CN113843543B - Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve - Google Patents
Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve Download PDFInfo
- Publication number
- CN113843543B CN113843543B CN202111181948.8A CN202111181948A CN113843543B CN 113843543 B CN113843543 B CN 113843543B CN 202111181948 A CN202111181948 A CN 202111181948A CN 113843543 B CN113843543 B CN 113843543B
- Authority
- CN
- China
- Prior art keywords
- groove
- sheath
- metal body
- powder
- clamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
- B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/003—Cooling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0426—Fixtures for other work
- B23K37/0435—Clamps
- B23K37/0443—Jigs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Powder Metallurgy (AREA)
Abstract
The application discloses reducible eccentric anchor clamps of rotatory target and dress powder canning processing method, wherein, anchor clamps, including metal body, metal body's one end has annular inner bag cover groove and annular outsourcing cover groove, the inner bag cover groove with outsourcing cover groove sets up with one heart and outsourcing cover groove is located the outside of inner bag cover groove, metal body still has the powder mouth of throwing that runs through metal body, it is located between inner bag cover groove and the outsourcing cover groove to throw the powder mouth. This application can fix a position the inner wrap through the inner wrap groove, can fix a position the outer wrap through the outer wrap groove, through control fixture machining tolerance, the relative position of outer wrap can be controlled on the one hand, guarantee the concentricity of outer wrap when the welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control is owing to the change of outer wrap relative position of the outer wrap of expend with heat and contract with cold, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, improve the yield behind the hot isostatic pressing to more than 70%.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a clamp capable of reducing eccentricity of a rotary target and a processing method of a powder filling sheath.
Background
The target material is mainly divided into a plane target and a rotary target. The rotary Target (also called tubular Target for short) rotates at a certain speed in the sputtering process, because the relative motion occurs between the Rotating rotary Target and the static magnet, the whole surface of the rotary Target is sputtered uniformly.
At present, the binding method between the rotating target and the stainless steel liner tube is mainly 3, namely a thermal spraying method, a brazing method and an HIP (high-pressure hot isostatic pressing) integral forming method. The rotary target prepared by the thermal spraying method has the defects of low density, high oxygen content and the like, and cannot meet the requirement of high-quality coating products; the brazing method is difficult to realize the binding of the rotary target material with the length of more than 1000mm, and the production cost is high. The rotary target prepared by the HIP integral forming method has uniform components, no segregation, fine crystal grains and high purity, and can meet the requirements of the liquid crystal display and touch screen industries, but the rotary target prepared by the HIP integral forming method needs to be prepared into a powder filling sheath. As shown in a schematic diagram of a powder filling capsule of a rotary target in fig. 1, the powder filling capsule comprises an outer capsule 1, an inner capsule 2 and two cover plates 3 welded at the end parts of the inner and outer capsules, a powder filling gap 4 is formed between the inner and outer capsules, wherein the concentricity of capsule welding and powder feeding processes influences the eccentricity condition and the yield of finished products after hot isostatic pressing, and when the concentricity is poorly controlled during capsule welding and powder filling, the yield of the products after hot isostatic pressing is less than 50%.
Disclosure of Invention
Aiming at the problems, the invention provides a clamp capable of reducing the eccentricity of a rotating target and a processing method of a powder filling sheath.
The technical scheme adopted by the invention is as follows:
the utility model provides an eccentric anchor clamps of reducible rotatory target, includes metal body, metal body's one end has annular endocyst cover groove and annular outsourcing cover groove, endocyst cover groove with outsourcing cover groove sets up with one heart and outsourcing cover groove is located the outside in endocyst cover groove, metal body still has the powder mouth of throwing that runs through metal body, it is located between endocyst cover groove and the outsourcing cover groove to throw the powder mouth.
The preparation process of the rotary target mainly comprises two procedures which can influence the concentricity of a powder filling sleeve before HIP, wherein one procedure is as follows: when the cover plate is welded, if the relative positions of the inner sheath and the outer sheath are bad, the concentricity is influenced; and the second step is as follows: when the cover plate is welded, the inner sheath and the outer sheath expand with heat and contract with cold, and the relative position of the inner sheath and the outer sheath changes to influence the concentricity. The utility model provides a metal fixture can fix a position the interior canning through interior canning groove, can fix a position the outer canning through exterior canning groove, through control fixture machining tolerance, on the one hand can control the relative position of inside and outside canning, guarantee the concentricity of inside and outside canning when the welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control is owing to the change of inside and outside canning relative position of expend with heat and contract with cold, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, the yield after with hot isostatic pressing improves to more than 70%.
In actual use, the powder feeding port can be in various shapes, and the application is not particularly limited.
In one embodiment of the present invention, the metal body is made of stainless steel.
In one embodiment of the present invention, the metal body is a cylindrical structure, and the powder feeding ports are provided in a plurality and uniformly distributed around the axis of the metal body.
In one embodiment of the present invention, the inner sheath groove has the same depth as the outer sheath groove.
In an embodiment of the invention, the thickness of the metal body is greater than or equal to 30mm, and the groove depth of the inner jacket groove and the groove depth of the outer jacket groove are both greater than or equal to 10mm and smaller than the thickness of the metal body.
The structural strength of the clamp can be effectively guaranteed by the thickness of the metal body being more than or equal to 30mm, and the inner and outer sheaths in better positioning can be guaranteed by the groove depth being more than or equal to 10mm, so that the concentricity is guaranteed.
In one embodiment of the present invention, a flaring structure is disposed at an end of the powder feeding port facing away from the inner sheath groove.
The flaring structure is arranged, so that powder loading operation can be facilitated, and the outer diameter of the flaring structure can be larger than the gap between the inner sheath and the outer sheath in practical application.
The application also discloses a processing method of the powder filling sheath, which comprises the following steps:
1) Placing the inner sheath and the outer sheath in a clamp, wherein the clamp is the clamp, the lower end of the inner sheath is inserted into the inner sheath groove of the clamp, and the lower end of the outer sheath is inserted into the outer sheath groove of the clamp, so that the upper end surfaces of the inner sheath and the outer sheath are flush;
2) Welding the first cover plate on the inner sheath and the outer sheath, and after the welding is finished, keeping the inner sheath and the outer sheath in a clamp for cooling;
3) After cooling, inverting the clamp together with the inner sheath and the outer sheath, and filling powder from a feed port of the clamp;
4) And after powder filling is finished, taking down the fixture, and welding the second cover plate on the inner sheath and the outer sheath.
According to the processing method, the concentricity of the inner sheath and the outer sheath can be effectively guaranteed by using the welding and powder filling clamp, the concentricity of the rotary target after powder filling can be well controlled to be less than or equal to 0.3mm, and the yield after hot isostatic pressing is improved to be more than 70%.
In one embodiment of the present invention, the step 2) and the step 4) are welded by uniform spot welding.
The welding mode can ensure the concentricity of the inner sheath and the outer sheath during welding.
In one embodiment of the present invention, the step 3) is performed by loading powder from a feeding port through a funnel.
The invention has the beneficial effects that: the utility model provides a metal fixture can fix a position the interior canning through interior canning groove, can fix a position the outer canning through exterior canning groove, through control fixture machining tolerance, on the one hand can control the relative position of inside and outside canning, guarantee the concentricity of inside and outside canning when the welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control is owing to the change of inside and outside canning relative position of expend with heat and contract with cold, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, the yield after with hot isostatic pressing improves to more than 70%.
Description of the drawings:
FIG. 1 is a schematic view of a powder containment capsule for a rotary target;
FIG. 2 is a schematic view of a fixture for reducing eccentricity of a rotating target;
FIG. 3 is a top view of a fixture for reducing eccentricity of a rotating target;
fig. 4 isbase:Sub>A cross-sectional view taken along linebase:Sub>A-base:Sub>A of fig. 3.
The figures are numbered:
1. an outer sheath; 2. an inner sheath; 3. a cover plate; 4. a powder filling gap; 5. a metal body; 6. an inner sheath groove; 7. wrapping a sleeve groove; 8. a powder feeding port.
The specific implementation mode is as follows:
the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 2, 3 and 4, a fixture capable of reducing eccentricity of a rotating target comprises a metal body 5, wherein one end of the metal body 5 is provided with an annular inner sleeve groove 6 and an annular outer sleeve groove 7, the inner sleeve groove 6 and the outer sleeve groove 7 are concentrically arranged, the outer sleeve groove 7 is positioned on the outer side of the inner sleeve groove 6, the metal body 5 is further provided with a powder feeding port 8 penetrating through the metal body 5, and the powder feeding port 8 is positioned between the inner sleeve groove 6 and the outer sleeve groove 7.
The preparation process of the rotary target mainly comprises two procedures which can influence the concentricity of a powder filling sleeve before HIP, wherein one procedure is as follows: when the cover plate is welded, if the relative positions of the inner sheath and the outer sheath are bad, the concentricity is influenced; and the second step is as follows: when the cover plate is welded, the inner sheath and the outer sheath expand with heat and contract with cold, and the relative position of the inner sheath and the outer sheath changes to influence the concentricity. The utility model provides a metal fixture can fix a position the interior sheath through interior sheath groove 6, can fix a position the outer sheath through outer sheath groove 7, through control fixture machining tolerance, the relative position of the inside and outside sheath can be controlled on the one hand, guarantee the concentricity of the inside and outside sheath when the welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control changes owing to the inside and outside sheath relative position of expend with heat and contract with cold, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, the yield after with hot isostatic pressing improves to more than 70%.
In actual use, the powder feeding port 8 may have various shapes, and the present application is not particularly limited.
In this embodiment, the metal body 5 is made of stainless steel. In other embodiments, other metal materials meeting the requirements can be adopted.
In practice, it is preferable that the metal body 5 has a cylindrical structure, and the powder feeding ports 8 are provided in plural numbers and uniformly distributed around the axis of the metal body 5. As shown in fig. 4, in the present embodiment, the number of the powder feeding ports 8 is 2.
As shown in fig. 4, in the present embodiment, the inner jacket groove 6 has the same groove depth as the outer jacket groove 7.
In this embodiment, the thickness of the metal body 5 is greater than or equal to 30mm, and the groove depth of the inner jacket groove 6 and the groove depth of the outer jacket groove 7 are both greater than or equal to 10mm and smaller than the thickness of the metal body 5. The thickness of the metal body 5 is more than or equal to 30mm, the structural strength of the clamp can be effectively guaranteed, the groove depth is more than or equal to 10mm, the inner and outer covering in better positioning can be guaranteed, and the concentricity is guaranteed.
In practical use, the end of the powder feeding port 8, which faces away from the inner sheath groove 6, can be provided with a flaring structure. The flaring structure is arranged, so that powder loading operation can be facilitated, and the outer diameter of the flaring structure can be larger than the gap between the inner sheath and the outer sheath in practical application.
The embodiment also discloses a processing method of the powder filling sheath, which comprises the following steps:
1) Placing an inner sheath and an outer sheath in a fixture, wherein the fixture is the fixture of the embodiment, the lower end of the inner sheath is inserted into an inner sheath groove 6 of the fixture, and the lower end of the outer sheath is inserted into an outer sheath groove 7 of the fixture, so that the upper end surfaces of the inner sheath and the outer sheath are flush;
2) Welding the first cover plate on the inner sheath and the outer sheath, and after the welding is finished, keeping the inner sheath and the outer sheath in a clamp for cooling;
3) After cooling, inverting the clamp together with the inner sheath and the outer sheath, and filling powder from a feed port of the clamp;
4) And after powder filling is finished, taking down the clamp, and welding the second cover plate on the inner sheath and the outer sheath.
According to the processing method, the concentricity of the inner sheath and the outer sheath can be effectively guaranteed by using the welding and powder filling clamp, the concentricity of the rotary target after powder filling can be well controlled to be less than or equal to 0.3mm, and the yield after hot isostatic pressing is improved to be more than 70%.
In this embodiment, step 2) and step 4) are welded by means of uniform spot welding. The welding mode can ensure the concentricity of the inner sheath and the outer sheath during welding.
In actual use, step 3) is preferably carried out from a feeding port through a funnel for facilitating powder filling.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the present specification and the drawings can be directly or indirectly applied to other related technical fields and are included in the scope of the present invention.
Claims (9)
1. The processing method of the powder filling sheath is characterized by comprising the following steps:
1) Placing an inner sheath and an outer sheath in a clamp, wherein the clamp comprises a metal body, one end of the metal body is provided with an annular inner sheath groove and an annular outer sheath groove, the inner sheath groove and the outer sheath groove are concentrically arranged, the outer sheath groove is positioned on the outer side of the inner sheath groove, the metal body is also provided with a powder feeding port penetrating through the metal body, the powder feeding port is positioned between the inner sheath groove and the outer sheath groove, and the lower end of the inner sheath is inserted into the outer sheath groove of the clamp, and the lower end of the outer sheath is inserted into the outer sheath groove of the clamp, so that the upper end surfaces of the inner sheath and the outer sheath are flush;
2) Welding the first cover plate on the inner sheath and the outer sheath, and after the welding is finished, keeping the inner sheath and the outer sheath in a clamp for cooling;
3) After cooling, inverting the clamp together with the inner sheath and the outer sheath, and filling powder from a feed port of the clamp;
4) And after powder filling is finished, taking down the clamp, and welding the second cover plate on the inner sheath and the outer sheath.
2. A method of manufacturing a powder containing capsule as claimed in claim 1, wherein step 2) is performed by means of uniform spot welding.
3. A method of making a powder coating capsule as claimed in claim 1, wherein step 3) is performed by powder coating from a hopper through a hopper.
4. A method of manufacturing a powder containing capsule as claimed in claim 1, wherein step 4) is performed by means of uniform spot welding.
5. The method of claim 1 wherein the metal body is stainless steel.
6. The method of claim 1 wherein the metal body is cylindrical and the plurality of powder ports are evenly distributed about the axis of the metal body.
7. A method of manufacturing a powder containing capsule as set forth in claim 1, wherein the inner capsule groove has the same depth as the outer capsule groove.
8. The method for processing the powder containing capsule as claimed in claim 7, wherein the thickness of the metal body is greater than or equal to 30mm, and the depth of the inner capsule groove and the depth of the outer capsule groove are both greater than or equal to 10mm and less than the thickness of the metal body.
9. The method for processing the powder containing sheath as claimed in claim 1, wherein the end of the powder feeding port facing away from the inner sheath groove has a flaring structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111181948.8A CN113843543B (en) | 2021-10-11 | 2021-10-11 | Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111181948.8A CN113843543B (en) | 2021-10-11 | 2021-10-11 | Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve |
Publications (2)
Publication Number | Publication Date |
---|---|
CN113843543A CN113843543A (en) | 2021-12-28 |
CN113843543B true CN113843543B (en) | 2022-12-23 |
Family
ID=78977982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202111181948.8A Active CN113843543B (en) | 2021-10-11 | 2021-10-11 | Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN113843543B (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN206997770U (en) * | 2017-04-01 | 2018-02-13 | 南京云启金锐新材料有限公司 | A kind of cold isostatic compaction mould |
CN107876958A (en) * | 2016-09-29 | 2018-04-06 | 宁波江丰电子材料股份有限公司 | The welding method of weld jig and alloy product |
CN108556135A (en) * | 2018-03-21 | 2018-09-21 | 中国船舶重工集团公司第七二五研究所 | A kind of isostatic pressing mold of rotary target material |
CN211947172U (en) * | 2020-04-08 | 2020-11-17 | 钢研昊普科技有限公司 | Hot isostatic pressing equipment stainless steel frock |
CN211990930U (en) * | 2019-12-25 | 2020-11-24 | 芜湖映日科技有限公司 | Rotating target powder injection centering tool |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9334563B2 (en) * | 2010-07-12 | 2016-05-10 | Materion Corporation | Direct cooled rotary sputtering target |
-
2021
- 2021-10-11 CN CN202111181948.8A patent/CN113843543B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107876958A (en) * | 2016-09-29 | 2018-04-06 | 宁波江丰电子材料股份有限公司 | The welding method of weld jig and alloy product |
CN206997770U (en) * | 2017-04-01 | 2018-02-13 | 南京云启金锐新材料有限公司 | A kind of cold isostatic compaction mould |
CN108556135A (en) * | 2018-03-21 | 2018-09-21 | 中国船舶重工集团公司第七二五研究所 | A kind of isostatic pressing mold of rotary target material |
CN211990930U (en) * | 2019-12-25 | 2020-11-24 | 芜湖映日科技有限公司 | Rotating target powder injection centering tool |
CN211947172U (en) * | 2020-04-08 | 2020-11-17 | 钢研昊普科技有限公司 | Hot isostatic pressing equipment stainless steel frock |
Also Published As
Publication number | Publication date |
---|---|
CN113843543A (en) | 2021-12-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
RU2353473C2 (en) | Method for manufacture of tubular target and its application | |
CN102806353B (en) | Production method of molybdenum alloy tube target | |
CN104480437A (en) | Production method for integrally formed cylindrical target | |
CN106001554B (en) | A kind of preparation method of rhenium iridium combustion chamber | |
CN106078098B (en) | A kind of preparation method of motor power room | |
CN103071791B (en) | Forming method of TiAl pipe target material in large length-diameter ratio | |
JP5679315B2 (en) | Manufacturing method of cylindrical Mo alloy target | |
CN1985345B (en) | Cylindrical target obtained by hot isostatic pressing | |
JPH0539566A (en) | Sputtering target and its production | |
CN106676484A (en) | Binding method of chrome pipe target material | |
CN113843543B (en) | Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve | |
CN101053899A (en) | Vertical casting and repairing device for large-scale shaft products and using method | |
JP6861035B2 (en) | Manufacturing method of cylindrical sputtering target | |
CN105817627A (en) | Preparation method for integrally-formed tungsten tube target material with large length-to-diameter ratio | |
EP0356584B1 (en) | Process for forming shapes from powder in a container | |
JP2017513719A (en) | Method for producing fuel nozzle material with metal cladding | |
CN105624619B (en) | A kind of preparation method of flat-panel monitor touch screen Al rare earth alloy rotatable sputtering target and its prepare target | |
CN117259755A (en) | Preparation method of large-size TC18 titanium alloy thin-wall part | |
JP6768606B2 (en) | Manufacturing method of cylindrical sputtering target | |
CN212350367U (en) | Sintering tool for cylindrical target | |
US20110052441A1 (en) | Method and device for hot isostatic pressing of alloyed materials | |
JP6830421B2 (en) | Manufacturing method of cylindrical sputtering target | |
KR102429251B1 (en) | Sputtering target and manufacturing method of sputtering target | |
CN117821912B (en) | Large-size multi-element alloy hot isostatic pressing tubular target and preparation method thereof | |
CN114131026B (en) | Process for producing molybdenum tube blank by mould pressing method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |