CN113820052B - Methods for the Characterization of Stress in Dielectric Materials - Google Patents

Methods for the Characterization of Stress in Dielectric Materials Download PDF

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CN113820052B
CN113820052B CN202110996058.6A CN202110996058A CN113820052B CN 113820052 B CN113820052 B CN 113820052B CN 202110996058 A CN202110996058 A CN 202110996058A CN 113820052 B CN113820052 B CN 113820052B
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stress
terahertz wave
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CN113820052A (en
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王志勇
康凯
李传崴
王世斌
李林安
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Tianjin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/24Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet

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Abstract

A method for characterizing stress in a dielectric material, comprising: the source terahertz wave is subjected to first modulation by parallel modulation, first front polarization modulation and focusing modulation, passes through a region of the sample, and is received as a first signal by parallel modulation, first rear polarization modulation and focusing modulation; performing second modulation on the source terahertz wave through parallel modulation, second front polarization modulation and focusing modulation, enabling the source terahertz wave to pass through the region of the sample along the same direction of the terahertz wave after first modulation, and receiving the source terahertz wave as a second signal through the parallel modulation, second rear polarization modulation and focusing modulation; the difference in amplitude of the first signal and the second signal is calculated to obtain the direction of the two principal optical axes in the region and the refractive index difference in the directions of the two principal optical axes to characterize the intensity of the principal stress difference in the region and its direction.

Description

用于介电材料中应力的表征方法Methods for Characterizing Stress in Dielectric Materials

技术领域Technical Field

本发明属于材料测试表征技术领域,尤其涉及一种用于介电材料中应力的表征方法。The invention belongs to the technical field of material testing and characterization, and in particular relates to a method for characterizing stress in a dielectric material.

背景技术Background Art

在测量不透光电介质中的应力方面,现有技术局限于单点测量在于其复杂的实验步骤而难以获得全场应力,因此难以实现快速全场测量。In terms of measuring stress in light-opaque media, the existing technology is limited to single-point measurement due to its complex experimental steps and difficulty in obtaining full-field stress, thus making it difficult to achieve rapid full-field measurement.

在材料加工和使用过程中,材料的内部应力是材料失效和破坏的因素之一,特别是在多层粘接结构中。使用“偏光仪”观察透明材料,可以直观地获得内部应力的大小和方向,这种方法无法用于不透明材料内部应力的获取。不透明材料的内部应力可以通过小孔法获得,但是这是有一种有损的方法。During material processing and use, the internal stress of the material is one of the factors that lead to material failure and damage, especially in multi-layer bonding structures. Using a "polarimeter" to observe transparent materials can intuitively obtain the magnitude and direction of internal stress, but this method cannot be used to obtain the internal stress of opaque materials. The internal stress of opaque materials can be obtained by the pinhole method, but this is a lossy method.

太赫兹波对于大多数的介电材料有良好的透过性,因此可以基于太赫兹波,建立一种测量不透明介电材料内部应力的无损检测方法。近年来,由于太赫兹系统的小型化和低成本化的趋势,越来越多的工业、民用产品流水线在配合太赫兹成像系统完成快速无损检测。太赫兹无损检测广泛应用于塑料材料、陶瓷材料和半导体材料等的检测。塑料材料在承受载荷出现应变的状态下由各向同性变成各向异性并展现出对光的双折射的现象,不透明的塑料材料的内部应力可以由太赫兹波测量。陶瓷基复合材料通常用于制造航空发动机叶片表面的热障涂层。太赫兹波可以透过热障涂层,并检测涂层内部各种成分厚度;其内部的应力也可以由太赫兹波测量。半导体中的应力应变可以提高芯片性能,例如应变硅技术物理拉伸或压缩硅晶体,进而增加载流子迁移率并增强晶体管的性能。半导体中的应力同样可以由太赫兹波测量。Terahertz waves have good permeability for most dielectric materials, so a non-destructive testing method for measuring the internal stress of opaque dielectric materials can be established based on terahertz waves. In recent years, due to the trend of miniaturization and low cost of terahertz systems, more and more industrial and civilian product lines are using terahertz imaging systems to complete rapid non-destructive testing. Terahertz non-destructive testing is widely used in the detection of plastic materials, ceramic materials, and semiconductor materials. When plastic materials are subjected to load and strain, they change from isotropic to anisotropic and show birefringence to light. The internal stress of opaque plastic materials can be measured by terahertz waves. Ceramic-based composites are often used to manufacture thermal barrier coatings on the surface of aircraft engine blades. Terahertz waves can penetrate thermal barrier coatings and detect the thickness of various components inside the coating; its internal stress can also be measured by terahertz waves. Stress and strain in semiconductors can improve chip performance. For example, strained silicon technology physically stretches or compresses silicon crystals, thereby increasing carrier mobility and enhancing transistor performance. Stress in semiconductors can also be measured by terahertz waves.

因此,亟待提出一种能够快速测量不透光的电解质试样中各点处的应力的方法,一方面对测量效率提出了很高的要求,计算量不能大,否则难以通过快速逐点扫描的方式获得全场应力分布;同时,对测量准确性也提出了很高的要求,并且不能对试样造成破坏。目前尚未见到能够满足上述快速、无损、准确等诸多要求的测试或表征方法。Therefore, it is urgent to propose a method that can quickly measure the stress at each point in the opaque electrolyte sample. On the one hand, it places high demands on the measurement efficiency and the amount of calculation cannot be large, otherwise it is difficult to obtain the full-field stress distribution by fast point-by-point scanning; at the same time, it also places high demands on the measurement accuracy and cannot cause damage to the sample. At present, there is no test or characterization method that can meet the above requirements of fast, non-destructive, and accurate.

发明内容Summary of the invention

为了部分地在一定程度上解决上述技术问题,本发明提出了一种用于介电材料中应力的表征方法,其特征在于,包括:步骤a.经由平行调制、第一前偏振调制、聚焦调制对源太赫兹波进行第一调制并使其穿过试样的一区域后经由平行调制、第一后偏振调制、聚焦调制后作为第一信号被接收;步骤b.经由平行调制、第二前偏振调制、聚焦调制对源太赫兹波进行第二调制并使其沿经第一调制后的太赫兹波相同的方向穿过试样的上述区域后经由平行调制、第二后偏振调制、聚焦调制后作为第二信号被接收;步骤c.计算第一信号与第二信号的幅值差异,从而获得在该区域的两个主光轴的方向和在所述两个主光轴方向上的折射率差,以表征该区域的主应力差的强度及其方向;其中,所述第一前偏振调制与第一后偏振调制的调制方向彼此正交,并且所述第二前偏振调制与第二后偏振调制的调制方向也彼此正交。In order to partially solve the above technical problems to a certain extent, the present invention proposes a method for characterizing stress in a dielectric material, which is characterized by comprising: step a. performing a first modulation on a source terahertz wave through parallel modulation, a first front polarization modulation, and a focusing modulation, and causing the source terahertz wave to pass through an area of a sample and then be received as a first signal through parallel modulation, a first rear polarization modulation, and a focusing modulation; step b. performing a second modulation on the source terahertz wave through parallel modulation, a second front polarization modulation, and a focusing modulation, and causing the source terahertz wave to pass through the above area of the sample in the same direction as the terahertz wave after the first modulation and then be received as a second signal through parallel modulation, a second rear polarization modulation, and a focusing modulation; step c. calculating the amplitude difference between the first signal and the second signal, thereby obtaining the directions of the two main optical axes in the area and the refractive index difference in the directions of the two main optical axes, so as to characterize the intensity and direction of the principal stress difference in the area; wherein the modulation directions of the first front polarization modulation and the first rear polarization modulation are orthogonal to each other, and the modulation directions of the second front polarization modulation and the second rear polarization modulation are also orthogonal to each other.

进一步而言,所述第一前偏振调制与第二前偏振调制的偏振方向不同。Furthermore, the polarization directions of the first front polarization modulation and the second front polarization modulation are different.

进一步而言,步骤a和步骤b均在暗场环境中进行。Furthermore, both step a and step b are performed in a dark field environment.

进一步而言,所述源太赫兹波为经由时域太赫兹系统所发射的太赫兹波,其频率0.2-3THz。Furthermore, the source terahertz wave is a terahertz wave emitted by a time-domain terahertz system, and its frequency is 0.2-3 THz.

进一步而言,所述区域为直径不超过3mm-7mm的圆形区域。Furthermore, the area is a circular area with a diameter not exceeding 3mm-7mm.

进一步而言,试样的所述区域的主应力差为Δσ=Δn/C,其中,Δσ为第一主应力方向与第二主应力方向上的主应力差,Δn为两个主光轴方向上的折射率差,C为在所述太赫兹波的作用下该材料的应力光学系数,其中,两个主应力的方向与两个主光轴的方向一致。Furthermore, the principal stress difference in the area of the sample is Δσ=Δn/C, wherein Δσ is the principal stress difference between the first principal stress direction and the second principal stress direction, Δn is the refractive index difference in the directions of the two principal optical axes, and C is the stress optical coefficient of the material under the action of the terahertz wave, wherein the directions of the two principal stresses are consistent with the directions of the two principal optical axes.

进一步而言,穿过试样后被接收的太赫兹波的电场信号的幅值为Furthermore, the amplitude of the electric field signal of the terahertz wave received after passing through the sample is

Figure BDA0003234099130000021
Figure BDA0003234099130000021

其中,f为源太赫兹波的频率,d为试件的厚度,c为光速,θ为试件中第一主应力的方向,

Figure BDA0003234099130000022
为前偏振调制的方向;所述的第一主应力的方向θ与主应力差Δσ为待测量,所述的穿过试样后被接收的太赫兹波的电场信号的幅值为实验测量量。Where, f is the frequency of the source terahertz wave, d is the thickness of the specimen, c is the speed of light, and θ is the direction of the first principal stress in the specimen.
Figure BDA0003234099130000022
is the direction of the front polarization modulation; the direction θ of the first principal stress and the principal stress difference Δσ are to be measured, and the amplitude of the electric field signal of the terahertz wave received after passing through the sample is the experimental measurement quantity.

进一步而言,在第一偏振调制方向为0,第二偏振调制方向为π/4的情况下,记所述的第一信号的幅值为A1,第二信号的幅值为A2,所述(第一)主应力方向θ为Further, when the first polarization modulation direction is 0 and the second polarization modulation direction is π/4, the amplitude of the first signal is A 1 , the amplitude of the second signal is A 2 , and the (first) principal stress direction θ is

Figure BDA0003234099130000023
并且所述主应力差为
Figure BDA0003234099130000023
And the principal stress difference is

Figure BDA0003234099130000024
Figure BDA0003234099130000025
Figure BDA0003234099130000024
or
Figure BDA0003234099130000025

或者,所述主应力差可通过。

Figure BDA0003234099130000026
求得。Alternatively, the principal stress difference may be passed through.
Figure BDA0003234099130000026
To obtain.

进一步的,在所述太赫兹波的作用下该材料的应力光学系数C可通过查表或标定实验确定;或者,材料的应力光学系数C通过下述标定实验测得:步骤a.经由平行调制、标定前偏振调制、聚焦调制对源太赫兹波进行调制并使其穿过试样的一区域后经由平行调制、标定后偏振调制、聚焦调制后作为标定信号被接收;步骤b.对一已知应力分布的区域的试件进行步骤a所述的标定测量,其中,所述的已知应力分布的区域为四点弯加载的纯弯曲区域或拉伸加载的均匀应力区域;步骤c.计算标定信号的幅值差异,从而获得在该区域的两个主光轴的方向及在所述两个主光轴方向上的折射率差,结合步骤b所述的已知应力分布,计算材料的应力光学系数C;其中,所述标定前偏振调制与标定后偏振调制的调制方向彼此正交,并且所述标定前偏振调制与水平方向呈45°。Further, under the action of the terahertz wave, the stress optical coefficient C of the material can be determined by table lookup or calibration experiment; or, the stress optical coefficient C of the material is measured by the following calibration experiment: step a. modulating the source terahertz wave through parallel modulation, polarization modulation before calibration, and focusing modulation, and making it pass through an area of the sample and then be received as a calibration signal through parallel modulation, polarization modulation after calibration, and focusing modulation; step b. performing the calibration measurement described in step a on a specimen in an area with known stress distribution, wherein the area with known stress distribution is a pure bending area under four-point bending loading or a uniform stress area under tensile loading; step c. calculating the amplitude difference of the calibration signal, thereby obtaining the directions of the two main optical axes in the area and the refractive index difference in the directions of the two main optical axes, and calculating the stress optical coefficient C of the material in combination with the known stress distribution described in step b; wherein the modulation directions of the polarization modulation before calibration and the polarization modulation after calibration are orthogonal to each other, and the polarization modulation before calibration is 45° with the horizontal direction.

进一步而言,已知的主应力差Δσ,第一主应力方向θ和被接收的太赫兹波的电场信号A求得,所述的应力光学系数C为Further, the known principal stress difference Δσ, the first principal stress direction θ and the electric field signal A of the received terahertz wave are obtained, and the stress optical coefficient C is

Figure BDA0003234099130000031
Figure BDA0003234099130000031

本发明的有益效果包括但不限于:此方法、装置及系统适用于各种介电材料中的内部应力场的测量。此方法针对介电材料的内部应力表征问题,给出了一种无损的非接触的得到材料内部应力场的新型检测手段。此方法可以便利得获得材料内部的应力场信息,包括主应力差的分布和第一主应力的分布。主应力差是材料失效行为的重要判据之一。基于主应力差的分布,可以预测材料内部发生应力集中现象的具体位置。更重要的是,此方法是一种定性且可以定量表征方法,主应力差的大小可以检验具体结构的设计是否合理,具体零件是否合格和具体服役调剂下是否安全。而主应力方向对结构的设计,尤其是纤维增强材料的设计优化有重要意义。此方法还可以具体地检测材料的纤维增强方向排布是否合理。The beneficial effects of the present invention include but are not limited to: this method, device and system are suitable for measuring the internal stress field in various dielectric materials. This method is aimed at the problem of characterizing the internal stress of dielectric materials, and provides a new type of non-destructive and non-contact detection method for obtaining the internal stress field of the material. This method can conveniently obtain the stress field information inside the material, including the distribution of the principal stress difference and the distribution of the first principal stress. The principal stress difference is one of the important criteria for the failure behavior of the material. Based on the distribution of the principal stress difference, the specific location where the stress concentration phenomenon occurs inside the material can be predicted. More importantly, this method is a qualitative and quantitative characterization method. The size of the principal stress difference can verify whether the design of the specific structure is reasonable, whether the specific parts are qualified, and whether it is safe under specific service adjustments. The principal stress direction is of great significance to the design of the structure, especially the design optimization of fiber-reinforced materials. This method can also specifically detect whether the fiber reinforcement direction arrangement of the material is reasonable.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

后文将参照附图以示例性而非限制性的方式详细描述本发明的一些具体实施例。附图中相同的附图标记标示了相同或类似的部件或部分。本领域技术人员应该理解,这些附图未必是按比例绘制的。Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-restrictive manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale.

图1示出了了根据本发明实施例的偏振时域太赫兹系统的基本结构和组成;FIG1 shows the basic structure and composition of a polarization time-domain terahertz system according to an embodiment of the present invention;

图2示出了偏振方向与主应力方向,包括第一偏振方向和第二偏振方向;FIG2 shows polarization directions and principal stress directions, including a first polarization direction and a second polarization direction;

图3示出了根据本发明实施例中所使用的四点弯加载测试装置的主要作用单元;FIG3 shows the main function units of the four-point bending loading test device used in an embodiment of the present invention;

图4示出了根据本发明实施例中受到四点弯加载的试样的俯视图和侧视图,从图中ROI为测量区域;FIG4 shows a top view and a side view of a specimen subjected to four-point bending loading according to an embodiment of the present invention, where ROI is a measurement area;

图5示出了根据本发明实施例中受到四点弯加载的试样的ROI区域中6个测量点的太赫兹信号及其对应的点的主应力差,以体现不同应力作用下的太赫兹信号的变化;FIG5 shows the terahertz signals of six measuring points in the ROI region of a sample subjected to four-point bending loading and the principal stress differences of the corresponding points according to an embodiment of the present invention, so as to reflect the changes of the terahertz signals under different stresses;

图6示出了根据本发明实施例中受到四点弯加载的试样的ROI区域的太赫兹波的信号的幅值分布,即太赫兹波信号的峰值与谷值的差;FIG6 shows the amplitude distribution of the terahertz wave signal in the ROI area of the sample subjected to four-point bending loading according to an embodiment of the present invention, that is, the difference between the peak value and the valley value of the terahertz wave signal;

图7示出了根据测得的折射率差值和计算得到的主应力差值,以及根据不同点的折射率差值和主应力差值所拟合得到的用于表示应力光学系数的拟合线;FIG7 shows a fitting line for representing the stress optical coefficient obtained by fitting the measured refractive index difference and the calculated principal stress difference, and the refractive index difference and the principal stress difference at different points;

图8示出了根据本发明另一实施例的用于测定或标定试样的光学应力系数的实验装置-对径受压圆盘测试实验装置;FIG8 shows an experimental device for measuring or calibrating the optical stress coefficient of a sample according to another embodiment of the present invention - a radial compression disk test experimental device;

图9示出了根据本发明另一实施例的用于测定或标定试样的光学应力系数的实验装置作业时的圆盘状的试样的受加载情况及ROI测试区域;FIG9 shows the loading condition of a disk-shaped sample and the ROI test area when an experimental device for measuring or calibrating the optical stress coefficient of a sample according to another embodiment of the present invention is in operation;

图10中的(a)和(b)分别示出了根据本发明实施例的对径受压圆盘在受到加载时测试区域中主应力方向的解析解的全场分布(即各点处的主应力方向的解析解)及其对应的主应力差的解析解;FIG. 10 (a) and (b) respectively show the full-field distribution of the analytical solution of the principal stress direction in the test area of the radially compressed disk when loaded (i.e., the analytical solution of the principal stress direction at each point) and the corresponding analytical solution of the principal stress difference according to an embodiment of the present invention;

图11中的(a)和(b)分别示出了根据本发明实施例的对径受压圆盘在受到加载时测试区域中不同点处穿过的太赫兹波信号的幅值(分布),其中图11a中

Figure BDA0003234099130000041
图11b中
Figure BDA0003234099130000042
FIG. 11(a) and (b) respectively show the amplitude (distribution) of the terahertz wave signal passing through different points in the test area when the radially compressed disk is loaded according to an embodiment of the present invention, wherein FIG. 11a
Figure BDA0003234099130000041
In Figure 11b
Figure BDA0003234099130000042

图12中的(a)和(b)分别示出了通过本发明实施例的太赫兹测试方法结合测得的光学应力系数所计算得到的对径受压圆盘在受到加载时测试区域中主应力方向的测试结果的全场分布(即各点处的主应力方向的实验解)及其对应的主应力差的实验解;FIG. 12 (a) and (b) respectively show the full-field distribution of the test results of the principal stress direction of the radially compressed disk in the test area when loaded, calculated by the terahertz test method of the embodiment of the present invention combined with the measured optical stress coefficient (i.e., the experimental solution of the principal stress direction at each point) and the corresponding experimental solution of the principal stress difference;

图13中的(a)和(b)分别示出了通过本发明实施例的太赫兹测试方法结合测得的光学应力系数所计算得到的实验解与理论解的对比。(a) and (b) in FIG. 13 respectively show a comparison between an experimental solution calculated by the terahertz testing method according to an embodiment of the present invention combined with the measured optical stress coefficient and a theoretical solution.

具体实施方式DETAILED DESCRIPTION

下面结合附图和实施例对本发明作进一步的详细说明。可以理解的是,此处所描述的具体实施例仅仅用于解释相关发明,而非对该发明的限定。另外还需要说明的是,为了便于描述,附图中仅示出了与发明相关的部分。需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本发明。The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It will be appreciated that the specific embodiments described herein are only used to explain the relevant inventions, rather than to limit the invention. It should also be noted that, for ease of description, only the parts related to the invention are shown in the accompanying drawings. It should be noted that, in the absence of conflict, the embodiments in this application and the features in the embodiments may be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。此外,还需要说明的是,本申请中使用的例如前、后、上、下、左、右、顶、底、正、背、水平、垂直等表示方位的术语仅仅是为了便于说明,用以帮助对相对位置或方向的理解,并非旨在限制任何装置或结构的取向。It should be noted that the embodiments and features in the embodiments in this application can be combined with each other without conflict. In addition, it should be noted that the terms used in this application such as front, back, up, down, left, right, top, bottom, front, back, horizontal, vertical, etc. to indicate directions are only for the convenience of description to help understand the relative position or direction, and are not intended to limit the orientation of any device or structure.

首先需要说明的是,根据本发明实施例,仅对两主应力方向(两条主光轴方向)之间的折射率差的计算就可以表征待测试样的不同位置处的主应力方向及其差值的大小程度(定性而非精确定量),此处“表征”的含义在于大体估算应力/应力差分布情况,这样的效率很高。然而,应该理解的是,本申请在此方面不受限制。First, it should be noted that, according to the embodiment of the present invention, only the calculation of the refractive index difference between the two principal stress directions (two principal optical axis directions) can characterize the magnitude of the principal stress directions and their differences at different positions of the sample to be tested (qualitative rather than precise quantitative), and the meaning of "characterization" here is to roughly estimate the stress/stress difference distribution, which is very efficient. However, it should be understood that the present application is not limited in this respect.

进一步,如图1所示,用于测试介电材料试样105的偏振时域太赫兹系统/装置(polarization sensitive THz-TDS system/device)100包括发射天线109、第一透镜108、第一偏振镜107、第二透镜106,、第三透镜104、第二偏振镜103、第四透镜102和接收天线101,以及用于对试样105进行四点弯曲加载的加载装置110,该加载装置110中含有如图3所示的加载架20、加载座夹具201、固定座夹具202、加载座203、固定座204和力传感器205等以实现对矩形试样105的四点弯曲加载并测量加载力大小,鉴于四点弯曲实验及相关装置为实验力学中的惯用技术手段和常见装置,本公开中不再对其结构和操作方式予以赘述。然而,应该理解的是,本申请在此方面不受限制。Further, as shown in FIG1 , a polarization sensitive THz-TDS system/device 100 for testing a dielectric material sample 105 includes a transmitting antenna 109, a first lens 108, a first polarizer 107, a second lens 106, a third lens 104, a second polarizer 103, a fourth lens 102, and a receiving antenna 101, as well as a loading device 110 for performing four-point bending loading on the sample 105. The loading device 110 includes a loading frame 20, a loading seat fixture 201, a fixed seat fixture 202, a loading seat 203, a fixed seat 204, and a force sensor 205 as shown in FIG3 to achieve four-point bending loading of the rectangular sample 105 and measure the loading force. In view of the fact that the four-point bending experiment and related devices are conventional technical means and common devices in experimental mechanics, the structure and operation method thereof will not be described in detail in this disclosure. However, it should be understood that the present application is not limited in this respect.

应当注意的是,根据本发明实施例的实验一般是在暗场环境下进行的,所述暗场环境是指环境中没有除发射天线109以外的太赫兹发射源,并且太赫兹波从发射天线109、第一透镜108、第一偏振镜107、第二透镜106,、第三透镜104、第二偏振镜103、第四透镜102最终被接收天线101接收的太赫兹信号幅值较低,接近于噪声的震荡幅值。应当注意的是,此处所述的太赫兹波未经过受力试件105的调制。然而,应该理解的是,本申请在此方面不受限制。It should be noted that the experiment according to the embodiment of the present invention is generally carried out in a dark field environment, which means that there is no terahertz emission source other than the transmitting antenna 109 in the environment, and the terahertz signal amplitude of the terahertz wave finally received by the receiving antenna 101 from the transmitting antenna 109, the first lens 108, the first polarizer 107, the second lens 106, the third lens 104, the second polarizer 103, and the fourth lens 102 is low and close to the oscillation amplitude of the noise. It should be noted that the terahertz wave described here has not been modulated by the stress test piece 105. However, it should be understood that the present application is not limited in this respect.

进一步,发射天线109所发出的源太赫兹波呈发散状,形成为凸透镜的第一透镜108对其进行第一平行调制使其调制为平行光束后入射第一偏振镜107后经由形成为凸透镜的第二透镜106进行调制形成为聚焦的光束入射穿过处于四点弯曲加载状态的试样105的一任意区域,在光束(即太赫兹波)穿过试样105后,经由形成为凸透镜的第三透镜104进行调制后形成为平行光束后通过第二偏振镜103进行第二次偏振调制后穿过形成为凸透镜的第四透镜102受到聚焦调制后被接收天线101作为第一信号被接收。应当注意的是,在上述测量装置和测量过程中,第一偏振镜107和第二偏振镜103的偏振方向彼此正交。然而,应该理解的是,本申请在此方面不受限制。Further, the source terahertz wave emitted by the transmitting antenna 109 is divergent, and the first lens 108 formed as a convex lens performs a first parallel modulation on it so that it is modulated into a parallel light beam, and then enters the first polarizer 107, and then is modulated by the second lens 106 formed as a convex lens to form a focused light beam, and then enters an arbitrary area of the sample 105 in a four-point bending loading state. After the light beam (i.e., the terahertz wave) passes through the sample 105, it is modulated by the third lens 104 formed as a convex lens to form a parallel light beam, and then passes through the second polarizer 103 for a second polarization modulation, and then passes through the fourth lens 102 formed as a convex lens to be focused and modulated, and then is received by the receiving antenna 101 as a first signal. It should be noted that in the above-mentioned measuring device and measuring process, the polarization directions of the first polarizer 107 and the second polarizer 103 are orthogonal to each other. However, it should be understood that the present application is not limited in this regard.

随后,调节改变第一偏振镜107的偏振方向使其与原偏振方向不同,并调节第二偏振镜103的偏振方向,使其与调节后的第一偏振镜107的偏振方向仍保持彼此正交,然后重复上述测试过程,使得入射光仍穿过上述第一次测试的相同的区域,第二次测试后接收天线101接收到的信号记为第二信号。然而,应该理解的是,本申请在此方面不受限制。Subsequently, the polarization direction of the first polarizer 107 is adjusted to be different from the original polarization direction, and the polarization direction of the second polarizer 103 is adjusted to be orthogonal to the polarization direction of the adjusted first polarizer 107, and then the above test process is repeated so that the incident light still passes through the same area as the first test, and the signal received by the receiving antenna 101 after the second test is recorded as the second signal. However, it should be understood that the present application is not limited in this respect.

在上述系统中,太赫兹波(光束)由两个可旋转的光敏天线发射和接收,两个天线的偏振方向被设置成正交。设置第一偏振镜107和第二偏振镜103的部分目的在于获得较高的消光比(extinction rate),他们的偏振方向被设置成与发射天线109和接收天线101一致,即第一偏振镜107的偏振方向与发射天线109的偏振方向一致、第二偏振镜103的偏振方向与接收天线101的偏振方向一致。第二透镜106的作用在于使得太赫兹波以光斑的形式聚焦于并且穿过试样105。光斑的直径约为5mm。上述系统的高可靠频率范围为0.2~2.5THz。实际上,太赫兹波经聚焦调制后在试件表面所形成的光斑区域;受太赫兹波波长和技术限制,远场太赫兹波经透镜聚焦形成的光斑约为3mm-7mm,优选为4mm-6mm,进一步优选为5mm,因此通过二维位移平台逐点扫描成像可以得到更大区域的场信息,可见,本发明采用时域太赫兹系统的另一个技术优势(有益效果)在于其测量的视场范围大。In the above system, the terahertz wave (light beam) is emitted and received by two rotatable photosensitive antennas, and the polarization directions of the two antennas are set to be orthogonal. The purpose of setting the first polarizer 107 and the second polarizer 103 is partly to obtain a higher extinction rate, and their polarization directions are set to be consistent with the transmitting antenna 109 and the receiving antenna 101, that is, the polarization direction of the first polarizer 107 is consistent with the polarization direction of the transmitting antenna 109, and the polarization direction of the second polarizer 103 is consistent with the polarization direction of the receiving antenna 101. The role of the second lens 106 is to focus the terahertz wave in the form of a spot on and pass through the sample 105. The diameter of the spot is about 5mm. The high-reliability frequency range of the above system is 0.2~2.5THz. In fact, the spot area formed on the surface of the specimen after the terahertz wave is focused and modulated; due to the wavelength and technical limitations of the terahertz wave, the spot formed by the far-field terahertz wave focusing through the lens is about 3mm-7mm, preferably 4mm-6mm, and further preferably 5mm. Therefore, the field information of a larger area can be obtained by scanning and imaging point by point through a two-dimensional displacement platform. It can be seen that another technical advantage (beneficial effect) of the present invention using the time-domain terahertz system is that its measurement field range is large.

此外,上述加载装置110为如图3所示的可进行四点弯加载和单轴压加载的装置,并且配备有传感器205以测量加载力的值,其最大测量值为2000N,测试精度为0.6N,其中用于加载的驱动装置为两台未示出的步进电机,其最大扫描范围(maximum scanning range)为50mm×50mm,重复定位精度为2μm。然而,应该理解的是,本申请在此方面不受限制。In addition, the loading device 110 is a device capable of four-point bending loading and uniaxial compression loading as shown in FIG3 , and is equipped with a sensor 205 to measure the value of the loading force, the maximum measurement value of which is 2000 N, and the test accuracy is 0.6 N, wherein the driving device for loading is two stepping motors not shown, the maximum scanning range of which is 50 mm×50 mm, and the repeatability accuracy is 2 μm. However, it should be understood that the present application is not limited in this respect.

太赫兹波的传播可以用琼斯矩阵(Jones Matrix)表示,发射天线所发出的偏振太赫兹波的电场信号可以表示为The propagation of terahertz waves can be represented by the Jones Matrix, and the electric field signal of the polarized terahertz wave emitted by the transmitting antenna can be expressed as

Figure BDA0003234099130000061
Figure BDA0003234099130000061

其中,f和t分别为频率和时间,

Figure BDA0003234099130000062
为偏振方向与水平方向之间的夹角,δ0为太赫兹波的初始相位。Where f and t are frequency and time respectively,
Figure BDA0003234099130000062
is the angle between the polarization direction and the horizontal direction, and δ 0 is the initial phase of the terahertz wave.

太赫兹波依次穿过第一偏振镜107、受到加载的试样105和第二偏振镜103后,接收天线101所最终受到的太赫兹波的电场信号可以表示为:After the terahertz wave passes through the first polarizer 107, the loaded sample 105 and the second polarizer 103 in sequence, the electric field signal of the terahertz wave finally received by the receiving antenna 101 can be expressed as:

Figure BDA0003234099130000063
Figure BDA0003234099130000063

其中,in,

Figure BDA0003234099130000064
Figure BDA0003234099130000064

Figure BDA0003234099130000065
Figure BDA0003234099130000065

Figure BDA0003234099130000066
Figure BDA0003234099130000066

Figure BDA0003234099130000071
Figure BDA0003234099130000071

矩阵

Figure BDA0003234099130000072
和矩阵
Figure BDA0003234099130000073
为第一偏振镜107和第二偏振镜103的琼斯矩阵,体现第一偏振镜107和第二偏振镜103对太赫兹波信号的影响(本公开中太赫兹、太赫兹波、太赫兹光波等近义词如未特别释义具有相同含义),Jθ为受到加载作用的试样的琼斯矩阵,体现加载作用及所产生的应力对太赫兹波的影响,θ为第一主应力方向,向量R代表太赫兹接收天线,其仅能够接收所述电场信号中沿
Figure BDA0003234099130000074
方向偏振的信号部分。然而,应该理解的是,本申请在此方面不受限制。matrix
Figure BDA0003234099130000072
and matrix
Figure BDA0003234099130000073
is the Jones matrix of the first polarizer 107 and the second polarizer 103, reflecting the influence of the first polarizer 107 and the second polarizer 103 on the terahertz wave signal (the synonyms such as terahertz, terahertz wave, terahertz light wave, etc. in the present disclosure have the same meaning if not specifically explained), J θ is the Jones matrix of the sample under loading, reflecting the influence of the loading and the stress generated on the terahertz wave, θ is the first principal stress direction, and the vector R represents the terahertz receiving antenna, which can only receive the electric field signal along the
Figure BDA0003234099130000074
However, it should be understood that the present application is not limited in this regard.

图2示出了偏振方向与主应力方向,综合公式1和公式2,E1可以被简化为:Figure 2 shows the polarization direction and the principal stress direction. Combining Formula 1 and Formula 2, E 1 can be simplified to:

Figure BDA0003234099130000075
Figure BDA0003234099130000075

当太赫兹波穿过受到加载的试样105,其在应力双折射的作用下分(disassembled)为两束偏振太赫兹波。不同的传播速度引起两束偏振太赫兹波之间的相位差。在两束偏振太赫兹波都穿过试样之后,他们将在透过第二偏振镜103之后合成为太赫兹信号E1,E1的幅值可以表示为:When the terahertz wave passes through the loaded sample 105, it is disassembled into two polarized terahertz waves under the action of stress birefringence. The different propagation speeds cause a phase difference between the two polarized terahertz waves. After both polarized terahertz waves pass through the sample, they will be synthesized into a terahertz signal E1 after passing through the second polarizer 103. The amplitude of E1 can be expressed as:

Figure BDA0003234099130000076
Figure BDA0003234099130000076

其中,δ12为两条主光轴之间的应力引起的相位差,当试样的厚度d为常数时,δ12可以通过公式表示为Among them, δ 12 is the phase difference caused by stress between the two main optical axes. When the thickness d of the sample is constant, δ 12 can be expressed by the formula:

Figure BDA0003234099130000077
Figure BDA0003234099130000077

其中,f为太赫兹波的频率,c为光速.Δn为应力双折射所引起的两条主光轴之间的折射率差,其可以表示为Where f is the frequency of the terahertz wave, c is the speed of light. Δn is the refractive index difference between the two main optical axes caused by stress birefringence, which can be expressed as

Δn=C·Δσ (10)Δn=C·Δσ (10)

其中,C为应力光学系数,主应力差Δσ=σ12,综合以上公式可见,幅值A包含了第一主应力方向θ和主应力差Δσ的信息。因此,两次幅值A的测量结果对于解出有两个未知数θ和Δσ的方程式必要的且足够的。如果能从实验中分别测得

Figure BDA0003234099130000078
和π/4时的穿过试样105的太赫兹波的幅值A,则第一主应力方向θ和主应力差Δσ可以通过下式(11)和(12)计算:Where C is the stress optical coefficient, and the principal stress difference Δσ = σ 12 . Combining the above formulas, it can be seen that the amplitude A contains the information of the first principal stress direction θ and the principal stress difference Δσ. Therefore, the two measurements of the amplitude A are necessary and sufficient to solve the equation with two unknowns θ and Δσ.
Figure BDA0003234099130000078
and the amplitude A of the terahertz wave passing through the sample 105 at π/4, the first principal stress direction θ and the principal stress difference Δσ can be calculated by the following equations (11) and (12):

Figure BDA0003234099130000081
Figure BDA0003234099130000081

Figure BDA0003234099130000082
Figure BDA0003234099130000082

同理,通过计算

Figure BDA0003234099130000083
时的幅值A也可以计算出主应力差ΔσSimilarly, by calculating
Figure BDA0003234099130000083
The amplitude A at the time can also be used to calculate the principal stress difference Δσ

Figure BDA0003234099130000084
Figure BDA0003234099130000084

为了获得更精确的结果,可以测量

Figure BDA0003234099130000085
为不同值时的多组主应力Δσ,并对主应力差取平均以获得更精确的最终结果。To obtain more precise results, measure
Figure BDA0003234099130000085
For different values of , multiple sets of principal stresses Δσ are obtained, and the principal stress differences are averaged to obtain a more accurate final result.

接下来,为了进一步获得通过主光轴之间的折射率差精确地获得主应力差,既可以通过查表获得业已录得的应力光学系数也可以通过标定实验来测量不同试样的应力光学系数C。然而,应该理解的是,本申请在此方面不受限制。Next, in order to further accurately obtain the principal stress difference through the refractive index difference between the principal optical axes, the stress optical coefficient that has been recorded can be obtained by looking up a table or the stress optical coefficient C of different samples can be measured by calibration experiments. However, it should be understood that the present application is not limited in this respect.

测定材料试样的应力光学系数C的实施例之一One embodiment of measuring the stress optical coefficient C of a material sample

本实施例所使用的试样由PTFE(聚四氟乙烯,Poly tetra fluoroethylene,简写为PTFE)制成,采用了四点弯曲实验以确定其应力光学系数C,图4中的虚线部分示出了测量区域(即ROI区域),该区域的尺寸为28mm×2mm,其扫描步长为0.5mm。在这个区域中主应力的方向是不变的,只是大小有变化。The sample used in this embodiment is made of PTFE (Poly tetra fluoroethylene, abbreviated as PTFE), and a four-point bending test is used to determine its stress optical coefficient C. The dotted line portion in Figure 4 shows the measurement area (i.e., ROI area), the size of which is 28mm×2mm, and the scanning step length is 0.5mm. The direction of the principal stress in this area is unchanged, but the magnitude varies.

基于弹性力学理论,该ROI区域中沿x轴方向的主应力差可以通过下式(14)计算Based on the theory of elastic mechanics, the principal stress difference along the x-axis in the ROI region can be calculated by the following formula (14):

Figure BDA0003234099130000086
Figure BDA0003234099130000086

其中,l、d和h为图4中所示的弯曲的试样105的几何尺寸,p为静态压力,表1中列出了该试样的相关参数的值。由上式(14)可见,主应力差Δσ与x坐标值成正比,在测量区域中,第一主应力方向θ始终为π/2,根据应力光学效应,应力会调制穿过试样的太赫兹时域信号。图5示出了弯曲试样的实验数据,其中,太赫兹时域信号被沿着x轴方向分别测量了6个点,每个点之间间隔2.5mm。这些点处的穿过的太赫兹波的波形在图5中示出,可见信号的幅值明显受到了应力的调制。接下来,测量区域中的全部点的太赫兹时域信号都被测量,并且通过峰值到谷值的差(peak-trough difference)来计算其幅值,即波形的最大值和最小值之间的差。图6中给出了测量区域中幅值的分布,可见,该幅值由于主应力差Δσ的不断增加而从左到右增加。然而,应该理解的是,本申请在此方面不受限制。Wherein, l, d and h are the geometric dimensions of the bent sample 105 shown in FIG4 , p is the static pressure, and the values of the relevant parameters of the sample are listed in Table 1. It can be seen from the above formula (14) that the principal stress difference Δσ is proportional to the x-coordinate value. In the measurement area, the first principal stress direction θ is always π/2. According to the stress optical effect, the stress will modulate the terahertz time domain signal passing through the sample. FIG5 shows the experimental data of the bent sample, in which the terahertz time domain signal is measured at 6 points along the x-axis direction, with an interval of 2.5 mm between each point. The waveforms of the terahertz waves passing through these points are shown in FIG5 , and it can be seen that the amplitude of the signal is obviously modulated by the stress. Next, the terahertz time domain signals of all points in the measurement area are measured, and their amplitudes are calculated by the peak-trough difference, that is, the difference between the maximum and minimum values of the waveform. FIG6 shows the distribution of the amplitude in the measurement area, and it can be seen that the amplitude increases from left to right due to the continuous increase of the principal stress difference Δσ. However, it should be understood that the present application is not limited in this regard.

表1.四点弯实验参数Table 1. Four-point bending test parameters

Figure BDA0003234099130000091
Figure BDA0003234099130000091

在根据本发明实施例的弯曲实验中,第一偏振镜107的偏振方向角

Figure BDA0003234099130000092
设置为π/4,鉴于A|φ=π/4可以在弯曲实验中测得(即φ=π/4时太赫兹波穿过试样后的信号的幅值),由应力双折射所产生的折射率差Δn能够得以确定,在上述公式(10)中,应力光学系数C为折射率差Δn与主应力差Δσ之间的比值,图7示出了根据本发明实施例的实验测得的Δn和Δσ的结果,相关性系数C根据实验测定的结果通过线性拟合得到,所使用的PTFE材料的最终测得的应力光学相关性系数C为-2.4×10-10Pa-1。然而,应该理解的是,本申请在此方面不受限制。In the bending experiment according to the embodiment of the present invention, the polarization direction angle of the first polarizer 107 is
Figure BDA0003234099130000092
Set to π/4, considering that A| φ=π/4 can be measured in a bending experiment (i.e., the amplitude of the signal after the terahertz wave passes through the sample when φ=π/4), the refractive index difference Δn generated by stress birefringence can be determined. In the above formula (10), the stress optical coefficient C is the ratio between the refractive index difference Δn and the principal stress difference Δσ. FIG7 shows the experimentally measured results of Δn and Δσ according to an embodiment of the present invention. The correlation coefficient C is obtained by linear fitting based on the experimentally measured results. The final measured stress optical correlation coefficient C of the PTFE material used is -2.4×10 -10 Pa -1 . However, it should be understood that the present application is not limited in this regard.

在上述应力光学系数C被测得后,可以用于通过公式(10)-(12)由幅值场来计算应力场,从而快速准确地定量计算获得待测试样的全场的应力分布。然而,应该理解的是,本申请在此方面不受限制。After the stress optical coefficient C is measured, it can be used to calculate the stress field from the amplitude field through formulas (10)-(12), so as to quickly and accurately calculate the stress distribution of the whole field of the sample to be tested. However, it should be understood that the present application is not limited in this respect.

测定材料试样的应力光学系数C的实施例之二Example 2 of Determining the Stress-Optical Coefficient C of a Material Sample

根据本发明的本实施例所使用的试样30由PTFE制成,采用了对径受压圆盘实验以确定其应力光学系数C。The sample 30 used in this embodiment of the present invention is made of PTFE, and a radial compression disk test is used to determine its stress optical coefficient C.

图8中示出了该试验所使用的实验装置的核心单元,包括加载架40以及设置于加载架的固定座404、固定座夹具402、力传感器405、试样30、加载座403等,其中,试样30被加载座夹具401和固定座夹具402加载,力传感器405用于测量加载压力载荷p的大小。图9中的红线部分示出了测量区域,该区域为直径45mm的圆形,其扫描步长为0.5mm。然而,应该理解的是,本申请在此方面不受限制。FIG8 shows the core unit of the experimental device used in the test, including a loading frame 40, a fixed seat 404, a fixed seat fixture 402, a force sensor 405, a sample 30, a loading seat 403, etc., wherein the sample 30 is loaded by the loading seat fixture 401 and the fixed seat fixture 402, and the force sensor 405 is used to measure the size of the loading pressure load p. The red line portion in FIG9 shows the measurement area, which is a circle with a diameter of 45 mm and a scanning step length of 0.5 mm. However, it should be understood that the present application is not limited in this regard.

表2.对径受压圆盘实验参数Table 2. Experimental parameters of radial compression disk

Figure BDA0003234099130000093
Figure BDA0003234099130000093

基于弹性力学理论,对径受压圆盘上应力场的解析解可以表示为Based on the theory of elasticity, the analytical solution to the stress field on a radially compressed disk can be expressed as

Figure BDA0003234099130000101
Figure BDA0003234099130000101

其中,p是施加的载荷,r和d是试件的半径和厚度。第一主应力方向θ和主应力差Δσ可以计算为:Where p is the applied load, r and d are the radius and thickness of the specimen. The first principal stress direction θ and the principal stress difference Δσ can be calculated as:

Figure BDA0003234099130000102
Figure BDA0003234099130000102

图10a和b展示了对径受压圆盘试样30的第一主应力方向θ和主应力差Δσ的解析解。10a and b show the analytical solutions for the first principal stress direction θ and the principal stress difference Δσ of the radially compressed disk specimen 30.

重复上述实施例中在时域太赫兹系统中进行的太赫兹穿透试样30的实验,在将偏振镜的偏振角度设置为不同角度时,测量了太赫兹波的振幅A的分布;分别在

Figure BDA0003234099130000103
Figure BDA0003234099130000104
的条件下,扫描对径受压圆盘试样30上的各个点的太赫兹信号,在扫描过程中加载是静态的。图11a和b给出了不同设置下测量到的穿过圆盘试样30的太赫兹波的振幅分布。若假设已知C的值,则根据公式(11)-(13)就可以计算第一主应力方向θ和主应力差Δσ。为了确定C的值,定义误差函数H(C)的表达式为The experiment of terahertz penetrating the sample 30 in the time-domain terahertz system in the above embodiment was repeated, and the distribution of the amplitude A of the terahertz wave was measured when the polarization angle of the polarizer was set to different angles;
Figure BDA0003234099130000103
and
Figure BDA0003234099130000104
Under the condition of , the terahertz signal of each point on the radially compressed disk sample 30 is scanned. The load is static during the scanning process. Figures 11a and b show the amplitude distribution of the terahertz wave passing through the disk sample 30 measured under different settings. If it is assumed that the value of C is known, the first principal stress direction θ and the principal stress difference Δσ can be calculated according to formulas (11)-(13). In order to determine the value of C, the expression of the error function H(C) is defined as

Figure BDA0003234099130000105
Figure BDA0003234099130000105

其中,Δσi为通过公式(11)-(13)计算的实验结果,Δσi0为公式(17)给出的主应力差解析解,n为实验区域内的测量点数量。当误差函数取得最小值时,此时的C为材料的应力光学系数。再通过公式(11)-(13)由幅值场来计算应力场,从而获得全场的应力分布图,如图12所示。然而,应该理解的是,本申请在此方面不受限制。Wherein, Δσ i is the experimental result calculated by formula (11)-(13), Δσ i0 is the analytical solution of the principal stress difference given by formula (17), and n is the number of measurement points in the experimental area. When the error function reaches the minimum value, C at this time is the stress optical coefficient of the material. The stress field is then calculated from the amplitude field by formula (11)-(13), thereby obtaining a stress distribution diagram of the entire field, as shown in FIG12. However, it should be understood that the present application is not limited in this respect.

对比图12所示的实验实际测量结果和图10所示的理论解析解,可以发现主应力差和主应力方向的分布的测量值都接近于理论值,仅在主应力方向的突变处存在较大误差。此误差是由于此方法的太赫兹波聚焦光斑大小较大,对于应力场突变处的表征受限于空间分辨力限制。可见,实验测量值与理论值基本一致,可以验证此方法的有效性。Comparing the actual experimental measurement results shown in Figure 12 with the theoretical analytical solution shown in Figure 10, it can be found that the measured values of the distribution of the principal stress difference and the principal stress direction are close to the theoretical values, and there is a large error only at the mutation point of the principal stress direction. This error is due to the large size of the terahertz wave focusing spot of this method, and the characterization of the stress field mutation point is limited by the spatial resolution limit. It can be seen that the experimental measurement values are basically consistent with the theoretical values, which can verify the effectiveness of this method.

进一步的,如图13a和b所示,根据本发明实施例之二的对径原盘实验的太赫兹波穿透幅值表征方法所获得的测试结果与理论解析解的平均误差较小,而解析解是在理想情况下得到的,实际测试情况收到温度场、磁场/电场、湿度场等众多外界影响因素,可以认为实验结果更接近真实情况,可见本申请的方法、系统和或装置具有实用性和工业应用价值。Furthermore, as shown in Figures 13a and b, the test results obtained by the terahertz wave penetration amplitude characterization method for the diameter original disk experiment according to the second embodiment of the present invention have a small average error with the theoretical analytical solution, and the analytical solution is obtained under ideal conditions. The actual test situation is affected by many external factors such as temperature field, magnetic field/electric field, humidity field, etc. It can be considered that the experimental results are closer to the actual situation. It can be seen that the method, system and/or device of the present application has practicality and industrial application value.

以上描述仅为本申请的较佳实施例以及对所运用技术原理的说明。本领域技术人员应当理解,本申请中所涉及的发明范围,并不限于上述技术特征的特定组合而成的技术方案,同时也应涵盖在不脱离所述发明构思的情况下,由上述技术特征或其等同特征进行任意组合而形成的其它技术方案。例如上述特征与本申请中公开的(但不限于)具有类似功能的技术特征进行互相替换而形成的技术方案。The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with the technical features with similar functions disclosed in this application (but not limited to) by each other.

