CN113834812A - Inspection apparatus and inspection method - Google Patents

Inspection apparatus and inspection method Download PDF

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Publication number
CN113834812A
CN113834812A CN202110695969.5A CN202110695969A CN113834812A CN 113834812 A CN113834812 A CN 113834812A CN 202110695969 A CN202110695969 A CN 202110695969A CN 113834812 A CN113834812 A CN 113834812A
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China
Prior art keywords
image
curved surface
imaging device
brightness
inspection
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Chinese (zh)
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河崎武士
藤井雅治
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Juki Corp
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Juki Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/888—Marking defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G01N2021/9583—Lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention properly performs the appearance inspection of the object with the curved surface. The inspection device comprises: a table for supporting an object having a curved surface; an illumination device that illuminates an object supported on the table with illumination light; an imaging device having an optical system and an image sensor; an imaging control unit that causes the imaging device to image an image for adjustment of a curved surface arranged in a field of view of an optical system; and a table control unit for adjusting the brightness of the image for adjustment by tilting the table. The imaging control unit causes the imaging device to image the inspection image of the curved surface disposed in the field of view after the brightness of the adjustment image is adjusted.

Description

Inspection apparatus and inspection method
Technical Field
The present invention relates to an inspection apparatus and an inspection method.
Background
In a production process of an electronic device, a component mounting apparatus (an object working apparatus) as disclosed in patent document 1 is used. The appearance of the substrate on which the components are mounted is inspected by an Inspection apparatus called an Automated Optical Inspection (AOI).
Patent document 1: international publication No. 2019/111388
There is a demand for performing appearance inspection of various objects using an inspection apparatus. For example, there is a demand for appropriately performing appearance inspection of an object having a curved surface.
Disclosure of Invention
The purpose of the present invention is to appropriately perform an appearance inspection of an object having a curved surface.
According to the present invention, there is provided an inspection apparatus comprising: a table for supporting an object having a curved surface; an illumination device that illuminates the object supported by the table with illumination light; an imaging device having an optical system and an image sensor; an imaging control unit that causes the imaging device to image an image for adjustment of the curved surface arranged in a field of view of the optical system; and a table control unit that tilts the table to adjust the brightness of the adjustment image, wherein the imaging control unit causes the imaging device to image the inspection image of the curved surface arranged in the field of view after the brightness of the adjustment image is adjusted.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, the appearance inspection of the object having the curved surface can be appropriately performed.
Drawings
Fig. 1 is a diagram schematically showing an inspection apparatus according to an embodiment.
Fig. 2 is a functional block diagram showing a control device according to an embodiment.
Fig. 3 is a flowchart showing an inspection method according to the embodiment.
Fig. 4 is a view of the object supported by the table according to the embodiment as viewed from above.
Fig. 5 is a view schematically showing a state in which the 1 st range of the curved surface is arranged in the visual field range of the optical system according to the embodiment.
Fig. 6 is a diagram schematically showing an image for adjustment of the 1 st range of the curved surface according to the embodiment.
Fig. 7 is a diagram for explaining processing of the stage control unit according to the embodiment.
Fig. 8 is a diagram schematically showing an image for adjustment of the 1 st range of the curved surface after the table is tilted according to the embodiment.
Fig. 9 is a diagram schematically showing an inspection image in the 1 st range displayed on the display device according to the embodiment.
Fig. 10 is a view schematically showing a state in which the 2 nd range of the curved surface is arranged in the field of view of the optical system according to the embodiment.
Fig. 11 is a block diagram showing a computer system according to an embodiment.
Fig. 12 is a diagram for explaining processing of the stage control unit according to another embodiment.
Detailed Description
Embodiments according to the present invention will be described below with reference to the drawings, but the present invention is not limited thereto. The constituent elements of the embodiments described below can be combined as appropriate. In addition, some of the components may not be used.
In the embodiment, an XYZ rectangular coordinate system is defined, and the positional relationship of each portion will be described with reference to the XYZ rectangular coordinate system. A direction parallel to the X axis in the horizontal plane is referred to as an X axis direction. A direction parallel to a Y axis orthogonal to the X axis in the horizontal plane is defined as a Y axis direction. A direction parallel to a Z axis orthogonal to the horizontal plane is defined as a Z axis direction. The rotation or inclination direction about the X axis is defined as the θ X direction. The rotation or inclination direction about the Y axis is defined as the θ Y direction. The rotation or inclination direction about the Z axis is defined as θ Z direction. A plane including the X axis and the Y axis is appropriately referred to as an XY plane. The XY plane is parallel to the horizontal plane. The Z axis is parallel to the plumb line. The Z-axis direction is the up-down direction. The + Z direction is an up direction and the-Z direction is a down direction. The Z axis is orthogonal to the XY plane.
[ inspection apparatus ]
Fig. 1 is a diagram schematically showing an inspection apparatus 1 according to an embodiment. In the embodiment, the Inspection apparatus 1 is an automatic Optical Inspection Apparatus (AOI), which is one of appearance Inspection apparatuses.
The inspection apparatus 1 includes: a table 3 for supporting the object 2; a table driving device 4 for tilting the table 3; an illumination device 5 that illuminates the object 2 supported by the table 3 with illumination light; an imaging device 8 having an optical system 6 and an image sensor 7; a shooting movement device 9 that moves the shooting device 8; a control device 10 including a computer system; and a display device 11 that displays the display data.
The object 2 is an inspection object of the inspection apparatus 1. The object 2 has a curved surface 12. Examples of the object 2 having the curved surface 12 include a mirror, a lens, and a sheet metal member. The curved surface 12 is an inspection target of the inspection apparatus 1. The inspection apparatus 1 performs appearance inspection of the curved surface 12.
The table 3 has a support surface 13 that supports at least a part of the object 2. The support surface 13 of the table 3 faces in the + Z direction. The support surface 13 is parallel to the XY plane. Further, the support surface 13 may be inclined with respect to the XY plane. The object 2 is supported on the table 3 such that the curved surface 12 faces upward. In a state where the object 2 is supported on the table 3, the curved surface 12 protrudes upward.
The table driving device 4 can tilt the table 3 in the θ X direction and the θ Y direction, respectively. By tilting the table 3, the object 2 supported by the table 3 is tilted in the θ X direction and the θ Y direction, respectively. The table driving device 4 includes: a plurality of actuators 14 that generate power to tilt the table 3; and a base member 15 that supports the table 3 via the plurality of actuators 14.
The illumination device 5 illuminates the curved surface 12 of the object 2 supported on the table 3 with illumination light. The illumination device 5 is disposed above the table 3. The illumination device 5 has a tilted illumination device 16 and a coaxial illumination device 17.
The oblique illumination device 16 includes a plurality of annular light sources 18 and a support member 19 that supports the plurality of light sources 18. The Light source 18 is exemplified by a Light Emitting Diode (LED). The light source 18 emits white light as illumination light.
In the embodiment, the light sources 18 include a 1 st light source 18A having a 1 st inner diameter, a 2 nd light source 18B having a 2 nd inner diameter larger than the 1 st inner diameter, and a 3 rd light source 18C having a 3 rd inner diameter larger than the 2 nd inner diameter. The 1 st light source 18A among the plurality of light sources 18 is disposed at a position farthest from the stage 3, the 2 nd light source 18B is disposed at a position second distant from the stage 3 next to the 1 st light source 18A, and the 3 rd light source 18C is disposed at a position closest to the stage 3. That is, the 1 st light source 18A among the plurality of light sources 18 is disposed at the highest position, the 2 nd light source 18B is disposed at the second highest position next to the 1 st light source 18A, and the 3 rd light source 18C is disposed at the lowest position. When the table 3 does not support the object 2, the illumination light emitted from the 1 st light source 18A is incident on the support surface 13 at the 1 st incident angle. The illumination light emitted from the 2 nd light source 18B is incident on the supporting surface 13 at the 2 nd incident angle. The illumination light emitted from the 3 rd light source 18C enters the supporting surface 13 at the 3 rd incident angle. The 1 st, 2 nd and 3 rd angles of incidence are different.
The coaxial illumination device 17 includes: a light source 21 disposed around the incident surface 20 of the optical system 6 of the imaging device 8; and a support member 22 that supports the light source 21. The light sources 21 are arranged at intervals around the incident surface 20 of the optical system 6. The Light source 21 is exemplified by a Light Emitting Diode (LED). The light source 21 emits white light as illumination light.
The light source 21 emits illumination light in a direction parallel to the optical axis AX of the optical system 6. In the embodiment, the optical axis AX of the optical system 6 is parallel to the Z axis. When the object 2 is not supported by the table 3 and the support surface 13 is parallel to the XY plane, the illumination light emitted from the light source 21 is incident perpendicularly to the support surface 13.
The imaging device 8 images the curved surface 12 of the object 2 illuminated by the illumination device 5. The imaging device 8 is disposed above the table 3. The imaging device 8 images the curved surface 12 of the object 2 supported by the table 3 from above.
The photographing device 8 has an optical system 6 and an image sensor 7. The optical axis AX of the optical system 6 is disposed inside the annular light source 18. The image sensor 7 acquires an image 34 of the object 2 via the optical system 6. As the image sensor 7, a ccd (charge device) image sensor or a cmos (complementary Metal Oxide semiconductor) image sensor is exemplified. The image 34 captured by the imaging device 8 is a color image. Further, the image 34 captured by the imaging device 8 may be a monochrome image.
The photographing moving device 9 moves the photographing device 8 within an XY plane orthogonal to the optical axis AX of the optical system 6. The imaging movement device 9 includes: a holding member 23 that holds the main body of the imaging device 8; and an actuator 24 that generates power for moving the imaging device 8 via the holding member 23. The photographing device 8 moves in the XY plane, and thereby the lighting device 5 also moves in the XY plane together with the photographing device 8.
By moving the imaging device 8 in the XY plane, the field of view 25 of the optical system 6 moves in the X-axis direction and the Y-axis direction with respect to the object 2. The visual field range 25 of the optical system 6 is a photographable range of the photographing device 8. The field of view 25 of the optical system 6 is smaller than the curved surface 12. By adjusting the relative positions of the field of view 25 of the optical system 6 and the curved surface 12 in the XY plane, the imaging device 8 can image each of the plurality of ranges 40 of the curved surface 12.
The control device 10 controls the table driving device 4, the illumination device 5, the imaging device 8, and the imaging movement device 9. The control device 10 includes an arithmetic Processing device including a processor such as a cpu (central Processing unit) and a storage device including a memory and a storage such as a rom (read Only memory) or a ram (random Access memory). The arithmetic processing device performs arithmetic processing in accordance with a computer program stored in the storage device. The control device 10 may be formed of an Integrated circuit such as an asic (application Specific Integrated circuit) or an fpga (field Programmable Gate array), for example.
The display device 11 has a display screen for displaying display data. Examples of the Display device 11 include a flat panel Display such as a Liquid Crystal Display (LCD) or an Organic EL Display (OELD). The display data displayed on the display device 11 includes an image 34 of the curved surface 12. The operator can confirm the state of the curved surface 12 on the display screen of the display device 11.
[ control device ]
Fig. 2 is a functional block diagram showing the control device 10 according to the embodiment. The control device 10 includes an illumination control unit 26, an imaging position control unit 27, an imaging control unit 28, an image acquisition unit 29, an image processing unit 30, a table control unit 31, a display control unit 32, and a storage unit 33.
The illumination control unit 26 outputs a control command to the illumination device 5, and illuminates the object 2 supported by the table 3 with illumination light. In the embodiment, the illumination control unit 26 outputs a control command to the coaxial illumination device 17, and illuminates the object 2 supported by the table 3 with illumination light.
The imaging position control unit 27 outputs a control command to the imaging movement device 9 to move the imaging device 8 in the XY plane. The imaging position control unit 27 outputs a control command to the imaging movement device 9 to adjust the relative position between the visual field range 25 of the optical system 6 and the object 2 supported by the table 3 in the XY plane.
The imaging control unit 28 outputs a control command to the imaging device 8, and images an image 34 of the curved surface 12 disposed in the visual field 25 of the optical system 6. The imaging control unit 28 outputs a control command to the imaging device 8 to control imaging conditions including at least one of the timing of imaging the curved surface 12, the shutter speed, and the aperture of the optical system 6.
The image acquisition unit 29 acquires an image 34 of the curved surface 12 disposed in the field of view 25 of the optical system 6 from the imaging device 8.
In the embodiment, the image 34 captured by the imaging device 8 includes an adjustment image 34A and an inspection image 34B. The image 34 acquired by the image acquisition unit 29 includes an adjustment image 34A and an inspection image 34B.
The image processing unit 30 processes the image 34 of the curved surface 12 acquired by the image acquiring unit 29. The image processing unit 30 calculates the brightness of the image 34. The image 34 is composed of a plurality of pixels 35. In the embodiment, the image processing unit 30 calculates the luminance of each of the plurality of pixels 35 constituting the image 34.
The table control unit 31 outputs a control command to the table driving device 4 to tilt the table 3. The table control unit 31 tilts the table 3 based on the brightness of the adjustment image 34A calculated by the image processing unit 30. The table control unit 31 tilts the table 3 to adjust the brightness of the adjustment image 34A.
In the embodiment, the stage control section 31 tilts the stage 3 based on the calculation result of the image processing section 30 so that the luminance of each of the plurality of pixels 35 constituting the adjustment image 34A becomes equal to or higher than a predetermined luminance threshold value 36. Further, the stage control section 31 tilts the stage 3 based on the calculation result of the image processing section 30 so that the difference between the maximum value and the minimum value of the luminance of the pixel 35 in the adjustment image 34A becomes equal to or less than a predetermined difference threshold value 37.
The display control unit 32 causes the display device 11 to display the image 34 of the curved surface 12 acquired by the image acquisition unit 29.
The storage unit 33 stores a predetermined luminance threshold value 36 and a predetermined difference threshold value 37. The storage unit 33 stores the image 34 of the curved surface 12 acquired by the image acquisition unit 29.
[ inspection method ]
Fig. 3 is a flowchart showing an inspection method according to the embodiment. The object 2 is disposed on a support surface 13 of the table 3. The object 2 is supported on the table 3 so that the curved surface 12 faces the imaging device 8 (step S1).
As shown in fig. 1, in the embodiment, the curved surface 12 as the inspection object is convex upward. That is, in the embodiment, the curved surface 12 as the inspection target is a convex surface protruding toward the imaging device 8.
Fig. 4 is a view of the object 2 supported by the table 3 according to the embodiment as viewed from above. As shown in fig. 4, a plurality of ranges 40 are set in the curved surface 12. The outline and size of the 1 field 40 are substantially equal to the outline and size of the field of view 25.
The illumination control unit 26 outputs a control command to the coaxial illumination device 17 to start illumination of the curved surface 12 of the object 2 supported on the table 3. The curved surface 12 of the object 2 is illuminated by illumination light emitted from the light source 21 of the coaxial illumination device 17 (step S2).
The counter i is set to "1" as an initial value (step S3).
The imaging position control unit 27 outputs a control command to the imaging movement device 9 so that the i-th range 40 of the curved surface 12 is disposed in the visual field range 25 of the optical system 6 of the imaging device 8 (step S4).
When the counter i is "1", the imaging position control unit 27 outputs a control command to the imaging movement device 9 so that the 1 st range 41 of the curved surface 12 is disposed in the visual field range 25 of the optical system 6 of the imaging device 8.
Fig. 5 is a diagram schematically showing a state in which the 1 st region 41 of the curved surface 12 is arranged in the visual field 25 of the optical system 6 according to the embodiment. As shown in fig. 5, the imaging position control unit 27 moves the imaging device 8 in the XY plane, and adjusts the relative positions of the field of view 25 of the optical system 6 and the curved surface 12 in the XY plane so that the 1 st range 41 of the curved surface 12 is disposed in the field of view 25 of the optical system 6.
The imaging control unit 28 causes the imaging device 8 to image the adjustment image 34A of the curved surface 12 disposed in the visual field 25 of the optical system 6. The image obtaining unit 29 obtains the adjustment image 34A of the 1 st range 41 from the imaging device 8 (step S5).
Fig. 6 is a diagram schematically showing an adjustment image 34A of the 1 st range 41 of the curved surface 12 according to the embodiment. As shown in fig. 6, in the adjustment image 34A in the 1 st range 41, there may be a 1 st region 51 with low luminance and a 2 nd region 52 with high luminance.
As shown in fig. 5, depending on the angle of the 1 st range 41 with respect to the optical axis AX, there is a possibility that the illumination light incident on the 1 st part 61 of the 1 st range 41 is not reflected to the imaging device 8, and the illumination light incident on the 2 nd part 62 of the 1 st range 41 is reflected to the imaging device 8. The 1 st portion 61 of the curved surface 12 corresponds to the 1 st area 51 of the adjustment image 34A. The 2 nd portion 62 of the curved surface 12 corresponds to the 2 nd area 52 of the adjustment image 34A.
The image processing unit 30 calculates the brightness of the adjustment image 34A in the 1 st range 41 acquired by the image acquiring unit 29. The adjustment image 34A is composed of a plurality of pixels 35. In the embodiment, the image processing unit 30 calculates the luminance of each of the plurality of pixels 35 constituting the adjustment image 34A (step S6).
The table control unit 31 tilts the table 3 based on the brightness of the adjustment image 34A calculated by the image processing unit 30. In the embodiment, the stage control section 31 tilts the stage 3 based on the calculation result of the image processing section 30 so that the luminance of each of the plurality of pixels 35 constituting the image for adjustment 34A is equal to or higher than the predetermined luminance threshold value 36 (step S7).
That is, the table control unit 31 tilts the object 2 supported on the table 3 so that the entire adjustment image 34A is brightly white while monitoring the calculation result of the image processing unit 30.
Fig. 7 is a diagram for explaining the processing of the stage control unit 31 according to the embodiment. As shown in fig. 7, the stage control unit 31 tilts the stage 3 so that the luminance of the 1 st region 51 in the adjustment image 34A in the 1 st range 41 is increased.
For example, in the case where the 1 st region 51 having a luminance smaller than the luminance threshold value 36 and the 2 nd region 52 having a luminance equal to or larger than the luminance threshold value 36 are present in the adjustment image 34A in the 1 st range 41, the stage control section 31 tilts the stage 3 so that the 1 st part 61 of the curved surface 12 corresponding to the 1 st region 51 comes close to the imaging device 8, that is, the 1 st part 61 moves in the + Z direction. Further, the table control unit 31 may tilt the table 3 so that the 2 nd portion 62 of the curved surface 12 corresponding to the 2 nd region 52 is separated from the imaging device 8, that is, the 2 nd portion 62 is moved in the-Z direction.
Fig. 8 is a diagram schematically showing an image 34A for adjustment of the 1 st range 41 of the curved surface 12 after the table 3 is tilted according to the embodiment. As shown in fig. 8, when the table 3 is tilted, the 1 st region 51 having low luminance disappears, and the entire adjustment image 34A becomes bright white. That is, the luminance of each of the plurality of pixels 35 constituting the adjustment image 34A in the 1 st range 41 is equal to or greater than the luminance threshold value 36.
Further, the stage control section 31 tilts the stage 3 based on the calculation result of the image processing section 30 so that the difference between the maximum value and the minimum value of the luminance of the pixel 35 in the adjustment image 34A becomes equal to or smaller than the predetermined difference threshold value 37 (step S8).
That is, the table control unit 31 tilts the object 2 supported on the table 3 so that the brightness distribution of the adjustment image 34A becomes uniform, while monitoring the calculation result of the image processing unit 30.
By the processing in step S7 and step S8, the table 3 is tilted so that the luminance of each of the plurality of pixels 35 constituting the adjustment image 34A becomes equal to or higher than the luminance threshold value 36 and the distribution of the luminance of the adjustment image 34A becomes uniform.
After the brightness of the adjustment image 34A is adjusted in steps S7 and S8, the imaging control unit 28 causes the imaging device 8 to capture an inspection image 34B of the curved surface 12 disposed in the visual field 25 of the optical system 6. The imaging control unit 28 causes the imaging device 8 to capture the inspection image 34B while maintaining the inclination of the table 3 after the brightness of the adjustment image 34A is adjusted. That is, the inspection apparatus 1 tilts the table 3 so that the luminance of each of the plurality of pixels 35 constituting the adjustment image 34A becomes equal to or higher than the luminance threshold value 36 and the luminance distribution of the adjustment image 34A becomes uniform, and then proceeds to the imaging of the inspection image 34B while maintaining the tilt of the table 3. The inspection image 34B is the same image 34 as the adjustment image 34A whose brightness has been adjusted in step S7 and step S8. The image acquisition unit 29 acquires the inspection image 34B of the 1 st region 41 from the imaging device 8 (step S9).
The inspection image 34B of the 1 st range 41 acquired in step S9 is the image 34 for appearance inspection of the curved surface 12. The display controller 32 causes the display device 11 to display the inspection image 34B of the 1 st area 41 acquired in step S9 (step S10).
Fig. 9 is a diagram schematically showing the inspection image 34B of the 1 st region 41 displayed on the display device 11 according to the embodiment. In the case where there is no abnormality in the 1 st range 41, the inspection image 34B of the 1 st range 41 is displayed in white. In the case where there is an abnormality in the 1 st range 41, in the inspection image 34B of the 1 st range 41, the abnormal portion 38 is displayed by black. As the abnormality of the 1 st range 41, a local damage in which foreign matter adheres to the 1 st range 41 or the 1 st range 41 is exemplified. If there is an abnormal portion 38, the illumination light incident on the abnormal portion 38 is not reflected to the imaging device 8. As a result, the abnormal portion 38 appears black in the image 34. The operator can determine whether or not there is an abnormality in the 1 st range 41 by checking the inspection image 34B displayed on the display device 11.
The image processing unit 30 may perform image processing on the inspection image 34B acquired in step S9 to determine whether or not there is an abnormality in the 1 st range 41.
The imaging position control unit 27 determines whether or not the inspection of the curved surface 12 is finished (step S11).
If it is determined in step S11 that the inspection of curved surface 12 has not been completed (No in step S11), counter i is incremented (step S12).
After the counter i is incremented in step S12, the process returns to step S4.
When the counter i is set to "2", the imaging position control unit 27 outputs a control command to the imaging movement device 9 so that the 2 nd range 42 of the curved surface 12 is arranged in the visual field range 25 of the optical system 6 of the imaging device 8 (step S4).
Fig. 10 is a diagram schematically showing a state in which the 2 nd range 42 of the curved surface 12 is arranged in the visual field range 25 of the optical system 6 according to the embodiment. As shown in fig. 10, the imaging position control unit 27 can move the imaging device 8 in the XY plane, and adjust the relative positions of the field of view 25 of the optical system 6 and the curved surface 12 in the XY plane so that the 2 nd range 42 of the curved surface 12 is disposed in the field of view 25 of the optical system 6.
Next, the processing of step S5 to step S10 described above is performed on the 2 nd range 42 of the curved surface 12. That is, the imaging control unit 28 causes the imaging device 8 to capture the adjustment image 34A of the 2 nd range 42 of the curved surface 12 disposed in the visual field 25 of the optical system 6. The table control unit 31 tilts the table 3 based on the calculation result of the image processing unit 30 to adjust the brightness of the adjustment image 34A in the 2 nd range 42. After the brightness of the adjustment image 34A in the 2 nd range 42 is adjusted, the imaging control unit 28 causes the imaging device 8 to capture the inspection image 34B in the 2 nd range 42 disposed in the visual field 25 of the optical system 6. The display control unit 32 causes the display device 11 to display the inspection image 34B in the 2 nd range 42.
After the processing from step S4 to step S10 is completed, the imaging position control unit 27 determines whether or not the inspection of the curved surface 12 is completed with respect to the 2 nd range 42 of the curved surface 12 (step S11).
As described with reference to fig. 4, a plurality of ranges 40 are set in the curved surface 12. The inspection of the curved surface 12 is determined to be completed by the completion of the processing from step S4 to step S10 for each of the plurality of ranges 40 (step S11: Yes).
As described above, in the embodiment, the imaging control unit 28 causes the imaging device 8 to capture the inspection image 34B in the 1 st range 41 after the brightness of the adjustment image 34A in the 1 st range 41 of the curved surface 12 is adjusted, and causes the imaging device 8 to capture the inspection image 34B in the 2 nd range 42 after the brightness of the adjustment image 34A in the 2 nd range 42 of the curved surface 12 is adjusted. When N ranges 40 are set in the curved surface 12, the processing of step S4 to step S10 is performed for each of the N ranges 40. The object 2 is continuously supported on the table 3 until the adjustment of the brightness of the adjustment image 34A and the acquisition of the inspection image 34B are completed for each of the N ranges 40. As described above, the adjustment of the brightness of the adjustment image 34A and the acquisition of the inspection image 34B are performed by the step-and-repeat method for each of the plurality of ranges 40.
[ computer System ]
Fig. 11 is a block diagram showing a computer system 1000 according to an embodiment. The control device 10 includes a computer system 1000. The computer system 1000 includes a processor 1001 such as a cpu (central Processing unit), a main memory 1002 including a nonvolatile memory such as a rom (read Only memory) and a volatile memory such as a ram (random Access memory), a storage 1003, and an interface 1004 including an input/output circuit. The functions of the control device 10 are stored in the memory 1003 as a computer program. The processor 1001 reads a computer program from the storage 1003, expands the computer program in the main memory 1002, and executes the above-described processing in accordance with the computer program. Further, the computer program may also be transferred to the computer system 1000 via a network.
The computer program enables the computer system 1000 to execute: illuminating the object 2 having the curved surface 12 with the illumination light; an image 34A for adjustment of the curved surface 12 disposed in the visual field range 25 of the optical system 6 of the imaging device 8 is captured; adjusting the brightness of the adjustment image 34A by tilting the object 2; and after the brightness of the adjustment image 34A is adjusted, an inspection image 34B of the curved surface 12 arranged in the visual field 25 is captured.
[ Effect ]
As described above, according to the embodiment, the adjustment image 34A of the curved surface 12 is acquired before the inspection image 34B of the curved surface 12 is acquired. The brightness of the adjustment image 34A is adjusted by tilting the table 3. In the embodiment, the table 3 is tilted so that the entire adjustment image 34A is brightly white. After the brightness of the adjustment image 34A is adjusted, an inspection image 34B of the curved surface 12 is acquired. Thereby, the appearance inspection of the object 2 having the curved surface 12 is appropriately performed. As described above, the abnormal portion 38 of the curved surface 12 becomes black in the image 34. In the embodiment, before the inspection image 34B is acquired, the inclination of the object 2 is adjusted so that the entire adjustment image 34A is brightly white. The adjustment image 34A after the brightness adjustment is the same image 34 as the inspection image 34B. In the case where the abnormal portion 38 exists in the inspection image 34B, the abnormal portion 38 is found with high accuracy from the inspection image 34B by the contrast between white and black. Thereby, the appearance inspection of the curved surface 12 is appropriately performed.
In the embodiment, the table control unit 31 tilts the table 3 so that the entire adjustment image 34A is bright white while monitoring the brightness of the adjustment image 34A. For example, when the table 3 is tilted based on the detection data of the tilt sensor, it is necessary to perform positioning of the table 3 and the object 2 with high accuracy. According to the embodiment, feedback control for tilting the table 3 is performed based on the brightness of the adjustment image 34A so that the entire adjustment image 34A becomes bright white. Therefore, even if the positioning of the table 3 and the object 2 is not performed with high accuracy, the table controller 31 can tilt the table 3 so that the entire adjustment image 34A is bright white.
The stage control unit 31 tilts the stage 3 so that the luminance of each of the plurality of pixels 35 constituting the adjustment image 34A becomes equal to or higher than a predetermined luminance threshold value 36. Thus, the table control unit 31 can make the entire adjustment image 34A bright white.
The stage control unit 31 tilts the stage 3 so that the difference between the maximum value and the minimum value of the luminance of the pixel 35 in the adjustment image 34A becomes equal to or smaller than the difference threshold value 37. Thus, the table control unit 31 can make the distribution of the luminance of the adjustment image 34A uniform.
The imaging control unit 28 causes the imaging device 8 to capture the inspection image 34B while maintaining the inclination of the table 3 after the brightness of the adjustment image 34A is adjusted. That is, after the table 3 is tilted so that the entire adjustment image 34A is brightly white, the inspection image 34B is captured while the tilt of the table 3 is maintained. This enables the appearance of the curved surface 12 to be appropriately and efficiently inspected.
The illumination device 5 includes a coaxial illumination device 17, and the coaxial illumination device 17 includes a light source 21 disposed around an incident surface 20 of the optical system 6. The light source 21 of the coaxial illumination device 17 emits illumination light in the Z-axis direction parallel to the optical axis AX of the optical system 6. This sufficiently increases the brightness of the image 34. That is, the entire image 34 is brightly white.
The object 2 is supported on the table 3 so that the curved surface 12 faces the imaging device 8. The curved surface 12 of the inspection object is convex toward the photographing device 8. In the case where the 1 st region 51 having the luminance smaller than the luminance threshold value 36 and the 2 nd region 52 having the luminance equal to or larger than the luminance threshold value 36 are present in the adjustment image 34A, the stage control section 31 tilts the stage 3 so that the 1 st part 61 of the curved surface 12 corresponding to the 1 st region 51 comes close to the imaging device 8 or the 2 nd part 62 of the curved surface 12 corresponding to the 2 nd region 52 comes away from the imaging device 8. Thus, the table control unit 31 can appropriately tilt the table 3 based on the brightness of the adjustment image 34A so that the entire adjustment image 34A is brightly white.
The stage 3 and the imaging device 8 are relatively movable in an XY plane orthogonal to the optical axis AX of the optical system 6. The imaging control unit 28 causes the imaging device 8 to image the inspection image 34B of the 1 st range 41 after the brightness of the adjustment image 34A of the 1 st range 41 of the curved surface 12 is adjusted, and causes the imaging device 8 to image the inspection image 34B of the 2 nd range 42 after the brightness of the adjustment image 34A of the 2 nd range 42 of the curved surface 12 is adjusted. That is, the adjustment of the brightness using the adjustment image 34A and the appearance inspection of the curved surface 12 using the inspection image 34B are effectively performed by the step-and-repeat method with respect to each of the plurality of ranges 40 set in the curved surface 12. Even if the curved surface 12 is larger than the visual field range 25, the appearance inspection of the entire curved surface 12 can be smoothly performed.
The inspection image 34B of the curved surface 12 captured by the imaging device 8 is displayed on the display device 11. This allows the operator to confirm the display screen of the display device 11 and to confirm the presence or absence of an abnormality of the curved surface 12.
[ other embodiments ]
In the above-described embodiment, the curved surface 12 as the inspection target is a convex surface protruding toward the imaging device 8. The curved surface 12 to be inspected may be a concave surface recessed with respect to the imaging device 8.
Fig. 12 is a diagram for explaining the processing of the table control unit 31 according to another embodiment. As shown in fig. 12, the curved surface 12 as the inspection object is a concave surface recessed with respect to the imaging device 8. In the case where the 1 st region 51 having a luminance smaller than the luminance threshold value 36 and the 2 nd region 52 having a luminance greater than or equal to the luminance threshold value 36 are present in the adjustment image 34A of the range 40, the stage control portion 31 tilts the stage 3 so that the 1 st portion 61 of the curved surface 12 corresponding to the 1 st region 51 is distant from the imaging device 8. Thus, the table control unit 31 can make the entire adjustment image 34A bright white. Further, the table control unit 31 may tilt the table 3 so that the 2 nd portion 62 of the curved surface 12 corresponding to the 2 nd region 52 approaches the imaging device 8.
In the above-described embodiment, the relative positions of the visual field 25 and the curved surface 12 are changed by moving the imaging device 8 in the XY plane by the imaging moving device 9. The table 3 may be moved in the XY plane, or both the table 3 and the imaging device 8 may be moved in the XY plane. The stage 3 and the imaging device 8 may be relatively movable in the X-axis direction and the Y-axis direction orthogonal to the optical axis AX of the optical system 6.
In the above-described embodiment, the coaxial illumination device 17 is configured to illuminate the curved surface 12. The oblique illumination device 16 may also illuminate the curved surface 12.
Description of the reference numerals
1 … inspection apparatus, 2 … object, 3 … table, 4 … table driving apparatus, 5 … illumination apparatus, 6 … optical system, 7 … image sensor, 8 … imaging apparatus, 9 … imaging moving apparatus, 10 … control apparatus, 11 … display apparatus, 12 … curved surface, 13 … support surface, 14 … actuator, 15 …, 16 … oblique illumination apparatus, 17 … coaxial illumination apparatus, 18 … light source, 18a … 1 st light source, 18B … nd 2 light source, 18C … rd 3 rd light source, 19 … support member, 20 … incident surface, 21 … light source, 22 … support member, 23 … holding member, 24 … actuator, 25 … visual field range, 26 … illumination control section, 27 … imaging position control section, 28 … imaging control section, 29 … image acquisition section, 30 … image processing section, 31 … control section, 32 … display section, 33 … storage, 34 … image, 34a … adjustment image, 34B … inspection image, 35 … pixels, 36 … brightness threshold, 37 … differential threshold, 38 … abnormal portion, 40 … range, 41 … 1 st range, 42 … 2 nd range, 51 … 1 st region, 52 … nd region, 61 … 1 st portion, 62 … nd portion, 1000 … computer system, 1001 … processor, 1002 … main memory, 1003 … memory, 1004 … interface, AX … optical axis.

Claims (10)

1. An inspection apparatus, comprising:
a table for supporting an object having a curved surface;
an illumination device that illuminates the object supported by the table with illumination light;
an imaging device having an optical system and an image sensor;
an imaging control unit that causes the imaging device to image an image for adjustment of the curved surface arranged in a field of view of the optical system; and
a table control unit for adjusting the brightness of the image for adjustment by tilting the table,
the imaging control unit causes the imaging device to image the inspection image of the curved surface arranged in the visual field range after the brightness of the adjustment image is adjusted.
2. The inspection apparatus according to claim 1,
the stage control unit tilts the stage so that the luminance of each of a plurality of pixels constituting the adjustment image becomes equal to or greater than a luminance threshold value.
3. The inspection apparatus according to claim 1 or 2,
the stage control unit tilts the stage so that a difference between a maximum value and a minimum value of the luminance in the adjustment image is equal to or smaller than a difference threshold value.
4. The inspection apparatus according to claim 1 or 2,
the imaging control unit causes the imaging device to image the inspection image while maintaining the inclination of the table in which the brightness of the adjustment image is adjusted.
5. The inspection apparatus according to claim 1 or 2,
the illumination device has a light source arranged around an incident surface of the optical system,
the light source emits the illumination light in a direction parallel to an optical axis of the optical system.
6. The inspection apparatus according to claim 1 or 2,
the object is supported on the table in such a manner that the curved surface and the imaging device face each other,
the curved surface is convex toward the photographing device,
when a 1 st region where the brightness is smaller than a brightness threshold value and a 2 nd region where the brightness is greater than or equal to the brightness threshold value exist in the adjustment image, the stage control unit tilts the stage so that a 1 st portion of the curved surface corresponding to the 1 st region approaches the imaging device or a 2 nd portion of the curved surface corresponding to the 2 nd region is distant from the imaging device.
7. The inspection apparatus according to claim 1 or 2,
the object is supported on the table in such a manner that the curved surface and the imaging device face each other,
the curved surface is recessed with respect to the camera,
when a 1 st region where the brightness is smaller than a brightness threshold value and a 2 nd region where the brightness is greater than or equal to the brightness threshold value exist in the adjustment image, the stage control unit tilts the stage so that a 1 st portion of the curved surface corresponding to the 1 st region is distant from the imaging device or a 2 nd portion of the curved surface corresponding to the 2 nd region is close to the imaging device.
8. The inspection apparatus according to claim 1 or 2,
the stage and the imaging device are relatively movable in a direction orthogonal to an optical axis of the optical system,
the imaging control unit causes the imaging device to image the inspection image in the 1 st range after the brightness of the adjustment image in the 1 st range of the curved surface is adjusted, and causes the imaging device to image the inspection image in the 2 nd range after the brightness of the adjustment image in the 2 nd range of the curved surface is adjusted.
9. The inspection apparatus according to claim 1 or 2,
the inspection apparatus includes a display control unit for displaying the inspection image on a display device.
10. An inspection method, comprising the steps of:
illuminating an object having a curved surface with illumination light;
capturing an image for adjustment of the curved surface arranged in a field of view of an optical system of an imaging device;
adjusting the brightness of the image for adjustment by tilting the object; and
after the brightness of the adjustment image is adjusted, an inspection image of the curved surface arranged in the field of view is captured.
CN202110695969.5A 2020-06-23 2021-06-23 Inspection apparatus and inspection method Pending CN113834812A (en)

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Publication number Priority date Publication date Assignee Title
JP4150390B2 (en) 2005-09-14 2008-09-17 Ｔｄｋ株式会社 Appearance inspection method and appearance inspection apparatus
JP4020144B2 (en) 2006-03-10 2007-12-12 オムロン株式会社 Inspection method of surface condition
JP6029394B2 (en) 2012-09-11 2016-11-24 株式会社キーエンス Shape measuring device
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