CN113814623A - Welding force correction method and correction device - Google Patents
Welding force correction method and correction device Download PDFInfo
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- CN113814623A CN113814623A CN202111394514.6A CN202111394514A CN113814623A CN 113814623 A CN113814623 A CN 113814623A CN 202111394514 A CN202111394514 A CN 202111394514A CN 113814623 A CN113814623 A CN 113814623A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
Abstract
The invention discloses a welding force correction method and a correction device, wherein the welding force correction method comprises the following steps: installing a correction jig at a welding force applying point of a welding head; determining a change value of the pressure applied by the welding head at the welding force application point; determining a change value of the motor current; and obtaining the welding force coefficient of the welding head according to the change value of the motor current and the change value of the pressure applied by the welding head at the correction jig. According to the invention, the positioning jig is arranged at the welding force application point, and the relation between the motor current and the welding force is accurately calculated by utilizing the change of the motion acceleration, so that the purpose of correcting the welding force coefficient of the welding head is achieved. Meanwhile, peripheral devices are not needed, an external measuring circuit is not needed, the structure of the welding head body is not needed to be changed, secondary measuring errors are avoided, the equipment cost is reduced, and the correction steps of a user are simplified.
Description
Technical Field
The invention relates to the technical field of semiconductor packaging equipment, in particular to a welding force correction method and a welding force correction device.
Background
The correction of the welding force (also called bonding force) refers to that the correction of the welding force is formed by pouring different currents into a welding head (also called bonding head) motor, calibrating the relation between a current command and the actual welding force, and determining a welding force coefficient. At present, an external relay sensor can be utilized, a signal amplifier is used for amplifying a signal of a force sensor through signal conditioning to form a force feedback reading, and then the relationship between the force feedback and the motor current is further calibrated to obtain a welding force coefficient.
However, the force sensor can only provide limited accuracy, and the force sensor itself has a certain degree of unreliability, for example, the sensor mounting position, the mounting method, etc., which can directly introduce errors of the measurement system; in addition, noise and measurement errors (such as temperature drift, zero drift and the like) are introduced secondarily into the signal amplifier, and the measurement of the signal amplifier is also influenced by the electromagnetic noise of a machine table of the wire bonding machine. Therefore, the accuracy of the welding force correction performed by the force sensor is low, and the force sensor and the signal amplifier need to be additionally subjected to daily correction through an external measurement system.
Disclosure of Invention
In view of the above-mentioned shortcomings in the prior art, the present invention provides a welding force calibration method and a calibration device, which can improve the welding force calibration accuracy.
The embodiment adopts the following technical scheme:
a welding force correction method comprising the steps of:
installing a correction jig at a welding force applying point of a welding head;
determining a change value of the pressure applied by the welding head at the welding force application point;
determining a change value of the motor current;
and obtaining the welding force coefficient of the welding head according to the change value of the motor current and the change value of the pressure applied by the welding head on the welding force applying point.
Further, in the welding force correction method, the step of installing a correction jig at a welding force application point of the welding head includes:
and taking the welding tool off the mounting hole on the welding head, and mounting the correcting jig on the welding head through the mounting hole.
Further, in the welding force correction method, the step of determining a variation value of the pressure applied by the welding head at the welding force application point includes:
rotating the welding head along a preset rotation center;
determining the angular acceleration of the welding head during rotation;
determining a relative mass change value of the welding head at a welding force application point;
determining the length of a force arm from a preset rotation center to a welding force application point;
and calculating the change value of the pressure applied by the welding head at the welding force application point according to a first preset formula.
Further, in the welding force correction method, the first preset formula is as follows:
wherein m is the relative mass change value of the welding head at the welding force application point, L1Length of arm of force, w, from center of rotation of welding head to point of application of welding force1Angular acceleration of the welding head during rotation, F1A varying value of pressure is applied to the weld head at the point of application of the welding force.
Further, in the welding force correction method, the step of determining the angular acceleration of the welding head when the welding head rotates includes:
and measuring the angular displacement of the welding joint during rotation through the grating encoder so as to obtain the angular acceleration of the welding joint.
Further, in the welding force correction method, the step of determining a variation value of the pressure applied by the welding head at the welding force application point includes:
moving the welding head along a straight line;
determining the acceleration of the welding head when moving;
determining a relative mass change value of the welding head at a welding force application point;
and calculating the change value of the pressure applied by the welding head at the welding force application point according to a second preset formula.
Further, in the welding force correction method, the second preset formula is as follows:
wherein m iskFor the relative mass change of the welding head at the point of application of the welding force, a1Acceleration of the moving welding head, F2A varying value of pressure is applied to the weld head at the point of application of the welding force.
Further, in the welding force correction method, the step of determining a variation value of the pressure applied by the welding head at the welding force application point includes:
moving or rotating the welding head at a constant speed, or keeping the welding head still;
determining a relative mass change value of the welding head at a welding force application point;
and calculating the change value of the pressure applied by the welding head at the welding force application point.
Further, in the welding force correction method, when the correction jig is mounted on the welding head, the correction jig is symmetrically distributed along the axis of the mounting head.
A welding force correction device applying the welding force correction method is characterized by comprising a welding head, a welding tool and a correction jig, wherein the welding head comprises a mounting hole, and the welding tool or the correction jig is mounted on the welding head through the mounting hole.
Compared with the prior art, the welding force correction method and the welding force correction device provided by the invention can accurately calculate the relation between the motor current and the welding force by installing the positioning jig at the welding force application point and utilizing the change of the motion acceleration, thereby achieving the purpose of correcting the welding force coefficient of the welding head. Meanwhile, peripheral devices are not needed, an external measuring circuit is not needed, the structure of the welding head body is not needed to be changed, secondary measuring errors are avoided, the equipment cost is reduced, and the correction steps of a user are simplified.
Drawings
Fig. 1 is a schematic structural diagram of a welding head provided by the present invention.
FIG. 2 is a flow chart of a welding force calibration method according to the present invention.
Fig. 3 is a flowchart of a first embodiment of step S200 in fig. 2.
FIG. 4 is a power model diagram of the weld head of FIG. 1.
Fig. 5 is a schematic structural view of the welding head of fig. 1 after the correction jig is installed.
FIG. 6 is a power model diagram of the welding head of FIG. 1 after the calibration fixture is installed.
Fig. 7 is a schematic structural diagram of a welding head with a calibration fixture according to another embodiment of the present invention.
Fig. 8 is a flowchart of a second embodiment of step S200 in fig. 2.
Fig. 9 is a flowchart of a third embodiment of step S200 in fig. 2.
10, welding a welding head; 11. a motor; 12. mounting holes; 13. a moving part; 20. a welding tool; 30. correcting the jig; 40. a center of rotation.
Detailed Description
In order to make the objects, technical solutions and effects of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention, which is not further described, and that elements, structures and features of one embodiment may be beneficially incorporated in other embodiments.
Referring to fig. 1, the welding force calibration refers to determining a welding force coefficient by calibrating a relationship between a current command of the motor 11 and an actual welding force of the welding head 10 by injecting different currents into the motor 11 of the welding head 10. The invention provides a welding force correction method, which can obtain more accurate welding force coefficient so as to improve the welding quality in the subsequent welding process of a welding head 10. Referring to fig. 2, the welding force calibration method of the present invention first includes the steps of:
s100, mounting a correction jig at a welding force applying point of a welding head;
the welding head 10 has mounted thereon a welding tool 20, the welding tool 20 being adapted to contact a workpiece and apply a welding force, the welding tool 20 being mounted on the moving part 13 of the welding head 10 at a welding force application point. The welding tool 20 is generally installed on the welding head 10 through the installation hole 12, and the location of the installation hole 12 is the location of the welding force application point, therefore, the welding tool 20 on the welding head 10 can be removed from the installation hole 12 of the welding tool 20 and replaced by the correction jig 30, at this time, the inertia/mass of the welding head 10 at the welding force application point is changed, and the motor current is changed, and then the relation between the inertia/mass change and the current change is inversely calculated, so that the welding force coefficient can be calculated.
In some embodiments, the bonding tool 20 may be a riving knife and the moving member 13 may be a transducer, the riving knife being mounted to a horn of the transducer through the mounting hole 12. The transducer may be made of a number of standard piezo-ceramic elements separated by thin metal plates, clamped together at high pressure. When an alternating voltage is applied to the ceramic element, a corresponding electric field is generated, which causes a change in the thickness of the ceramic element and causes a pressure wave to be transmitted through the riving knife and focused onto the workpiece.
If the calibration jig 30 is mounted directly on the transducer horn, uncertainty in the inertia/mass variation of the bond head 10 may result due to the inability to accurately position. By using the original mounting hole 12, the calibration jig 30 matched with the original mounting hole is designed, and in the calibration process, the riving knife is taken down and replaced by the calibration jig 30, so that the position of the calibration jig 30 can be accurately positioned, and the calibration jig 30 is still positioned at the welding force application point of the welding head 10. At the same time, no modifications need to be made to the corresponding mechanical parts of the weld joint 10, avoiding affecting the integrity of the overall design of the weld joint 10.
Referring to fig. 2, the welding force calibration method of the present invention further includes the steps of:
s200, determining a change value of pressure applied to a welding force application point by a welding head;
the correcting jig 30 is installed through the installation hole 12, so that the inertia/mass change of the welding head 10 at the welding force application point can be accurately determined by utilizing the accurate position of the installation hole 12, the error of a calculation result is avoided, and the accuracy and the simplicity of the calculation of the welding force coefficient are ensured.
In some embodiments, referring to fig. 3, the step S200 of determining the variation value of the applied pressure specifically includes:
s210, rotating the welding head along a preset rotation center;
the center of rotation 40 may be a spindle, and when the welding head 10 is rotated by the spindle to weld, please refer to fig. 4, by establishing a simplified dynamic model of the welding head 10 during rotation, in the case of the welding head 10 with a riving knife, the relationship between the moment of inertia and the angular acceleration of the welding head 10 is listed as follows:
in the equations of figure 4 and above,
S1for the movement trace of the welding head 10 at the mounting hole 12, pass through the pair S1The angular acceleration w of the rotation of the bonding head 10 around the rotation center 40 can be obtained by performing the second differentiation1；
F is the welding force of the welding head 10;
i is the motor current value;
kt is the motor 11 force constant;
L1the arm length of the force is the welding force;
L2the force arm of the acting force of the motor 11 is long;
J1the moment of inertia of the riving knife (without the alignment fixture 30).
In equation (1), the moment of inertia J is due to the accumulated errors in the assembly of the welding head and the difference in the machined part1And the arm length L of the acting force of the motor 112An accurate value cannot be obtained. An accurate relationship between the motor current i and the welding force F cannot be obtained.
To overcome moment of inertia J1And the arm length L of the acting force of the motor 112After the calibration jig 30 is installed in the installation hole 12 in step S100, please refer to fig. 5 and 6, a simplified power model of the welding head 10 after the calibration jig 30 is installed can be established, and the relationship between the moment of inertia and the angular acceleration of the welding head 10 is listed as follows:
wherein, F1The welding force variation value after the correction jig 30 is installed for the welding head 10, m is the equivalent mass variation value brought by the installation of the correction jig 30 for the welding head 10, imIs the current variation value, J, of the motor 11mThe equivalent inertia variation value brought after the correction jig 30 is installed for the bonding head 10, and:
combining the two sets of equations (1) and (3) gives:
since the calibration jig 30 is installed at the welding force application point, there are:
substituting equation (6) into equation (5) can yield:
substituting equation (4) into equation (7) can yield:
it can be seen that the welding force variation value F1And m, L1And w1Accordingly, with reference to fig. 3, step S200 further includes:
s220, determining the angular acceleration of the welding head during rotation;
s230, determining a relative mass change value of the welding head at a welding force application point;
s240, determining the length of a force arm from a preset rotation center to a welding force application point;
and S250, calculating the change value of the pressure applied by the welding head on the welding force application point according to a first preset formula.
In step S220, since the bonding head 10 of the apparatus such as the wire bonding machine can be provided with the high-precision grating encoder, the angular displacement of the bonding head 10 during rotation can be measured by the grating encoder, and the accurate angular acceleration of the bonding head 10 during rotation can be obtained.
In step S230, since m is related to the quality of the positioning jig and the riving knife, the value of m can be directly obtained in the actual calibration process by predetermining the quality of the riving knife and the positioning jig.
In step S240, L1In relation to the position of the rotation center 40 to the mounting hole 12, since the positions of the rotation center 40 and the mounting hole 12 are also predetermined, L can be directly obtained in the actual correction process1The value of (c).
Respectively obtain m and L1And w1The corresponding value can be substituted into a first preset formula, namely the formula (8) obtained by the derivation, and the change value of the pressure applied by the welding head 10 at the position of the riving knife mounting hole 12 can be accurately calculated.
The present invention can also measure the change value of the welding force by other means, and in other embodiments, as shown in fig. 7 and 8, step S200 includes:
s211, moving the welding head along a straight line;
when the welding head 10 performs welding by sliding, the correction jig 30 can be installed at the point of application of the force of the welding head 10, and then motion is applied, so that the purpose of force calibration can be achieved by changing the acceleration. In the case of a bond head 10 with a cleaver, the following equation is obtained:
wherein S is2For the movement trace of the welding head 10 at the mounting hole 12, pass through the pair S1The acceleration a of the moving welding head 10 can be obtained by second differentiation1；
F2Is a change value of the welding force of the welding head 10;
i is the motor current value;
kt is the motor force constant.
After the welding head 10 is provided with the positioning jig, the following results can be obtained:
combining equations (9) and (11), the change value of the welding force of the welding head 10 can be obtained as follows:
wherein ikAs a value of change in current, MKIs the relative mass change value of the weld head at the point where the weld force is applied. It can be seen that the welding force variation value F2And MKAnd a1Accordingly, with reference to fig. 8, step S200 further includes:
s221, determining the acceleration of the welding head during moving;
s231, determining a relative mass change value of the welding head at a welding force application point;
and S241, calculating a change value of the pressure applied by the welding head on the welding force application point according to a second preset formula.
In step S221, the accurate acceleration of the welding head 10 during movement can be acquired by the encoder as well.
In step S231, since MKThe mass of the positioning jig and the cleaver is related, so that the M can be directly obtained in the actual correction process by predetermining the mass of the cleaver and the positioning jigKThe value of (c).
Respectively obtain MKAnd a1The corresponding values are substituted into a second predetermined formula, which is the above-derived formula (12), to accurately calculate the change value of the pressure applied by the welding head 10 at the welding force application point.
The present invention can also measure the welding force variation value by other methods, and in other embodiments, as shown in fig. 9, step S200 includes:
s212, moving or rotating the welding head at a constant speed, or keeping the welding head still;
s222, determining a relative mass change value of the welding head at a welding force application point;
and S232, calculating a change value of the pressure applied to the welding force applying point by the welding head.
During the calibration of the welding head 10, an accelerated movement is not necessary, and the welding force variation of the welding head 10 can be detected in a stationary state or even movement. At this time, in the special case that the acceleration is equal to 0 in the other embodiments, since the force is balanced, the relative mass change value of the welding head 10 at the welding force application point is the welding force change value of the welding head 10.
After obtaining the variation value of the pressure applied by the welding head 10 at the welding force application point, please continue to refer to fig. 1, the welding force calibration method provided by the present invention further includes the steps of:
s300, determining a change value of the motor current;
after the jig is installed, the bonding head is operated at a certain acceleration, and compared with the condition without the jig, the increased motor current i can be obtainedm. At measurement imIn the known case, the steps can be performed:
s400, obtaining a welding force coefficient of the welding head according to the change value of the motor current and the change value of the pressure applied by the welding head on the welding force applying point.
The change value of the motor current is i, i.e. the change value of the motor current is i when the welding head 10 is operated at a certain acceleration after the positioning jig is installed on the welding head 10, and i is the change value of the motor current when the welding head 10 is rotated as an example, compared with the case where the positioning jig is not installedmAt this time, the welding force coefficient is k = F1/im. To this end, the welding force calibration is completed, and the precise moment of inertia of the whole mechanical moving part 13 and the precise arm length of the acting force of the motor 11 with the center of the rotating shaft as the reference are not needed in the calibration process.
The positioning jig is installed by utilizing the installation hole 12 on the welding head 10, so that the aim of correcting the welding force coefficient of the welding head 10 can be fulfilled without peripheral devices, external measuring circuits and changes of the structure of the welding head body and by utilizing the change of the motion acceleration and accurately calculating the relation between the current and the force of the motor. Meanwhile, by adopting the welding force correction method, secondary measurement errors are avoided, the equipment cost is reduced, the measurement precision and reliability are improved, and the operation steps of a user are simplified.
In addition, with continuing reference to fig. 1 and fig. 5, the present invention further discloses a welding force calibration apparatus applying the welding force calibration method, including a welding head 10, a welding tool 20 and a calibration jig 30, wherein the welding head 10 includes a mounting hole 12, and the welding tool 20 or the calibration jig 30 is mounted on the welding head 10 through the mounting hole 12.
The calibration jig 30 may be any jig with a certain weight and different geometric shapes that can be installed at the installation hole 12 of the bonding tool 20 of the wire bonding machine. The jig can be an existing jig (such as a mechanical leveling jig) of the wire bonding machine, or a jig which does not have the mechanical leveling function but has certain quality. The jig may cause a change in acceleration of the welding head 10 (at the same current of the motor 11) or require a greater motor current (at the same acceleration of the welding head 10).
In some embodiments, the calibration jig 30 includes a mounting head that is shaped to match the mounting hole 12 of the bonding tool 20, and the mounting of the calibration jig 30 is achieved by inserting the mounting head into the mounting hole 12.
In some embodiments, after the calibration jig 30 is installed in the installation hole 12, the calibration jig 30 is symmetrically distributed along the axis of the installation hole 12, so that the calibration jig 30 is accurately located at the welding force application point of the welding head 10, and errors are avoided.
It should be understood that equivalents and modifications of the technical solution and inventive concept thereof may occur to those skilled in the art, and all such modifications and alterations should fall within the scope of the appended claims.
Claims (10)
1. A welding force correction method, characterized by comprising the steps of:
installing a correction jig at a welding force applying point of a welding head;
determining a change value of the pressure applied by the welding head at the welding force application point;
determining a change value of the motor current;
and obtaining the welding force coefficient of the welding head according to the change value of the motor current and the change value of the welding head at the welding force application point.
2. The welding force correction method according to claim 1, wherein the step of installing a correction jig at the welding force application point of the welding head includes:
and taking the welding tool down from the mounting hole on the welding head, and mounting the correcting jig on the welding head through the mounting hole.
3. The welding force correction method of claim 1, wherein the step of determining a change value of the welding head pressure applied at the welding force application point comprises:
rotating the welding head along a preset rotation center;
determining the angular acceleration of the welding head during rotation;
determining a relative mass change value of the welding head at a welding force application point;
determining the length of a force arm from a preset rotation center to a welding force application point;
and calculating the change value of the pressure applied by the welding head at the welding force application point according to a first preset formula.
4. The welding force correction method according to claim 3, characterized in that the first preset formula is:
wherein m is the relative mass change value of the welding head at the welding force application point, L1Length of arm of force, w, from center of rotation of welding head to point of application of welding force1Angular acceleration of the welding head during rotation, F1A varying value of pressure is applied to the weld head at the point of application of the welding force.
5. The welding force correction method of claim 3, wherein the step of determining the angular acceleration of the welding head as it rotates comprises:
and measuring the angular displacement of the welding joint during rotation through the grating encoder so as to obtain the angular acceleration of the welding joint.
6. The welding force correction method of claim 2, wherein the step of determining a change value of the welding head pressure applied at the welding force application point comprises:
moving the welding head along a straight line;
determining the acceleration of the welding head when moving;
determining a relative mass change value of the welding head at a welding force application point;
and calculating the change value of the pressure applied by the welding head at the welding force application point according to a second preset formula.
7. The welding force correction method according to claim 6, characterized in that the second preset formula is:
wherein m iskFor the relative mass change of the welding head at the point of application of the welding force, a1Acceleration of the moving welding head, F2A varying value of pressure is applied to the weld head at the point of application of the welding force.
8. The welding force correction method of claim 1, wherein the step of determining a change value of the welding head pressure applied at the welding force application point comprises:
moving or rotating the welding head at a constant speed, or keeping the welding head still;
determining a relative mass change value of the welding head at a welding force application point;
and calculating the change value of the pressure applied by the welding head at the welding force application point.
9. The welding force correcting method according to claim 2, wherein when the correcting jig is mounted on the welding head, the correcting jig is symmetrically distributed along an axis of the mounting head.
10. A welding force correction device to which the welding force correction method according to any one of claims 1 to 9 is applied, characterized by comprising a welding head, a welding tool, and a correction jig, wherein the welding head includes a mounting hole, and the welding tool or the correction jig is mounted on the welding head through the mounting hole.
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| CN113814623B (en) | 2022-02-22 |
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