Claims (9)

1.一种用于介电材料中应力的表征方法,其特征在于,包括:1. A method for characterizing stress in a dielectric material, comprising: 步骤a.经由平行调制、第一前偏振调制、聚焦调制对源太赫兹波进行第一调制并使其穿过试样的一区域后经由平行调制、第一后偏振调制、聚焦调制后作为第一信号被接收;Step a. performing a first modulation on the source terahertz wave through parallel modulation, first front polarization modulation, and focus modulation, and allowing the wave to pass through an area of the sample and then be received as a first signal through parallel modulation, first rear polarization modulation, and focus modulation; 步骤b.经由平行调制、第二前偏振调制、聚焦调制对源太赫兹波进行第二调制并使其沿经第一调制后的太赫兹波相同的方向穿过试样的上述区域后经由平行调制、第二后偏振调制、聚焦调制后作为第二信号被接收;Step b. performing a second modulation on the source terahertz wave through parallel modulation, a second front polarization modulation, and a focus modulation, and allowing the source terahertz wave to pass through the above-mentioned area of the sample in the same direction as the first modulated terahertz wave, and then undergo parallel modulation, a second rear polarization modulation, and a focus modulation to be received as a second signal; 步骤c.计算第一信号与第二信号的幅值差异,从而获得在该区域的两个主光轴的方向和在所述两个主光轴方向上的折射率差,以表征该区域的主应力差的强度及其方向;Step c. calculating the amplitude difference between the first signal and the second signal, thereby obtaining the directions of the two principal optical axes in the region and the refractive index difference in the directions of the two principal optical axes, so as to characterize the intensity and direction of the principal stress difference in the region; 其中,所述第一前偏振调制与第一后偏振调制的调制方向彼此正交,并且所述第二前偏振调制与第二后偏振调制的调制方向也彼此正交;wherein the modulation directions of the first front polarization modulation and the first rear polarization modulation are orthogonal to each other, and the modulation directions of the second front polarization modulation and the second rear polarization modulation are also orthogonal to each other; 所述第一前偏振调制与第二前偏振调制的偏振方向不同。The polarization directions of the first front polarization modulation and the second front polarization modulation are different. 2.如权利要求1所述的表征方法,其特征在于,步骤a和步骤b均在暗场环境中进行。2. The characterization method according to claim 1, characterized in that both step a and step b are performed in a dark field environment. 3.如权利要求1所述的表征方法,其特征在于,所述源太赫兹波为经由时域太赫兹系统所发射的太赫兹波,其频率0.2-3THz。3. The characterization method according to claim 1, characterized in that the source terahertz wave is a terahertz wave emitted by a time-domain terahertz system, and its frequency is 0.2-3 THz. 4.如权利要求1所述的表征方法,其特征在于,所述区域为直径为3mm-7mm的圆形区域。4. The characterization method according to claim 1, characterized in that the area is a circular area with a diameter of 3 mm-7 mm. 5.如权利要求1所述的表征方法,其特征在于,试样的所述区域的主应力差为Δσ=Δn/C,其中,Δσ为第一主应力方向与第二主应力方向上的主应力差,Δn为两个主光轴方向上的折射率差,C为在所述太赫兹波的作用下该材料的应力光学系数,其中,两个主应力的方向与两个主光轴的方向一致。5. The characterization method according to claim 1 is characterized in that the principal stress difference of the area of the sample is Δσ=Δn/C, wherein Δσ is the principal stress difference between the first principal stress direction and the second principal stress direction, Δn is the refractive index difference in the directions of the two principal optical axes, and C is the stress optical coefficient of the material under the action of the terahertz wave, wherein the directions of the two principal stresses are consistent with the directions of the two principal optical axes. 6.如权利要求1至5中任一项所述的表征方法,其特征在于,穿过试样后被接收的太赫兹波的电场信号的幅值为6. The characterization method according to any one of claims 1 to 5, characterized in that the amplitude of the electric field signal of the terahertz wave received after passing through the sample is
Figure FDA0004190482760000011
Figure FDA0004190482760000011
其中,f为源太赫兹波的频率,d为试件的厚度,c为光速,θ为试件中第一主应力的方向,
Figure FDA0004190482760000012
为前偏振调制的方向;所述的第一主应力的方向θ与主应力差Δσ为待测量,所述的穿过试样后被接收的太赫兹波的电场信号的幅值为实验测量量。
Where, f is the frequency of the source terahertz wave, d is the thickness of the specimen, c is the speed of light, and θ is the direction of the first principal stress in the specimen.
Figure FDA0004190482760000012
is the direction of the front polarization modulation; the direction θ of the first principal stress and the principal stress difference Δσ are to be measured, and the amplitude of the electric field signal of the terahertz wave received after passing through the sample is the experimental measurement quantity.
7.如权利要求6所述的表征方法,其特征在于,在第一偏振调制方向为0,第二偏振调制方向为π/4的情况下,记所述的第一信号的幅值为A1,第二信号的幅值为A2,所述第一主应力的方向θ为7. The characterization method according to claim 6, characterized in that, when the first polarization modulation direction is 0 and the second polarization modulation direction is π/4, the amplitude of the first signal is A 1 , the amplitude of the second signal is A 2 , and the direction θ of the first principal stress is
Figure FDA0004190482760000021
并且所述主应力差为
Figure FDA0004190482760000021
And the principal stress difference is
Figure FDA0004190482760000022
Figure FDA0004190482760000023
Figure FDA0004190482760000022
or
Figure FDA0004190482760000023
或者,所述主应力差可通过
Figure FDA0004190482760000024
求得。
Alternatively, the principal stress difference can be obtained by
Figure FDA0004190482760000024
To obtain.
8.如权利要求5至7中任一项所述的表征方法,其特征在于,在所述太赫兹波的作用下该材料的应力光学系数C可通过查表或标定实验确定;或者,材料的应力光学系数C通过下述标定实验测得:8. The characterization method according to any one of claims 5 to 7, characterized in that the stress optical coefficient C of the material under the action of the terahertz wave can be determined by looking up a table or a calibration experiment; or, the stress optical coefficient C of the material is measured by the following calibration experiment: 步骤a.经由平行调制、标定前偏振调制、聚焦调制对源太赫兹波进行调制并使其穿过试样的一区域后经由平行调制、标定后偏振调制、聚焦调制后作为标定信号被接收;Step a. modulating the source terahertz wave through parallel modulation, polarization modulation before calibration, and focusing modulation, and passing through an area of the sample, and then receiving it as a calibration signal through parallel modulation, polarization modulation after calibration, and focusing modulation; 步骤b.对一已知应力分布的区域的试件进行步骤a所述的标定测量,其中,所述的已知应力分布的区域为四点弯加载的纯弯曲区域或拉伸加载的均匀应力区域;Step b. performing the calibration measurement described in step a on a specimen in an area with known stress distribution, wherein the area with known stress distribution is a pure bending area under four-point bending loading or a uniform stress area under tensile loading; 步骤c.计算标定信号的幅值差异,从而获得在该区域的两个主光轴的方向及在所述两个主光轴方向上的折射率差,结合步骤b所述的已知应力分布,计算材料的应力光学系数C;Step c. Calculate the amplitude difference of the calibration signal to obtain the directions of the two main optical axes in the region and the refractive index difference in the directions of the two main optical axes, and calculate the stress optical coefficient C of the material in combination with the known stress distribution described in step b; 其中,所述标定前偏振调制与标定后偏振调制的调制方向彼此正交,并且所述标定前偏振调制与水平方向呈45°。The modulation directions of the polarization modulation before calibration and the polarization modulation after calibration are orthogonal to each other, and the polarization modulation before calibration is at 45° with the horizontal direction. 9.如权利要求8所述的表征方法,其特征在于,已知的主应力差Δσ,第一主应力方向θ和被接收的太赫兹波的电场信号A求得,所述的应力光学系数C为9. The characterization method according to claim 8, characterized in that the stress optical coefficient C is obtained by using the known principal stress difference Δσ, the first principal stress direction θ and the electric field signal A of the received terahertz wave.
Figure FDA0004190482760000025
Figure FDA0004190482760000025
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