CN113791085B - Supporting table with automatically adjustable inclination angle and laser chip detection device - Google Patents

Supporting table with automatically adjustable inclination angle and laser chip detection device Download PDF

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Publication number
CN113791085B
CN113791085B CN202110987320.0A CN202110987320A CN113791085B CN 113791085 B CN113791085 B CN 113791085B CN 202110987320 A CN202110987320 A CN 202110987320A CN 113791085 B CN113791085 B CN 113791085B
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telescopic
supporting plate
base
camera
cylinder body
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CN113791085A (en
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邱德明
张方正
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Wuhan Shengweixin Technology Co ltd
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Wuhan Shengweixin Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a supporting table with an automatically adjustable inclination angle and a laser chip detection device, wherein the automatically adjustable inclination angle comprises a controller, a supporting plate, a base and at least three telescopic cylinders, the base is horizontally arranged, the supporting plate is arranged above the base, the telescopic cylinders are vertically arranged on the base and are distributed on the base in concentric circles, each telescopic cylinder can slide on the base in the radial direction of the concentric circle, the telescopic ends of the telescopic cylinders face upwards and are connected with the lower end of the supporting plate through universal balls, each telescopic cylinder is provided with a telescopic length measuring device for measuring the extension length of the telescopic cylinder, the telescopic length measuring devices and the telescopic cylinders are electrically connected with the controller, and the controller adjusts the telescopic amount of the telescopic cylinders according to the measured values of the telescopic length measuring devices so as to adjust the inclination angle of the supporting plate.

Description

Supporting table with automatically adjustable inclination angle and laser chip detection device
Technical Field
The invention belongs to the field of chip detection equipment, and particularly relates to a supporting table with an automatically adjustable inclination angle and a laser chip detection device.
Background
The parameters to be measured of the laser chip generally include power, peak wavelength, pulse frequency, beam width, divergence angle, etc. When testing a laser chip, the angle and the height of a test board carrying the laser chip are required to be adjusted, so that the laser to be tested can reach the correct position of the testing device at the correct angle, otherwise, a system error is introduced, and even the test cannot be completed. For example, if the laser path is not perpendicular to the sensor, the measured spot size will be too large, thereby affecting the beam width and divergence angle measurements; furthermore, if an optical fiber is used as the receiver, the effective receiving diameter is about several tens of micrometers, and the distance between the laser and the receiver can be several millimeters. At this time, even if there is a slight deflection of the laser light path, the receiver cannot receive the signal.
In the existing test equipment, the leveling method mainly adopted is manual leveling. The specific method comprises the following steps: and using a preinstalled laser to emit laser from one side of the test platform to a receiver which is also preinstalled on the other side of the test platform, wherein the optical path and the plane of the test platform coincide. The test platform can rotate around the center of the platform, and the sensor can detect the blocked proportion of the received light and display the blocked proportion by light. Through rotating test platform, can be through judging whether light blockking changes, whether detection test platform is horizontal. If the test platform is not horizontal, the test platform is adjusted by three adjusting knobs distributed around the test platform in an equilateral triangle. The existing manual leveling method is complex in operation, long in time consumption, low in precision and difficult to adjust in real time in the laser test process.
Disclosure of Invention
In order to solve the above technical problems, the present invention aims to provide a support table with high automation degree, which can automatically adjust the inclination angle of its support plate or automatically adjust its support plate to be horizontal.
In order to achieve the above object, the technical scheme of the present invention is as follows: the utility model provides an inclination automatically adjustable brace table, includes controller, backup pad, base and at least three flexible jar, the base level sets up, the backup pad sets up the top of base, a plurality of flexible jar is all vertical to be installed on the base and be concentric circle distribution on the base, and every flexible jar all is in can follow concentric circle's radial slip on the base, a plurality of flexible jar's flexible end all up to all be connected through the universal ball with the lower extreme of backup pad, every flexible jar all has the flexible length measuring device that is used for measuring flexible jar extension length, and a plurality of flexible length measuring device and a plurality of flexible jar all with the controller electricity is connected, the controller is according to a plurality of flexible length measuring device's measured value adjusts a plurality of flexible jar's flexible volume, in order to adjust the inclination of backup pad.
The beneficial effects of the technical scheme are that: so the different flexible volume of every flexible jar of accessible regulation is in order to adjust the inclination of backup pad, in addition every flexible jar is all slidable mounting on the base to make flexible jar slip in order to reserve the activity surplus for the support slope on the base.
In the technical scheme, three telescopic cylinders are arranged.
The beneficial effects of the technical scheme are that: the three telescopic cylinders can well support the supporting plate stably, and the adjusting is convenient.
In the above technical scheme, the base comprises three slide bars, three slide bars are all horizontally arranged, one ends of the three slide bars are fixedly connected, the angle between every two adjacent slide bars is 0 degrees, the three slide bars are in one-to-one correspondence with the three telescopic cylinders, each telescopic cylinder is respectively in sliding connection with the corresponding slide bar, and each telescopic cylinder can slide along the corresponding length direction of the slide bar on the corresponding slide bar.
The beneficial effects of the technical scheme are that: the structure is simple, and the stability is good.
In the above technical scheme the telescopic cylinder includes cylinder body, piston and stereoplasm pipe, the cylinder body is the cell body shape, the cylinder body is vertical to be set up, and its notch up, the piston slides and sealing mounting is in the cylinder body, the notch end of cylinder body is equipped with the internal flanging in order will the piston is spacing in the cylinder body, the universal ball is installed the upper end of piston, the spheroid of universal ball pass through a connecting rod with the lower extreme vertical connection of backup pad is fixed, three the connecting rod with the junction of backup pad lower extreme is same circle distribution, the stereoplasm pipe is vertical to be set up, and its upper end with cylinder body lower extreme middle part is connected and link up inside the cylinder body, stereoplasm pipe with correspond slide bar sliding connection, the lower extreme of stereoplasm pipe is the hydraulic fluid port.
The beneficial effects of the technical scheme are that: the telescopic oil cylinder is simple in structure, and the telescopic quantity of the telescopic oil cylinder can be adjusted by adjusting the oil inlet quantity in each cylinder body.
According to the technical scheme, the bar-shaped holes penetrating up and down are formed in the sliding bars along the length direction of the sliding bars, the sliding grooves are formed in the hole walls on the two sides of the bar-shaped holes, straight bar-shaped round tubes of the hard tubes are sleeved with pulleys, the hard tubes penetrate through the corresponding bar-shaped holes in the sliding bars, and the edges of the pulleys on the hard tubes extend into the corresponding sliding grooves in the sliding bars to be in sliding connection with the sliding bars.
The beneficial effects of the technical scheme are that: the sliding is convenient, and the resistance is small.
According to the technical scheme, the telescopic length measuring device comprises a camera arranged at the lower end of the piston and a calibration line arranged at the inner bottom wall of the cylinder body and positioned right below the camera, the camera faces downwards, the camera is used for measuring the distance between the lower end of the piston and the inner bottom wall of the cylinder body, and the actual distance between the to-be-measured distance point of the camera and the calibration line is h x, wherein the formula of h x is as follows:
Wherein, l 0 is the length of the calibration line in the photo taken when the actual length of the camera from the calibration line is h 0; and l 1, determining the length of the standard line in the photo taken when the actual length of the camera from the standard line is h 1, wherein h 1>h0,lx is the length of the standard line in the photo taken by the camera at the to-be-measured distance point.
The beneficial effects of the technical scheme are that: the distance measurement is convenient, and the accuracy is high.
In the technical scheme, the camera is embedded at the lower end of the piston.
The beneficial effects of the technical scheme are that: therefore, the pressure loss of the camera when the piston moves downwards to contact with the inner bottom wall of the cylinder body can be avoided.
The second object of the present invention is to provide a laser chip detection device with simple structure and high automation degree.
In order to achieve the above object, another technical solution of the present invention is as follows: the utility model provides a laser chip detection device, includes light receiver and the automatic adjustable brace table of inclination as above, the light receiver sets up to suspend to be established the top of backup pad, be used for placing the laser chip in the backup pad, the automatic adjustable brace table of inclination is used for adjusting the inclination of backup pad is so that the laser beam that the laser chip sent aims at the light receiver, perhaps adjusts the backup pad is to the level in order to reset.
The beneficial effects of the technical scheme are that: the automatic control device is simple in structure and high in automation degree.
Drawings
FIG. 1 is a schematic view of a support stand with an automatically adjustable tilt angle according to embodiment 1 of the present invention;
fig. 2 is a plan view of the support plate in embodiment 1 of the present invention;
FIG. 3 is a schematic view of the telescopic cylinder according to embodiment 1 of the present invention;
FIG. 4 is a diagram showing the combination of the base and the rigid tube according to embodiment 1 of the present invention;
FIG. 5 is a diagram showing the combination of the slide bar and the rigid tube according to embodiment 1 of the present invention;
Fig. 6 is a schematic diagram of a laser chip inspection apparatus according to embodiment 2 of the present invention.
In the figure: 1, a supporting table with automatically adjustable inclination angle, a 11 supporting plate, a 12 base, 121 sliding bars, 1211 bar holes, 1212 sliding grooves, 13 telescopic cylinders, 131 cylinder bodies, 132 pistons, 133 hard pipes, 1331 pulleys, 14 universal balls, 141 connecting rods, 151 cameras, 152 calibration lines and 2 light receivers.
Detailed Description
The principles and features of the present invention are described below with reference to the drawings, the examples are illustrated for the purpose of illustrating the invention and are not to be construed as limiting the scope of the invention.
Example 1
As shown in fig. 1, this embodiment provides an automatically adjustable support table of inclination angle, including controller, backup pad 11, base 12 and at least three telescopic cylinder 13, base 12 level sets up, backup pad 11 sets up the top of base 12, a plurality of telescopic cylinder 13 are all installed vertically on base 12 and be concentric circle distribution on base 12, and every telescopic cylinder 13 all can follow the radial slip of concentric circle on base 12, a plurality of telescopic cylinder 13's flexible end all up to all be connected through universal ball 14 with the lower extreme of backup pad 11, every telescopic cylinder 13 all has and is used for measuring telescopic cylinder extension length's flexible length measuring device, and a plurality of telescopic length measuring device and a plurality of telescopic cylinder 13 all with the controller electricity is connected, the controller is according to a plurality of telescopic length measuring device's measured value adjusts a plurality of telescopic cylinder 13's flexible volume, in order to adjust the inclination angle of backup pad 11, so can be through adjusting every different the telescopic cylinder's the flexible volume of each telescopic cylinder is adjusted the telescopic cylinder and is slided the base in addition and is made the telescopic cylinder is slided the base in order to reserve for the flexible angle of each telescopic cylinder.
Wherein, in above-mentioned technical scheme telescopic cylinder 13 be equipped with three, because three telescopic cylinder can be fine carry out stable support to the backup pad, and its regulation is convenient.
As shown in fig. 4, in the above technical solution, the base 12 includes three slide bars 121, three slide bars 121 are all horizontally arranged, one end of each slide bar 121 is fixedly connected, an angle between two adjacent slide bars 121 is 120 °, three slide bars 121 are in one-to-one correspondence with three telescopic cylinders 13, each telescopic cylinder 13 is respectively in sliding connection with the corresponding slide bar 121, and each telescopic cylinder 13 can slide on the corresponding slide bar 121 along the corresponding length direction of the corresponding slide bar 121.
As shown in fig. 2 and 3, in the above technical solution, the telescopic cylinder 13 includes a cylinder 131, a piston 132 and a hard tube 133, where the cylinder 131 is in a tank shape, the cylinder 131 is vertically disposed, and the notch of the hard tube is upward, the piston 132 is slidably and sealingly mounted in the cylinder 131, the notch end of the cylinder 131 is provided with an inward flange to limit the piston 132 in the cylinder 131, the universal ball 14 is mounted at the upper end of the piston 132, the ball of the universal ball 14 is vertically connected and fixed with the lower end of the supporting plate 11 by a connecting rod 141, the three connecting rods 141 are in the same circular distribution with the lower end of the supporting plate 11, the hard tube 133 is vertically disposed, and the upper end of the hard tube is connected with the middle of the lower end of the cylinder 131 and penetrates the inside the cylinder 131, the hard tube 133 is slidably connected with the corresponding slide rod 121, the lower end of the hard tube 133 is an oil port (the communication with a hydraulic fluid meter) for feeding or discharging oil into the cylinder to adjust the volume of the telescopic cylinder, the hydraulic oil is a colorless electromagnetic valve is used for controlling the volume of the electromagnetic valve, the electromagnetic valve is connected with the electromagnetic valve is used for controlling the volume of the electromagnetic valve through the electromagnetic valve, the electromagnetic valve is connected with the electromagnetic valve through the electromagnetic valve, and the electromagnetic valve is connected with the electromagnetic valve through the electromagnetic valve, the electromagnetic valve is connected with the electromagnetic valve through the electromagnetic valve, the electromagnetic flowmeter is used for measuring the oil inlet amount or the oil outlet amount in the corresponding telescopic cylinder (the telescopic amount can be converted through the oil inlet amount and the oil outlet amount and the sectional area of the inner hole of the corresponding cylinder body).
As shown in fig. 5, in the above technical solution, the sliding rod 121 is provided with a vertically penetrating bar-shaped hole 1211 along the length direction thereof, the hole walls on both sides of the bar-shaped hole 1211 are provided with sliding grooves 1212, the rigid tube 133 is provided with straight round tubes, each rigid tube 133 is sleeved with a pulley 1331 (the pulleys are coaxially rotatably mounted on the rigid tube), the rigid tube 133 passes through the corresponding bar-shaped hole 1211 on the sliding rod 121, and the edges of the pulleys 1331 thereon extend into the corresponding sliding grooves 1212 on the sliding rod 121 to be slidably connected with the sliding rod 121, so that the sliding is convenient and the resistance is small. Wherein the specification of three flexible jar is unanimous, and three flexible jar shrink to flexible volume return to zero, and the backup pad returns to the horizontality.
In the above technical solution, the telescopic length measuring device includes a camera 151 disposed at the lower end of the piston 132 and a calibration line 152 disposed at the inner bottom wall of the cylinder 131 and located right below the camera 151 (waterproof camera) (the calibration line is preferably a protruding strip protruding from the inner bottom wall of the cylinder and having a straight strip shape, the length of the protruding strip may be 1cm, the height may be 0.2mm, and the width may be 1 mm), the camera 151 faces downward, where a wire of the camera is preferably passed through the piston and performs a sealing treatment, the camera 151 is used to measure a distance between the lower end of the piston 132 and the inner bottom wall of the cylinder 131, and an actual distance between a measured distance point of the camera 151 and the calibration line 152 is h x, where h x is as follows:
Wherein l 0 is the length of the calibration line 152 in the photograph taken when the actual length of the camera 151 from the calibration line 152 is h 0; l 1 the length of the calibration line 152 in the photograph taken when the actual length of the camera 151 from the calibration line 152 is h 1, wherein h 1>h0,lx is the length of the calibration line 152 in the photograph taken by the camera 151 at the point to be measured, the distance measurement is convenient, and the accuracy is high.
In the above technical solution, the camera 151 is embedded at the lower end of the piston 132, so as to avoid the pressure loss of the camera when the piston moves down to contact with the inner bottom wall of the cylinder, and the controller may be a PLC controller or a control chip with better performance.
Example 2
As shown in fig. 6, the present embodiment provides a laser chip detection device, which includes a light receiver 2 (which belongs to the prior art and is not described herein) and a support table 1 with an automatically adjustable inclination angle as described in embodiment 1, wherein the light receiver 2 is suspended above the support plate 11 (with its light receiving end inclined downward and facing downward towards the support plate), the support plate 11 is used for placing a laser chip, and the support table 1 with an automatically adjustable inclination angle is used for adjusting the inclination angle of the support plate 11 so that a laser beam emitted by the laser chip is aligned with the light receiver 2, or adjusting the support plate 11 to be horizontal for resetting, so that the structure is simple and the automation degree is high. The mounting seat is used for detachably mounting the laser chip, the mounting seat is provided with a probe which can be electrically connected with the laser chip, after the laser chip is mounted in place on the mounting seat, the laser chip is electrically connected with the mounting seat, the mounting seat is electrically connected with a power supply through a wire, the position of the light receiver is fixed relative to a supporting table with an automatically adjustable inclination angle, at the moment, three telescopic cylinders are controlled to be respectively extended (but the extension of each telescopic cylinder is preset) to incline to the supporting plate, the laser chip faces the light receiver 2 (the laser chip emits laser to the light receiver), after the test is completed, the controller controls the three telescopic cylinders to be contracted to the initial position to the supporting plate level, and the laser chip after the test is completed is taken away. Preferably, the light receiver can adopt an LBP2-SAM-BB2 light beam sampling device of Newport company, the supported wavelength range is 190-1550nm, and the light receiver can be matched with an LBP2-HR-I R laser beam analyzer to analyze the received light so as to judge whether the laser chip is qualified or not.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims (3)

1. The automatic inclination angle-adjustable supporting table is characterized by comprising a controller, a supporting plate (11), a base (12) and at least three telescopic cylinders (13), wherein the base (12) is horizontally arranged, the supporting plate (11) is arranged above the base (12), a plurality of telescopic cylinders (13) are vertically arranged on the base (12) and distributed in concentric circles on the base (12), each telescopic cylinder (13) can slide on the base (12) along the radial direction of the concentric circles, the telescopic ends of a plurality of telescopic cylinders (13) face upwards and are connected with the lower end of the supporting plate (11) through universal balls (14), each telescopic cylinder (13) is provided with a telescopic length measuring device for measuring the telescopic length of the telescopic cylinder, the telescopic length measuring devices and the telescopic cylinders (13) are electrically connected with the controller, and the controller adjusts the telescopic angle of the telescopic cylinders (13) according to the measured values of the telescopic length measuring devices so as to adjust the inclination angle of the supporting plate (11); the telescopic cylinders (13) are provided with three telescopic cylinders;
The base (12) comprises three sliding rods (121), the three sliding rods (121) are horizontally arranged, one ends of the three sliding rods (121) are fixedly connected, the angle between every two adjacent sliding rods (121) is 120 degrees, the three sliding rods (121) are in one-to-one correspondence with the three telescopic cylinders (13), each telescopic cylinder (13) is respectively in sliding connection with the corresponding sliding rod (121), and each telescopic cylinder (13) can slide on the corresponding sliding rod (121) along the length direction of the corresponding sliding rod (121); the telescopic cylinder (13) comprises a cylinder body (131), a piston (132) and a hard tube (133), wherein the cylinder body (131) is in a groove shape, the cylinder body (131) is vertically arranged, a notch of the cylinder body faces upwards, the piston (132) is slidably and hermetically arranged in the cylinder body (131), an inward flanging is arranged at the notch end of the cylinder body (131) so as to limit the piston (132) in the cylinder body (131), a universal ball (14) is arranged at the upper end of the piston (132), a ball body of the universal ball (14) is vertically connected and fixed with the lower end of the supporting plate (11) through a connecting rod (141), the connecting positions of the three connecting rods (141) and the lower end of the supporting plate (11) are in the same circle, the hard tube (133) is vertically arranged, the upper end of the hard tube is connected with the middle of the lower end of the cylinder body (131) and penetrates through the inside the cylinder body (131), the hard tube (133) is slidably connected with a corresponding sliding rod (121), and the lower end of the hard tube (133) is an oil port; the telescopic length measuring device comprises a camera (151) arranged at the lower end of the piston (132) and a calibration line (152) arranged on the inner bottom wall of the cylinder body (131) and located right below the camera (151), the camera (151) faces downwards, the camera (151) is used for measuring the distance between the lower end of the piston (132) and the inner bottom wall of the cylinder body (131), and the actual distance between the distance point to be measured of the camera (151) and the calibration line (152) is h x, wherein the formula of h x is as follows:
wherein l 0 is the length of the calibration line (152) in the photo taken when the actual length of the camera (151) from the calibration line (152) is h 0; l 1 the length of the standard line (152) in the photo taken when the actual length of the camera (151) from the standard line (152) is h 1, wherein h 1>h0,lx is the length of the standard line (152) in the photo taken by the camera (151) at the distance point to be measured; the sliding rod (121) is provided with a strip-shaped hole (1211) penetrating up and down along the length direction of the sliding rod, the hole walls on two sides of the strip-shaped hole (1211) are provided with sliding grooves (1212), straight strip-shaped round pipes of the hard pipes (133) are sleeved with pulleys (1331) on each hard pipe (133), the hard pipes (133) penetrate through the corresponding strip-shaped hole (1211) on the sliding rod (121), and the edges of the pulleys (1331) on the pulleys extend into the corresponding sliding grooves (1212) on the sliding rod (121) to be in sliding connection with the sliding rod (121).
2. The support table with automatically adjustable inclination angle according to claim 1, wherein the camera (151) is embedded at the lower end of the piston (132).
3. The laser chip detection device is characterized by comprising a light receiver (2) and the supporting table (1) with the automatically adjustable inclination angle according to claim 1 or 2, wherein the light receiver (2) is arranged and suspended above the supporting plate (11), the supporting plate (11) is used for placing a laser chip, and the supporting table (1) with the automatically adjustable inclination angle is used for adjusting the inclination angle of the supporting plate (11) so that a laser beam emitted by the laser chip is aligned with the light receiver (2), or adjusting the supporting plate (11) to be horizontal for resetting.
CN202110987320.0A 2021-08-26 2021-08-26 Supporting table with automatically adjustable inclination angle and laser chip detection device Active CN113791085B (en)

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CN113791085B true CN113791085B (en) 2024-06-04

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CN213290196U (en) * 2020-09-14 2021-05-28 上海冀望自动化控制设备有限公司 Ultra-precise three-degree-of-freedom motion platform
CN213800233U (en) * 2020-11-16 2021-07-27 安徽飞翼航空科技有限公司 Unmanned helicopter test equipment

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