CN216878719U - Production device for preparing electronic-grade high-purity methane from synthetic ammonia tail gas - Google Patents
Production device for preparing electronic-grade high-purity methane from synthetic ammonia tail gas Download PDFInfo
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Abstract
The utility model discloses a production device for preparing electronic-grade high-purity methane from synthesis ammonia tail gas, which comprises a desulfurizing tower, a molecular sieve adsorber, a precooler, a condenser, a rectifying tower and a membrane press, wherein the desulfurizing tower is communicated with the molecular sieve adsorber, the molecular sieve adsorber is communicated with the precooler, the precooler is communicated with the rectifying tower through the condenser, the rectifying tower is communicated with the membrane press, and the membrane press is communicated with an inflation bottle. The utility model has the beneficial effects that: the process can prepare the synthetic ammonia tail gas into purified methane for utilization, reduces carbon emission and reduces environmental pollution; the utility model is provided with the desulfurizing tower, the molecular sieve absorber, the precooler, the condenser and the rectifying tower, can improve the effect of removing other gases, improve the purity of methane, achieve high-purity electronic grade 5N methane and realize high-value utilization of the synthetic ammonia tail gas.
Description
Technical Field
The utility model relates to the technical field of high-purity gas preparation, in particular to a production device for preparing electronic-grade high-purity methane from synthesis ammonia tail gas.
Background
With the development of science and technology and the innovation of technology, the electronic industry has been developed rapidly, and methane has been widely applied in the field of chemical vapor deposition. In the decoration process of covering the surface of various manufactured products with an artificial diamond film, a Chemical Vapor Deposition (CVD) process of pure methane (99.99%) is often used, and in the CVD process of a polycrystalline diamond film, methane is used as a carbon source. Therefore, as an important raw material in the electronic industry, the industry has made higher and higher demands on the purity of methane, and the research and production of high-purity methane have been rapidly developed to meet the needs of the industry.
In order to solve the above problems, the prior art discloses some technical solutions, as follows:
1. the Chinese patent discloses a process for preparing high-purity methane by rectification and purification (publication number: CN105622321A), which comprises a raw material storage tank, wherein the raw material storage tank is provided with a moisture analysis device, the outlet of the raw material storage tank is divided into two paths, one path is directly connected with a dehydration adsorption tower through a pipeline, the other path is directly connected with a CO2 adsorption tower through a pipeline, the outlet of the dehydration adsorption tower is connected with the inlet of a CO2 adsorption tower through a pipeline, the outlet of the CO2 adsorption tower is sequentially connected with a filter, a rectification tower, a product buffer tank and a diaphragm compressor through pipelines, the raw material storage tank is an LNG raw material storage tank, and the rectification tower is two rectification towers which are connected in series; the utility model adopts LNG as raw material, controls the water and carbon dioxide in the raw material to be in a reasonable range through detailed analysis and reasonable selection of the raw material gas, reduces the impurity content of terminal rectification, lightens the pressure of a rectification tower, not only improves the yield, but also greatly improves the quality of high-purity methane, and finally the purity of the high-purity methane can reach more than 99.999 percent (5N), thereby completely meeting the quality requirement of the electronic industry.
2. For example, the chinese patent discloses a process for producing high purity methane by LNG heat pump distillation (publication No. CN106288652A), comprising a raw material liquid storage tank connected to a first raw material gas inlet of a first distillation column through a first throttle valve and an evaporator, a gas phase outlet of the first distillation column connected to a raw material gas inlet of a second reboiler through a first raw material gas inlet of a second heat exchanger, a first raw material gas outlet of the second heat exchanger, a heat pump, a second raw material gas inlet of the second heat exchanger, a second raw material gas outlet of the second heat exchanger, and a tee joint, a raw material gas outlet of the second reboiler connected to a first raw material gas inlet of the second distillation column through a fourth throttle valve, a first heat exchanger disposed in the evaporator, and a liquid phase outlet of the second distillation column connected to the storage tank through a second raw material gas inlet of the first heat exchanger and a second raw material gas outlet of the first heat exchanger; has the advantages of simple process flow, simple and convenient operation, stable operation, low energy consumption and preparation of liquid-phase methane with the purity not lower than 99.9995 percent.
3. Chinese patent discloses a purification device of high-purity methane (publication number: CN211078974U), comprising a dewar, a vaporizer, a light component removal tower and a heavy component removal tower; the top end of the light component removing tower is connected with a condenser, the lower part of the light component removing tower is a reboiler, the top end of the heavy component removing tower is connected with a condenser, and the lower part of the heavy component removing tower is a reboiler; the outlet of the finished product high-purity methane is positioned at the upper part of the condenser. The utility model discloses a purification device of high-purity methane for the first time, which prepares the high-purity methane through gasification and rectification and can realize the cyclic utilization of energy. In the purification device of high-purity methane, the light component removal tower adopts low-pressure low-temperature rectification operation, and adopts the steps of feeding in the upper tower, discharging at the bottom of the tower and recovering and treating light components in a condenser at the top of the tower. The heavy component removing tower is low pressure low temperature rectifying operation, and has middle upper part for feeding, tower top condensator for discharging product and tower bottom heavy component recovering treatment. The industrial boron tribromide at the bottom of the de-heavy tower can be effectively recovered, the production cost is effectively controlled, and the method is easy to operate, low in cost and suitable for popularization and application.
Although the purity of the methane is improved and some impurity gases are removed in the technical scheme, natural gas is adopted as a raw material, so that the production cost is relatively high, but other impurity gases are generated, so that the purity of the methane is not very high, and the expected effect is not achieved; in addition, in most of the synthetic ammonia plants in the prior art, tail gas is used as fuel to be combusted or directly discharged, so that certain environmental pollution is caused.
Therefore, a production device for preparing electronic grade high-purity methane from the high-synthesis ammonia tail gas is needed to solve the problems.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects in the prior art, the utility model aims to provide a production device and a process for preparing electronic-grade high-purity methane from ammonia tail gas, so as to solve the problems.
The production device for preparing the electronic-grade high-purity methane from the synthetic ammonia tail gas comprises a desulfurizing tower, a molecular sieve adsorber, a precooler, a condenser, a rectifying tower and a membrane press, wherein the desulfurizing tower is communicated with the molecular sieve adsorber, the molecular sieve adsorber is communicated with the precooler, the precooler is communicated with the rectifying tower through the condenser, the rectifying tower is communicated with the membrane press, and the membrane press is communicated with an inflation bottle.
Preferably, the desulfurizing tower includes tower body and desulfurization layer, the desulfurization layer is packed in the tower body, the one end of tower body is provided with the desulfurization entry, the other end of tower body is provided with the desulfurization export.
Preferably, the desulfurization inlet and the desulfurization outlet are both provided with a first filter screen.
Preferably, the molecular sieve adsorber comprises an adsorption tower body and a molecular sieve, the molecular sieve is installed in the adsorption tower body, one end of the adsorption tower body is provided with an adsorption inlet, and the other end of the adsorption tower body is provided with an adsorption outlet.
Preferably, the adsorption inlet and the adsorption outlet are both provided with a second filter screen.
Preferably, a disc-type condensation pipe is arranged in the precooler.
Preferably, the condenser includes a condensing tower and a condensing tube of a column type disposed at an inner upper portion of the condensing tower.
Preferably, a liquid level meter is arranged on the lower side edge of the condensation tower.
A process of a production device for preparing electronic grade high-purity methane from synthesis ammonia tail gas comprises the following production process flows:
s1, feeding the synthetic ammonia tail gas into a desulfurizing tower to remove first impurities;
s2, removing the first impurities, and then, putting the mixture into a molecular sieve adsorber to remove moisture;
s3, removing water, pre-cooling in a pre-cooler, pre-cooling in a condenser, and condensing methane;
s4, after the methane is condensed to a certain liquid level, pressing the methane liquid into a rectifying tower for rectification, and removing second impurities;
and S5, filling the mixture into an inflation bottle through a film press after the detection is qualified.
Preferably, the first impurities comprise ammonia gas and hydrogen sulfide, and the second impurities comprise hydrogen gas, nitrogen gas and argon gas.
Compared with the prior art, the utility model has the beneficial effects that:
1. the process can prepare the synthetic ammonia tail gas into purified methane for utilization, reduces carbon emission and reduces environmental pollution;
2. the utility model is provided with the desulfurizing tower, the molecular sieve absorber, the precooler, the condenser and the rectifying tower, can improve the effect of removing other gases, improve the purity of methane, achieve high-purity electronic grade 5N methane and realize high-value utilization of the synthetic ammonia tail gas.
Drawings
FIG. 1 is a schematic diagram of a production apparatus for preparing electronic grade high purity methane from ammonia-forming tail gas according to the present invention;
FIG. 2 is a view showing the construction of a desulfurizing tower according to the present invention;
FIG. 3 is a block diagram of a molecular sieve adsorber of the present invention;
FIG. 4 is a block diagram of the precooler of the present invention;
FIG. 5 is a view of the condenser structure of the present invention;
FIG. 6 is a flow diagram of the process for producing electronic grade high purity methane from ammonia forming tail gas according to the present invention;
reference numbers in the figures: 1. a desulfurizing tower; 2. a molecular sieve adsorber; 3. a precooler; 4. a condenser; 5. a rectifying tower; 6. a film press; 7. inflating the bottle; 101. a tower body; 102. a desulfurization layer; 103. a desulfurization inlet; 104. a desulfurization outlet; 105. a first filter screen; 201. an adsorption tower body; 202. a molecular sieve; 203. an adsorption inlet; 204. an adsorption outlet; 205. a second filter screen; 301. a disc condenser tube; 302. a liquid discharge port; 401. a condensing tower; 402. a row-type condenser pipe; 403. a liquid level meter.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The embodiments of the utility model will be described in detail below with reference to the drawings, but the utility model can be implemented in many different ways as defined and covered by the claims.
As shown in fig. 1 in combination with fig. 2 and fig. 6, a production apparatus for preparing electronic-grade high-purity methane from synthesis ammonia tail gas includes a desulfurization tower 1, a molecular sieve adsorber 2, a precooler 3, a condenser 4, a rectification tower 5 and a membrane press 6, wherein the desulfurization tower 1 is communicated with the molecular sieve adsorber 2, the molecular sieve adsorber 2 is communicated with the precooler 3, the precooler 3 is communicated with the rectification tower 5 through the condenser 4, the rectification tower 5 is communicated with the membrane press 6, and the membrane press 6 is communicated with the gas-filled bottle 7.
Further, the desulfurization tower 1 comprises a tower body 101 and a desulfurization layer 102, the desulfurization layer 102 is filled in the tower body 101, a desulfurization inlet 103 is arranged at one end of the tower body 101, and a desulfurization outlet 104 is arranged at the other end of the tower body 101.
Wherein the desulfurization layer 102 is filled with a desulfurizing agent, wherein the desulfurizing agent includes, but is not limited to, iron oxide and zinc oxide.
Further, the desulfurization inlet 103 and the desulfurization outlet 104 are both provided with a first filter screen 105.
The beneficial effects of the further technical scheme are that: the first filter 105 is used to filter some fine impurities.
Further, the molecular sieve adsorber 2 comprises an adsorption tower body 201 and a molecular sieve 202, the molecular sieve 202 is installed in the adsorption tower body 201, one end of the adsorption tower body 201 is provided with an adsorption inlet 203, and the other end of the adsorption tower body 201 is provided with an adsorption outlet 204.
Wherein the molecular sieve 202 includes but is not limited to 3A molecular sieve, 4A molecular sieve, 5A molecular sieve, 13X molecular sieve.
3A molecular sieve: is an alkali metal aluminosilicate, sometimes referred to as zeolite 3A molecular sieve; the pore diameter of the 3A molecular sieve is 3A, is mainly used for adsorbing water, and does not adsorb any molecules with the diameter larger than 3A
The 4A molecular sieve has a pore diameter of 4A, adsorbs water, methanol, ethanol, hydrogen sulfide, sulfur dioxide, carbon dioxide, ethylene and propylene, does not adsorb any molecules (including propane) with a diameter larger than 4A, and has a selective adsorption performance on water higher than that of any other molecules.
The 5A molecular sieve is a chemical substance with a molecular formula of
3/4CaO·1/4Na2O·Al2O3·2SiO2·9/2H2O; any molecule smaller than this pore size can be adsorbed, commonly referred to as a calcium molecular sieve.
The 13X type molecular sieve, also called Na X type molecular sieve, is an alkali metal aluminosilicate, has certain alkalinity, belongs to a class of solid alkali, and has a chemical formula of Na2O·Al2O3·2.45SiO2·6.0H20, pore size 10A, adsorbs any molecules greater than 3.64A and less than 10A.
Wherein 1A ═ 0.1 nm.
Further, the adsorption inlet 203 and the adsorption outlet 204 are both provided with a second filter 205.
The beneficial effects of the further technical scheme are as follows: the second filter 205 is used to filter fine particulate impurities.
Further, a disc-type condensation pipe 301 is arranged in the precooler 3.
The beneficial effects of the further technical scheme are that: the disc-type condenser pipe 201 pre-cools the methane gas and can condense water to play a role in dehydration, and the condensed water is discharged through a liquid outlet 302 at the bottom of the pre-cooler 3.
Further, the condenser 4 includes a condensing tower 401 and a condensing tube 402 of a column type, and the condensing tube 402 of a column type is disposed at an inner upper portion of the condensing tower 401.
Further, a liquid level meter 403 is arranged at the lower side of the condensation tower 401.
The beneficial effects of the further technical scheme are as follows: the column-type condenser pipe 402 cools the methane gas, so that the methane gas is liquefied, when the methane at the bottom of the condenser tower 401 reaches a certain liquid level (observed by a liquid level meter), the methane liquid is pressed into the rectifying tower 5 for rectification, components such as hydrogen, nitrogen, argon and the like are removed, and the methane liquid is directly filled into the gas-filled bottle 7 through the membrane press 6 after being detected to be qualified.
A process for preparing electronic grade high-purity methane by using synthesis ammonia tail gas comprises the following production process flows:
s1, feeding the synthetic ammonia tail gas into a desulfurizing tower 1 to remove first impurities;
s2, removing the first impurities, and then removing water in a molecular sieve adsorber 2;
s3, removing water, pre-cooling in a pre-cooler 3, pre-cooling, and condensing methane in a condenser 4;
s4, after the methane is condensed to a certain liquid level, pressing the methane liquid into a rectifying tower 5 for rectification, and removing second impurities;
and S5, filling the film into an inflation bottle 7 through a film pressing machine 6 after the detection is qualified.
Further, the first impurities comprise ammonia gas and hydrogen sulfide, and the second impurities comprise hydrogen gas, nitrogen gas and argon gas.
Wherein the tail gas of the ammonia synthesis comprises 24 percent of CH4(methane), 0.5% NH3(Ammonia gas), 52% H2(hydrogen), 2.5% Ar (argon) and 21% N2(Nitrogen), also small amounts of H2S (hydrogen sulfide) gas.
Compared with the prior art, the utility model has the beneficial effects that:
1. the process can prepare the synthetic ammonia tail gas into purified methane for utilization, reduces carbon emission and reduces environmental pollution;
2. the utility model is provided with the desulfurizing tower 1, the molecular sieve absorber 2, the precooler 3, the condenser 4 and the rectifying tower 5, can improve the effect of removing other gases, improve the purity of methane, achieve high-purity electronic grade 5N methane and realize the high-value utilization of the synthetic ammonia tail gas.
Wherein the desulfurizing layer of the desulfurizing tower 1 contains a desulfurizing agent comprising iron oxide (Fe)2O3) And zinc oxide (ZnO), and the synthesis ammonia tail gas contains ammonia gas (NH)3) And hydrogen sulfide (H)2S), reacting with a desulfurizer to generate water and particle impurities, and further removing ammonia and hydrogen sulfide, wherein the specific reaction process is as follows:
(1)Fe2O3+3H2S＝S+2FeS+3H2O；
(2)H2S+ZnO＝ZnS+H2O；
(3)ZnO+4NH3+H2O＝[Zn(NH3)4](OH)2。
producing water (H)2O) and elemental sulfur (S), iron sulfide (2FeS), zinc sulfide (ZnS), tetra-ammino zinc hydroxide [ Zn (NH)3)4](OH)2And precipitating and remaining in the desulfurizing tower.
The molecular sieve adsorber 2 is internally provided with molecular sieve adsorption particles for adsorbing moisture and further playing a role in dehydration.
The precooler 3 is provided with the disc-type condenser pipe 301 to act on methane on one hand, and to lower the temperature to condense water incompletely removed from methane to act as dehydration.
The condenser 4 is provided with an in-line condenser pipe 401 for cooling, condensing and liquefying methane.
And a condensing pipe is also arranged in the rectifying tower 5 to further cool and liquefy the methane, so that the methane is separated from other light gas impurities, and a purifying effect is further achieved.
The membrane press 6 employs a membrane compressor.
The working principle is as follows: the synthesis ammonia tail gas enters a desulfurizing tower 1 to remove first impurities; removing the first impurities, and then, putting the mixture into a molecular sieve adsorber 2 to remove moisture; after removing water, the water enters a precooler 3 for precooling, and after precooling, the water enters a condenser 4 for condensing methane; after methane is condensed to a certain liquid level, the methane liquid is pressed into a rectifying tower 5 for rectification, and second impurities are removed; after the detection is qualified, the mixture is filled into an inflation bottle 7 through a film pressing machine 6.
The purity of the electronic grade gas is usually more than 5N grade, namely more than 99.999%.
Wherein the first impurity substance comprises ammonia (NH)3) And hydrogen sulfide (H)2S)。
Removal of hydrogen sulfide: the desulfurizing tower 1 is provided with a desulfurizing agent of iron oxide and zinc oxide, and the iron oxide and the zinc oxide react with hydrogen sulfide gas to generate water and sediment so as to separate methane.
The chemical reaction formula is as follows: fe2O3+3H2S＝S+2FeS+3H2O；H2S+ZnO＝ZnS+H2O；
And (3) removing ammonia gas: the desulfurizing tower is provided with zinc oxide, and the zinc oxide reacts with water in methane and ammonia gas to produce precipitate so as to separate the precipitate from methane gas.
The chemical reaction formula is as follows: ZnO +4NH3+H2O＝[Zn(NH3)4](OH)2；
Wherein the second impurities comprise hydrogen, nitrogen and argon.
The working principle of the rectifying tower is as follows: the property that the vapor pressure of each component is different at the same temperature enables the light component (low-boiling-point substance) in the liquid phase to be transferred into the gas phase, and the heavy component (high-boiling-point substance) in the gas phase to be transferred into the liquid phase, thereby realizing the purpose of separation.
The principle that methane has a higher boiling point and a higher melting point than hydrogen, nitrogen and argon is utilized, and low-boiling-point impurities such as hydrogen, nitrogen and argon are separated from methane in a cooling mode; the methane is liquefied by adopting a cooling mode, and other impurities are not liquefied, so that the separation purpose is achieved.
Wherein the melting point of the methane is-182.5 ℃ and the boiling point is-161.5 ℃; the melting point of hydrogen is-259.2 ℃, and the boiling point is-252.77 ℃; the melting point of nitrogen is-210 ℃ and the boiling point is-196 ℃; the melting point of argon is-189.2 ℃ and the boiling point is-185.9 ℃. From the above, it can be seen that the boiling point and melting point of methane are both significantly lower than those of hydrogen, nitrogen and argon, and methane can be separated from hydrogen, nitrogen and argon by cooling to-161.5 ℃.
In order to more clearly illustrate the technical effects of the production device for preparing electronic-grade high-purity methane from the synthesis ammonia tail gas, the utility model provides the following data for the examples. It should be understood that the data set forth in the following examples are only for the purpose of better illustrating the technical effect of the continuous process for the production of high purity chlorine gas as proposed by the present invention and are not to be considered as being equivalent to all experimental data.
Comparative experiment 1:
selecting an experimental group 1 and a control group 1-3, wherein the experimental group 1 is the methane purified by the working principle process of the utility model, the control group 1-3 is the methane purified by the embodiment corresponding to the comparison documents 1-3 of the background technology, and then the gas components of the experimental group 1 and the control group 1-3 are detected by using detection equipment, and the specific experimental results are shown in the following table 1:
table 1 shows the gas component contents of each component after methane purification in comparative experiment 1:
The comparative analysis 2 is combined with the experimental group 1 and the control group 1-3, so that the experimental group 1 has high purity and low content of other impurity gases, and the technical scheme of the utility model has good removing effect on other impurity gases (such as hydrogen, nitrogen, argon, chlorine and the like).
Comparative experiment 2:
selecting an experiment group 1 and an experiment group 2, removing a desulfurizing tower from the experiment group 2 on the basis of the methane purified by the experiment group 1 by utilizing the working principle process of the utility model, and then detecting respective gas components by utilizing detection equipment, wherein the specific experiment results are shown in the following table 2:
table 2 shows the gas content of each component after methane purification in comparative experiment 2:
comparative analysis 3: combine experiment group 1 and experiment group 2 to draw, experiment group 1 compares with experiment group 2, and experiment group 1's purification purity is higher, and experiment group 2 does not have the desulfurizing tower to lead to a large amount of sulfides not by the desorption, reduces the purity of methane, has reduced the getting rid of to other impurity simultaneously.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (8)
1. The utility model provides a production device of high-purity methane of electronic grade is prepared to synthetic ammonia tail gas which characterized in that: the device comprises a desulfurizing tower (1), a molecular sieve adsorber (2), a precooler (3), a condenser (4), a rectifying tower (5) and a membrane press (6), wherein the desulfurizing tower (1) is communicated with the molecular sieve adsorber (2), the molecular sieve adsorber (2) is communicated with the precooler (3), the precooler (3) is communicated with the rectifying tower (5) through the condenser (4), the rectifying tower (5) is communicated with the membrane press (6), and the membrane press (6) is communicated with a gas filling bottle (7).
2. The apparatus for producing electronic grade high purity methane from synthesis ammonia tail gas as claimed in claim 1, wherein: the desulfurizing tower (1) comprises a tower body (101) and a desulfurizing layer (102), wherein the desulfurizing layer (102) is filled in the tower body (101), a desulfurizing inlet (103) is formed in one end of the tower body (101), and a desulfurizing outlet (104) is formed in the other end of the tower body (101).
3. The production device for preparing electronic grade high-purity methane from synthesis ammonia tail gas as claimed in claim 2, characterized in that: and the desulfurization inlet (103) and the desulfurization outlet (104) are both provided with a first filter screen (105).
4. The apparatus for producing electronic grade high purity methane from synthesis ammonia tail gas as claimed in claim 1, wherein: the molecular sieve adsorber (2) comprises an adsorption tower body (201) and a molecular sieve (202), the molecular sieve (202) is installed in the adsorption tower body (201), an adsorption inlet (203) is formed in one end of the adsorption tower body (201), and an adsorption outlet (204) is formed in the other end of the adsorption tower body (201).
5. The production device for preparing electronic grade high-purity methane from synthesis ammonia tail gas as claimed in claim 4, characterized in that: and the adsorption inlet (203) and the adsorption outlet (204) are both provided with a second filter screen (205).
6. The production device for preparing electronic grade high-purity methane from synthesis ammonia tail gas as claimed in claim 1, characterized in that: and a disc type condensation pipe (301) is arranged in the precooler (3).
7. The production device for preparing electronic grade high-purity methane from synthesis ammonia tail gas as claimed in claim 1, characterized in that: the condenser (4) comprises a condensing tower (401) and a column type condensing pipe (402), wherein the column type condensing pipe (402) is arranged at the inner upper part of the condensing tower (401).
8. The production device for preparing electronic grade high-purity methane from synthesis ammonia tail gas as claimed in claim 7, characterized in that: a liquid level meter (403) is arranged on the lower side edge of the condensation tower (401).
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