CN113835152B - Waveguide grating and grating spectrometer with adjustable measuring range - Google Patents
Waveguide grating and grating spectrometer with adjustable measuring range Download PDFInfo
- Publication number
- CN113835152B CN113835152B CN202111161525.XA CN202111161525A CN113835152B CN 113835152 B CN113835152 B CN 113835152B CN 202111161525 A CN202111161525 A CN 202111161525A CN 113835152 B CN113835152 B CN 113835152B
- Authority
- CN
- China
- Prior art keywords
- grating
- waveguide
- light
- spectrometer
- tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 230000000737 periodic effect Effects 0.000 claims abstract description 8
- 238000001228 spectrum Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 claims description 2
- 230000003667 anti-reflective effect Effects 0.000 claims 2
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013041 optical simulation Methods 0.000 description 1
- 238000002840 optical waveguide grating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
Abstract
The present application provides a waveguide grating comprising a waveguide and a grating, wherein the waveguide and the grating are connected at a periodic structure of the grating, the waveguide being configured to simultaneously produce free space diffracted light and waveguide mode light when incident light is reflected by the grating. The application also provides a grating spectrometer comprising the waveguide grating, and the function of adjustable range is realized by arranging a plurality of waveguide gratings on the tray. According to the optical path measuring device, the arrangement of the waveguide emergent face and the arrangement of the matched reflecting mirror are adopted, the optical path of reflected light is increased, light with different wavelength components is fully separated in space, and the measuring sensitivity is improved. And the structure is simple, the cost is low, and the device is suitable for mass production.
Description
Technical Field
The present application relates to the field of analytical instruments, and more particularly to a waveguide grating and a range-adjustable grating spectrometer.
Background
Grating spectrometers are well-established industrial equipment that function to precisely separate the different wavelength components in an input spectrum and measure the power content thereof for different wavelengths. The high-precision spectrum information generated by analysis can be used as input of a subsequent analysis tool, the emission spectrum, reflection spectrum and absorption spectrum information of an input light source or a reflection light source can be obtained from the spectrum information, and the high-precision spectrum information can be used as important basis for light source performance analysis and substance component composition analysis.
With the current demands of high efficiency, miniaturization and integration of optical devices and the development of micro-nano technology and MEMS micro-manufacturing technology, micro-spectrometer technology has become a current popular research direction.
The most central optics in grating spectrometers are gratings. Gratings operating in free space, whether of the reflective or transmissive type, have a diffraction capacity range that only contains light of wavelengths less than the grating period, which cannot be detected, which makes the range of the grating spectrometer limited. If the period of the grating is increased to expand the range, the volume and cost of the grating spectrometer are increased, and waste is caused when smaller wavelength is detected; on the other hand, the sensitivity of the grating spectrometer is inversely related to its range, the larger the range is, the lower the sensitivity is. In the prior art, there are some micro spectrometer products which are compact and compact in structure, convenient to carry, and capable of covering visible and near infrared bands. The micro spectrometer can be used for identifying the specific substance molecular content of the object, gemstone analysis, material evidence identification and other fields, and has great practical significance for production and life. However, at present, the design of these products is complex, the price is relatively high, the cheapest price also needs $ 299, and large-scale popularization cannot be realized.
Therefore, those skilled in the art have motivated the development of a waveguide grating and a range-adjustable grating spectrometer to solve the technical problems in the prior art.
Disclosure of Invention
The present application provides a waveguide grating comprising a waveguide and a grating, the waveguide and the grating being connected at a periodic structure of the grating, the waveguide being configured to simultaneously produce free space diffracted light and waveguide mode light when incident light is reflected by the grating.
Further, the waveguide includes an upper surface and a side surface, the incident light is configured to be incident from the upper surface, the reflected light generated by the grating is configured to exit from the upper surface or exit from the side surface, and the upper surface and the side surface are provided with an anti-reflection structure configured to increase the transmittance of the exiting light.
Further, the side surface is perpendicular to the upper surface.
Further, the side surface is an inclined surface and forms a non-perpendicular included angle with the upper surface.
Further, the side surface is a cylindrical surface.
Further, the circle center position corresponding to the cylindrical surface is the incident position of the incident light on the grating.
The application also provides a grating spectrometer with adjustable measuring range. The optical waveguide grating comprises a tray, side walls, a reflecting mirror, a detector and a grating component, and is characterized in that the tray is arranged at the bottom of the spectrometer, the grating component is arranged on the tray, and the grating component is the waveguide grating.
Further, six side walls are sequentially connected and surround to form a six-prismatic shape, wherein five side walls are provided with the reflecting mirrors, and one side wall is provided with the detector.
Further, the tray is a rotatable disc, and three grating components are arranged on the tray.
Further, after being reflected by the grating component, the incident light sequentially passes through the five reflectors to reach the detector.
Compared with the prior art, the application has at least the following technical effects:
1. the grating spectrometer extends the range of the grating spectrometer to a part with the wavelength larger than the grating period by combining the grating of the waveguide.
2. According to the optical path measuring device, the arrangement of the waveguide emergent face and the arrangement of the matched reflecting mirror are adopted, the optical path of reflected light is increased, light with different wavelength components is fully separated in space, and the measuring sensitivity is improved.
3. According to the method, the selection function of various measuring ranges is achieved by arranging the waveguide gratings and the rotatable tray.
4. The device has simple structure and low cost, and is suitable for mass production.
The conception, specific structure, and technical effects of the present application will be further described with reference to the accompanying drawings to fully understand the objects, features, and effects of the present application.
Drawings
FIG. 1 is a schematic diagram of a waveguide grating according to one embodiment of the present application;
FIG. 2 is a schematic diagram of the structure of a waveguide grating according to one embodiment of the present application;
FIG. 3 is a schematic diagram of the structure of a waveguide grating according to one embodiment of the present application;
FIG. 4 is a schematic diagram of the working principle of the waveguide grating according to one embodiment of the present application;
FIG. 5 is a schematic diagram of the working principle of the waveguide grating according to one embodiment of the present application;
FIG. 6 is a schematic diagram of the working principle of a waveguide grating according to one embodiment of the present application;
FIG. 7 is a schematic diagram of a grating spectrometer in one embodiment of the present application;
FIG. 8 is a schematic diagram of a sidewall deployment configuration of a grating spectrometer in one embodiment of the present application;
fig. 9 is an optical simulation of a waveguide grating in one embodiment of the present application.
Detailed Description
The embodiments of the present application are described below with reference to the drawings in the specification, so that the technical contents thereof are more clear and easier to understand. This application may be embodied in many different forms of embodiments and the scope of protection is not limited to the embodiments set forth herein.
One waveguide grating embodiment provided herein is shown in fig. 1. Comprising a waveguide 2 and a grating 1.A periodic structure 11 is provided on the surface of the grating 1 and the waveguide 2 is provided on the surface of the grating 1 having the periodic structure. Preferably, the grating 1 is aluminized with a metal layer on a titanium oxide substrate. The waveguide 2 is made of a material transparent to light of an operating wavelength, such as silica, PET, or the like.
The waveguide 2 has an upper surface 7 and a side surface 3, the side surface 3 being arranged perpendicular to the upper surface 7 in this embodiment. The waveguide 2 is connected to the grating 1 at a periodic structure 11. The incident light 6 is incident on the upper surface 7 of the waveguide 2 and is reflected and diffracted at the periodic structure 11 of the grating 1 to form a diffraction spectrum. For different wavelength components in the incident light 6, the angle between the diffracted light and the normal is also different, so that a series of emergent light with different angles is formed. Due to the existence of the waveguide, free space diffraction light with a diffraction angle smaller than 90 degrees in air and waveguide mode light transmitted inside the waveguide meeting the condition of total reflection of an air interface can be generated simultaneously; the free space diffraction light and waveguide mode light of the grating form spectrum signals which are collected by the detector array at the same time, so that the range of the spectrometer can be expanded, the precision of the spectrometer is improved, and the application range of the spectrometer is expanded.
Specifically, in the present embodiment, a part of the outgoing light 5 is outgoing from the upper surface 7 of the waveguide 2, and another part of the outgoing light 4 is outgoing from the side surface 3 of the waveguide 2. In a similar embodiment as shown in fig. 2, 3, the side surface 3 is a bevel at a non-perpendicular angle to the upper surface 7, or the side surface 3 is a cylindrical surface. When the side surface 3 is beveled and is suitably sized and positioned, both outgoing light 4, 5 is emitted from the side surface 3. When the side surface 3 is a cylindrical surface, the center position corresponding to the cylindrical surface is the incident position of the incident light 6 on the periodic structure 11 of the grating 1, so that the emergent light 4 and 5 is emitted perpendicularly to the side surface 3 regardless of the angle. The upper surface 7 and the side surfaces 3 of the waveguide 2 are provided with anti-reflection structures, such as anti-reflection gratings, at the locations where light is likely to exit. The anti-reflection grating can make diffracted light fully leave the waveguide, and improves the utilization efficiency. The anti-reflection structure can be a one-dimensional line or a two-dimensional lattice structure with a structure period smaller than the ratio of the minimum wavelength of the operating band to the refractive index of the waveguide.
The working principle of the waveguide grating in the present application is as shown in fig. 4 to 6:
incident light is vertically incident on the grating 1 through the waveguide 2, and the angle θ between the reflected light and the normal line is generally described by the following formula:
n 1 *sin(θ)*T＝m*λ
wherein n is 1 The refractive index of the transparent waveguide is θ, the included angle between the reflected light and the normal line, T is the period of the metal grating, m is the diffraction order, 1 is taken here, and λ is the wavelength of the reflected light. This shows that for a conventional free space grating, n 1 =1, the maximum value of the diffraction angle corresponds to λ=t, and the waveguide is introduced so that the maximum value of the diffraction angle corresponds to λ=n 1 T, which is the theoretical basis for the design to promote the wavelength range.
Where h is the thickness of the optical waveguide and L is the length of the optical waveguide. Special purposeOtherwise, θ 0 At a critical angle, the transition of diffracted light from the upper surface and from the side surface corresponds. When diffraction angles theta and theta 0 When different relationships are satisfied, the diffracted light exits into the air in different directions. Since the refractive index n=1 of air, the relationship thereof is as follows:
(1) When theta is as 1 ＜θ 0 I.e. λ=n1 sin (θ 1 ) When T is less than T, the reflected light is emitted from the upper surface of the transparent waveguide, and the included angle between the reflected light and the normal line
(2) When θ=θ 0 When the reflection light is emitted directly from the intersection line of the upper surface and the side surface of the transparent waveguide;
(3) When theta is as 2 ＞θ 0 I.e. λ=n1 sin (θ 2 ) When T > T, the reflected light exits from the side of the transparent waveguide, and the incident angle theta 4 ＝π/2-θ 2 Angle between reflected light and normal
Total reflection angle θ of waveguide 2 FIR Is described by the following formula:
θ FIR ＝arcsin(1/n 1 )
discussion of the conditions under which light of different paths, when reaching the upper or side surfaces, may exit back into the air for receipt by the detector array.
(1) When theta is as 1 ＜θ 0 I.e. λ=n1 sin (θ 1 ) When T < T, the light is emitted from the upper surface, and the incident angle theta to the upper surface 1 Solving can satisfy theta 1 ＜θ FIR Lambda of the relation, lambda < T
(2) When theta is as 2 ＞θ 0 I.e. λ=n1 sin (θ 2 ) When T > T, the reflected light exits from the side of the transparent waveguide, and the incident angle theta 4 ＝π/2-θ 2 Solving can satisfy theta 4 ＜θ FIR Lambda of the relation, get
According to the above discussion, in order to ensure that all wavelengths in the range can exit from the upper surface or the side, the range is not broken, and the minimum value of the side wavelength is required to be smaller than the maximum value of the upper surface wavelength, namelySolving to obtain n 1 ＜1.618。
The discussion above gives an upper limit to the refractive index of the waveguide material, but does not discuss the effect of the waveguide geometry, here the geometry design is discussed further.
Discussion of angles and θ 0 Two beams of light close together, θ 0 For the critical angle mentioned above, noteThe angles are slightly larger than or slightly smaller than theta 0 The physical meaning of the two light beams corresponds to the maximum wavelength light of the upper surface and the minimum wavelength light of the side surface respectively. The geometric parameters of the waveguide need to ensure that the total internal reflection does not occur when the two beams of light are respectively incident on the upper surface and the side surface. Column write corresponding Condition->At the same time substitute->Solving to obtainAt the same time, in order to ensure the presence of h/L, it is necessary to ensure +.>Further solving to obtain n 1 ＜1.414。
In summary, the waveguide material satisfies n 1 < 1.414 and waveguide geometry satisfying When the light with full wavelength is emitted from the upper surface and the side surface of the waveguide, the grating can maximally distinguish the wavelength from n in the waveguide 1 T light, the two are combined, the working wavelength range of the grating system can be expanded, and therefore the measuring range of the measuring system is improved.
The discussion above has largely verified that the design can promote a range of wavelengths that can be resolved by the grating. Furthermore, the incident surface and the emergent surface of the waveguide should be provided with anti-reflection structures to improve the transmission efficiency.
Further, as shown in fig. 5, the side surface 3 of the grating 2 may be configured as an inclined plane, the diffracted light is emitted from the inclined plane, the emission angle and the diffraction angle are in a one-to-one correspondence, and the angles corresponding to different wavelengths do not overlap.
Further, as shown in fig. 6, the side surface 3 of the grating may be configured as a cylindrical surface, and the incident position of the incident light is a center position corresponding to the cylindrical surface. When the diffracted light exits from the cylindrical surface, normal incidence is carried out on the cylindrical surface, and the direction is not changed, so that the exit angle and the diffraction angle form a one-to-one correspondence, and the angles corresponding to different wavelengths are not overlapped.
Fig. 7-8 illustrate a range-adjustable grating spectrometer employing a waveguide grating in this embodiment. The grating spectrometer is generally hexagonal prism-shaped, including sidewalls and a bottom. The six side walls and the bottom enclose a hexagonal prismatic space. Wherein a circular tray 14 is provided at the bottom, and the circular tray 14 is rotatably connected to the bottom through a rotation shaft 13. A grating member is provided on the circular tray 14. Preferably, the grating element is a waveguide grating as described in this embodiment. As shown in fig. 7, preferably three grating elements 11.A, 11.B, 11.C are provided. Six side walls are arranged perpendicular to the bottom, one of the side walls 7 being provided with a detector 8. Preferably, the detector 8 is a CCD with a rectangular detection surface. The incident light 6 is collimated composite light from the object to be measured, and has a plurality of wavelength components, and thus, after being reflected by the grating members 11.A, 11.B, 11.C, diffraction spectra are generated. If the diffraction spectrum emitted from the grating elements 11.A, 11.B, 11.C is directly irradiated to the detector 8, the light of different wavelength components is spatially separated by a relatively short distance, which is difficult to distinguish by the detector 8 and affects the detection sensitivity, so that the other five side walls in this embodiment are provided with the reflecting mirrors 10, and the emitting reflecting mirrors 15 are also provided near the working positions of the grating elements 11.A, 11.B, 11.C. In the diffraction spectra emerging from the grating elements 11.A, 11.B, 11.C, the light of the different wavelength components already has a certain angular distribution, and after passing through the emerging mirrors, it passes in turn through five mirrors 10 arranged on the side walls, increasing the optical path, so that the angular distribution is converted into a spatial distribution. In this embodiment, preferably, after reflection by the two exit mirrors 16.A, 16.B, the diffraction spectrum is incident on the mirror 10 disposed on the side wall at an incident angle of 60 °, and sequentially passes through reflection by the five mirrors 10 counterclockwise, and then reaches the detector 8. In other similar embodiments, a suitable number of exit mirrors may be provided, and the reflections may be transmitted through the side wall mounted mirrors 10 in other sequences. Finally reaching the detector 8, the detector 8 is already able to clearly distinguish between light of different wavelength components in the diffraction spectrum. Preferably, a plurality of grating elements 11.A, 11.B, 11.C arranged on a circular tray 14 correspond to different ranges. The range adjustment of the grating spectrometer can be achieved by moving the different grating elements to the working position by rotating the tray 14. In this embodiment three grating elements are provided, and in other similar embodiments other suitable numbers of grating elements may be provided. Because the measurement sensitivity of the grating spectrometer is inversely related to the measuring range, the multi-range arrangement of the embodiment can provide wide-range measurement while still maintaining the measurement sensitivity under the condition of small-range measurement.
Fig. 9 shows a diffraction pattern obtained using commercially available software LightTools for the waveguide grating shown in fig. 3. The period of the grating 1 was set to 750.00nm and the height of the waveguide 2 was 2.00mm. The radius of the cylindrical side surface 3 is 2.00mm, the wavelength range of the incident composite light is 400.00 nm-1200.00 nm, and the spot diameter is 0.10mm. The refractive index of the waveguide 2 is 1.50 and the distance from the center point of the incident light to the side is 2.00mm. At this time, the total reflection angle of the waveguide 2 was 41.81 °. On the cylindrical side surface of the waveguide 2, the diffracted light exits from the cylindrical side surface 3 from the center of the circle, and an absorption structure is added on the other side of the waveguide, so that the diffracted light exits from the cylindrical side surface only, and the interference on the detector is reduced.
Preferred embodiments of the present application are described in detail above. It should be understood that numerous modifications and variations can be made in accordance with the concepts of the present application by one of ordinary skill in the art without undue burden. Therefore, all technical solutions which can be obtained by logic analysis, reasoning or limited experiments based on the prior art by the person skilled in the art according to the conception of the present application shall be within the scope of protection defined by the claims.
Claims (8)
1.A waveguide grating comprising a waveguide and a grating, wherein the waveguide and the grating are connected at a periodic structure of the grating, the waveguide being configured to generate two beams of diffracted light in free space and in the waveguide when incident light is reflected by the grating, the waveguide material satisfying n 1 < 1.414 and the waveguide geometry satisfiesWherein n is 1 The refractive index of the transparent waveguide is h, the thickness of the optical waveguide is h, and the length of the optical waveguide is L.
2. The waveguide grating of claim 1, wherein the waveguide comprises an upper surface and a side surface, incident light is configured to be incident from the upper surface, reflected light generated by the grating is configured to exit from the upper surface, or to exit from the side surface, the upper surface and the side surface having anti-reflective structures disposed thereon, the anti-reflective structures configured to increase the transmittance of the exiting light.
3. The waveguide grating of claim 2 wherein the side surface is perpendicular to the upper surface.
4. The waveguide grating of claim 2 wherein the side surfaces are beveled at a non-perpendicular angle to the upper surface.
5. The waveguide grating of claim 2 wherein the side surface is cylindrical.
6. The waveguide grating according to claim 5, wherein the circle center position corresponding to the cylindrical surface is the incident position of the incident light on the grating.
7. A range-adjustable grating spectrometer comprising a tray, side walls, a reflector, a detector and a grating component, wherein the tray is arranged at the bottom of the spectrometer, the grating component is arranged on the tray, and the grating component is the waveguide grating of claim 6; the grating spectrometer is provided with six side walls, the side walls are sequentially connected and surround into a hexagonal prism shape, the reflecting mirrors are arranged on the five side walls, and the detector is arranged on one side wall; an emergent reflector is arranged near the working positions of the three grating components; the tray is a rotatable disc, and three grating components are arranged on the tray; in the diffraction spectrum emitted from the three grating components, light with different wavelength components has certain angular distribution, and after passing through the emitting reflectors, the light sequentially passes through five reflectors arranged on the side wall, so that the optical path is increased, and the angular distribution is converted into spatial distribution; the three grating components correspond to different measuring ranges, and the measuring range of the grating spectrometer can be adjusted by rotating the tray to move different grating components to working positions.
8. The adjustable range grating spectrometer of claim 7, wherein incident light is reflected by said grating elements and then sequentially passes through five of said mirrors to said detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111161525.XA CN113835152B (en) | 2021-09-30 | 2021-09-30 | Waveguide grating and grating spectrometer with adjustable measuring range |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111161525.XA CN113835152B (en) | 2021-09-30 | 2021-09-30 | Waveguide grating and grating spectrometer with adjustable measuring range |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113835152A CN113835152A (en) | 2021-12-24 |
| CN113835152B true CN113835152B (en) | 2024-03-12 |
Family
ID=78967820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111161525.XA Active CN113835152B (en) | 2021-09-30 | 2021-09-30 | Waveguide grating and grating spectrometer with adjustable measuring range |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113835152B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1158671A (en) * | 1994-09-09 | 1997-09-03 | 狄肯研究公司 | Laser with electrically-controlled grating reflector |
| KR101901905B1 (en) * | 2017-07-03 | 2018-09-28 | (주) 라이트론 | Spectrometer using grating coupler array and method of spectrum analysis thereof |
| CN109540807A (en) * | 2018-10-23 | 2019-03-29 | 京东方科技集团股份有限公司 | Spectrometer and micro-total analysis system |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9612155B2 (en) * | 2004-03-20 | 2017-04-04 | Electronic Photonic Ic Inc. (Epic Inc.) | Curved grating spectrometer and wavelength multiplexer or demultiplexer with very high wavelength resolution |
| US10067293B2 (en) * | 2014-03-07 | 2018-09-04 | Transfert Plus, Societe En Commandite | Mirror based micromechanical systems and methods |
| US10852530B2 (en) * | 2017-12-08 | 2020-12-01 | Transfert Plus, Societe En Commandite | Micro-motor based swept wavelength optical components |
-
2021
- 2021-09-30 CN CN202111161525.XA patent/CN113835152B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1158671A (en) * | 1994-09-09 | 1997-09-03 | 狄肯研究公司 | Laser with electrically-controlled grating reflector |
| KR101901905B1 (en) * | 2017-07-03 | 2018-09-28 | (주) 라이트론 | Spectrometer using grating coupler array and method of spectrum analysis thereof |
| CN109540807A (en) * | 2018-10-23 | 2019-03-29 | 京东方科技集团股份有限公司 | Spectrometer and micro-total analysis system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113835152A (en) | 2021-12-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7245795B2 (en) | Optical device incorporating a tilted bragg grating | |
| US20070263220A1 (en) | Optical Measurement System with Simultaneous Multiple Wavelengths, Multiple Angles of Incidence and Angles of Azimuth | |
| CN103528679B (en) | A kind of miniature mixing light-dividing device | |
| EP0059706B1 (en) | Dispersive optical device | |
| CN1650151B (en) | Optical spectrometer | |
| CN105814417A (en) | Spectroscopic unit and spectroscopic device using same | |
| US9638635B2 (en) | Spectrometer for analysing the spectrum of a light beam | |
| CN103575661A (en) | Optical measurement system with vertical and oblique incidence measurement functions | |
| CN113835152B (en) | Waveguide grating and grating spectrometer with adjustable measuring range | |
| EP3769058A1 (en) | Optical device and spectrometer comprising such a device | |
| CN101369015B (en) | Light splitting apparatus of wind detection laser radar based on dual-edge detection | |
| US9494419B2 (en) | Beam direction sensor | |
| CN103575230B (en) | Optics no color differnece focusing system | |
| US7130045B2 (en) | Monochromator and method of use | |
| CN202433089U (en) | Low-stray light polychromator | |
| JP3141106B2 (en) | Convergent light incidence type spectrometer using spherical diffraction grating | |
| JPS6212994Y2 (en) | ||
| CN113847985B (en) | Two-dimensional grating three-range grating spectrometer | |
| KR101884118B1 (en) | Spectrometer based on transmission diffraction grating | |
| JP2005504318A (en) | measuring device | |
| US4907887A (en) | High resolution interferometer with high etendue | |
| JP2001221688A (en) | Spectroscope | |
| CN114812396B (en) | Spectrum confocal measurement system | |
| CN102778440A (en) | Total-reflection type optical system of flue gas concentration analyzer | |
| CN114166795A (en) | Multi-channel pool construction method shared by multi-wavelength lasers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |