CN113844890B - Automatic blanking storage structure of APCVD (advanced plasma chemical vapor deposition) equipment and rapid storage method thereof - Google Patents

Automatic blanking storage structure of APCVD (advanced plasma chemical vapor deposition) equipment and rapid storage method thereof Download PDF

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CN113844890B
CN113844890B CN202111148409.4A CN202111148409A CN113844890B CN 113844890 B CN113844890 B CN 113844890B CN 202111148409 A CN202111148409 A CN 202111148409A CN 113844890 B CN113844890 B CN 113844890B
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plate
fixedly connected
groove
materials
rod
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CN113844890A (en
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张文军
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Hangzhou Semiconductor Wafer Co Ltd
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Hangzhou Semiconductor Wafer Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G11/00—Chutes
    • B65G11/02—Chutes of straight form
    • B65G11/023—Chutes of straight form for articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G45/00—Lubricating, cleaning, or clearing devices
    • B65G45/10—Cleaning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G65/00—Loading or unloading
    • B65G65/30—Methods or devices for filling or emptying bunkers, hoppers, tanks, or like containers, of interest apart from their use in particular chemical or physical processes or their application in particular machines, e.g. not covered by a single other subclass
    • B65G65/32—Filling devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

The invention discloses an automatic blanking storage structure of APCVD equipment and a rapid storage method thereof. This automatic unloading of APCVD equipment is deposited structure and is deposited method fast, through setting up fortune material mechanism, the material falls inside the silo on the flitch that connects after the inside ejection of compact of equipment, then slide and promote the buffer board motion through gravity, the buffer board motion is through compressing buffer spring, utilize elasticity to offset the mechanical energy of material, make the material steadily stop, the horizontal slider passes through hydraulic stem and sucking disc and can adsorb and shift the material along with, the horizontal slider motion makes clean silver clear up the grip block through the linkage unit and avoids causing the material to receive the pollution, the comparatively inconvenient problem of the unloading material stock mode of current APCVD equipment has been solved through the combination of above-mentioned structure.

Description

Automatic blanking storage structure of APCVD (advanced plasma chemical vapor deposition) equipment and rapid storage method thereof
Technical Field
The invention relates to the technical field of APCVD equipment, in particular to an automatic blanking storage structure of the APCVD equipment and a rapid storage method thereof.
Background
APCVD, i.e., atmospheric pressure chemical vapor deposition, refers to a method of chemical vapor deposition performed under atmospheric pressure, which is the method originally adopted by chemical vapor deposition, and in addition to Atmospheric Pressure Chemical Vapor Deposition (APCVD), there are Low Pressure Chemical Vapor Deposition (LPCVD), plasma enhanced deposition (PECVD); in the chip manufacturing process, most of the required thin film materials, whether conductive, semiconductive, or dielectric materials, can be prepared by chemical vapor deposition.
The APCVD equipment needs to carry out unloading and the material stock of material after processing the material, and the mode of material stock has two kinds: artifical material stock and mechanical material stock, but current two kinds of modes all have certain drawback, and at first artifical material stock takes trouble and labouringly and consume the labour and increase operator's the amount of labour, and secondly mechanical force uncontrollable exists in the mechanical storage, leads to the material to damage easily, consequently needs provide a device and solve to above-mentioned problem.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an automatic blanking storage structure of APCVD equipment and a rapid storage method thereof, and solves the problem that the blanking storage mode of the conventional APCVD equipment is inconvenient.
In order to realize the purpose, the invention is realized by the following technical scheme: the automatic blanking storage structure of the APCVD equipment comprises a bottom plate, wherein two supporting columns are arranged at the top of the bottom plate, and a material conveying mechanism and a storage mechanism are respectively arranged at the top of the bottom plate.
The material conveying mechanism comprises a material receiving plate and a material conveying frame, the outer surface of the material receiving plate is fixedly connected with the outer surface of the material conveying frame, a connecting frame is arranged outside the material conveying frame, the bottoms of the connecting frame and the material receiving plate are fixedly connected with the top of a support column, a through transverse sliding groove is formed in the connecting frame, a cleaning assembly is arranged outside the connecting frame, a blanking assembly is arranged outside the material conveying frame, a transverse sliding block is slidably connected to the inner surface of the transverse sliding groove, a hydraulic rod is fixedly connected to the bottom of the transverse sliding block, a sucking disc is arranged at the bottom of the hydraulic rod, a trough is formed in the top of the material receiving plate, a buffer plate is slidably connected to the inner surface of the trough, a through groove communicated with the trough is formed in the material receiving plate, the outer surface of the buffer plate is slidably connected with the inner surface of the through groove, a support rod is fixedly connected to the inner surface of the through groove, the outer surface of the support rod is slidably connected with the inside of the buffer plate, and a buffer spring is sleeved on the outer surface of the support rod;
the cleaning assembly comprises a supporting block and a cleaning plate, the outer surface of the supporting block is movably connected with the inner surface of the transverse sliding groove, the supporting block is connected with the transverse sliding block through a connecting unit, a rotating rod is connected to the inside of the supporting block in a penetrating and rotating mode, a gear is fixedly connected to the outer surface of the rotating rod in a penetrating and rotating mode, the outer surface of the gear is connected with the inside of the supporting block in a penetrating and rotating mode, the bottom end of the rotating rod is fixedly connected with the top of the cleaning plate, and a cleaning cotton sliver is arranged at the top of the cleaning plate.
Preferably, the connecting unit comprises transverse telescopic rods and connecting strips which are symmetrically arranged, one end of each of the two transverse telescopic rods is fixedly connected with the outer surface of the supporting block, one end of each of the two transverse telescopic rods is fixedly connected with the inner surface of the transverse sliding groove, and the outer surfaces of the two transverse telescopic rods are sleeved with return springs.
Preferably, one end of the connecting strip is fixedly connected with the outer surface of the transverse sliding block, the outer surface of the connecting strip is connected with the inside of the supporting block in a penetrating and sliding mode, contact teeth are arranged on the outer surface of the connecting strip, the outer surface of the contact teeth is meshed with teeth of the gear, a push plate is fixedly connected to the outer surface of the connecting strip in a penetrating mode, and the outer surface of the push plate is movably connected with the outer surface of the supporting block.
Preferably, the unloading subassembly is including indulging the slider of indulging that spout and symmetry set up, indulge the left and right sides of spout symmetry seting up at fortune material frame inner wall, two the surface of indulging the slider all with indulge the internal surface sliding connection of spout, two indulge the equal fixedly connected with connecting plate in one side that the slider surface is close to each other.
Preferably, the equal fixedly connected with servo motor in the left and right sides of connecting plate bottom, servo motor's output passes through shaft coupling fixedly connected with lead screw, the outer fixed surface of lead screw is connected with the swivel nut, the bottom fixedly connected with support bar of swivel nut, fixedly connected with electronic push rod all runs through in the inside left and right sides of support bar, electronic push rod's output fixedly connected with grip block, the centre gripping groove has been seted up to the surface of grip block.
Preferably, the storage mechanism comprises a clamping plate and a storage box, the bottom of the clamping plate is fixedly connected with the top of the bottom plate, a clamping groove is formed in the top of the clamping plate, and the inner surface of the clamping groove is clamped with the outer surface of the storage box.
Preferably, deposit the equal fixedly connected with spacing of the left and right sides of incasement surface, the surface of spacing and the internal surface of depositing the case form the activity groove, the surface of support bar and the internal surface swing joint in activity groove.
Preferably, the bottom of the inner surface of the storage box is fixedly connected with a longitudinal telescopic rod, the top end of the longitudinal telescopic rod is fixedly connected with a top plate, the outer surface of the top plate is connected with the inner wall of the limiting frame in a sliding mode, and a jacking spring is sleeved on the outer surface of the longitudinal telescopic rod.
The invention also discloses an automatic blanking and rapid storage method of the APCVD equipment, which specifically comprises the following steps:
s1, buffering and blanking: firstly, an APCVD device discharges materials after processing the materials, a material receiving plate receives the materials, then the materials slide downwards in a material groove through gravity and push a buffer plate to move to compress a buffer spring, the materials are buffered by using the elastic force of the spring, then a transverse sliding block moves to drive a sucker to move through a hydraulic rod, the transverse sliding block moves to drive a connecting strip to move, contact teeth are in contact with a gear, a rotating rod drives a cleaning cotton sliver to rotate to clean a clamping plate, the hydraulic rod stretches and absorbs the materials through the sucker, and then the materials are driven to move and are placed on a clamping groove of the clamping plate;
s2, fast transporting: after the materials are placed in the clamping grooves, the longitudinal sliding block slides in the longitudinal sliding grooves, the support bars are driven to move through the threaded sleeves, so that the materials are transported, when the materials are positioned at the top of the storage box, the servo motor rotates and is connected with the threaded sleeves through the lead screws, the threaded sleeves descend and drive the clamping plates and the materials to enter the storage box through the support bars, the materials fall on the top plate, the electronic push rod works to drive the clamping plates to enter the movable grooves, and then the servo motor rotates reversely and the longitudinal sliding block moves reversely to reset;
s3, replacing stock: after depositing incasement portion and being equipped with a certain amount of material, carry out sealed measure to depositing the roof portion, then will deposit the case and take off, select again unloaded case of depositing and put in the cardboard top through the joint with the draw-in groove and stabilize the material stock.
Preferably, the horizontal sliding block, the hydraulic rod, the longitudinal sliding block, the servo motor and the electronic push rod in the S1, the S2 and the S3 are electrically connected with an external control circuit.
Advantageous effects
The invention provides an automatic blanking storage structure of APCVD equipment and a rapid storage method thereof. Compared with the prior art, the method has the following beneficial effects:
(1) The automatic blanking storage structure of the APCVD equipment and the rapid storage method thereof are characterized in that the material conveying mechanism comprises a material receiving plate and a material conveying frame, the outer surface of the material receiving plate is fixedly connected with the outer surface of the material conveying frame, a connecting frame is arranged outside the material conveying frame, the bottoms of the connecting frame and the material receiving plate are fixedly connected with the top of a strut, a through transverse sliding groove is formed inside the connecting frame, a cleaning component is arranged outside the connecting frame, a blanking component is arranged outside the material conveying frame, a transverse sliding block is connected to the inner surface of the transverse sliding groove in a sliding manner, a hydraulic rod is fixedly connected to the bottom of the transverse sliding block, a sucking disc is arranged at the bottom of the hydraulic rod, a trough is formed in the top of the material receiving plate, a buffer plate is connected to the inner surface of the trough in a sliding manner, a through groove communicated with the trough is formed inside the material receiving plate, the outer surface of the buffer plate is connected with the inner surface of the through groove in a sliding manner, a support rod is fixedly connected to the inner surface of the through groove, the outer surface of the support rod is connected with the inside of the buffer plate in a penetrating manner, and a buffer spring is sleeved on the outer surface of the support rod; the cleaning component comprises a supporting block and a cleaning plate, the outer surface of the supporting block is movably connected with the inner surface of a transverse sliding groove, the supporting block is connected with a transverse sliding block through a connecting unit, the inside of the supporting block is connected with a rotating rod in a penetrating and rotating mode, the outer surface of the rotating rod is connected with the inside of the supporting block in a penetrating and rotating mode, the bottom end of the rotating rod is fixedly connected with the top of the cleaning plate, the top of the cleaning plate is provided with a cleaning cotton sliver, the connecting unit comprises transverse telescopic rods and connecting strips which are symmetrically arranged, one end of each transverse telescopic rod is fixedly connected with the outer surface of the supporting block, one end of each transverse telescopic rod is fixedly connected with the inner surface of the transverse sliding groove, the outer surfaces of the two transverse telescopic rods are sleeved with reset springs, one end of each connecting strip is fixedly connected with the outer surface of the transverse sliding block, the outer surface of each connecting strip is connected with the inside of the supporting block in a penetrating and sliding mode, the outer surface of each connecting strip is provided with contact teeth, the outer surface of each contact tooth is meshed with the teeth, the outer surface of each connecting strip is fixedly connected with a push plate, the outer surface of the push plate is movably connected with the outer surface of the supporting block, by arranging the material conveying mechanism, the material is discharged from the interior of the equipment and then falls into the material groove on the material receiving plate, then the material slides downwards by gravity and pushes the buffer plate to move, the buffer plate moves by compressing the buffer spring, the mechanical energy of the material is counteracted by using the elastic force, so that the material is stably stopped, the transverse sliding block can adsorb and transfer the material through the hydraulic rod and the sucking disc, the transverse sliding block moves to enable the cleaning cotton sliver to clean the clamping plate through the connecting unit so as to avoid the pollution to the material, the problem that the blanking and material storage mode of the existing APCVD equipment is inconvenient is solved through the combination of the structure.
(2) The automatic unloading storage structure of APCVD equipment and the rapid storage method thereof, the unloading subassembly comprises longitudinal sliding grooves and longitudinal sliding blocks which are symmetrically arranged, the longitudinal sliding grooves are symmetrically arranged on the left side and the right side of the inner wall of a material conveying frame, the outer surfaces of the two longitudinal sliding blocks are in sliding connection with the inner surfaces of the longitudinal sliding grooves, one side, close to each other, of the outer surfaces of the two longitudinal sliding blocks is a connecting plate, a servo motor is fixedly connected to the left side and the right side of the bottom of the connecting plate, the output end of the servo motor passes through a screw rod fixedly connected with a screw sleeve, the bottom of the screw sleeve is fixedly connected with a supporting bar, an electronic push rod is fixedly connected with a clamping plate on the left side and the right side of the inside of the supporting bar, a clamping groove is formed in the outer surface of the clamping plate, the unloading mechanism is arranged, the longitudinal sliding blocks convey materials through the clamping plate, meanwhile, the screw rod is in threaded connection with the screw sleeve, so that the connecting bar drives the clamping plate to lift, the clamping plate to drive the materials to enter the storage box to be stored, the storage box to avoid the pollution of the materials caused by the conventional unloading combination of APCVD equipment.
(3) The automatic blanking storage structure of the APCVD equipment and the rapid storage method thereof, the storage mechanism comprises a clamping plate and a storage box, the bottom of the clamping plate is fixedly connected with the top of a bottom plate, a clamping groove is formed in the top of the clamping plate, the inner surface of the clamping groove is clamped with the outer surface of the storage box, a limiting frame is fixedly connected to the left side and the right side of the inner surface of the storage box, the outer surface of the limiting frame and the inner surface of the storage box form a movable groove, the outer surface of a supporting strip is movably connected with the inner surface of the movable groove, a longitudinal telescopic rod is fixedly connected with the bottom of the inner surface of the storage box, a top end of the longitudinal telescopic rod is fixedly connected with a top plate, the outer surface of the top plate is slidably connected with the inner wall of the limiting frame, a jacking spring is sleeved on the outer surface of the longitudinal telescopic rod, the storage mechanism is arranged, the top end of the spring and the top plate facilitate storage of materials, the materials to be buffered and prevented from being damaged, the materials are convenient to be taken out, meanwhile, the limiting frame ensures the stability of the materials, and the formed through groove facilitates the movement of the supporting strip and the clamping plate and the material to be taken out conveniently taken out of the existing APCVD equipment, the blanking mode is solved through the combination of the structure.
Drawings
FIG. 1 is a perspective view of the external structure of the present invention;
FIG. 2 is a side view of the internal structure of the receiver plate of the present invention;
FIG. 3 is a sectional view showing the internal structure of the connecting frame according to the present invention;
FIG. 4 is an exploded view of the outer structure of the support block of the present invention;
FIG. 5 is a perspective view of the external structure of the material conveying frame of the present invention;
FIG. 6 is a perspective view of the longitudinal slider according to the present invention;
FIG. 7 is a sectional view of the external structure of the brace bar of the present invention
FIG. 8 is an exploded view of the external mechanism of the storage case of the present invention;
FIG. 9 is a sectional view showing the inner structure of the storage case of the present invention;
FIG. 10 is a flow chart of the method of the present invention.
In the figure: 1-bottom plate, 2-pillar, 3-material conveying mechanism, 31-material receiving plate, 32-material conveying frame, 33-connecting frame, 34-horizontal sliding groove, 35-cleaning component, 351-supporting block, 352-cleaning plate, 353-connecting unit, 3531-horizontal telescopic rod, 3532-connecting bar, 3533-reset spring, 3534-contact tooth, 3535-push plate, 354-rotating rod, 355-gear, 356-cleaning cotton strip, 36-blanking component, 361-vertical sliding groove, 362-vertical sliding block, 363-connecting plate, 364-servo motor, 365-screw rod, 366-screw sleeve, 367-supporting strip, 368-electronic push rod, 369-clamping plate, 3610-clamping groove, 37-horizontal sliding block, 38-hydraulic rod, 39-suction cup, 310-trough, 311-buffer plate, 312-through groove, 313-supporting rod, 314-buffer spring, 4-storage mechanism, 41-clamping plate, 42-storage box, 43-clamping groove, 44-limiting frame, 45-movable groove, 45-vertical movable groove, top plate, 48-movable spring, and telescopic rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1-10, the present invention provides the following technical solutions: the automatic blanking and storing structure of the APCVD equipment comprises a bottom plate 1, the device is arranged at the outer side of a discharge end of the APCVD equipment, two support columns 2 are arranged at the top of the bottom plate 1, and a material conveying mechanism 3 and a storing mechanism 4 are respectively arranged at the top of the bottom plate 1; the material conveying mechanism 3 comprises a material receiving plate 31 and a material conveying frame 32, the material receiving plate 31 is connected with a discharge end of APCVD equipment, the outer surface of the material receiving plate 31 is fixedly connected with the outer surface of the material conveying frame 32, a connecting frame 33 is arranged outside the material conveying frame 32, the bottoms of the connecting frame 33 and the material receiving plate 31 are fixedly connected with the top of the strut 2, a through transverse sliding groove 34 is formed inside the connecting frame 33, the transverse sliding groove 34 is T-shaped, a cleaning assembly 35 is arranged outside the connecting frame 33, a blanking assembly 36 is arranged outside the material conveying frame 32, a transverse sliding block 37 is slidably connected with the inner surface of the transverse sliding groove 34, the transverse sliding block 37 is made of a linear motor, a hydraulic rod 38 is fixedly connected with the bottom of the transverse sliding block 37, a sucking disc 39 is arranged at the bottom of the hydraulic rod 38, a material groove 310 is formed in the top of the material receiving plate 31, a buffer plate 311 is slidably connected with the inner surface of the material groove 310, a through groove 312 is formed in the inner surface of the material receiving plate 31, the outer surface of the buffer plate 311 is slidably connected with the through groove 312, a support rod 313 is fixedly connected with the inner surface of the through groove 312, a support rod 313, and a spring 314 is sleeved on the outer surface of the through groove 312; the buffer spring 314 has a low elastic coefficient, the cleaning assembly 35 comprises a support block 351 and a cleaning plate 352, the outer surface of the support block 351 is movably connected with the inner surface of the transverse sliding groove 34, the support block 351 is connected with the transverse sliding block 37 through a connecting unit 353, the inside of the support block 351 is connected with a rotating rod 354 in a penetrating and rotating manner, the outer surface of the rotating rod 354 is fixedly connected with a gear 355 in a penetrating and rotating manner, the outer surface of the gear 355 is connected with the inside of the support block 351 in a penetrating and rotating manner, the bottom end of the rotating rod 354 is fixedly connected with the top of the cleaning plate 352, a cleaning cotton sliver 356 is arranged at the top of the cleaning plate 352, the cleaning cotton sliver 356 is connected with the cleaning plate 352 through an adhesive manner, the connecting unit 353 comprises a transverse telescopic rod 3531 and a connecting strip 3532 which are symmetrically arranged, one end of each of the two transverse telescopic rods 3531 is fixedly connected with the outer surface of the support block 351, one end of each of the two transverse telescopic rods 3531 is fixedly connected with the inner surface of the transverse sliding groove 34, the outer surfaces of the two transverse telescopic rods 3531 are respectively sleeved with a reset spring 3533, the reset springs 3533 facilitate the reset of the supporting block 351, one end of the connecting bar 3532 is fixedly connected with the outer surface of the transverse sliding block 37, the outer surface of the connecting bar 3532 is connected with the inside of the supporting block 351 in a penetrating and sliding mode, the outer surface of the connecting bar 3532 is provided with contact teeth 3534, the outer surface of the contact teeth 3534 is meshed with teeth of a gear 355, the outer surface of the connecting bar 3532 is fixedly connected with a push plate 3535 in a penetrating mode, the push plate 3535 can push the supporting block 351 to move, so that a sucking disc 39 drives materials to move to the position of a cleaning plate 352, the outer surface of the push plate 3535 is movably connected with the outer surface of the supporting block 351, the blanking assembly 36 comprises a longitudinal sliding groove 361 and longitudinal sliding blocks 362 which are symmetrically arranged, the longitudinal sliding blocks 362 are made of a linear motor, the longitudinal sliding grooves 361 are symmetrically arranged on the left side and the right side of the inner wall of the material conveying frame 32, the outer surfaces of the two longitudinal sliding blocks 362 are both in a sliding mode, two equal fixedly connected with connecting plate 363 in one side that indulge slider 362 surface is close to each other, the equal fixedly connected with servo motor 364 in the left and right sides of connecting plate 363 bottom, shaft coupling fixedly connected with lead screw 365 is passed through to servo motor 364's output, the outer fixed surface of lead screw 365 is connected with swivel nut 366, the bottom fixedly connected with support bar 367 of swivel nut 366, the inside left and right sides of support bar 367 all runs through fixedly connected with electronic push rod 368, the output fixedly connected with grip block 369 of electronic push rod 368, grip block 369 adopts silica gel or the same material to make, can carry out the flexibility clean to the material bottom after breaking away from the centre gripping to the material, grip block 3610 has been seted up to the surface of grip block 369, storage mechanism 4 includes cardboard 41 and storage box 42, the bottom of cardboard 41 and the top fixed connection of bottom plate 1, draw-in groove 43 has been seted up at the top of cardboard 41, the internal surface looks joint of draw-in groove 43 and the external surface of storage box 42, the equal fixedly connected with spacing 44 in the left and right sides of storage box 42 internal surface, the external surface of the internal surface of storage box 42 forms movable groove 45, the top of telescopic link 46 is connected with top surface 47, the top of telescopic link 46.
The invention also discloses an automatic blanking and rapid storage method of the APCVD equipment, which specifically comprises the following steps:
s1, buffering and blanking: firstly, after the materials are processed by the APCVD equipment, the materials are discharged, the materials are received by the material receiving plate 31, then the materials slide downwards in the material groove 310 through gravity and push the buffer plate 311 to move to compress the buffer spring 314, the materials are buffered by using the elastic force of the spring, then the transverse sliding block 37 moves to drive the suction cup 39 to move through the hydraulic rod 38, the transverse sliding block 37 moves to drive the connecting bar 3532 to move, the contact teeth 3534 are in contact with the gear 355 and drive the cleaning cotton sliver 356 to rotate through the rotating rod 354 to clean the clamping plate 369, the hydraulic rod 38 stretches and retracts to absorb the materials through the suction cup 39, and then the materials are driven to move and are placed on the clamping groove 3610 of the clamping plate 369;
s2, fast transporting: after materials are placed in the clamping groove 3610, the longitudinal sliding block 362 slides in the longitudinal sliding groove 361 and drives the supporting bar 367 to move through the threaded sleeve 366, so that the materials are transported, after the materials are located at the top of the storage box 42, the servo motor 364 rotates and is in threaded connection with the threaded sleeve 366 through the lead screw 365, the threaded sleeve 366 descends and drives the clamping plate 369 and the materials to enter the storage box 42 through the supporting bar 367, the materials fall on the top plate 47, the electronic push rod 368 works to drive the clamping plate 369 to enter the movable groove 45, and then the servo motor 364 rotates reversely and the longitudinal sliding block 362 moves reversely to reset;
s3, replacing stock: after depositing case 42 inside and being equipped with a certain amount of material, to depositing case 42 top and sealing the measure, then will deposit case 42 and take off, select unloaded case 42 of depositing and put in cardboard 41 top through the joint with draw-in groove 43 and stabilize the material stock again.
In the invention, the horizontal slider 37, the hydraulic rod 38, the vertical slider 362, the servo motor 364 and the electronic push rod 368 in the steps S1, S2 and S3 are electrically connected with an external control circuit.
And those not described in detail in this specification are well within the skill of those in the art.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

  1. Automatic unloading of APCVD equipment is deposited structure, including bottom plate (1), the top of bottom plate (1) is provided with two pillar (2), its characterized in that: the top of the bottom plate (1) is provided with a material conveying mechanism (3) and a storage mechanism (4) respectively;
    the material conveying mechanism (3) comprises a material receiving plate (31) and a material conveying frame (32), the outer surface of the material receiving plate (31) is fixedly connected with the outer surface of the material conveying frame (32), a connecting frame (33) is arranged outside the material conveying frame (32), the bottoms of the connecting frame (33) and the material receiving plate (31) are fixedly connected with the top of the support column (2), a through transverse sliding groove (34) is formed inside the connecting frame (33), a cleaning component (35) is arranged outside the connecting frame (33), a blanking component (36) is arranged outside the material conveying frame (32), a transverse sliding block (37) is slidably connected with the inner surface of the transverse sliding groove (34), a hydraulic rod (38) is fixedly connected with the bottom of the transverse sliding block (37), a suction cup (39) is arranged at the bottom of the hydraulic rod (38), a material groove (310) is formed in the top of the material receiving plate (31), a buffer plate (311) is slidably connected with the inner surface of the material conveying plate (31), a through groove (312) communicated with the material groove (310) is formed in the inside of the material receiving plate (31), and the buffer plate (311) is connected with the inner surface of the through groove (313) and the buffer plate (311) and the outer surface of the support rod (311) is connected with the buffer plate (313), the outer surface of the supporting rod (313) is sleeved with a buffer spring (314);
    the cleaning assembly (35) comprises a supporting block (351) and a cleaning plate (352), the outer surface of the supporting block (351) is movably connected with the inner surface of the transverse sliding groove (34), the supporting block (351) is connected with the transverse sliding block (37) through a connecting unit (353), a rotating rod (354) penetrates through and is rotatably connected with the inside of the supporting block (351), a gear (355) penetrates through and is fixedly connected with the outer surface of the rotating rod (354), the outer surface of the gear (355) is rotatably connected with the inside of the supporting block (351) in a penetrating manner, the bottom end of the rotating rod (354) is fixedly connected with the top of the cleaning plate (352), and a cleaning cotton sliver (356) is arranged at the top of the cleaning plate (352);
    the connecting unit (353) comprises a transverse telescopic rod (3531) and a connecting strip (3532) which are symmetrically arranged, wherein one end of the transverse telescopic rod (3531) is fixedly connected with the outer surface of a supporting block (351), one end of the transverse telescopic rod (3531) is fixedly connected with the inner surface of a transverse sliding groove (34), the outer surface of the transverse telescopic rod (3531) is sleeved with a return spring (3533), one end of the connecting strip (3532) is fixedly connected with the outer surface of a transverse sliding block (37), the outer surface of the connecting strip (3532) is connected with the inner portion of the supporting block (351) in a penetrating and sliding mode, contact teeth (3534) are arranged on the outer surface of the connecting strip (3532), the outer surface of the contact teeth (3534) is meshed with teeth of a gear (355), a push plate (3535) is fixedly connected with the outer surface of the connecting strip (3535) in a penetrating mode, and the outer surface of the push plate (3535) is movably connected with the outer surface of the supporting block (351).
  2. 2. The automatic blanking storage structure of APCVD equipment according to claim 1, characterized in that: the blanking assembly (36) comprises longitudinal sliding grooves (361) and longitudinal sliding blocks (362) which are symmetrically arranged, the longitudinal sliding grooves (361) are symmetrically arranged on the left side and the right side of the inner wall of the material conveying frame (32), the outer surfaces of the two longitudinal sliding blocks (362) are in sliding connection with the inner surfaces of the longitudinal sliding grooves (361), and the outer surfaces of the two longitudinal sliding blocks (362) are fixedly connected with a connecting plate (363) on one side close to each other.
