CN113825295B - Acceleration structure and radiation processing device - Google Patents
Acceleration structure and radiation processing device Download PDFInfo
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- CN113825295B CN113825295B CN202110955194.0A CN202110955194A CN113825295B CN 113825295 B CN113825295 B CN 113825295B CN 202110955194 A CN202110955194 A CN 202110955194A CN 113825295 B CN113825295 B CN 113825295B
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- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
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- H05H7/001—Arrangements for beam delivery or irradiation
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Abstract
The invention provides an accelerating structure which comprises an input coupling piece, a bunching piece, an accelerating piece and an output coupling piece, wherein the input coupling piece is provided with a hollow input coupling cavity, two first beam current holes communicated with the input coupling cavity and a first coupling port communicated with the input coupling cavity; the bunching piece is provided with a hollow bunching cavity and two second bunching holes communicated with the bunching cavity; the accelerating part is provided with a hollow accelerating cavity and two third beam-bunching holes communicated with the beam-bunching cavity; the output coupling piece is provided with a hollow output coupling cavity, two fourth beam current holes communicated with the output coupling cavity and a second coupling port communicated with the output coupling cavity. According to the invention, the cross sections of the first beam flow hole, the second beam flow hole, the third beam flow hole and the fourth beam flow hole are all in the same strip shape, so that strip-shaped or filiform particle beam can be formed, and the structure of the acceleration structure is simplified.
Description
Technical Field
The invention relates to the technical field of accelerators, in particular to an accelerating structure and an irradiation processing device.
Background
The accelerating structure is a device for accelerating electron beams, low-energy electron beams are input into the accelerating structure to be accelerated to form a high-energy electron beam output accelerating structure, and the high-energy electron beams can be applied to the aspects of material modification, sewage treatment, disinfection and sterilization, coating curing and the like. The accelerating structure can accelerate low-energy electron beams to high-energy electron beam beams with corresponding energy according to different application fields. The electron beam of the related accelerating structure is concentrated, the electron beam needs to be diffused by a scanning magnet, and the diffused electron beam can be deflected to different degrees again to obtain the electron beam which is emitted in parallel, so that the complexity of the device is increased.
Disclosure of Invention
In view of this, embodiments of the present invention provide an acceleration structure to solve the technical problem of how to obtain electron beams emitted in parallel and simplify the structure of the device.
The technical scheme of the embodiment of the invention is realized as follows:
an embodiment of the present invention provides an acceleration structure, including: an input coupling piece is arranged on the input side of the input,
the particle filter is provided with a hollow input coupling cavity, wherein two first beam flow holes which are arranged at intervals along a first direction and are used for particles to pass through are formed in the input coupling piece, and the two first beam flow holes are communicated with the input coupling cavity along the first direction; the input coupling piece is provided with a first coupling port which is arranged at intervals with the two first beam current holes and used for feeding power, and the first coupling port is communicated with the input coupling cavity;
the bunching piece is provided with a hollow bunching cavity, the bunching piece is provided with two second bunching holes which are arranged at intervals along the first direction and are used for particles to pass through, and the two second bunching holes are communicated with the bunching cavity along the first direction;
the accelerating part is provided with two third beam holes which are arranged at intervals along the first direction and are used for particles to pass through, and the two third beam holes are communicated with the accelerating cavity along the first direction;
the output coupling piece is provided with two fourth beam flow holes which are arranged at intervals along the first direction and used for particles to pass through, and the two fourth beam flow holes are communicated with the output coupling cavity along the first direction; the output coupling piece is provided with second coupling ports which are arranged at intervals with the two fourth beam current holes and used for power feed-out, and the second coupling ports are communicated with the output coupling cavity;
the first coupling cavity, the beam convergence cavity, the acceleration cavity, the output coupling cavity is connected with the first beam flow hole, the second beam flow hole, the third beam flow hole and the fourth beam flow hole in sequence in the first direction, the first beam flow hole, the second beam flow hole, the third beam flow hole and the fourth beam flow hole are identical in cross section, the cross section is perpendicular to the first direction, and the cross section is long.
Further, both ends of the length direction of the cross section are arcs.
Further, the aspect ratio of the cross-section is greater than 15.
Furthermore, the bunching piece is provided with a plurality of bunching pieces which are sequentially connected along the first direction.
Further, the accelerating member has a plurality of, and a plurality of the accelerating members are connected in series along the first direction.
Further, the accelerating structure further includes a cooling member that surrounds the condensing member and the accelerating member around the first direction.
Further, the cooling part is provided with a water injection port and a water outlet, and the water injection port and the water outlet are arranged at intervals.
An embodiment of the present invention further provides a radiation processing apparatus, including: the accelerating structure of any one of the above; an electron gun disposed proximate the first beam aperture distal from the beam focusing member; a titanium membrane positioned at an end of the output coupling in the acceleration structure distal from the accelerator to close off one of the fourth beam-aperture apertures; and the radio frequency power component is connected with the first coupling port.
Further, the radio frequency power assembly includes: a power source to provide power; a transmission waveguide connected to the power source; and one end of the input waveguide is connected with one end, far away from the power source, of the transmission waveguide, and the other end of the input waveguide is connected with the first coupling port.
Furthermore, the radiation processing device also comprises an output waveguide and a load, wherein one end of the output waveguide is connected with the second coupling port, and the other end of the output waveguide is connected with the load.
The acceleration structure provided by the embodiment of the invention comprises an input coupling piece, a bunching piece, an acceleration piece and an output coupling piece, wherein the input coupling piece is internally provided with a hollow input coupling cavity, two first beam-current holes communicated with the input coupling cavity and a first coupling port communicated with the input coupling cavity; the bunching piece is internally provided with a hollow bunching cavity and two second beam current holes communicated with the bunching cavity, and particles enter and exit the bunching cavity through the two second beam current holes; the accelerating part is provided with a hollow accelerating cavity and two third beam-bunching holes communicated with the beam-bunching cavity, and particles enter and exit the accelerating cavity through the two third beam-bunching holes; the output coupling piece is provided with a hollow output coupling cavity, two fourth beam holes communicated with the output coupling cavity and a second coupling port communicated with the output coupling cavity, particles enter and exit the output coupling cavity through the two fourth beam holes, and the second coupling port is used for power feed-out. The input coupling cavity, the beam-bunching cavity, the acceleration cavity and the output coupling cavity are sequentially communicated through the first beam current hole, the second beam current hole, the third beam current hole and the fourth beam current hole in the first direction, and the cross sections of the first beam current hole, the second beam current hole, the third beam current hole and the fourth beam current hole are all the same long strips. In the embodiment of the invention, the cross sections of the first beam flow hole, the second beam flow hole, the third beam flow hole and the fourth beam flow hole are all in the same strip shape, so that the input coupling cavity, the beam bunching cavity, the acceleration cavity and the output coupling cavity form a flat channel, and when particles pass through the flat channel, strip-shaped or wire-shaped particle beam flows with the shapes approximately same as the cross sections of the first beam flow hole, the second beam flow hole, the third beam flow hole and the fourth beam flow hole are formed, so that the scanning magnet is not used for diffusing the electron beam and deflecting the electron beam to different degrees, and the structure of the acceleration structure is simplified.
Drawings
FIG. 1 is a cross-sectional view of an acceleration structure according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an input coupling element according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a bunching member according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an accelerator according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of an output coupling according to an embodiment of the present invention;
FIG. 6 is a schematic cross-sectional view of an embodiment of the present invention;
FIG. 7 is a schematic structural diagram of an acceleration structure according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a radiation processing apparatus according to an embodiment of the present invention.
Description of reference numerals:
1. an acceleration structure; 10. an input coupling; 11. an input coupling cavity; 12. a first beam flow orifice; 13. a first coupling port; 20. a bunching member; 21. a bunching cavity; 22. a second beam aperture; 30. an accelerator member; 31. an acceleration chamber; 32. a third beam orifice; 40. an output coupling; 41. an output coupling cavity; 42. a fourth beam orifice; 43. a second coupling port; 44. a titanium film; 45. an output waveguide; 46. a load; 50. a cooling member; 51. a water injection port; 52. a water outlet; 53. an accommodating chamber; 60. an electron gun; 70. a radio frequency power component; 71. a power source; 72. a transmission waveguide; 73. an input waveguide.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Various combinations of the specific features in the embodiments described in the detailed description may be made without contradiction, for example, different embodiments may be formed by different combinations of the specific features, and in order to avoid unnecessary repetition, various possible combinations of the specific features in the present application will not be described separately.
In the following description, the terms first \ second \ third \ fourth \ 8230; \8230; "merely distinguish different objects and do not indicate the same or a relationship between the objects. It should be understood that references to orientations describe "above", "below", "left" and "right" are all orientations in normal use.
It should be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a component of' 8230; \8230;" does not exclude the presence of another like element in a process, method, article, or apparatus that comprises the element. The term "coupled", where not otherwise specified, includes both direct and indirect connections.
The acceleration structure provided by the embodiment of the invention can be used as a device for accelerating electrons. The electrons are output to an accelerating structure through an electron gun, and the accelerating structure is communicated with a radio frequency power assembly to acquire energy to form an accelerating electric field, so that the electrons can be continuously accelerated in the accelerating structure until the accelerating structure is output. The output electrons form high-energy electron beams, and can be used for radiating articles to achieve the functions of disinfection, sterilization and the like. It should be noted that the acceleration structure provided by the embodiment of the present invention is not limited to the application field, that is, besides the field of irradiation acceleration technology, the acceleration structure provided by the embodiment of the present invention can also be applied to other fields requiring electron acceleration, for example, a gold foil experiment, etc.
An embodiment of the present invention provides an acceleration structure 1, as shown in fig. 1, including an input coupling element 10, a beam bunching element 20, an acceleration element 30, and an output coupling element 40.
As shown in connection with fig. 1 and 2, the input coupling 10 has a hollow input coupling cavity 11. The input coupling member 10 may be an elongated member having a certain thickness, and the thickness direction thereof is the up-down direction in fig. 1, for example, the thickness of the input coupling member 10 may be 16mm, 20mm, and the like, and the thickness of the input coupling member 10 may be determined according to the speed that the particles need to reach. The input coupling cavity 11 is arranged in the input coupling 10, and the input coupling 10 surrounds the cavity wall forming the input coupling cavity 11, so that the formed input coupling cavity 11 is a hollow space, and the particle beam can be accommodated. The input coupling member 10 is provided with two first beam-passing apertures 12 spaced apart in a first direction for particles to pass through. The first direction is the thickness direction of the input coupling member 10, that is, the up-down direction shown in fig. 1. Spaced apart means that the two parts are not in close contact but are spatially separated by a certain distance. The input coupling element 10 is provided with a first beam aperture 12 at each end in the first direction, and a line connecting the two first beam apertures 12 is parallel to the first direction. The two first beam-passing holes 12 communicate with the input coupling cavity 11 in a first direction. Two first beam-current holes 12 extend through the wall of the input coupling cavity 11 and are communicated with the input coupling cavity 11, so that particles can enter and exit the input coupling cavity 11 through the two first beam-current holes 12, wherein one first beam-current hole 12 is used for inputting particles into the input coupling cavity 11, for example, the first beam-current hole 12 can be connected with an electron gun to receive electrons emitted by the electron gun, and the other first beam-current hole 12 is used for outputting particles in the input coupling cavity 11. The input coupling piece 10 is provided with a first coupling opening 13 for feeding power, which is arranged at a distance from the two first beam-forming openings 12. The first coupling opening 13 and the first beam-passing opening 12 are both arranged on the input coupling part 10, and the first coupling opening 13 is spatially distanced from both the first beam-passing openings 12. The first coupling port 13 communicates with the input coupling cavity 11. The first coupling port 13 may be used to externally connect a power source to input power into the input coupling cavity 11, so that the particles located in the accelerating structure can absorb energy to accelerate. The power energy that is not absorbed in the input coupling cavity 11 can also be output to the input coupling cavity 11 along the first beam-current aperture.
As shown in fig. 1 and 3, the bunching member 20 has a hollow bunching chamber 21. The focusing member 20 may be a long bar with a certain thickness, and the thickness direction thereof is the up-down direction in fig. 1, for example, the thickness of the focusing member 20 may be 20mm, 25mm, 35mm, etc., and the thickness of the focusing member 20 may be determined according to the required speed of the particle beam. The bunching chamber 21 is arranged in the bunching member 20, and the bunching member 20 surrounds the wall of the chamber forming the bunching chamber 21, so that the formed bunching chamber 21 is a hollow space and can contain particles. The focusing member 20 is provided with two second beam holes 22 spaced in the first direction for passing particles therethrough. The first direction is the thickness direction of the bunching member 20, i.e., the up-down direction shown in fig. 1. Spaced apart means that the two parts are not in close contact but are spatially pure at a certain distance. The focusing member 20 is provided with a second beam-passing hole 22 at each of both ends in the first direction, and a line connecting the two second beam-passing holes 22 is parallel to the first direction. The two second beam-passing holes 22 communicate with the bunching chamber 21 in the first direction. Two second beam orifice 22 extend through the wall of the bunching chamber 21 so as to communicate with the bunching chamber 21, so that particles can enter and exit the bunching chamber 21 through the two second beam orifice 22, wherein one second beam orifice 22 is used for inputting particles into the bunching chamber 21, for example, the second beam orifice 22 can be connected with one first beam orifice 12 to receive the particles output from the input coupling chamber 11, and the other second beam orifice 22 is used for outputting the particles in the bunching chamber 21.
As shown in connection with fig. 1 and 4, the acceleration member 30 has a hollow acceleration chamber 31. The accelerator 30 may be a long bar having a certain thickness, and the thickness direction thereof is the up-down direction in fig. 1, for example, the thickness of the accelerator 30 may be 30mm, 35mm, etc., and the thickness of the accelerator 30 may be determined according to the velocity that the particles need to reach. The acceleration chamber 31 may be disposed in the acceleration member 30, and the acceleration member 30 surrounds the chamber wall forming the acceleration chamber 31, so that the acceleration chamber 31 is formed as a hollow space, thereby accommodating the particles. The acceleration member 30 is provided with two third beam-passing holes 32 spaced apart in the first direction for passing particles therethrough. The first direction is the thickness direction of the accelerator 30, i.e., the up-down direction shown in fig. 1. Spaced apart means that the two parts are not in close contact but are spatially pure at a certain distance. The accelerator 30 is provided with a third beam-passing hole 32 at each of both ends in the first direction, and a line connecting the third beam-passing holes 32 is parallel to the first direction. The two third beam-passing holes 32 communicate with the acceleration chamber 31 in the first direction. Two third beam holes 32 extend through the wall of the acceleration chamber 31 to communicate with the acceleration chamber 31, so that particles can enter and exit the acceleration chamber 31 through the two third beam holes 32, wherein one third beam hole 32 is used for inputting particles into the acceleration chamber 31, for example, the third beam hole 32 can be connected with one second beam hole 22 to receive particles output from the beam bunching chamber 21, and the other third beam hole 32 is used for outputting particles from the acceleration chamber 31.
As shown in connection with fig. 1 and 5, the output coupling 40 has a hollow output coupling cavity 41. The output coupling 40 has a hollow output coupling cavity 41. The output coupling member 40 may be an elongated member having a certain thickness, and the thickness direction thereof is the up-down direction in fig. 1, for example, the thickness of the output coupling member 40 may be 30mm, 35mm, and the like, and the thickness of the output coupling member 40 may be determined according to the speed that the particles need to reach. An output coupling cavity 41 may be provided in the output coupling member 40, the output coupling cavity 41 surrounding the cavity wall forming the output coupling cavity 41, such that the output coupling cavity 41 is formed as a hollow space, so as to accommodate the particles. The output coupling member 40 is provided with two fourth beam apertures 42 spaced apart in the first direction for passing particles. The first direction is a thickness direction of the output coupling member 40, that is, an up-down direction shown in fig. 1. Spaced apart means that the two parts are not in close contact but are spatially separated by a certain distance. The output coupling member 40 is provided with a fourth beam aperture 42 at each of two ends in the first direction, and a line connecting the two fourth beam apertures 42 is parallel to the first direction. The two fourth beam-passing apertures 42 communicate with the output coupling cavity 41 in the first direction. Two fourth beam holes 42 penetrate through the wall of the output coupling cavity 41 and are communicated with the output coupling cavity 41, so that particles can enter and exit the output coupling cavity 41 through the two fourth beam holes 42, wherein one fourth beam hole 42 is used for inputting particles into the output coupling cavity 41, for example, the fourth beam hole 42 can be connected with one third beam hole 32 to receive the particles output by the acceleration cavity 31, and the other fourth beam hole 42 is used for outputting the particles in the output coupling cavity 41. The output coupling 40 is provided with a second coupling opening 43 for power supply, which is arranged at a distance from the two fourth beam-path apertures 42. The second coupling port 43 and the fourth beam aperture 42 are both disposed on the output coupling 40, and the second coupling port 43 is spaced apart from both the fourth beam apertures 42. The second coupling port 43 communicates with the output coupling chamber 41. The second coupling port 43 can be used for externally connecting a load, and outputting the power in the output coupling cavity 41 to the load, so that only the accelerated particles are output from one fourth beam aperture.
As shown in fig. 1 to 5, the input coupling cavity 11, the beam bunching cavity 21, the accelerating cavity 31 and the output coupling cavity 41 are sequentially communicated in the first direction through the first beam orifice 12, the second beam orifice 22, the third beam orifice 32 and the fourth beam orifice 42. A first beam orifice 12 is connected to a second beam orifice 22, so that the input coupling cavity 11 communicates with the beam focusing cavity 21. The other second beam orifice 22 is connected to a third beam orifice 32 to communicate the bunching chamber 21 with the acceleration chamber 31. The other third beam aperture 32 is connected to a fourth beam aperture 42, so that the acceleration chamber 31 communicates with the output coupling chamber 41. The cross sections of the first beam orifice 12, the second beam orifice 22, the third beam orifice 32 and the fourth beam orifice 42 are the same. It is understood that the first beam aperture 12 and the second beam aperture 22 may be completely connected, so that the particles in the input coupling cavity 11 can completely enter the bunching cavity 21, the second beam aperture 22 and the third beam aperture 32 are completely connected, so that the particles in the bunching cavity 21 can completely enter the accelerating cavity 31, and the third beam aperture 32 and the fourth beam aperture 42 are completely connected, so that the particles in the accelerating cavity 31 can completely enter the output coupling cavity 41. The cross section is perpendicular to the first direction, and the cross section is rectangular. The particles move along a first direction (such as the up-down direction shown in fig. 1), and sequentially pass through the first beam orifice 12, the second beam orifice 22, the third beam orifice 32, and the fourth beam orifice 42, and the cross sections of the first beam orifice 12, the second beam orifice 22, the third beam orifice 32, and the fourth beam orifice 42 are the same, so that the cross section of the formed particle flow is also the same as the cross sections of the first beam orifice 12, the second beam orifice 22, the third beam orifice 32, and the fourth beam orifice 42, that is, the particles do not change direction when being transported in the input coupling cavity 11, the focusing cavity 21, the accelerating cavity 31, and the output coupling cavity 41, and the directional transport of the particles is achieved, and the particle flow is formed into a band shape or a filament shape.
The acceleration structure provided by the embodiment of the invention comprises an input coupling piece, a bunching piece, an acceleration piece and an output coupling piece, wherein the input coupling piece is provided with a hollow input coupling cavity, two first beam-forming holes communicated with the input coupling cavity and a first coupling port communicated with the input coupling cavity; the bunching piece is internally provided with a hollow bunching cavity and two second beam current holes communicated with the bunching cavity, and particles enter and exit the bunching cavity through the two second beam current holes; the accelerating part is provided with a hollow accelerating cavity and two third beam current holes communicated with the beam bunching cavity, and particles enter and exit the accelerating cavity through the two third beam current holes; the output coupling piece is provided with a hollow output coupling cavity, two fourth beam holes communicated with the output coupling cavity and a second coupling port communicated with the output coupling cavity, particles enter and exit the output coupling cavity through the two fourth beam holes, and the second coupling port is used for power feed-out. The input coupling cavity, the beam-bunching cavity, the acceleration cavity and the output coupling cavity are sequentially communicated through the first beam current hole, the second beam current hole, the third beam current hole and the fourth beam current hole in the first direction, and the cross sections of the first beam current hole, the second beam current hole, the third beam current hole and the fourth beam current hole are all the same long strips. In the embodiment of the invention, the cross sections of the first beam flow hole, the second beam flow hole, the third beam flow hole and the fourth beam flow hole are all in the same strip shape, so that the input coupling cavity, the beam bunching cavity, the acceleration cavity and the output coupling cavity form a flat channel, and when particles pass through the flat channel, strip-shaped or wire-shaped particle beam flows with the shapes approximately same as the cross sections of the first beam flow hole, the second beam flow hole, the third beam flow hole and the fourth beam flow hole are formed, so that the scanning magnet is not used for diffusing the electron beam and deflecting the electron beam to different degrees, and the structure of the acceleration structure is simplified.
In some embodiments, as shown in fig. 6, the ends of the cross-section in the length direction are arcs. The length direction is the direction of the largest dimension in the cross section, and fig. 6 shows the left-right direction in the figure, and the cross section has two opposite ends in the left-right direction, the two ends are arcs, and protrude in the direction away from the holes to form a track-like shape, so that the hole walls of the first beam orifice 12, the second beam orifice 22, the third beam orifice 32 and the fourth beam orifice 42 are smoothly transited, and the hole spaces of the first beam orifice 12, the second beam orifice 22, the third beam orifice 32 and the fourth beam orifice 42 are enlarged to allow more particles to pass through.
In some embodiments, as shown in fig. 6, the aspect ratio of the cross-section is greater than 15. The length direction of the cross section is the direction with the largest dimension in the cross section, and the width direction is perpendicular to the length direction, as shown in fig. 6, the length of the cross section is the length in the left-right direction in fig. 6, and the width of the cross section is the length in the up-down direction in fig. 6. The aspect ratio of the cross section is larger than 15 to make the shapes of the first beam orifice 12, the second beam orifice 22, the third beam orifice 32 and the fourth beam orifice 42 more flat, so that the width of the formed particle beam is wider, for example, the length of the cross section can be 400mm, and the width can be 20mm, so as to increase the width occupied by the particle beam.
In some embodiments, as shown in fig. 1, there are a plurality of bunching members 20, and the bunching members 20 are connected in series along a first direction (e.g., up and down as shown in fig. 1). The plurality of bunching members 20 are connected such that the plurality of bunching chambers 21 are also connected in series to form a longer particle bunching channel, thereby accommodating more particles. After entering the beam focusing channels connected together by the beam focusing cavities 21, the particles have enough space to be arranged in a plurality of parallel particle beams and be accelerated to a certain extent, so that the particle beams can be uninterruptedly output.
In some embodiments, as shown in fig. 1, there are a plurality of the acceleration members 30, and the plurality of acceleration members 30 are sequentially connected along a first direction (up and down direction as shown in fig. 1). The plurality of accelerating members 30 are connected so that the plurality of accelerating cavities 31 are also connected in sequence to form a particle accelerating channel with a long length, and particles enter the accelerating channel formed by the plurality of accelerating cavities 31 and are accelerated until the particles are transported out of the accelerating cavities 31. The number of the accelerating cavities 31 can be selected according to the target speed to which the particles need to be accelerated, for example, the number of the accelerating members 30 can be 5, and if the speed of the particles is further increased, the number of the accelerating members 30 can also be 8. The arrangement of the plurality of acceleration members 30 can further increase the velocity of the particles, so that the number of acceleration members 30 can be selected according to the application field of the acceleration structure to accelerate the particles to the target velocity.
In some embodiments, as shown in fig. 7, the accelerating structure 1 further includes a cooling element 50, and when the accelerating structure 1 accelerates the electrons, a large amount of heat is generated, and the heat needs to be discharged in time to avoid overheating and damaging the device. The cooling member 50 may be a heat conductive material, which can diffuse the heat generated by the acceleration structure 1 into the air in time, and reduce the temperature of the acceleration structure 1. The cooling member 50 may also be a heat radiation fan for taking away heat by the generated wind flow. The cooling member 50 is disposed around the focusing member 20 and the accelerating member 30 in a first direction (e.g., the up-down direction shown in fig. 7), so as to perform heat dissipation processing on the focusing member 20 and the accelerating member 30, the focusing member 20 and the accelerating member 30 occupy more space, and generate more heat, and then the cooling member 50 is disposed around the focusing member 20 and the accelerating member 30, so that heat can be effectively dissipated, and the structure of the acceleration structure 1 is compact.
In some embodiments, as shown in connection with fig. 1 and 7, the cooling element 50 has a water injection port 51 and a water outlet port 52. The cooling element 50 may be a liquid-cooled device having a hollow receiving chamber 53, the receiving chamber 53 being for receiving a cooling liquid, which may be cold water. For example, when the cooling liquid is cold water, cold water can be continuously injected into the water injection port 51, the temperature of the cold water can be raised after the cold water absorbs heat of the accelerating structure, and the raised temperature water can reduce the cooling effect of the cooling element 50 on the accelerating structure 1, so that the raised temperature water can be discharged out of the cooling element 50 through the water outlet 52. Water filling port 51 and delivery port 52 interval set up, can help the coolant liquid to pour into and get rid of after holding chamber 53 fully absorbs the heat, improve the utilization ratio of coolant liquid, for example, water filling port 51 can set up the top on the first direction, delivery port 52 can set up the below on the first direction, so that water filling port 51 and delivery port 52 interval distantly, thereby the coolant liquid can follow delivery port 52 and flow out after certain distance to the first direction below from water filling port 51 entering back, reinforcing cooling effect.
An embodiment of the present invention further provides a radiation acceleration structure, as shown in fig. 8, including:
the accelerating structure 1, the electron gun 60, the titanium film 44 and the radio frequency power assembly 70 of any one of the above.
As shown in fig. 1 and 8, the electron gun 60 is positioned proximate the first beam aperture 12 distal from the buncher 20. The electron gun 60 is a ribbon-shaped electron gun, or a filament-shaped electron gun, and has substantially the same shape as the cross-section of the first beam aperture 12, so that the electron gun 60 can be completely attached to the first beam aperture 12, and all electrons emitted from the electron gun 60 can enter the input coupling cavity 11 through the first beam aperture 12. The electron gun 60 can eject a plurality of electrons simultaneously, and the plurality of electrons are arranged in a flat shape, so that the electrons can enter the input coupling cavity 11 in parallel to facilitate the subsequent formation of a plurality of parallel electron beams.
As shown in fig. 8, a titanium membrane 44 is positioned at an end of the output coupling 40 remote from the accelerator 30 in the accelerator structure 1 to close off a fourth beam aperture 42. The output coupling cavity 41 communicates with two fourth beam apertures 42, wherein one fourth beam aperture 42 is used for receiving the particles output from the acceleration cavity 31, and the other is used for outputting the particles in the output coupling cavity 41. A titanium film 44 is provided at the fourth beam-aperture 42 for outputting particles so as to be able to close the fourth beam-aperture 42. The titanium film 44 and the electron gun 60 respectively seal the first beam-flow hole 12 and the fourth beam-flow hole 42 of the acceleration structure 1, which are communicated with the outside, so that the input coupling cavity 11, the beam-bunching cavity 21, the acceleration cavity 31 and the output coupling cavity 41 form a totally-enclosed vacuum channel, electrons are accelerated in the vacuum channel and then penetrate through the titanium film 44, and power energy does not penetrate through the titanium film 44, so that the acceleration structure 1 can only output accelerated electron beams. The output electron beam current is a strip-shaped or wire-shaped electron beam current which is emitted in parallel, so that the article can be irradiated in parallel, and the article can be uniformly irradiated. If the length of the article is approximately the same as the opening of the fourth beam hole 42, the strip-shaped or filament-shaped electron beam emitted from the accelerating structure 1 can be completely radiated onto the article, so that the radiation utilization rate of the electron beam is improved, and the electron beam is fully utilized.
The rf power module 70 is connected to the first coupling port 13. The input coupling member 10 may initially communicate with the input coupling cavity 11 through the first coupling port 13, and the first coupling port 13 communicates with the rf power assembly 70, so that power energy can be loaded into the input coupling cavity 11 and can be transmitted along the input coupling cavity 11 to the beam focusing cavity 21, the accelerating cavity 31 and the output coupling cavity 41, so that electrons can be continuously absorbed and accelerated in the transmission process of the input coupling cavity 11, the beam focusing cavity 21, the accelerating cavity 31 and the output coupling cavity 41.
The radiation processing device provided by the embodiment of the invention comprises an accelerating structure, an electron gun, a titanium film and a radio frequency power assembly, wherein the electron gun and the titanium film enclose the accelerating structure, so that the input coupling cavity, the beam bunching cavity, the accelerating cavity and the output coupling cavity form a vacuum channel, and electrons are accelerated in the vacuum channel. The radio frequency power component is connected with the first coupling port in the accelerating structure and used for providing power required by the accelerating electric field to the accelerating structure. In the embodiment of the invention, the first coupling port is connected with the radio frequency power assembly by arranging the accelerating structure, and the accelerating electric field is provided for the input coupling cavity, the beam bunching cavity, the accelerating cavity and the output coupling cavity, so that a ribbon-shaped or filiform electron beam which is emitted in parallel is obtained, the uniform radiation is facilitated, and the utilization rate of the electron beam is improved.
In some embodiments, as shown in fig. 8, the rf power assembly 70 includes a power source 71, a transmission waveguide 72, and an input waveguide 73. The power source 71 is used to provide power. The transmission waveguide 72 is connected to the power source 71 for transmitting power out of the power source. One end of the input waveguide 73 is connected with one end of the transmission waveguide 72 far away from the power source 71, and the other end of the input waveguide 73 is connected with the first coupling port 13, that is, one end of the transmission waveguide 72 is connected with the power source, and the other end is connected with the input waveguide 73, so that the power of the power source 71 is transmitted to the input waveguide 73, and the input waveguide 73 inputs the power into the input coupling cavity 11 through the first coupling port 13, so as to provide the power required by the accelerating electric field into the accelerating structure 1.
In some embodiments, as shown in fig. 1 and 8, the radiation processing apparatus further includes an output waveguide 45 and a load 46, one end of the output waveguide 45 is connected to the second coupling port 43, and the other end of the output waveguide 45 is connected to the load 46. The output coupling member 40 is provided with a second coupling port 43 communicated with the output coupling cavity 41, and the second coupling port 43 is communicated with the output waveguide 45 so as to output the residual power energy in the output coupling cavity 41 out of the output coupling cavity 41. The load 46 absorbs the remaining power energy through the output waveguide 45.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention.
Claims (10)
1. An accelerating structure for accelerating electrons emitted from an electron gun, comprising:
the input coupling piece is provided with a hollow input coupling cavity, two first beam flow holes which are arranged at intervals along a first direction and used for particles to pass through are formed in the input coupling piece, and the two first beam flow holes are communicated with the input coupling cavity along the first direction; the input coupling piece is provided with a first coupling port which is arranged at intervals with the two first beam current holes and is used for feeding power, and the first coupling port is communicated with the input coupling cavity;
the bunching piece is provided with a hollow bunching cavity, the bunching piece is provided with two second bunching holes which are arranged at intervals along the first direction and used for particles to pass through, and the two second bunching holes are communicated with the bunching cavity along the first direction;
the accelerating part is provided with two third beam holes which are arranged at intervals along the first direction and used for particles to pass through, and the two third beam holes are communicated with the accelerating cavity along the first direction;
the output coupling piece is provided with two fourth beam holes which are arranged at intervals along the first direction and are used for particles to pass through, and the two fourth beam holes are communicated with the output coupling cavity along the first direction; the output coupling piece is provided with second coupling ports which are arranged at intervals with the two fourth beam holes and used for power feed-out, and the second coupling ports are communicated with the output coupling cavity;
the electron gun comprises an input coupling cavity, a beam converging cavity, an accelerating cavity, an output coupling cavity, a first beam-forming hole, a second beam-forming hole, a third beam-forming hole, a fourth beam-forming hole, a third beam-forming hole and a fourth beam-forming hole, wherein the input coupling cavity, the beam converging cavity, the accelerating cavity and the output coupling cavity are sequentially communicated in a first direction, the first beam-forming hole, the second beam-forming hole, the third beam-forming hole and the fourth beam-forming hole are identical in cross section, the cross section is vertical to the first direction, the cross section is long in strip shape, and the first beam-forming hole is used for being completely tightly attached to the electron gun so that electrons emitted by the electron gun all enter the input coupling cavity through the first beam-forming hole.
2. An accelerating structure as set forth in claim 1, wherein both ends of the length direction of the cross section are arcs.
3. An acceleration structure according to claim 2, characterized in, that the aspect ratio of the cross-section is larger than 15.
4. The accelerating structure of claim 3, wherein said plurality of said bunchers are connected in series along said first direction.
5. The accelerating structure of claim 3, wherein there are a plurality of said accelerating members, and a plurality of said accelerating members are connected in series along said first direction.
6. The accelerating structure of claim 1, further comprising a cooling member that surrounds the focusing member and the accelerating member about the first direction.
7. The accelerating structure of claim 6, wherein said cooling member has a water injection port and a water outlet port, said water injection port being spaced apart from said water outlet port.
8. A radiation machining apparatus, comprising:
an accelerating structure as set forth in any one of claims 1 to 7;
an electron gun disposed proximate the first beam aperture distal from the beam focusing member;
a titanium membrane positioned at an end of the output coupling in the acceleration structure distal from the accelerator to close off one of the fourth beam-aperture apertures;
and the radio frequency power component is connected with the first coupling port.
9. The radiation processing apparatus of claim 8, wherein the rf power assembly comprises:
a power source to provide power;
a transmission waveguide connected to the power source;
and one end of the input waveguide is connected with one end, far away from the power source, of the transmission waveguide, and the other end of the input waveguide is connected with the first coupling port.
10. A radiation processing device as claimed in claim 9, further comprising an output waveguide and a load, one end of said output waveguide being connected to said second coupling port and the other end of said output waveguide being connected to said load.
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| JP4517097B2 (en) * | 2008-02-27 | 2010-08-04 | 株式会社アキュセラ | Accelerator generating electron beam |
| US9380695B2 (en) * | 2014-06-04 | 2016-06-28 | The Board Of Trustees Of The Leland Stanford Junior University | Traveling wave linear accelerator with RF power flow outside of accelerating cavities |
| CN110113859A (en) * | 2019-06-12 | 2019-08-09 | 中广核中科海维科技发展有限公司 | A kind of low energy irradiation linear accelerator |
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