CN104167660B - Control method and system of laser set - Google Patents

Control method and system of laser set Download PDF

Info

Publication number
CN104167660B
CN104167660B CN201410386672.0A CN201410386672A CN104167660B CN 104167660 B CN104167660 B CN 104167660B CN 201410386672 A CN201410386672 A CN 201410386672A CN 104167660 B CN104167660 B CN 104167660B
Authority
CN
China
Prior art keywords
frequency
laser instrument
voltage
power
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410386672.0A
Other languages
Chinese (zh)
Other versions
CN104167660A (en
Inventor
陈杰
熊川羽
庄革
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huazhong University of Science and Technology
Original Assignee
Huazhong University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huazhong University of Science and Technology filed Critical Huazhong University of Science and Technology
Priority to CN201410386672.0A priority Critical patent/CN104167660B/en
Publication of CN104167660A publication Critical patent/CN104167660A/en
Application granted granted Critical
Publication of CN104167660B publication Critical patent/CN104167660B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Lasers (AREA)

Abstract

The invention discloses a control method and system of a laser set, and belongs to the field of heterodyne interference measurement. The control method and system of the laser set resolve the problem that an existing heterodyne interference instrument composed of multiple lasers has the problem of difference frequency of laser beams and is unstable in power, enable the difference frequency among the lasers to keep stable and restrain power attenuation of the lasers, thereby improving the performance of the measurement equipment. The control method comprises an initialization step, a real-time detection step, a frequency stabilization step and a power control step. The control system correspondingly comprises an initialization module, a real-time detection module, a frequency stabilization module and a power control module. The control method and system of the laser set can realize real-time frequency feedback control, enable the difference frequency among the lasers to keep stable and restrain power attenuation of the lasers, thereby meeting the measurement requirement for high time accuracy. The related device is simple in structure, and guarantees a high-accuracy and low-noise measurement environment of an original system.

Description

A kind of control method and its system of laser instrument group
Technical field
The invention belongs to difference interference measuring field, and in particular to a kind of control method and its system of laser instrument group.
Background technology
Heterodyne interferometry is also referred to as double-frequency interference instrument, in being widely used in actual production and scientific research, to meet For the demand of accurate parameter measurement.The light beam of two kinds of different frequencies can be provided by two mono-colour lasers in heterodyne ineterferometer, The diffraction effect that magneto-optic, electric light, acoustooptical effect or rotating grating disk can also be utilized is provided.Particularly in field of scientific study or Be to obtain higher frequency difference in being the application high to time, spatial resolution requirements, often using two or multiple stage laser light mechanism into Laser instrument group, realizes interferometry.Because the phase of light wave change that the change of testee causes is loaded on this difference frequency, with difference The interferometer of frequency stabilization function can ensure that its measurement effect in field of high-precision measurement.Meanwhile, control the output of laser instrument Energy is not decayed with work and is able to ensure that interferometer has more preferable signal to noise ratio, and it is anti-interference to give full play to heterodyne interferometer The strong advantage of ability.
Simultaneously Simultaneous Stabilization multi-station laser is defeated in high power based on there is presently no to stablize multi-station laser difference frequency The device for doing well and structure.The method being related in patent CN201210211550.9 can stablize the output frequency of every laser instrument Rate can make laser instrument be in stronger output state so as to obtain stable difference frequency.But the method is needed to swashing per platform Light device sets in addition a set of laser interferometer to implement feedback.For the system of multi-laser, the realization of feedback function certainly will become It is very complicated, and be limited by each frequency feedback and need the very big long scope of resonator of scanning, the time precision of its feedback without Method is made very high.
The content of the invention
The present invention provides a kind of control method and its system of laser instrument group, solves the heterodyne that existing multi-station laser is constituted Laser beam difference frequency and the unstable problem of power in formula interferometer, make the difference frequency between laser instrument suppress laser while remaining stable Device power attenuation, so as to improve measuring apparatus performance.
The present invention is applied to the laser instrument group of N platforms laser instrument composition, wherein one used as frequency reference laser instrument, swashs per platform Light device is respectively arranged with piezoelectric ceramics converter, and the chamber for adjusting corresponding laser resonant cavity is long;And frequency reference laser instrument Equipped with output laser power detector;The laser beam that each laser instrument is launched to be closed and form coherence laser beam after beam, into interference Signal sensor, interference signal detector is converted into the difference frequency signal of coherence laser beam after voltage intermediate-freuqncy signal, is modeled letter Number isolator reads, and there is analog signal isolator higher input impedance to make the signal energy that it consumes negligible, and cut The coupling circuit broken between control signal and detectable signal, amplifies filtering and filters high-frequency noise through analog signal isolator Afterwards, intermediate-freuqncy signal is converted to digital intermediate frequency signal and is transferred to digital signal processor (DSP) by analog-digital converter, meanwhile, laser The laser power signal of the frequency reference laser instrument for detecting is converted to power numeral by power detector through analog-digital converter Signal input is in digital signal processor;Power digital signal and digital intermediate frequency signal by digital signal processor processes after To corresponding power control quantity and FREQUENCY CONTROL amount, and by power control quantity and each FREQUENCY CONTROL amount by with voltage retainer Digital to analog converter be changed into voltage signal, export respectively to the piezoelectric ceramics converter of N platform laser instruments.
A kind of control method of laser instrument group provided by the present invention, including initialization step, real-time detection step, frequency stabilization Rate-determining steps and power control step, it is characterised in that:
(1) initialization step:
Determine output frequency identical laser instrument for N station symbols, optionally wherein one as frequency reference laser instrument, in frequency Control voltage V that digital to analog converter is converted to analog quantity is applied across on the piezoelectric ceramics converter of reference laser diodek=V0, adjust Whole frequency reference laser instrument extremely demarcates output frequency P0;Intermediate-freuqncy signal is collectively formed per the difference frequency signal between two laser instruments, I.e. intermediate-freuqncy signal is included altogetherIndividual difference frequency signal, 2≤N≤6;
According to concrete application demand, each laser instrument output frequency and frequency reference in remaining N-1 platform laser instrument is predefined Frequency-splitting △ P between laser instrument output frequencyi, i=1,2 ... N-1, △ Pi=± 1KHz~± 1GHz, this N-1 frequency Difference △ PiIt must is fulfilled for by produced by N platform laser instrumentsIndividual difference frequency signal is not in the requirement of aliasing on frequency spectrum;Together When, it is applied across the control that digital to analog converter is converted to analog quantity respectively on the piezoelectric ceramics converter of remaining N-1 platform laser instrument Voltage V processedi, every laser instrument output frequency in remaining N-1 platform laser instrument is adjusted to into P0+△Pi, frequency-splitting be on the occasion of and frequency Rate difference is equal for the number of lasers of negative value so that the output frequency value of all laser instruments of whole laser instrument group is uniformly divided To reach optimal output state on output peak value, and the output frequency value of frequency reference laser instrument is located at whole laser instrument to cloth The centre position of group output frequency;So, each difference frequency signal included in intermediate-freuqncy signal will be on frequency spectrum with known suitable Sequence occurs;
By the N-1 frequency-splitting △ PiAs N-1 frequency setting value;And Voltage Cortrol Directional Sign H is initial Turn to " 1 " or " 0 ";" 1 " represents and is adjusted to voltage augment direction, and " 0 " represents that reducing direction to voltage is adjusted;
(2) real-time detection step:
Obtain the digital intermediate frequency signal and power digital signal of analog-digital converter collection in real time, the digital intermediate frequency signal by Voltage intermediate-freuqncy signal Jing analog-digital converter is changed and obtained, the laser beam that the voltage intermediate-freuqncy signal is launched by each laser instrument Close and form coherence laser beam after beam, convert the difference frequency signal of coherence laser beam by interference signal detector to be formed;
The power digital signal is changed through analog-digital converter by the laser power signal of frequency reference laser instrument and formed;
FFT is carried out to the digital intermediate frequency signal, is extracted in the frequency spectrum obtained from FFTIndividual peak value frequency Rate, shouldIndividual crest frequency is the frequency-splitting being aliasing in intermediate-freuqncy signal;The power digital signal is stored in into power to deposit Reservoir is subsequently to judge that sub-step (4.4) is used;Then while carrying out step (3) and step (4) respectively;
(3) path length control step, including following sub-steps:
(3.1) frequency shift (FS) judges sub-step:According to the distribution sequence of known each difference frequency signal in step (1), by institute State N-1 frequency setting value △ PiWith detectCorresponding N-1 crest frequency F in individual crest frequencyi, correspond to respectively into Row compares, and judges whether it is all equal, is to carry out sub-step (3.3), otherwise carries out sub-step (3.2);I=1,2 ... N-1;
(3.2) frequency amendment voltage sub-step is calculated:
For wherein frequency setting value and the unequal each laser instrument of crest frequency, according to being currently applied to each corresponding laser Control voltage on the piezoelectric ceramics converter of device, in the frequency-voltage response curves of the laser instrument the oblique of corresponding points is found Rate Ki, calculate frequency amendment voltage △ V1i=(Fi- △ Pi)/Ki
The each laser instrument equal for wherein frequency setting value and crest frequency, by its corresponding △ V1iSet to 0;I=1,2, Or N-1;
Frequency-the voltage response curves of the laser instrument are that the laser instrument output frequency becomes to piezoelectric ceramics transducer voltage The response curve of change;
(3.3) FREQUENCY CONTROL action sub-step:
Calculate control voltage knots modification △ Vi:△Vi=△ V1i+△V2i
Wherein, △ V2iRead by offset voltage memory, for eliminating the frequency fluctuation that power regulation causes;
By Vi+△ViValue give Vi, then by ViAnalog quantity is converted to through digital to analog converter, N-1 platforms is respectively acting on and is swashed On the piezoelectric ceramics converter of light device;
By control voltage knots modification △ Vi, frequency amendment voltage △ V1iWith frequency compensation voltage △ V2iValue all reset; Go to step (2);
(4) power control step, including following sub-steps:
(4.1) Time-delayed trigger sub-step:Setting time delay T, T=1~10 second are triggered a power and are adjusted at interval of the T seconds Control, carries out sub-step (4.2);Time delay T is sufficiently more than the time scale of real-time frequency control, so that real-time frequency control System can timely suppress the frequency fluctuation caused by power regulation action,
(4.2) power control actions sub-step:If voltage-regulation Directional Sign H is " 1 ", by VkThe value of+VL gives Vk; If voltage-regulation Directional Sign H is " 0 ", by VkThe value of-VL gives Vk;Wherein Voltage Cortrol step-length VL=1mV~1V;Then By VkAnalog quantity is converted to through digital to analog converter, the piezoelectric ceramics converter of frequency reference laser instrument is put on, sub-step is carried out Suddenly (4.3);
(4.3) frequency compensation sub-step:Frequency compensation is carried out to other N-1 platforms laser instruments:
According to current Vk, the slope K of corresponding points is found in the frequency-voltage response curves of frequency reference laser instrumentk, from And calculate the frequency fluctuation value △ P of frequency reference laser instrument generationk=VLKk, further according to △ Pk, calculate each laser The frequency compensation voltage △ V2 of devicei=VLKk/Ki;And by frequency compensation voltage △ V2iIt is stored in offset voltage memory;Carry out Sub-step (4.4);
(4.4) sub-step is judged:Judge whether this voltage-regulation is allowing the power output of frequency reference laser instrument remote It is then to change Voltage Cortrol Directional Sign H from power output peak state, goes to step (2), otherwise Voltage Cortrol Directional Sign H Keep constant, go to step (2).
In sub-step (4.3), due to changing frequency reference laser control voltage VkProduce frequency reference laser power Change its output frequency that also can be micro while raw micro change, will be poor in order to offset the change of frequency reference laser frequency The frequency fluctuation produced on frequency signal, in frequency reference laser control voltage VkDuring change, other N-1 platform laser instruments are entered Line frequency is compensated;The frequency compensation voltage of each laser instrument is needed for eliminate this frequency fluctuation.
The judgement sub-step (4.4) of the power control step is including one of following deterministic processes:
A, calculating ongoing frequency reference laser diode output power value deduct last power numeral in the power memory Difference DELTA D of signal, judges whether Δ D < Q, responsiveness threshold value Q=-100~-1;It is the output work of then frequency reference laser instrument , away from power output peak value, otherwise the power output of frequency reference laser instrument is not away from power output peak value for rate;
All power numerals after the last changes of Voltage Cortrol Directional Sign H stored in B, the calculating power memory Maximum in signal deducts difference DELTA S of ongoing frequency reference laser diode output power value, judges whether Δ S > G, reduction amount Threshold value G=1~100;It is the power output of then frequency reference laser instrument away from power output peak value, otherwise frequency reference laser instrument Power output not away from power output peak value.
Deterministic process A, the power response rate that frequency reference laser instrument occurs after power regulation action.According to laser instrument The long curve in power output-chamber is less in power output peak ranges slope and slope gradually increases when away from output peak point Feature, presets responsiveness threshold value Q;In laser output power-change of cavity length curve in the more precipitous feelings of output peak ranges It is more sensitive under condition;
Deterministic process B, by judge laser instrument cross after output peak point the total decline numerical value of laser output power come Judge laser works state;It is more sensitive when output peak ranges are relatively flat.
In sub-step (4.4) is judged, process A and process B can be simultaneously carried out, as long as one of them makes frequency reference Laser instrument away from the judgement of output peak point, then judges that sub-step (4.4) makes frequency reference laser instrument away from defeated Go out the judgement of peak value.
A kind of control system of laser instrument group provided by the present invention, including initialization module, real-time detection module, frequency stabilization Control module and power control module, it is characterised in that:
(1) initialization module:
Determine output frequency identical laser instrument for N station symbols, optionally wherein one as frequency reference laser instrument, in frequency Control voltage V that digital to analog converter is converted to analog quantity is applied across on the piezoelectric ceramics converter of reference laser diodek=V0, adjust Whole frequency reference laser instrument extremely demarcates output frequency P0;Intermediate-freuqncy signal is collectively formed per the difference frequency signal between two laser instruments, I.e. intermediate-freuqncy signal is included altogetherIndividual difference frequency signal, 2≤N≤6;
According to concrete application demand, each laser instrument output frequency and frequency reference in remaining N-1 platform laser instrument is predefined Frequency-splitting △ P between laser instrument output frequencyi, i=1,2 ... N-1, △ Pi=± 1KHz~± 1GHz, this N-1 frequency Difference △ PiIt must is fulfilled for by produced by N platform laser instrumentsIndividual difference frequency signal is not in the requirement of aliasing on frequency spectrum;Together When, it is applied across the control that digital to analog converter is converted to analog quantity respectively on the piezoelectric ceramics converter of remaining N-1 platform laser instrument Voltage V processedi, every laser instrument output frequency in remaining N-1 platform laser instrument is adjusted to into P0+△Pi, frequency-splitting be on the occasion of and frequency Rate difference is equal for the number of lasers of negative value so that the output frequency value of all laser instruments of whole laser instrument group is uniformly divided To reach optimal output state on output peak value, and the output frequency value of frequency reference laser instrument is located at whole laser instrument to cloth The centre position of group output frequency;So, each difference frequency signal included in intermediate-freuqncy signal will be on frequency spectrum with known suitable Sequence occurs;
By the N-1 frequency-splitting △ PiAs N-1 frequency setting value;And Voltage Cortrol Directional Sign H is initial Turn to " 1 " or " 0 ";" 1 " represents and is adjusted to voltage augment direction, and " 0 " represents that reducing direction to voltage is adjusted;
(2) real-time detection module:
Obtain the digital intermediate frequency signal and power digital signal of analog-digital converter collection in real time, the digital intermediate frequency signal by Voltage intermediate-freuqncy signal Jing analog-digital converter is changed and obtained, the laser beam that the voltage intermediate-freuqncy signal is launched by each laser instrument Close and form coherence laser beam after beam, convert the difference frequency signal of coherence laser beam by interference signal detector to be formed;
The power digital signal is changed through analog-digital converter by the laser power signal of frequency reference laser instrument and formed;
FFT is carried out to the digital intermediate frequency signal, is extracted in the frequency spectrum obtained from FFTIndividual peak value frequency Rate, shouldIndividual crest frequency is the frequency-splitting being aliasing in intermediate-freuqncy signal;The power digital signal is stored in into power to deposit Reservoir is used so as to follow-up judging submodule (4.4);Then while carrying out module (3) and module (4) respectively;
(3) path length control module, including following submodules:
(3.1) frequency shift (FS) judging submodule:According to the distribution sequence of known each difference frequency signal in step (1), by institute State N-1 frequency setting value △ PiWith detectCorresponding N-1 crest frequency F in individual crest frequencyi, correspond to respectively into Row compares, and judges whether it is all equal, is to carry out submodule (3.3), otherwise carries out submodule (3.2);I=1,2 ... N-1;
(3.2) frequency amendment voltage submodule is calculated:
For wherein frequency setting value and the unequal each laser instrument of crest frequency, according to being currently applied to each corresponding laser Control voltage on the piezoelectric ceramics converter of device, in the frequency-voltage response curves of the laser instrument the oblique of corresponding points is found Rate Ki, calculate frequency amendment voltage △ V1i=(Fi- △ Pi)/Ki
The each laser instrument equal for wherein frequency setting value and crest frequency, by its corresponding △ V1iSet to 0;I=1,2, Or N-1;
Frequency-the voltage response curves of the laser instrument are that the laser instrument output frequency becomes to piezoelectric ceramics transducer voltage The response curve of change;
(3.3) FREQUENCY CONTROL action submodule:
Calculate control voltage knots modification △ Vi:△Vi=△ V1i+△V2i
Wherein, △ V2iRead by offset voltage memory, for eliminating the frequency fluctuation that power regulation causes;
By Vi+△ViValue give Vi, then by ViAnalog quantity is converted to through digital to analog converter, N-1 platforms is respectively acting on and is swashed On the piezoelectric ceramics converter of light device;
By control voltage knots modification △ Vi, frequency amendment voltage △ V1iWith frequency compensation voltage △ V2iValue all reset; Revolving die block (2);
(4) power control module, including following submodules:
(4.1) Time-delayed trigger submodule:Setting time delay T, T=1~10 second are triggered a power and are adjusted at interval of the T seconds Control, carries out submodule (4.2);Time delay T is sufficiently more than the time scale of real-time frequency control, so that real-time frequency control System can timely suppress the frequency fluctuation caused by power regulation action,
(4.2) power control actions submodule:If voltage-regulation Directional Sign H is " 1 ", by VkThe value of+VL gives Vk; If voltage-regulation Directional Sign H is " 0 ", by VkThe value of-VL gives Vk;Wherein Voltage Cortrol step-length VL=1mV~1V;Then By VkAnalog quantity is converted to through digital to analog converter, the piezoelectric ceramics converter of frequency reference laser instrument is put on, submodule is carried out Block (4.3);
(4.3) frequency compensation submodule:Frequency compensation is carried out to other N-1 platforms laser instruments:
According to current Vk, the slope K of corresponding points is found in the frequency-voltage response curves of frequency reference laser instrumentk, from And calculate the frequency fluctuation value △ P of frequency reference laser instrument generationk=VLKk, further according to △ Pk, calculate each laser The frequency compensation voltage △ V2 of devicei=VLKk/Ki;And by frequency compensation voltage △ V2iIt is stored in offset voltage memory;Carry out Submodule (4.4);
(4.4) judging submodule:Judge whether this voltage-regulation is allowing the power output of frequency reference laser instrument remote It is then to change Voltage Cortrol Directional Sign H from power output peak state, goes to step (2), otherwise Voltage Cortrol Directional Sign H Keep constant, revolving die block (2).
The judging submodule (4.4) of the power control module carries out one of following deterministic processes:
A, calculating ongoing frequency reference laser diode output power value deduct last power numeral in the power memory Difference DELTA D of signal, judges whether Δ D < Q, responsiveness threshold value Q=-100~-1;It is the output work of then frequency reference laser instrument , away from power output peak value, otherwise the power output of frequency reference laser instrument is not away from power output peak value for rate;
All power numerals after the last changes of Voltage Cortrol Directional Sign H stored in B, the calculating power memory Maximum in signal deducts difference DELTA S of ongoing frequency reference laser diode output power value, judges whether Δ S > G, reduction amount Threshold value G=1~100;It is the power output of then frequency reference laser instrument away from power output peak value, otherwise frequency reference laser instrument Power output not away from power output peak value.
Because maximum output can occur in the long scope of certain a bit of resonator in laser instrument, the present invention is with to frequency Rate reference laser diode resonator length carries out the active control of fixed step size, Fixed Time Interval, and by above-mentioned continuous master Whether the working condition of the caused Mini-Low Laser Power change determination frequency reference laser diode of dynamic chamber length regulation and control is away from defeated Go out peak value.If judged result is "No", continue, when front direction adjustment frequency reference laser chamber is long, to make frequency reference laser Device continues to be close to output peak value;If judged result is "Yes", the adjustment of reversal frequency reference laser diode resonator length control Direction.The above-mentioned regulation and control method for making frequency reference laser instrument constantly approach to output peak value will be such that frequency reference laser instrument moves all the time The working condition for being maintained at output peak power of state.It is right on the basis of frequency reference laser instrument is controlled in output peak value The digital medium-frequency signal for collecting carries out monitor in real time, by piezoelectricity on every laser instrument of the control in addition to frequency reference laser diode The terminal voltage of ceramic transducer implements real-time laser resonant cavity chamber length feedback, makes the N-1 platforms in addition to frequency reference laser diode Laser instrument keeps constant relative to the difference frequency of frequency reference laser instrument, so as to realize the purpose of interferometer laser beams different frequency stabilisation. Using laser instrument output frequency and the corresponding relation of resonator length, other laser resonant cavities under different frequency stabilisation control Chamber length will be associated with frequency reference laser chamber length, so as to following frequency reference laser diode always work in output peak point it is attached Closely, so, it is achieved that the whole laser instrument group power output of control is stablized by controlling the power stability of frequency reference laser instrument Effect.
The present invention can realize real-time frequency feedback control, make the difference frequency between laser instrument suppress laser while remaining stable Device power attenuation, to meet the measurement demand of high time precision;Involved apparatus structure is simple, it is not necessary to separately set extra dress Put to obtain frequency information, the intermediate frequency detector for relying only on interferometer itself can be achieved with feedback control, and only to laser instrument One variable of resonator is controlled, and controlled quentity controlled variable is single;In the case of multi-laser, the present invention is only with one laser of detection The power information of device can be achieved with the Power Control to multi-station laser;Because the measuring system that need not change interferometer script is tied Structure, the analog signal isolator of signal sampling port high impedance is isolated with former measuring system, to original interference instrument measuring system Impact minimize, it is ensured that the measuring environment of original system high accuracy low noise;
Description of the drawings
Fig. 1 is Integral control device pie graph of the present invention.
Fig. 2 is control method schematic diagram of the present invention;
Fig. 3 is control process schematic diagram of the present invention;
Fig. 4 is Poewr control method schematic diagram of the present invention.
Specific embodiment
With reference to embodiment and accompanying drawing, the present invention is further described.
As shown in figure 1, the embodiment of the present invention, is applied to the laser instrument group that 3 laser instruments are constituted, wherein one used as frequency Reference laser diode 1, every laser instrument is respectively arranged with piezoelectric ceramics converter, and the chamber for adjusting corresponding laser resonant cavity is long; And frequency reference laser instrument 1 is equipped with output laser power detector 5;First laser device 2, second laser 3 and frequency reference The laser beam that laser instrument 1 is launched to be closed and form coherence laser beam after beam, into interference signal detector 4, interference signal detector 4 The difference frequency signal of coherence laser beam is converted into into feeding control device 10 after voltage intermediate-freuqncy signal, and is modeled signal isolator 6 Read, there is analog signal isolator 6 higher input impedance to make the signal energy of its consumption negligible, and cut off control Coupling circuit between signal and detectable signal, after analog signal isolator amplification filtering filters high-frequency noise, modulus turns Intermediate-freuqncy signal is converted to digital intermediate frequency signal and is transferred to digital signal processor 8 (DSP) by parallel operation 7, meanwhile, laser power detection It is defeated that the laser power signal of the frequency reference laser instrument 1 for detecting is converted to power digital signal by device 5 through analog-digital converter 7 Enter in digital signal processor 8;Power digital signal and digital intermediate frequency signal obtain right after being processed by digital signal processor 8 The power control quantity answered and FREQUENCY CONTROL amount, and by power control quantity and each FREQUENCY CONTROL amount by the number with voltage retainer Weighted-voltage D/A converter 9 is changed into voltage signal, exports respectively to the piezoelectric ceramics converter of 3 laser instruments.
As shown in Fig. 2 embodiments of the invention, including initialization step, real-time detection step, path length control step and work( Rate rate-determining steps, it is characterised in that:
(1) initialization step:
Determine output frequency identical laser instrument for 3 station symbols, optionally wherein one as frequency reference laser instrument, in frequency Control voltage V that digital to analog converter is converted to analog quantity is applied across on the piezoelectric ceramics converter of reference laser diodek=30V, Adjustment frequency reference laser instrument extremely demarcates output frequency P0=694GHz;Collectively form per the difference frequency signal between two laser instruments Intermediate-freuqncy signal, i.e. intermediate-freuqncy signal include altogether 3 difference frequency signals;
According to concrete application demand, predefine each laser instrument output frequency in remaining 2 laser instrument and swash with frequency reference Frequency-splitting △ P between light device output frequency1=-1MHz, △ P1=+1.5MHz, this 2 frequency-splitting △ PiMeet and swashed by 3 Individual difference frequency signal produced by light device is not in the requirement of aliasing on frequency spectrum;Meanwhile, make pottery in the piezoelectricity of remaining 2 laser instrument The initial control voltage about 30V that digital to analog converter is converted to analog quantity is applied across on porcelain converter respectively, by remaining 2 laser Every laser instrument output frequency is adjusted to P in device0+△Pi, i=1,2, frequency-splitting is on the occasion of the swashing for negative value with frequency-splitting Light device quantity is generally equalized so that the output frequency value of all laser instruments of whole laser instrument group is evenly distributed in output peak value On to reach optimal output state, and the output frequency value of frequency reference laser instrument is located at whole laser instrument group output frequency Centre position;So, each difference frequency signal included in intermediate-freuqncy signal will be on frequency spectrum with the appearance of known order;
By △ P1=-1MHz, △ P1=+1.5MHz is used as 2 frequency setting values;And Voltage Cortrol Directional Sign H is initial Turn to " 0 ";" 1 " represents and is adjusted to voltage augment direction, and " 0 " represents that reducing direction to voltage is adjusted;
(2) real-time detection step:
Obtain the digital intermediate frequency signal and power digital signal of analog-digital converter collection in real time, the digital intermediate frequency signal by Voltage intermediate-freuqncy signal Jing analog-digital converter is changed and obtained, the laser beam that the voltage intermediate-freuqncy signal is launched by 3 laser instruments Close and form coherence laser beam after beam, convert the difference frequency signal of coherence laser beam by interference signal detector to be formed;
The power digital signal is changed through analog-digital converter by the laser power signal of frequency reference laser instrument and formed;
FFT is carried out to the digital intermediate frequency signal, 3 crest frequencies is extracted in the frequency spectrum obtained from FFT, 3 crest frequencies are the frequency-splitting being aliasing in intermediate-freuqncy signal;The power digital signal is stored in into power memory Subsequently to judge that sub-step (4.4) is used;Then while carrying out step (3) and step (4) respectively;
(3) path length control step, including following sub-steps:
(3.1) frequency shift (FS) judges sub-step:According to the distribution sequence of known each difference frequency signal in step (1), by institute State 2 frequency setting value △ P1=-1MHz, △ P1=+1.5MHz 2 peak values frequencies corresponding with 3 crest frequencies for detecting Rate F1And F2Correspond to respectively and be compared, judge whether it is all equal, is to carry out sub-step (3.3), otherwise carries out sub-step (3.2);I=1,2;
(3.2) frequency amendment voltage sub-step is calculated:
For wherein frequency setting value and the unequal each laser instrument of crest frequency, according to being currently applied to each corresponding laser Control voltage on the piezoelectric ceramics converter of device, in the frequency-voltage response curves of the laser instrument the oblique of corresponding points is found Rate Ki, calculate frequency amendment voltage △ V1i=(Fi- △ Pi)/Ki
The each laser instrument equal for wherein frequency setting value and crest frequency, by its corresponding △ V1iSet to 0;I=1,2;
Frequency-the voltage response curves of the laser instrument are that the laser instrument output frequency becomes to piezoelectric ceramics transducer voltage The response curve of change;
(3.3) FREQUENCY CONTROL action sub-step:
Calculate control voltage knots modification △ Vi:△Vi=△ V1i+△V2i
Wherein, △ V2iRead by offset voltage memory, for eliminating the frequency fluctuation that power regulation causes;
By Vi+△ViValue give Vi, then by ViAnalog quantity is converted to through digital to analog converter, N-1 platforms is respectively acting on and is swashed On the piezoelectric ceramics converter of light device;
By control voltage knots modification △ Vi, frequency amendment voltage △ V1iWith frequency compensation voltage △ V2iValue all reset; Go to step (2);
(4) power control step, including following sub-steps:
(4.1) Time-delayed trigger sub-step:Setting second time delay T=3, a power regulation is triggered at interval of the T seconds, carried out Sub-step (4.2);
(4.2) power control actions sub-step:If voltage-regulation Directional Sign H is " 1 ", by VkThe value of+VL gives Vk; If voltage-regulation Directional Sign H is " 0 ", by VkThe value of-VL gives Vk;Wherein Voltage Cortrol step-length VL=40mV;Then will VkAnalog quantity is converted to through digital to analog converter, the piezoelectric ceramics converter of frequency reference laser instrument is put on, sub-step is carried out (4.3);
(4.3) frequency compensation sub-step:Frequency compensation is carried out to other N-1 platforms laser instruments:
According to current Vk, the slope K of corresponding points is found in the frequency-voltage response curves of frequency reference laser instrumentk, from And calculate the frequency fluctuation value △ P of frequency reference laser instrument generationk=VLKk, further according to △ Pk, calculate each laser The frequency compensation voltage △ V2 of devicei=VLKk/Ki;And by frequency compensation voltage △ V2iIt is stored in offset voltage memory;Carry out Sub-step (4.4);
(4.4) sub-step is judged:Judge whether this voltage-regulation is allowing the power output of frequency reference laser instrument remote It is then to change Voltage Cortrol Directional Sign H from power output peak state, goes to step (2), otherwise Voltage Cortrol Directional Sign H Keep constant, go to step (2).
In the present embodiment, the judgement sub-step (4.4) of power control step is including one of following deterministic processes:
A, calculating ongoing frequency reference laser diode output power value deduct last power numeral in the power memory Difference DELTA D of signal, judges whether Δ D < Q, responsiveness threshold value Q=-8;Be then frequency reference laser instrument power output away from Power output peak value, the otherwise power output of frequency reference laser instrument be not away from power output peak value;
All power numerals after the last changes of Voltage Cortrol Directional Sign H stored in B, the calculating power memory Maximum in signal deducts difference DELTA S of ongoing frequency reference laser diode output power value, judges whether Δ S > G, reduction amount Threshold value G=25;Be the power output of then frequency reference laser instrument away from power output peak value, otherwise frequency reference laser instrument is defeated Go out power not away from power output peak value.
The control effect schematic diagram of the present invention is given in Fig. 3, in figure, transverse axis is that laser resonant cavity chamber is long, and the longitudinal axis is Laser output power, curve is the long curve in laser output power-chamber in figure.
By taking three laser instruments as an example, a length of L2 of the resonator of frequency reference laser instrument 1 is long in laser output power-chamber Corresponding operating point is A points on curve;The operating point of first laser device 2 is B points, and the operating point of second laser 3 is C points.Frequency is joined Examine the median that the frequency of the operating point A of laser instrument 1 is in all laser instruments.As schemed, laser instrument output energy P will be humorous Occurs output peak point S in a bit of scope of the long L in chamber chamber of shaking.It is long that the present invention carries out lasting chamber to frequency reference laser instrument 1 Regulation and control, make the operating point A of frequency reference laser instrument 1 level off to and export peak point S.It is placed in frequency reference laser works point A Its output peak, and the control of transit chamber length makes first laser device 2, second laser 3 keep stable frequency with reference laser diode During rate difference F1, F2, due to laser chamber length and the corresponding relation of output frequency, the long L1 of resonator of first laser device 2, frequency The long L2 of resonator of reference laser diode 1, the long L3 of resonator of second laser 3 keep the state in coupling more Stable spacing.So, the operating point B of first laser device 2 and the operating point C of second laser 3 will follow the operating point of reference laser diode 1 A, and uniformly in the stable certain limit near output peak point S, so as to pass through the only power of control frequency reference laser instrument 1 It is stable, realize function of the whole interferometer laser group in preferable output environment.
Fig. 4 gives the schematic diagram that the power of control frequency reference laser instrument 1 in the present invention levels off to power output peak value, figure In, transverse axis is that laser resonant cavity chamber is long, and the longitudinal axis is laser output power, and curve is that laser output power-chamber is long in figure Amplification of the curve in peak fractions.
As it was previously stated, to the power regulation of the piezoelectric ceramics converter of frequency reference laser instrument 1 with fixed voltage change step VL is adjusted, and every the action of time T once.Hypothesis has been initialized after laser instrument, the control voltage of frequency reference laser instrument 1 Vk, the operating point of frequency reference laser instrument 1 is masked as " 0 " in W1 points position, and initialization voltage adjustment;Postpone to touch After sending out sub-step (4.1) the delay T seconds, power control actions sub-step (4.2) is triggered, according to Voltage Cortrol mark " 0 ", frequency ginseng Examine laser control voltage VkFrom currency V0It is adjusted to V0- VL, the operating position of frequency reference laser instrument 1 drops at point W2;Together When frequency compensation sub-step (4.3) calculate frequency compensation voltage △ V21、△V22It is stored in offset voltage memory;Due to frequency Slope of 1 frequency of the reference laser diode-voltage curve at W1 is very big, and frequency reference laser instrument 1 is down to the process of W2 points from W1 points In, the responsiveness of power vs. voltage change is excessive, makes W2 point power deduct the difference DELTA D < Q of W1 point power, judges sub-step (4.4) judgement of the power output of frequency reference laser instrument " allowing away from power output peak value " is made by deterministic process A, At once Voltage Cortrol mark is changed to into " 1 ", then when postponing triggering sub-step (4.1) triggering next time, power control actions Step (4.2) will be with same step-length VL to control voltage V of increase voltage direction adjustment frequency reference laser instrument 1kOne step.Same time-frequency Rate compensation sub-step (4.3) calculates frequency compensation voltage △ V21、△V22It is stored in offset voltage memory;Due to this time By the position for making frequency reference laser instrument 1 that close W1 points are returned to from W2 points position, its performance number increase judges sub-step to Voltage Cortrol Suddenly (4.4) by deterministic process A or B all without making " allowing frequency reference laser instrument 1 power output away from power output The judgement of peak value ";So, power control step (4) will continue the direction regulating frequency reference laser diode to control voltage increase 1.Repeat said process, power control step (4) by always with increase control voltage direction progressively adjust frequency reference laser Device 1, makes the power output of frequency reference laser instrument 1 to output peak value movement, until output is crossed in the operating point of frequency reference laser instrument 1 Peak point M, and operating point R is reached afterwards in certain power control actions sub-step (4.2);At this moment, frequency reference laser instrument 1 Operating point moves to current point operating point R from last change Voltage Cortrol direction from W2 points;In this process In, the maximum in all performance numbers of real-time detection step (2) storage is occurred in when crossing output peak point M.Judge sub-step Suddenly (4.4) are worth poor by calculating this maximum power value and deducting current power, draw the conclusion of difference DELTA S > G, and pass through Deterministic process B makes the judgement of the power output of frequency reference laser instrument " allowing away from power output peak value ", at once by electricity Pressure adjustment mark is changed to " 0 ", regulating and controlling voltage next time is carried out to the direction that control voltage reduces.Until frequency reference swashs When the operating point of light device 1 is crossed again power output peak value and reaches certain point Z, judge sub-step by deterministic process A and deterministic process B The judgement of the power output of frequency reference laser instrument " allowing away from power output peak value " is made again.The rest may be inferred, frequency Rate reference laser diode 1 at two of the current output peak value left and right sides will make deterministic process A or deterministic process B all the time Swing back and forth between two points that the power output of frequency reference laser instrument " allowing away from power output peak value " judges, so as to quilt Dynamically it is locked in power output peak state.

Claims (4)

1. a kind of control method of laser instrument group, including initialization step, real-time detection step, path length control step and power control Step processed, it is characterised in that:
(1) initialization step:
Determine output frequency identical laser instrument for N station symbols, optionally wherein one as frequency reference laser instrument, in frequency reference Control voltage V that digital to analog converter is converted to analog quantity is applied across on the piezoelectric ceramics converter of laser instrumentk=V0, adjustment frequency Rate reference laser diode extremely demarcates output frequency P0;Collectively form intermediate-freuqncy signal per the difference frequency signal between two laser instruments, i.e., in Frequency signal is included altogetherIndividual difference frequency signal, 2≤N≤6;
According to concrete application demand, each laser instrument output frequency and frequency reference laser in remaining N-1 platform laser instrument are predefined Frequency-splitting △ P between device output frequencyi, i=1,2 ... N-1, △ Pi=± 1KHz~± 1GHz, this N-1 frequency-splitting △PiIt must is fulfilled for by produced by N platform laser instrumentsIndividual difference frequency signal is not in the requirement of aliasing on frequency spectrum;Meanwhile, It is applied across the control voltage that digital to analog converter is converted to analog quantity on the piezoelectric ceramics converter of remaining N-1 platform laser instrument respectively Vi, every laser instrument output frequency in remaining N-1 platform laser instrument is adjusted to into P0+△Pi, frequency-splitting be on the occasion of and frequency-splitting Number of lasers for negative value is equal so that the output frequency value of all laser instruments of whole laser instrument group is evenly distributed in defeated Go out to reach optimal output state on peak value, and the output frequency value of frequency reference laser instrument is exported positioned at whole laser instrument group The centre position of frequency;So, each difference frequency signal included in intermediate-freuqncy signal will be on frequency spectrum with the appearance of known order;
By the N-1 frequency-splitting △ PiAs N-1 frequency setting value;And be initialized as Voltage Cortrol Directional Sign H " 1 " or " 0 ";" 1 " represents and is adjusted to voltage augment direction, and " 0 " represents that reducing direction to voltage is adjusted;
(2) real-time detection step:
The digital intermediate frequency signal and power digital signal of analog-digital converter collection are obtained in real time, and the digital intermediate frequency signal is by voltage Intermediate-freuqncy signal Jing analog-digital converter is changed and obtained, and the voltage intermediate-freuqncy signal closes beam by the laser beam that each laser instrument is launched After form coherence laser beam, the difference frequency signal of coherence laser beam is converted by interference signal detector to be formed;
The power digital signal is changed through analog-digital converter by the laser power signal of frequency reference laser instrument and formed;
FFT is carried out to the digital intermediate frequency signal, is extracted in the frequency spectrum obtained from FFTIndividual crest frequency, shouldIndividual crest frequency is the frequency-splitting being aliasing in intermediate-freuqncy signal;The power digital signal is stored in into power memory Subsequently to judge that sub-step (4.4) is used;Then while carrying out step (3) and step (4) respectively;
(3) path length control step, including following sub-steps:
(3.1) frequency shift (FS) judges sub-step:According to the distribution sequence of known each difference frequency signal in step (1), by the N-1 Individual frequency setting value △ PiWith detectCorresponding N-1 crest frequency F in individual crest frequencyi, correspond to compared respectively Compared with, judge that whether whole it is equal, it is to carry out sub-step (3.3), otherwise carry out sub-step (3.2);I=1,2 ... N-1;
(3.2) frequency amendment voltage sub-step is calculated:
For wherein frequency setting value and the unequal each laser instrument of crest frequency, according to being currently applied to each corresponding laser instrument Control voltage on piezoelectric ceramics converter, finds the slope K of corresponding points in the frequency-voltage response curves of the laser instrumenti, Calculate frequency amendment voltage △ V1i=(Fi- △ Pi)/Ki
The each laser instrument equal for wherein frequency setting value and crest frequency, by its corresponding △ V1iSet to 0;I=1,2 or N- 1;
Frequency-the voltage response curves of the laser instrument are that the laser instrument output frequency changes to piezoelectric ceramics transducer voltage Response curve;
(3.3) FREQUENCY CONTROL action sub-step:
Calculate control voltage knots modification △ Vi:△Vi=△ V1i+△V2i
Wherein, △ V2iRead by offset voltage memory, for eliminating the frequency fluctuation that power regulation causes;
By Vi+△ViValue give Vi, then by ViAnalog quantity is converted to through digital to analog converter, N-1 platform laser instruments are respectively acting on Piezoelectric ceramics converter on;
By control voltage knots modification △ Vi, frequency amendment voltage △ V1iWith frequency compensation voltage △ V2iValue all reset;Turn step Suddenly (2);
(4) power control step, including following sub-steps:
(4.1) Time-delayed trigger sub-step:Setting time delay T, T=1~10 second are triggered a power regulation, are entered at interval of the T seconds Row sub-step (4.2);
(4.2) power control actions sub-step:If voltage-regulation Directional Sign H is " 1 ", by VkThe value of+VL gives Vk;If electric It is " 0 " that pressure adjusts Directional Sign H, then by VkThe value of-VL gives Vk;Wherein Voltage Cortrol step-length VL=1mV~1V;Then by Vk Analog quantity is converted to through digital to analog converter, the piezoelectric ceramics converter of frequency reference laser instrument is put on, sub-step is carried out (4.3);
(4.3) frequency compensation sub-step:Frequency compensation is carried out to other N-1 platforms laser instruments:
According to current Vk, the slope K of corresponding points is found in the frequency-voltage response curves of frequency reference laser instrumentk, so as to count Calculate the frequency fluctuation value △ P of frequency reference laser instrument generationk=VLKk, further according to △ Pk, calculate each laser instrument Frequency compensation voltage △ V2i=VLKk/Ki;And by frequency compensation voltage △ V2iIt is stored in offset voltage memory;Carry out sub-step Suddenly (4.4);
(4.4) sub-step is judged:Judge this voltage-regulation whether allowing frequency reference laser instrument power output away from defeated Go out power peak state, be then to change Voltage Cortrol Directional Sign H, go to step (2), otherwise Voltage Cortrol Directional Sign H keeps It is constant, go to step (2).
2. control method as claimed in claim 1, it is characterised in that:
The judgement sub-step (4.4) of the power control step is including one of following processes:
A, calculating ongoing frequency reference laser diode output power value deduct last power digital signal in the power memory Difference DELTA D, judge whether Δ D < Q, responsiveness threshold value Q=-100~-1;Be then frequency reference laser instrument power output it is remote From power output peak value, otherwise the power output of frequency reference laser instrument is not away from power output peak value;
All power digital signals after the last changes of Voltage Cortrol Directional Sign H stored in B, the calculating power memory In maximum deduct difference DELTA S of ongoing frequency reference laser diode output power value, judge whether Δ S > G, reduction amount threshold value G=1~100;Be the power output of then frequency reference laser instrument away from power output peak value, otherwise frequency reference laser instrument is defeated Go out power not away from power output peak value.
3. a kind of control system of laser instrument group, including initialization module, real-time detection module, path length control module and power control Molding block, it is characterised in that:
(1) initialization module:
Determine output frequency identical laser instrument for N station symbols, optionally wherein one as frequency reference laser instrument, in frequency reference Control voltage V that digital to analog converter is converted to analog quantity is applied across on the piezoelectric ceramics converter of laser instrumentk=V0, adjustment frequency Rate reference laser diode extremely demarcates output frequency P0;Collectively form intermediate-freuqncy signal per the difference frequency signal between two laser instruments, i.e., in Frequency signal is included altogetherIndividual difference frequency signal, 2≤N≤6;
According to concrete application demand, each laser instrument output frequency and frequency reference laser in remaining N-1 platform laser instrument are predefined Frequency-splitting △ P between device output frequencyi, i=1,2 ... N-1, △ Pi=± 1KHz~± 1GHz, this N-1 frequency-splitting △PiIt must is fulfilled for by produced by N platform laser instrumentsIndividual difference frequency signal is not in the requirement of aliasing on frequency spectrum;Meanwhile, It is applied across the control voltage that digital to analog converter is converted to analog quantity on the piezoelectric ceramics converter of remaining N-1 platform laser instrument respectively Vi, every laser instrument output frequency in remaining N-1 platform laser instrument is adjusted to into P0+△Pi, frequency-splitting be on the occasion of and frequency-splitting Number of lasers for negative value is equal so that the output frequency value of all laser instruments of whole laser instrument group is evenly distributed in defeated Go out to reach optimal output state on peak value, and the output frequency value of frequency reference laser instrument is exported positioned at whole laser instrument group The centre position of frequency;So, each difference frequency signal included in intermediate-freuqncy signal will be on frequency spectrum with the appearance of known order;
By the N-1 frequency-splitting △ PiAs N-1 frequency setting value;And be initialized as Voltage Cortrol Directional Sign H " 1 " or " 0 ";" 1 " represents and is adjusted to voltage augment direction, and " 0 " represents that reducing direction to voltage is adjusted;
(2) real-time detection module:
The digital intermediate frequency signal and power digital signal of analog-digital converter collection are obtained in real time, and the digital intermediate frequency signal is by voltage Intermediate-freuqncy signal Jing analog-digital converter is changed and obtained, and the voltage intermediate-freuqncy signal closes beam by the laser beam that each laser instrument is launched After form coherence laser beam, the difference frequency signal of coherence laser beam is converted by interference signal detector to be formed;
The power digital signal is changed through analog-digital converter by the laser power signal of frequency reference laser instrument and formed;
FFT is carried out to the digital intermediate frequency signal, is extracted in the frequency spectrum obtained from FFTIndividual crest frequency, shouldIndividual crest frequency is the frequency-splitting being aliasing in intermediate-freuqncy signal;The power digital signal is stored in into power memory So that follow-up judging submodule (4.4) is used;Then while carrying out module (3) and module (4) respectively;
(3) path length control module, including following submodules:
(3.1) frequency shift (FS) judging submodule:According to the distribution sequence of known each difference frequency signal in step (1), by the N-1 Individual frequency setting value △ PiWith detectCorresponding N-1 crest frequency F in individual crest frequencyi, correspond to compared respectively Compared with, judge that whether whole it is equal, it is to carry out submodule (3.3), otherwise carry out submodule (3.2);I=1,2 ... N-1;
(3.2) frequency amendment voltage submodule is calculated:
For wherein frequency setting value and the unequal each laser instrument of crest frequency, according to being currently applied to each corresponding laser instrument Control voltage on piezoelectric ceramics converter, finds the slope K of corresponding points in the frequency-voltage response curves of the laser instrumenti, Calculate frequency amendment voltage △ V1i=(Fi- △ Pi)/Ki
The each laser instrument equal for wherein frequency setting value and crest frequency, by its corresponding △ V1iSet to 0;I=1,2 or N- 1;
Frequency-the voltage response curves of the laser instrument are that the laser instrument output frequency changes to piezoelectric ceramics transducer voltage Response curve;
(3.3) FREQUENCY CONTROL action submodule:
Calculate control voltage knots modification △ Vi:△Vi=△ V1i+△V2i
Wherein, △ V2iRead by offset voltage memory, for eliminating the frequency fluctuation that power regulation causes;
By Vi+△ViValue give Vi, then by ViAnalog quantity is converted to through digital to analog converter, N-1 platform laser instruments are respectively acting on Piezoelectric ceramics converter on;
By control voltage knots modification △ Vi, frequency amendment voltage △ V1iWith frequency compensation voltage △ V2iValue all reset;Revolving die Block (2);
(4) power control module, including following submodules:
(4.1) Time-delayed trigger submodule:Setting time delay T, T=1~10 second are triggered a power regulation, are entered at interval of the T seconds Row submodule (4.2);Time delay T is sufficiently more than the time scale of real-time frequency control, so that real-time frequency control energy Enough frequency fluctuations timely suppressed caused by power regulation action,
(4.2) power control actions submodule:If voltage-regulation Directional Sign H is " 1 ", by VkThe value of+VL gives Vk;If electric It is " 0 " that pressure adjusts Directional Sign H, then by VkThe value of-VL gives Vk;Wherein Voltage Cortrol step-length VL=1mV~1V;Then by Vk Analog quantity is converted to through digital to analog converter, the piezoelectric ceramics converter of frequency reference laser instrument is put on, submodule is carried out (4.3);
(4.3) frequency compensation submodule:Frequency compensation is carried out to other N-1 platforms laser instruments:
According to current Vk, the slope K of corresponding points is found in the frequency-voltage response curves of frequency reference laser instrumentk, so as to count Calculate the frequency fluctuation value △ P of frequency reference laser instrument generationk=VLKk, further according to △ Pk, calculate each laser instrument Frequency compensation voltage △ V2i=VLKk/Ki;And by frequency compensation voltage △ V2iIt is stored in offset voltage memory;Carry out submodule Block (4.4);
(4.4) judging submodule:Judge this voltage-regulation whether allowing frequency reference laser instrument power output away from defeated Go out power peak state, be then to change Voltage Cortrol Directional Sign H, go to step (2), otherwise Voltage Cortrol Directional Sign H keeps It is constant, revolving die block (2).
4. the control system of laser instrument group as claimed in claim 3, it is characterised in that the judgement submodule of the power control module Block (4.4) carries out one of following deterministic processes:
A, calculating ongoing frequency reference laser diode output power value deduct last power digital signal in the power memory Difference DELTA D, judge whether Δ D < Q, responsiveness threshold value Q=-100~-1;Be then frequency reference laser instrument power output it is remote From power output peak value, otherwise the power output of frequency reference laser instrument is not away from power output peak value;
All power digital signals after the last changes of Voltage Cortrol Directional Sign H stored in B, the calculating power memory In maximum deduct difference DELTA S of ongoing frequency reference laser diode output power value, judge whether Δ S > G, reduction amount threshold value G=1~100;Be the power output of then frequency reference laser instrument away from power output peak value, otherwise frequency reference laser instrument is defeated Go out power not away from power output peak value.
CN201410386672.0A 2014-08-07 2014-08-07 Control method and system of laser set Active CN104167660B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410386672.0A CN104167660B (en) 2014-08-07 2014-08-07 Control method and system of laser set

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410386672.0A CN104167660B (en) 2014-08-07 2014-08-07 Control method and system of laser set

Publications (2)

Publication Number Publication Date
CN104167660A CN104167660A (en) 2014-11-26
CN104167660B true CN104167660B (en) 2017-04-26

Family

ID=51911372

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410386672.0A Active CN104167660B (en) 2014-08-07 2014-08-07 Control method and system of laser set

Country Status (1)

Country Link
CN (1) CN104167660B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106324608B (en) * 2016-08-30 2018-11-27 深圳市威睿晶科电子有限公司 A kind of interior optical path phase compensating method and system based on laser ranging
CN108390250A (en) * 2018-02-06 2018-08-10 华中科技大学 A kind of feedback device and laser generating system for intermediate-freuqncy signal frequency stabilization
CN111162438B (en) 2020-02-24 2021-01-26 华东师范大学重庆研究院 Optical frequency comb control method and control system
CN113172356B (en) * 2021-04-26 2022-11-04 北京沃佳玛科技有限公司 Light source attenuation detection device for monitoring laser coding machine

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375685A (en) * 1979-08-31 1983-03-01 Compagnie Generale D'electricite Gas laser assembly which is capable of emitting stabilized frequency pulse radiations
CN1344048A (en) * 2001-10-31 2002-04-10 清华大学 Dual-refraction dual-frequency Zeeman laser device with stable frequency difference and its method for stabilizing frequency difference
CN101609958A (en) * 2009-07-17 2009-12-23 哈尔滨工业大学 Double-longitudinal-mode laser frequency-offset-lock method and device based on thermoelectric cooling module
CN102629731A (en) * 2012-02-14 2012-08-08 浙江嘉莱光子技术有限公司 Control method for simultaneously stabilizing laser wavelength and power and control device thereof
CN103579896A (en) * 2013-11-06 2014-02-12 西安理工大学 Pound-Drever-Hall laser frequency stabilizing system without phase shifter

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY155067A (en) * 2008-05-01 2015-08-28 Univ Australian Methods and systems for frequency stabilisation of multiple lasers
JP2011228457A (en) * 2010-04-19 2011-11-10 Mitsubishi Electric Corp Image display apparatus and laser light source apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375685A (en) * 1979-08-31 1983-03-01 Compagnie Generale D'electricite Gas laser assembly which is capable of emitting stabilized frequency pulse radiations
CN1344048A (en) * 2001-10-31 2002-04-10 清华大学 Dual-refraction dual-frequency Zeeman laser device with stable frequency difference and its method for stabilizing frequency difference
CN101609958A (en) * 2009-07-17 2009-12-23 哈尔滨工业大学 Double-longitudinal-mode laser frequency-offset-lock method and device based on thermoelectric cooling module
CN102629731A (en) * 2012-02-14 2012-08-08 浙江嘉莱光子技术有限公司 Control method for simultaneously stabilizing laser wavelength and power and control device thereof
CN103579896A (en) * 2013-11-06 2014-02-12 西安理工大学 Pound-Drever-Hall laser frequency stabilizing system without phase shifter

Also Published As

Publication number Publication date
CN104167660A (en) 2014-11-26

Similar Documents

Publication Publication Date Title
CN104167660B (en) Control method and system of laser set
CN106707760B (en) Nonlinear inverse control method for dynamic hysteresis compensation of piezoelectric actuator
CN106066218B (en) System and method for capacitance sensor
CN106066217B (en) System and method for MEMS sensor
US6472822B1 (en) Pulsed RF power delivery for plasma processing
US20110084711A1 (en) Capacitance sensing circuit with anti-electromagnetic interference capability
Wlodkowski et al. The development of high-sensitivity, low-noise accelerometers utilizing single crystal piezoelectric materials
CN103842778B (en) Surface charge reduction technique for capacitive sensors
CN104953459B (en) A kind of transmission cavity frequency stabilization system that laser frequency is steady in a long-term and its frequency-stabilizing method
CN103148940A (en) Light asynchronous sampling signal measurement method and system
KR102035143B1 (en) Film thickness control device, film thickness control method, and film formation device
CN104135283A (en) Device and method of bandwidth test of wide band gap semiconductor power device
CN106403920A (en) Acceleration device
Pidchenko et al. Utilization features of the mexanotron for information measurement systems
CN106842761A (en) Optics cavity automatic locking apparatus and its lock cavity method based on analog circuit
CN107005178B (en) Piezoelectric positioning device and the localization method for using such piezoelectric positioning device
CN1606235A (en) He-Ne laser beat wave noise filtering equipment and noise filtering method
CN107688265A (en) A kind of implementation method of fabry perot cavity drive circuit
Kawarnata et al. Development of an intelligent digital integrator for long-pulse operation in a tokamak
CN103401538A (en) Inertial acceleration transducer frequency control force feedback signal processing circuit
Deng et al. Nonlinearity suppression method for optical frequency scanning based on the Phenomenological model
Kohl et al. Budgeting of systematic versus stochastic errors in sensor fusion for piezo electric transducers
Schroder et al. Ultrasonic transducer interface-circuit for simultaneous transmitting and receiving
SU711375A1 (en) Method of calibrating measuring instruments with piezotransducers
CN107564375A (en) A kind of method and circuit of the systematic error for eliminating period of single pendulum measurement

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant