CN112964692A - Raman spectrum device - Google Patents
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
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Abstract
The Raman spectrum device provided by the invention has the advantages of simple structure, reasonable design and convenience in use. The Raman spectrum device provided by the invention comprises a laser, a beam expanding and collimating lens, a first band-pass filter, a converging lens, a second band-pass filter, a tunable filter and a spectrometer, wherein the laser emits laser; the beam expanding and collimating lens collimates the laser; the first band-pass filter is positioned on the light path of the laser and used for purifying the laser; the converging lens focuses the laser to a sample to be detected to excite Raman scattering light, and the Raman scattering light is collimated; the first band-pass filter filters the Raman scattered light collimated by the convergent lens, and removes Rayleigh scattered light in the Raman scattered light; the second band-pass filter removes Rayleigh scattered light in the Raman scattered light for the second time and transmits the Raman scattered light; the tunable filter is used for tuning the transmitted Raman scattering light, and the wavelength tuning formula of the tunable filter is as follows
。
Description
Technical Field
The invention relates to the field of spectral analysis, in particular to a Raman spectrum device.
Background
Since the raman scattering signal of a substance is weak, its signal intensity is one millionth of the rayleigh scattering signal intensity. Therefore, in order to improve the accuracy and sensitivity of raman spectroscopy detection, the raman spectroscopy apparatus needs to reduce the entry of rayleigh scattered light into the spectrometer as much as possible, and needs to improve the efficiency of collection and utilization of raman scattered signals as much as possible. The rayleigh scattering light is reduced by adopting a high-quality optical filter, but the cost of the high-quality optical filter is too high to be popularized in a large scale; or the collection area of Raman scattering light is increased by using an optical fiber bundle formed by binding a plurality of optical fibers at the output end instead of a single optical fiber, or a plurality of collection channels are adopted, the collection efficiency of Raman scattering is improved through multiple angles and multiple channels, but when a larger collection area is required to be obtained, the excitation area of a sample to be detected needs to be amplified, the focal lengths of a converging lens and a coupling lens corresponding to the excitation area need to be increased, the volume of the whole Raman device is increased, the multi-channel and multi-angle collection mode is obviously not beneficial to the miniaturization of the system, and the assembly and debugging are more complicated.
Disclosure of Invention
Therefore, in order to overcome the disadvantages of the prior art, the invention provides a raman spectroscopy device with simple structure, reasonable design and convenient use.
In order to achieve the above object, the present invention provides a raman spectroscopy apparatus, comprising a laser, a beam expanding collimating lens, a first band pass filter, a converging lens, a second band pass filter, a tunable filter, and a spectrometer, wherein the laser emits laser light; the beam expanding and collimating lens collimates the laser; the first band-pass filter is positioned on the light path of the laser and used for purifying the laser; the converging lens focuses laser on a sample to be detected to excite Raman scattering light, and the Raman scattering light is collimated; the first band-pass filter filters the Raman scattered light collimated by the converging lens, and removes Rayleigh scattered light in the Raman scattered light; the second band-pass filter removes Rayleigh scattered light in the Raman scattered light for the second time and transmits the Raman scattered light; the tunable filter is used for tuning the transmitted Raman scattering light and is provided with a rotatable rotating optical filter, the rotating angle range of the rotating optical filter is 0-70 degrees, and the wavelength tuning formula of the tunable filter is
m is the interference dimension, n is the refractive index of the filter spacer, d is the physical thickness of the filter spacer, n0Is the refractive index of the transparent liquid, theta0Is the angle of incidence in the transparent liquid; the spectrometer collects the tuned raman scattered light to generate a raman signal.
In one embodiment, the tunable filter comprises: the shell is provided with an accommodating cavity, and transparent parts for allowing the incident light to pass are arranged at two ends of the shell; the transparent liquid is filled in the accommodating cavity in the shell, has a refractive index larger than 1 and is used for adjusting the wavelength variation range of the incident light; and the rotary optical filter is arranged in the accommodating cavity, is fixed on the shell through a rotating shaft, is driven to rotate by the shell, and is used for tuning the incident light after light splitting to obtain tuned light.
In one embodiment, the transparent liquid is water or silicone oil.
In one embodiment, the spectrometer comprises: a spectrum modulation plate for modulating the light transmitted by the optical system; and the array sensor responds to the modulated light to generate photoelectric response, and performs data processing on the photoelectric response to obtain spectral distribution information of the light.
In an embodiment, the photo-electric response of the picture elements of the array detector is modulated such that different picture elements of the array detector have different photo-electric response curves for light in the spectral range under investigation.
In one embodiment, the picture elements are provided with a film layer with continuously changing transmittance response, so that different picture elements have one-to-one spectral transmittance.
In one embodiment, the film layer is formed by a coating method.
In one embodiment, the spectrum modulation panel is formed by any one of ion implantation, ion exchange, or printing.
In one embodiment, the spectrometer comprises: the array sensor is used for responding to light transmitted by the optical system to generate photoelectric response, and performing data processing on the photoelectric response to obtain spectral distribution information of the light, wherein pixels are arranged on the array sensor, and a film layer is arranged on the array sensor, so that different pixels of the array detector have one-to-one corresponding spectral transmittance, and the array sensor has different photoelectric response curves for the light in the researched spectral range.
Compared with the prior art, the invention has the advantages that: on the basis of keeping Raman light, the first band-pass filter and the second band-pass filter are used for filtering and attenuating Rayleigh scattering light, so that the spectral identification sensitivity is improved, and the identification equipment is simple in structure, small in size, low in cost and improved in portability; and the working wave band of a single channel is expanded through the tunable filter, so that the wavelength variation range can reach the working range of 80-120 nm, the system structure is further simplified, the performance is improved, and the cost is reduced.
Drawings
Fig. 1 is a schematic structural diagram of a raman spectroscopy apparatus in an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
As shown in fig. 1, the raman spectroscopy apparatus 100 includes a laser 10, an expanded beam collimating lens 20, a first bandpass filter 30, a converging lens 40, a second bandpass filter 50, a tunable filter 70, and a spectrometer 60.
The laser 10 emits laser light. The laser 10 may be a narrow linewidth semiconductor laser with fiber output.
The beam expanding and collimating lens 20 collimates the laser light. The beam expanding and collimating lens 20 may be one of a single lens, a compound lens group, an achromatic objective lens, a flat field objective lens, and a fresnel lens. In the present embodiment, the beam expanding and collimating lens 20 is a spherical lens.
The first bandpass filter 30 is located on the light path of the laser, and can purify the laser and collimate the Raman scattered light of the convergent lensThe rayleigh scattered light in the raman scattered light was filtered out. The first bandpass filter 30 may be a narrowband bandpass filter nbpf (narrow bandpass filter). The first bandpass filter 30 is prepared by adopting the principle of light wave interference, and the narrowband bandpass filter is aligned with the central wavelength lambda0±2Δλ0.1The nearby spectrum is transmitted. Delta lambda0.1Is the half width, and represents the width of the wavelength of the passband where the transmission peak is 10% of the peak. Delta lambda0.1/λ0＝0.1。
The converging lens 40 focuses the laser light on the sample 1 to be measured to excite the raman scattering light, and collimates the raman scattering light. The converging lens 40 may be one of a single lens, a compound lens group, an achromatic objective lens, a field flattener objective lens, and a fresnel lens. In the present embodiment, the condenser lens 40 is a spherical lens.
The second band pass filter 50 removes the rayleigh scattered light of the raman scattered light for the second time, and transmits the raman scattered light. The second bandpass filter 50 may be a narrowband bandpass filter. In the present embodiment, the first bandpass filter 30 and the second bandpass filter 50 are the same narrowband bandpass filter.
The raman scattered light transmitted by the tunable filter 70 is tuned so that the wavelength variation range of the tuned raman scattered light is within 80nm to 120 nm. Tunable filter 70 includes a housing 71, a transparent liquid 72, and a rotating filter 73. The rotation angle range of the rotary filter is 0-70 degrees, and the wavelength tuning formula of the tuning filter 70 is
m is the interference dimension, n is the refractive index of the filter spacer, d is the physical thickness of the filter spacer, n0Is the refractive index of the transparent liquid, theta0Is the angle of incidence in the transparent liquid.
The housing 71 has a receiving cavity, and both ends are provided with transparent portions for passing incident light. Both ends of the housing may be transparent portions entirely, or may be transparent at a position matching the optical path of the incident light.
The transparent liquid 72 is filled in the containing cavity in the housing, has a refractive index greater than 1, and is used for adjusting the wavelength variation range of incident light. Different liquids can tune incident light of different wavelength bands, and the wavelength variation range of the incident light can be adjusted by replacing the liquid. The transparent liquid may be water, silicone oil, etc., preferably silicone oil. Because the viscosity of the silicone oil changes little with the temperature, the rotation of the rotary filter is little influenced by the external temperature and the like, and the rotary filter can adapt to more application environments.
The rotary filter 73 is disposed in the accommodating cavity, fixed to the housing through a rotating shaft, and driven to rotate by the housing, and is used for tuning the split incident light to obtain tuned light. The rotation angle range of the rotating optical filter is 0-70 degrees, and the central wavelength lambda of the transmission band of the narrow-band interference optical filter0Satisfy ndcos theta 2m lambda0，m＝1,2,···；nsinθ＝n0sinθ0Therefore, it is
m is the interference dimension, n is the refractive index of the filter spacer, d is the physical thickness of the filter spacer, n0Is the refractive index of the transparent liquid, theta0Is the angle of incidence in the transparent liquid. According to
It can be seen that with theta0Increase of center wavelength λ0And the center wavelength is reduced, thereby realizing the adjustment of the center wavelength. Theta0Is limited in the range of variation of (0) is not more than theta0≤θ0m，θ0mIs less than pi/2. Corresponding center wavelength λ0In a regulation range of
At theta0mUnder certain conditions, the range of center wavelengths can be broadened by adjusting the refractive index of the transparent liquid in the tunable filter.
The spectrometer 60 collects the raman scattered light and generates a raman signal. The spectrometer 60 may be constituted by an array detector.
The working flow of the Raman spectrum device is as follows:
emitted by a laser 10The excitation light is collimated by the beam expanding and collimating lens 20, passes through the first band-pass filter 30, and then is incident on the sample through the converging lens 40, the sample generates raman scattering, and the converging lens 40 receives a part of scattered light, collimates the scattered light and then emits the scattered light to the first band-pass filter 30. The first band pass filter 30 transmits most of the rayleigh scattering, the remaining rayleigh scattering energy of about 0.1% is reflected to the second band pass filter 50 together with the raman scattering, the second band pass filter 50 reflects the raman light to consume the remaining rayleigh scattering, and the rayleigh light attenuates to about 10 after the two reflections-6Whereas raman light is not attenuated. The raman scattered light hits the spectrometer 60 to generate a corresponding photoelectric signal, and the photoelectric signal is correspondingly calculated to obtain spectral information, thereby realizing the acquisition of the raman signal.
In the Raman spectrum device, the first band-pass filter and the second band-pass filter are used for filtering and attenuating Rayleigh scattering light on the basis of keeping Raman light, so that the spectrum identification sensitivity is improved, and the identification equipment has the advantages of simple structure, small volume, low cost and improved portability; and the working wave band of a single channel is expanded through the tunable filter, so that the wavelength variation range can reach the working range of 80-120 nm, the system structure is further simplified, the performance is improved, and the cost is reduced.
In another embodiment, the shaft may be continuously rotated by a motor or manually rotated.
The rotating shaft drives the optical filter to rotate, so that the included angle between the optical filter and the light beam can be changed, the wavelength of transmitted light is changed, the structure is simple and stable, and the requirement on the structural strength is low.
In another embodiment, spectrometer 60 may be constructed from an array detector in which the photo-electric response of the pixels of the array detector are modulated such that different pixels of the array detector have different photo-electric response curves for light in the spectral range of interest.
The photoelectric response of spectrometer 60 can be used
Is expressed e (i) is outputThe photoelectric response is that e (I, lambda) is the photoelectric response of the ith pixel corresponding to the monochromatic light with the incident wavelength lambda one by one, I is 1,2, … N, N is the number of pixels, I (lambda) is the incident light intensity, lambda is the wavelength of the incident light, and lambda is the wavelength of the incident light1≤λ≤λ2，λ1Is the minimum wavelength, λ, of the input light2Is the maximum wavelength of the input light. When i is1≠i2Time, function e (i)1λ) ≠ function e (i)2,λ)，i1,i2＝1,2,…N，e(i1λ) is the i-th1Photoelectric response function of individual pixel element corresponding to monochromatic light of unit intensity with incident wavelength of lambda, e (i)2λ) is the i-th2And the photoelectric response function of each pixel element corresponding to the monochromatic light with the unit intensity of the incident wavelength lambda.
The spectrometer 60 may include a spectrum modulation board 61 and an array sensor 62.
The spectrum modulation plate 61 modulates the incident light. The transmittance of the spectrum modulation plate 61 is not constant at 0. The transmittance (or reflectance) of the spectrum modulation plate 61 changes in a prescribed manner depending on the spatial position and the wavelength of light. The modulation mode of the spectrum modulation plate can be a film coating mode, but is not limited to film coating, and can also be formed by any other mode such as ion implantation, ion exchange or printing.
When the spectrum modulation board is prepared in a coating mode, the spectrum modulation board can modulate the transmittance (or the reflectivity) of the spectrum modulation board by adjusting the thickness of the coating.
The array sensor 62 generates a photoelectric response in response to the incident light modulated by the spectrum modulation plate 61. The array sensor 62 may be a common CMOS or CCD chip. The CMOS (or CCD) chip is provided with a plurality of pixels 621 that generate photoelectric responses independently of each other. The pixels 621 may also be provided with a film layer having a transmittance response that continuously changes, so that different pixels have a one-to-one spectral transmittance. Wherein, the photoelectric response output of each pixel 621 on the spectrum detection device to the received light is
I is 1,2, … … N, N is the number of pixels, I (lambda)i) Is the wavelength lambda of the light to be measuredjThe intensity distribution of (a).
The film layers on the spectrum modulation board and the array sensor can be generated by adopting chemical coating or physical coating, and the final measured spectrum distribution of each pixel in the array sensor accords with the following formula:
I(λj)＝[e(i,λj)]-1[e(i)]，
wherein e (i, λ)j) Is the ith pixel element and the incident wavelength is lambdajThe photoelectric response corresponding to the monochromatic light of unit intensity,
[e(i,λj)]-1is [ e (i, λ)j)]The inverse of the matrix of (a) is,
e (i) is the output photoelectric response.
In another embodiment, the spectrometer 60 may only include an array sensor, which may be provided with a coating on each pixel element, so that the photoelectric response of each pixel element satisfies the one-to-one spectral response relationship; the sensor can also be provided with a coating on the window of the spectrum detection device, so that the pixels below the window output the spectrum information corresponding to the one-to-one spectral response. The film layer can be generated on the picture element by means of optical coating or photolithography.
Or a film layer with continuously changed transmissivity response can be coated on a window, into which the incident light of the sensor of the spectrum detection device enters, in an optical coating mode or other modes, so that different pixels behind the film layer have one-to-one corresponding spectrum transmissivity. The product of the spectral transmittance function and the spectral response function of the pixel itself determines the spectral response matrix of the device.
Different pixels have one-to-one spectral transmittance with respect to incident light of different wavelengths, and the different pixels have different transmittance curves for monochromatic light within the spectral range under study, so that the different pixels have different photoelectric response curves for monochromatic light within the spectral range under study.
In the raman spectrum device, the spectral resolution of the spectrometer is only related to the number of pixels, and the higher the number of pixels is, the higher the spectral resolution is. However, the relation between the spectral resolution and the volume of the pixel and the volume of the detector is not large, so that a complex optical system is not needed in the mode of acquiring the spectrum. The Raman spectrum device of the embodiment has a simple structure, the light splitting device in the spectrometer is only an array spectrum detection device which modulates the spectral response of the pixel, the volume can be set according to the requirement, and no moving part is arranged, so that the structure is firm and compact, and the manufacturing process is simple. Moreover, each pixel can receive light with all wavelengths and generate photoelectric response during operation, so that under the same condition, the light flux analyzable by the Raman spectrum device is far higher than that analyzable by the existing equipment, and detection and analysis of weak signals in incident light are facilitated.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention. The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (9)
1. A Raman spectrum device is characterized by comprising a laser, a beam expanding and collimating lens, a first band-pass filter, a converging lens, a second band-pass filter, a tunable filter and a spectrometer,
the laser emits laser light;
the beam expanding and collimating lens collimates the laser;
the first band-pass filter is positioned on the light path of the laser and used for purifying the laser;
the converging lens focuses laser on a sample to be detected to excite Raman scattering light, and the Raman scattering light is collimated;
the first band-pass filter filters the Raman scattered light collimated by the converging lens, and removes Rayleigh scattered light in the Raman scattered light;
the second band-pass filter removes Rayleigh scattered light in the Raman scattered light for the second time and transmits the Raman scattered light;
the tunable filter is used for tuning the transmitted Raman scattering light and is provided with a rotatable rotating optical filter, the rotating angle range of the rotating optical filter is 0-70 degrees, and the wavelength tuning formula of the tunable filter is
m is the interference dimension, n is the refractive index of the filter spacer, d is the physical thickness of the filter spacer, n0Is the refractive index of the transparent liquid, theta0Is the angle of incidence in the transparent liquid;
the spectrometer collects the tuned raman scattered light to generate a raman signal.
2. The raman spectroscopy apparatus of claim 1, wherein the tunable filter comprises:
the shell is provided with an accommodating cavity, and transparent parts for allowing the incident light to pass are arranged at two ends of the shell;
the transparent liquid is filled in the accommodating cavity in the shell, has a refractive index larger than 1 and is used for adjusting the wavelength variation range of the incident light; and
and the rotary optical filter is arranged in the accommodating cavity, is fixed on the shell through a rotating shaft and is driven to rotate by the shell, and is used for tuning the incident light after light splitting to obtain tuning light.
3. A raman spectroscopy device according to claim 1, wherein said transparent liquid is water or silicone oil.
4. The raman spectroscopy apparatus of claim 1, wherein the spectrometer comprises:
a spectrum modulation plate for modulating the light transmitted by the optical system;
and the array sensor responds to the modulated light to generate photoelectric response, and performs data processing on the photoelectric response to obtain spectral distribution information of the light.
5. Raman spectroscopy apparatus according to claim 4, wherein the photo-electric response of the picture elements of the array detector are modulated such that different picture elements of the array detector have different photo-electric response curves for light in the spectral range of interest.
6. A Raman spectroscopy apparatus according to claim 5 wherein the picture elements are provided with a film layer having a continuously varying transmittance response such that different picture elements have a one-to-one correspondence of spectral transmittance.
7. The raman spectroscopy device of claim 6, wherein the film layer is formed by coating.
8. A Raman spectroscopy apparatus according to claim 4, wherein the spectrum modulation panel is formed by any one of ion implantation, ion exchange, or printing.
9. The raman spectroscopy apparatus of claim 1, wherein the spectrometer comprises:
the array sensor responds to the light transmitted by the optical system to generate photoelectric response, performs data processing on the photoelectric response to obtain the spectral distribution information of the light,
wherein the array sensor is provided with pixels,
the array sensor is provided with a film layer, so that different pixels of the array detector have one-to-one corresponding spectral transmittance, and the array sensor has different photoelectric response curves for light in a researched spectral range.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113466210A (en) * | 2021-07-29 | 2021-10-01 | 浙江澍源智能技术有限公司 | Apparatus and method for increasing water signal intensity in Raman spectrum |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5321539A (en) * | 1991-02-04 | 1994-06-14 | Nippon Telegraph And Telephone Corporation | Liquid crystal Fabry-Perot etalon with glass spacer |
| CN1882824A (en) * | 2003-09-29 | 2006-12-20 | 洛克威尔科学许可有限公司 | Partitioned-cavity tunable Fabry-Perot filter |
| JP2008170850A (en) * | 2007-01-15 | 2008-07-24 | Nikon Corp | Tunable filter, light source device, and spectral distribution measuring device |
| KR100885537B1 (en) * | 2008-09-03 | 2009-02-26 | 주식회사 나노베이스 | Wavelength tunable spectrometer and wavelength tuning method therof |
| CN103117506A (en) * | 2013-03-07 | 2013-05-22 | 中国科学院半导体研究所 | Filtering type wavelength tunable external cavity laser |
| CN104949958A (en) * | 2015-06-26 | 2015-09-30 | 北京杏林睿光科技有限公司 | Novel Raman probe based on optical fiber beam splitter |
| WO2016012818A1 (en) * | 2014-07-25 | 2016-01-28 | Institut Za Fiziku | Optical spectrometer |
| CN107203055A (en) * | 2017-05-04 | 2017-09-26 | 金华职业技术学院 | A kind of light filter method for spectroscopic analysis system |
| CN108507675A (en) * | 2017-02-27 | 2018-09-07 | 北京航空航天大学 | A kind of broadband high spectral resolution acousto-optic Frame projection imaging spectrometer |
| WO2019015926A1 (en) * | 2017-07-21 | 2019-01-24 | Robert Bosch Gmbh | Microspectrometer module and method for capturing a spectrum by means of a microspectrometer module |
-
2021
- 2021-02-05 CN CN202110162278.9A patent/CN112964692B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5321539A (en) * | 1991-02-04 | 1994-06-14 | Nippon Telegraph And Telephone Corporation | Liquid crystal Fabry-Perot etalon with glass spacer |
| CN1882824A (en) * | 2003-09-29 | 2006-12-20 | 洛克威尔科学许可有限公司 | Partitioned-cavity tunable Fabry-Perot filter |
| JP2008170850A (en) * | 2007-01-15 | 2008-07-24 | Nikon Corp | Tunable filter, light source device, and spectral distribution measuring device |
| KR100885537B1 (en) * | 2008-09-03 | 2009-02-26 | 주식회사 나노베이스 | Wavelength tunable spectrometer and wavelength tuning method therof |
| CN103117506A (en) * | 2013-03-07 | 2013-05-22 | 中国科学院半导体研究所 | Filtering type wavelength tunable external cavity laser |
| WO2016012818A1 (en) * | 2014-07-25 | 2016-01-28 | Institut Za Fiziku | Optical spectrometer |
| CN104949958A (en) * | 2015-06-26 | 2015-09-30 | 北京杏林睿光科技有限公司 | Novel Raman probe based on optical fiber beam splitter |
| CN108507675A (en) * | 2017-02-27 | 2018-09-07 | 北京航空航天大学 | A kind of broadband high spectral resolution acousto-optic Frame projection imaging spectrometer |
| CN107203055A (en) * | 2017-05-04 | 2017-09-26 | 金华职业技术学院 | A kind of light filter method for spectroscopic analysis system |
| WO2019015926A1 (en) * | 2017-07-21 | 2019-01-24 | Robert Bosch Gmbh | Microspectrometer module and method for capturing a spectrum by means of a microspectrometer module |
Non-Patent Citations (2)
| Title |
|---|
| 何杰等: "一种新型可调谐红外滤光片的设计和应用", 《大学物理》, no. 12, 20 December 2006 (2006-12-20) * |
| 邓开发等: "《激光技术与应用》", 31 January 2002, 国防科技大学出版社, pages: 207 - 210 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113466210A (en) * | 2021-07-29 | 2021-10-01 | 浙江澍源智能技术有限公司 | Apparatus and method for increasing water signal intensity in Raman spectrum |
| CN113466210B (en) * | 2021-07-29 | 2024-04-02 | 浙江澍源智能技术有限公司 | Apparatus and method for improving water signal intensity in raman spectroscopy |
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