CN113833765A - Air supporting guide rail with adjustable rigidity - Google Patents
Air supporting guide rail with adjustable rigidity Download PDFInfo
- Publication number
- CN113833765A CN113833765A CN202111197728.4A CN202111197728A CN113833765A CN 113833765 A CN113833765 A CN 113833765A CN 202111197728 A CN202111197728 A CN 202111197728A CN 113833765 A CN113833765 A CN 113833765A
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- Prior art keywords
- air
- guide rail
- cavity
- horizontal part
- adjustable
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- 230000003993 interaction Effects 0.000 abstract description 2
- 238000004904 shortening Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
Abstract
The invention discloses an air-floating guide rail with adjustable rigidity, and relates to the technical field of ultra-precision machinery. Including guide rail and slide carriage, the guide rail includes cavity and supporting part, and the supporting part sets up in cavity top both sides, and the slide carriage includes horizontal part and vertical part, and the horizontal part parallels with the supporting part, has first air film clearance between horizontal part and the supporting part, and the vertical part sets up in the horizontal part bottom side, and the cavity bottom sets up the coil, sets up the electro-magnet on the vertical part, and the horizontal part top sets up adjusts the chamber, adjusts the intracavity and sets up the air pressure regulator, and the air pressure regulator is the magnetostrictive actuator, and the flexible direction of magnetostrictive actuator corresponds the magnetic field direction of coil. The air-floating guide rail provided by the invention has the advantages that the guide rail and the slide carriage are close to or far away from each other through the interaction of the electromagnet and the coil, the bearing capacity of the air-floating guide rail is adjusted, the air pressure in the adjusting cavity is controlled through the extension or the shortening of the air pressure adjuster in the adjusting cavity, and the air pressure in the first air film gap is changed to adjust the rigidity of the air-floating guide rail.
Description
Technical Field
The invention relates to the technical field of ultra-precision machinery, in particular to an air-floating guide rail with adjustable rigidity.
Background
The air-float guide rail is a precise mechanical component developed according to the gas lubrication technology, compressed air is filled in a gap between a sliding block and the guide rail to form a high-pressure air film, a certain supporting force is provided for a moving component, the sliding block does not contact with the guide rail when moving on the guide rail, friction-free and vibration-free smooth movement can be realized, and the air-float guide rail has the characteristics of high movement precision, good thermal stability, cleanness, no pollution and the like. Based on the advantages, the air-floating guide rail is widely applied to the technical fields of measuring machines, space simulation devices, experimental measuring devices, semiconductor equipment, PCB equipment, photoetching machines, micropositioners and the like. When the gap (namely the thickness of the air film) between the sliding block and the guide rail is reduced, the pressure of the air film is increased, the bearing capacity of the air-floating guide rail is increased, and the air-floating guide rail has certain rigidity. That is, the bearing capacity and rigidity of the air-bearing guide rail constitute one of the key factors for the performance of the air-bearing guide rail in various applications. The problem of low rigidity of the air-floating guide rail directly influences the motion precision and the anti-interference capability of the guide rail, and has great influence on the application and the performance of the air-floating guide rail. With the development of ultra-precise motion and ultra-precise measurement technologies, people have increasingly urgent needs for air-floating guide rails with adjustable rigidity, and the solution of the problem is urgent.
Disclosure of Invention
The invention mainly aims to provide an air-floating guide rail with adjustable rigidity so as to solve the existing problems.
In order to solve the technical problems, the invention adopts the following technical scheme:
an air floatation guide rail with adjustable rigidity comprises a guide rail and a slide carriage, wherein the guide rail comprises a cavity and supporting parts, the supporting parts are arranged on two sides of the top of the cavity, the slide carriage comprises a horizontal part and a vertical part, the horizontal part is parallel to the supporting parts, a first air film gap is arranged between the horizontal part and the supporting parts, the vertical part is arranged on the bottom side of the horizontal part, the vertical part is vertical to the bottom surface of the cavity,
a coil is arranged at the bottom of the concave cavity, an electromagnet is arranged on the vertical part, an adjusting cavity is arranged at the top end of the horizontal part, an air pressure regulator is arranged in the adjusting cavity, the air pressure regulator is a magnetostrictive actuator, the stretching direction of the magnetostrictive actuator corresponds to the magnetic field direction of the coil,
the upper surface of the horizontal part is provided with a first air inlet hole, the lower surface of the horizontal part is provided with a first throttling hole, and the first air inlet hole and the first throttling hole are communicated with the adjusting cavity.
Furthermore, guide plates are arranged on two sides of the vertical part respectively and are parallel to the side wall of the cavity, and a second air film gap is formed between each guide plate and the corresponding side wall of the cavity.
Furthermore, a second air inlet hole is formed in the guide plate, a second throttle hole is formed in the side wall, corresponding to the side wall of the cavity, of the guide plate, and a small-hole throttle device is arranged in the second throttle hole.
Further, a small-hole restrictor is arranged in the first throttle hole.
Further, the supporting portion is perpendicular to the cavity, and the horizontal portion is perpendicular to the vertical portion.
Furthermore, the first air film gap and the second air film gap are both 5-30 μm.
Furthermore, the number of the electromagnets is two, and the electromagnets are respectively arranged at the bottoms of the guide plates on two sides of the vertical part.
Furthermore, the electromagnet is wrapped with a magnetic shielding sleeve, an opening is formed in the magnetic shielding sleeve, and the opening direction of the magnetic shielding sleeve corresponds to the magnetic field direction of the coil.
Compared with the prior art, the air floatation guide rail with adjustable rigidity provided by the invention has the following beneficial effects:
the coil is arranged on the guide rail, the electromagnet is arranged on the slide carriage, and the electromagnet generating a permanent magnetic field and the coil generating an alternating magnetic field are interacted, namely, the magnetic fields between the electromagnet and the coil generating an alternating magnetic field are mutually attracted or repelled, so that the guide rail and the slide carriage are close to or far away from each other, namely, the size of a first air film gap is changed, the bearing capacity of the air floatation guide rail is increased or reduced, and finally the rigidity of the air floatation guide rail is changed;
the air pressure regulator is a magnetostrictive actuator and can extend or shorten in the magnetization direction, when the magnetic field of the coil passes through the air pressure regulator, the air pressure regulator extends or shortens in the regulating cavity, so that the size of the regulating cavity is changed, the air pressure in the regulating cavity is controlled, the pressure of air entering the first throttling hole from the regulating cavity is further controlled, and the rigidity of the air floatation guide rail is regulated by changing the pressure of the air in the first air film gap.
Drawings
Fig. 1 is an exploded view of the overall structure of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
Wherein, 1-guide rail, 11-concave cavity, 12-supporting part, 13-coil, 2-slide carriage, 21-horizontal part, 22-vertical part, 23-electromagnet, 24-magnetic shielding sleeve, 25-adjusting cavity, 26-air pressure adjuster, 27-first air inlet hole, 28-first throttle hole, 3-guide plate, 31-second air inlet hole, 32-second throttle hole, 4-first air film gap, 5-second air film gap and 6-small hole restrictor.
Detailed Description
The technical solution of the present invention is further illustrated by the accompanying drawings and examples.
With reference to fig. 1 to 2, the present invention provides an air-floating guide rail with adjustable rigidity, which comprises a guide rail 1 and a slide carriage 2, the guide rail 1 comprises a cavity 11 and supporting parts 12, the supporting parts 12 are arranged at two sides of the top of the cavity 11, the slide board 2 includes a horizontal part 21 and a vertical part 22, the horizontal part 21 is parallel to the support part 12, the horizontal part 21 and the support part 12 have a first air film gap 4 between them, so that there is no contact when the slide carriage 2 moves on the guide rail 1, a smooth movement without friction and vibration can be achieved, the vertical part 22 is provided at the bottom side of the horizontal part 21, the vertical part 22 is perpendicular to the bottom surface of the cavity 11, in this embodiment, the supporting portion 12 is perpendicular to the cavity 11, and the horizontal portion 21 is perpendicular to the vertical portion 22, so that the whole air rail can run more stably.
The bottom of the cavity 11 is provided with a coil 13, the vertical part 22 is provided with an electromagnet 23, the coil 13 and the electromagnet 23 are started, and the guide rail 1 and the slide carriage 2 are close to or far away from each other through the interaction of the electromagnet 23 generating a permanent magnetic field and the coil 13 generating an alternating magnetic field, namely the magnetic fields between the electromagnet 23 and the coil 13 are mutually attracted or repelled, namely the size of the first air film gap 4 is changed, the bearing capacity of the air floatation guide rail is increased or reduced, and finally the rigidity of the air floatation guide rail is changed. In another embodiment, the coil 13 is further connected with a controller, and the controller adjusts the magnitude and direction of the current input by the coil 13, so as to rapidly adjust the rigidity of the floating guide rail. The top end of the horizontal part 21 is provided with an adjusting cavity 25, an air pressure regulator 26 is arranged in the adjusting cavity 25, the air pressure regulator 26 is a magnetostrictive actuator, the stretching direction of the magnetostrictive actuator corresponds to the magnetic field direction of the coil 13, the upper surface of the horizontal part 21 is provided with a first air inlet hole 27, the lower surface of the horizontal part 21 is provided with a first throttle hole 28, the first air inlet hole 27 and the first throttle hole 28 are communicated with the adjusting cavity 25, the first throttle hole 28 is internally provided with a small-hole throttle 6, the air pressure regulator 26 can deform, so that the size of the adjusting cavity 25 is changed, the air pressure in the adjusting cavity 25 is controlled, the pressure of the air entering the first throttle hole 28 from the adjusting cavity 25 is controlled, and the rigidity of the air floatation guide rail is adjusted by changing the air pressure in the first air film gap 4. When the air pressure regulator 26 contracts, the volume in the regulating cavity 25 increases, the pressure of the air in the regulating cavity decreases, the pressure of the air flowing into the first throttling hole 28 decreases, the pressure of the air film decreases, the slide carriage 2 correspondingly descends, the first air film gap 4 between the guide rail 1 and the slide carriage 2 decreases, the bearing capacity decreases, the rigidity decreases, and otherwise, the rigidity of the air floatation guide rail can be improved. The air pressure regulator 26 is a magnetostrictive actuator, and is elongated or shortened in the magnetization direction, and when the magnetic field of the coil 13 passes through the air pressure regulator 26, the air pressure regulator 26 is elongated or shortened in the regulation cavity 25.
Further, perpendicular portion 22 both sides set up baffle 3 respectively, baffle 3 with cavity 11 lateral wall parallels, baffle 3 with second air film clearance 5 has between the 11 lateral walls of cavity, set up second inlet port 31 on the baffle 3, baffle 3 with set up second orifice 32 on the corresponding lateral wall of cavity 11 lateral wall, set up the aperture flow controller in the second orifice 32, two baffles 3 of perpendicular portion 22 both sides respectively with cavity 11 lateral wall between form two second air film clearances 5, second air film clearance 5 and first air film clearance 4 combined action have improved the air film rigidity. The first air film gap 4 and the second air film gap 5 are both 5-30 mu m.
Furthermore, the number of the electromagnets 23 is two, the electromagnets are respectively arranged at the bottoms of the guide plates 3 on the two sides of the vertical part 22, the magnetic shielding sleeves 23 are wrapped outside the electromagnets 23, openings are formed in the magnetic shielding sleeves 24, and the opening direction of the magnetic shielding sleeves 24 corresponds to the magnetic field direction of the coil 13.
The working principle is as follows: in the air-floating guide rail with adjustable rigidity, the external air simultaneously enters the first air inlet hole 27 and the second air inlet hole 31, the air enters the adjusting cavity 25 from the first air inlet hole 27, then enters the first air film gap 4 through the first throttle hole 28, the air enters the second throttle hole 32 from the second air inlet hole 31, then enters the second air film gap 5 through the second throttle hole 32, when the load of the objects on the slide carriage 2 is increased or reduced, the rigidity of the air floatation guide rail needs to be adjusted, the electromagnet 23 and the coil 13 interact to make the guide rail 1 and the slide carriage 2 close to or far away from each other, the bearing capacity of the air-float guide rail can be adjusted, the air pressure in the adjusting cavity 25 is controlled by the extension or contraction of the air pressure adjuster 26 in the adjusting cavity 25, the air pressure in the first air film gap 4 is changed, the rigidity of the air-floating guide rail can be adjusted, the movement precision of the air-floating guide rail is ensured, and the anti-interference capability of the air-floating guide rail is improved.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that any minor modifications, equivalent changes and modifications made to the above embodiment according to the technical spirit of the present invention are within the technical scope of the present invention.
Claims (8)
1. The air floatation guide rail with adjustable rigidity is characterized by comprising a guide rail and a slide carriage, wherein the guide rail comprises a cavity and supporting parts, the supporting parts are arranged on two sides of the top of the cavity, the slide carriage comprises a horizontal part and a vertical part, the horizontal part is parallel to the supporting parts, a first air film gap is arranged between the horizontal part and the supporting parts, the vertical part is arranged on the bottom side of the horizontal part, the vertical part is vertical to the bottom surface of the cavity,
a coil is arranged at the bottom of the concave cavity, an electromagnet is arranged on the vertical part, an adjusting cavity is arranged at the top end of the horizontal part, an air pressure regulator is arranged in the adjusting cavity, the air pressure regulator is a magnetostrictive actuator, the stretching direction of the magnetostrictive actuator corresponds to the magnetic field direction of the coil,
the upper surface of the horizontal part is provided with a first air inlet hole, the lower surface of the horizontal part is provided with a first throttling hole, and the first air inlet hole and the first throttling hole are communicated with the adjusting cavity.
2. The adjustable stiffness air bearing guide as claimed in claim 1 wherein the vertical portion has guide plates disposed on opposite sides of the vertical portion, the guide plates being parallel to the cavity sidewall, the guide plates having a second air film gap with the cavity sidewall.
3. The adjustable stiffness air rail as recited in claim 2 wherein the guide plate is provided with a second air inlet hole, a side wall of the guide plate opposite the side wall of the cavity is provided with a second orifice, and the second orifice is provided with a small hole restrictor.
4. The adjustable stiffness air bearing guide rail of claim 1 wherein a small orifice restrictor is disposed within the first orifice.
5. The adjustable stiffness air rail of claim 1 wherein the support portion is disposed perpendicular to the cavity and the horizontal portion is disposed perpendicular to the vertical portion.
6. The adjustable-stiffness air bearing guide rail as claimed in claim 2, wherein the first air film gap and the second air film gap are both 5 μm to 30 μm.
7. The adjustable-stiffness air bearing guide rail as claimed in claim 2, wherein the number of the electromagnets is two, and the electromagnets are respectively arranged at the bottoms of the guide plates on both sides of the vertical portion.
8. The adjustable-rigidity air-floating guide rail as claimed in claim 7, wherein a magnetic shielding sleeve is wrapped outside the electromagnet, an opening is formed in the magnetic shielding sleeve, and the opening direction of the magnetic shielding sleeve corresponds to the magnetic field direction of the coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111197728.4A CN113833765B (en) | 2021-10-14 | 2021-10-14 | Rigidity-adjustable air-float guide rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111197728.4A CN113833765B (en) | 2021-10-14 | 2021-10-14 | Rigidity-adjustable air-float guide rail |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113833765A true CN113833765A (en) | 2021-12-24 |
| CN113833765B CN113833765B (en) | 2024-02-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111197728.4A Active CN113833765B (en) | 2021-10-14 | 2021-10-14 | Rigidity-adjustable air-float guide rail |
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| CN (1) | CN113833765B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0828565A (en) * | 1994-07-18 | 1996-02-02 | Sony Corp | Static pressure gas bearing |
| US20020176061A1 (en) * | 2001-05-25 | 2002-11-28 | Canon Kabushiki Kaisha | Hydrostatic bearing and stage apparatus using same |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
| CN102878203A (en) * | 2012-10-22 | 2013-01-16 | 中国科学院光电技术研究所 | Air suspension guide rail |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN110000570A (en) * | 2019-05-09 | 2019-07-12 | 南京艾提瑞精密机械有限公司 | A kind of air-float guide rail of diamond-shaped configuration |
| CN110762118A (en) * | 2019-11-21 | 2020-02-07 | 江苏集萃精凯高端装备技术有限公司 | Air-oil mixed static pressure guide rail |
| CN113417940A (en) * | 2021-07-23 | 2021-09-21 | 中国工程物理研究院机械制造工艺研究所 | Vacuum preloading air floatation supporting structure and application thereof |
-
2021
- 2021-10-14 CN CN202111197728.4A patent/CN113833765B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0828565A (en) * | 1994-07-18 | 1996-02-02 | Sony Corp | Static pressure gas bearing |
| US20020176061A1 (en) * | 2001-05-25 | 2002-11-28 | Canon Kabushiki Kaisha | Hydrostatic bearing and stage apparatus using same |
| CN102734379A (en) * | 2012-06-09 | 2012-10-17 | 哈尔滨工业大学 | Active vibration isolating device based on composite support of electromagnetism and static-pressure air floatation |
| CN102878203A (en) * | 2012-10-22 | 2013-01-16 | 中国科学院光电技术研究所 | Air suspension guide rail |
| CN105179480A (en) * | 2015-09-09 | 2015-12-23 | 华中科技大学 | Air-floatation supporting device for actively regulating and controlling air pressure of throttling hole inlet |
| CN110000570A (en) * | 2019-05-09 | 2019-07-12 | 南京艾提瑞精密机械有限公司 | A kind of air-float guide rail of diamond-shaped configuration |
| CN110762118A (en) * | 2019-11-21 | 2020-02-07 | 江苏集萃精凯高端装备技术有限公司 | Air-oil mixed static pressure guide rail |
| CN113417940A (en) * | 2021-07-23 | 2021-09-21 | 中国工程物理研究院机械制造工艺研究所 | Vacuum preloading air floatation supporting structure and application thereof |
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| Publication number | Publication date |
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| CN113833765B (en) | 2024-02-06 |
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