CN113791085A - Supporting table with automatically adjustable inclination angle and laser chip detection device - Google Patents
Supporting table with automatically adjustable inclination angle and laser chip detection device Download PDFInfo
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- CN113791085A CN113791085A CN202110987320.0A CN202110987320A CN113791085A CN 113791085 A CN113791085 A CN 113791085A CN 202110987320 A CN202110987320 A CN 202110987320A CN 113791085 A CN113791085 A CN 113791085A
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- 238000001514 detection method Methods 0.000 title claims abstract description 8
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000012360 testing method Methods 0.000 description 16
- 239000003921 oil Substances 0.000 description 11
- 230000009286 beneficial effect Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 6
- 238000007599 discharging Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000010720 hydraulic oil Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The invention discloses a supporting table with an automatically adjustable inclination angle and a laser chip detection device, the automatically adjustable inclination angle comprises a controller, a supporting plate, a base and at least three telescopic cylinders, the base is horizontally arranged, the supporting plate is arranged above the base, a plurality of telescopic cylinders are vertically arranged on the base and are distributed on the base in a concentric circle shape, each telescopic cylinder can slide on the base along the radial direction of the concentric circle, the telescopic ends of the plurality of telescopic cylinders are upward and are connected with the lower end of the supporting plate through universal balls, each telescopic cylinder is provided with a telescopic length measuring device for measuring the extension length of the telescopic cylinder, the plurality of telescopic length measuring devices and the plurality of telescopic cylinders are electrically connected with the controller, the controller adjusts the telescopic amount of the plurality of telescopic cylinders according to the measurement values of the plurality of telescopic length measuring devices to adjust the inclination angle of the supporting plate, and the automatic degree is high, and the inclination angle of the supporting plate can be flexibly adjusted.
Description
Technical Field
The invention belongs to the field of chip detection equipment, and particularly relates to a supporting table with an automatically adjustable inclination angle and a laser chip detection device.
Background
The parameters to be measured of the laser chip generally include power, peak wavelength, pulse frequency, beam width, divergence angle, and the like. When testing the laser chip, the angle and height of the test platform for bearing the laser chip need to be ensured to be adjustable, so that the laser to be tested can reach the correct position of the test device at the correct angle, otherwise, a system error is introduced, and even the test cannot be completed. For example, if the laser light path and the sensor are not perpendicular, the measured spot size will be larger, thereby affecting the measurement results of the beam width and the divergence angle; furthermore, if an optical fiber is used as the receiver, the effective receiving diameter is about tens of microns, and the distance between the laser and the receiver can reach several millimeters. In this case, even if there is a slight deflection in the laser beam path, the signal cannot be received by the receiver.
In the existing test equipment, the leveling method mainly adopted is manual leveling. The specific method comprises the following steps: and a pre-installed laser is used for emitting laser from one side of the test platform to a receiver which is also pre-installed on the other side of the test platform, and the light path is superposed with the plane of the test platform. The test platform can rotate around the center of the platform, and the sensor can detect the blocked proportion of the received light and display the proportion by using light. By rotating the test platform, whether the test platform is horizontal or not can be detected by judging whether the light blockage changes or not. If the test platform is not horizontal, the three adjusting knobs distributed around the test platform in an equilateral triangle are used for adjustment. The existing manual leveling method is complex to operate, long in time consumption, low in precision and difficult to adjust in real time in the process of laser testing.
Disclosure of Invention
In order to solve the above-mentioned problems, an object of the present invention is to provide a support table with high degree of automation, which can automatically adjust the inclination angle of the support plate or automatically adjust the support plate to be horizontal.
In order to achieve the purpose, the technical scheme of the invention is as follows: a supporting table with an automatically adjustable inclination angle comprises a controller, a supporting plate, a base and at least three telescopic cylinders, the base is horizontally arranged, the supporting plate is arranged above the base, the plurality of telescopic cylinders are vertically arranged on the base and are distributed on the base in concentric circles, each telescopic cylinder can slide on the base along the radial direction of the concentric circles, the telescopic ends of the telescopic cylinders are upward, and are connected with the lower end of the supporting plate through universal balls, each telescopic cylinder is provided with a telescopic length measuring device for measuring the extension length of the telescopic cylinder, and the plurality of telescopic length measuring devices and the plurality of telescopic cylinders are electrically connected with the controller, the controller adjusts the telescopic amount of the telescopic cylinders according to the measured values of the telescopic length measuring devices so as to adjust the inclination angle of the supporting plate.
The beneficial effects of the above technical scheme are that: like this the different flexible volume of every telescoping cylinder of accessible regulation is in order to adjust the inclination of backup pad, every in addition the equal slidable mounting of telescoping cylinder is on the base to make the telescoping cylinder slide on the base and reserve the allowance for supporting the slope.
In the technical scheme, the number of the telescopic cylinders is three.
The beneficial effects of the above technical scheme are that: because the three telescoping cylinders can be fine carry out stable support to the backup pad, and it is convenient to adjust.
In the technical scheme, the base comprises three sliding rods, the three sliding rods are horizontally arranged, one ends of the three sliding rods are fixedly connected, the angle between every two adjacent sliding rods is 0 degree, the three sliding rods correspond to the three telescopic cylinders one to one, each telescopic cylinder is in sliding connection with the corresponding sliding rod, and each telescopic cylinder can slide on the corresponding sliding rod along the length direction of the corresponding sliding rod.
The beneficial effects of the above technical scheme are that: the structure is simple, and the stability is good.
In the technical scheme, the telescopic cylinder comprises a cylinder body, a piston and a hard pipe, the cylinder body is in a groove shape, the cylinder body is vertically arranged, a notch of the cylinder body is upward, the piston is slidably and hermetically installed in the cylinder body, an inward flange is arranged at the notch end of the cylinder body to limit the piston in the cylinder body, a universal ball is installed at the upper end of the piston, a ball body of the universal ball is vertically and fixedly connected with the lower end of a supporting plate through a connecting rod, the connecting positions of the connecting rod and the lower end of the supporting plate are distributed in the same circle, the hard pipe is vertically arranged, the upper end of the hard pipe is connected with the middle of the lower end of the cylinder body and penetrates through the inside of the cylinder body, the hard pipe is in sliding connection with the corresponding sliding rod, and the lower end of the hard pipe is an oil port.
The beneficial effects of the above technical scheme are that: the telescopic cylinder is simple in structure, and the telescopic amount of the telescopic cylinder can be adjusted by adjusting the oil inlet amount in each cylinder body.
In the technical scheme, a strip-shaped hole which penetrates through the sliding rod from top to bottom is formed in the sliding rod along the length direction of the sliding rod, sliding chutes are formed in the hole walls of two sides of the strip-shaped hole, a straight-strip-shaped round pipe of a hard pipe is arranged on each hard pipe in a sleeved mode and is provided with a pulley, the hard pipe penetrates through the corresponding strip-shaped hole in the sliding rod, and the edge of the pulley on the hard pipe extends into the corresponding sliding chute in the sliding rod to be connected with the sliding rod in a sliding mode.
The beneficial effects of the above technical scheme are that: it is convenient to slide and has small resistance.
In the above technical scheme, the telescopic length measuring device comprises a camera arranged at the lower end of the piston and a calibration line arranged on the inner bottom wall of the cylinder and located right below the camera, the camera faces downwards, the camera is used for measuring the distance between the lower end of the piston and the inner bottom wall of the cylinder, and the actual distance between a point to be measured and the calibration line is hxWherein h isxThe formula is as follows:
wherein l0The actual length of the camera from the calibration line is h0The length of the calibration line in the shot picture; l1The actual length of the camera from the standard line is h1The length of the calibration line in the photo taken, wherein h1>h0，lxAnd marking the length of the line for the camera in the picture taken by the point to be measured.
The beneficial effects of the above technical scheme are that: the distance measurement is convenient and the accuracy is high.
In the technical scheme, the camera is embedded at the lower end of the piston.
The beneficial effects of the above technical scheme are that: so can avoid the piston to press the camera to decrease when moving down to and the contact of cylinder body internal wall.
The second purpose of the present invention is to provide a laser chip inspection device with simple structure and high automation.
In order to achieve the above object, another technical solution of the present invention is as follows: the utility model provides a laser chip detection device, includes light receiver and as above inclination automatic adjustable's brace table, light receiver sets up to hang and establishes the top of backup pad, be used for placing the laser chip in the backup pad, inclination automatic adjustable's brace table is used for adjusting the inclination of backup pad is so that the laser beam that the laser chip sent is aimed at light receiver, or adjusts backup pad to level is in order to reset.
The beneficial effects of the above technical scheme are that: the device has simple structure and high automation degree.
Drawings
FIG. 1 is a schematic view of a support platform with an automatically adjustable tilt angle according to embodiment 1 of the present invention;
FIG. 2 is a plan view of the support plate in embodiment 1 of the present invention;
FIG. 3 is a schematic view showing the structure of the telescopic cylinder in example 1 of the present invention;
FIG. 4 is a diagram illustrating the base and the rigid tube according to embodiment 1 of the present invention;
FIG. 5 is a drawing showing the slide bar and the rigid tube according to example 1 of the present invention;
FIG. 6 is a schematic diagram of a laser chip inspection apparatus according to embodiment 2 of the present invention.
In the figure: 1 supporting table with automatically adjustable inclination angle, 11 supporting plates, 12 bases, 121 sliding rods, 1211 strip-shaped holes, 1212 sliding chutes, 13 telescopic cylinders, 131 cylinder bodies, 132 pistons, 133 hard tubes, 1331 pulleys, 14 universal balls, 141 connecting rods, 151 cameras, 152 calibration lines and 2 light receivers.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Example 1
As shown in fig. 1, this embodiment provides a supporting table with an automatically adjustable inclination angle, which includes a controller, a supporting plate 11, a base 12 and at least three telescopic cylinders 13, wherein the base 12 is horizontally disposed, the supporting plate 11 is disposed above the base 12, a plurality of telescopic cylinders 13 are vertically mounted on the base 12 and are distributed on the base 12 in concentric circles, each telescopic cylinder 13 is disposed on the base 12 and can slide along a radial direction of the concentric circle, a plurality of telescopic ends of the telescopic cylinders 13 face upward and are connected to a lower end of the supporting plate 11 through a universal ball 14, each telescopic cylinder 13 has a telescopic length measuring device for measuring an extension length of the telescopic cylinder, and the plurality of telescopic length measuring devices and the plurality of telescopic cylinders 13 are electrically connected to the controller, the controller adjusts a telescopic amount of the plurality of telescopic cylinders 13 according to a measurement value of the plurality of telescopic length measuring devices, with the regulation the inclination of backup pad 11, so the accessible is adjusted the different flexible volume of every telescoping cylinder and is in order to adjust the inclination of backup pad, every in addition the equal slidable mounting of telescoping cylinder is on the base to make the telescoping cylinder slide on the base and reserve the allowance for the support slope.
Wherein, the telescoping cylinder 13 is equipped with threely among the above-mentioned technical scheme, because the stable support of carrying on of three telescoping cylinder ability fine, and its regulation is convenient.
As shown in fig. 4, in the above technical solution, the base 12 includes three sliding rods 121, the three sliding rods 121 are all horizontally disposed, one end of each of the three sliding rods 121 is fixedly connected, an angle between two adjacent sliding rods 121 is 120 °, the three sliding rods 121 correspond to the three telescopic cylinders 13 one by one, each telescopic cylinder 13 is respectively connected to the corresponding sliding rod 121 in a sliding manner, and each telescopic cylinder 13 can slide on the corresponding sliding rod 121 along the length direction of the corresponding sliding rod 121, so that the structure is simple and the stability is good.
As shown in fig. 2 and 3, in the above technical solution, the telescopic cylinder 13 includes a cylinder body 131, a piston 132 and a rigid tube 133, the cylinder body 131 is shaped like a trough, the cylinder body 131 is vertically disposed, and a notch of the cylinder body 131 faces upward, the piston 132 is slidably and hermetically mounted in the cylinder body 131, an inward flange is disposed at a notch end of the cylinder body 131 to limit the piston 132 in the cylinder body 131, the universal ball 14 is mounted at an upper end of the piston 132, a ball of the universal ball 14 is vertically connected and fixed to a lower end of the support plate 11 through a connecting rod 141, the three connecting rods 141 and a connection portion of the lower end of the support plate 11 are distributed in the same circle, the rigid tube 133 is vertically disposed, and an upper end of the rigid tube 133 is connected to a middle portion of the lower end of the cylinder body 131 and penetrates through the inside of the cylinder body 131, the rigid tube 133 is slidably connected to the corresponding slide rod 121, a lower end of the rigid tube 133 is connected to an oil port (communicated with a hydraulic station, the telescopic cylinder is used for feeding oil or discharging oil into or from the cylinder body to adjust the telescopic amount of the telescopic cylinder, wherein colorless hydraulic oil is adopted for the hydraulic oil, the transparency is high), the structure is simple, the oil feeding amount or the oil discharging amount in each telescopic cylinder can be adjusted to adjust the telescopic amount, the hard pipe is provided with an electromagnetic valve and an electromagnetic flowmeter, the electromagnetic valve and the electromagnetic flowmeter are electrically connected with the controller, the controller controls the corresponding extension or contraction of the telescopic cylinder by adjusting the opening and closing of the electromagnetic valve corresponding to the hard pipe, the hard pipe is communicated with the hydraulic station, and the electromagnetic flowmeter is used for measuring the oil feeding amount or the oil discharging amount in the corresponding telescopic cylinder (the telescopic amount can be calculated by changing the oil feeding amount, the oil discharging amount and the cross-section area of the inner hole of the corresponding cylinder body).
As shown in fig. 5, in the above technical solution, the sliding rod 121 is provided with a strip-shaped hole 1211 penetrating up and down along the length direction thereof, the hole walls at two sides of the strip-shaped hole 1211 are provided with sliding grooves 1212, each rigid tube 133 is a straight round tube, a pulley 1331 is sleeved on each rigid tube 133 (the pulley is coaxially and rotatably mounted on the rigid tube), the rigid tube 133 passes through the corresponding strip-shaped hole 1211 on the sliding rod 121, and the edge of the pulley 1331 thereon extends into the corresponding sliding groove 1212 on the sliding rod 121 to be slidably connected with the sliding rod 121, so that the sliding is convenient and the resistance is small. The three telescopic cylinders are in the same specification, and when the three telescopic cylinders contract to the zero return of the telescopic amount, the supporting plate returns to the horizontal state.
In the above technical solution the telescopic length measuring device comprises a camera 151 arranged at the lower end of the piston 132 and a calibration line 152 arranged at the bottom wall of the cylinder body 131 and located under the camera 151 (waterproof camera) (the calibration line is preferably convexly arranged on the inner bottom wall of the cylinder body and is a straight raised line, the length of the raised line can be 1cm, the height of the raised line can be 0.2mm, and the width of the raised line is 1mm), the camera 151 faces downwards, wherein a lead of the camera can pass through the piston and is sealed, the camera 151 is used for measuring the distance between the lower end of the piston 132 and the bottom wall of the cylinder body 131, and the actual distance between the distance point to be measured and the calibration line 152 of the camera 151 is hxWherein h isxThe formula is as follows:
wherein l0The actual length of the camera 151 from the calibration line 152 is h0The length of the calibration line 152 in the photograph taken; l1The actual length of the camera 151 from the calibration line 152 is h1The length of the calibration line 152 in the photograph taken, where h1>h0，lxThe length of the calibration line 152 is marked in the picture taken by the camera 151 at the point to be measured, the distance measurement is convenient, and the accuracy is high.
In the above technical scheme, the camera 151 is embedded in the lower end of the piston 132, so that the pressure loss of the camera when the piston moves downwards to contact with the inner bottom wall of the cylinder body can be avoided, and the controller can adopt a PLC (programmable logic controller) or a control chip with better performance.
Example 2
As shown in fig. 6, this embodiment provides a laser chip detection apparatus, which includes an optical receiver 2 (belonging to the prior art and not described herein) and the supporting platform 1 with an automatically adjustable tilt angle according to embodiment 1, wherein the optical receiver 2 is suspended on a side of the supporting plate 11 (with its light receiving end inclined downward and facing downward), the supporting plate 11 is used for placing a laser chip thereon, and the supporting platform 1 with an automatically adjustable tilt angle is used for adjusting the tilt angle of the supporting plate 11 so that a laser beam emitted by the laser chip is directed at the optical receiver 2, or adjusting the supporting plate 11 to be horizontal for resetting. Wherein, the supporting plate is provided with a mounting seat of the laser chip (which is prior art and is not described herein), the mounting seat is used for detachably mounting the laser chip, and the mounting seat is provided with a probe which can be electrically connected with the laser chip, when the laser chip is installed in place on the installation seat, the laser chip is electrically connected with the installation seat, the installation seat is electrically connected with a power supply through a lead, the position of the light receiver is fixed relative to the support table with the automatically adjustable inclination angle, at the moment, the three telescopic cylinders are controlled and controlled to respectively extend (but the extension amount of each telescopic cylinder is preset) until the support plate inclines, the laser chip faces the light receiver 2 (the laser chip emits laser to the light receiver), after the test is finished, the controller controls the three telescopic cylinders to contract to the initial positions to reach the level of the supporting plate, and the laser chip after the test is finished is taken away. Preferably, the optical receiver can adopt an LBP2-SAM-BB2 light beam sampling device of Newport company, which supports a wavelength range of 190-1550nm, and the optical receiver can be matched with an LBP2-HR-I R3 laser beam analyzer to analyze the light received by the optical receiver to judge whether the laser chip is qualified.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (8)
1. The supporting table with the automatically adjustable inclination angle is characterized by comprising a controller, a supporting plate (11), a base (12) and at least three telescopic cylinders (13), wherein the base (12) is horizontally arranged, the supporting plate (11) is arranged above the base (12), the telescopic cylinders (13) are vertically arranged on the base (12) and are distributed on the base (12) in a concentric circle manner, each telescopic cylinder (13) can slide on the base (12) in the radial direction of the concentric circle, the telescopic ends of the telescopic cylinders (13) face upwards and are connected with the lower end of the supporting plate (11) through universal balls (14), each telescopic cylinder (13) is provided with a telescopic length measuring device for measuring the extension length of the telescopic cylinder, and the telescopic length measuring device and the telescopic cylinders (13) are electrically connected with the controller, the controller adjusts the telescopic amount of the telescopic cylinders (13) according to the measured values of the telescopic length measuring devices so as to adjust the inclination angle of the supporting plate (11).
2. A support table with an automatically adjustable inclination according to claim 1, characterized in that said telescopic cylinders (13) are provided in three.
3. A support table with an automatically adjustable inclination angle according to claim 2, wherein the base (12) comprises three sliding rods (121), the three sliding rods (121) are all horizontally arranged, one ends of the three sliding rods (121) are fixedly connected, an angle between two adjacent sliding rods (121) is 120 °, the three sliding rods (121) are in one-to-one correspondence with the three telescopic cylinders (13), each telescopic cylinder (13) is slidably connected with the corresponding sliding rod (121), and each telescopic cylinder (13) can slide on the corresponding sliding rod (121) along the length direction of the corresponding sliding rod (121).
4. A support table with an automatically adjustable inclination angle according to claim 3, wherein the telescopic cylinder (13) comprises a cylinder body (131), a piston (132) and a rigid pipe (133), the cylinder body (131) is groove-shaped, the cylinder body (131) is vertically arranged with its notch facing upwards, the piston (132) is slidably and hermetically mounted in the cylinder body (131), an inward flange is provided at the notch end of the cylinder body (131) to limit the piston (132) in the cylinder body (131), the universal ball (14) is mounted at the upper end of the piston (132), the ball of the universal ball (14) is vertically connected and fixed with the lower end of the support plate (11) through a connecting rod (141), the joints of the three connecting rods (141) and the lower end of the support plate (11) are distributed in the same circle, the rigid pipe (133) is vertically arranged, and the upper end of the rigid pipe is connected with the middle of the lower end of the cylinder body (131) and penetrates through the inside of the cylinder body (131), the hard pipe (133) is in sliding connection with the corresponding sliding rod (121), and an oil port is formed in the lower end of the hard pipe (133).
5. A support table with an automatically adjustable inclination angle according to claim 4, wherein the slide bar (121) is provided with a strip-shaped hole (1211) penetrating through the slide bar up and down along the length direction of the slide bar, the hole walls on both sides of the strip-shaped hole (1211) are provided with sliding grooves (1212), a straight strip-shaped circular tube of the rigid tube (133) is sleeved with a pulley (1331) on each rigid tube (133), the rigid tube (133) passes through the corresponding strip-shaped hole (1211) on the slide bar (121), and the edge of the pulley (1331) thereon extends into the corresponding sliding groove (1212) on the slide bar (121) to be slidably connected with the slide bar (121).
6. A support table with an automatically adjustable inclination angle according to any one of claims 4 or 5, wherein the telescopic length measuring device comprises a camera (151) arranged at the lower end of the piston (132) and a calibration line (152) arranged at the inner bottom wall of the cylinder (131) and located right below the camera (151), the camera (151) faces downwards, the camera (151) is used for measuring the distance between the lower end of the piston (132) and the inner bottom wall of the cylinder (131), and the actual distance between the point to be measured and the calibration line (152) of the camera (151) is hxWherein h isxThe formula is as follows:
wherein l0Is a camera (1)51) An actual length h from the calibration line (152)0The length of the calibration line (152) in the shot picture; l1The actual length of the camera (151) from the calibration line (152) is h1The length of a calibration line (152) in a photograph taken, where h1>h0，lxThe length of a line (152) is marked for the picture taken by the camera (151) at the point to be measured.
7. A support table with an automatically adjustable tilt angle according to claim 6, wherein the camera (151) is fitted on the lower end of the piston (132).
8. A laser chip detection device, comprising a light receiver (2) and the supporting platform (1) with an automatically adjustable tilt angle according to any one of claims 1-7, wherein the light receiver (2) is suspended above the supporting plate (11), the supporting plate (11) is used for placing a laser chip, and the supporting platform (1) with an automatically adjustable tilt angle is used for adjusting the tilt angle of the supporting plate (11) so that a laser beam emitted by the laser chip is aligned with the light receiver (2), or adjusting the supporting plate (11) to the horizontal level for resetting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110987320.0A CN113791085B (en) | 2021-08-26 | Supporting table with automatically adjustable inclination angle and laser chip detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110987320.0A CN113791085B (en) | 2021-08-26 | Supporting table with automatically adjustable inclination angle and laser chip detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113791085A true CN113791085A (en) | 2021-12-14 |
| CN113791085B CN113791085B (en) | 2024-06-04 |
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