CN208361888U - High purity oxygen gas extracts and purification devices - Google Patents

High purity oxygen gas extracts and purification devices Download PDF

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Publication number
CN208361888U
CN208361888U CN201820630806.2U CN201820630806U CN208361888U CN 208361888 U CN208361888 U CN 208361888U CN 201820630806 U CN201820630806 U CN 201820630806U CN 208361888 U CN208361888 U CN 208361888U
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China
Prior art keywords
oxygen
adsorption tower
nitrogen
molecular sieve
high purity
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Expired - Fee Related
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CN201820630806.2U
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Chinese (zh)
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许红波
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Henan Keyi Gas Ltd By Share Ltd
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Henan Keyi Gas Ltd By Share Ltd
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  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

The utility model provides a kind of high purity oxygen gas and extracts and purification devices, the device of the utility model obtains primary oxygen by membrane separation device, intermediate oxygen is obtained on through intermediate oxygen manifold, by obtaining high purity oxygen gas after oxygen purification device, both high purity oxygen gas can be obtained, common oxygen can be provided by obstructed cross in a manner of high purity oxygen gas is admixed with air again, avoided energy waste.And the oxygen and nitrogen of air can be separated one step ahead by membrane separation device, it reduces subsequent adsorbtion tower and is passed directly into the treating capacity that air is handled, and the purity of the oxygen or nitrogen gas by obtaining after primary adsorption tower (carbon molecular sieve adsorption tower or zeolite molecular sieve adsorption tower) processing can be improved.

Description

High purity oxygen gas extracts and purification devices
Technical field
The utility model relates to oxygen extraction and purifying more particularly to a kind of high purity oxygen gas extracts and purification devices.
Background technique
With social development, economy is more and more progressive, and industry is gradually converted into precision manufactureing from roughing, to high-purity gas Demand it is also original bigger, high purity oxygen gas electronics, to industries such as crystal silicons using more and more extensive, high pure oxygen is used for titanium dioxide The chemical vapor deposition of silicon;Reactant as oxidation source and generation high purity water;Dry oxidation;It mixes, is used for carbon tetrafluoride Plasma etching.There are more and more producer's production high purity oxygen gas in the prior art, but still for the demand of common oxygen Very big, in order to solve the demand to common gases, some producers will use the mode that high purity oxygen gas and air are admixed, in this way The waste of the resource resulted in.
Utility model content
It is extracted and purification devices to solve the above problems, the utility model provides a kind of high purity oxygen gas, is not only able to provide High purity oxygen gas, additionally it is possible to not provide common oxygen by way of high purity oxygen gas and air blending.
The technical solution of the utility model are as follows: a kind of high purity oxygen gas extracts and purification devices, including raw air pipe, compression Machine, degreasing unit, cooler, drying device, removing carbon dioxide device, membrane separation device, carbon molecular sieve adsorption tower, zeolite molecules Sieve adsorption tower, the air in raw air pipe enters compressor and is compressed, carry out oil removing subsequently into degreasing unit, then into Enter cooler to be cooled down, be dried after cooling into drying device, subsequently into removing carbon dioxide device removing carbon dioxide, It is separated subsequently into membrane separation device, respectively obtains primary oxygen, primary nitrogen, the primary oxygen outlet of membrane separation device By primary oxygen general pipeline connection zeolite molecular sieve adsorption tower lower port, zeolite molecular sieve adsorption tower upper port passes through intermediate oxygen Branch pipe connects intermediate oxygen general pipeline, intermediate oxygen general pipeline connection oxygen purification device, and zeolite molecular sieve adsorption tower lower port passes through Nitrogen desorbs branch pipe and connects nitrogen header pipe;The primary nitrogen outlet of membrane separation device connects carbon molecular sieve adsorption tower lower port, carbon Adsorbing tower with molecular sieve upper port is connected with nitrogen header pipe by intermediate nitrogen branch pipe, and carbon molecular sieve adsorption tower lower port passes through oxygen Desorption gas branch pipe is connected with intermediate oxygen general pipeline;Primary oxygen general pipeline is also connected with primary oxygen branch pipe, on primary oxygen branch pipe Equipped with valve I, intermediate oxygen manifold is also connected on intermediate oxygen general pipeline, intermediate oxygen manifold is equipped with valve II.
Carbon molecular sieve adsorption tower is two, and zeolite molecular sieve adsorption tower is two.
Nitrogen desorbs branch pipe and is equipped with vacuum pump, and oxygen desorbs gas branch pipe and is equipped with vacuum pump.
Intermediate oxygen general pipeline is connected with oxygen blow pipeline, passes through oxygen blow piping connection carbon molecular sieve adsorption tower upper end Mouthful;Nitrogen header pipe is connected with nitrogen sparge tube road, connects zeolite molecular sieve adsorption tower upper port by nitrogen sparge tube road.
Oxygen purification device is complex metal oxide adsorption tower, and the filler in complex metal oxide adsorption tower is complexity Metal oxide, complex metal oxide are perovskite structural material, and the metallic element in complex metal oxide contains following Easily appraise at the current rate the one or more of metallic element, Ti, V, Cr, Mn, Fe, Co, Ni, Cu.
Oxygen purification device includes domethanizing column, and intermediate oxygen general pipeline connection condenser II, intermediate oxygen enters condenser II is condensed, and condenser II connects domethanizing column, and domethanizing column tower reactor is equipped with hyperoxia fluid outlet, sets in demethanizer column overhead There is methane rich outlet.
Oxygen purification device includes rectifying column, and intermediate oxygen general pipeline connection rectifying column carries out rectifying, rectifying column liquid reflux Body import connects liquid nitrogen pipe, and liquid nitrogen pipe connects condenser I, and condenser I connects nitrogen header pipe, tower reactor by I inlet tube of condenser Equipped with high pure oxygen fluid outlet, tower top is exported equipped with high pure nitrogen.
Oxygen purification device further includes domethanizing column, and the high pure oxygen fluid outlet connection domethanizing column of rectifying column carries out piptonychia Alkane, domethanizing column tower reactor are equipped with hyperoxia fluid outlet, and demethanizer column overhead is exported equipped with methane rich.
High pure oxygen fluid outlet connects oxygen storage tank.
The device of the beneficial effects of the utility model, the utility model obtains primary oxygen by membrane separation device, logical It crosses in intermediate oxygen manifold and obtains intermediate oxygen and can both obtain high pure oxygen by obtaining high purity oxygen gas after oxygen purification device Gas, and common oxygen can be provided by obstructed cross in a manner of high purity oxygen gas is admixed with air, it avoids energy waste.And it can lead to Membrane separation device separates the oxygen and nitrogen of air one step ahead, reduces subsequent adsorbtion tower and is passed directly into the place that air is handled Reason amount, and can be improved handled by primary adsorption tower (carbon molecular sieve adsorption tower or zeolite molecular sieve adsorption tower) after obtain The purity of oxygen or nitrogen gas.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the attachment structure schematic diagram of complex metal oxide adsorption tower and intermediate oxygen general pipeline.
The attachment structure schematic diagram of Fig. 3 domethanizing column and intermediate oxygen general pipeline.
Fig. 4 is the attachment structure schematic diagram of rectifying column and intermediate oxygen general pipeline.
Specific embodiment
As Figure 1-Figure 4, a kind of high purity oxygen gas extraction and purification devices, including raw air pipe 1, compressor 2, oil removing Device 3, cooler 4, drying device 5, removing carbon dioxide device 6, membrane separation device 7, carbon molecular sieve adsorption tower 9, zeolite molecules Adsorption tower 8 is sieved, the air in raw air pipe 1 enters compressor 2 and compressed, and carries out oil removing subsequently into degreasing unit 3, so Enter cooler 4 afterwards to be cooled down, enter drying device 5 after cooling and be dried, removes two subsequently into removing carbon dioxide device 6 Carbonoxide is separated subsequently into membrane separation device 7, and primary oxygen and the nitrogen for respectively obtaining oxygen purity 30-40% are dense Spend the primary nitrogen of 95-99%;The primary oxygen outlet of membrane separation device 7 passes through the connection of primary oxygen general pipeline 70 zeolite molecular sieve 8 lower port of adsorption tower, 8 upper port of zeolite molecular sieve adsorption tower pass through intermediate oxygen manifold 80 and connect intermediate oxygen general pipeline 11, in Grade oxygen general pipeline 11 connects oxygen purification device 12, and 8 lower port of zeolite molecular sieve adsorption tower desorbs branch pipe 81 by nitrogen and connects Nitrogen header pipe 10;The primary nitrogen outlet of membrane separation device 7 passes through primary nitrogen header pipe 71 and connects 9 lower end of carbon molecular sieve adsorption tower Mouthful, 9 upper port of carbon molecular sieve adsorption tower passes through intermediate nitrogen branch pipe 90 and is connected with nitrogen header pipe 10, under carbon molecular sieve adsorption tower 9 Port desorbs gas branch pipe 91 by oxygen and is connected with intermediate oxygen general pipeline 11;Primary oxygen general pipeline 70 is also connected with primary oxygen branch Pipe 72, primary oxygen branch pipe 72 are equipped with valve I 73, are also connected with intermediate oxygen manifold 110 on intermediate oxygen general pipeline 11, middle rank Oxygen manifold 110 is equipped with valve II 111.
The device of the utility model obtains the primary oxygen of oxygen purity 30-40% by membrane separation device, is passing through middle rank Intermediate oxygen is obtained in oxygen manifold can not only obtain high purity oxygen gas, but also can by obtaining high purity oxygen gas after oxygen purification device Not provide common oxygen by way of high purity oxygen gas and air blending, avoid energy waste.And film point can be passed through It separates the oxygen and nitrogen of air one step ahead from device, reduces subsequent adsorbtion tower and be passed directly into the treating capacity that air is handled, And can be improved handled by primary adsorption tower (carbon molecular sieve adsorption tower or zeolite molecular sieve adsorption tower) after the oxygen that obtains Or the purity of nitrogen gas.
Carbon molecular sieve adsorption tower 9 is two, and zeolite molecular sieve adsorption tower 8 is two, facilitates one to be desorbed, another It can be adsorbed simultaneously.
It is conventional desorption mode, the generic adsorption tower upper end outlet gas adsorption tower generic as another when desorption Calming the anger when completing parsing.If zeolite molecular sieve adsorption tower is to zeolite molecular sieve adsorption tower, purging is also total using intermediate oxygen Oxygen in pipe carries out.
Branch pipe 81 can also be desorbed with nitrogen and is equipped with vacuum pump 13, and oxygen desorbs gas branch pipe 91 and is equipped with vacuum pump 13, desorption When pass through vacuum pump connect adsorption tower lower port carry out depressurization desorption.
It further can also be connected with oxygen blow pipeline in intermediate oxygen general pipeline 11, be connected by oxygen blow pipeline 92 Connect 9 upper port of carbon molecular sieve adsorption tower;Nitrogen header pipe 10 is connected with nitrogen sparge tube road 82, is connected by nitrogen sparge tube road 82 8 upper port of zeolite molecular sieve adsorption tower.In order to improve the purity of the oxygen and nitrogen that desorb, and as far as possible absorption Adsorbed gas in tower clears out, from upper end when being desorbed using the intermediate oxygen in intermediate oxygen general pipeline to carbon molecular sieve adsorption tower Mouth, which enters, to be purged, and is entered when being desorbed using the nitrogen in nitrogen header pipe to zeolite molecular sieve from upper port and is purged.
As shown in Fig. 2, oxygen purification device 12 is complex metal oxide adsorption tower 15, complex metal oxide adsorption tower In filler be complex metal oxide, complex metal oxide is perovskite structural material, the gold in complex metal oxide Belong to element and contains following the one or more of metallic element that easily appraise at the current rate, Ti, V, Cr, Mn, Fe, Co, Ni, Cu.
Complex metal oxide adsorption tower is two, can be desorbed and be adsorbed simultaneously.Complex metal oxide absorption Tower lower port connects oxygen container 14 by desorption gas pipeline 120, and desorption gas pipeline 120 is equipped with vacuum pump 13.
As shown in figure 3, carrying out air separation nitrogen and oxygen due to higher sometimes with methane content in existing air When, methane can be carried in air, so oxygen purification device 12 includes domethanizing column 121, intermediate oxygen general pipeline 11 connects cold Condenser II 122 is condensed, and condenser II 122 connects domethanizing column 121, and 121 tower reactor of domethanizing column is equipped with hyperoxia fluid outlet 123, demethanizer column overhead is equipped with methane rich outlet 124.Intermediate oxygen general pipeline first connects condenser II, and intermediate oxygen carries out cold Intermediate oxygen fluid is coagulated to obtain, carries out demethanation subsequently into domethanizing column, the oxygen-bearing fluid that domethanizing column tower reactor comes out is as high-purity Oxygen fluid.
As shown in figure 4, oxygen purification device 12 includes rectifying column 125, the intermediate connection rectifying column of oxygen general pipeline 11 carries out essence It evaporates, rectifying column liquid reflux body import 1250 connects liquid nitrogen pipe 1251, and liquid nitrogen pipe 1251 connects condenser I 1252, condenser I 1252 connect nitrogen header pipe 10 by I inlet tube 1255 of condenser, and tower reactor is equipped with high pure oxygen fluid outlet 1253, and tower top is equipped with height Pure nitrogen gas outlet 1254.The intermediate connection rectifying column of oxygen general pipeline 11 carries out rectifying, is made high pure oxygen fluid, rectifier column reflux body into Mouth connection liquid nitrogen is that part nitrogen is made through I condensation liquefaction of condenser in liquid nitrogen nitrogen header pipe.
Oxygen purification device includes rectifying column 125, and including domethanizing column 121, the high pure oxygen fluid outlet of rectifying column 1253 connection domethanizing columns 121 carry out demethanation, and domethanizing column tower reactor is equipped with hyperoxia fluid outlet 123, in demethanizer column overhead Equipped with methane rich outlet 124, further oxygen is purified.The 1253 connection domethanizing column of high pure oxygen fluid outlet of rectifying column at this time It is connected on pipeline with direct connection and is respectively equipped with valve on the pipeline of oxygen storage tank 14.
High pure oxygen fluid outlet connects oxygen storage tank 14, converts high purity oxygen gas for liquid oxygen, or be converted to by heat exchanger High purity oxygen gas.
Above-described is only preferred embodiments of the present invention, it is noted that for those skilled in the art For, under the premise of not departing from the utility model general idea, several changes and improvements can also be made, these also should be considered as The protection scope of the utility model.

Claims (9)

1. a kind of high purity oxygen gas extracts and purification devices, it is characterised in that: including raw air pipe, compressor, degreasing unit, cold But device, drying device, removing carbon dioxide device, membrane separation device, carbon molecular sieve adsorption tower, zeolite molecular sieve adsorption tower, raw material Air in air hose enters compressor and is compressed, and carries out oil removing subsequently into degreasing unit, carries out subsequently into cooler It is cooling, it is dried after cooling into drying device, subsequently into removing carbon dioxide device removing carbon dioxide, subsequently into film point It is separated from device, respectively obtains primary oxygen, primary nitrogen, the primary oxygen outlet of membrane separation device passes through primary oxygen General pipeline connection zeolite molecular sieve adsorption tower lower port, zeolite molecular sieve adsorption tower upper port pass through intermediate oxygen manifold connection middle rank Oxygen general pipeline, intermediate oxygen general pipeline connection oxygen purification device, zeolite molecular sieve adsorption tower lower port desorb branch pipe by nitrogen Connect nitrogen header pipe;The primary nitrogen outlet of membrane separation device connects carbon molecular sieve adsorption tower lower port, carbon molecular sieve adsorption tower Upper port is connected with nitrogen header pipe by intermediate nitrogen branch pipe, and carbon molecular sieve adsorption tower lower port desorbs gas branch pipe by oxygen and connects It is connected to intermediate oxygen general pipeline;Primary oxygen general pipeline is also connected with primary oxygen branch pipe, and primary oxygen branch pipe is equipped with valve I, in Intermediate oxygen manifold is also connected on grade oxygen general pipeline, intermediate oxygen manifold is equipped with valve II.
2. high purity oxygen gas according to claim 1 extracts and purification devices, it is characterised in that: carbon molecular sieve adsorption tower is two A, zeolite molecular sieve adsorption tower is two.
3. high purity oxygen gas according to claim 1 extracts and purification devices, it is characterised in that: nitrogen desorption branch pipe is equipped with Vacuum pump, oxygen desorb gas branch pipe and are equipped with vacuum pump.
4. high purity oxygen gas according to claim 3 extracts and purification devices, it is characterised in that: intermediate oxygen general pipeline is connected with Oxygen blow pipeline passes through oxygen blow piping connection carbon molecular sieve adsorption tower upper port;Nitrogen header pipe is connected with nitrogen purging Pipeline connects zeolite molecular sieve adsorption tower upper port by nitrogen sparge tube road.
5. high purity oxygen gas according to claim 1 extracts and purification devices, it is characterised in that: oxygen purification device is complexity Metal oxide adsorption tower.
6. high purity oxygen gas according to claim 1 extracts and purification devices, it is characterised in that: oxygen purification device includes de- Methane tower, intermediate oxygen general pipeline connection condenser II, intermediate oxygen enters condenser II and is condensed, and condenser II connects piptonychia Alkane tower, domethanizing column tower reactor are equipped with hyperoxia fluid outlet, and demethanizer column overhead is exported equipped with methane rich.
7. high purity oxygen gas according to claim 1 extracts and purification devices, it is characterised in that: oxygen purification device includes essence Tower is evaporated, intermediate oxygen general pipeline connection rectifying column carries out rectifying, and rectifying column liquid reflux body import connects liquid nitrogen pipe, liquid nitrogen pipe connection Condenser I, condenser I connect nitrogen header pipe by I inlet tube of condenser, and tower reactor is equipped with high pure oxygen fluid outlet, and tower top is equipped with High pure nitrogen outlet.
8. high purity oxygen gas according to claim 7 extracts and purification devices, it is characterised in that: oxygen purification device further includes Domethanizing column, the high pure oxygen fluid outlet connection domethanizing column of rectifying column carry out demethanation, and domethanizing column tower reactor is equipped with hyperoxia stream Body outlet, demethanizer column overhead are exported equipped with methane rich.
9. high purity oxygen gas according to claim 6 or 7 extracts and purification devices, it is characterised in that: high pure oxygen fluid outlet Connect oxygen storage tank.
CN201820630806.2U 2018-04-28 2018-04-28 High purity oxygen gas extracts and purification devices Expired - Fee Related CN208361888U (en)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110395694A (en) * 2019-07-23 2019-11-01 中国石油大学(华东) Extensive energy-saving step air-separating technology

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110395694A (en) * 2019-07-23 2019-11-01 中国石油大学(华东) Extensive energy-saving step air-separating technology

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Granted publication date: 20190111