CN113865635A - MEMS sensor calibrating device - Google Patents
MEMS sensor calibrating device Download PDFInfo
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- CN113865635A CN113865635A CN202111096021.4A CN202111096021A CN113865635A CN 113865635 A CN113865635 A CN 113865635A CN 202111096021 A CN202111096021 A CN 202111096021A CN 113865635 A CN113865635 A CN 113865635A
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- 230000007246 mechanism Effects 0.000 claims description 26
- 238000001816 cooling Methods 0.000 claims description 22
- 238000010438 heat treatment Methods 0.000 claims description 21
- 239000011521 glass Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
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- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Abstract
The invention discloses an MEMS sensor calibration device, which comprises a calibration chamber, wherein the bottom end inside the calibration chamber is fixedly connected with a calibration table, the middle part of the bottom end of the calibration table is fixedly connected with a pressure sensor, one side above the inside of the calibration chamber is provided with a cold and warm air blower, the middle part of the top end inside the calibration chamber is provided with a temperature detector, two sides of the temperature detector are respectively provided with a fixed block, and the upper end of each fixed block is fixedly connected to the top end inside the calibration chamber, and the MEMS sensor calibration device has the following beneficial effects that: the pressure sensor can compare pressure data at different temperatures, calculate the change amount of the pressure data when the temperature changes, correct the change amount and correct the change amount accurately.
Description
The technical field is as follows:
the invention belongs to the technical field of sensor calibration, and particularly relates to an MEMS sensor calibration device.
Background art:
the MEMS sensor comprises microelectronic devices such as a pressure sensor, a temperature sensor, an acceleration sensor and the like, can be applied to various processing equipment and automation equipment, and can improve the production speed and the flexibility of mechanical operation.
Under the prior art, when the MEMS sensor is used, the data of the pressure sensor often deviates due to the ambient temperature, so that the equipment for installing the pressure sensor delays in operation, and a certain automatic calibration function is set when the pressure sensor is calibrated, but the calibration effect is not good.
The invention content is as follows:
the present invention is directed to provide a calibration apparatus for a MEMS sensor, which solves the problems that when the MEMS sensor is used, data of the pressure sensor is often deviated due to an ambient temperature, and thus, a device on which the pressure sensor is mounted is delayed in operation, and when the pressure sensor is calibrated, a certain automatic calibration function is set by a manufacturer generally, but the calibration effect is not good.
In order to solve the above problems, the present invention provides a technical solution:
a MEMS sensor calibration device comprises a calibration chamber, wherein a calibration table is fixedly connected to the bottom end inside the calibration chamber, a pressure sensor is fixedly connected to the middle portion of the bottom end of the calibration table, a cold-hot air blower is arranged on one side above the inside of the calibration chamber, a temperature measuring meter is arranged in the middle portion of the top end inside the calibration chamber, fixed blocks are arranged on two sides of the temperature measuring meter, the upper ends of the fixed blocks are fixedly connected to the top end inside the calibration chamber, the temperature measuring meter is fixedly connected between the two fixed blocks, a switch mechanism is arranged on one side, away from the cold-hot air blower, of the temperature measuring meter and comprises a balloon, a push rod is contacted with one side of the balloon, a C-shaped plate is arranged outside the push rod and is fixedly connected to the top wall inside the calibration chamber, a movable rod is fixedly connected to the upper end, away from the balloon, of the movable rod penetrates through the upper portion of the C-shaped plate in a sliding manner, the one end fixedly connected with that the carriage release lever is located the C template outside presses the piece, press the piece and keep away from one side of carriage release lever and be provided with the switch, switch and cold-warm air blower electric connection, the pressure data display is installed to one side outer wall that the calibration room is close to cold-warm air blower.
Preferably, an adjusting mechanism is arranged on one side of the cold and warm air blower, the adjusting mechanism comprises a fixed rod, the fixed rod is fixedly connected to the inner wall of the calibration chamber, a lead screw is arranged inside the fixed rod, a sliding block is connected to the lead screw in a threaded manner, one side of the fixed rod, which is opposite to the cold and warm air blower, is of an open structure, the sliding block is slidably connected between two sides inside the fixed rod, the upper end of the lead screw is rotatably connected to the inner wall of the upper end of the fixed rod, the lower end of the lead screw penetrates through the fixed rod and is fixedly connected with a first handle, one end, which is positioned outside the fixed rod, of the sliding block is rotatably connected with a first connecting rod through a hinge seat, one end, which is far away from the sliding block, of the first connecting rod is rotatably connected with the cold and warm air blower, the upper end of the cold and warm air blower is rotatably connected with a second connecting rod through the hinge seat, and the upper end of the second connecting rod is rotatably connected to the inner top wall of the calibration chamber, the output end of the cooling and heating fan is opposite to the upper end of the calibration table.
Preferably, the one end that the push rod was kept away from to the balloon is connected with the connecting pipe, the balloon cup joints on the connecting pipe, the one end that the balloon was kept away from to the connecting pipe is pegged graft and is had the gas bottle, the sealing washer has been glued with the grafting department of connecting pipe to the gas bottle, be connected with the support nest block on the connecting pipe, support nest block fixed connection is on the inner wall top of calibration room, the connecting pipe is pegged graft at support nest block middle part, one side middle part fixedly connected with spring that the balloon was kept away from to the push rod, the one end fixed connection that the push rod was kept away from to the spring is inboard in the C template, the spout has all been seted up to both sides about the C template, the equal sliding connection in the spout in push rod both ends, the one end fixedly connected with ejector pin according to the piece is kept away from to the switch, ejector pin upper end fixed connection is in the inside roof of calibration room.
Preferably, the top both sides of calibration platform all are provided with stop gear, stop gear all includes the stopper, two the rubber pad has all been bonded to one side that the stopper is close to each other, two the equal fixedly connected with sleeve pipe in one side that the stopper was kept away from each other, the equal threaded connection in the inside screw thread connection of sleeve pipe has the screw rod, the equal fixedly connected with side piece in upper end both sides middle part of calibration platform, two the screw rod runs through respectively and rotates to be connected in two side piece middle parts, two the equal fixedly connected with second handle of one end that the screw rod was kept away from each other.
Preferably, the equal fixedly connected with sill bar in sheathed tube bottom middle part, the kerve has all been seted up to the upper end both sides of calibration platform, the equal sliding connection in the kerve in lower part of sill bar.
Preferably, the upper inner wall and the lower inner wall of one side of the interior of the calibration chamber, which is far away from the cold and warm air blower, are fixedly connected with guide plates, the lower wall of one side of the interior of the calibration chamber, which is far away from the balloon, is fixedly connected with guide plates, and the guide plates are at an angle of forty-five degrees with the horizontal direction.
Preferably, one side mid-mounting that the cold and warm air blower was kept away from to the calibration room has electronic air outlet door, one side outer wall upper portion that electronic air outlet door was kept away from to the calibration room can be dismantled and be connected with temperature controller, temperature controller and cold and warm air blower electric connection, the pressure data display can be dismantled with the calibration room outer wall and be connected, pressure data display and pressure sensor electric connection.
Preferably, a chamber door is installed on one side of the calibration chamber, and an observation window is installed on the chamber door, wherein the observation window is made of transparent glass.
The beneficial effects of the invention include:
1. the temperature of the interior of the calibration chamber is changed through the cold and warm air blower, the pressure data of the pressure data display at the time is recorded at different temperatures, the pressure data at different temperatures can be compared, the change amount of the pressure data during temperature change can be calculated, correction can be performed, and correction is accurate.
2. The pressure sensor is provided with the switch mechanism, when the temperature in the calibration chamber is too high, the balloon of the switch mechanism expands to extrude the push rod due to the high temperature, the press block is driven to press the switch, the cold-hot air blower electrically connected with the switch is turned off, the internal temperature can be prevented from continuously rising in time, and the pressure sensor is prevented from being damaged due to the high temperature.
3. The adjusting mechanism is arranged, when the angle of the cold and warm air blower is required to be adjusted, the first handle of the adjusting mechanism is rotated to drive the screw rod to rotate, the sliding block on the screw rod moves to drive the first connecting rod to rotate, the angle of the cold and warm air blower can be changed, the cold and warm air blower can be conveniently aligned to an object on the calibration table, and the temperature of the calibration table is enabled to be close to the air outlet temperature of the cold and warm air blower to the maximum extent.
4. The calibration chamber is provided with the guide plate, and the guide plate in the calibration chamber plays a role in guiding, so that wind flows along the guide plate more quickly, the temperature change speed is accelerated, and the data recording efficiency is improved.
Description of the drawings:
for ease of illustration, the invention is described in detail by the following detailed description and the accompanying drawings.
FIG. 1 is a front view sectional schematic view of the present invention;
FIG. 2 is a schematic view of the adjusting mechanism joint of the present invention;
FIG. 3 is a schematic view of the construction of the switching mechanism junction of the present invention;
FIG. 4 is a schematic structural view of the joint of the C-shaped plate of the present invention;
FIG. 5 is a schematic view of the construction of the sleeve joint of the present invention;
fig. 6 is a schematic front view of the present invention.
In the figure: 1. a calibration chamber; 2. a calibration table; 3. a pressure sensor; 4. a cooling and heating fan; 5. an adjustment mechanism; 51. fixing the rod; 52. a slider; 53. a screw rod; 54. a first grip; 55. a first connecting rod; 56. a second connecting rod; 6. a temperature detector; 7. a fixed block; 8. a switch mechanism; 81. a travel bar; 82. a connecting pipe; 83. a gas bottle; 84. a balloon; 85. c-shaped plates; 86. a push rod; 87. a switch; 88. a top rod; 89. according to blocks; 9. a support sleeve block; 10. a spring; 11. a chute; 12. a limiting mechanism; 121. a limiting block; 122. a rubber pad; 123. a sleeve; 124. a screw; 125. a second grip; 126. a side block; 127. a bottom bar; 128. a bottom groove; 13. a temperature controller; 14. a pressure data display; 15. a baffle; 16. an electric air outlet valve; 17. and (4) an observation window.
The specific implementation mode is as follows:
as shown in fig. 1 to 6, the following technical solutions are adopted in the present embodiment: an MEMS sensor calibration device comprises a calibration chamber 1, a calibration table 2 is fixedly connected to the bottom end inside the calibration chamber 1, a pressure sensor 3 is fixedly connected to the middle portion of the bottom end of the calibration table 2, a cooling and heating fan 4 is arranged on one side above the inside of the calibration chamber 1, the pressure sensor 3 at the bottom end of the calibration table 2 detects the pressure of an object, then signals are transmitted into a signal receiver of a pressure data display 14, the pressure data display 14 displays pressure data, a temperature measuring meter 6 is arranged in the middle portion of the top end inside the calibration chamber 1, fixing blocks 7 are arranged on two sides of the temperature measuring meter 6, the upper end of each fixing block 7 is fixedly connected to the top end inside the calibration chamber 1, the temperature measuring meter 6 is fixedly connected between the two fixing blocks 7, the temperature of the temperature measuring meter 6 can be observed through an observation window 17 on a chamber door, when the temperature of the temperature measuring meter 6 is stable, the pressure data of the pressure data display 14 is recorded, then continuing to adjust the air outlet temperature of the cooling and heating fan 4, recording the data of the pressure data display 14 at different temperatures, conveniently comparing the pressure data at different temperatures, then calculating the change amount of the pressure data when the temperature changes, and correcting the change amount, wherein the side of the thermometer 6 far away from the cooling and heating fan 4 is provided with a switch mechanism 8, the switch mechanism 8 comprises a balloon 84, one side of the balloon 84 is contacted with a push rod 86, the outside of the push rod 86 is provided with a C-shaped plate 85, the C-shaped plate 85 is fixedly connected with the top wall of the inner part of the calibration chamber 1, the upper end of the side of the push rod 86 far away from the balloon 84 is fixedly connected with a movable rod 81, the movable rod 81 is slidably penetrated through the upper part of the C-shaped plate 85, one end of the movable rod 81 positioned outside the C-shaped plate 85 is fixedly connected with a press block 89, one side of the press block 89 far away from the movable rod 81 is provided with a switch 87, the switch 87 is electrically connected with the cooling and heating fan 4, when the temperature in the calibration chamber 1 is overhigh, high temperature can make the gas inflation in the gas bottle 83, and gas makes balloon 84 inflation through connecting pipe 82, can extrude push rod 86 after balloon 84 inflation, and spring 10 compresses thereupon, drives movable rod 81 and presses piece 89 to press switch 87 for cool and warm air blower 4 with switch 87 electric connection closes, can in time avoid inside temperature to continue to rise, and calibration room 1 is close to one side outer wall of cool and warm air blower 4 and installs pressure data display 14.
Wherein, one side mid-mounting that cold and warm air blower 4 was kept away from to calibration room 1 has electronic air outlet 16, one side outer wall upper portion that electronic air outlet 16 was kept away from to calibration room 1 can be dismantled and be connected with temperature controller 13, temperature controller 13 and cold and warm air blower 4 electric connection, pressure data display 14 can be dismantled with 1 outer wall of calibration room and be connected, pressure data display 14 and 3 electric connection of pressure sensor, the air-out temperature through temperature controller 13 control cold and warm air blower 4, pressure data display 14 can show pressure data, continue the air-out temperature of adjustment cold and warm air blower 4 again, record the data of pressure data display 14 under the different temperatures, conveniently contrast the pressure data under the different temperatures.
Wherein, the room door is installed to one side of calibration room 1 and is installed observation window 17 on the room door, and observation window 17 is transparent glass material, can observe the temperature of thermoscope 6 through observation window 17 on the room door.
Wherein, one side of the cooling and heating fan 4 is provided with an adjusting mechanism 5, the adjusting mechanism 5 comprises a fixed rod 51, the fixed rod 51 is fixedly connected with the inner wall of the calibration chamber 1, a screw 53 is arranged inside the fixed rod 51, a slide block 52 is connected with the screw 53 in a threaded manner, one side of the fixed rod 51 opposite to the cooling and heating fan 4 is of an open structure, the slide block 52 is slidably connected between two sides inside the fixed rod 51, the upper end of the screw 53 is rotatably connected with the inner wall of the upper end of the fixed rod 51, the lower end of the screw 53 penetrates through the fixed rod 51 and is fixedly connected with a first handle 54, one end of the slide block 52 positioned outside the fixed rod 51 is rotatably connected with a first connecting rod 55 through a hinged seat, one end of the first connecting rod 55 far away from the slide block 52 is rotatably connected with the cooling and heating fan 4, the upper end of the cooling and heating fan 4 is rotatably connected with a second connecting rod 56 through a hinged seat, the upper end of the second connecting rod 56 is rotatably connected with the top wall inside the calibration chamber 1, the output end of the cooling and heating fan 4 is opposite to the upper end of the calibration platform 2, when the angle of the cooling and heating fan 4 needs to be adjusted, the first handle 54 of the adjusting mechanism 5 is rotated to drive the screw rod 53 to rotate, the slide block 52 on the screw rod 53 moves to drive the first connecting rod 55 to rotate, so that the angle of the cooling and heating fan 4 can be changed, and the cooling and heating fan 4 can be conveniently aligned to an object on the calibration platform 2.
Wherein, the end of the balloon 84 far away from the push rod 86 is connected with the connecting pipe 82, the balloon 84 is sleeved on the connecting pipe 82, the end of the connecting pipe 82 far away from the balloon 84 is spliced with the gas bottle 83, the splicing part of the gas bottle 83 and the connecting pipe 82 is bonded with the sealing ring, the connecting pipe 82 is connected with the supporting sleeve block 9, the supporting sleeve block 9 is fixedly connected with the top end of the inner wall of the calibration chamber 1, the connecting pipe 82 is spliced in the middle part of the supporting sleeve block 9, the middle part of one side of the push rod 86 far away from the balloon 84 is fixedly connected with the spring 10, the end of the spring 10 far away from the push rod 86 is fixedly connected with the inner side of the C-shaped plate 85, the upper side and the lower side of the C-shaped plate 85 are both provided with the chutes 11, the two ends of the push rod 86 are both slidably connected in the chutes 11, the end of the switch 87 far away from the push rod 88 is fixedly connected with the top wall of the inner part of the calibration chamber 1, when the temperature in the calibration chamber 1 is too high, the gas in the gas bottle 83 can be expanded due to high temperature, the air makes the balloon 84 expand through the connecting pipe 82, the push rod 86 is extruded after the balloon 84 expands, the spring 10 is compressed, the moving rod 81 and the pressing block 89 are driven to press the switch 87, the cold and warm air blower 4 electrically connected with the switch 87 is closed, and the internal temperature can be prevented from being continuously increased in time.
Wherein, both sides above the calibration platform 2 are provided with the limiting mechanisms 12, each limiting mechanism 12 comprises a limiting block 121, one side of each limiting block 121 close to each other is bonded with a rubber pad 122, one side of each limiting block 121 far away from each other is fixedly connected with a sleeve 123, the inside of the sleeve 123 is in threaded connection with a screw 124, the middle parts of both sides of the upper end of the calibration platform 2 are fixedly connected with side blocks 126, the two screws 124 respectively penetrate through and are rotatably connected with the middle parts of the two side blocks 126, one ends of the two screws 124 far away from each other are fixedly connected with a second handle 125, an object is placed on the calibration platform 2, the second handles 125 of the two limiting mechanisms 12 are twisted to drive the screws 124 to rotate, so that the sleeve 123 moves, the bottom rod 127 at the bottom end of the sleeve 123 slides in the bottom groove 128, the sleeve 123 is prevented from rotating along with the screws 124, the two sleeves 123 move oppositely to drive the two limiting blocks 121 to clamp the object, so that the object can be stably placed.
Wherein, the equal fixedly connected with sill bar 127 in bottom middle part of sleeve pipe 123, kerve 128 has all been seted up to the upper end both sides of calibration platform 2, and the equal sliding connection in sill bar 128 in sill bar 127's lower part, sill bar 127 of sleeve pipe 123 bottom slide in sill bar 128, avoid sleeve pipe 123 to rotate along with screw rod 124.
Wherein, the equal fixedly connected with guide plate 15 of inner wall about the inside one side that cold and warm fan 4 was kept away from to calibration room 1, the inside one side lower wall fixedly connected with guide plate 15 of balloon 84 is kept away from to calibration room 1, guide plate 15 all is forty-five degrees angles with the horizontal direction, the inside guide plate 15 of calibration room 1 plays the water conservancy diversion effect, it is faster to make wind flow along guide plate 15, accelerate temperature change speed, improve data record's efficiency.
Specifically, the method comprises the following steps: a MEMS sensor calibration device, when using, open the door of the calibration chamber 1, then place the object on the calibration table 2, drive the screw 124 to rotate by twisting the second handle 125 of two limit mechanisms 12, make the sleeve 123 move, the bottom rod 127 of the bottom end of the sleeve 123 slides in the bottom slot 128, avoid the sleeve 123 rotating along with the screw 124, two sleeves 123 move towards each other to drive two limit blocks 121 to clamp the object, avoid the object moving, the pressure sensor 3 of the bottom end of the calibration table 2 detects the pressure of the object, then transmit the signal to the signal receiver of the pressure data display 14, the pressure data display 14 displays the pressure data, then open the cold and warm air blower 4, the cold and warm air blower 4 blows out air, the air temperature of the cold and warm air blower 4 is controlled by the temperature controller 13, the model of the temperature controller 13 is 8617RS, after the cold and warm air blower 4, the temperature of the thermometric meter 6 can be observed through the observation window 17 on the door, when the temperature of the temperature detector 6 is stable, the pressure data of the pressure data display 14 at the moment is recorded, the air outlet temperature of the cooling and heating fan 4 is continuously adjusted, the data of the pressure data display 14 at different temperatures are recorded, the pressure data at different temperatures are conveniently compared, then the change amount of the pressure data when the temperature changes is calculated, the correction can be carried out, when the angle of the cooling and heating fan 4 needs to be adjusted, the first handle 54 of the adjusting mechanism 5 is rotated to drive the screw rod 53 to rotate, the slide block 52 on the screw rod 53 is moved to drive the first connecting rod 55 to rotate, the angle of the cooling and heating fan 4 can be changed, the cooling and heating fan 4 is conveniently aligned to an object on the calibration table 2, the temperature of the calibration table 2 is enabled to be close to the air outlet temperature of the cooling and heating fan 4 to the maximum extent, meanwhile, the guide plate 15 in the calibration chamber 1 plays a role in guiding, and the air flows more quickly along the guide plate 15, accelerate the temperature change speed, improve data record's efficiency, when the high temperature in the calibration room 1, high temperature can make the gas expansion in the gas bottle 83, gas makes balloon 84 inflation through connecting pipe 82, can extrude push rod 86 after the balloon 84 inflation, spring 10 compresses thereupon, drive movable rod 81 and press block 89 to press switch 87, make cold and warm air blower 4 with switch 87 electric connection close, can in time avoid inside temperature to continue to rise, the operator observes behind the high temperature of thermometer 6, open electronic air outlet door 16, can make the inside hot gas flow of calibration room 1 outside, play the cooling effect.
While there have been shown and described what are at present considered to be the fundamental principles of the invention and its essential features and advantages, it will be understood by those skilled in the art that the invention is not limited by the embodiments described above, which are merely illustrative of the principles of the invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
Claims (8)
1. The MEMS sensor calibration device is characterized by comprising a calibration chamber (1), wherein a calibration table (2) is fixedly connected to the bottom end of the interior of the calibration chamber (1), a pressure sensor (3) is fixedly connected to the middle portion of the bottom end of the calibration table (2), a cooling and heating fan (4) is arranged on one side above the interior of the calibration chamber (1), a temperature detector (6) is arranged in the middle portion of the top end of the interior of the calibration chamber (1), fixed blocks (7) are arranged on two sides of the temperature detector (6), the upper ends of the fixed blocks (7) are fixedly connected to the top end of the interior of the calibration chamber (1), the temperature detector (6) is fixedly connected between the two fixed blocks (7), a switch mechanism (8) is arranged on one side, far away from the cooling and heating fan (4), of the temperature detector (6), the switch mechanism (8) comprises a balloon (84), and a push rod (86) is contacted with one side of the balloon (84), the outside of push rod (86) is provided with C template (85), C template (85) fixed connection is in the inside roof of calibration room (1), one side upper end fixedly connected with carriage release lever (81) of balloon (84) are kept away from in push rod (86), carriage release lever (81) slide run through in C template (85) upper portion, carriage release lever (81) are located the outside one end fixedly connected with of C template (85) and press piece (89), one side of keeping away from carriage release lever (81) according to piece (89) is provided with switch (87), switch (87) and cold and warm air blower fan (4) electric connection, calibration room (1) is close to one side outer wall of cold and warm air blower fan (4) and installs pressure data display (14).
2. A MEMS sensor calibration device according to claim 1 wherein: one side of the cold and warm air blower (4) is provided with an adjusting mechanism (5), the adjusting mechanism (5) comprises a fixing rod (51), the fixing rod (51) is fixedly connected to the inner wall of the calibration chamber (1), a lead screw (53) is arranged inside the fixing rod (51), a sliding block (52) is in threaded connection with the lead screw (53), one side of the fixing rod (51) opposite to the cold and warm air blower (4) is of an open structure, the sliding block (52) is in sliding connection between two sides of the inside of the fixing rod (51), the upper end of the lead screw (53) is rotatably connected to the inner wall of the upper end of the fixing rod (51), the lower end of the lead screw (53) penetrates through the fixing rod (51) and is fixedly connected with a first handle (54), one end, located outside the fixing rod (51), of the sliding block (52) is rotatably connected with a first connecting rod (55) through a hinge seat, one end, far away from the sliding block (52), of the first connecting rod (55) is rotatably connected with the cold and warm air blower (4), the upper end of cold and warm air blower (4) is connected with second connecting rod (56) through articulated seat rotation, the upper end of second connecting rod (56) is rotated and is connected in the inside roof of calibration room (1), the output and the calibration platform (2) upper end of cold and warm air blower (4) are relative.
3. A MEMS sensor calibration device according to claim 1 wherein: one end, far away from the push rod (86), of the balloon (84) is connected with a connecting pipe (82), the balloon (84) is sleeved on the connecting pipe (82), one end, far away from the balloon (84), of the connecting pipe (82) is connected with a gas bottle (83) in an inserting mode, a sealing ring is bonded at the inserting position of the gas bottle (83) and the connecting pipe (82), a supporting sleeve block (9) is connected onto the connecting pipe (82), the supporting sleeve block (9) is fixedly connected to the top end of the inner wall of the calibration chamber (1), the connecting pipe (82) is inserted in the middle of the supporting sleeve block (9), a spring (10) is fixedly connected to the middle of one side, far away from the balloon (84), of the spring (10) is fixedly connected to the inner side of the C-shaped plate (85), sliding grooves (11) are formed in the upper side and the lower side of the C-shaped plate (85), and two ends of the push rod (86) are all connected to the sliding grooves (11), one end of the switch (87) far away from the pressing block (89) is fixedly connected with a push rod (88), and the upper end of the push rod (88) is fixedly connected to the inner top wall of the calibration chamber (1).
4. A MEMS sensor calibration device according to claim 1 wherein: the top both sides of calibration platform (2) all are provided with stop gear (12), stop gear (12) all include stopper (121), two one side that stopper (121) are close to each other all bonds rubber pad (122), two the equal fixedly connected with sleeve pipe (123) in one side that stopper (121) kept away from each other, the equal threaded connection in sleeve pipe (123) inside has screw rod (124), the equal fixedly connected with side piece (126) in upper end both sides middle part of calibration platform (2), two screw rod (124) run through respectively and rotate and connect in two side piece (126) middle parts, two the equal fixedly connected with second handle (125) of one end that screw rod (124) kept away from each other.
5. A MEMS sensor calibration device according to claim 4 wherein: the bottom end middle part of sleeve pipe (123) all fixedly connected with sill bar (127), kerve (128) have all been seted up to the upper end both sides of calibration platform (2), the equal sliding connection in sill bar (128) of lower part of sill bar (127).
6. A MEMS sensor calibration device according to claim 1 wherein: the calibration chamber (1) is kept away from equal fixedly connected with guide plate (15) of inner wall about inside one side of cold-hot air blower (4), the calibration chamber (1) is kept away from inside one side lower wall fixedly connected with guide plate (15) of balloon (84), guide plate (15) all are forty-five degrees angle with the horizontal direction.
7. A MEMS sensor calibration device according to claim 1 wherein: one side mid-mounting that cold and warm air blower (4) were kept away from in calibration room (1) has electronic air outlet door (16), one side outer wall upper portion that electronic air outlet door (16) were kept away from in calibration room (1) can be dismantled and be connected with temperature controller (13), temperature controller (13) and cold and warm air blower (4) electric connection, pressure data display (14) can be dismantled with calibration room (1) outer wall and be connected, pressure data display (14) and pressure sensor (3) electric connection.
8. A MEMS sensor calibration device according to claim 1 wherein: the door and install observation window (17) on the door are installed to one side of calibration room (1), observation window (17) are transparent glass material.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111096021.4A CN113865635A (en) | 2021-09-18 | 2021-09-18 | MEMS sensor calibrating device |
| NL2031261A NL2031261B1 (en) | 2021-09-18 | 2022-03-11 | Mems sensor calibration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111096021.4A CN113865635A (en) | 2021-09-18 | 2021-09-18 | MEMS sensor calibrating device |
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| CN102865969A (en) * | 2012-09-28 | 2013-01-09 | 江苏物联网研究发展中心 | Pressure sensor temperature characteristic testing device |
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| NL2031261B1 (en) | 2023-10-11 |
| NL2031261A (en) | 2023-03-27 |
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Application publication date: 20211231 |