CN113805556A - Terminal monitoring method, device and system based on excimer laser - Google Patents
Terminal monitoring method, device and system based on excimer laser Download PDFInfo
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Abstract
The invention relates to the field of lasers, in particular to a terminal monitoring method, device and system based on an excimer laser. The method, the device and the system detect the working state of a main controller in real time through a standby controller, monitor the working state of each sensor in real time and acquire the working information of each sensor; when the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller acquires the control authority of the main controller, and the main controller stops working; the standby controller is in communication connection with the upper computer and sends the acquired working state and the working information to the upper computer in real time; the upper computer judges whether the working state and the working information of each sensor reach the limit working condition or not; if the terminal monitoring method and device based on the excimer laser and the system do not reach the limit working condition, the upper computer sends out an early warning prompt, equipment protection is started, and timely maintenance is facilitated for managers.
Description
Technical Field
The invention relates to the field of lasers, in particular to a terminal monitoring method, device and system based on an excimer laser.
Background
The excimer laser is a pulse type gas laser applied to deep ultraviolet characteristics, has the characteristics of high repetition frequency, large energy, short wavelength, narrow line width and the like, and is an excellent laser light source for a microelectronic photoetching system.
The traditional parameter acquisition and monitoring terminal system of the discharge pump excimer laser has no double redundant controllers, can not monitor the working states of each flow acquisition circuit and each proportional valve control circuit, and can not monitor the working states of the two controllers mutually.
With the development of laser technology, continuous operation of the laser is required to be not stopped, so that continuous normal operation capability of each module and a terminal system is required, and the terminal system with higher reliability is difficult to ensure continuous operation with zero fault.
In addition, because the single chip microcomputer is small, exquisite, flexible and easy to expand into a powerful control system, some acquisition control terminals at present mostly use the single chip microcomputer as a core to form. However, even if a single chip microcomputer designed according to the requirements of industrial measurement and control environments is used, the control system is difficult to ensure long-term reliable operation due to electromagnetic interference and the like, so that the reliable operation of the whole system is influenced, and the reduction of the maintenance cost of each module is inevitable along with the development of the excimer laser.
Disclosure of Invention
The embodiment of the invention provides a terminal monitoring method, a device and a system based on an excimer laser, which at least solve the technical problem of low operation reliability of a traditional monitoring system of the excimer laser.
According to an embodiment of the present invention, a terminal monitoring method based on an excimer laser is provided, which includes the following steps:
the main controller controls the excimer laser to operate;
the standby controller detects the working state of the main controller in real time, monitors the working state of each sensor in real time, and collects the working information of each sensor;
when the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller acquires the control authority of the main controller, and the main controller stops working and disconnects communication with the upper computer;
the standby controller is in communication connection with the upper computer;
the standby controller sends the acquired working state and working information of each sensor to an upper computer in real time;
the upper computer judges whether the working state and the working information of each sensor reach the limit working condition or not;
if the working state and the working information of each sensor do not reach the limit working condition, the upper computer sends a prompt of normal working;
and if the working state and the working information of each sensor reach the limit working condition, the upper computer sends out an early warning prompt and starts equipment protection measures.
Further, the method further comprises:
when the standby controller detects that the main controller normally operates, the standby controller sends the acquired working state and working information of each sensor to the main controller in real time;
the main controller is in communication connection with the upper computer, and sends the received working state and working information of each sensor to the upper computer in real time.
Further, the standby controller also monitors the working state of the power supply circuit, so that the standby controller sends out an early warning prompt when the power supply circuit fails.
Further, the step of detecting the working state of the main controller by the standby controller in real time comprises the following steps: the standby controller detects the working state of the main controller in real time through the CAN bus.
According to another embodiment of the present invention, there is provided an excimer laser based terminal monitoring apparatus, including:
the system main control module is used for controlling the excimer laser to operate by the main controller;
the information monitoring module is used for detecting the working state of the main controller in real time by the standby controller, monitoring the working state of each sensor in real time and acquiring the working information of each sensor;
the permission acquisition module is used for acquiring the control permission of the main controller by the standby controller when the standby controller detects a fault diagnosis signal sent by the main controller, and the main controller stops working and disconnects communication with the upper computer;
the communication connection module is used for communication connection between the standby controller and the upper computer;
the information sending module is used for sending the acquired working state and working information of each sensor to the upper computer in real time by the standby controller;
the condition judgment module is used for judging whether the working state of each sensor and the working information reach the limit working condition or not by the upper computer;
the state prompting module is used for sending a prompt of normal work by the upper computer if the working state and the working information of each sensor do not reach the limit working condition;
and the early warning prompt module is used for sending out early warning prompts by the upper computer and starting equipment protection measures if the working state and the working information of each sensor reach the limit working conditions.
Further, the apparatus further comprises:
the information transmission module is used for transmitting the acquired working state and working information of each sensor to the main controller in real time when the standby controller detects that the main controller normally operates;
and the data transmission module is used for keeping communication connection between the main controller and the upper computer and transmitting the received working state and working information of each sensor to the upper computer in real time.
According to another embodiment of the present invention, there is provided an excimer laser based terminal monitoring system including:
main control unit, standby controller, host computer and sensor, through the operating condition of first CAN bus real-time supervision main control unit between the standby controller, main control unit, standby controller carry out information transmission through second CAN bus and host computer respectively, and the standby controller passes through the data line and is connected with the sensor to information acquisition and state monitoring.
Further, the sensor includes:
the temperature sensor is used for collecting and transmitting temperature, the water flow sensor is used for collecting and transmitting water flow, the gas flow sensor is used for collecting and transmitting gas flow, and the water flow proportional valve is used for controlling the size of water flow.
Further, the system further comprises: and the power supply circuit monitoring module is used for monitoring power supply information of the system.
Further, the power supply information monitored by the power supply circuit monitoring module is sent to the upper computer through a second CAN bus.
According to the terminal monitoring method, device and system based on the excimer laser, the working state of the main controller is detected in real time by using the standby controller, the working state of each sensor is monitored in real time, and the working information of each sensor is collected; when the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller acquires the control authority of the main controller, the main controller stops working and cuts off communication with an upper computer, fault self-checking of the terminal monitoring system based on the excimer laser can be achieved, and self-monitoring capability is high; then, the standby controller is communicated with the upper computer, and the obtained working state and the working information are sent to the upper computer in real time; then, judging whether the working state and the working information of each sensor reach the limit working condition or not by the upper computer; when the working state and the working information of each sensor do not reach the limit working condition, the upper computer sends out an early warning prompt and starts equipment protection measures, so that adverse effects on the laser caused by some accidents can be avoided, timely maintenance by managers is facilitated, and the reliability of the system is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a flow chart of a terminal monitoring method based on excimer laser according to the present invention;
FIG. 2 is a preferred flow chart of the excimer laser based terminal monitoring method of the present invention;
FIG. 3 is a schematic block diagram of the excimer laser based terminal monitoring method of the present invention;
FIG. 4 is a block diagram of an excimer laser based terminal monitoring apparatus according to the present invention;
FIG. 5 is a block diagram of a preferred excimer laser based terminal monitoring apparatus according to the present invention;
FIG. 6 is a communication schematic block diagram of the excimer laser based terminal monitoring system of the present invention;
FIG. 7 is a schematic diagram of the circuit principle of the excimer laser based terminal monitoring system of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1
According to an embodiment of the present invention, a terminal monitoring method based on an excimer laser is provided, and referring to fig. 1 to 3, the method includes the following steps:
at the moment, the communication between the standby controller and the upper computer is switched on, and the communication between the main controller and the upper computer is switched off; at the moment, the information and the working information of each sensor collected by the standby controller are uploaded to an upper computer through a CAN bus;
s1: the main controller controls the excimer laser to operate.
S2: the standby controller detects the working state of the main controller in real time, monitors the working state of each sensor in real time, and collects the working information of each sensor.
In this embodiment, since the reliability of the terminal monitoring system based on the excimer laser mainly depends on the central module controller, and the redundant control of the dual controller is an effective means for satisfying the continuous operation requirement and improving the system reliability, the dual redundant controller is designed to improve the system reliability in this embodiment.
The redundancy control is to add a standby key device, namely a standby controller, in the terminal equipment.
The present embodiment adopts a dual redundancy controller design, which mainly includes a hardware redundancy design and a software redundancy design, wherein the hardware redundancy design refers to that two controller chips are provided on a terminal device, two controllers are simultaneously operating, one is a main controller and is in a main control mode, and the other is a standby controller and is in a standby mode.
Specifically, the standby controller is used for detecting the working state of the main controller in real time, so that when the main controller breaks down, the terminal monitoring system can start the standby controller at the fastest speed, and normal work of various devices in the terminal monitoring system is maintained.
Further, the master control does not have the functions of monitoring the states of the sensors and collecting the working information of each sensor, so the embodiment can monitor the states of the sensors through the standby controller and collect the working information of each sensor, wherein, the terminal based on the excimer laser is of a single-cavity structure, and the terminal monitoring system based on the excimer laser mainly comprises the functions of collecting temperature, water flow and gas flow to ensure the real-time monitoring of the temperature of each water channel, gas channel flow and cavity temperature, and the control of the proportional valve to realize the function of closed-loop regulation of the temperature to ensure the relatively stable environment of the temperature in the cavity, so the embodiment can realize the information collection and transmission of the temperature, the water flow and the gas flow through each sensor.
Specifically, this implementation adopts standby controller real-time supervision main control unit's operating condition and communication condition, when standby controller detects main control unit fault diagnosis signal, standby controller will obtain the master control right, obtain the control authority of main control unit promptly, can take over main control unit's work voluntarily, produce system output, avoid whole terminal system to be in the out of control state, can improve terminal monitoring system's reliability to a certain extent like this, thereby whole laser's reliability has been improved, this implementation realizes through adopting the design of two redundant controllers when standby controller monitors main control unit and breaks down, replace main control unit at once, so not only save maintenance duration, also practiced thrift cost of maintenance simultaneously.
S3: when the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller acquires the control authority of the main controller, and the main controller stops working and disconnects communication with the upper computer.
In this embodiment, the control authority of the master controller means that the master controller in the master control mode has an I/O control authority when the master controller is normally operating.
Specifically, because the dual redundancy controller design adopted in this embodiment mainly aims at some unexpected faults that may occur on hardware when the system works, for example, a spike pulse in a circuit causes one of the controllers to restart or a program to run away, which is not favorable for monitoring the operation of the system based on the terminal of the excimer laser, in this case, the main controller can send a fault diagnosis signal, that is, when the standby controller detects the fault diagnosis signal sent by the main controller, the standby controller can obtain the control authority of the main controller and stop the main controller from working, and the communication between the main controller and the upper computer is cut off, that is, the dual redundancy controller design is adopted to control a corresponding switching circuit according to the fault condition to cut off a main controller control loop and start the standby controller to realize the acquisition control function, in practical application, the design adopted by the embodiment is relatively simple, the cost is relatively low, and the engineering application with certain reliability requirements can be met.
S4: the standby controller is in communication connection with the upper computer.
Specifically, according to step S3, it can be known that the main controller has a fault, and in order to ensure the continuous operation of the excimer laser, this implementation is switched on through the communication between the standby controller and the upper computer, and switches off the communication between the main controller and the upper computer, so as to ensure the normal operation of the device, and so that the subsequent standby controller can upload the working state and the working information of each acquired sensor to the upper computer in time.
S5: and the standby controller sends the acquired working state and working information of each sensor to the upper computer in real time.
Specifically, as can be seen from steps S1 to S4, the present embodiment implements a system fault self-diagnosis function by adopting a dual redundant controller design, and further, after the standby controller collects and monitors the operating states of the sensors in step S2 and collects the operating information of the sensors, such as the water flow collecting circuit, the gas flow collecting circuit, and the signal, the standby controller may send the collected information to the upper computer, so as to monitor the operating states of the sensors, the main controller, and the standby controller in real time by using the upper computer, so as to ensure the reliability of the operation of the terminal monitoring system.
S6: and the upper computer judges whether the working state and the working information of each sensor reach the limit working condition or not.
In this embodiment, the upper computer is in communication connection with the main Controller and the standby Controller through a CAN Area Network (CAN Controller Area Network), and monitors the operation states of each sensor, the main Controller and the standby Controller, so as to ensure the reliability of the operation of the terminal monitoring system.
Specifically, the host computer transmits some configuration information, flow alarm threshold value, P, I, D parameter setting value to main control unit, standby controller through the CAN bus, CAN be used for judging whether the operating condition and the working information of each sensor reach the limit operating condition to avoid dangerous operating condition to appear, avoid some accident to the harmful effects of laser instrument, improve this terminal monitoring system's reliability to a certain extent.
Further, the upper computer judges whether the working state and the working information of each sensor reach the limit working condition, and whether the working state of each sensor belongs to the preset limit working condition or not through detection, and whether the working information exceeds the preset limit working condition and the preset early warning threshold of the preset early warning threshold or not, the working state and the early warning threshold are set according to the actual application requirements and are used for detecting the working state of each sensor, reducing the occurrence of dangerous working conditions and reducing the fault loss, and the preset limit working condition and the preset early warning threshold can be configuration information, a flow alarm threshold, P, I, D parameter setting values and the like which are set according to the actual environment requirements.
Specifically, the present embodiment determines whether the working state of each sensor belongs to the preset limit condition by detecting whether the working state of each sensor belongs to the preset limit condition, for example, setting the working state level; and then, judging whether the working information exceeds a preset early warning threshold, if the specific data value in the working information is compared with the preset early warning threshold, the judgment can be performed in other ways, and the method is not limited specifically here.
S7: and if the working state and the working information of each sensor do not reach the limit working condition, the upper computer sends a prompt of normal working.
Specifically, the operating condition and the working information of each sensor do not reach the limit operating condition and can be understood as the standby controller in the terminal monitoring system, each sensor is in the normal operating condition, no fault occurs, the excimer laser runs normally, therefore, the embodiment can send the prompt of working normally through the host computer to inform the manager that the equipment runs normally, and can continue to monitor the standby controller and each sensor, and continue to acquire the operating condition and the working information of each sensor, so as to avoid the dangerous working condition.
S8: and if the working state and the working information of each sensor reach the limit working condition, the upper computer sends out an early warning prompt and starts equipment protection measures.
Specifically, the working state and working information of each sensor reach the limit working condition, and the standby controller and each sensor in the terminal monitoring system are in the abnormal working state at the moment, for example, when a dangerous working condition appears, an audible and visual alarm is timely sent out, when the limit working condition appears, equipment protection measures such as interlocking protection equipment are started, equipment faults are avoided, accordingly, the adverse effect of some sudden accidents on the laser is avoided, and the reliability of the terminal monitoring system can be improved to a certain extent.
In the terminal monitoring method based on the excimer laser in the embodiment of the invention, the working state of a main controller is detected in real time by using a standby controller, the working state of each sensor is monitored in real time, and the working information of each sensor is collected; when the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller acquires the control authority of the main controller, the main controller stops working and cuts off communication with an upper computer, fault self-checking of the terminal monitoring system based on the excimer laser can be achieved, and self-monitoring capability is high; then, the standby controller is communicated with the upper computer, and the obtained working state and the working information are sent to the upper computer in real time; then, judging whether the working state and the working information of each sensor reach the limit working condition or not by the upper computer; when the working state and the working information of each sensor do not reach the limit working condition, the upper computer sends out an early warning prompt and starts equipment protection measures, so that adverse effects on the laser caused by some accidents can be avoided, timely maintenance by managers is facilitated, and the reliability of the system is improved.
In a preferred embodiment, referring to fig. 2, the method further comprises:
s9: when the standby controller detects that the main controller normally operates, the standby controller sends the acquired working state and working information of each sensor to the main controller in real time;
s10: the main controller is in communication connection with the upper computer, and sends the received working state and working information of each sensor to the upper computer in real time.
Specifically, when the main controller normally operates, that is, the main controller in the main control mode has an I/O control right and can generate system output, while communication between the backup controller and the upper computer is prohibited, the main controller can acquire the working state of each sensor monitored by the backup controller in real time according to the control right and acquire working information of each sensor, such as temperature, water flow and gas flow data in a terminal cavity based on an excimer laser in a single-cavity structure; and then, the main controller sends the acquired working state and working information of each sensor to the upper computer in real time, namely, communication connection among the main controller, each sensor and the upper computer is kept, and information transmission CAN be specifically carried out through a CAN bus so as to ensure the reliability of the terminal monitoring system.
In the preferred technical scheme, the standby controller also monitors the working state of the power supply circuit, and when the power supply circuit fails, the standby controller can timely send out an early warning prompt so that a manager can timely maintain the standby controller to ensure the normal operation of the equipment.
In a preferred technical solution, the step of detecting the working state of the main controller in real time by the standby controller includes: the standby controller detects the working state of the main controller in real time through the CAN bus.
Specifically, the CAN bus is a serial communication protocol of ISO international standardization, in practical application, due to requirements on safety, comfort, convenience, low pollution and low cost, various electronic control systems are researched and developed, the CAN bus has high performance and high reliability, and CAN realize real-time and reliable data communication among various sensors, a main controller, a standby controller and an upper computer, so that the standby controller in the embodiment CAN detect the working state of the main controller in real time through the CAN bus, and even the working state of an opposite party CAN be monitored by the CAN bus between the main controller and a controller in real time, so as to ensure the reliability of the operation of the terminal monitoring system.
Example 2
According to another embodiment of the present invention, there is provided an excimer laser based terminal monitoring apparatus, referring to fig. 4, including:
the system main control module 401 is used for controlling the excimer laser to operate by the main controller;
an information monitoring module 402, configured to detect a working state of the main controller in real time by the standby controller, monitor a working state of each sensor in real time, and acquire working information of each sensor;
in this embodiment, since the reliability of the terminal monitoring system based on the excimer laser mainly depends on the central module controller, and the redundant control of the dual controller is an effective means for satisfying the continuous operation requirement and improving the system reliability, the dual redundant controller is designed to improve the system reliability in this embodiment.
The redundancy control is to add a standby key device, namely a standby controller, in the terminal equipment.
The present embodiment adopts a dual redundancy controller design, which mainly includes a hardware redundancy design and a software redundancy design, wherein the hardware redundancy design refers to that two controller chips are provided on a terminal device, two controllers are simultaneously operating, one is a main controller and is in a main control mode, and the other is a standby controller and is in a standby mode.
Specifically, the standby controller is used for detecting the working state of the main controller in real time, so that when the main controller breaks down, the terminal monitoring system can start the standby controller at the fastest speed, and normal work of various devices in the terminal monitoring system is maintained.
Further, the master control does not have the functions of monitoring the states of the sensors and collecting the working information of each sensor, so the embodiment can monitor the states of the sensors through the standby controller and collect the working information of each sensor, wherein, the terminal based on the excimer laser is of a single-cavity structure, and the terminal monitoring system based on the excimer laser mainly comprises the functions of collecting temperature, water flow and gas flow to ensure the real-time monitoring of the temperature of each water channel, gas channel flow and cavity temperature, and the control of the proportional valve to realize the function of closed-loop regulation of the temperature to ensure the relatively stable environment of the temperature in the cavity, so the embodiment can realize the information collection and transmission of the temperature, the water flow and the gas flow through each sensor.
Specifically, this implementation adopts standby controller real-time supervision main control unit's operating condition and communication condition, when standby controller detects main control unit fault diagnosis signal, standby controller will obtain the master control right, obtain the control authority of main control unit promptly, can take over main control unit's work voluntarily, produce system output, avoid whole terminal system to be in the out of control state, can improve terminal monitoring system's reliability to a certain extent like this, thereby whole laser's reliability has been improved, this implementation realizes through adopting the design of two redundant controllers when standby controller monitors main control unit and breaks down, replace main control unit at once, so not only save maintenance duration, also practiced thrift cost of maintenance simultaneously.
An authority obtaining module 403, configured to, when the standby controller detects a fault diagnosis signal sent by the main controller, obtain a control authority of the main controller by the standby controller, and stop working and disconnect communication with the upper computer by the main controller;
in this embodiment, the control authority of the master controller means that the master controller in the master control mode has an I/O control authority when the master controller is normally operating.
Specifically, because the dual redundancy controller design adopted in this embodiment mainly aims at some unexpected faults that may occur on hardware when the system works, for example, a spike pulse in a circuit causes one of the controllers to restart or a program to run away, which is not favorable for monitoring the operation of the system based on the terminal of the excimer laser, in this case, the main controller can send a fault diagnosis signal, that is, when the standby controller detects the fault diagnosis signal sent by the main controller, the standby controller can obtain the control authority of the main controller and stop the main controller from working, and the communication between the main controller and the upper computer is cut off, that is, the dual redundancy controller design is adopted to control a corresponding switching circuit according to the fault condition to cut off a main controller control loop and start the standby controller to realize the acquisition control function, in practical application, the design adopted by the embodiment is relatively simple, the cost is relatively low, and the engineering application with certain reliability requirements can be met.
A communication connection module 404, configured to perform communication connection between the standby controller and the upper computer;
specifically, according to the permission acquisition module 403, it can be known that the main controller fails, in order to ensure the continuous operation of the excimer laser, the standby controller is connected with the upper computer through communication, and the main controller is disconnected from the upper computer through communication, so as to ensure the normal operation of the device, and the subsequent standby controller can upload the working state and the working information of each acquired sensor to the upper computer in time.
The information sending module 405 is used for the standby controller to send the acquired working state and working information of each sensor to the upper computer in real time;
specifically, according to the system main control module 401 to the communication connection module 404, the design of the dual redundant controllers is adopted in the embodiment to realize the system fault self-diagnosis function, further, the standby controller collects and monitors the working states of the sensors in the information monitoring module 402 and collects the working information of the sensors, specifically, after the water flow collecting circuit, the gas flow collecting circuit and the signals are collected, the standby controller can send the collected information to the upper computer, so that the upper computer is used for monitoring the running states of the sensors, the main controller and the standby controller in real time, and the running reliability of the terminal monitoring system is ensured.
A condition judgment module 406, configured to judge, by the upper computer, whether the working state and the working information of each sensor meet the limit working condition;
in this embodiment, the upper computer is in communication connection with the main Controller and the standby Controller through a CAN Area Network (CAN Controller Area Network), and monitors the operation states of each sensor, the main Controller and the standby Controller, so as to ensure the reliability of the operation of the terminal monitoring system.
Specifically, the host computer transmits some configuration information, flow alarm threshold value, P, I, D parameter setting value to main control unit, standby controller through the CAN bus, CAN be used for judging whether the operating condition and the working information of each sensor reach the limit operating condition to avoid dangerous operating condition to appear, avoid some accident to the harmful effects of laser instrument, improve this terminal monitoring system's reliability to a certain extent.
Further, the upper computer judges whether the working state and the working information of each sensor reach the limit working condition, and whether the working state of each sensor belongs to the preset limit working condition or not through detection, and whether the working information exceeds the preset limit working condition and the preset early warning threshold of the preset early warning threshold or not, the working state and the early warning threshold are set according to the actual application requirements and are used for detecting the working state of each sensor, reducing the occurrence of dangerous working conditions and reducing the fault loss, and the preset limit working condition and the preset early warning threshold can be configuration information, a flow alarm threshold, P, I, D parameter setting values and the like which are set according to the actual environment requirements.
Specifically, the present embodiment determines whether the working state of each sensor belongs to the preset limit condition by detecting whether the working state of each sensor belongs to the preset limit condition, for example, setting the working state level; and then, judging whether the working information exceeds a preset early warning threshold, if the specific data value in the working information is compared with the preset early warning threshold, the judgment can be performed in other ways, and the method is not limited specifically here.
The state prompting module 407 is configured to send a normal work prompt by the upper computer if the working state and the working information of each sensor do not reach the limit working condition;
specifically, the operating condition and the working information of each sensor do not reach the limit operating condition and can be understood as the standby controller in the terminal monitoring system, each sensor is in the normal operating condition, no fault occurs, the excimer laser runs normally, therefore, the embodiment can send the prompt of working normally through the host computer to inform the manager that the equipment runs normally, and can continue to monitor the standby controller and each sensor, and continue to acquire the operating condition and the working information of each sensor, so as to avoid the dangerous working condition.
And the early warning prompt module 408 is used for sending an early warning prompt by the upper computer and starting equipment protection measures if the working state and the working information of each sensor reach the limit working condition.
Specifically, the working state and working information of each sensor reach the limit working condition, and the standby controller and each sensor in the terminal monitoring system are in the abnormal working state at the moment, for example, when a dangerous working condition appears, an audible and visual alarm is timely sent out, when the limit working condition appears, equipment protection measures such as interlocking protection equipment are started, equipment faults are avoided, accordingly, the adverse effect of some sudden accidents on the laser is avoided, and the reliability of the terminal monitoring system can be improved to a certain extent.
The terminal monitoring device based on the excimer laser in the embodiment of the invention detects the working state of the main controller in real time by using the standby controller, monitors the working state of each sensor in real time, and collects the working information of each sensor; when the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller acquires the control authority of the main controller, the main controller stops working and cuts off communication with an upper computer, fault self-checking of the terminal monitoring system based on the excimer laser can be achieved, and self-monitoring capability is high; then, the standby controller is communicated with the upper computer, and the obtained working state and the working information are sent to the upper computer in real time; then, judging whether the working state and the working information of each sensor reach the limit working condition or not by the upper computer; when the working state and the working information of each sensor do not reach the limit working condition, the upper computer sends out an early warning prompt and starts equipment protection measures, so that adverse effects on the laser caused by some accidents can be avoided, timely maintenance is facilitated for managers, and the reliability of the system is improved.
In a preferred embodiment, referring to fig. 5, the apparatus further comprises:
the information transmission module 501 is configured to, when the standby controller detects that the main controller operates normally, send the acquired working state and working information of each sensor to the main controller in real time;
and the data transmission module 502 is used for keeping communication connection between the main controller and the upper computer and transmitting the received working state and working information of each sensor to the upper computer in real time.
Specifically, when the main controller normally operates, that is, the main controller in the main control mode has an I/O control right and can generate system output, while communication between the backup controller and the upper computer is prohibited, the main controller can acquire the working state of each sensor monitored by the backup controller in real time according to the control right and acquire working information of each sensor, such as temperature, water flow and gas flow data in a terminal cavity based on an excimer laser in a single-cavity structure; and then, the main controller sends the acquired working state and working information of each sensor to the upper computer in real time, namely, communication connection among the main controller, each sensor and the upper computer is kept, and information transmission CAN be specifically carried out through a CAN bus so as to ensure the reliability of the terminal monitoring system.
In the preferred technical scheme, the standby controller also monitors the working state of the power supply circuit, and when the power supply circuit fails, the standby controller can timely send out an early warning prompt so that a manager can timely maintain the standby controller to ensure the normal operation of the equipment.
In a preferred technical solution, the step of detecting the working state of the main controller in real time by the standby controller includes: the standby controller detects the working state of the main controller in real time through the CAN bus.
Specifically, the CAN bus is a serial communication protocol of ISO international standardization, in practical application, due to requirements on safety, comfort, convenience, low pollution and low cost, various electronic control systems are researched and developed, the CAN bus has high performance and high reliability, and CAN realize real-time and reliable data communication among various sensors, a main controller, a standby controller and an upper computer, so that the standby controller in the embodiment CAN detect the working state of the main controller in real time through the CAN bus, and even the working state of an opposite party CAN be monitored by the CAN bus between the main controller and a controller in real time, so as to ensure the reliability of the operation of the terminal monitoring system.
Example 3
According to another embodiment of the present invention, there is provided an excimer laser based terminal monitoring system, referring to fig. 6, including:
main control unit, standby controller, host computer and sensor, standby controller is through the operating condition of first CAN bus real-time supervision main control unit, and main control unit, standby controller carry out information transmission through second CAN bus and host computer respectively, and standby controller passes through the data line and is connected with the sensor to information acquisition and state monitoring.
In this embodiment, the controller adopts the operating condition of first CAN bus real-time supervision main control unit, main control unit passes through the second CAN bus and realizes and the host computer communication, the host computer is with some configuration information through this second CAN, the flow alarm threshold value, P, I, D parameter setting value transmits for the controller, the controller will set up feedback information, the flow value that host computer inquiry information and gathered, the temperature value, proportional valve aperture value passes back the host computer through the second CAN bus, realize host computer and main control unit, information transmission between the standby controller.
The terminal monitoring system based on the excimer laser in the embodiment of the invention is designed with double redundant controllers, adopts a main controller and a standby controller, monitors the working state of the main controller and is also responsible for monitoring the working states of a temperature acquisition circuit, a flow acquisition circuit, a proportional valve control circuit and a series of power supply circuits, and timely sends out early warning prompts when an abnormality is found so that managers can timely maintain the system, and starts equipment protection measures, such as interlocking protection equipment, so that adverse effects on the laser caused by some accidents can be avoided, the timely maintenance of the managers is facilitated, the reliability of the system is improved, and the maintenance cost is reduced.
In a preferred embodiment, the sensor includes:
the temperature sensor is used for collecting and transmitting temperature, the water flow sensor is used for collecting and transmitting water flow, the gas flow sensor is used for collecting and transmitting gas flow, and the water flow proportional valve is used for controlling the size of water flow.
It should be noted that, because the excimer laser device has a single-cavity structure, and the terminal monitoring system based on the excimer laser mainly includes a function of acquiring temperature, water flow, and gas flow to ensure real-time monitoring of the flow of each water path, gas path, and cavity temperature, and a function of controlling proportional valve to realize closed-loop regulation of temperature to ensure a relatively stable environment of the temperature in the cavity, the present embodiment realizes information acquisition and transmission of temperature, water flow, and gas flow by the temperature sensor, the water flow sensor, the gas flow sensor, and the water flow proportional valve, further, as shown in fig. 7, the present embodiment realizes information acquisition and monitoring by the temperature acquisition circuit corresponding to the temperature sensor, the water flow acquisition circuit corresponding to the water flow sensor, the gas flow acquisition circuit corresponding to the gas flow sensor, and the proportional valve control circuit corresponding to the water flow proportional valve, so as to ensure the reliability of the terminal monitoring system.
In a preferred embodiment, the system further comprises: and the power supply circuit monitoring module is used for monitoring power supply information of the system so as to avoid power failure, insufficient power supply or other faults of the monitoring system and ensure the operation reliability of the monitoring system.
In an optimal technical scheme, power supply information monitored by the power supply circuit monitoring module is sent to the upper computer through the second CAN bus so as to ensure the stability of information transmission.
Compared with the existing liver segmentation system, the terminal monitoring method, the device and the system based on the excimer laser have the advantages that:
1. the terminal monitoring system based on the excimer laser adopts a dual-redundancy controller design, can realize fault self-checking of the terminal monitoring system based on the excimer laser, and has strong self-monitoring capability;
2. the reliability is high, namely when the main controller fails, the operation of the excimer laser and each device is controlled by switching to the standby controller, and the continuous working time of the excimer laser is prolonged;
3. the maintenance cost is low, namely the implementation can prolong the working time of the excimer laser by adding the standby controller, thereby reducing the maintenance frequency and the maintenance cost;
4. and the monitoring on the power supply circuit is increased so as to ensure the stability of the operation of the equipment.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
In the above embodiments of the present invention, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the embodiments provided in the present application, it should be understood that the disclosed technology can be implemented in other ways. The above-described system embodiments are merely illustrative, and for example, a division of a unit may be a logical division, and an actual implementation may have another division, for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, units or modules, and may be in an electrical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a stand-alone product, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium and includes instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method according to the embodiments of the present invention. And the aforementioned storage medium includes: a U-disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic or optical disk, and other various media capable of storing program codes.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.
Claims (10)
1. A terminal monitoring method based on an excimer laser is characterized by comprising the following steps:
the main controller controls the excimer laser to operate;
the standby controller detects the working state of the main controller in real time, monitors the working state of each sensor in real time, and collects the working information of each sensor;
when the standby controller detects a fault diagnosis signal sent by the main controller, the standby controller acquires the control authority of the main controller, and the main controller stops working and disconnects communication with an upper computer;
the standby controller is in communication connection with the upper computer;
the standby controller sends the acquired working state and working information of each sensor to an upper computer in real time;
the upper computer judges whether the working state and the working information of each sensor reach the limit working condition or not;
if the working state and the working information of each sensor do not reach the limit working condition, the upper computer sends out a prompt of normal working;
and if the working state and the working information of each sensor reach the limit working condition, the upper computer sends out an early warning prompt and starts equipment protection measures.
2. The excimer laser based terminal monitoring method of claim 1, wherein after the step of the standby controller detecting the operating state of the main controller in real time, the method further comprises:
when the standby controller detects that the main controller normally operates, the standby controller sends the acquired working state and working information of each sensor to the main controller in real time;
and the main controller is in communication connection with the upper computer and sends the received working state and working information of each sensor to the upper computer in real time.
3. The excimer laser based terminal monitoring method of claim 1, wherein the standby controller further monitors an operating state of a power supply circuit, so that the standby controller sends an early warning prompt when the power supply circuit fails.
4. The excimer laser-based terminal monitoring method as set forth in claim 1, wherein the step of the standby controller detecting the operating state of the main controller in real time comprises:
and the standby controller detects the working state of the main controller in real time through a CAN bus.
5. A terminal monitoring device based on excimer laser is characterized by comprising:
the system main control module is used for controlling the excimer laser to operate by the main controller;
the information monitoring module is used for detecting the working state of the main controller in real time by the standby controller, monitoring the working state of each sensor in real time and acquiring the working information of each sensor;
the permission acquisition module is used for acquiring the control permission of the main controller by the standby controller when the standby controller detects a fault diagnosis signal sent by the main controller, and the main controller stops working and disconnects communication with an upper computer;
the communication connection module is used for communication connection between the standby controller and the upper computer;
the information sending module is used for the standby controller to send the acquired working state and working information of each sensor to an upper computer in real time;
the condition judgment module is used for judging whether the working state and the working information of each sensor reach the limit working condition or not by the upper computer;
the state prompting module is used for sending a prompt of normal work by the upper computer if the working state and the working information of each sensor do not reach the limit working condition;
and the early warning prompt module is used for sending out early warning prompts and starting equipment protection measures if the working states and the working information of the sensors reach the limit working conditions.
6. The excimer laser based terminal monitoring apparatus of claim 5, further comprising:
the information transmission module is used for transmitting the acquired working state and working information of each sensor to the main controller in real time by the standby controller when the standby controller detects that the main controller normally operates;
and the data transmission module is used for keeping communication connection between the main controller and the upper computer and transmitting the received working state and working information of each sensor to the upper computer in real time.
7. A terminal monitoring system based on excimer laser is characterized by comprising:
main control unit, standby controller, host computer and sensor, through the operating condition of first CAN bus real-time supervision main control unit between the standby controller, main control unit, standby controller respectively through the second CAN bus with the host computer carries out information transmission, the standby controller pass through the data line with the sensor is connected to information acquisition and state monitoring.
8. The excimer laser based terminal monitoring system of claim 7, wherein the sensor comprises:
temperature sensor, water flow sensor, gas flow sensor and water flow proportional valve, temperature sensor is used for carrying out the collection and the transmission of temperature, water flow sensor is used for carrying out the collection and the transmission of water flow, gas flow sensor is used for the collection and the transmission of gas flow, water flow proportional valve is used for control the size of water flow.
9. The excimer laser based terminal monitoring system of claim 7, further comprising: and the power supply circuit monitoring module is used for monitoring power supply information of the system.
10. The excimer laser-based terminal monitoring system according to claim 9, wherein the power supply information monitored by the power supply circuit monitoring module is sent to the upper computer through the second CAN bus.
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