CN113847985B - Two-dimensional grating three-range grating spectrometer - Google Patents
Two-dimensional grating three-range grating spectrometer Download PDFInfo
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- CN113847985B CN113847985B CN202111161543.8A CN202111161543A CN113847985B CN 113847985 B CN113847985 B CN 113847985B CN 202111161543 A CN202111161543 A CN 202111161543A CN 113847985 B CN113847985 B CN 113847985B
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- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000001514 detection method Methods 0.000 claims abstract description 7
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- 230000000737 periodic effect Effects 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 239000013307 optical fiber Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 2
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
Abstract
The invention discloses a two-dimensional grating three-range grating spectrometer, which relates to the field of grating spectrometers, and comprises a two-dimensional grating, a detection array and an optical path element, and is characterized in that: the two-dimensional grating is a two-dimensional rectangular lattice asymmetric periodic three-range sub-wavelength grating, and comprises a substrate, a grating and an anti-reflection structure, wherein the substrate is positioned on the bottom surface of the grating; the detection array comprises a CCD receiver, and the CCD receiver receives free space diffraction light generated after passing through the two-dimensional grating; the optical path element comprises a tray and a rotating shaft, and a two-dimensional grating is arranged on the upper surface of the tray; when the rotating shaft rotates, the tray is driven to rotate, so that the switching of the measuring range of the grating spectrometer is realized by utilizing different periods of the two-dimensional grating. The invention has compact structure, wide measuring range and high sensitivity, can be suitable for various complex environments and has low price.
Description
Technical Field
The invention relates to the field of grating spectrometers, in particular to a two-dimensional grating three-range grating spectrometer.
Background
Grating spectrometers are well-established industrial equipment that function to precisely separate the different wavelength components in an input spectrum and measure the power content thereof for different wavelengths. The high-precision spectrum information generated by analysis can be used as input of a subsequent analysis tool, the emission spectrum, reflection spectrum and absorption spectrum information of an input light source or a reflection light source can be obtained from the spectrum information, and the high-precision spectrum information can be used as important basis for light source performance analysis and substance component composition analysis.
With the current demands of high efficiency, miniaturization and integration of optical devices and the development of micro-nano technology and MEMS micro-manufacturing technology, micro-spectrometer technology has become a current popular research direction.
The existing grating spectrometer suffers from the structural problem that the upper limit of wavelength measurement exists, the light with the wavelength larger than the grating period cannot be detected, and the sensitivity and the measuring range are inversely related, so that how to reduce the volume and the cost of the grating spectrometer without sacrificing the accuracy of the spectrometer becomes the research difficulty of the micro spectrometer. There are many micro-spectrometer products on the market that are compact and portable and can cover the visible and near infrared bands. The micro spectrometer can be used for identifying the specific substance molecular content of the object, gemstone analysis, material evidence identification and other fields, and has great practical significance for production and life. However, at present, the price of the products is high, and large-scale popularization cannot be realized.
Therefore, those skilled in the art have been working to develop a compact, simple, low cost grating spectrometer suitable for mass production.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present invention aims to develop a grating spectrometer which has a compact structure, a simple process, and a low cost, and is suitable for mass production.
In order to achieve the above object, the present invention provides a two-dimensional grating three-range grating spectrometer, including a two-dimensional grating, a detection array and an optical path element, which is characterized in that:
the two-dimensional grating is a two-dimensional rectangular lattice asymmetric periodic three-range sub-wavelength grating and comprises a substrate, a grating and an anti-reflection structure, wherein the substrate is positioned on the bottom surface of the grating;
the detection array comprises a CCD receiver, wherein the CCD receiver receives free space diffraction light generated after passing through the two-dimensional grating;
the optical path element comprises a tray and a rotating shaft, and the two-dimensional grating is arranged on the upper surface of the tray; the rotating shaft is positioned at the lower part of the tray, and when the rotating shaft rotates, the tray is driven to rotate, so that the switching of the measuring range of the grating spectrometer is realized by utilizing different periods of the two-dimensional grating.
Further, the two-dimensional grating has a period different in the lateral direction from the longitudinal direction.
Further, the incident signal light may be incident from the grating surface or the substrate surface.
Further, the anti-reflection structure is provided at a spot position of the incident surface when the incident signal light is incident from the substrate surface, and the substrate is a material transparent to the incident light.
Further, the free space diffracted light received by the CCD receiver is either reflected diffraction or transmitted diffraction.
Further, the grating material is a medium or a metal.
Further, the metal is any one of aluminum, silver, titanium and gold.
In the preferred embodiment of the invention, the two-dimensional grating adopts a periodic asymmetric three-range structure design, so that free space diffraction light with a diffraction angle smaller than 90 degrees in air can be generated in three directions and collected by the detection array. And corresponds to three different ranges and resolutions so that larger ranges and finer spectral analysis can be achieved with smaller volumes.
Therefore, compared with the prior art, the invention has the beneficial effects that:
1. the structure is compact, the measuring range is wide, and the measuring range of the traditional grating spectrometer is expanded to the combination of three measuring ranges;
2. the technology is simple, no MEMS structure exists, the cost is low, the technology is applicable to various complex environments, the price is low, and the technology is suitable for mass production;
3. through the combination of different grating periods, the light separation of different wavelength bands can be realized, and the range-selectable function is realized.
The conception, specific structure, and technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, features, and effects of the present invention.
Drawings
FIG. 1 is a perspective view of a grating spectrometer of the present invention;
FIG. 2 is a schematic diagram of a geometric cross-section of a two-dimensional grating according to the present invention;
FIG. 3 is a schematic diagram of a two-dimensional grating according to the present invention;
FIG. 4 is a schematic diagram of three directional periods of a two-dimensional grating according to the present invention;
FIG. 5 is a schematic diagram of a two-dimensional grating lateral diffraction according to the present invention;
FIG. 6 is a schematic diagram of the longitudinal diffraction of a two-dimensional grating according to the present invention;
FIG. 7 is a schematic diagram of two-dimensional grating diagonal diffraction according to the present invention;
fig. 8 is a schematic diagram of three span distributions according to the present invention.
The device comprises a 1-CCD receiver, a 2-two-dimensional grating, a 3-tray, a 4-rotating shaft, a 5-substrate and 6-light to be detected.
Detailed Description
The following description of the preferred embodiments of the present invention refers to the accompanying drawings, which make the technical contents thereof more clear and easy to understand. The present invention may be embodied in many different forms of embodiments and the scope of the present invention is not limited to only the embodiments described herein.
In the drawings, like structural elements are referred to by like reference numerals and components having similar structure or function are referred to by like reference numerals. The dimensions and thickness of each component shown in the drawings are arbitrarily shown, and the present invention is not limited to the dimensions and thickness of each component. The thickness of the components is exaggerated in some places in the drawings for clarity of illustration.
As shown in fig. 1, the invention discloses a two-dimensional grating three-range grating spectrometer, wherein a transparent tray 3 is arranged at the bottom of the grating spectrometer, a two-dimensional grating 2 is arranged at the upper bottom of the tray 3, and a rotating shaft 4 is arranged at the lower part of the tray 3. The grating spectrometer is provided with a CCD receiver 1 on one side, approximately 5cm in length. The light 6 to be measured is generated by focusing and collimating light from an object, is a small light spot, is incident on the two-dimensional grating 2, and diffracts on the two-dimensional grating 2, different wavelengths correspond to different emergent angles, the fully separated diffracted light is incident from a position about 2cm away from the CCD receiver 1, and the different wavelengths are incident on different positions of the CCD receiver 1, namely, the different positions of the CCD receiver 1 correspond to the different wavelengths. When the range needs to be switched, the rotating shaft 4 is rotated, so that diffracted light in the corresponding direction can be irradiated on the CCD receiver 1.
The correspondence between the wavelength of the light 6 to be measured and the position of the CCD receiver 1 can be given by theory, and the specific calculation principle is as follows:
the light 6 to be measured is vertically incident on the two-dimensional grating 2, the diffracted light is collected by the CCD receiver 1, and the value of the wavelength is obtained according to the specific position of the diffracted light on the CCD receiver 1.
The reflected light and normal angle is described by the following formula:
(sin(θ)+sin(α))*T＝m*λ
in the above formula, the respective parameters are described as follows:
alpha: is the included angle between the incident light and the normal;
θ: is the included angle between the reflected light and the normal;
t: is the period of the two-dimensional grating;
m: for the diffraction order, here 1 is taken;
lambda: for this purpose the wavelength of the reflected light.
In practical application, in consideration of assembly errors, the corresponding relationship between the incident position of diffracted light in the CCD receiver 1 and the wavelength needs to be calibrated experimentally, and the specific calibration method is as follows:
the standard light source capable of covering the range is used as incident light, the CCD receiver 1 is replaced by an optical fiber spectrometer, the optical fiber incident end of the spectrometer is placed at different positions, and the peak wavelength of the optical fiber spectrometer is the wavelength corresponding to the position.
As shown in fig. 2, the two-dimensional grating 2 is attached to the central position of the upper bottom surface of the transparent tray 3, and the rotating shaft 4 drives the tray 3 to rotate when rotating, so that the light 6 to be measured can be irradiated on the most suitable position of the two-dimensional grating 2. The two-dimensional grating 2 is a sub-wavelength metal transparent waveguide grating and comprises a substrate 5, a grating and an anti-reflection structure. In a preferred embodiment, the substrate 5 of the two-dimensional grating 2 is made of titanium oxide, the metal coating of the two-dimensional grating 2 may be aluminum, silver, titanium or gold, in this preferred embodiment aluminum, and the transparent waveguide of the two-dimensional grating 2 is made of a material transparent to incident light, such as silicon dioxide or PET.
As shown in fig. 3, the light 6 to be measured is vertically incident on the two-dimensional grating 2, and is diffracted on the two-dimensional grating 2, and the diffracted light is received by the CCD receiver 1.
As shown in fig. 4, the two-dimensional grating 2 has an asymmetric period, and three different equivalent periods can be set: a transverse period, a longitudinal period, and a diagonal period. The two-dimensional grating 2 is attached to the upper surface of the transparent tray 3, and drives the tray 3 to rotate through rotating the rotating shaft 4, so that different periods can be selected, and the change of measuring range is realized. In a preferred embodiment, the ratio of the transverse period to the longitudinal period is set to be 3:4 or 4:3, the period of the transverse grating is 600nm, the period of the longitudinal grating is 800nm, and the equivalent period of the diagonal grating is 480nm.
As shown in fig. 5, the light 6 to be measured is vertically incident on the two-dimensional grating 2, and is diffracted in the lateral direction of the two-dimensional grating 2.
As shown in fig. 6, the light 6 to be measured is vertically incident on the two-dimensional grating 2, and is diffracted in the longitudinal direction of the two-dimensional grating 2.
As shown in fig. 7, the light 6 to be measured is vertically incident on the two-dimensional grating 2, and is diffracted in the diagonal direction of the two-dimensional grating 2.
As shown in fig. 8, the grating spectrometer disclosed by the invention provides three measuring ranges, and the two-dimensional grating 2 has different measuring ranges in the three directions of the transverse direction, the longitudinal direction and the diagonal direction. When the measuring range needs to be switched, the rotating shaft 4 at the lower part of the tray 3 is rotated to realize the switching of the measuring range of the two-dimensional grating 4. In the preferred embodiment, the ratio of the ranges in the longitudinal and transverse directions is 3:4, preferably, the minimum angle of diffraction angle is 30 degrees, and the measuring ranges in the longitudinal direction, the transverse direction and the diagonal line are respectively: the transverse direction is 300 nm-600 nm, the longitudinal direction is 400 nm-800 nm, and the diagonal direction is 240 nm-480 nm.
According to the two-dimensional grating three-range grating spectrometer disclosed by the invention, the two-dimensional grating is of a periodic asymmetric structure, so that free space diffraction light with a diffraction angle smaller than 90 degrees in air can be generated in three directions and collected by the detection array. And corresponds to three different ranges and resolutions so that larger ranges and finer spectral analysis can be achieved with smaller volumes. The dispersion degree of the incident light can be changed by setting parameters of the two-dimensional grating 2 such as grating period in the transverse and longitudinal directions, the refractive index of the plating metal and the like, and the light with different wavelengths in the incident light can be separated and the distance between the adjacent wavelengths can be enlarged through a specific light path.
The foregoing describes in detail preferred embodiments of the present invention. It should be understood that numerous modifications and variations can be made in accordance with the concepts of the invention without requiring creative effort by one of ordinary skill in the art. Therefore, all technical solutions which can be obtained by logic analysis, reasoning or limited experiments based on the prior art by the person skilled in the art according to the inventive concept shall be within the scope of protection defined by the claims.
Claims (7)
1. The utility model provides a three range grating spectrometers of two-dimensional grating, includes two-dimensional grating, surveys array and light path component, its characterized in that:
the two-dimensional grating is a two-dimensional rectangular lattice asymmetric periodic three-range sub-wavelength grating and comprises a substrate, a grating and an anti-reflection structure, wherein the substrate is positioned on the bottom surface of the grating;
the detection array comprises a CCD receiver, wherein the CCD receiver receives free space diffraction light generated after passing through the two-dimensional grating;
the optical path element comprises a tray and a rotating shaft, and the two-dimensional grating is arranged on the upper surface of the tray; the rotating shaft is positioned at the lower part of the tray, and when the rotating shaft rotates, the tray is driven to rotate, so that the switching of the measuring range of the grating spectrometer is realized by utilizing different periods of the two-dimensional grating;
the light to be measured is vertically incident on the two-dimensional grating, the diffracted light is collected by the CCD receiver, and the value of the wavelength is obtained according to the specific position of the diffracted light on the CCD receiver;
the reflected light and normal angle is described by the following formula:
(sin(θ)+sin(ɑ))*T＝m*λ
wherein alpha is the included angle between the incident light and the normal, theta is the included angle between the reflected light and the normal, T is the period of the two-dimensional grating, m is the diffraction order, 1 is taken here, and lambda is the wavelength of the reflected light.
2. The grating spectrometer of claim 1 in which the two-dimensional grating has a period that varies in the transverse and longitudinal directions.
3. The grating spectrometer of claim 1, wherein incident signal light can be incident from either the grating face or the substrate face.
4. A grating spectrometer as claimed in claim 1 or claim 3 wherein the anti-reflection structure is provided at a spot location on the entrance face when incident signal light is incident from the substrate face and the substrate is of a material transparent to incident light.
5. The grating spectrometer of claim 1, wherein the free-space diffracted light received by the CCD receiver is either reflected diffraction or transmitted diffraction.
6. The grating spectrometer of claim 1 in which the grating material is a medium or a metal.
7. The grating spectrometer of claim 6 in which the metal is any one of aluminum, silver, titanium and gold.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111161543.8A CN113847985B (en) | 2021-09-30 | 2021-09-30 | Two-dimensional grating three-range grating spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111161543.8A CN113847985B (en) | 2021-09-30 | 2021-09-30 | Two-dimensional grating three-range grating spectrometer |
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| CN113847985A CN113847985A (en) | 2021-12-28 |
| CN113847985B true CN113847985B (en) | 2024-03-12 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020910A (en) * | 1990-03-05 | 1991-06-04 | Motorola, Inc. | Monolithic diffraction spectrometer |
| JP2009092679A (en) * | 2009-02-04 | 2009-04-30 | River Diagnostics Bv | Optical spectrometer |
| CN102565932A (en) * | 2011-01-14 | 2012-07-11 | 李冰 | Dispersion-corrected arrayed waveguide grating |
| CN104864959A (en) * | 2015-04-16 | 2015-08-26 | 中国电子科技集团公司第四十一研究所 | Method for calibrating spectral wavelength of optical grating rotary light splitting spectrograph |
| CN106017682A (en) * | 2016-05-10 | 2016-10-12 | 天津大学 | Quarter-wave-plate-included depolarization spectrograph |
| KR101901905B1 (en) * | 2017-07-03 | 2018-09-28 | (주) 라이트론 | Spectrometer using grating coupler array and method of spectrum analysis thereof |
-
2021
- 2021-09-30 CN CN202111161543.8A patent/CN113847985B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020910A (en) * | 1990-03-05 | 1991-06-04 | Motorola, Inc. | Monolithic diffraction spectrometer |
| JP2009092679A (en) * | 2009-02-04 | 2009-04-30 | River Diagnostics Bv | Optical spectrometer |
| CN102565932A (en) * | 2011-01-14 | 2012-07-11 | 李冰 | Dispersion-corrected arrayed waveguide grating |
| CN104864959A (en) * | 2015-04-16 | 2015-08-26 | 中国电子科技集团公司第四十一研究所 | Method for calibrating spectral wavelength of optical grating rotary light splitting spectrograph |
| CN106017682A (en) * | 2016-05-10 | 2016-10-12 | 天津大学 | Quarter-wave-plate-included depolarization spectrograph |
| KR101901905B1 (en) * | 2017-07-03 | 2018-09-28 | (주) 라이트론 | Spectrometer using grating coupler array and method of spectrum analysis thereof |
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| CN113847985A (en) | 2021-12-28 |
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