CN104037611A - Horizontal Zeeman laser frequency locking method and device based on piezoelectric effect and acousto-optic frequency shift - Google Patents
Horizontal Zeeman laser frequency locking method and device based on piezoelectric effect and acousto-optic frequency shift Download PDFInfo
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Abstract
The invention belongs to the technical field of laser application, and provides a horizontal Zeeman laser frequency locking method and device based on a piezoelectric effect and acousto-optic frequency shift. By adopting the acousto-optic frequency shift technology, output laser frequencies of a plurality of horizontal Zeeman lasers based on cavity length piezoelectric regulation are locked to the output laser frequency of the same reference horizontal Zeeman frequency stabilized laser, and therefore output laser rays of all lasers are uniform in frequency value. The purposes of overcoming the defect that traditional frequency stabilized lasers are poor in frequency uniformity and providing a novel laser light source for ultra-precise laser interferometry are achieved.
Description
Technical field
The invention belongs to laser application technique field, particularly a kind of transverse zeeman laser locking method and device thereof based on piezoelectric effect and acousto-optic frequency translation.
Background technology
In recent years, take ultra precise measurement that mask aligner and Digit Control Machine Tool be representative and process technology towards large scale, high accuracy, many spatial degrees of freedom synchro measure future development, total laser power consumption to laser interferometry system sharply increases, the Output of laser power that surpasses separate unit frequency stabilized carbon dioxide laser far away therefore need to adopt many frequency stabilized carbon dioxide lasers to carry out measurement in a closed series simultaneously.Yet, different frequency stabilized carbon dioxide lasers there are differences at aspects such as frequency traeea-bility, laser wave long value, wave length shift directions, this will bring the inconsistent problem of certainty of measurement, wavelength standard and space coordinates of the laser interferometry system different spaces degree of freedom, thereby affects the integrated measurement accuracy of whole multi-dimension laser interferometer measuration system.In order to guarantee the integrated measurement accuracy of laser interferometry system, the frequency invariance of many frequency stabilized carbon dioxide lasers that requirement is used in combination will reach 10
-8, so the frequency invariance between frequency stabilized carbon dioxide laser has become ultra precise measurement and Processing Technology Development is needed one of key issue of solution badly.
The Frequency Stabilized Lasers light source that is applied at present laser interferometry system mainly contains dual vertical mode stable frequency laser, transverse zeeman frequency stabilized carbon dioxide laser and Zeeman Laser laser etc., this class laser is usingd the reference frequency that the centre frequency of Laser gain curve is controlled as frequency stabilization on frequency stabilization benchmark, and the centre frequency of Laser gain curve changes with working gas air pressure and discharging condition, and many frequency stabilized carbon dioxide lasers cannot be accomplished highly consistent in physical parameter, therefore the reference frequency that its frequency stabilization is controlled there are differences, thereby cause the frequency invariance of many frequency stabilized carbon dioxide laser Output of lasers lower, can only arrive 10
-6～10
-7.
In order to solve the poor problem of frequency invariance between frequency stabilized carbon dioxide laser, Harbin Institute of Technology proposes a kind of double-longitudinal-mode laser frequency-offset-lock method (Chinese Patent Application No. CN200910072517, CN200910072518, CN200910072519 and CN200910072523), the method is usingd the frequency of an iodine stabilizd laser or double-longitudinal-mode laser Output of laser as benchmark, all the other many double-longitudinal-mode lasers are offset certain numerical value with respect to reference frequency and lock, thereby the Output of laser that makes many double-longitudinal-mode lasers has identical wavelength (frequency), but the method is in the locking process of laser frequency, need to adjust the internal running parameter of laser, on the one hand because the mode of adjusting belongs to Indirect method, the response speed of system is relatively slow, due to the characterisitic parameter of each laser, there is some difference on the other hand, the change of laser internal running parameter may produce harmful effect to the frequency stability of laser, serious situation even can cause laser losing lock.
Summary of the invention
The deficiency existing for prior art, the present invention proposes a kind of transverse zeeman laser locking method based on piezoelectric effect and acousto-optic frequency translation, its objective is the advantage in conjunction with the shift frequency characteristic of acousto-optic frequency shifters and the transverse zeeman frequency stabilized carbon dioxide laser of piezoelectric ceramic frequency stabilization, for ultraprecise processing provides with measuring technique the LASER Light Source that a kind of consistent wavelength is good.The present invention also provides a kind of transverse zeeman laser frequency locking device based on piezoelectric effect and acousto-optic frequency translation.
Object of the present invention is achieved through the following technical solutions:
A transverse zeeman laser locking method based on piezoelectric effect and acousto-optic frequency translation, the method comprises the following steps:
(1) open the power supply with reference to transverse zeeman frequency stabilized carbon dioxide laser, after preheating and frequency stabilization process, two laser components of laser output orthogonal polarization, utilize polarization spectroscope to isolate one of them laser component as the output light with reference to transverse zeeman frequency stabilized carbon dioxide laser, and its frequency of light wave is designated as ν
r, this output light is separated into n>=1 tunnel by fiber optic splitter, is designated as light beam X
i(i=1,2 ..., n), respectively as transverse zeeman laser L
i(i=1,2 ..., the n) reference beam of Frequency Locking;
(2) open double-longitudinal-mode laser L
i(i=1, 2, n) power supply, frequency stabilization control module is exported a predeterminated voltage value according to frequency stabilization control algolithm, this voltage is applied on the ring piezoelectric pottery of the secondary output of laser inner laser pipe, make the length of ring piezoelectric pottery, on laser tube is axial, minor variations occur, to adjust the chamber mirror be arranged on ring piezoelectric pottery in the axial position of laser tube, and then the chamber of adjusting laser tube is long, make laser tube work in single longitudinal mode light output state, this single longitudinal mode light is split into two laser components of cross-polarization under transverse magnetic field effect, and export from main output and the secondary output of laser tube,
(3) utilize wollaston prism that two laser components of the cross-polarization of the secondary output of its inner laser pipe are separated, its luminous power P
i 1(i=1,2 ..., n) and P
i 2(i=1,2 ..., n) by two quadrant photodetector, being measured, frequency stabilization control module calculates the difference Δ P of the power of two laser components
i=P
i 1– P
i 2(i=1,2 ..., n), and according to Δ P
i(i=1,2 ..., the positive and negative and big or small magnitude of voltage size being applied on ring piezoelectric pottery of adjusting n), makes Δ P
i(i=1,2 ..., n) go to zero, and then make to swash the light frequency numerical value that tends towards stability;
(4) utilize polarization spectroscope to isolate a laser component in the main output laser of laser tube, be designated as light beam T
i(i=1,2 ..., n), its frequency is designated as ν
i(i=1,2 ..., n), light beam T
i(i=1,2 ..., n) enter respectively driving frequency and be
f i(i=1,2 ..., acousto-optic frequency shifters S n)
i(i=1,2 ..., n) carry out shift frequency, the frequency of the Output of laser that it is corresponding is designated as ν
i+
f i(i=1,2 ..., n), this laser is divided into by spectroscope two parts light that strength ratio is 9:1 again, and wherein the relatively large part light of intensity is designated as light beam Z
i(i=1,2 ..., n), as transverse zeeman laser L
i(i=1,2 ..., Output of laser n), the part light that intensity is relatively little is designated as light beam Y
i(i=1,2 ..., n);
(5) by light beam X
i(i=1,2 ..., n) respectively with light beam Y
i(i=1,2 ..., n) carry out optical frequency mixing and form optical beat signal, utilize photodetector that optical beat signal is converted to the signal of telecommunication, its frequency values Δ ν
i=ν
i+
f i– ν
r(i=1,2 ..., n) by frequency measurement module, being recorded, frequency regulation block is according to the frequency values Δ ν of the optical beat signal measuring
i(i=1,2 ..., n), calculate light beam X
i(i=1,2 ..., n) and Y
i(i=1,2 ..., frequency-splitting ν n)
r– ν
i=
f i– Δ ν
i(i=1,2 ..., n), and by acousto-optic frequency shifters S
i(i=1,2 ..., driving frequency n)
f i(i=1,2 ..., n) be adjusted into ν
r– ν
i(i=1,2 ..., n), thereby make transverse zeeman laser L
i(i=1,2 ..., n) output beam Z
i(i=1,2 ..., frequency n) equals reference beam X
i(i=1,2 ..., frequency n), i.e. ν
i+
f i=ν
r(i=1,2 ..., n);
(6) be cycled to repeat step (4) to (5), by adjusting acousto-optic frequency shifters S
i(i=1,2 ..., operating frequency n)
f i(i=1,2 ..., n), make transverse zeeman laser L
i(i=1,2 ..., Output of laser Z n)
i(i=1,2 ..., frequency n) is locked in same frequency values ν all the time
r.
A kind of transverse zeeman laser frequency locking device based on piezoelectric effect and acousto-optic frequency translation, comprise laser power supply A, frequency stabilization status indicator lamp, with reference to transverse zeeman frequency stabilized carbon dioxide laser, polarization spectroscope A, fiber optic splitter, it is characterized in that also comprising in device the transverse zeeman laser (L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n), each transverse zeeman laser (L wherein
1, L
2..., L
n) assembly structure be: laser power supply B is connected with laser tube, laser tube is placed in transverse magnetic field module, the magnetic field in the vertical direction that transverse magnetic field module produces, the axis of laser tube is vertical with magnetic direction, ring piezoelectric pottery is arranged on the secondary output of laser tube, its input termination frequency stabilization control module, chamber mirror is arranged on ring piezoelectric pottery, laser tube temperature transducer is attached on laser tube outer wall, its output termination frequency stabilization control module, environment temperature sensor is connected with frequency stabilization control module, wollaston prism is placed on after the secondary output of laser tube, place two quadrant photodetector thereafter, the output of two quadrant photodetector is connected with frequency stabilization control module, polarization spectroscope B is placed on before the main output of laser tube, place acousto-optic frequency shifters thereafter, spectroscope is placed between an input of acousto-optic frequency shifters and optical-fiber bundling device, another input of optical-fiber bundling device is connected with one of output of fiber optic splitter, analyzer is placed between the output and high-speed photodetector of optical-fiber bundling device, high-speed photodetector, frequency measurement module, frequency regulation block, acousto-optic frequency shifters connects successively, frequency locking status indicator lamp is connected with frequency regulation block.
The present invention has following characteristics and good result:
(1) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to a plurality of transverse zeeman lasers, all transverse zeeman frequency stabilized carbon dioxide laser Output of lasers have unified frequency values, due to the high frequency adjustment resolving power of acousto-optic frequency shifters, the frequency invariance of a plurality of lasers can be up to 10
-9, than existing method, improving one to two order of magnitude, this is one of innovative point being different from prior art.
(2) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to a plurality of transverse zeeman lasers, because the frequency that acousto-optic frequency shifters is higher is adjusted response speed, can effectively suppress optical maser wavelength drift and transition that external interference factor causes, thereby improved stability and the ambient adaptability of light source, this be different from prior art innovative point two.
(3) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to a plurality of transverse zeeman lasers, because the frequency of the final Output of laser of laser is adjusted mode for laser inner laser Guan Eryan, belong to a kind of outside method of adjustment, therefore can not produce harmful effect to the frequency stabilization controlling mechanism of laser tube, be conducive to improve stability and the frequency stabilization precision of system, this be different from prior art innovative point three.
(4) the present invention adopts ring piezoelectric pottery to regulate laser tube chamber progress row, compare with other indirect regulation methods such as hot frequency stabilizations, the inventive method belongs to direct control method, thereby frequency stabilization system has very fast response speed, in addition due to the mechanical stability of piezoelectric ceramic devices excellence, contribute to improve the precision of laser frequency stabilization, this be different from prior art innovative point four.
Accompanying drawing explanation
Fig. 1 is the principle schematic of apparatus of the present invention
Fig. 2 is the schematic diagram of transverse zeeman laser frequency stabilization structure in apparatus of the present invention
Fig. 3 is the closed loop control function block diagram of transverse zeeman laser frequency stabilization process in apparatus of the present invention
Fig. 4 is the closed loop control function block diagram of transverse zeeman laser Frequency Locking process in apparatus of the present invention
In figure, 1 laser power supply A, 2 frequency stabilization status indicator lamps, 3 with reference to transverse zeeman frequency stabilized carbon dioxide laser, 4 polarization spectroscope A, 5 fiber optic splitters, 6 laser tubes, 7 transverse magnetic field modules, 8 wollaston prisms, 9 two quadrant photodetectors, 10 frequency stabilization control modules, 11 laser tube temperature transducers, 12 piezoelectric ceramic, 13 chamber mirrors, 14 environment temperature sensors, 15 laser power supply B, 16 polarization spectroscope B, 17 acousto-optic frequency shifters, 18 spectroscopes, 19 optical-fiber bundling devices, 20 analyzers, 21 high-speed photodetectors, 22 frequency measurement modules, 23 frequency regulation block, 24 frequency locking status indicator lamps.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
As depicted in figs. 1 and 2, transverse zeeman laser frequency locking device based on piezoelectric effect and acousto-optic frequency translation in apparatus of the present invention, comprise laser power supply A1, frequency stabilization status indicator lamp 2, with reference to transverse zeeman frequency stabilized carbon dioxide laser 3, polarization spectroscope A4, fiber optic splitter 5, it is characterized in that also comprising in device the transverse zeeman laser (L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n), each transverse zeeman laser (L wherein
1, L
2..., L
n) assembly structure be: laser power supply B15 is connected with laser tube 6, laser tube 6 is placed in transverse magnetic field module 7, the magnetic field in the vertical direction that transverse magnetic field module 7 produces, the axis of laser tube 6 is vertical with magnetic direction, ring piezoelectric pottery 12 is arranged on the secondary output of laser tube 6, its input termination frequency stabilization control module 10, chamber mirror 13 is arranged on ring piezoelectric pottery 12, laser tube temperature transducer 11 is attached on laser tube 6 outer walls, its output termination frequency stabilization control module 10, environment temperature sensor 14 is connected with frequency stabilization control module 10, wollaston prism 8 is placed on after the secondary output of laser tube 6, place two quadrant photodetector 9 thereafter, the output of two quadrant photodetector 9 is connected with frequency stabilization control module 10, polarization spectroscope B16 is placed on before the main output of laser tube 6, place acousto-optic frequency shifters 17 thereafter, spectroscope 18 is placed between an input of acousto-optic frequency shifters 17 and optical-fiber bundling device 19, another input of optical-fiber bundling device 19 is connected with one of output of fiber optic splitter 5, analyzer 20 is placed between the output and high-speed photodetector 21 of optical-fiber bundling device 19, high-speed photodetector 21, frequency measurement module 22, frequency regulation block 23, acousto-optic frequency shifters 17 connects successively, frequency locking status indicator lamp 24 is connected with frequency regulation block 23.
Because device comprises the transverse zeeman frequency stabilized carbon dioxide laser L that a plurality of structures are identical
1, L
2..., L
n, the course of work of these transverse zeeman frequency stabilized carbon dioxide lasers is in full accord, below only to one of them transverse zeeman frequency stabilized carbon dioxide laser L
1carry out course of work description, these descriptive texts are equally applicable to other the similar transverse zeeman frequency stabilized carbon dioxide laser in device.
While starting working, open laser power supply A1, with reference to transverse zeeman frequency stabilized carbon dioxide laser 3, enter preheating and frequency stabilization process, when said process completes, enable frequency stabilization status indicator lamp 2, expression enters steady-working state with reference to transverse zeeman frequency stabilized carbon dioxide laser 3, its Output of laser comprises two laser components that polarization direction is mutually orthogonal, utilizes polarization spectroscope A4 to take out one of them laser component as output light, and is coupled into fiber optic splitter 5, be separated into n road frequency reference light beam, be designated as light beam X
1, X
2..., X
n, its frequency is designated as ν
r, as transverse zeeman laser L
1, L
2..., L
nthe reference frequency of Frequency Locking.
When frequency stabilization status indicator lamp 2 enables, open laser tube power supply B15, frequency stabilization control module 10 output one predeterminated voltage values are applied to transverse zeeman frequency stabilized carbon dioxide laser L
1on the ring piezoelectric pottery 12 of inner laser pipe 6 secondary outputs, make the length of ring piezoelectric pottery, on laser tube 6 is axial, minor variations occur, to adjust the chamber mirror 13 be arranged on ring piezoelectric pottery in the axial position of laser tube 6, and then the chamber of adjusting laser tube 6 is long, make laser tube work in single longitudinal mode light output state, this single longitudinal mode light is split into two laser components of cross-polarization under transverse magnetic field effect, and exports from main output and the secondary output of laser tube.Utilize wollaston prism 8 that two laser components of the secondary output output of laser tube 6 are separated, its luminous power P
1 1and P
1 2by two quadrant photodetector 9, recorded, by the difference Δ P=P of the power of two longitudinal modes
1 1– P
1 2feed back input amount as frequency stabilization closed-loop control system as shown in Figure 3, reference input is set to zero, frequency stabilization control module 10 calculates the difference of reference input and feed back input amount, and adjustment is applied to the size of the magnitude of voltage on ring piezoelectric pottery 12 according to frequency stabilization control algolithm, and then the resonant cavity of adjusting laser tube 6 is long, make the power P of two laser components
1 1=P
1 2, the frequency of two the laser components numerical value that also tends towards stability now.
After frequency stabilization process finishes, laser L
1enter Frequency Locking process, the dual-mode laser of the main output output of laser tube 6 is isolated one of them laser component by polarization spectroscope B16, and as the input light of acousto-optic frequency shifters 17, its frequency is designated as ν
1, the operating frequency of acousto-optic frequency shifters 17 is designated as
f 1, due to acousto-optic interaction, the frequency of acousto-optic frequency shifters 17 Output of lasers is ν
1+ f 1, it is 9:1 two parts light that this light beam is separated into intensity by spectroscope 18 again, wherein the relatively large part light of intensity is designated as light beam Z
1, as transverse zeeman laser L
1output of laser, the part light that intensity is relatively little is designated as light beam Y
1, this light beam and light beam X
1by optical-fiber bundling device 19, be coupled into optical fiber and synthesize a branch of coaxial beam, this coaxial beam, by the rear formation optical beat signal of analyzer 20, is carried out after opto-electronic conversion its frequency values Δ ν through high-speed photodetector 21
1=ν
1+
f 1– ν
rby frequency measurement module 22, measured, and the feed back input amount of conduct Frequency Locking closed-loop control system as shown in Figure 4, reference input is set to zero, and frequency regulation block 23 is according to the difference DELTA ν of the two
1, calculate light beam X
1with light beam Y
1frequency-splitting be ν
r– ν
1=
f 1– Δ ν
1, and by the driving frequency of acousto-optic frequency shifters 17
f 1adjustment becomes ν
r– ν
1thereby, make laser L
1output beam Z
1frequency (light beam Z
1with light beam Y
1same frequency) equal reference beam X
1frequency ν
r.After said frequencies locking process completes, frequency regulation block 23 enables frequency locking status indicator lamp 24.
When external environment changes or other factors causes with reference to transverse zeeman frequency stabilized carbon dioxide laser 3 or transverse zeeman laser L
1when the frequency of Output of laser changes, the above-mentioned frequency stabilization locking process of automatic cycle, by adjusting the operating frequency of acousto-optic frequency shifters 17
f 1, make transverse zeeman laser L
1the frequency ν of Output of laser
1all the time be locked in reference frequency ν
r.In like manner, transverse zeeman laser L
2, L
3..., L
nthe frequency ν of Output of laser
2, ν
3..., ν
nalso be locked in all the time reference frequency ν
ron.
Claims (2)
1. the transverse zeeman laser locking method based on piezoelectric effect and acousto-optic frequency translation, is characterized in that the method comprises the following steps:
(1) open the power supply with reference to transverse zeeman frequency stabilized carbon dioxide laser, after preheating and frequency stabilization process, two laser components of laser output orthogonal polarization, utilize polarization spectroscope to isolate one of them laser component as the output light with reference to transverse zeeman frequency stabilized carbon dioxide laser, and its frequency of light wave is designated as ν
r, this output light is separated into n>=1 tunnel by fiber optic splitter, is designated as light beam X
i(i=1,2 ..., n), respectively as transverse zeeman laser L
i(i=1,2 ..., the n) reference beam of Frequency Locking;
(2) open double-longitudinal-mode laser L
i(i=1, 2, n) power supply, frequency stabilization control module is exported a predeterminated voltage value according to frequency stabilization control algolithm, this voltage is applied on the ring piezoelectric pottery of the secondary output of laser inner laser pipe, make the length of ring piezoelectric pottery, on laser tube is axial, minor variations occur, to adjust the chamber mirror be arranged on ring piezoelectric pottery in the axial position of laser tube, and then the chamber of adjusting laser tube is long, make laser tube work in single longitudinal mode light output state, this single longitudinal mode light is split into two laser components of cross-polarization under transverse magnetic field effect, and export from main output and the secondary output of laser tube,
(3) utilize wollaston prism that two laser components of the cross-polarization of the secondary output of its inner laser pipe are separated, its luminous power P
i 1(i=1,2 ..., n) and P
i 2(i=1,2 ..., n) by two quadrant photodetector, being measured, frequency stabilization control module calculates the difference Δ P of the power of two laser components
i=P
i 1– P
i 2(i=1,2 ..., n), and according to Δ P
i(i=1,2 ..., the positive and negative and big or small magnitude of voltage size being applied on ring piezoelectric pottery of adjusting n), makes Δ P
i(i=1,2 ..., n) go to zero, and then make to swash the light frequency numerical value that tends towards stability;
(4) utilize polarization spectroscope to isolate a laser component in the main output laser of laser tube, be designated as light beam T
i(i=1,2 ..., n), its frequency is designated as ν
i(i=1,2 ..., n), light beam T
i(i=1,2 ..., n) enter respectively driving frequency and be
f i(i=1,2 ..., acousto-optic frequency shifters S n)
i(i=1,2 ..., n) carry out shift frequency, the frequency of the Output of laser that it is corresponding is designated as ν
i+
f i(i=1,2 ..., n), this laser is divided into by spectroscope two parts light that strength ratio is 9:1 again, and wherein the relatively large part light of intensity is designated as light beam Z
i(i=1,2 ..., n), as transverse zeeman laser L
i(i=1,2 ..., Output of laser n), the part light that intensity is relatively little is designated as light beam Y
i(i=1,2 ..., n);
(5) by light beam X
i(i=1,2 ..., n) respectively with light beam Y
i(i=1,2 ..., n) carry out optical frequency mixing and form optical beat signal, utilize photodetector that optical beat signal is converted to the signal of telecommunication, its frequency values Δ ν
i=ν
i+
f i– ν
r(i=1,2 ..., n) by frequency measurement module, being recorded, frequency regulation block is according to the frequency values Δ ν of the optical beat signal measuring
i(i=1,2 ..., n), calculate light beam X
i(i=1,2 ..., n) and Y
i(i=1,2 ..., frequency-splitting ν n)
r– ν
i=
f i– Δ ν
i(i=1,2 ..., n), and by acousto-optic frequency shifters S
i(i=1,2 ..., driving frequency n)
f i(i=1,2 ..., n) be adjusted into ν
r– ν
i(i=1,2 ..., n), thereby make transverse zeeman laser L
i(i=1,2 ..., n) output beam Z
i(i=1,2 ..., frequency n) equals reference beam X
i(i=1,2 ..., frequency n), i.e. ν
i+
f i=ν
r(i=1,2 ..., n);
(6) be cycled to repeat step (4) to (5), by adjusting acousto-optic frequency shifters S
i(i=1,2 ..., operating frequency n)
f i(i=1,2 ..., n), make transverse zeeman laser L
i(i=1,2 ..., Output of laser Z n)
i(i=1,2 ..., frequency n) is locked in same frequency values ν all the time
r.
2. the transverse zeeman laser frequency locking device based on piezoelectric effect and acousto-optic frequency translation, comprise laser power supply A(1), frequency stabilization status indicator lamp (2), with reference to transverse zeeman frequency stabilized carbon dioxide laser (3), polarization spectroscope A(4), fiber optic splitter (5), it is characterized in that also comprising in device the transverse zeeman laser (L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n), each transverse zeeman laser (L wherein
1, L
2..., L
n) assembly structure be: laser power supply B(15) be connected with laser tube (6), laser tube (6) is placed in transverse magnetic field module (7), the magnetic field in the vertical direction that transverse magnetic field module (7) produces, the axis of laser tube (6) is vertical with magnetic direction, ring piezoelectric pottery (12) is arranged on the secondary output of laser tube (6), it inputs termination frequency stabilization control module (10), chamber mirror (13) is arranged on ring piezoelectric pottery (12), laser tube temperature transducer (11) is attached on laser tube (6) outer wall, it exports termination frequency stabilization control module (10), environment temperature sensor (14) is connected with frequency stabilization control module (10), wollaston prism (8) is placed on after the secondary output of laser tube (6), place two quadrant photodetector (9) thereafter, the output of two quadrant photodetector (9) is connected with frequency stabilization control module (10), polarization spectroscope B(16) be placed on before the main output of laser tube (6), place acousto-optic frequency shifters (17) thereafter, spectroscope (18) is placed between acousto-optic frequency shifters (17) and an input of optical-fiber bundling device (19), one of output of another input of optical-fiber bundling device (19) and fiber optic splitter (5) is connected, analyzer (20) is placed between the output and high-speed photodetector (21) of optical-fiber bundling device (19), high-speed photodetector (21), frequency measurement module (22), frequency regulation block (23), acousto-optic frequency shifters (17) connects successively, frequency locking status indicator lamp (24) is connected with frequency regulation block (23).
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105406347A (en) * | 2015-11-19 | 2016-03-16 | 江汉大学 | Laser device with high stability |
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