluent that inhibits concentration of ozone can be reduced during desorption. Therefore, in addition to suppressing the decrease in the utilization rate of the concentrated ozone, it becomes possible to stably supply the ozone gas at the ozone concentration.
In embodiment 1, the ozone supply device 1 including the control unit 8 is described as an example, and the control unit 8 controls the amount of the ozone-containing gas supplied from the ozone generator 2 to the ozone supply device 1 by adjusting the output of the ozone generator 2, a flow rate adjustment valve provided between the ozone generator 2 and the ozone supply device 1, and the like. In embodiment 4, the following description will be given, by way of example, of the ozone supply apparatus 1 including the controller 8, the controller 8 controlling the plurality of adsorption/desorption towers 6 and the switching unit 10 controlling the inflow of the ozone-containing gas to each adsorption/desorption tower 6, and controlling the amount of the ozone-containing gas adsorbed by the adsorption/desorption tower 6. The same constituent devices and members as those of the ozone supply device 1 according to embodiment 1 are denoted by the same reference numerals, and description thereof will be omitted unless otherwise particularly required.
The switching unit 10 is provided in each of the adsorption/desorption towers 6, and controls the amount of the ozone-containing gas adsorbed by the adsorption/desorption towers 6 by changing the amount of the adsorbent used for adsorption by controlling the alignment of the injection of the ozone-containing gas into each adsorption/desorption tower 6 during adsorption. Since the amount of the adsorbent used in the adsorption/desorption column 6 itself is changed, the ozone adsorption amount can be changed without changing the adsorption capacity of the adsorbent. Therefore, as in embodiment 2, the adsorption state of the adsorbent at the completion of the adsorption step can be maintained in a state close to the saturated adsorption state for a long period of time, and the amount of the dilution component inhibiting the concentration of ozone can be reduced during desorption, so that it is possible to stably supply ozone gas at an ozone concentration in addition to suppressing a decrease in the utilization rate of concentrated ozone.
In the above example, the configuration of the ozone generator 2 using the generated ozone-containing gas in which the upper limit value of the volume fraction of the ozone generation concentration is about 20% was described. However, the present invention is not limited to this example. The upper limit value of the volume fraction of the ozone generation concentration may be 20% or more, or 20% or less, and the ozone supply device 1 may be configured to increase the ozone concentration in the ozone-containing gas generated by the ozone generator 2.
The present invention is not limited to the specific details and representative embodiments described and illustrated above. Further modifications and effects that can be easily derived by those skilled in the art are also included in the present invention. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended patent claims and their equivalents.
Description of reference numerals
1 ozone supply device, 2 ozone generator, 3 concentrated ozone using device, 4 raw material gas storage device, 5 receiving part, 6 adsorption/desorption tower, 7 desorption gas injection part, 8 control part, 9 ozone sensor, 10 switching part, 11 pressure regulator, 12 temperature regulator.
Claims (15)
1. An ozone supply device for supplying concentrated ozone, which is concentrated ozone generated by an ozone generator in a 1 st adsorption/desorption column by adsorption and desorption, comprising:
a receiving unit that receives a 1 st concentrated ozone amount indicating an amount of the concentrated ozone to be supplied;
an adsorption control unit that causes a 1 st adsorption/desorption tower to adsorb a 1 st amount of ozone corresponding to the 1 st amount of concentrated ozone received by the receiving unit from among the ozone generated by the ozone generator; and
a desorption control unit that desorbs the 1 st ozone adsorbed by the 1 st adsorption/desorption tower by the adsorption control unit from the 1 st adsorption/desorption tower,
the 1 st ozone desorbed by the desorption control unit is supplied as the concentrated ozone.
2. The ozone supply device according to claim 1, wherein, when the receiving unit receives a 2 nd concentrated ozone amount as the amount of the concentrated ozone to be supplied after the 1 st ozone is supplied, the adsorption control unit causes the 1 st adsorption/desorption tower to adsorb the 2 nd ozone in an amount corresponding to the 2 nd concentrated ozone amount received by the receiving unit after the desorption control unit causes the 1 st ozone to be desorbed from the 1 st adsorption/desorption tower.
3. The ozone supply device according to claim 1, comprising:
a 2 nd adsorption/desorption column that adsorbs/desorbs 2 nd ozone, which is the ozone generated by the ozone generator and from which the 1 st ozone adsorbed by the 1 st adsorption/desorption column is removed;
a connection member that is connected to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column and that can guide the ozone generated by the ozone generator to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column; and
a switching unit that switches between a 1 st guidance for guiding the ozone to the 1 st adsorption/desorption column by the connection member and a 2 nd guidance for guiding the ozone to the 2 nd adsorption/desorption column by the connection member, based on the 1 st concentrated ozone amount received by the receiving unit.
4. The ozone supply device according to claim 3, wherein the switching unit is configured as follows: after the 1 st adsorption/desorption tower adsorbs the 1 st ozone in an amount corresponding to the amount of the concentrated ozone, the 1 st guidance is switched to the 2 nd guidance, the 1 st guidance guides the ozone to the 1 st adsorption/desorption tower, and the 2 nd guidance guides the ozone to the 2 nd adsorption/desorption tower.
5. The ozone supply device according to claim 4, wherein the desorption control unit desorbs the 1 st ozone from the 1 st adsorption/desorption column after the switching unit switches to the 2 nd guidance.
6. The ozone supply device according to claim 1, wherein a pressure regulator is provided, the pressure regulator being provided in the 1 st adsorption/desorption column and regulating the pressure in the 1 st adsorption/desorption column,
the adsorption control unit causes the 1 st adsorption/desorption column to adsorb the 1 st ozone by pressure regulation in the 1 st adsorption/desorption column using the pressure regulator.
7. The ozone supply device according to claim 1, comprising a temperature controller that is provided in the 1 st adsorption/desorption column and that controls the temperature in the 1 st adsorption/desorption column,
the adsorption control unit causes the 1 st adsorption/desorption column to adsorb the 1 st ozone by temperature regulation in the 1 st adsorption/desorption column using the temperature regulator.
8. The ozone supply device according to claim 1, comprising:
a 2 nd adsorption/desorption column for adsorbing and desorbing the ozone generated by the ozone generator; and
and a switching unit that switches the position of the ozone adsorption between the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column.
9. An ozone supply method for supplying concentrated ozone which is concentrated by adsorbing and desorbing ozone generated by an ozone generator in a 1 st adsorption/desorption column, comprising:
a receiving step of receiving a 1 st concentrated ozone amount indicating an amount of the concentrated ozone to be supplied;
a 1 st adsorption control step of causing a 1 st adsorption/desorption column to adsorb a 1 st amount of ozone corresponding to the 1 st amount of concentrated ozone received in the receiving step from among the ozone generated by the ozone generator;
a 1 st desorption control step of desorbing the 1 st ozone adsorbed by the 1 st adsorption/desorption column from the 1 st adsorption/desorption column; and
a supply step of supplying the 1 st ozone desorbed by the 1 st desorption control step as the concentrated ozone.
10. The ozone supply method according to claim 9, wherein in a case where a 2 nd concentrated ozone amount is received as the amount of the concentrated ozone to be supplied after the 1 st ozone is supplied, after the 1 st ozone is desorbed from the 1 st adsorption/desorption tower, the 2 nd adsorption/desorption tower is caused to adsorb the 2 nd ozone in an amount corresponding to the 2 nd concentrated ozone amount.
11. The ozone supply method according to claim 9, comprising:
a 2 nd adsorption/desorption column preparation step of preparing a 2 nd adsorption/desorption column capable of adsorbing and desorbing the ozone generated by the ozone generator;
a connection member preparation step of preparing a connection member that is connected to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column and that is capable of introducing the ozone generated by the ozone generator to the 1 st adsorption/desorption column and the 2 nd adsorption/desorption column;
a 2 nd adsorption control step of causing the 2 nd adsorption/desorption tower to adsorb 2 nd ozone from which the 1 st ozone adsorbed by the 1 st adsorption/desorption tower is removed, of the ozone generated by the ozone generator; and
a switching step of switching a 1 st introduction, in which the ozone is introduced to the 1 st adsorption/desorption column through the connection member, and a 2 nd introduction, in which the ozone is introduced to the 2 nd adsorption/desorption column through the connection member, based on the 1 st concentrated ozone amount received in the receiving step.
12. The ozone supply method according to claim 11, wherein in the switching step, after the 1 st adsorption/desorption tower adsorbs the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount, the 1 st guidance is switched to the 2 nd guidance, the 1 st guidance guides the ozone to the 1 st adsorption/desorption tower, and the 2 nd guidance guides the ozone to the 2 nd adsorption/desorption tower.
13. The ozone supply method according to claim 12, wherein in the 1 st desorption control step, after the switching step to the 2 nd guidance, the 1 st ozone is desorbed from the 1 st adsorption/desorption column.
14. The ozone supply method according to claim 9, wherein in the 1 st adsorption and desorption step, the 1 st adsorption and desorption tower is caused to adsorb the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received in the receiving step by controlling a pressure inside the 1 st adsorption and desorption tower.