  3. 3. The automatic blanking and storing structure of the APCVD equipment according to claim 2, characterized in that: the equal fixedly connected with servo motor (364) in the left and right sides of connecting plate (363) bottom, shaft coupling fixedly connected with lead screw (365) is passed through to the output of servo motor (364), the outer fixed surface of lead screw (365) is connected with swivel nut (366), the bottom fixedly connected with support bar (367) of swivel nut (366), fixedly connected with electronic push rod (368) all runs through in the inside left and right sides of support bar (367), the output fixedly connected with grip block (369) of electronic push rod (368), centre gripping groove (3610) have been seted up to the surface of grip block (369).
  4. 4. The APCVD equipment automatic blanking storage structure of claim 3, characterized in that: the storage mechanism (4) comprises a clamping plate (41) and a storage box (42), the bottom of the clamping plate (41) is fixedly connected with the top of the bottom plate (1), a clamping groove (43) is formed in the top of the clamping plate (41), and the inner surface of the clamping groove (43) is clamped with the outer surface of the storage box (42).
  5. 5. The APCVD equipment automatic blanking storage structure of claim 4, wherein: the left side and the right side of the inner surface of the storage box (42) are fixedly connected with limit frames (44), the outer surface of each limit frame (44) and the inner surface of the storage box (42) form a movable groove (45), and the outer surface of each support strip (367) is movably connected with the inner surface of each movable groove (45).
  6. 6. The APCVD equipment automatic blanking storage structure of claim 5, characterized in that: deposit bottom fixedly connected with longitudinal extension pole (46) of case (42) internal surface, the top fixedly connected with roof (47) of longitudinal extension pole (46), the surface of roof (47) and the inner wall sliding connection of spacing (44), the surface cover of longitudinal extension pole (46) is equipped with top movable spring (48).
  7. The automatic blanking and rapid storage method of the APCVD equipment is characterized by comprising the following steps: the method specifically comprises the following steps:
    s1, buffering and blanking: firstly, the APCVD equipment discharges materials after processing the materials, the material receiving plate (31) receives the materials, then the materials slide downwards in the material groove (310) through gravity and push the buffer plate (311) to move to compress the buffer spring (314), the materials are buffered by using the elastic force of the spring, then the transverse sliding block (37) moves to drive the suction disc (39) to move through the hydraulic rod (38), the transverse sliding block (37) moves to drive the connecting strip (3532) to move, the contact tooth (3534) is in contact with the gear (355) and drives the cleaning cotton sliver (356) to rotate through the rotating rod (354) to clean the clamping plate (369), the hydraulic rod (38) stretches and retracts to absorb the materials through the suction disc (39), and then the materials are driven to move and placed on the clamping groove (3610) of the clamping plate (369);
    s2, fast conveying: after materials are placed in the clamping groove (3610), the longitudinal sliding block (362) slides in the longitudinal sliding groove (361), and the support bar (367) is driven by the threaded sleeve (366) to move, so that the materials are transported, when the materials are located at the top of the storage box (42), the servo motor (364) rotates to be connected with the threaded sleeve (366) through the screw rod (365), the threaded sleeve (366) descends to drive the clamping plate (369) and the materials to enter the storage box (42) through the support bar (367), the materials fall on the top plate (47), the electronic push rod (368) works to drive the clamping plate (369) to enter the movable groove (45), and then the servo motor (364) rotates reversely and the longitudinal sliding block (362) moves reversely to reset;
    s3, replacing stock: after a certain amount of materials are filled in the storage box (42), the top of the storage box (42) is sealed, the storage box (42) is taken down, and then the unloaded storage box (42) is selected and placed on the top of the clamping plate (41) through clamping with the clamping groove (43) to stably store the materials.
  8. 8. The APCVD equipment automatic blanking rapid storage method according to claim 7, characterized in that: and the S1, S2 and S3 middle transverse sliding blocks (37), the hydraulic rods (38), the longitudinal sliding blocks (362), the servo motors (364) and the electronic push rods (368) are electrically connected with an external control circuit.
CN202111148409.4A 2021-09-27 2021-09-27 Automatic blanking storage structure of APCVD (advanced plasma chemical vapor deposition) equipment and rapid storage method thereof Active CN113844890B (en)

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