CN1138323C - Dual-refraction dual-frequency Zeeman laser device with stable frequency difference and its method for stabilizing frequency difference - Google Patents
Dual-refraction dual-frequency Zeeman laser device with stable frequency difference and its method for stabilizing frequency difference Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及一种激光器,特别涉及一种氦氖塞曼-双折射双频激光器的结构及针对该种激光器实施稳频的方法。The invention relates to a laser, in particular to a structure of a helium-neon Zeeman-birefringence dual-frequency laser and a frequency stabilization method for the laser.
背景技术Background technique
目前现有技术中提出的一种《没有频差闭锁的双折射双频激光器及其频差精度控制方法》(中国专利:申请号:99103513.5),该双频激光器由激光增益管、一维施力装置、外加横向磁场组成。该技术解决了双频激光器不能输出大于3兆赫兹小于40兆赫兹的频率差的问题,从而突破了现有双频激光干涉仪在测量速度上的限制,在双频激光器的发明史上有着重要意义。虽然此种激光器能够输出适合双频激光干涉仪应用的合适频差,但是其频差稳定性还不能达到工业应用的具体要求。塞曼-双折射双频激光器的频率差仍有漂移现象,其原因有以三方面:一是因为外界温度变化时,加力环和光弹元件(半内腔为增透窗片,全内腔为输出窗片)都会热胀冷缩,但如果加力环和光弹元件的材质不同、线膨胀系数不同,热胀和冷缩的大小也不同。如加力环为殷钢(线胀系数约为5×10-7),窗片材料为K9玻璃(线胀系数约为4×10-5),升温时窗片的直径比殷钢的直径膨胀的快,加力环对窗片的压力加大,引起窗片的内应力变大,双折射效应加强,频率差变大,反之亦然。由此引入的变化量在几MHz。其二是现有塞曼-双折射双频激光器中对光弹元件的施力装置为一维加力方式,由于此种激光器的频差与光弹元件内产生的应力成正比,所以需要产生较小频差时所加应力也较小,这使得加力装置相对光弹元件容易松动,可靠性差。其三,随着激光器管壳升温,激光器腔长变长,激光器的两个频率要产生漂移,要扫过增益线,由于频率牵引效应,频率差就要变化几KHz。A "Birefringent Dual-Frequency Laser Without Frequency Difference Blocking and Its Frequency Difference Accuracy Control Method" proposed in the current prior art (Chinese Patent: Application No.: 99103513.5), the dual-frequency laser consists of a laser gain tube, a one-dimensional The force device is composed of an external transverse magnetic field. This technology solves the problem that the dual-frequency laser cannot output a frequency difference greater than 3 MHz and less than 40 MHz, thus breaking through the limitation of the existing dual-frequency laser interferometer on the measurement speed, which is of great significance in the history of the invention of dual-frequency lasers . Although this type of laser can output a suitable frequency difference suitable for dual-frequency laser interferometer applications, its frequency difference stability cannot meet the specific requirements of industrial applications. The frequency difference of the Zeeman-birefringence dual-frequency laser still drifts. There are three reasons for this: first, when the external temperature changes, the afterburner ring and the photoelastic element (the half-cavity is an anti-reflection window, and the whole cavity is the output window) will expand with heat and contract with cold, but if the materials of the booster ring and the photoelastic element are different and the coefficients of linear expansion are different, the magnitudes of thermal expansion and cold contraction will also be different. For example, the reinforcing ring is Invar (coefficient of linear expansion is about 5×10 -7 ), and the window material is K9 glass (coefficient of linear expansion is about 4×10 -5 ), the diameter of the window is larger than that of Invar when the temperature rises. The faster the expansion, the greater the pressure of the afterburner ring on the window, causing the internal stress of the window to become larger, the birefringence effect is strengthened, and the frequency difference becomes larger, and vice versa. The variance introduced by this is on the order of a few MHz. The second is that the device for applying force to the photoelastic element in the existing Zeeman-birefringence dual-frequency laser is a one-dimensional force application method. Since the frequency difference of this laser is proportional to the stress generated in the photoelastic element, it is necessary to generate When the frequency difference is small, the stress applied is also small, which makes the force device easy to loose relative to the photoelastic element, and the reliability is poor. Third, as the temperature of the laser tube heats up, the length of the laser cavity becomes longer, the two frequencies of the laser will drift, and the gain line must be swept. Due to the frequency pulling effect, the frequency difference will change by several KHz.
发明内容Contents of the invention
本发明的目的是在上述专利技术的基础上,提出一种频率差稳定的塞曼双折射双频激光器及其频率差稳定方法,以克服现有塞曼双折射双频激光器频率差漂移问题,达到同时稳定频率差和频率的目的,提高装置的可靠性,使该激光器进入可实际应用阶段。The purpose of the present invention is on the basis of above-mentioned patent technology, proposes a kind of frequency difference stable Zeeman birefringence dual-frequency laser and its frequency difference stabilization method, to overcome the existing Zeeman birefringence dual-frequency laser frequency difference drift problem, The purpose of simultaneously stabilizing the frequency difference and the frequency is achieved, the reliability of the device is improved, and the laser enters the stage of practical application.
本发明的目的是通过以下技术方案实现的:The purpose of the present invention is achieved through the following technical solutions:
一种频率差稳定的塞曼-双折射双频激光器的频率差稳定方法,该方法的特征在于通过应用二维加力环获得可靠的合适频率差的基础上,再利用计算机控制通过稳定激光器频率来稳定频率差,其方法的步骤如下:A frequency difference stabilization method for Zeeman-birefringence dual-frequency lasers with frequency difference stabilization, the method is characterized in that on the basis of obtaining a reliable and suitable frequency difference by applying a two-dimensional afterburning ring, and then using computer control to stabilize the frequency of the laser To stabilize the frequency difference, the steps of the method are as follows:
(1).在激光谐振腔内的光弹元件的一对相互正交的直径方向上垂直于光束对径加力,即采用二维施力方式,获得可靠的合适频率差;(1). A pair of mutually orthogonal diameter directions of the photoelastic element in the laser resonator applies force perpendicular to the beam diameter, that is, adopts a two-dimensional force application method to obtain a reliable and suitable frequency difference;
(2).优选施力装置的材料,使其与光弹元件材料之间应满足匹配封接的关系,使其线膨胀系数与光弹元件材料的线膨胀系数相差0~10%;(2). The material of the force applying device should be selected so that it and the material of the photoelastic element should meet the relationship of matching and sealing, so that its linear expansion coefficient and the linear expansion coefficient of the photoelastic element material differ by 0% to 10%;
(3).在上述激光器上设置一个由计算机控制的频率差稳定装置,该装置首先通过光电探测器探测经渥拉斯顿棱镜分开的O光和E光两路光强,由光电接受模块将光信号转变为电信号;(3). A frequency difference stabilizing device controlled by a computer is installed on the above-mentioned laser. The device first detects the two-way light intensity of O light and E light separated by a Wollaston prism through a photodetector, and the photoelectric receiving module will Optical signals are converted into electrical signals;
(4).上述电信号通过AD转换进入计算机进行实时采集,经计算机程序运算后输出等光强法或极值锁定法的控制信号;(4). The above-mentioned electrical signal enters the computer through AD conversion for real-time acquisition, and outputs the control signal of the equal light intensity method or the extreme value locking method after the computer program operation;
(5).将上述控制信号通过DA转换给压电放大模块,经过电压放大驱动稳频执行元件,最后由稳频执行元件完成稳频伺服控制。(5). The above-mentioned control signal is converted to the piezoelectric amplification module through DA, and the frequency-stabilizing actuator is driven through voltage amplification, and finally the frequency-stabilizing actuator is used to complete the frequency-stabilizing servo control.
一种实现上述方法的频率差稳定的塞曼-双折射双频激光器,包括一个氦氖(He-Ne)激光增益管,以及激光谐振腔内的光弹元件及其上的施力装置、反射透镜,石英封装壳以及由设置在石英封装壳外部且上下布置的磁条形成的外加横向磁场,其特征在于所述的加力环为带有加力螺钉的二维加力环;为了进一步减小该种激光器的频率差漂移并提高频率稳定度,上述激光器还增加一个稳频装置,该装置是由渥拉斯顿棱镜、光电探测器、光电接收模块、压电放大模块、稳频执行元件及装有AD/DA数据采集卡和控制软件的计算机所组成;所述光电探测器的输出端与光电接收模块的输入端相连,光电接收模块的输出端与数据采集卡的AD端相连,数据采集卡的DA端和压电放大模块的输入端相连,压电放大模块的输出端与稳频执行元件相连。A Zeeman-birefringence dual-frequency laser with stable frequency difference for realizing the above method, comprising a helium-neon (He-Ne) laser gain tube, a photoelastic element in a laser resonator and a force applying device and a reflector on it The lens, the quartz package shell and the external transverse magnetic field formed by the magnetic strips arranged outside the quartz package shell and arranged up and down are characterized in that the force ring is a two-dimensional force ring with force screws; in order to further reduce To reduce the frequency difference drift of this kind of laser and improve the frequency stability, the above-mentioned laser also adds a frequency stabilization device, which is composed of a Wollaston prism, a photodetector, a photoelectric receiving module, a piezoelectric amplifier module, and a frequency stabilization actuator. and a computer equipped with AD/DA data acquisition card and control software; the output end of the photodetector is connected with the input end of the photoelectric receiving module, and the output end of the photoelectric receiving module is connected with the AD end of the data acquisition card, and the data The DA terminal of the acquisition card is connected with the input terminal of the piezoelectric amplifier module, and the output terminal of the piezoelectric amplifier module is connected with the frequency-stabilizing actuator.
本发明技术特征还在于所述的二维加力环是由其线膨胀系数和光弹元件的线膨胀系数相一致的可阀制成。The technical feature of the present invention is that the two-dimensional force ring is made of a valve whose linear expansion coefficient is consistent with that of the photoelastic element.
上述二维加力环可采用圆形、方形或可对光弹元件施加一对相互正交的直径方向对径加力的其它形状的加力环。The above-mentioned two-dimensional force ring can adopt circular, square or other shaped force rings that can apply a pair of mutually orthogonal radial force to the photoelastic element.
当上述激光器的激光谐振腔为半腔时,所述的稳频执行元件采用压电陶瓷;激光谐振腔为全腔时,稳频执行元件采用加热丝。When the laser resonator of the above laser is a half cavity, the frequency stabilizing actuator adopts piezoelectric ceramics; when the laser resonator is a full cavity, the frequency stabilizing actuator adopts a heating wire.
本发明由于以二维施力方式代替原有的一维施力方式,并对加力环的材料进行了优化选取,同时增加了激光器稳频装置,从而进一步减小了该种激光器的频率差漂移,并提高了该装置的可靠性及频率的稳定度,使得该激光器进入了可实际应用的阶段。In the present invention, the original one-dimensional force application method is replaced by a two-dimensional force application method, and the material of the force ring is optimized, and at the same time, a laser frequency stabilization device is added, thereby further reducing the frequency difference of the laser. Drift, and improve the reliability and frequency stability of the device, making the laser enter the stage of practical application.
附图说明:Description of drawings:
图1为本发明的塞曼-双折射双频激光器光强随腔长调谐曲线示意图Fig. 1 is a schematic diagram of Zeeman-birefringence dual-frequency laser light intensity with cavity length tuning curve of the present invention
图2为本发明的实施例,即加力环采用圆形时的结构示意图。Fig. 2 is a schematic structural view of an embodiment of the present invention, that is, when the force ring is circular.
图3为本发明的又一实施例,即加力环采用方形的结构示意图。Fig. 3 is another embodiment of the present invention, that is, a schematic structural view of the force ring adopting a square shape.
图4为加力环安装结构剖面示意图。Fig. 4 is a schematic cross-sectional view of the installation structure of the booster ring.
图5为带有稳频装置的塞曼-双折射双频激光器的结构示意图。Fig. 5 is a schematic structural diagram of a Zeeman-birefringence dual-frequency laser with a frequency stabilization device.
图6为光电接收模块电路图Figure 6 is a circuit diagram of the photoelectric receiving module
图7为电压放大模块电路图。Fig. 7 is a circuit diagram of the voltage amplifying module.
图8为控制软件程序流程框图。Figure 8 is a flow chart of the control software program.
具体实施方式Detailed ways
下面结合附图详细说明本发明的原理、结构、具体实施及优选方式:The principle, structure, specific implementation and preferred mode of the present invention will be described in detail below in conjunction with the accompanying drawings:
本发明中的施力方式为二维施力方式,即在光弹元件的一对相互正交的直径方向上垂直于光束对径加力,我们称这种施力装置为二维加力环,可采用圆形(如图2所示)或方形(如图3所示)及其他可对光弹元件施加一对相互正交的直径方向对径加力的其他形状的加力环。在圆形加力环的两个相互垂直的直径位置以及在方形加力环的四条边的中心位置分别有四个螺孔,每个螺孔配有一枚平头顶丝向位于环内的光弹元件加力。激光束通过此光弹元件,激光器所产生的频差与相互垂直的两个加力方向的应力差成正比,它可表示为,
为了克服谐振腔伸长缩短过程中频率差的漂移,本发明在应用二维加力环获得可靠的合适频率差的基础上,通过计算机控制来实现稳定激光器频率来稳定频率差。本发明还包括对塞曼-双折射双频激光器进行稳频,以稳定频率差。现有的广泛应用于双频激光干涉仪的双频激光光源多为纵向塞曼双频激光器,并多使用等光强法热稳频。由于纵向塞曼效应中左旋光与右旋光增益线关于中心频率对称,等光强点位于中心频率处且唯一,故等光强法简单易行。由于本发明中的激光器在横向塞曼效应作用下,两种频率的光(O光和E光)的增益线如图1所示,分别由横向塞曼效应中的π分量1和σ分量2提供增益。针对这样的增益曲线,无论全内腔还是半内腔的塞曼-双折射双频激光器,本发明对其的稳频方法都存在稳频点选取的问题,并都可采取两种方法,即等光强法和光强极值锁定法,其中光强极值锁定法还分为π光极值锁定法和σ光凹陷锁定法。两种稳频方法都是以稳定光强从而稳定频率达到稳定频率差的方法。等光强法是把频率锁定在两模光强相等的两个位置中的一个上(3点或4点);π光极值锁定法是把频率锁定在π增益线的极大值处(5点);σ光凹陷锁定法是把频率锁定在σ增益线的极小值处(6点)。等光强法的频率不在中心频率处,极值锁定法的频率在中心频率。In order to overcome the drift of the frequency difference during the elongation and shortening of the resonator, the present invention uses a two-dimensional force ring to obtain a reliable and suitable frequency difference, and uses computer control to stabilize the frequency of the laser to stabilize the frequency difference. The invention also includes performing frequency stabilization on the Zeeman-birefringence dual-frequency laser to stabilize the frequency difference. The existing dual-frequency laser sources widely used in dual-frequency laser interferometers are mostly longitudinal Zeeman dual-frequency lasers, and most of them use the equal-intensity method to thermally stabilize the frequency. Since the left-handed light and right-handed light gain lines are symmetrical about the center frequency in the longitudinal Zeeman effect, the equal light intensity point is located at the center frequency and is unique, so the equal light intensity method is simple and easy to implement. Because the laser in the present invention is under the transverse Zeeman effect, the gain lines of the light (O light and E light) of two frequencies are as shown in Figure 1, respectively by the
实施例1:Example 1:
实施例1:Example 1:
二维加力环以采用圆形7(如图2所示)或方形10(如图3所示)为例加以说明。加力环7通过四个平头顶丝8紧固在全内腔激光器的输出窗片13上,或半内腔激光器的增透窗片9上。通过调整顶丝的松紧得到需要的频差并使加力环固定在窗片上。然后用环氧树脂将顶丝与窗片、顶丝与加力环分别粘牢,这样就能保证其可靠性。加力环和顶丝的材料都是线膨胀系数与增透窗片的线膨胀系数一致的可阀。此金属与光弹元件材料k4玻璃之间应满足匹配封接的关系,即两种材料的线膨胀系数相差应小于10%,能够保证它们膨胀与收缩的一致性。粘牢后的加力装置结构如图4所示,其中11为激光增益管。The two-dimensional force ring is illustrated by taking a circular 7 (as shown in FIG. 2 ) or a square 10 (as shown in FIG. 3 ) as an example. The
实施例2Example 2
图5为装有频差稳定装置的半内腔塞曼-双折射双频激光器系统的结构示意图。它主要包括由激光增益管11、增透窗片9、反射镜16、二维加力环7、封装石英壳12和以及由设置在石英封装壳外部且上下布置的磁条14形成的外加横向磁场构成的半内腔塞曼-双折射双频激光器和稳频装置,该稳频装置由渥拉斯顿棱镜18,光电探测器19,光电接收模块21,AD/DA数据采集卡24,装有控制软件的计算机25,压电放大模块22和压电陶瓷17组成。在实际应用中,光电接收模块21和压电放大模块22被整合组装在控制电箱23中;AD/DA数据采集卡24和控制软件则安装在计算机25内。光电探测器采用硅光电池,数据采集卡为12位精度(中泰公司PC6333),电压放大范围可达0~300V。稳频工作时,通过计算机控制,由光电探测器探测经渥拉斯顿棱镜分开的O光和E光两路光强并送入光电接受模块PHOTOINPUT端,此信号经光电接收模块放大、滤波由OUTPUT端输出给数据采集卡,通过AD转换进入计算机进行实时采集,经计算机程序运算后输出等光强法或极值锁定法的控制信号,再通过DA转换输出到压电放大模块INPUT端,经过电压放大由OUTPUT端输出并驱动压电陶瓷,最后由压电陶瓷完成稳频伺服控制。从而,通过稳定激光器频率来稳定频率差。频率稳定度优于1×10-7的工业应用要求,频率差稳定度可达1×10-4以上。Fig. 5 is a schematic structural diagram of a half-cavity Zeeman-birefringence dual-frequency laser system equipped with a frequency difference stabilization device. It mainly includes a
本实施例的稳频系统在稳频方法的选择、稳频点的判断和控制信号优化上全部由软件控制来实现,具有较强的通用性。软件通过增益曲线形状来判断稳频点。稳频开始时,预置电压驱动压电陶瓷扫瞄激光器腔长,实时采集并分别记录两路光强的两个邻近平均值,分别计算出两条增益曲线在该点的斜率。通过软件的逻辑判断,等光强法将频率稳定在两路光强相等处,并通过斜率区分3点和4点,极值锁定法将频率稳定在光强极值且斜率为零处,即5点或6点。控制软件包含数字PID程序环节,对输出控制信号进行优化处理。In the frequency stabilization system of this embodiment, the selection of frequency stabilization methods, the judgment of frequency stabilization points and the optimization of control signals are all realized by software control, which has strong versatility. The software judges the frequency stabilization point by the shape of the gain curve. At the beginning of frequency stabilization, the preset voltage drives the piezoelectric ceramic to scan the cavity length of the laser, collects and records two adjacent average values of the two light intensities in real time, and calculates the slopes of the two gain curves at this point. Through the logical judgment of the software, the equal light intensity method stabilizes the frequency at the point where the two light intensities are equal, and distinguishes
另外,对于全内腔塞曼-双折射双频激光器进行稳频,本系统只要更换执行元件,即将压电陶瓷更换为电热丝即可使用。In addition, for the frequency stabilization of the full-cavity Zeeman-birefringence dual-frequency laser, the system can be used as long as the actuator is replaced, that is, the piezoelectric ceramic is replaced by a heating wire.
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