CN113770906A - Cluster magnetorheological polishing device and method capable of achieving complex surface shape processing - Google Patents
Cluster magnetorheological polishing device and method capable of achieving complex surface shape processing Download PDFInfo
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- CN113770906A CN113770906A CN202111193695.6A CN202111193695A CN113770906A CN 113770906 A CN113770906 A CN 113770906A CN 202111193695 A CN202111193695 A CN 202111193695A CN 113770906 A CN113770906 A CN 113770906A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/112—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention relates to the field of ultra-precision machining, in particular to a cluster magnetorheological polishing device capable of realizing complex surface shape machining, wherein a deflection mechanism is arranged at a power end of a first vertical surface moving mechanism, the vertical surface moving mechanism drives the deflection mechanism to move in a vertical surface through the power end, a first rotating motor is arranged at the power end of the deflection mechanism, the first rotating motor can be driven by the deflection mechanism to form deflection motion in a second vertical surface, the power end of the first rotating motor is connected with a polishing workpiece fixture head through a rotating shaft, the polishing workpiece fixture head is used for clamping a workpiece to be polished, the polishing workpiece fixture head can be driven by the first rotating motor to rotate, the top surface of a polishing disc is a polishing surface, the top surface of the polishing disc is provided with a containing groove for containing polishing liquid, and a magnetic field generating device is arranged in the polishing disc. The polishing device increases the polishing force in the polishing process while realizing the processing of a complex surface shape. The invention also provides a cluster magneto-rheological polishing method capable of realizing complex surface shape processing.
Description
Technical Field
The invention relates to the field of ultra-precision machining, in particular to a cluster magnetorheological polishing device and method capable of realizing complex surface shape machining.
Background
With the social development of information electronics, optical element lenses and reflectors are used as core elements of optical devices in modern optical systems, and the requirements on the surface shape precision, surface roughness and subsurface damage degree of optical parts are higher and higher, which continuously provides new challenges for optical manufacturing technologies. No matter which element needs to achieve good optical performance, the surface precision of the element needs to achieve the ultra-smooth degree, and the surface shape precision has higher requirements correspondingly, namely no damage and defects. Both optical planar elements and semiconductor substrates need to be planarized, and the conventional processes mainly include high-efficiency grinding, ultra-precision polishing, chemical mechanical polishing and magnetorheological polishing, so that the manufacturing of semiconductor materials increasingly depends on grinding and polishing technologies to meet the production requirements.
In 1948, the American scientist Rabinow first discovered the phenomenon of magnetic rheology, and initiated the beginning of the magnetic rheology polishing technology. In 1974, the W.I.Kordonski and Jacobs, an university of Rochests, USA, cooperate with electromagnetism, hydrodynamics, analytical chemistry, processing technology and the like to provide a novel optical surface processing method, which has the advantages of good polishing effect, no secondary surface damage, suitability for complex surface processing and the like which are not possessed by traditional polishing. Magnetorheological polishing (MRF) is a processing technique for restraining and holding abrasive materials by utilizing the Magnetorheological effect generated by the Magnetorheological fluid under the action of a magnetic field, so that abrasive particles are in a semi-solid state to perform optical surface polishing, and has been developed into a novel optical surface processing method. The method has the advantages of good processing effect, suitability for polishing complex surfaces, no generation of subsurface damage and the like which are not possessed by the traditional processing method, and is proved to be an effective novel optical surface processing technology with super smoothness and low damage certainty.
Some technologies are only suitable for processing simple surface shapes, and relatively complex surface shapes have poor and unobvious finishing effects. There are also techniques in which the magnetorheological effect of the static magnetic field formed by the polishing pad lacks a mechanism of self-dressing and abrasive renewal self-sharpening, and it is difficult to maintain the stability of the properties of the processed workpiece.
Disclosure of Invention
In order to solve the problems, the invention provides a cluster magnetorheological polishing device capable of realizing complex surface shape processing, which increases polishing force in a polishing process while realizing complex surface shape processing, and solves the problems that the traditional magnetorheological polishing device is low in polishing efficiency, poor in stability, difficult to realize ultra-precision processing requirements and the like. The invention also provides a cluster magneto-rheological polishing method capable of realizing complex surface shape processing.
In order to achieve the purpose, the invention adopts the technical scheme that:
in a first technical scheme, the cluster magnetorheological polishing device capable of realizing complex surface shape processing comprises a vertical surface moving mechanism, a deflection mechanism, a first rotating motor, a rotating shaft, a polishing workpiece fixture head and a polishing disc, wherein the deflection mechanism is arranged at a power end of the first vertical surface moving mechanism, the vertical surface moving mechanism drives the deflection mechanism to move in a vertical surface through the power end, the first rotating motor is arranged at the power end of the deflection mechanism, the first rotating motor can be driven by the deflection mechanism to form deflection motion in a second vertical surface, the first vertical surface is parallel to the second vertical surface, the power end of the first rotating motor is connected with the polishing workpiece fixture head through the rotating shaft, the polishing workpiece fixture head is used for clamping a workpiece to be polished, the polishing workpiece fixture head can be driven by the first rotating motor to rotate, the polishing disc is arranged below the polishing workpiece fixture head, and the top surface of the polishing disk is a polishing surface, the top surface of the polishing disk is provided with a containing tank for containing magnetic flow polishing liquid, and a magnetic field generating device is arranged in the polishing disk.
In the first technical solution, preferably, the vertical surface moving mechanism includes a machine tool clamp, an X-axis driving motor, an X-axis guide rail assembly, a Y-axis driving guide rail assembly and a Y-axis driving motor, wherein the Y-axis driving guide rail assembly includes a vertically arranged guide rail, the X-axis guide rail assembly is slidably mounted on the guide rail of the Y-axis driving guide rail assembly, and a power end of the Y-axis driving motor is in power connection with the X-axis guide rail assembly to drive the X-axis guide rail assembly to vertically move on the guide rail of the Y-axis driving guide rail assembly; the X-axis guide rail assembly comprises a guide rail horizontally arranged, the machine tool clamp is slidably mounted on the guide rail of the X-axis guide rail assembly, the power end of the X-axis driving motor is in power connection with the machine tool clamp to drive the machine tool clamp to horizontally move, and the deflection mechanism is mounted on the machine tool clamp.
In the first technical solution, preferably, the power end of the yaw mechanism has a guide rail, a slider and a mounting fixed baffle, the guide rail is mounted at the power end of the yaw mechanism, the slider is slidably mounted on the guide rail, and the driving mechanism of the yaw mechanism is a yaw motor.
In the first technical scheme, as preferred, polishing work piece holder head department installation work piece holder, work piece holder include disc main part and connecting axle, the connecting axle is installed in the one end of disc main part and is set up with disc main part is coaxial, the connecting axle has the external screw thread, work piece holder passes through connecting axle and polishing work piece holder head threaded connection.
In the first technical scheme, as preferred, the disc-shaped main body is provided with a plurality of workpiece clamping stations which are annularly arranged in an array mode by taking the axis of the disc-shaped main body as the center, a key groove is formed between every two adjacent workpiece clamping stations, the key groove vertically penetrates through the disc-shaped main body, and the key groove is provided with an outer ring of the disc-shaped main body and extends towards the axis direction of the disc-shaped main body.
In the first technical scheme, preferably, the workpiece clamping station is an annular hollow hole, a gap is formed between one side, close to the outer side wall of the disc-shaped main body, of the inner ring surface of the workpiece clamping station and the outer side wall of the disc-shaped main body, the gap is connected through a fastening bolt, and the fastening bolt is used for controlling the opening degree of the workpiece clamping station.
In a first technical scheme, as preferred, the polishing dish includes the base, and the base is cylindric structure, and the lower terminal surface central point of base puts and is connected with rotary driving device, and this rotary driving device connects and is used for driving the polishing dish to rotate, the top surface of base has the ascending recess of opening, is equipped with horizontal baffle in this recess, and this baffle below is the first cavity, and fixed mounting has the permanent magnet in this first cavity, and the top of baffle forms the holding tank.
In the first technical solution, preferably, the permanent magnet includes a plurality of annularly arranged permanent magnets, and the outer shape of the permanent magnet is a honeycomb-like structure, which can increase a magnetic field during polishing, thereby increasing a polishing force during polishing.
In a second technical solution, a cluster magnetorheological polishing method capable of realizing complex surface shape processing is used in the cluster magnetorheological polishing apparatus capable of realizing complex surface shape processing in the first technical solution, and includes the following steps:
step 1, fixing a workpiece to be machined on a polishing workpiece clamp head of a cluster magnetorheological polishing device capable of realizing complex surface shape machining, measuring a gap between the workpiece to be machined and a polishing disc through a measuring tool, and adjusting the machining gap to a proper value according to actual machining requirements;
and 4, starting a control program in the control cabinet, starting a workpiece rotating speed control button on the control panel, rotating the rotating speed control button to adjust the rotating speed of the workpiece to be machined, and measuring the rotating speed of the workpiece to be machined at the moment until the rotating speed of the workpiece to be machined reaches the actual machining requirement.
The beneficial effects of the invention are as follows:
1. the cluster magnetorheological polishing device capable of realizing complex surface processing has two mutually perpendicular sliding guide rails, and different motors control different sliding guide rails to respectively realize the movement in the X direction (left-right direction) and the Y direction (up-down direction).
2. The polishing disc and the polishing workpiece fixture head of the cluster magnetorheological polishing device capable of realizing complex surface shape processing are respectively controlled by different motors, so that the asynchronous motion of the polishing disc and the polishing workpiece fixture head can be realized.
3. The polishing workpiece clamp head of the cluster magnetorheological polishing device capable of realizing complex surface shape processing is an adjustable clamp, and the corresponding polishing workpiece clamp head can be designed according to specific processing requirements.
4. The polishing workpiece clamp head of the cluster magnetorheological polishing device capable of realizing the complex surface shape processing can clamp a plurality of workpieces and simultaneously realize the processing of the plurality of workpieces.
5. The polishing disk of the cluster magnetorheological polishing device capable of realizing complex surface shape processing can also realize the X-direction and Y-direction movement of the polishing disk under the control of the motor.
6. The polishing workpiece clamp head of the cluster magnetorheological polishing device capable of realizing complex surface shape processing can realize the deflection motion in the horizontal direction and the deflection motion in the plane of an XY coordinate system.
7. According to the cluster magnetorheological polishing device capable of realizing complex surface shape processing, the polishing disc is internally provided with the plurality of permanent magnets which are annularly arranged, and the arranged appearance is of a single honeycomb-like structure, so that the magnetic field in the polishing process can be increased, the polishing force in the polishing process is increased, and the controllability of the polishing force is realized.
Drawings
FIG. 1 is a general view of the cluster magnetorheological polishing device capable of realizing complex surface shape processing.
Fig. 2 is a partial method diagram at a in fig. 1.
FIG. 3 is an isometric view of a polishing workpiece fixture head structure of the cluster magnetorheological polishing device capable of realizing complex surface shape processing according to the invention.
FIG. 4 is a front view of a polishing workpiece fixture head structure of the cluster magnetorheological polishing apparatus for realizing complex surface shape processing according to the present invention.
FIG. 5 is a partially enlarged view of the polishing disk of the cluster magnetorheological polishing device capable of realizing complex surface shape processing.
FIG. 6 is a schematic horizontal view of the magnetic field generator of the cluster magnetorheological polishing device capable of realizing complex surface shape processing according to the invention.
Fig. 7 is a cross-sectional view taken along the plane a-a in fig. 6.
FIG. 8 is a schematic view of a magnetic field generator of a cluster magnetorheological polishing device capable of realizing complex surface shape processing in the vertical direction.
Fig. 9 is a cross-sectional view taken along plane B-B of fig. 8.
The reference numerals include:
1-X axis drive motor, 2-X axis guide rail component, 3-Y axis drive guide rail component, 4-Y axis drive motor, 5-yaw motor, 6-machine tool clamp, 7-yaw mechanism, 8-polishing disk, 81-base, 82-clapboard, 83-first chamber, 84-holding tank, 85-permanent magnet, 9-machine tool frame, 10-control box, 11-slide block, 12-polishing workpiece clamp head, 13-first rotating motor, 14-workpiece clamp, 15-rotating shaft, 16-fixed baffle, 17-connecting shaft, 18-workpiece clamping station, 19-key groove and 20-fastening bolt.
Detailed Description
In order to make the purpose, technical solution and advantages of the present technical solution more clear, the present technical solution is further described in detail below with reference to specific embodiments. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present teachings.
Example 1
As shown in fig. 1-9, the present embodiment provides a cluster magnetorheological polishing apparatus capable of implementing complex surface shape processing, which includes a vertical surface moving mechanism, a yaw mechanism 7, a first rotating motor 13, a rotating shaft 15, a polishing workpiece fixture head 12 and a polishing disk 8, wherein the yaw mechanism 7 is installed at a power end of the first vertical surface moving mechanism, the vertical surface moving mechanism drives the yaw mechanism 7 to move in a vertical surface through the power end, the first rotating motor 13 is installed at the power end of the yaw mechanism 7, the first rotating motor 13 can be driven by the yaw mechanism 7 to form a yaw action in a second vertical surface, the first vertical surface is parallel to the second vertical surface, the power end of the first rotating motor 13 is connected to the polishing workpiece fixture head 12 through the rotating shaft 15, the polishing workpiece fixture head 12 is used for holding a workpiece to be polished, the polishing workpiece fixture head 12 can be driven to rotate by the first rotating motor 13, polishing dish 8 sets up in the below of polishing work piece anchor clamps head 12, and the top surface of polishing dish 8 is the polishing face, and the top surface of polishing dish 8 has the holding tank 84 that is used for holding magnetic current polishing solution, and polishing dish 8 embeds magnetic field generating device.
As shown in fig. 2, in this embodiment, the vertical surface moving mechanism includes a machine tool fixture 6, an X-axis driving motor 1, an X-axis guide rail assembly 2, a Y-axis driving guide rail assembly 3, and a Y-axis driving motor 4, where the Y-axis driving guide rail assembly 3 includes a vertically arranged guide rail, the X-axis guide rail assembly 2 is slidably mounted on the guide rail of the Y-axis driving guide rail assembly 3, and a power end of the Y-axis driving motor 4 is in power connection with the X-axis guide rail assembly 2 to drive the X-axis guide rail assembly 2 to vertically move on the guide rail of the Y-axis driving guide rail assembly 3; x axle guide rail set spare 2 is including the guide rail of level setting, and lathe anchor clamps 6 slidable install on X axle guide rail set spare 2's guide rail, and the power end and the 6 power of lathe anchor clamps of X axle driving motor 1 are connected to drive lathe anchor clamps 6 horizontal migration, and beat mechanism 7 is installed on lathe anchor clamps 6.
Specifically, the Y-axis drive guide rail assembly 3 is fixed on the machine tool frame 9 by screws, the yaw mechanism 77 in the XY-coordinate system plane is connected with the Y-axis drive guide rail assembly 3 by screws, and the vertical plane moving mechanism is connected with the yaw mechanism 7 in the XY-coordinate system plane by screws.
In this embodiment, the control box 10 is provided with a control circuit and a corresponding control panel for controlling the X-axis guide rail assembly 2, the Y-axis driving guide rail assembly 3, the yaw mechanism 7, and the polishing disk 8 to move correspondingly. The cluster magnetorheological polishing device capable of realizing complex path processing comprises a control box 10 for realizing the whole polishing process, and a polishing disk 8, a vertical surface moving mechanism and the rotary motion and the deflection motion of a polishing tool chuck are controlled integrally.
The power end of the deflection mechanism 7 is provided with a guide rail (not shown in the figure), a slide block 11 and a mounting fixed baffle 16, the guide rail is mounted at the power end of the deflection mechanism 7, the slide block 11 is slidably mounted on the guide rail, the driving mechanism of the deflection mechanism 7 is a deflection motor 5, and the deflection mechanism 7 can perform small-distance displacement through the matching of the guide rail and the slide block 11.
As shown in fig. 3 and 4, in the present embodiment, the polishing work holder head 12 is provided with the work holder 14, the work holder 14 includes a disk-shaped body and a connecting shaft 17, the connecting shaft 17 is provided at one end of the disk-shaped body and is disposed coaxially with the disk-shaped body, the connecting shaft 17 has an external thread, and the work holder 14 is screwed to the polishing work holder head 12 through the connecting shaft 17. Specifically, the disc-shaped main body is provided with a plurality of workpiece clamping stations 18 which are annularly arrayed with the axis of the disc-shaped main body as the center, a key groove 19 is formed between every two adjacent workpiece clamping stations 18, the key groove 19 vertically penetrates through the disc-shaped main body, and the outer ring of the disc-shaped main body of the key groove 19 extends towards the axis of the disc-shaped main body. The workpiece clamping station 18 is an annular hollow hole, a gap is formed between one side, close to the outer side wall of the disc-shaped main body, of the inner annular surface of the workpiece clamping station 18 and the outer side wall of the disc-shaped main body, the gap is connected through a fastening bolt 20, and the fastening bolt 20 is used for controlling the opening degree of the workpiece clamping station 18.
As shown in fig. 5 to 9, the polishing disk 8 includes a base 81, the base 81 is a cylindrical structure, a central position of a lower end surface of the base 81 is connected to a rotation driving device, the rotation driving device is connected to drive the polishing disk 8 to rotate, a top surface of the base 81 has a groove with an upward opening, a transverse partition 82 is disposed in the groove, a first chamber 83 is formed below the partition 82, a permanent magnet 85 is fixedly mounted in the first chamber 83, and an accommodating groove 84 is formed above the partition 82.
With the above, in the cluster magnetorheological polishing device capable of realizing complex path processing according to the embodiment, the first rotating motor 13 controls the rotating motion of the polishing workpiece fixture head 12, and the built-in motor in the machine tool frame 9 controls the rotating motion of the polishing disk 8, so that the asynchronous motion of the polishing disk 8 and the polishing head in the polishing process can be met.
In the cluster magnetorheological polishing device capable of realizing complex path processing of the embodiment, the deflection motor 5 controls the deflection mechanism 7 to perform deflection motion, the polishing workpiece fixture head 12 and the first rotating motor 13 for controlling the polishing workpiece fixture head 12 are fixedly arranged on the sliding block 11 matched with the guide rail, and the polishing workpiece fixture head 12 can move along with the moving track of the sliding block 11 matched with the sliding guide rail on the sliding guide rail, so that complex path processing is realized.
In this embodiment, the permanent magnet 85 includes a plurality of annularly arranged, and the appearance of the permanent magnet 85 is a honeycomb-like structure, and the honeycomb-like structure can increase the magnetic field in the polishing process, thereby increasing the polishing force in the polishing process and realizing the controllability of the polishing force.
Example 2
The embodiment provides a cluster magnetorheological polishing method capable of realizing complex surface shape processing, and the cluster magnetorheological polishing device capable of realizing complex surface shape processing in the embodiment 1 is used, and comprises the following steps:
step 1, fixing a workpiece to be machined on a polishing workpiece clamp head 12 of a cluster magnetorheological polishing device capable of realizing complex surface shape machining, measuring the gap between the workpiece to be machined and a polishing disc 8 through a measuring tool, and adjusting the machining gap to a proper value according to actual machining requirements.
And 2, placing the magnetorheological polishing solution on the surface of the polishing disk 8, and quantitatively controlling the amount of the magnetorheological polishing solution in the polishing disk 8 to ensure that the thickness of a polishing film formed by the magnetic field generating device in the polishing disk 8 is basically consistent.
And 3, starting a complete machine to control a power supply, starting a vertical surface moving mechanism to correspond to a gear, and respectively realizing horizontal movement and vertical movement of the workpiece to be machined on the polishing workpiece clamp head 12 through the vertical surface moving mechanism until the workpiece to be machined moves to a proper working position and stops.
And 4, starting a control program in the control box 10, starting a workpiece rotating speed control button on a control panel, rotating the rotating speed control button to adjust the rotating speed of the workpiece to be machined, and measuring the rotating speed of the workpiece to be machined at the moment until the rotating speed of the workpiece to be machined reaches the actual machining requirement.
And 5, starting a control program in the control box 10, starting a rotating speed control button of the polishing disk 8 on the control panel, rotating the rotating speed control button to adjust the rotating speed of the polishing disk 8, and measuring the rotating speed of the polishing disk 8 until the rotating speed of the polishing disk 8 meets the actual processing requirement.
The foregoing is only a preferred embodiment of the present invention, and many variations in the specific embodiments and applications of the invention may be made by those skilled in the art without departing from the spirit of the invention, which falls within the scope of the claims of this patent.
Claims (9)
1. A cluster magnetorheological polishing device capable of realizing complex surface shape processing is characterized in that: the polishing machine comprises a vertical surface moving mechanism, a deflection mechanism, a first rotating motor, a rotating shaft, a polishing workpiece fixture head and a polishing disc, wherein the deflection mechanism is arranged at the power end of the first vertical surface moving mechanism, the vertical surface moving mechanism drives the deflection mechanism to move in a vertical surface through the power end, the first rotating motor is arranged at the power end of the deflection mechanism, the first rotating motor can be driven by the deflection mechanism to form deflection motion in a second vertical surface, the first vertical surface is parallel to the second vertical surface, the power end of the first rotating motor is connected with the polishing workpiece fixture head through the rotating shaft, the polishing workpiece fixture head is used for clamping a workpiece to be polished, the polishing workpiece fixture head can be driven to rotate by the first rotating motor, the polishing disc is arranged below the polishing workpiece fixture head, the top surface of the polishing disc is a polishing surface, and the top surface of the polishing disc is provided with a containing groove for containing polishing liquid, the polishing disk is internally provided with a magnetic field generating device.
2. The cluster magnetorheological polishing device capable of realizing the processing of the complex surface shape according to claim 1, wherein: the vertical surface moving mechanism comprises a machine tool clamp, an X-axis driving motor, an X-axis guide rail assembly, a Y-axis driving guide rail assembly and a Y-axis driving motor, wherein the Y-axis driving guide rail assembly comprises a vertically arranged guide rail, the X-axis guide rail assembly is slidably mounted on a guide rail of the Y-axis driving guide rail assembly, and a power end of the Y-axis driving motor is in power connection with the X-axis guide rail assembly so as to drive the X-axis guide rail assembly to vertically move on the guide rail of the Y-axis driving guide rail assembly; the X-axis guide rail assembly comprises a guide rail horizontally arranged, the machine tool clamp is slidably mounted on the guide rail of the X-axis guide rail assembly, the power end of the X-axis driving motor is in power connection with the machine tool clamp to drive the machine tool clamp to horizontally move, and the deflection mechanism is mounted on the machine tool clamp.
3. The cluster magnetorheological polishing device capable of realizing the processing of the complex surface shape according to claim 1, wherein: the power end of the deflection mechanism is provided with a guide rail, a sliding block and a mounting fixed baffle, the guide rail is mounted at the power end of the deflection mechanism, the sliding block is slidably mounted on the guide rail, and the driving mechanism of the deflection mechanism is a deflection motor.
4. The cluster magnetorheological polishing device capable of realizing the processing of the complex surface shape according to claim 1, wherein: the polishing workpiece fixture comprises a disc-shaped main body and a connecting shaft, wherein the connecting shaft is arranged at one end of the disc-shaped main body and is coaxially arranged with the disc-shaped main body, the connecting shaft is provided with an external thread, and the workpiece fixture is in threaded connection with the polishing workpiece fixture head through the connecting shaft.
5. The cluster magnetorheological polishing device capable of realizing the complex surface shape processing according to claim 4, wherein: the disc-shaped main body is provided with a plurality of workpiece clamping stations which are annularly arrayed with the axis of the disc-shaped main body as the center, a key groove is formed between every two adjacent workpiece clamping stations, the key groove vertically penetrates through the disc-shaped main body, and the key groove is provided with an outer ring of the disc-shaped main body which extends towards the axis direction of the disc-shaped main body.
6. The cluster magnetorheological polishing device capable of realizing the complex surface shape processing according to claim 5, wherein: the workpiece clamping station is an annular hollow hole, a notch is formed between one side, close to the outer side wall of the disc-shaped main body, of the inner annular surface of the workpiece clamping station and the outer side wall of the disc-shaped main body, the notch is connected through a fastening bolt, and the fastening bolt is used for controlling the opening degree of the workpiece clamping station.
7. The cluster magnetorheological polishing device capable of realizing the processing of the complex surface shape according to claim 1, wherein: the polishing disc comprises a base, the base is of a cylindrical structure, the center of the lower end face of the base is connected with a rotary driving device, the rotary driving device is connected with a groove with an upward opening, a transverse partition plate is arranged in the groove, a first cavity is formed below the partition plate, a permanent magnet is fixedly arranged in the first cavity, and an accommodating groove is formed above the partition plate.
8. The cluster magnetorheological polishing device capable of realizing the processing of the complex surface shape according to claim 7, wherein: the permanent magnet comprises a plurality of annularly arranged permanent magnets, the appearance of each permanent magnet is of a honeycomb-like structure, and the honeycomb-like structure can increase a magnetic field in the polishing process and further increase the polishing force in the polishing process.
9. The clustered magnetorheological polishing method capable of realizing the complex surface shape processing, which uses the clustered magnetorheological polishing device capable of realizing the complex surface shape processing according to any one of claims 1 to 8, and is characterized in that: the method comprises the following steps:
step 1, fixing a workpiece to be machined on a polishing workpiece clamp head of a cluster magnetorheological polishing device capable of realizing complex surface shape machining, measuring a gap between the workpiece to be machined and a polishing disc through a measuring tool, and adjusting the machining gap to a proper value according to actual machining requirements;
step 2, placing the magnetorheological polishing solution on the surface of the polishing disk, and quantitatively controlling the amount of the magnetorheological polishing solution in the polishing disk to ensure that the thickness of a polishing film formed by a magnetic field generating device in the polishing disk is basically consistent;
step 3, starting a complete machine to control a power supply, starting a vertical surface moving mechanism to correspond to a gear, and respectively realizing horizontal movement and vertical movement of a workpiece to be machined on a polishing workpiece clamp head through the vertical surface moving mechanism until the workpiece to be machined moves to a proper working position and stops;
and 4, starting a control program in the control cabinet, starting a workpiece rotating speed control button on the control panel, rotating the rotating speed control button to adjust the rotating speed of the workpiece to be machined, and measuring the rotating speed of the workpiece to be machined at the moment until the rotating speed of the workpiece to be machined reaches the actual machining requirement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111193695.6A CN113770906A (en) | 2021-10-13 | 2021-10-13 | Cluster magnetorheological polishing device and method capable of achieving complex surface shape processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111193695.6A CN113770906A (en) | 2021-10-13 | 2021-10-13 | Cluster magnetorheological polishing device and method capable of achieving complex surface shape processing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114750032A (en) * | 2022-03-22 | 2022-07-15 | 日照职业技术学院 | Flexible grinding device for stepped sealing end face of deep stepped hole of valve body |
| CN114986397A (en) * | 2022-06-08 | 2022-09-02 | 中国人民解放军国防科技大学 | Clamping device for water jet polishing process |
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2021
- 2021-10-13 CN CN202111193695.6A patent/CN113770906A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114750032A (en) * | 2022-03-22 | 2022-07-15 | 日照职业技术学院 | Flexible grinding device for stepped sealing end face of deep stepped hole of valve body |
| CN114986397A (en) * | 2022-06-08 | 2022-09-02 | 中国人民解放军国防科技大学 | Clamping device for water jet polishing process |
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Application publication date: 20211210 |