CN104051942A - Longitudinal Zeeman laser frequency locking method and device based on thermoelectric refrigeration and acousto-optic frequency shift - Google Patents
Longitudinal Zeeman laser frequency locking method and device based on thermoelectric refrigeration and acousto-optic frequency shift Download PDFInfo
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Abstract
The invention discloses a longitudinal Zeeman laser frequency locking method and device based on thermoelectric refrigeration and acousto-optic frequency shift, and belongs to the technical field of laser application. The acousto-optic frequency shift technology is adopted to lock output laser frequencies of a plurality of longitudinal Zeeman lasers based on thermoelectric refrigeration on the output laser frequency of the same reference longitudinal Zeeman frequency stabilized laser, and therefore the output lasers of all the lasers have the unified frequency value, the defect that frequency consistency of traditional frequency stabilized lasers is low is overcome, and a novel laser source is provided for ultra-precision laser interference measurement.
Description
Technical field
The invention belongs to laser application technique field, particularly a kind of Zeeman Laser laser locking method and device thereof based on thermoelectric cooling and acousto-optic frequency translation.
Background technology
In recent years, ultra precise measurement taking mask aligner and Digit Control Machine Tool as representative and process technology are towards large scale, high accuracy, many spatial degrees of freedom synchro measure future development, total laser power consumption to laser interferometry system sharply increases, far exceed the Output of laser power of separate unit frequency stabilized carbon dioxide laser, therefore need to adopt many frequency stabilized carbon dioxide lasers to carry out measurement in a closed series simultaneously.But, different frequency stabilized carbon dioxide lasers there are differences at aspects such as frequency traeea-bility, laser wave long value, wave length shift directions, this will bring the inconsistent problem of certainty of measurement, wavelength standard and space coordinates of the laser interferometry system different spaces degree of freedom, thereby affects the integrated measurement accuracy of whole multi-dimension laser interferometer measuration system.In order to ensure the integrated measurement accuracy of laser interferometry system, require the frequency invariance of many frequency stabilized carbon dioxide lasers that are used in combination will reach 10
-8, therefore the frequency invariance between frequency stabilized carbon dioxide laser has become ultra precise measurement and Processing Technology Development is needed one of key issue of solution badly.
The Frequency Stabilized Lasers light source that is applied at present laser interferometry system mainly contains dual vertical mode stable frequency laser, transverse zeeman frequency stabilized carbon dioxide laser and Zeeman Laser laser etc., this class laser is the reference frequency using the centre frequency of Laser gain curve as frequency stabilization control on frequency stabilization benchmark, and the centre frequency of Laser gain curve changes with working gas air pressure and discharging condition, and many frequency stabilized carbon dioxide lasers cannot be accomplished highly consistent in physical parameter, therefore the reference frequency of its frequency stabilization control there are differences, thereby cause the frequency invariance of many frequency stabilized carbon dioxide laser Output of lasers lower, can only arrive 10
-6～10
-7.
In order to solve the poor problem of frequency invariance between frequency stabilized carbon dioxide laser, Harbin Institute of Technology proposes a kind of double-longitudinal-mode laser frequency-offset-lock method (Chinese Patent Application No. CN200910072517, CN200910072518, CN200910072519 and CN200910072523), the method is using the frequency of an iodine stabilizd laser or double-longitudinal-mode laser Output of laser as benchmark, all the other many double-longitudinal-mode lasers are offset certain numerical value with respect to reference frequency and lock, thereby the Output of laser that makes many double-longitudinal-mode lasers has identical wavelength (frequency), but the method is in the locking process of laser frequency, need to adjust the internal running parameter of laser, on the one hand because the mode of adjusting belongs to Indirect method, the response speed of system is relatively slow, due to the characterisitic parameter of each laser, there is some difference on the other hand, the change of laser internal running parameter may produce harmful effect to the frequency stability of laser, serious situation even can cause laser losing lock.
Summary of the invention
The deficiency existing for prior art, the present invention proposes a kind of Zeeman Laser laser locking method based on thermoelectric cooling and acousto-optic frequency translation, its objective is the advantage in conjunction with the shift frequency characteristic of acousto-optic frequency shifters and the Zeeman Laser frequency stabilized carbon dioxide laser of thermoelectric cooling, for ultraprecise processing provides with measuring technique the LASER Light Source that a kind of consistent wavelength is good.The present invention also provides a kind of Zeeman Laser laser frequency locking device based on thermoelectric cooling and acousto-optic frequency translation.
Object of the present invention is achieved through the following technical solutions:
A Zeeman Laser laser locking method based on thermoelectric cooling and acousto-optic frequency translation, the method comprises the following steps:
(1) open the power supply with reference to Zeeman Laser frequency stabilized carbon dioxide laser, after preheating and frequency stabilization process, two laser components of laser output orthogonal polarization, utilize polarization spectroscope to isolate one of them laser component as the output light with reference to Zeeman Laser frequency stabilized carbon dioxide laser, and its frequency of light wave is designated as ν
r, this output light is separated into n>=1 tunnel by fiber optic splitter, is designated as light beam X
i(i=1,2 ..., n), respectively as Zeeman Laser laser L
i(i=1,2 ..., the n) reference beam of Frequency Locking;
(2) open Zeeman Laser laser L
i(i=1,2 ..., power supply n), all Zeeman Laser lasers enter warm simultaneously, measure the temperature value of current environment, set accordingly the target temperature T of preheating
set, and T
sethigher than ambient temperature, utilize thermoelectric refrigerating unit to heat the laser tube being placed in longitudinal magnetic field, make the temperature of laser tube be tending towards predefined temperature value T
setand reach thermal equilibrium state, finely tune the positive and negative and big or small of thermoelectric refrigerating unit operating current according to preheating algorithm on this basis, make laser tube work in single longitudinal mode light output state, this single longitudinal mode light is split into left-handed and two laser components of right-hand circular polarization under longitudinal magnetic field effect, and exports from main output and the secondary output of laser tube;
(3) Zeeman Laser laser L
i(i=1,2 ..., n) after finishing, warm enters frequency stabilization control procedure, and the left-handed and right-circularly polarized light of the secondary output of laser tube changes mutually orthogonal linearly polarized light into through quarter wave plate, and is separated its luminous power P by wollaston prism
i 1(i=1,2 ..., n) and P
i 2(i=1,2 ..., n) being measured by two quadrant photodetector, frequency stabilization control module calculates the difference Δ P of the power of two laser components
i=P
i 1– P
i 2(i=1,2 ..., n), and according to Δ P
i(i=1,2 ..., positive and negative and big or small adjustment thermoelectric refrigerating unit operating current n) positive and negative and big or small, makes Δ P
i(i=1,2 ..., n) go to zero, and then make to swash the light frequency numerical value that tends towards stability;
(4) the left-handed and right-circularly polarized light of the main output of laser tube changes two mutually orthogonal linearly polarized lasers into by quarter wave plate, and utilizes polarization spectroscope to isolate one of them linearly polarized laser component, is designated as light beam T
i(i=1,2 ..., n), its frequency is designated as ν
i(i=1,2 ..., n), light beam T
i(i=1,2 ..., n) enter respectively driving frequency and be
f i(i=1,2 ..., acousto-optic frequency shifters S n)
i(i=1,2 ..., n) carry out shift frequency, the frequency of its corresponding Output of laser is designated as ν
i+
f i(i=1,2 ..., n), this laser is divided into by spectroscope two parts light that strength ratio is 9:1 again, and wherein the relatively large part light of intensity is designated as light beam Z
i(i=1,2 ..., n), respectively as Zeeman Laser laser L
i(i=1,2 ..., Output of laser n), the part light that intensity is relatively little is designated as light beam Y
i(i=1,2 ..., n);
(5) by light beam X
i(i=1,2 ..., n) respectively with light beam Y
i(i=1,2 ..., n) carry out optical frequency mixing and form optical beat signal, utilize photodetector that optical beat signal is converted to the signal of telecommunication, its frequency values Δ ν
i=ν
i+
f i– ν
r(i=1,2 ..., n) being recorded by frequency measurement module, frequency regulation block is according to the frequency values Δ ν of the optical beat signal measuring
i(i=1,2 ..., n), calculate light beam X
i(i=1,2 ..., n) and Y
i(i=1,2 ..., frequency-splitting ν n)
r– ν
i=
f i– Δ ν
i(i=1,2 ..., n), and by acousto-optic frequency shifters S
i(i=1,2 ..., driving frequency n)
f i(i=1,2 ..., n) be adjusted into ν
r– ν
i(i=1,2 ..., n), thereby make Zeeman Laser laser L
i(i=1,2 ..., n) output beam Z
i(i=1,2 ..., frequency n) equals reference beam X
i(i=1,2 ..., frequency n), i.e. ν
i+
f i=ν
r(i=1,2 ..., n);
(6) be cycled to repeat step (4) to (5), by adjusting acousto-optic frequency shifters S
i(i=1,2 ..., operating frequency n)
f i(i=1,2 ..., n), make Zeeman Laser laser L
i(i=1,2 ..., Output of laser Z n)
i(i=1,2 ..., frequency n) is locked in same frequency values ν all the time
r.
A kind of Zeeman Laser laser frequency locking device based on thermoelectric cooling and acousto-optic frequency translation, comprise laser power supply A, frequency stabilization status indicator lamp, with reference to Zeeman Laser frequency stabilized carbon dioxide laser, polarization spectroscope A, fiber optic splitter, it is characterized in that also comprising in device the Zeeman Laser laser (L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n), wherein each Zeeman Laser laser (L
1, L
2..., L
n) assembly structure be: laser power supply B is connected with laser tube, laser tube is placed in heat-conducting metal chamber, thermal conductive silicon glue-line is filled in space between laser tube and heat-conducting metal chamber, laser tube temperature transducer is positioned in thermal conductive silicon glue-line, and be close to laser tube outer wall, its output termination frequency stabilization control module, thermoelectric refrigerating unit is fitted on heat-conducting metal cavity outer wall, its input termination frequency stabilization control module, laser tube, thermal conductive silicon glue-line, the common thermal control structure forming of heat-conducting metal chamber and thermoelectric refrigerating unit is placed in cylindrical shape longitudinal magnetic field module, and the axis of laser tube is parallel with magnetic direction, environment temperature sensor is connected with frequency stabilization control module, quarter wave plate A, wollaston prism and two quadrant photodetector are placed on after the secondary output of laser tube successively, the output of two quadrant photodetector is connected with frequency stabilization control module, quarter wave plate B, polarization spectroscope B and acousto-optic frequency shifters are placed on before the main output of laser tube successively, spectroscope is placed between an input of acousto-optic frequency shifters and optical-fiber bundling device, another input of optical-fiber bundling device is connected with one of output of fiber optic splitter, analyzer is placed between the output and high-speed photodetector of optical-fiber bundling device, high-speed photodetector, frequency measurement module, frequency regulation block, acousto-optic frequency shifters connects successively, frequency locking status indicator lamp is connected with frequency regulation block.
The present invention has following characteristics and good result:
(1) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to multiple Zeeman Laser lasers, all Zeeman Laser frequency stabilized carbon dioxide laser Output of lasers have unified frequency values, due to the high frequency adjustment resolving power of acousto-optic frequency shifters, the frequency invariance of multiple lasers can be up to 10
-9, improving one to two order of magnitude than existing method, this is one of innovative point being different from prior art.
(2) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to multiple Zeeman Laser lasers, because the frequency that acousto-optic frequency shifters is higher is adjusted response speed, can effectively suppress optical maser wavelength drift and transition that external interference factor causes, thereby improved stability and the ambient adaptability of light source, this be different from prior art innovative point two.
(3) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to multiple Zeeman Laser lasers, because the frequency of the final Output of laser of laser is adjusted mode for laser inner laser Guan Eryan, belong to a kind of outside method of adjustment, therefore can not produce harmful effect to the frequency stabilization controlling mechanism of laser tube, be conducive to improve stability and the frequency stabilization precision of system, this be different from prior art innovative point three.
(4) the present invention adopts thermoelectric refrigerating unit to carry out temperature control and adjusting, can allow thermoelectric refrigerating unit produce heat or absorb heat owing to changing its operating current direction, thereby reduce the dependence to function of environment heat emission performance, be conducive to realize quick control and the adjusting to laser tube temperature, improve the reaction speed of control system, this be different from prior art innovative point four.
Brief description of the drawings
Fig. 1 is the principle schematic of apparatus of the present invention
Fig. 2 is the schematic diagram of Zeeman Laser laser frequency stabilization structure in apparatus of the present invention
Fig. 3 is the cross-sectional view of Zeeman Laser laser heat control mechanical structure in apparatus of the present invention
Fig. 4 is the closed loop control function block diagram of Zeeman Laser laser warm in apparatus of the present invention
Fig. 5 is the closed loop control function block diagram of Zeeman Laser laser frequency stabilization process in apparatus of the present invention
Fig. 6 is the closed loop control function block diagram of Zeeman Laser laser frequency locking process in apparatus of the present invention
In figure, 1-laser power supply A, 2-frequency stabilization status indicator lamp, 3-is with reference to Zeeman Laser frequency stabilized carbon dioxide laser, 4-polarization spectroscope A, 5-fiber optic splitter, 6-laser tube, 7-cylindrical shape longitudinal magnetic field module, 8-1/4 wave plate A, 9-wollaston prism, 10-two quadrant photodetector, 11-frequency stabilization control module, 12-laser tube temperature transducer, 13-thermoelectric refrigerating unit, 14-thermal conductive silicon glue-line, 15-heat-conducting metal chamber, 16-environment temperature sensor, 17-laser power supply B, 18-1/4 wave plate B, 19-polarization spectroscope B, 20-acousto-optic frequency shifters, 21-spectroscope, 22-optical-fiber bundling device, 23-analyzer, 24-high-speed photodetector, 25-frequency measurement module, 26-frequency regulation block, 27-frequency locking status indicator lamp.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
As shown in Figure 1, Figure 2 and Figure 3, Zeeman Laser laser frequency locking device based on thermoelectric cooling and acousto-optic frequency translation in apparatus of the present invention, comprise laser power supply A1, frequency stabilization status indicator lamp 2, with reference to Zeeman Laser frequency stabilized carbon dioxide laser 3, polarization spectroscope A4, fiber optic splitter 5, in this device, also comprise the Zeeman Laser laser L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n, wherein each Zeeman Laser laser L
1, L
2..., L
nassembly structure be: laser power supply B17 is connected with laser tube 6, laser tube 6 is placed in heat-conducting metal chamber 15, thermal conductive silicon glue-line 14 is filled in space between laser tube 6 and heat-conducting metal chamber 15, laser tube temperature transducer 12 is positioned in thermal conductive silicon glue-line 14, and be close to laser tube 6 outer walls, its output termination frequency stabilization control module 11, thermoelectric refrigerating unit 13 is fitted on 15 outer walls of heat-conducting metal chamber, its input termination frequency stabilization control module 11, laser tube 6, thermal conductive silicon glue-line 14, heat-conducting metal chamber 15 and the common thermal control structure forming of thermoelectric refrigerating unit 13 are placed in cylindrical shape longitudinal magnetic field module 7, and the axis of laser tube 6 is parallel with magnetic direction, environment temperature sensor 16 is connected with frequency stabilization control module 11, quarter wave plate A8, wollaston prism 9 and two quadrant photodetector 10 are placed on after the secondary output of laser tube 6 successively, the output of two quadrant photodetector 10 is connected with frequency stabilization control module 11, quarter wave plate B18, polarization spectroscope B19 and acousto-optic frequency shifters 20 are placed on before the main output of laser tube 6 successively, spectroscope 21 is placed between an input of acousto-optic frequency shifters 20 and optical-fiber bundling device 22, another input of optical-fiber bundling device 22 is connected with one of output of fiber optic splitter 5, analyzer 23 is placed between the output and high-speed photodetector 24 of optical-fiber bundling device 22, high-speed photodetector 24, frequency measurement module 25, frequency regulation block 26, acousto-optic frequency shifters 20 connects successively, frequency locking status indicator lamp 27 is connected with frequency regulation block 26.
In view of device comprises the Zeeman Laser frequency stabilized carbon dioxide laser L that multiple structures are identical
1, L
2..., L
n, the course of work of these Zeeman Laser frequency stabilized carbon dioxide lasers is in full accord, below only to one of them Zeeman Laser frequency stabilized carbon dioxide laser L
1carry out course of work description, these descriptive texts are equally applicable to other the similar Zeeman Laser frequency stabilized carbon dioxide laser in device.
While starting working, open laser power supply A1, enter preheating and frequency stabilization process with reference to Zeeman Laser frequency stabilized carbon dioxide laser 3, in the time that said process completes, enable frequency stabilization status indicator lamp 2, represent to enter steady-working state with reference to Zeeman Laser frequency stabilized carbon dioxide laser 3, two laser components that its inner laser pipe output polarization direction is mutually orthogonal, utilize polarization spectroscope A4 to take out one of them laser component as output light, and be coupled into fiber optic splitter 5, be separated into n road frequency reference light beam, be designated as light beam X
1, X
2..., X
n, its frequency is designated as ν
r, as Zeeman Laser laser L
1, L
2..., L
nthe reference frequency of Frequency Locking.
When frequency stabilization status indicator lamp 2 enables, open laser tube power supply B17, Zeeman Laser frequency stabilized carbon dioxide laser L
1enter warm.The ambient temperature value that frequency stabilization control module 11 measures according to environment temperature sensor 16 is set the target temperature T of preheating
set, and T
sethigher than ambient temperature, by T
setas the reference input of preheating closed-loop control system as shown in Figure 4, measure the actual temperature T of laser tube 6 with laser tube temperature transducer 12 simultaneously
realas feedback signal, frequency stabilization control module 11 is calculated the difference of the two, and according to the size of the operating current of frequency stabilization control algolithm adjusting thermoelectric refrigerating unit 13 and positive and negative, laser tube 6 is heated or freezed, and makes its temperature be tending towards default target temperature T
setreach thermal equilibrium state, finely tune the positive and negative and big or small of thermoelectric refrigerating unit 13 operating currents according to preheating algorithm on this basis, make laser tube 6 work in single longitudinal mode light output state, this single longitudinal mode light is split into left-handed and two laser components of right-hand circular polarization under longitudinal magnetic field effect, and exports from main output and the secondary output of laser tube 6.
After warm completes, frequency stabilization control module 11 is switched Zeeman Laser frequency stabilized carbon dioxide laser L
1enter frequency stabilization control procedure.Left-handed and two laser components of dextrorotation of the secondary output output of laser tube 6 change mutually orthogonal linearly polarized light component into through quarter wave plate A8, and are separated its luminous power P by wollaston prism 9
1 1and P
1 2recorded by two quadrant photodetector 10, by the difference Δ P=P of the power of two longitudinal modes
1 1– P
1 2as the feed back input amount of frequency stabilization closed-loop control system as shown in Figure 5, reference input is set to zero, frequency stabilization control module 11 calculates the difference of reference input and feed back input amount, and according to the size and Orientation of the operating current of frequency stabilization control algolithm adjustment winding thermoelectric refrigerating unit 13, and then the temperature resonant cavity of adjusting laser tube 6 is long, make the power P of two laser components
1 1=P
1 2, the now frequency of two the laser components numerical value that also tends towards stability.
After frequency stabilization process finishes, laser L
1enter Frequency Locking process, left-handed and two circularly polarized laser components of dextrorotation of the main output output of laser tube 6 change mutually orthogonal linearly polarized light into through quarter wave plate B18, and isolate one of them laser component by polarization spectroscope B19, as the input light of acousto-optic frequency shifters 20, its frequency is designated as ν
1, the operating frequency of acousto-optic frequency shifters 20 is designated as
f 1, due to acousto-optic interaction, the frequency of acousto-optic frequency shifters 20 Output of lasers is ν
1+ f 1, it is 9:1 two parts light that this light beam is separated into intensity by spectroscope 21 again, wherein the relatively large part light of intensity is designated as light beam Z
1, as Zeeman Laser laser L
1output of laser, the part light that intensity is relatively little is designated as light beam Y
1, this light beam and light beam X
1be coupled into optical fiber by optical-fiber bundling device 22 and synthesize a branch of coaxial beam, this coaxial beam, by the rear formation optical beat signal of analyzer 23, is carried out after opto-electronic conversion its frequency values Δ ν through high-speed photodetector 24
1=ν
1+
f 1– ν
rmeasured by frequency measurement module 25, and the feed back input amount of conduct Frequency Locking closed-loop control system as shown in Figure 6, reference input is set to zero, and frequency regulation block 26 is according to the difference DELTA ν of the two
1, calculate light beam X
1with light beam Y
1frequency-splitting be ν
r– ν
1=
f 1– Δ ν
1, and by the driving frequency of acousto-optic frequency shifters 20
f 1be adjusted into ν
r– ν
1thereby, make laser L
1output beam Z
1frequency (light beam Z
1with light beam Y
1same frequency) equal reference beam X
1frequency ν
r.After said frequencies locking process completes, frequency regulation block 26 enables frequency locking status indicator lamp 27.
When external environment change or other factors cause with reference to Zeeman Laser frequency stabilized carbon dioxide laser 3 or Zeeman Laser laser L
1when the frequency of Output of laser changes, the above-mentioned frequency stabilization locking process of automatic cycle, by adjusting the operating frequency of acousto-optic frequency shifters 20
f 1, make Zeeman Laser laser L
1the frequency ν of Output of laser
1all the time be locked in reference frequency ν
r.In like manner, Zeeman Laser laser L
2, L
3..., L
nthe frequency ν of Output of laser
2, ν
3..., ν
nalso be locked in all the time reference frequency ν
ron.
Claims (2)
1. the Zeeman Laser laser locking method based on thermoelectric cooling and acousto-optic frequency translation, is characterized in that the method comprises the following steps:
(1) open the power supply with reference to Zeeman Laser frequency stabilized carbon dioxide laser, after preheating and frequency stabilization process, two laser components of laser output orthogonal polarization, utilize polarization spectroscope to isolate one of them laser component as the output light with reference to Zeeman Laser frequency stabilized carbon dioxide laser, and its frequency of light wave is designated as ν
r, this output light is separated into n>=1 tunnel by fiber optic splitter, is designated as light beam X
i(i=1,2 ..., n), respectively as Zeeman Laser laser L
i(i=1,2 ..., the n) reference beam of Frequency Locking;
(2) open Zeeman Laser laser L
i(i=1,2 ..., power supply n), all Zeeman Laser lasers enter warm simultaneously, measure the temperature value of current environment, set accordingly the target temperature T of preheating
set, and T
sethigher than ambient temperature, utilize thermoelectric refrigerating unit to heat the laser tube being placed in longitudinal magnetic field, make the temperature of laser tube be tending towards predefined temperature value T
setand reach thermal equilibrium state, finely tune the positive and negative and big or small of thermoelectric refrigerating unit operating current according to preheating algorithm on this basis, make laser tube work in single longitudinal mode light output state, this single longitudinal mode light is split into left-handed and two laser components of right-hand circular polarization under longitudinal magnetic field effect, and exports from main output and the secondary output of laser tube;
(3) Zeeman Laser laser L
i(i=1,2 ..., n) after finishing, warm enters frequency stabilization control procedure, and the left-handed and right-circularly polarized light of the secondary output of laser tube changes mutually orthogonal linearly polarized light into through quarter wave plate, and is separated its luminous power P by wollaston prism
i 1(i=1,2 ..., n) and P
i 2(i=1,2 ..., n) being measured by two quadrant photodetector, frequency stabilization control module calculates the difference Δ P of the power of two laser components
i=P
i 1– P
i 2(i=1,2 ..., n), and according to Δ P
i(i=1,2 ..., positive and negative and big or small adjustment thermoelectric refrigerating unit operating current n) positive and negative and big or small, makes Δ P
i(i=1,2 ..., n) go to zero, and then make to swash the light frequency numerical value that tends towards stability;
(4) the left-handed and right-circularly polarized light of the main output of laser tube changes two mutually orthogonal linearly polarized lasers into by quarter wave plate, and utilizes polarization spectroscope to isolate one of them linearly polarized laser component, is designated as light beam T
i(i=1,2 ..., n), its frequency is designated as ν
i(i=1,2 ..., n), light beam T
i(i=1,2 ..., n) enter respectively driving frequency and be
f i(i=1,2 ..., acousto-optic frequency shifters S n)
i(i=1,2 ..., n) carry out shift frequency, the frequency of its corresponding Output of laser is designated as ν
i+
f i(i=1,2 ..., n), this laser is divided into by spectroscope two parts light that strength ratio is 9:1 again, and wherein the relatively large part light of intensity is designated as light beam Z
i(i=1,2 ..., n), respectively as Zeeman Laser laser L
i(i=1,2 ..., Output of laser n), the part light that intensity is relatively little is designated as light beam Y
i(i=1,2 ..., n);
(5) by light beam X
i(i=1,2 ..., n) respectively with light beam Y
i(i=1,2 ..., n) carry out optical frequency mixing and form optical beat signal, utilize photodetector that optical beat signal is converted to the signal of telecommunication, its frequency values Δ ν
i=ν
i+
f i– ν
r(i=1,2 ..., n) being recorded by frequency measurement module, frequency regulation block is according to the frequency values Δ ν of the optical beat signal measuring
i(i=1,2 ..., n), calculate light beam X
i(i=1,2 ..., n) and Y
i(i=1,2 ..., frequency-splitting ν n)
r– ν
i=
f i– Δ ν
i(i=1,2 ..., n), and by acousto-optic frequency shifters S
i(i=1,2 ..., driving frequency n)
f i(i=1,2 ..., n) be adjusted into ν
r– ν
i(i=1,2 ..., n), thereby make Zeeman Laser laser L
i(i=1,2 ..., n) output beam Z
i(i=1,2 ..., frequency n) equals reference beam X
i(i=1,2 ..., frequency n), i.e. ν
i+
f i=ν
r(i=1,2 ..., n);
(6) be cycled to repeat step (4) to (5), by adjusting acousto-optic frequency shifters S
i(i=1,2 ..., operating frequency n)
f i(i=1,2 ..., n), make Zeeman Laser laser L
i(i=1,2 ..., Output of laser Z n)
i(i=1,2 ..., frequency n) is locked in same frequency values ν all the time
r.
2. the Zeeman Laser laser frequency locking device based on thermoelectric cooling and acousto-optic frequency translation, comprise laser power supply A(1), frequency stabilization status indicator lamp (2), with reference to Zeeman Laser frequency stabilized carbon dioxide laser (3), polarization spectroscope A(4), fiber optic splitter (5), it is characterized in that also comprising in device the Zeeman Laser laser (L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n), wherein each Zeeman Laser laser (L
1, L
2..., L
n) assembly structure be: laser power supply B(17) be connected with laser tube (6), laser tube (6) is placed in heat-conducting metal chamber (15), thermal conductive silicon glue-line (14) is filled in space between laser tube (6) and heat-conducting metal chamber (15), laser tube temperature transducer (12) is positioned in thermal conductive silicon glue-line (14), and be close to laser tube (6) outer wall, its output termination frequency stabilization control module (11), thermoelectric refrigerating unit (13) is fitted on the outer wall of heat-conducting metal chamber (15), its input termination frequency stabilization control module (11), laser tube (6), thermal conductive silicon glue-line (14), the common thermal control structure forming of heat-conducting metal chamber (15) and thermoelectric refrigerating unit (13) is placed in cylindrical shape longitudinal magnetic field module (7), and the axis of laser tube (6) is parallel with magnetic direction, environment temperature sensor (16) is connected with frequency stabilization control module (11), quarter wave plate A(8), wollaston prism (9) and two quadrant photodetector (10) are placed on after the secondary output of laser tube (6) successively, the output of two quadrant photodetector (10) is connected with frequency stabilization control module (11), quarter wave plate B(18), polarization spectroscope B(19) and acousto-optic frequency shifters (20) be placed on successively before the main output of laser tube (6), spectroscope (21) is placed between acousto-optic frequency shifters (20) and an input of optical-fiber bundling device (22), one of output of another input of optical-fiber bundling device (22) and fiber optic splitter (5) is connected, analyzer (23) is placed between the output and high-speed photodetector (24) of optical-fiber bundling device (22), high-speed photodetector (24), frequency measurement module (25), frequency regulation block (26), acousto-optic frequency shifters (20) connects successively, frequency locking status indicator lamp (27) is connected with frequency regulation block (26).
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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