CN209439591U - Bonding joint device and supersonic bonding machine - Google Patents

Bonding joint device and supersonic bonding machine Download PDF

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Publication number
CN209439591U
CN209439591U CN201821598639.4U CN201821598639U CN209439591U CN 209439591 U CN209439591 U CN 209439591U CN 201821598639 U CN201821598639 U CN 201821598639U CN 209439591 U CN209439591 U CN 209439591U
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CN
China
Prior art keywords
mounting base
swing seat
joint device
pedestal
connect
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Active
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CN201821598639.4U
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Chinese (zh)
Inventor
贺云波
王波
刘青山
刘凤玲
陈桪
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Guangdong Ada Intelligent Equipment Co Ltd
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Guangdong Ada Intelligent Equipment Co Ltd
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Priority to CN201821598639.4U priority Critical patent/CN209439591U/en
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Abstract

The utility model discloses a kind of bonding joint device and supersonic bonding machine, which includes: the first mounting base;Welding mechanism, the welding mechanism include soldering tip;Swing seat, the welding mechanism are fixedly arranged on the swing seat, and the swing seat is rotatablely arranged at first mounting base;And driving mechanism, the driving mechanism enable the soldering tip to the direction rotation close to or far from part to be welded for driving the swing seat to rotate relative to first mounting base;The bonding joint device can be realized under the driving of same driving force, drives soldering tip to drive soldering tip mobile to metal wire to be bonded with higher acceleration, it is short to the metal wire to be bonded mobile time to make the soldering tip, and then improve the efficiency of wire bond;The supersonic bonding machine includes above-mentioned bonding joint device, therefore, the supersonic bonding equipment advantage high for bonding efficiency.

Description

Bonding joint device and supersonic bonding machine
Technical field
The utility model relates to technical field of semiconductors, more particularly to a kind of bonding joint device and supersonic bonding machine.
Background technique
Wire bonder is that wire is electrically connected the one of semiconductor chip and pin using ultrasonic wave, pressure and temperature Kind equipment, it utilizes supersonic generator and chopper, and ultrasonic vibration is applied on the metal filament, in the chip with wire contact Or upper formed is fused above pin, to realize firm electrical connection.
However, when in use, bonding efficiency is lower for wire bond machine at present.
Summary of the invention
Based on this, it is necessary to which providing a kind of bonding joint device and supersonic bonding machine, the bonding joint device can be realized Under the driving of same driving force, drives chopper to drive chopper mobile to metal wire to be bonded with higher acceleration, make described Chopper is short to the metal wire to be bonded mobile time, and then improves the efficiency of wire bond;The supersonic bonding machine packet Above-mentioned bonding joint device is included, therefore, the supersonic bonding equipment advantage high for bonding efficiency.
Specific technical solution is as follows:
A kind of bonding joint device, comprising: the first mounting base;Welding mechanism, the welding mechanism include soldering tip;Swing seat, The welding mechanism is fixedly arranged on the swing seat, and the swing seat is rotatablely arranged at first mounting base;And driving machine Structure, the driving mechanism enable the soldering tip to close for driving the swing seat to rotate relative to first mounting base Or the direction far from part to be welded rotates.
Above-mentioned bonding joint device drives relatively described first installation of the swing seat when in use, by the driving mechanism Seat rotation, the welding mechanism are connect with the swing seat, and the welding mechanism includes soldering tip, and therefore, the swing seat can Drive the soldering tip to the direction rotation close to or far from metal wire to be bonded;Due to swinging under the action of same driving force The acceleration that can reach is greater than the acceleration that linear motion can reach;In turn, the bonding joint device can make soldering tip with Higher acceleration drives soldering tip mobile to metal wire to be bonded, makes the time that the soldering tip is mobile to metal wire to be bonded It is short, and then improve the efficiency of wire bond.
Technical solution is illustrated further below:
In one of the embodiments, bonding joint device further include can flexible restoring organ, it is described can flexible restoring organ Including rotor and fixed body, the rotor can the relatively described fixed body carry out back rotation within the scope of predetermined angle, it is described Rotor is connect with the swing seat, and the fixed body is connect with first mounting base.In this way, when the driving mechanism is shut down When, it is described can flexible restoring organ be able to drive the swing seat and reset, that is, drive the soldering tip to reset, avoid when power is off, It collides.
In one of the embodiments, the swing seat include the first pedestal and the second pedestal, the one of second pedestal End is connect with first pedestal, and second pedestal and first pedestal are arranged in angle, second pedestal and institute Rotor connection is stated, first pedestal is connect with the welding mechanism.In this way, second pedestal is equivalent to swing arm, band First pedestal is moved to swing;The second pedestal and first pedestal are arranged in angle simultaneously, and second pedestal can play The effect for supporting first pedestal, avoids when power is off, and first pedestal is because the gravity decline of itself collides.
The welding mechanism includes energy converter and the second mounting base in one of the embodiments, and the one of the energy converter End is connect with the soldering tip, and second mounting base is connect with first pedestal, and second mounting base includes the first installation Hole and at least two boss, all boss are set to the inner wall of first mounting hole along the same circle spacing, described to change The other end of energy device is arranged in first mounting hole, and the boss is abutted with the side wall of the energy converter.In this way, by described Energy converter converts electrical energy into mechanical energy, i.e. ultrasonic wave, then passes to soldering tip;All boss are arranged along the same circle spacing In the inner wall of first mounting hole, at this point, the energy converter is abutted with the boss, in this way, reduce the energy converter with The contact area of second mounting base reduces the frictional force of the inner wall of the energy converter and first mounting hole in turn.
Bonding joint device further includes fastener in one of the embodiments, and the side wall of second mounting base is equipped with T-type Slot and erecting bed, the T-slot are connected to first mounting hole, and the T-slot includes the length along second mounting base The vertical slot of direction setting, the cell wall of the vertical slot includes the first side wall and the second sidewall opposite with the first side wall, The erecting bed is fixedly arranged on the side wall of second mounting base, and the erecting bed is arranged close to the first side wall, the peace It fills platform and is equipped with connecting hole, the connecting hole runs through the erecting bed and the first side wall, and the fastener passes through the connection Hole is connect with the second sidewall.Since second mounting base is equipped with T slot, the first side wall and institute are connected by fastener When stating second sidewall, second mounting base can deform, at this point, second mounting base " can be embraced with the energy converter Extremely ", in turn, the stability of the energy converter and second mounting base installation is improved.
Bonding joint device further includes displacement sensor in one of the embodiments, and institute's displacement sensors are for detecting The swinging distance of relatively described first mounting base of the swing seat.In this way, displacement sensor monitor the swing of the swing seat away from From, and the distance signal that will test is sent to controller, controller judges what the swing seat was swung according to the distance signal Difference between position and predeterminated position, and then realize the swing position for calibrating the swing seat.
Institute's displacement sensors include grating scale and grating reading head, the grating scale setting in one of the embodiments, In in the swing seat, the grating reading head is correspondingly arranged in first mounting base.In this way, being driven when swing seat is swung The grating scale is mobile, what the grating reading head can be swung by reading the reading of the grating scale to react the swing seat Distance.
Bonding joint device further includes cooling piece in one of the embodiments, and the cooling piece includes that air inlet, air-flow are logical Road and outgassing groove, the outgassing groove are set to the side wall of the cooling piece, the outgassing groove along the length direction of the cooling piece Side wall be equipped with gas outlet, the opening of the outgassing groove is arranged towards the driving mechanism, the gas outlet, the airflow channel And the air inlet connection.In this way, cooling air-flow flows through the airflow channel to the outgassing groove by the air inlet, it is described Outgassing groove is set to the side wall of the cooling piece along the length direction of the cooling piece, in this way, the outgassing groove can will be described Cooling gas is sprayed in the form of an outlet face to the driving mechanism, and then can effectively cover and cool down the driving machine Structure.
The driving mechanism includes voice coil motor in one of the embodiments, and the voice coil motor includes electric mover And motor stator, the electric mover are connect with the swing seat, the motor stator is connect with first mounting base.Such as This, there are voice coil motor the characteristics such as the simple small in size, high speed of structure, high booster response be fast therefore to drive institute by voice coil motor Stating swing seat can make the swing seat have higher acceleration.
On the other hand, the application further relates to a kind of supersonic bonding machine, including bonding joint device.
Above-mentioned supersonic bonding machine drives relatively described first peace of the swing seat when in use, by the driving mechanism Seat rotation is filled, the welding mechanism is connect with the swing seat, and the welding mechanism includes soldering tip, therefore, the swing seat energy Enough drive the soldering tip to the direction rotation close to or far from metal wire to be bonded;Due to putting under the action of same driving force The acceleration that kinetic energy enough reaches is greater than the acceleration that linear motion can reach;In turn, which can make soldering tip Drive soldering tip mobile to metal wire to be bonded with higher acceleration, make the soldering tip to metal wire to be bonded it is mobile when Between it is short, and then improve the efficiency of wire bond.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of bonding joint device;
Fig. 2 is the front view of bonding joint device in Fig. 1;
Fig. 3 is sectional view along A-A in Fig. 2;
Fig. 4 be can flexible restoring organ structural schematic diagram;
Fig. 5 is the structural schematic diagram of the second mounting base;
Fig. 6 is the structural schematic diagram at another visual angle of the second mounting base;
Fig. 7 is B-B direction cross-sectional view in Fig. 6;
Fig. 8 is the structural schematic diagram of cooling piece;
Fig. 9 is the structural schematic diagram of another angle of cooling piece;
Figure 10 be in Fig. 9 C-C to cross-sectional view.
Description of symbols:
10, bonding joint device, 100, welding mechanism, 110, soldering tip, 120, energy converter, the 130, second mounting base, 131, One mounting hole, 132, boss, 133, T-slot, 134, erecting bed, 135, the first side wall, 136, second sidewall, 137, connecting hole, 200, swing seat, the 210, first pedestal, the 220, second pedestal, the 300, first mounting base, the 310, first connector, 320, second connects Junctor, 330, third connector, 340, pressure-bearing body, 400, voice coil motor, 410, electric mover, 420, motor stator, 500, can Flexible restoring organ, 510, rotor, 520, fixed body, 610, grating scale, 620, grating reading head, 700, cooling piece, 710, into Port, 720, airflow channel, 730, outgassing groove.
Specific embodiment
It is below in conjunction with attached drawing and specifically real for the purpose of this utility model, technical solution and advantage is more clearly understood Mode is applied, the utility model is described in further detail.It should be understood that the specific embodiments described herein Only to explain the utility model, the protection scope of the utility model is not limited.
It should be noted that it can directly on the other element when element is referred to as " being set to " another element Or there may also be elements placed in the middle.When element is referred to as " being fixedly arranged on " another element, it can be directly in another yuan On part or there may also be elements placed in the middle.When an element is considered as " connection " another element, it be can be directly It is connected to another element or may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", "left", "right" and similar statement for illustrative purposes only, are not meant to be the only embodiment.
It is important to point out that when element is referred to as " being fixedly arranged on " another element, two elements can be it is integrated, It can be and be detachably connected between two elements.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be The purpose of description specifically embodiment, it is not intended that in limitation the utility model.Term " and or " used herein packet Include any and all combinations of one or more related listed items.
In addition it is also necessary to understand, in the present embodiment, term "lower", "upper", "front", "rear", "left", "right", "inner", "outside", "top", "bottom", " side ", " other side ", " one end ", " other end ", etc. indicated by positional relationship be based on Positional relationship shown in the drawings;The terms such as " first ", " second " are to distinguish different structure members.These terms are only Convenient for description the utility model and simplify description, should not be understood as limiting the present invention.
As depicted in figs. 1 and 2, one of embodiment bonding joint device 10, comprising: the first mounting base 300;Welding Mechanism 100, welding mechanism 100 include soldering tip 110;Swing seat 200, welding mechanism 100 are fixedly arranged on swing seat 200, swing seat 200 It is rotatablely arranged at the first mounting base 300;And driving mechanism, driving mechanism is for driving opposite first installation of swing seat 200 Seat 300 rotates, and enables soldering tip 110 to the direction rotation close to or far from part to be welded.
Above-mentioned bonding joint device 10 drives swing seat 200 with respect to 300 turns of the first mounting base when in use, by driving mechanism Dynamic, welding mechanism 100 is connect with swing seat 200, and welding mechanism 100 includes soldering tip 110, and therefore, swing seat 200 is able to drive weldering First 110 rotate to the direction close to or far from metal wire to be bonded;Since under the action of same driving force, swing can reach Acceleration be greater than the acceleration that can reach of linear motion;In turn, which can make soldering tip 110 with higher Acceleration drive soldering tip 110 mobile to metal wire to be bonded, make the time that soldering tip 110 is mobile to metal wire to be bonded It is short, and then improve the efficiency of wire bond.
As shown in Figure 3 and Figure 4, on the basis of the above embodiments, bonding joint device 10 further include can flexible restoring organ 500, can flexible restoring organ 500 include rotor 510 and fixed body 520, rotor 510 can fix body 520 pre- relatively If carrying out back rotation in angular range, rotor 510 is connect with swing seat 200, and fixed body 520 is connect with the first mounting base 300.Such as This, when driving mechanism shut down when, can flexible restoring organ 500 be able to drive swing seat 200 reset, i.e., drive soldering tip 110 reset, It avoids when power is off, colliding;In this embodiment, can flexible restoring organ 500 be cross-spring bearing, cross-spring axis It contracts and includes rotor 510 and fixed body 520, the first mounting base 300 is connected including spaced first connector 310, second Body 320, third connector 330 and pressure-bearing body 340, third connector 330 are fixedly arranged on pressure-bearing body 340, and third connector 330 with Pressure-bearing body 340 is arranged in angle, and the first connector 310 and the setting of the second connector 320 interval form a holding tank, and first Connector 310 is connect with third connector 330 and pressure-bearing body 340 respectively, the second connector 320 respectively with third connector 330 It is connected with pressure-bearing body 340, swing seat 200 is set to holding tank, and third connector 330 is equipped with connector, one end of swing seat 200 It being connect across connector with driving mechanism, the first connector 310 and the second connector 320 are equipped with the second mounting hole, and second The quantity of body 220 is two, two the second pedestal 220 interval settings, corresponding second mounting hole of second pedestal 220, Second pedestal 220 is equipped with third mounting hole, and cross-spring bearing includes rotor 510 and fixed body 520, and fixed body 520 is fixed In the inner wall of the second mounting hole, rotor 510 is fixedly arranged on the inner wall of third mounting hole;In this way, on the one hand cross-spring bearing rises To the effect of support swing seat 200, the effect of rotating fulcrum is on the other hand also acted as.
As shown in Figure 1, based on any of the above embodiments, swing seat 200 includes the first pedestal 210 and second Body 220, one end of the second pedestal 220 are connect with the first pedestal 210, and the second pedestal 220 is set with the first pedestal 210 in angle It sets, the second pedestal 220 is connect with rotor 510, and the first pedestal 210 is connect with welding mechanism 100.In this way, 220 phase of the second pedestal When in swing arm, the first pedestal 210 of drive is swung;The second pedestal 220 and the first pedestal 210 are arranged in angle simultaneously, and second Body 220 can play the role of supporting the first pedestal 210, avoid when power is off, and the first pedestal 210 is because the gravity of itself declines It collides.
As depicted in figs. 1 and 2, based on any of the above embodiments, welding mechanism 100 includes energy converter 120 and the One end of two mounting bases 130, energy converter 120 is connect with soldering tip 110, and the second mounting base 130 is connect with the first pedestal 210, and second Mounting base 130 includes the first mounting hole 131 and at least two boss 132, and all boss 132 are set to the along the same circle spacing The inner wall of one mounting hole 131, the other end of energy converter 120 are arranged in the first mounting hole 131, the side of boss 132 and energy converter 120 Wall abuts.In this way, converting electrical energy into mechanical energy, i.e. ultrasonic wave by energy converter 120, then pass to soldering tip 110;All boss 132 are set to the inner wall of the first mounting hole 131 along the same circle spacing, at this point, energy converter 120 is abutted with boss 132, in this way, The contact area of energy converter 120 and the second mounting base 130 is reduced, in turn, avoids energy converter 120 and the second mounting base 130 Contact area is excessive, reduces the loss of ultrasonic wave.In this embodiment, the quantity of boss 132 is 6, and 6 boss 132 divide At two points 132 groups of boss, two groups of boss, 132 groups of interval settings, every group 132 groups of boss of quantity is 3, and 3 boss 132 are along same The setting of one circle spacing.
As shown in Figures 5 to 7, based on any of the above embodiments, bonding joint device 10 further includes fastener, and second The side wall of mounting base 130 is equipped with T-slot 133 and erecting bed 134, and T-slot 133 is connected to the first mounting hole 131, and T-slot 133 is wrapped Include along the second mounting base 130 length direction setting vertical slot, the cell wall of vertical slot include the first side wall 135 and with the first side The opposite second sidewall 136 of wall 135, erecting bed 134 is fixedly arranged on the side wall of the second mounting base 130, and erecting bed 134 is close to One side wall 135 is arranged, and erecting bed 134 is equipped with connecting hole 137, and connecting hole 137 runs through erecting bed 134 and the first side wall 135, fastening Part passes through connecting hole 137 and connect with second sidewall 136.Since the second mounting base 130 is equipped with T slot, pass through fastener connection first When side wall 135 and second sidewall 136, the second mounting base 130 can deform, at this point, the second mounting base 130 can be with energy converter 120 " lockings " improve the stability of energy converter 120 and the installation of the second mounting base 130 in turn.In this embodiment, second Side wall 136 is equipped with internal thread hole, and fastener is bolt, and bolt passes through connecting hole 137 and connect with internal thread hole.
Based on any of the above embodiments, bonding joint device 10 further includes displacement sensor, and displacement sensor is used for Detect swinging distance of the swing seat 200 with respect to the first mounting base 300.In this way, displacement sensor monitoring swing seat 200 swing away from From, and the distance signal that will test is sent to controller, controller according to distance signal judge position that swing seat 200 is swung with Difference between predeterminated position, and then realize the swing position of calibration swing seat 200.As shown in figures 1 and 3, in the embodiment On the basis of, displacement sensor includes grating scale 610 and grating reading head 620, and grating scale 610 is set in swing seat 200, grating Read head 620 is correspondingly arranged in the first mounting base 300.In this way, drive grating scale 610 mobile when swing seat 200 is swung, light Grid read head 620 can react the distance of the swing of swing seat 200 by reading the reading of grating scale 610.
As shown in Fig. 8, Fig. 9 and Figure 10, based on any of the above embodiments, bonding joint device 10 further includes cooling piece 700, cooling piece 700 includes air inlet 710, airflow channel 720 and outgassing groove 730, length of the outgassing groove 730 along cooling piece 700 Direction is set to the side wall of cooling piece 700, and the side wall of outgassing groove 730 is equipped with gas outlet, and the opening of outgassing groove 730 is towards driving machine Structure setting, gas outlet, airflow channel 720 and air inlet 710 are connected to.In this way, cooling air-flow flows through air-flow by air inlet 710 Channel 720 to outgassing groove 730, outgassing groove 730 is set to the side wall of cooling piece 700 along the length direction of cooling piece 700, in this way, Outgassing groove 730 can be sprayed cooling gas in the form of an outlet face to driving mechanism, and then be can effectively cover and cooled down Driving mechanism.
As depicted in figs. 1 and 2, based on any of the above embodiments, driving mechanism includes voice coil motor 400, voice coil Motor 400 includes electric mover 410 and motor stator 420, and electric mover 410 connect with swing seat 200, motor stator 420 and The connection of first mounting base 300.In this way, voice coil motor 400 has the characteristics such as the simple small in size, high speed of structure, high booster response be fast, Therefore, drive swing seat 200 that swing seat 200 can be made to have higher acceleration by voice coil motor 400.
The application further relates to a kind of supersonic bonding machine, one of embodiment supersonic bonding machine, including bonding head Device 10.
Above-mentioned supersonic bonding machine drives swing seat 200 with respect to 300 turns of the first mounting base when in use, by driving mechanism Dynamic, welding mechanism 100 is connect with swing seat 200, and welding mechanism 100 includes soldering tip 110, and therefore, swing seat 200 is able to drive weldering First 110 rotate to the direction close to or far from metal wire to be bonded;Since under the action of same driving force, swing can reach Acceleration be greater than the acceleration that can reach of linear motion;In turn, which can make soldering tip with higher Acceleration drives soldering tip mobile to metal wire to be bonded, keeps soldering tip short to the metal wire to be bonded mobile time, Jin Erti The high efficiency of wire bond.
Each technical characteristic of above embodiments can be combined arbitrarily, for simplicity of description, not to above-described embodiment In each technical characteristic it is all possible combination be all described, as long as however, the combination of these technical characteristics be not present lance Shield all should be considered as described in this specification.
Above embodiments only express the several embodiments of the utility model, and the description thereof is more specific and detailed, but simultaneously The limitation to utility model patent range therefore cannot be interpreted as.It should be pointed out that for the ordinary skill people of this field For member, without departing from the concept of the premise utility, various modifications and improvements can be made, these belong to this reality With novel protection scope.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.

Claims (10)

1. a kind of bonding joint device characterized by comprising
First mounting base;
Welding mechanism, the welding mechanism include soldering tip;
Swing seat, the welding mechanism are fixedly arranged on the swing seat, and the swing seat is rotatablely arranged at first installation Seat;And
Driving mechanism, the driving mechanism make the soldering tip for driving the swing seat to rotate relative to first mounting base It can be rotated to the direction close to or far from part to be welded.
2. bonding joint device according to claim 1, which is characterized in that further include can flexible restoring organ, it is described can bullet Property resetting-mechanism includes rotor and fixed body, the rotor can the relatively described fixed body within the scope of predetermined angle back and forth Rotation, the rotor are connect with the swing seat, and the fixed body is connect with first mounting base.
3. bonding joint device according to claim 2, which is characterized in that the swing seat includes the first pedestal and second Body, one end of second pedestal are connect with first pedestal, and second pedestal is set with first pedestal in angle It sets, second pedestal is connect with the rotor, and first pedestal is connect with the welding mechanism.
4. bonding joint device according to claim 3, which is characterized in that the welding mechanism includes energy converter and the second peace Seat is filled, one end of the energy converter is connect with the soldering tip, and second mounting base is connect with first pedestal, and described second Mounting base includes the first mounting hole and at least two boss, and all boss are set to first peace along the same circle spacing The inner wall in hole is filled, the other end of the energy converter is arranged in first mounting hole, the side wall of the boss and the energy converter It abuts.
5. bonding joint device according to claim 4, which is characterized in that it further include fastener, second mounting base Side wall is equipped with T-slot and erecting bed, and the T-slot is connected to first mounting hole, and the T-slot includes along second peace The vertical slot of the length direction setting of seat is filled, the cell wall of the vertical slot includes the first side wall and opposite with the first side wall Second sidewall, the erecting bed is fixedly arranged on the side wall of second mounting base, and the erecting bed is set close to the first side wall It sets, the erecting bed is equipped with connecting hole, and the connecting hole runs through the erecting bed and the first side wall, and the fastener passes through The connecting hole is connect with the second sidewall.
6. bonding joint device according to claim 1, which is characterized in that it further include displacement sensor, the displacement sensing Device is used to detect the swinging distance of relatively described first mounting base of the swing seat.
7. bonding joint device according to claim 6, which is characterized in that institute's displacement sensors include grating scale and grating Read head, the grating scale are set in the swing seat, and the grating reading head is correspondingly arranged in first mounting base.
8. bonding joint device according to claim 1, which is characterized in that further include cooling piece, the cooling piece include into Port, airflow channel and outgassing groove, the outgassing groove are set to the side wall of the cooling piece along the length direction of the cooling piece, The side wall of the outgassing groove is equipped with gas outlet, and the opening of the outgassing groove is arranged towards the driving mechanism, the gas outlet, institute State airflow channel and air inlet connection.
9. bonding joint device according to any one of claims 1 to 8, which is characterized in that the driving mechanism includes voice coil Motor, the voice coil motor include electric mover and motor stator, and the electric mover is connect with the swing seat, the motor Stator is connect with first mounting base.
10. a kind of supersonic bonding machine, which is characterized in that including the described in any item bonding joint devices of claim 1 to 9.
CN201821598639.4U 2018-09-28 2018-09-28 Bonding joint device and supersonic bonding machine Active CN209439591U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821598639.4U CN209439591U (en) 2018-09-28 2018-09-28 Bonding joint device and supersonic bonding machine

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Application Number Priority Date Filing Date Title
CN201821598639.4U CN209439591U (en) 2018-09-28 2018-09-28 Bonding joint device and supersonic bonding machine

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113020742A (en) * 2021-05-28 2021-06-25 广东阿达智能装备有限公司 Improve welding wire machine of welding precision
CN113059250A (en) * 2021-06-01 2021-07-02 广东阿达智能装备有限公司 Wire bonding machine and bonding head structure thereof
CN113814623A (en) * 2021-11-23 2021-12-21 大族激光科技产业集团股份有限公司 Welding force correction method and correction device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113020742A (en) * 2021-05-28 2021-06-25 广东阿达智能装备有限公司 Improve welding wire machine of welding precision
CN113020742B (en) * 2021-05-28 2021-08-17 广东阿达智能装备有限公司 Improve welding wire machine of welding precision
CN113059250A (en) * 2021-06-01 2021-07-02 广东阿达智能装备有限公司 Wire bonding machine and bonding head structure thereof
CN113814623A (en) * 2021-11-23 2021-12-21 大族激光科技产业集团股份有限公司 Welding force correction method and correction device

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