CN113790576A - High-purity oxygen purification device and purification method thereof - Google Patents

High-purity oxygen purification device and purification method thereof Download PDF

Info

Publication number
CN113790576A
CN113790576A CN202111095629.5A CN202111095629A CN113790576A CN 113790576 A CN113790576 A CN 113790576A CN 202111095629 A CN202111095629 A CN 202111095629A CN 113790576 A CN113790576 A CN 113790576A
Authority
CN
China
Prior art keywords
purity oxygen
oxygen
tower
purity
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202111095629.5A
Other languages
Chinese (zh)
Inventor
游刚
陆付杰
穆克
杨威
周小伟
朱红丽
王春喜
吴日铭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongtai Hongren Gas Co ltd
Original Assignee
Dongtai Hongren Gas Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongtai Hongren Gas Co ltd filed Critical Dongtai Hongren Gas Co ltd
Priority to CN202111095629.5A priority Critical patent/CN113790576A/en
Publication of CN113790576A publication Critical patent/CN113790576A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J5/00Arrangements of cold exchangers or cold accumulators in separation or liquefaction plants
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00Processes characterised by the type or other details of the product stream
    • F25J2215/50Oxygen or special cases, e.g. isotope-mixtures or low purity O2
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00Processes characterised by the type or other details of the product stream
    • F25J2215/50Oxygen or special cases, e.g. isotope-mixtures or low purity O2
    • F25J2215/56Ultra high purity oxygen, i.e. generally more than 99,9% O2
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2220/00Processes or apparatus involving steps for the removal of impurities
    • F25J2220/50Separating low boiling, i.e. more volatile components from oxygen, e.g. N2, Ar
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2220/00Processes or apparatus involving steps for the removal of impurities
    • F25J2220/52Separating high boiling, i.e. less volatile components from oxygen, e.g. Kr, Xe, Hydrocarbons, Nitrous oxides, O3

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Abstract

The invention discloses a high-purity oxygen purification device and a purification method thereof, wherein the device comprises a raw material liquid oxygen tank, a first condenser, a second condenser, a first high-purity oxygen tower, an evaporator, a second high-purity oxygen tower and a product tank; the raw material liquid oxygen tank is communicated with the first high-purity oxygen tower, and the top of the first high-purity oxygen tower is provided with the first condenser; the first high-purity oxygen tower is communicated with the second high-purity oxygen tower, the second condenser is arranged at the top of the second high-purity oxygen tower, and the evaporator is arranged at the bottom of the second high-purity oxygen tower; the second high-purity oxygen tower is communicated with the product tank. According to the high-purity oxygen purification device and the purification method thereof, the total hydrocarbon content of the rectified oxygen component is lower than 1PPm, and the content of impurities such as argon and nitrogen is lower than 5 PPm; the rectification working condition is stable, the product quality is stable, and the purity of the obtained oxygen can reach 99.999 percent.

Description

High-purity oxygen purification device and purification method thereof
Technical Field
The invention belongs to the technical field of gas purification and manufacturing, and particularly relates to a high-purity oxygen purification device and a purification method thereof.
Background
At present, the production of high-purity oxygen in a cryogenic device is mostly configured in a device with a large production scale, and the preparation of the high-purity oxygen is purposefully designed according to the characteristics of the taken feed gas and the content of impurities in the feed gas. The feed gas of high-purity oxygen is liquid oxygen, gas oxygen in the extraction upper column or liquid phase fraction in the crude argon column usually, and the purification of rectifying is carried out to the high-purity oxygen system that different devices configured, all has the operation of high-purity oxygen unstable, and main tower operating mode is big to its influence, hardly guarantees the shortcoming of the purity of high-purity oxygen, and most products all need after purification, and the purity can reach the technical index of high-purity oxygen. This not only involves the design of the process, the design of the equipment and the design of the control system, but also involves many factors such as the actual operation control.
The method for preparing high purity oxygen by adopting cryogenic rectification is a mature industrial method, but at present, the method is attached in a large air separation plant cold box, and the high purity oxygen is prepared by adopting single-tower rectification. The equipment for rectifying and separating air is called rectifying tower, and includes lower tower, upper tower and main condensing evaporator. In the rectifying column, when the oxygen-nitrogen mixture in a saturated state passes through the oxygen-nitrogen mixture at a lower temperature than the oxygen-nitrogen mixture, a high boiling point component (i.e., a component oxygen which is difficult to evaporate) in a gas phase is partially condensed into a liquid, and latent heat of condensation is released, and at the same time, a low boiling point component (i.e., a component nitrogen which is easy to evaporate) in a liquid phase absorbs heat to evaporate, so that the partial condensation and the partial evaporation are repeated for a plurality of times, the higher the upper the nitrogen component in the gas phase is, the higher the lower the nitrogen component in the gas phase is, and the higher the oxygen component in the liquid phase is. This process of partial rectification and partial evaporation is referred to as rectification.
At present, no independent equipment for preparing purified oxygen by using common industrial oxygen exists, and the purity of the purified oxygen cannot meet the technical requirement of electronic industrial grade on oxygen purity due to the adoption of single-tower rectification.
The normal temperature adsorption method is adopted to prepare high purity oxygen, the technical index can meet the requirement of high purity oxygen for electronic grade, but the requirement on raw material oxygen is higher, and the common industrial oxygen cannot be reached; and the price of the selected adsorbing material is high, which does not meet the requirement of industrial production.
Disclosure of Invention
The purpose of the invention is as follows: the invention aims to overcome the defects in the prior art and provides a high-purity oxygen purification device and a purification method thereof, wherein the product purity can reach 99.999%.
The technical scheme is as follows: the invention relates to a high-purity oxygen purification device, which comprises a raw material liquid oxygen tank, a first condenser, a second condenser, a first high-purity oxygen tower, an evaporator, a second high-purity oxygen tower and a product tank, wherein the raw material liquid oxygen tank is connected with the first condenser;
the raw material liquid oxygen tank is communicated with the first high-purity oxygen tower, and the top of the first high-purity oxygen tower is provided with the first condenser; the first high-purity oxygen tower is communicated with the second high-purity oxygen tower, the second condenser is arranged at the top of the second high-purity oxygen tower, and the evaporator is arranged at the bottom of the second high-purity oxygen tower; the second high-purity oxygen tower is communicated with the product tank.
Further, the raw material liquid oxygen tank is provided with a raw material gas.
Further, the oxygen concentration in the feed gas is more than 99%.
Further, the bottom of the first high-purity oxygen tower is connected with the raw material liquid oxygen tank through a pipeline.
Further, a throttle valve is arranged between the second high-purity oxygen tower and the product tank.
The invention also discloses a purification method of the high-purity oxygen purification device, which comprises the following steps:
(1) the raw material gas is conveyed from the liquid oxygen tank to a first high-purity oxygen tower provided with a first condenser through a low-temperature pipeline;
(2) the raw material gas is liquefied in a first high-purity oxygen tower through a first condenser in a rectifying tower, and then the gas is transmitted to a second high-purity oxygen tower;
(3) in a second high-purity oxygen tower, medium-pressure nitrogen is used as a heat source through an evaporator to continuously evaporate low-boiling-point components such as argon and nitrogen in the liquid, and the gas is discharged through a waste nitrogen pipe; continuously condensing the vaporized oxygen component by a second condenser to provide liquid required by continuous rectification, and continuously condensing and evaporating to finally obtain high-purity liquid oxygen with the purity of 99.999% at the bottom of the evaporator;
(4) high purity liquid oxygen is delivered to the product tank.
Further, the oxygen concentration in the feed gas is more than 99%.
Further, the bottom of the first high-purity oxygen tower is connected with the raw material liquid oxygen tank through a pipeline.
Further, a throttle valve is arranged between the second high-purity oxygen tower and the product tank.
Has the advantages that: according to the high-purity oxygen purification device and the purification method thereof, the total hydrocarbon content of the rectified oxygen component is lower than 1PPm, and the content of impurities such as argon and nitrogen is lower than 5 PPm; the rectification working condition is stable, the product quality is stable, and the purity of the obtained oxygen can reach 99.999 percent.
Drawings
FIG. 1 is a schematic view of the structure of a purification apparatus according to the present invention.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The present invention will be described in further detail below with reference to specific embodiments and with reference to the attached drawings.
Example 1
A high purity oxygen purification apparatus as shown in fig. 1, comprising a raw material liquid oxygen tank 1, a first condenser 3, a second condenser 4, a first high purity oxygen tower 5, an evaporator 6, a second high purity oxygen tower 7 and a product tank 8;
the raw material liquid oxygen tank 1 is communicated with the first high-purity oxygen tower 5, and the first condenser 3 is arranged at the top of the first high-purity oxygen tower 5; the first high-purity oxygen tower 5 is communicated with the second high-purity oxygen tower 7, the second condenser 4 is arranged at the top of the second high-purity oxygen tower 7, and the evaporator 6 is arranged at the bottom of the second high-purity oxygen tower 7; the second high purity oxygen tower 7 is communicated with the product tank 8.
The purification method of the high-purity oxygen purification device comprises the following steps:
(1) the raw material gas is conveyed from the liquid oxygen tank to a first high-purity oxygen tower provided with a first condenser through a low-temperature pipeline;
(2) the raw material gas is liquefied in a first high-purity oxygen tower through a first condenser in a rectifying tower, and then the gas is transmitted to a second high-purity oxygen tower;
(3) in a second high-purity oxygen tower, medium-pressure nitrogen is used as a heat source through an evaporator to continuously evaporate low-boiling-point components such as argon and nitrogen in the liquid, and the gas is discharged through a waste nitrogen pipe; continuously condensing the vaporized oxygen component by a second condenser to provide liquid required by continuous rectification, and continuously condensing and evaporating to finally obtain high-purity liquid oxygen with the purity of 99.999% at the bottom of the evaporator;
(4) high purity liquid oxygen is delivered to the product tank.
Example 2
Another high purity oxygen purification apparatus shown in fig. 1 comprises a raw material liquid oxygen tank 1, a first condenser 3, a second condenser 4, a first high purity oxygen tower 5, an evaporator 6, a second high purity oxygen tower 7, and a product tank 8;
the raw material liquid oxygen tank 1 is communicated with the first high-purity oxygen tower 5, and the first condenser 3 is arranged at the top of the first high-purity oxygen tower 5; the first high-purity oxygen tower 5 is communicated with the second high-purity oxygen tower 7, the second condenser 4 is arranged at the top of the second high-purity oxygen tower 7, and the evaporator 6 is arranged at the bottom of the second high-purity oxygen tower 7; the second high purity oxygen tower 7 is communicated with the product tank 8.
Wherein, have the feed gas in the feed liquid oxygen jar, and the oxygen concentration in the feed gas is greater than 99%. In the preparation process of the high-purity oxygen, the oxygen with common purity is used as raw material gas, and further rectification and purification are carried out, which is beneficial to obtaining products with higher quality and purity.
Wherein the bottom of the first high-purity oxygen tower 5 is connected with the raw material liquid oxygen tank 1 through a pipeline. After the feed gas is rectified, the first high-purity oxygen tower 5 can convey liquefied impurities back to the feed liquid oxygen tank 1 through a pipeline while conveying the gas to the second high-purity oxygen tower. Namely, the first high-purity oxygen tower returns the liquefied liquid to the raw material liquid oxygen tank through a liquid conveying pipeline, and simultaneously, the oxygen component with total hydrocarbon removed is liquefied and sent to the second high-purity oxygen tower.
Meanwhile, a throttle valve 9 is further installed between the second high-purity oxygen tower 7 and the product tank 8, and the product tank and the throttle valve can play a role in stabilizing equipment and saving resources in the rectification and purification process.
The purification method of the high-purity oxygen purification device comprises the following steps:
(1) the raw material gas is conveyed from the liquid oxygen tank to a first high-purity oxygen tower provided with a first condenser through a low-temperature pipeline;
(2) the raw material gas is liquefied in a first high-purity oxygen tower through a first condenser in a rectifying tower, and then the gas is transmitted to a second high-purity oxygen tower;
(3) in a second high-purity oxygen tower, medium-pressure nitrogen is used as a heat source through an evaporator to continuously evaporate low-boiling-point components such as argon and nitrogen in the liquid, and the gas is discharged through a waste nitrogen pipe; continuously condensing the vaporized oxygen component by a second condenser to provide liquid required by continuous rectification, and continuously condensing and evaporating to finally obtain high-purity liquid oxygen with the purity of 99.999% at the bottom of the evaporator;
(4) high purity liquid oxygen is delivered to the product tank.
In this embodiment, the oxygen concentration in the feed gas is greater than 99%. In the preparation process of the high-purity oxygen, the oxygen with common purity is used as raw material gas, and further rectification and purification are carried out, which is beneficial to obtaining products with higher quality and purity.
In this embodiment, the bottom of the first high purity oxygen column is connected to the raw material liquid oxygen tank through a pipe. After the feed gas is rectified, the first high-purity oxygen tower 5 can convey liquefied impurities back to the feed liquid oxygen tank 1 through a pipeline while conveying the gas to the second high-purity oxygen tower. Namely, the first high-purity oxygen tower returns the liquefied liquid to the liquid oxygen tank through a liquid conveying pipeline, and simultaneously, the oxygen components with total hydrocarbon removed are liquefied and sent to the second high-purity oxygen tower.
In this embodiment, a throttle valve is further installed between the second high purity oxygen tower and the product tank. The product tank and the throttle valve can play a role in stabilizing equipment and saving resources in the rectification and purification process.
According to the high-purity oxygen purification device and the purification method thereof, the total hydrocarbon content of the rectified oxygen component is lower than 1PPm, and the content of impurities such as argon and nitrogen is lower than 5 PPm; the rectification working condition is stable, the product quality is stable, and the purity of the obtained oxygen can reach 99.999 percent.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (9)

1. A high-purity oxygen purification device is characterized in that: comprises a raw material liquid oxygen tank (1), a first condenser (3), a second condenser (4), a first high-purity oxygen tower (5), an evaporator (6), a second high-purity oxygen tower (7) and a product tank (8);
the raw material liquid oxygen tank (1) is communicated with the first high-purity oxygen tower (5), and the top of the first high-purity oxygen tower (5) is provided with the first condenser (3); the first high-purity oxygen tower (5) is communicated with the second high-purity oxygen tower (7), the second condenser (4) is arranged at the top of the second high-purity oxygen tower (7), and the evaporator (6) is arranged at the bottom of the second high-purity oxygen tower (7); the second high-purity oxygen tower (7) is communicated with the product tank (8).
2. The apparatus for purifying high purity oxygen according to claim 1, wherein: the raw material liquid oxygen tank (1) is provided with a raw material gas.
3. The apparatus for purifying high purity oxygen according to claim 2, wherein: the oxygen concentration in the feed gas is greater than 99%.
4. The apparatus for purifying high purity oxygen according to claim 1, wherein: the bottom of the first high-purity oxygen tower (5) is connected with the raw material liquid oxygen tank (1) through a pipeline.
5. The apparatus for purifying high purity oxygen according to claim 1, wherein: a throttle valve (9) is also arranged between the second high-purity oxygen tower (7) and the product tank (8).
6. The purification method of a high purity oxygen purification apparatus according to any one of claims 1 to 5, wherein: the method comprises the following steps:
(1) the raw material gas is conveyed from the liquid oxygen tank to a first high-purity oxygen tower provided with a first condenser through a low-temperature pipeline;
(2) the raw material gas is liquefied in a first high-purity oxygen tower through a first condenser in a rectifying tower, and then the gas is transmitted to a second high-purity oxygen tower;
(3) in a second high-purity oxygen tower, medium-pressure nitrogen is used as a heat source through an evaporator to continuously evaporate low-boiling-point components such as argon and nitrogen in the liquid, and the gas is discharged through a waste nitrogen pipe; continuously condensing the vaporized oxygen component by a second condenser to provide liquid required by continuous rectification, and continuously condensing and evaporating to finally obtain high-purity liquid oxygen with the purity of 99.999% at the bottom of the evaporator;
(4) high purity liquid oxygen is delivered to the product tank.
7. The purification method of a high purity oxygen purification apparatus according to claim 6, characterized in that: the oxygen concentration in the feed gas is greater than 99%.
8. The purification method of a high purity oxygen purification apparatus according to claim 6, characterized in that: the bottom of the first high-purity oxygen tower is connected with the raw material liquid oxygen tank through a pipeline.
9. The purification method of a high purity oxygen purification apparatus according to claim 6, characterized in that: and a throttle valve is also arranged between the second high-purity oxygen tower and the product tank.
CN202111095629.5A 2021-09-18 2021-09-18 High-purity oxygen purification device and purification method thereof Pending CN113790576A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111095629.5A CN113790576A (en) 2021-09-18 2021-09-18 High-purity oxygen purification device and purification method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111095629.5A CN113790576A (en) 2021-09-18 2021-09-18 High-purity oxygen purification device and purification method thereof

Publications (1)

Publication Number Publication Date
CN113790576A true CN113790576A (en) 2021-12-14

Family

ID=78878930

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111095629.5A Pending CN113790576A (en) 2021-09-18 2021-09-18 High-purity oxygen purification device and purification method thereof

Country Status (1)

Country Link
CN (1) CN113790576A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202813976U (en) * 2012-10-24 2013-03-20 清远市联升空气液化有限公司 Large air separation high-purity oxygen extracting device
CN106679333A (en) * 2016-12-30 2017-05-17 清远市联升空气液化有限公司 High-purity oxygen preparation device and method for preparing high-purity oxygen through same
CN113091401A (en) * 2021-04-29 2021-07-09 开封迪尔空分实业有限公司 Liquid air separation device for preparing liquid oxygen by using liquid nitrogen

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202813976U (en) * 2012-10-24 2013-03-20 清远市联升空气液化有限公司 Large air separation high-purity oxygen extracting device
CN106679333A (en) * 2016-12-30 2017-05-17 清远市联升空气液化有限公司 High-purity oxygen preparation device and method for preparing high-purity oxygen through same
CN113091401A (en) * 2021-04-29 2021-07-09 开封迪尔空分实业有限公司 Liquid air separation device for preparing liquid oxygen by using liquid nitrogen

Similar Documents

Publication Publication Date Title
EP0175791B1 (en) Apparatus for producing high-purity nitrogen gas
EP0191862A1 (en) Apparatus for producing high-purity nitrogen gas
CN101148252A (en) Method for preparing high purity oxygen by double-tower low temperature rectification
CN113321184B (en) High-purity electronic-grade chlorine purification production device and technology thereof
CN101857201A (en) Device for producing high-purity oxygen and krypton-xenon concentrate and using method thereof
CN202813976U (en) Large air separation high-purity oxygen extracting device
CN113790576A (en) High-purity oxygen purification device and purification method thereof
CN102442647B (en) Method for preparing high-purity oxygen from liquid oxygen
CN113091401B (en) Liquid air separation device for preparing liquid oxygen by using liquid nitrogen
CN101634515A (en) Method for extracting high-yield pure krypton and pure xenon by full distillation
CN114353434A (en) Device and method for concentrating krypton and xenon through low-temperature rectification
JP2009299930A (en) Air separating method and device used for the same
CN113262628A (en) Production device and process for preparing electronic-grade high-purity methane from synthetic ammonia tail gas
CN211998836U (en) Preparation device of high-purity carbon dioxide
US20040261453A1 (en) Air distillation method with argon production and the corresponding air distillation unit
CN201762096U (en) Device for producing high-purity oxygen and krypton xenon concentrate
CN212842473U (en) Krypton-xenon refining system capable of producing high-purity oxygen simultaneously
JP2917031B2 (en) Oxygen production method
CN101672565B (en) Method for preparing pure krypton and pure xenon by adopting full rectification
CN216946234U (en) Device for preparing ultra-pure ammonia for semiconductor
CN220648798U (en) System for refining krypton-xenon liquid
CN220907147U (en) Device for producing high-purity ammonia by industrial ammonia
JPH02150686A (en) Manufacture of super-high purity oxygen
CN216878719U (en) Production device for preparing electronic-grade high-purity methane from synthetic ammonia tail gas
CN210764357U (en) Purification device of boron trichloride

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20211214

RJ01 Rejection of invention patent application after publication