15. The ozone supply method according to claim 9, wherein in the 1 st adsorption and desorption step, the 1 st adsorption and desorption tower is caused to adsorb the 1 st ozone in an amount corresponding to the 1 st concentrated ozone amount received in the receiving step by controlling a temperature inside the 1 st adsorption and desorption tower.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/022021 WO2020245885A1 (en) | 2019-06-03 | 2019-06-03 | Ozone supply device and ozone supply method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113874317A true CN113874317A (en) | 2021-12-31 |
| CN113874317B CN113874317B (en) | 2024-03-12 |
Family
ID=68611049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980096748.7A Active CN113874317B (en) | 2019-06-03 | 2019-06-03 | Ozone supply device and ozone supply method |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6607337B1 (en) |
| CN (1) | CN113874317B (en) |
| WO (1) | WO2020245885A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7128974B1 (en) * | 2021-05-10 | 2022-08-31 | 三菱電機株式会社 | Control device, ozone generation system, ozone storage device, ozone generator, water treatment system, ozone injection control method and computer program |
| JP7292554B1 (en) * | 2022-12-13 | 2023-06-16 | 三菱電機株式会社 | Ozone supply device and ozone supply method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008062534A (en) * | 2006-09-08 | 2008-03-21 | Mimaki Engineering Co Ltd | Printer head of printer apparatus |
| JP2009215164A (en) * | 2009-06-17 | 2009-09-24 | Mitsubishi Electric Corp | Ozone supply method |
| CN101878182A (en) * | 2007-11-30 | 2010-11-03 | 三菱电机株式会社 | Ozone concentrator |
| CN101878183A (en) * | 2007-11-30 | 2010-11-03 | 东芝三菱电机产业系统株式会社 | High-concentrated ozone gas generating device and high-concentrated ozone gas generation method |
| CN108473306A (en) * | 2016-01-28 | 2018-08-31 | 三菱电机株式会社 | Ozone supply means and ozone supply method |
| JP6516941B1 (en) * | 2018-06-07 | 2019-05-22 | 三菱電機株式会社 | Ozone supply apparatus and ozone supply method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3769741B2 (en) * | 1995-11-14 | 2006-04-26 | 石川島播磨重工業株式会社 | Ozone concentration storage device and control method thereof |
| JP4107522B2 (en) * | 1998-02-26 | 2008-06-25 | 三菱電機株式会社 | Ozone supply device |
| WO2008062534A1 (en) * | 2006-11-24 | 2008-05-29 | Iwatani Corporation | Method of concentrating ozone gas and apparatus therefor |
| JP5888908B2 (en) * | 2011-09-09 | 2016-03-22 | 岩谷産業株式会社 | Concentration method of ozone gas |
-
2019
- 2019-06-03 WO PCT/JP2019/022021 patent/WO2020245885A1/en active Application Filing
- 2019-06-03 CN CN201980096748.7A patent/CN113874317B/en active Active
- 2019-06-03 JP JP2019542641A patent/JP6607337B1/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008062534A (en) * | 2006-09-08 | 2008-03-21 | Mimaki Engineering Co Ltd | Printer head of printer apparatus |
| CN101878182A (en) * | 2007-11-30 | 2010-11-03 | 三菱电机株式会社 | Ozone concentrator |
| CN101878183A (en) * | 2007-11-30 | 2010-11-03 | 东芝三菱电机产业系统株式会社 | High-concentrated ozone gas generating device and high-concentrated ozone gas generation method |
| JP2009215164A (en) * | 2009-06-17 | 2009-09-24 | Mitsubishi Electric Corp | Ozone supply method |
| CN108473306A (en) * | 2016-01-28 | 2018-08-31 | 三菱电机株式会社 | Ozone supply means and ozone supply method |
| JP6516941B1 (en) * | 2018-06-07 | 2019-05-22 | 三菱電機株式会社 | Ozone supply apparatus and ozone supply method |
Non-Patent Citations (1)
| Title |
|---|
| 李立峰;郑书忠;周产力;薛群山;陈爱民;张艳芳;: "臭氧化气体增压增浓工艺的研究进展", 工业水处理, no. 03 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2020245885A1 (en) | 2021-09-13 |
| WO2020245885A1 (en) | 2020-12-10 |
| JP6607337B1 (en) | 2019-11-20 |
| CN113874317B (en) | 2024-03-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113874317B (en) | Ozone supply device and ozone supply method | |
| JP5080594B2 (en) | Separation method of gas mixture | |
| CN108473306B (en) | Ozone supply device and ozone supply method | |
| CN112203974B (en) | Ozone supply device and ozone supply method | |
| TWI720164B (en) | Ozone gas concentration method and ozone gas concentration device | |
| JP3769742B2 (en) | Control method of ozone generator | |
| KR102180199B1 (en) | Method for concentrating ozone gas, and apparatus for concentrating ozone gas | |
| JP3769741B2 (en) | Ozone concentration storage device and control method thereof | |
| JP7292554B1 (en) | Ozone supply device and ozone supply method | |
| CN113614031A (en) | Ozone supply device and ozone supply method | |
| JP4126766B2 (en) | Ozone adsorption / desorption device | |
| JP7024916B1 (en) | Ozone supply device and ozone supply method | |
| CN113614026B (en) | Method for operating hydrogen production device and hydrogen production device | |
| JP2023142937A (en) | Gas adsorption device and gas adsorption method | |
| JP2023169520A (en) | Carbon dioxide storage device, carbon dioxide recovery system, and control method for carbon dioxide storage device | |
| JP2008246403A (en) | Gas production apparatus | |
| JPH07256277A (en) | Ozone water making apparatus | |
| KR20010086982A (en) | An apparatus for controlling the oxygen purity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |