CN113811061A - Plasma torch for waste gas treatment - Google Patents
Plasma torch for waste gas treatment Download PDFInfo
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- CN113811061A CN113811061A CN202110998968.8A CN202110998968A CN113811061A CN 113811061 A CN113811061 A CN 113811061A CN 202110998968 A CN202110998968 A CN 202110998968A CN 113811061 A CN113811061 A CN 113811061A
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- anode
- copper
- cathode
- outer cover
- cover
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- 239000002912 waste gas Substances 0.000 title abstract description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 130
- 239000004809 Teflon Substances 0.000 claims abstract description 27
- 229920006362 Teflon® Polymers 0.000 claims abstract description 27
- 239000002826 coolant Substances 0.000 claims abstract description 26
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 19
- 239000010937 tungsten Substances 0.000 claims abstract description 19
- 238000007789 sealing Methods 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 13
- 239000010949 copper Substances 0.000 claims description 13
- 230000007797 corrosion Effects 0.000 claims description 12
- 238000005260 corrosion Methods 0.000 claims description 12
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 6
- 229910052731 fluorine Inorganic materials 0.000 claims description 6
- 239000011737 fluorine Substances 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 2
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 claims 3
- 239000007789 gas Substances 0.000 abstract description 22
- 238000005516 engineering process Methods 0.000 abstract description 2
- 210000002381 plasma Anatomy 0.000 description 54
- 238000001816 cooling Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002910 solid waste Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The invention relates to the related field of waste gas treatment in plasma technology, and discloses a plasma torch for waste gas treatment, which comprises anode copper, a lower anode outer cover, an upper anode outer cover, an insulating plate, cathode copper, a tungsten electrode, a cathode outer cover and a cathode cover plate, wherein the anode copper is positioned in a cavity of the lower anode outer cover, the upper anode outer cover is fixedly arranged at the top of the lower anode outer cover, the insulating plate is fixedly arranged at the top of the upper anode outer cover, the cathode outer cover is fixedly arranged at the top of the insulating plate, the cathode cover plate is arranged at the top of the cathode outer cover, the cathode copper is arranged between the insulating plate and the cathode outer cover, the bottom end of the cathode copper faces the cavity of the anode copper, the tungsten electrode is arranged at the bottom end of the cathode outer cover, and the bottom end of the tungsten electrode extends into the anode copper cavity. This plasma torch for exhaust-gas treatment, torch negative pole and positive pole all have cooling medium, and cooling medium passes through first teflon pipe, and plasma flame temperature is very high, and cooling medium can guarantee that plasma torch can work for a long time.
Description
Technical Field
The invention relates to the field related to waste gas treatment of a plasma technology, in particular to a plasma torch for waste gas treatment.
Background
With the increasing prosperity and productivity of the semiconductor industry, various waste gases are generated in the production process, and most of the waste gases have serious harm to human bodies and the environment. Therefore, the market demand of the waste gas treatment equipment is very large, but the waste gas treatment equipment also has great demand for various practical special devices due to different internal facilities and environments of semiconductor manufacturers. Accordingly, one skilled in the art has invented a plasma torch for the treatment of exhaust gases.
The thermal plasma is generated by five methods, namely spark discharge, arc discharge, radio frequency discharge, high-frequency coupling discharge, microwave discharge and the like. Thermal plasmas are used in material processing as well as in the treatment of waste gases, waste liquids and solid waste. The plasma torch discharges between the cathode and the anode, the working gas flows through a discharge area and is ionized under the action of strong current to form plasma, and the plasma is ejected from the flame ejection opening under the pushing of the working gas to form ultrahigh-temperature jet flame. The ultrahigh temperature of the plasma flame is utilized to provide heat energy for the waste gas to be treated and related reaction gas, and organic matters or halide in the waste gas are converted into inorganic micromolecular substances such as carbon dioxide, water and the like.
Disclosure of Invention
The invention mainly solves the technical problems in the prior art and provides a plasma torch for waste gas treatment.
In order to achieve the purpose, the invention adopts the following technical scheme that the plasma torch for waste gas treatment comprises anode copper, a lower anode outer cover, an upper anode outer cover, an insulating plate, cathode copper, a tungsten electrode, a cathode outer cover and a cathode cover plate, wherein the anode copper is positioned in a cavity of the lower anode outer cover, the upper anode outer cover is fixedly arranged at the top of the lower anode outer cover, the insulating plate is fixedly arranged at the top of the upper anode outer cover, the cathode outer cover is fixedly arranged at the top of the insulating plate, the cathode cover plate is arranged at the top of the cathode outer cover, the cathode copper is arranged between the insulating plate and the cathode outer cover, the bottom end of the cathode copper faces to a cavity of the anode copper, the tungsten electrode is arranged at the bottom end of the cathode outer cover, the bottom end of the tungsten electrode extends into the anode copper cavity, a torch fixing plate is also arranged on the outer wall of the lower anode outer cover, magnets are arranged on the upper part and the lower part of the anode copper, and are uniformly distributed on the circumference of the anode copper by taking the anode copper as the center, magnet all places in the hole of positive pole copper circumference, all be provided with the first O type circle that is used for fixed mounting between magnet outside and the positive pole copper, it is used for fixed third cylinder hexagon socket screw to go up to be provided with between positive pole dustcoat and the negative pole dustcoat, quick connector is installed in the outside of negative pole dustcoat down, be provided with first teflon pipe between negative pole apron and the positive pole dustcoat, the both ends of first teflon pipe all with be provided with the external screw thread cutting ferrule joint that is used for connecting between negative pole apron and the positive pole dustcoat that corresponds, it is provided with the second teflon pipe of L type to go up the positive pole dustcoat, be provided with the screw thread cutting ferrule joint that is used for the installation of second teflon pipe between second teflon pipe and the last positive pole dustcoat, the inlet port that lets in working gas is seted up on positive pole copper upper portion, the eccentric array is more than two, positive pole copper outside is provided with cooling medium.
Preferably, a fourth O-ring for fixing is arranged between the upper anode housing and the lower anode housing.
Preferably, a third O-ring for fixing is arranged between the torch fixing plate and the outer wall of the lower anode housing.
Preferably, a second O-ring for fixing is arranged between the anode copper and the lower anode outer cover.
Preferably, a fifth O-ring for fixing is arranged between the upper anode housing and the upper part of the anode copper.
Preferably, a sixth O-ring for fixing is disposed between the cathode cover plate and the cathode housing.
Preferably, the lower part of the anode copper is sealed by a radial sealing ring, and the sealing ring is a fluorine rubber sealing ring.
Preferably, the cathode copper has a flat structure as a whole.
Preferably, the insulating plate is made of a high-temperature resistant and corrosion resistant insulating material.
Advantageous effects
The invention provides a plasma torch for waste gas treatment. The method has the following beneficial effects:
(1) this plasma torch for exhaust-gas treatment, torch negative pole and positive pole all have cooling medium, and cooling medium passes through first teflon pipe, and plasma flame temperature is very high, and cooling medium can guarantee that plasma torch can work for a long time.
(2) The plasma torch for treating exhaust gas has an anode at the lower part and anode copper at the inner part, and the anode copper is required to be excellent in thermal conductivity, electrical conductivity and electric corrosion resistance. The anode copper material performance affects the anode service life and oxygen-free copper can be used. The upper part of the anode copper is provided with an air inlet hole for introducing working gas, and the air holes are eccentrically arrayed more than one, so that introduced ionized gas enters an anode opening through the inner conical surface of the anode copper in a spiral downward-rotating manner. The cooling medium is arranged outside the anode copper, so that the cooling fin structure is added outside the anode, the contact area of the anode copper and the cooling medium can be effectively increased, and the cooling effect is enhanced. The lower part of the anode copper is sealed by a radial sealing ring, so that the concentricity of the whole device can be effectively increased.
(3) The plasma torch for treating waste gas is characterized in that magnets are arranged on the upper portion and the lower portion of anode copper of the plasma torch, and the magnets are evenly distributed on the circumference of the anode copper by taking the anode copper as the center. The magnets are all placed in holes on the circumference of the anode copper. The uniformly distributed magnets can effectively control the plasma inside the anode copper, the magnetic field can control the plasma to prevent the plasma from being excessively dispersed, and the service life of the anode copper is prolonged.
(4) The plasma torch for treating waste gas has anode casing outside the anode copper, and the upper and lower anode casings are used to introduce cooling medium and ionized gas to the anode. And the upper part is an insulating plate made of high-temperature-resistant and corrosion-resistant insulating materials. The insulating plate mainly plays a role in insulating the cathode and the anode.
(5) The plasma torch for treating waste gas has cathode in the upper part of the insulating board and cathode copper in the inside. The cathode is internally provided with a cooling medium which passes through, and the whole cathode is of a flat structure, mainly for reducing the height of a torch. The lower part of the cathode copper is provided with a tungsten electrode which can be detached independently and is convenient to replace.
(6) This plasma torch for exhaust-gas treatment, plasma torch cooling medium all add the teflon union coupling with corrosion-resistant cutting ferrule, and ionization medium inserts the connection with corrosion-resistant soon, and the sealing washer uses the fluorine rubber sealing washer, and these all can improve torch life-span and security performance.
(7) According to the plasma torch for waste gas treatment, the whole plasma torch adopts a sinking structure, the sizes of relevant parts can be changed according to needs during use, so that the torch can be better used, and the temperature of the parts of the torch is reduced by using a cooling medium.
(8) The anode copper of the torch is convenient to disassemble, the plasma is controlled by the magnet, the cathode of the torch adopts a flat structure, the height of the torch is reduced, the whole torch adopts a sinking type structure, the temperature of the torch serving as an energy source can reach 3000 ℃, most of the requirements of the market can be met, and the torch can be continuously used for a long time by matching with a plasma power supply, a cooling medium, ionized gas and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
The structures, ratios, sizes, and the like shown in the present specification are only used for matching with the contents disclosed in the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions that the present invention can be implemented, so that the present invention has no technical significance, and any structural modifications, changes in the ratio relationship, or adjustments of the sizes, without affecting the effects and the achievable by the present invention, should still fall within the range that the technical contents disclosed in the present invention can cover.
FIG. 1 is a front cross-sectional view of the present invention;
FIG. 2 is a perspective view of the present invention;
FIG. 3 is a schematic front view of the present invention.
Illustration of the drawings:
1. anode copper; 2. a lower anode housing; 3. a torch fixing plate; 4. an upper anode housing; 5. an insulating plate; 6. cathode copper; 7. a tungsten electrode; 8. a cathode housing; 9. a cathode cover plate; 10. a first O-ring; 11. a second O-ring; 12. a third O-ring; 13. a fourth O-ring; 14. a fifth O-ring; 15. a sixth O-ring; 16. a magnet; 19. a third cylindrical hexagon socket screw; 20. a quick connector; 21. an external thread cutting sleeve joint; 22. a threaded ferrule fitting; 23. a first Teflon tube; 24. a second teflon tube.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows: a plasma torch for waste gas treatment, as shown in figure 1-figure 3, comprises anode copper 1, a lower anode housing 2, an upper anode housing 4, an insulating plate 5, cathode copper 6, a tungsten electrode 7, a cathode housing 8 and a cathode cover plate 9, wherein the anode copper 1 is positioned in the cavity of the lower anode housing 2, the upper anode housing 4 is fixedly arranged at the top of the lower anode housing 2, the insulating plate 5 is fixedly arranged at the top of the upper anode housing 4, the cathode housing 8 is fixedly arranged at the top of the insulating plate 5, the cathode cover plate 9 is arranged at the top of the cathode housing 8, the cathode copper 6 is arranged between the insulating plate 5 and the cathode housing 8, the bottom end of the cathode copper 6 faces to the cavity of the anode copper 1, the tungsten electrode 7 is arranged at the bottom end of the cathode housing 8, the bottom end of the tungsten electrode 7 extends into the cavity of the anode copper 1, a torch fixing plate 3 is also arranged on the outer wall of the lower anode housing 2, magnets 16 are arranged on the upper part and the lower part of the anode copper 1, magnets 16 are uniformly distributed on the circumference of the anode copper 1 by taking the anode copper 1 as the center, the magnets 16 are all placed in holes on the circumference of the anode copper 1, first O-shaped rings 10 for fixed installation are arranged between the outer part of each magnet 16 and the anode copper 1, third cylindrical hexagon socket head screws 19 for fixing are arranged between the upper anode cover 4 and the cathode cover 8, quick-plugging connectors 20 are arranged on the outer side of the lower anode cover 2, first Teflon tubes 23 are arranged between the cathode cover plate 9 and the anode cover 4, external thread ferrule connectors 21 for connection are arranged between the two ends of each first Teflon tube 23 and the corresponding cathode cover plate 9 and the corresponding anode cover 4, L-shaped second Teflon tubes 24 are arranged on the upper anode cover 4, threaded ferrule connectors 22 for installing the second Teflon tubes 24 are arranged between the second Teflon tubes 24 and the upper anode cover 4, and air inlets for introducing working gas are arranged on the upper part of the anode copper 1, more than two eccentric arrays of inlet port, the outside of positive pole copper 1 is provided with coolant, be provided with between last positive pole dustcoat 4 and the lower positive pole dustcoat 2 and be used for fixed fourth O type circle 13, be provided with between torch fixed plate 3 and the lower positive pole dustcoat 2 outer wall and be used for fixed third O type circle 12, be provided with between positive pole copper 1 and the lower positive pole dustcoat and be used for fixed second O type circle 11, be provided with between last positive pole dustcoat 4 and the positive pole copper 1 upper portion and be used for fixed fifth O type circle 14, be provided with between negative pole apron 9 and the negative pole dustcoat 8 and be used for fixed sixth O type circle 15, positive pole copper 1 lower part uses radial seal circle sealed, the sealing washer uses the fluorine to glue sealing washer, negative pole copper 6 is whole to be flat structure, insulation board 5 uses high temperature resistant, corrosion-resistant insulating material.
The cathode and the anode of the torch are both provided with cooling media, the cooling media pass through the first Teflon tube, the temperature of the plasma flame is very high, and the cooling media can ensure that the plasma torch can work for a long time. The lower part of the plasma torch is an anode, the inside of the anode is anode copper 1, and the anode copper is extremely excellent in heat conductivity, electric conductivity and electric corrosion resistance. The anode copper 1 material properties affect the anode service life and oxygen-free copper can be used. The upper part of the anode copper 1 is provided with an air inlet hole for introducing working gas, and the air holes are eccentrically arrayed by more than 2, so that introduced ionized gas enters an anode opening through the spiral downward rotation of the inner conical surface of the anode copper 1. The cooling medium is arranged outside the anode copper 1, so that the cooling fin structure is added outside the anode, the contact area between the anode copper 1 and the cooling medium can be effectively increased, and the cooling effect is enhanced. The lower part of the anode copper 1 is sealed by a radial sealing ring, so that the concentricity of the whole device can be effectively increased.
Example two: a plasma torch for waste gas treatment, as shown in figure 1-figure 3, comprises anode copper 1, a lower anode housing 2, an upper anode housing 4, an insulating plate 5, cathode copper 6, a tungsten electrode 7, a cathode housing 8 and a cathode cover plate 9, wherein the anode copper 1 is positioned in the cavity of the lower anode housing 2, the upper anode housing 4 is fixedly arranged at the top of the lower anode housing 2, the insulating plate 5 is fixedly arranged at the top of the upper anode housing 4, the cathode housing 8 is fixedly arranged at the top of the insulating plate 5, the cathode cover plate 9 is arranged at the top of the cathode housing 8, the cathode copper 6 is arranged between the insulating plate 5 and the cathode housing 8, the bottom end of the cathode copper 6 faces to the cavity of the anode copper 1, the tungsten electrode 7 is arranged at the bottom end of the cathode housing 8, the bottom end of the tungsten electrode 7 extends into the cavity of the anode copper 1, a torch fixing plate 3 is also arranged on the outer wall of the lower anode housing 2, magnets 16 are arranged on the upper part and the lower part of the anode copper 1, magnets 16 are uniformly distributed on the circumference of the anode copper 1 by taking the anode copper 1 as the center, the magnets 16 are all placed in holes on the circumference of the anode copper 1, first O-shaped rings 10 for fixed installation are arranged between the outer part of each magnet 16 and the anode copper 1, third cylindrical hexagon socket head screws 19 for fixing are arranged between the upper anode cover 4 and the cathode cover 8, quick-plugging connectors 20 are arranged on the outer side of the lower anode cover 2, first Teflon tubes 23 are arranged between the cathode cover plate 9 and the anode cover 4, external thread ferrule connectors 21 for connection are arranged between the two ends of each first Teflon tube 23 and the corresponding cathode cover plate 9 and the corresponding anode cover 4, L-shaped second Teflon tubes 24 are arranged on the upper anode cover 4, threaded ferrule connectors 22 for installing the second Teflon tubes 24 are arranged between the second Teflon tubes 24 and the upper anode cover 4, and air inlets for introducing working gas are arranged on the upper part of the anode copper 1, more than two air inlet holes are eccentrically arrayed, and a cooling medium is arranged outside the anode copper 1.
The working principle of the invention is as follows:
the thermal plasma is generated by five methods, namely spark discharge, arc discharge, radio frequency discharge, high-frequency coupling discharge, microwave discharge and the like. Thermal plasmas are used in material processing as well as in the treatment of waste gases, waste liquids and solid waste. The plasma torch discharges between the cathode and the anode, the working gas flows through a discharge area and is ionized under the action of strong current to form plasma, and the plasma is ejected from the flame ejection opening under the pushing of the working gas to form ultrahigh-temperature jet flame. The ultrahigh temperature of the plasma flame is utilized to provide heat energy for the waste gas to be treated and related reaction gas, and organic matters or halide in the waste gas are converted into inorganic micromolecular substances such as carbon dioxide, water and the like.
The cathode and the anode of the torch are both provided with cooling media, the cooling media pass through the first Teflon tube, the temperature of the plasma flame is very high, and the cooling media can ensure that the plasma torch can work for a long time.
The lower part of the plasma torch is an anode, the inside of the anode is anode copper 1, and the anode copper is extremely excellent in heat conductivity, electric conductivity and electric corrosion resistance. The anode copper 1 material properties affect the anode service life and oxygen-free copper can be used. The upper part of the anode copper 1 is provided with an air inlet hole for introducing working gas, and the air holes are eccentrically arrayed by more than 2, so that introduced ionized gas enters an anode opening through the spiral downward rotation of the inner conical surface of the anode copper 1. The cooling medium is arranged outside the anode copper 1, so that the cooling fin structure is added outside the anode, the contact area between the anode copper 1 and the cooling medium can be effectively increased, and the cooling effect is enhanced. The lower part of the anode copper 1 is sealed by a radial sealing ring, so that the concentricity of the whole device can be effectively increased.
The upper part and the lower part of the anode copper 1 of the plasma torch are both provided with magnets 16, and the magnets 16 are uniformly distributed on the circumference of the anode copper 1 by taking the anode copper 1 as the center. The magnets 16 are all placed in holes in the circumference of the anode copper 1. The uniformly distributed magnets 16 can effectively control the plasma inside the anode copper 1, the magnetic field can control the plasma to prevent the plasma from excessively dispersing, and the service life of the anode copper 1 is prolonged.
The outer part of the anode copper 1 of the plasma torch is an anode outer cover, and the upper anode outer cover 4 and the lower anode outer cover 2 mainly feed cooling medium and ionized gas into the anode. The upper part is an insulating plate 5, and the insulating plate 5 is made of high-temperature-resistant and corrosion-resistant insulating materials. The insulating plate 5 mainly serves to insulate the cathode and the anode.
The upper part of the insulating plate 5 of the plasma torch is a cathode, and the inside of the cathode is cathode copper 6. The cathode is internally provided with a cooling medium which passes through, and the whole cathode is of a flat structure, mainly for reducing the height of a torch. The lower part of the cathode copper 6 is provided with a tungsten electrode 7, and the tungsten electrode 7 can be independently disassembled and is convenient to replace.
Plasma torch cooling medium all uses corrosion-resistant cutting ferrule and special fluorine dragon union coupling, and ionization medium inserts the connection with corrosion-resistant soon, and the sealing washer uses the fluorine rubber sealing washer, these all can improve torch life-span and security performance.
The plasma torch adopts a sinking structure as a whole, the size of related parts can be changed according to needs to ensure that the torch can be better used when in use, the cooling medium is used for reducing the temperature of the parts of the torch, the anode copper 1 of the torch is convenient to disassemble, the magnet 16 is used for controlling the plasma, the cathode of the torch adopts a flat structure to reduce the height of the torch, the sinking structure is adopted as the whole torch, the temperature of the torch serving as an energy source can reach 3000 ℃, the requirements of most markets can be met, and the torch can be used for a long time without interruption by matching with a plasma power supply, the cooling medium, ionized gas and the like.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (9)
1. The utility model provides a plasma torch for exhaust-gas treatment, includes positive pole copper (1), lower positive pole dustcoat (2), goes up positive pole dustcoat (4), insulation board (5), negative pole copper (6), tungsten utmost point (7), negative pole dustcoat (8) and negative pole apron (9), its characterized in that: the anode copper (1) is positioned in a cavity of the lower anode outer cover (2), the upper anode outer cover (4) is fixedly arranged at the top of the lower anode outer cover (2), the insulating plate (5) is fixedly arranged at the top of the upper anode outer cover (4), the cathode outer cover (8) is fixedly arranged at the top of the insulating plate (5), the cathode cover plate (9) is arranged at the top of the cathode outer cover (8), the cathode copper (6) is arranged between the insulating plate (5) and the cathode outer cover (8), the bottom end of the cathode copper (6) faces to the cavity of the anode copper (1), the tungsten electrode (7) is arranged at the bottom end of the cathode outer cover (8), and the bottom end of the tungsten electrode (7) extends into the cavity of the anode copper (1);
the outer wall of the lower anode cover (2) is further provided with a torch fixing plate (3), magnets (16) are arranged on the upper portion and the lower portion of the anode copper (1), the magnets (16) are evenly distributed on the circumference of the anode copper (1) by taking the anode copper (1) as a center, the magnets (16) are all placed in holes in the circumference of the anode copper (1), first O-shaped rings (10) for fixed installation are arranged between the outer portion of each magnet (16) and the anode copper (1), third cylindrical inner hexagonal screws (19) for fixing are arranged between the upper anode cover (4) and the cathode cover (8), quick plug-in connectors (20) are arranged on the outer side of the lower anode cover (2), first Teflon tubes (23) are arranged between the cathode cover plate (9) and the anode cover (4), and external thread cutting sleeves (21) for connection are arranged between the two ends of the first Teflon tubes (23) and the corresponding cathode cover plate (9) and the anode cover (4), go up anode housing (4) and be provided with second teflon pipe (24) of L shape, be provided with between second teflon pipe (24) and last anode housing (4) and be used for screw thread cutting ferrule joint (22) of second teflon pipe (24) installation, positive pole copper (1) upper portion is seted up and is let in the inlet port of working gas, and the inlet port eccentric array is more than two, and positive pole copper (1) outside is provided with coolant.
2. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: and a fourth O-shaped ring (13) for fixation is arranged between the upper anode housing (4) and the lower anode housing (2).
3. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: and a third O-shaped ring (12) for fixation is arranged between the torch fixing plate (3) and the outer wall of the lower anode housing (2).
4. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: and a second O-shaped ring (11) for fixing is arranged between the anode copper (1) and the lower anode outer cover.
5. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: and a fifth O-shaped ring (14) for fixation is arranged between the upper anode outer cover (4) and the upper part of the anode copper (1).
6. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: and a sixth O-shaped ring (15) for fixing is arranged between the cathode cover plate (9) and the cathode outer cover (8).
7. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: the lower part of the anode copper (1) is sealed by a radial sealing ring, and the sealing ring is a fluorine rubber sealing ring.
8. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: the cathode copper (6) is of a flat structure as a whole.
9. The plasma torch for the treatment of exhaust gas according to claim 1, wherein: the insulating plate (5) is made of high-temperature-resistant and corrosion-resistant insulating materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110998968.8A CN113811061A (en) | 2021-08-28 | 2021-08-28 | Plasma torch for waste gas treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110998968.8A CN113811061A (en) | 2021-08-28 | 2021-08-28 | Plasma torch for waste gas treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113811061A true CN113811061A (en) | 2021-12-17 |
Family
ID=78894299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110998968.8A Withdrawn CN113811061A (en) | 2021-08-28 | 2021-08-28 | Plasma torch for waste gas treatment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113811061A (en) |
-
2021
- 2021-08-28 CN CN202110998968.8A patent/CN113811061A/en not_active Withdrawn
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Application publication date: 20211217 |