CN113843543A - Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve - Google Patents

Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve Download PDF

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Publication number
CN113843543A
CN113843543A CN202111181948.8A CN202111181948A CN113843543A CN 113843543 A CN113843543 A CN 113843543A CN 202111181948 A CN202111181948 A CN 202111181948A CN 113843543 A CN113843543 A CN 113843543A
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China
Prior art keywords
groove
fixture
powder
sheath
cover groove
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CN202111181948.8A
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CN113843543B (en
Inventor
姚力军
边逸军
潘杰
王学泽
黄东长
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Ningbo Jiangfeng Electronic Material Co Ltd
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Ningbo Jiangfeng Electronic Material Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
    • B23K31/02—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to soldering or welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/003—Cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0426—Fixtures for other work
    • B23K37/0435—Clamps
    • B23K37/0443—Jigs

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Powder Metallurgy (AREA)

Abstract

The application discloses reducible eccentric anchor clamps of rotatory target and dress powder canning processing method, wherein, anchor clamps, including metal body, metal body's one end has annular inner bag cover groove and annular outsourcing cover groove, the inner bag cover groove with outsourcing cover groove sets up with one heart and outsourcing cover groove is located the outside of inner bag cover groove, metal body still has the powder mouth of throwing that runs through metal body, it is located between inner bag cover groove and the outsourcing cover groove to throw the powder mouth. This application can fix a position the inner wrap through the inner wrap groove, can fix a position the outer wrap through the outer wrap groove, through control fixture machining tolerance, can control the relative position of the inside and outside wrap on the one hand, guarantee the concentricity of the inside and outside wrap when the welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control because the relative position of the inside and outside wrap of expend with heat and contract with cold changes, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, improve the yield after the hot isostatic pressing to more than 70%.

Description

Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a clamp capable of reducing eccentricity of a rotating target and a processing method of a powder filling sleeve.
Background
The target material is mainly divided into a planar target and a rotary target. The rotary Target (also called tubular Target for short) rotates at a certain speed in the sputtering process, and the whole surface of the rotary Target is uniformly sputtered due to the relative motion between the Rotating rotary Target and the stationary magnet.
At present, the binding method between the rotating target and the stainless steel liner tube is mainly 3, namely a thermal spraying method, a brazing method and an HIP (high-pressure hot isostatic pressing) integral forming method. The rotary target prepared by the thermal spraying method has the defects of low density, high oxygen content and the like, and cannot meet the requirement of high-quality coating products; the brazing method is difficult to realize the binding of the rotary target material with the length of more than 1000mm, and the production cost is high. The rotary target prepared by the HIP integral forming method has uniform components, no segregation, fine crystal grains and high purity, and can meet the requirements of the liquid crystal display and touch screen industries, but the rotary target prepared by the HIP integral forming method needs to be prepared into a powder filling sheath. As shown in a schematic diagram of a powder filling capsule of a rotary target in fig. 1, the powder filling capsule comprises an outer capsule 1, an inner capsule 2 and two cover plates 3 welded at the end parts of the inner and outer capsules, a powder filling gap 4 is formed between the inner and outer capsules, wherein the concentricity of capsule welding and powder feeding processes influences the eccentricity condition and the yield of finished products after hot isostatic pressing, and when the concentricity is poorly controlled during capsule welding and powder filling, the yield of the products after hot isostatic pressing is less than 50%.
Disclosure of Invention
The invention provides a clamp capable of reducing eccentricity of a rotating target and a processing method of a powder filling sleeve aiming at the problems.
The technical scheme adopted by the invention is as follows:
the utility model provides an eccentric anchor clamps of reducible rotatory target, includes metal body, metal body's one end has annular inner bag cover groove and annular outsourcing cover groove, inner bag cover groove with outsourcing cover groove sets up with one heart and outsourcing cover groove is located the outside in inner bag cover groove, metal body still has the powder mouth of throwing that runs through metal body, it is located between inner bag cover groove and the outsourcing cover groove to throw the powder mouth.
The preparation process of the rotary target mainly comprises two procedures which can influence the concentricity of a powder filling sleeve before HIP, wherein one procedure is as follows: when the cover plate is welded, if the relative positions of the inner sheath and the outer sheath are bad, the concentricity is influenced; the second step is as follows: when the cover plate is welded, the inner sheath and the outer sheath expand with heat and contract with cold, and the relative position of the inner sheath and the outer sheath changes to influence the concentricity. The utility model provides a metal fixture can fix a position the interior canning through interior canning groove, can fix a position the outer canning through exterior canning groove, through control fixture machining tolerance, on the one hand can control the relative position of inside and outside canning, guarantee the concentricity of inside and outside canning when the welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control is owing to the change of the inside and outside canning relative position of expend with heat and contract with cold, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, the yield after with hot isostatic pressing improves to more than 70%.
In actual use, the powder feeding port can be in various shapes, and the application is not particularly limited.
In one embodiment of the present invention, the metal body is made of stainless steel.
In one embodiment of the present invention, the metal body is a cylindrical structure, and the powder feeding ports are provided in a plurality and uniformly distributed around the axis of the metal body.
In one embodiment of the present invention, the inner jacket groove has the same groove depth as the outer jacket groove.
In an embodiment of the invention, the thickness of the metal body is greater than or equal to 30mm, and the groove depth of the inner jacket groove and the groove depth of the outer jacket groove are both greater than or equal to 10mm and smaller than the thickness of the metal body.
The thickness of the metal body is more than or equal to 30mm, the structural strength of the clamp can be effectively guaranteed, the groove depth is more than or equal to 10mm, better positioning can be guaranteed, and the inner and outer covers can be located, and the concentricity is guaranteed.
In one embodiment of the present invention, a flaring structure is disposed at an end of the powder feeding port facing away from the inner sheath groove.
The flaring structure is arranged, so that powder loading operation can be facilitated, and the outer diameter of the flaring structure can be larger than the gap between the inner sheath and the outer sheath in practical application.
The application also discloses a processing method of the powder filling sheath, which comprises the following steps:
1) placing the inner sheath and the outer sheath in a fixture, wherein the fixture is the fixture, the lower end of the inner sheath is inserted into the inner sheath groove of the fixture, and the lower end of the outer sheath is inserted into the outer sheath groove of the fixture, so that the upper end surfaces of the inner sheath and the outer sheath are flush;
2) welding the first cover plate on the inner sheath and the outer sheath, and after the welding is finished, keeping the inner sheath and the outer sheath in a clamp for cooling;
3) after cooling, inverting the clamp together with the inner sheath and the outer sheath, and filling powder from a feed port of the clamp;
4) and after powder filling is finished, taking down the fixture, and welding the second cover plate on the inner sheath and the outer sheath.
According to the processing method, the concentricity of the inner sheath and the outer sheath can be effectively guaranteed by using the welding and powder filling clamp, the concentricity of the rotary target after powder filling can be well controlled to be less than or equal to 0.3mm, and the yield after hot isostatic pressing is improved to be more than 70%.
In one embodiment of the present invention, the step 2) and the step 4) are welded by uniform spot welding.
The welding mode can ensure the concentricity of the inner sheath and the outer sheath during welding.
In one embodiment of the present invention, the step 3) is performed by loading powder from a feeding port through a funnel.
The invention has the beneficial effects that: the utility model provides a metal fixture can fix a position the interior canning through interior canning groove, can fix a position the outer canning through exterior canning groove, through control fixture machining tolerance, on the one hand can control the relative position of inside and outside canning, guarantee the concentricity of inside and outside canning when the welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control is owing to the change of the inside and outside canning relative position of expend with heat and contract with cold, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, the yield after with hot isostatic pressing improves to more than 70%.
Description of the drawings:
FIG. 1 is a schematic view of a powder containment capsule for a rotary target;
FIG. 2 is a schematic view of a fixture for reducing eccentricity of a rotating target;
FIG. 3 is a top view of a fixture for reducing eccentricity of a rotating target;
fig. 4 is a cross-sectional view taken along line a-a of fig. 3.
The figures are numbered:
1. an outer sheath; 2. an inner sheath; 3. a cover plate; 4. a powder filling gap; 5. a metal body; 6. an inner sheath groove; 7. wrapping a sleeve groove; 8. a powder feeding port.
The specific implementation mode is as follows:
the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 2, 3 and 4, a fixture capable of reducing eccentricity of a rotating target comprises a metal body 5, wherein one end of the metal body 5 is provided with an annular inner sleeve groove 6 and an annular outer sleeve groove 7, the inner sleeve groove 6 and the outer sleeve groove 7 are concentrically arranged, the outer sleeve groove 7 is positioned on the outer side of the inner sleeve groove 6, the metal body 5 is further provided with a powder feeding port 8 penetrating through the metal body 5, and the powder feeding port 8 is positioned between the inner sleeve groove 6 and the outer sleeve groove 7.
The preparation process of the rotary target mainly comprises two procedures which can influence the concentricity of a powder filling sleeve before HIP, wherein one procedure is as follows: when the cover plate is welded, if the relative positions of the inner sheath and the outer sheath are bad, the concentricity is influenced; the second step is as follows: when the cover plate is welded, the inner sheath and the outer sheath expand with heat and contract with cold, and the relative position of the inner sheath and the outer sheath changes to influence the concentricity. The utility model provides a metal fixture can fix a position the inner wrap through inner wrap groove 6, can fix a position the outer wrap through outer wrap groove 7, through control fixture machining tolerance, on the one hand, the relative position of the inner wrap and the outer wrap can be controlled, guarantee the concentricity of the inner wrap and the outer wrap when welding, on the other hand can pass through the centre gripping limiting displacement of anchor clamps again, control is because the relative position of the inner wrap and the outer wrap changes in expend with heat and contract with cold, can be better with the rotatory target concentricity control after the dress powder be less than or equal to 0.3mm, the yield after with hot isostatic pressing improves to more than 70%.
In actual use, the powder feeding port 8 may have various shapes, and the present application is not particularly limited.
In this embodiment, the metal body 5 is made of stainless steel. In other embodiments, other metal materials meeting the requirements can be adopted.
In practice, it is preferable that the metal body 5 has a cylindrical structure, and the powder feeding ports 8 are provided in plural numbers and uniformly distributed around the axis of the metal body 5. As shown in fig. 4, in the present embodiment, the number of the powder feeding ports 8 is 2.
As shown in fig. 4, in the present embodiment, the inner jacket groove 6 has the same groove depth as the outer jacket groove 7.
In this embodiment, the thickness of the metal body 5 is greater than or equal to 30mm, and the groove depth of the inner jacket groove 6 and the groove depth of the outer jacket groove 7 are both greater than or equal to 10mm and smaller than the thickness of the metal body 5. The thickness of the metal body 5 is more than or equal to 30mm, so that the structural strength of the clamp can be effectively guaranteed, the groove depth is more than or equal to 10mm, so that better positioning can be guaranteed, and the inner and outer sheaths can be guaranteed, so that the concentricity is guaranteed.
In practical use, the end of the powder feeding port 8, which faces away from the inner sheath groove 6, can be provided with a flaring structure. The flaring structure is arranged, so that powder loading operation can be facilitated, and the outer diameter of the flaring structure can be larger than the gap between the inner sheath and the outer sheath in practical application.
The embodiment also discloses a processing method of the powder filling sheath, which comprises the following steps:
1) placing an inner sheath and an outer sheath in a fixture, wherein the fixture is the fixture of the embodiment, the lower end of the inner sheath is inserted into an inner sheath groove 6 of the fixture, and the lower end of the outer sheath is inserted into an outer sheath groove 7 of the fixture, so that the upper end surfaces of the inner sheath and the outer sheath are flush;
2) welding the first cover plate on the inner sheath and the outer sheath, and after the welding is finished, keeping the inner sheath and the outer sheath in a clamp for cooling;
3) after cooling, inverting the clamp together with the inner sheath and the outer sheath, and filling powder from a feed port of the clamp;
4) and after powder filling is finished, taking down the fixture, and welding the second cover plate on the inner sheath and the outer sheath.
According to the processing method, the concentricity of the inner sheath and the outer sheath can be effectively guaranteed by using the welding and powder filling clamp, the concentricity of the rotary target after powder filling can be well controlled to be less than or equal to 0.3mm, and the yield after hot isostatic pressing is improved to be more than 70%.
In this embodiment, step 2) and step 4) are welded by means of uniform spot welding. The welding mode can ensure the concentricity of the inner sheath and the outer sheath during welding.
In practice, step 3) is preferably carried out from the feeding port through a funnel for facilitating powder loading.
The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the present specification and the drawings can be directly or indirectly applied to other related technical fields and are included in the scope of the present invention.

Claims (10)

1. The utility model provides an eccentric anchor clamps of reducible rotatory target, its characterized in that, includes metal ontology, metal ontology's one end has annular inner bag cover groove and annular outsourcing cover groove, inner bag cover groove with outsourcing cover groove sets up with one heart and outsourcing cover groove is located the outside in inner bag cover groove, metal ontology still has the powder mouth of throwing that runs through metal ontology, it is located between inner bag cover groove and the outsourcing cover groove to throw the powder mouth.
2. The fixture for reducing eccentricity of a rotating target according to claim 1, wherein the metal body is made of stainless steel.
3. The fixture for reducing eccentricity of a rotating target according to claim 1, wherein the metal body has a cylindrical structure, and the powder feeding ports are provided in a plurality and uniformly distributed around the axis of the metal body.
4. The fixture for reducing eccentricity of a rotary target according to claim 1, wherein the inner casing groove has the same groove depth as the outer casing groove.
5. The fixture for reducing eccentricity of a rotating target according to claim 4, wherein the thickness of the metal body is greater than or equal to 30mm, and the depth of the inner sheath groove and the depth of the outer sheath groove are both greater than or equal to 10mm and smaller than the thickness of the metal body.
6. The fixture for reducing the eccentricity of the rotary target according to claim 1, wherein the end of the powder feeding port facing away from the inner sheath groove has a flaring structure.
7. The processing method of the powder filling sheath is characterized by comprising the following steps:
1) placing an inner sheath and an outer sheath in a fixture, wherein the fixture is the fixture in any one of claims 1-6, the lower end of the inner sheath is inserted into an inner sheath groove of the fixture, and the lower end of the outer sheath is inserted into an outer sheath groove of the fixture, so that the upper end surfaces of the inner sheath and the outer sheath are flush;
2) welding the first cover plate on the inner sheath and the outer sheath, and after the welding is finished, keeping the inner sheath and the outer sheath in a clamp for cooling;
3) after cooling, inverting the clamp together with the inner sheath and the outer sheath, and filling powder from a feed port of the clamp;
4) and after powder filling is finished, taking down the fixture, and welding the second cover plate on the inner sheath and the outer sheath.
8. The method for manufacturing a powder containing capsule as set forth in claim 7, wherein the step 2) of welding is performed by means of uniform spot welding.
9. A method of manufacturing a powder capsule as recited in claim 7, wherein said step 3) of loading powder from the hopper through a hopper.
10. A method for manufacturing a powder containing capsule as set forth in claim 7, wherein said step 4) is performed by means of uniform spot welding.
CN202111181948.8A 2021-10-11 2021-10-11 Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve Active CN113843543B (en)

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CN202111181948.8A CN113843543B (en) 2021-10-11 2021-10-11 Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve

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CN202111181948.8A CN113843543B (en) 2021-10-11 2021-10-11 Clamp capable of reducing eccentricity of rotating target and processing method of powder filling sleeve

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CN113843543B CN113843543B (en) 2022-12-23

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130192981A1 (en) * 2010-07-12 2013-08-01 Materion Advanced Materials Technologies And Services Inc. Direct cooled rotary sputtering target
CN206997770U (en) * 2017-04-01 2018-02-13 南京云启金锐新材料有限公司 A kind of cold isostatic compaction mould
CN107876958A (en) * 2016-09-29 2018-04-06 宁波江丰电子材料股份有限公司 The welding method of weld jig and alloy product
CN108556135A (en) * 2018-03-21 2018-09-21 中国船舶重工集团公司第七二五研究所 A kind of isostatic pressing mold of rotary target material
CN211947172U (en) * 2020-04-08 2020-11-17 钢研昊普科技有限公司 Hot isostatic pressing equipment stainless steel frock
CN211990930U (en) * 2019-12-25 2020-11-24 芜湖映日科技有限公司 Rotating target powder injection centering tool

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130192981A1 (en) * 2010-07-12 2013-08-01 Materion Advanced Materials Technologies And Services Inc. Direct cooled rotary sputtering target
CN107876958A (en) * 2016-09-29 2018-04-06 宁波江丰电子材料股份有限公司 The welding method of weld jig and alloy product
CN206997770U (en) * 2017-04-01 2018-02-13 南京云启金锐新材料有限公司 A kind of cold isostatic compaction mould
CN108556135A (en) * 2018-03-21 2018-09-21 中国船舶重工集团公司第七二五研究所 A kind of isostatic pressing mold of rotary target material
CN211990930U (en) * 2019-12-25 2020-11-24 芜湖映日科技有限公司 Rotating target powder injection centering tool
CN211947172U (en) * 2020-04-08 2020-11-17 钢研昊普科技有限公司 Hot isostatic pressing equipment stainless steel frock

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