CN113754304A - Mold pressing pretreatment method for chalcogenide glass precision mold pressing preform - Google Patents
Mold pressing pretreatment method for chalcogenide glass precision mold pressing preform Download PDFInfo
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- CN113754304A CN113754304A CN202111011852.7A CN202111011852A CN113754304A CN 113754304 A CN113754304 A CN 113754304A CN 202111011852 A CN202111011852 A CN 202111011852A CN 113754304 A CN113754304 A CN 113754304A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/0013—Re-forming shaped glass by pressing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
- C23C14/0611—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Glass Compositions (AREA)
Abstract
The invention discloses a molding pretreatment method of a chalcogenide glass precision molding preform. Belongs to the technical field of optical glass precision mould pressing. The method mainly solves the problems of atomization and poor die adhesion of a final product caused by volatile component elements and interface reaction with a die in the high-temperature forming process of chalcogenide glass. It is mainly characterized in that: before the chalcogenide glass precision molding preform is molded, a protective layer is formed on the surface of the chalcogenide glass precision molding preform through physical coating. The invention has the characteristics of preventing elements from volatilizing and generating interface reaction with a mould or air to form white fog or poor sticking in the high-temperature forming process of the chalcogenide glass precision die-pressing preform, improving the yield of precision die-pressing and reducing the die-pressing manufacturing cost, improving the appearance quality of products and being mainly used for the treatment before the die-pressing of the chalcogenide glass precision die-pressing preform.
Description
Technical Field
The invention belongs to the technical field of precision die pressing of optical glass, and particularly relates to a pre-processing method for die pressing of a chalcogenide glass precision die pressing preform, which is used for improving the weather resistance of chalcogenide glass die pressing products and preventing interface reaction between the surface of chalcogenide glass and a die or air in the die pressing process from forming white fog or poor die adhesion, so that the appearance quality of the products is improved.
Background
The optical glass precision mould pressing technology is a high-precision optical element processing technology, and a processed optical preform is placed in a high-precision mould, heated and pressurized in an oxygen-free environment, and the glass preform is molded to prepare the required high-precision optical element. Precision molding technology has become the most advanced optical element manufacturing technology in the world. In recent years, due to rapid development in the fields of security, surveillance, digital cameras, mobile phones, and the like, aspheric lenses are favored by optical designers under the demand of lighter, smaller volume, lower cost, and better effect in the market for various products.
In order to obtain high quality optical components, precision press-molding designs require the use of suitable press-molding tools, high precision molds, and suitable press-molding processes. The chalcogenide glass has few composition elements and poor glass stability, a chalcogenide glass preform is volatile in a high-temperature forming process and is easy to generate interface reaction with a mould, the final product has poor atomization and mould adhesion, the yield of precision mould pressing is reduced, and the mould pressing manufacturing cost is increased.
Patent CN102079627B discloses a method for treating a preform before precision press molding, and the chemical reaction on the surface of glass is accelerated by treating chalcogenide glass by an electroless plating method.
Disclosure of Invention
The invention aims to provide a pretreatment method for the molding of the chalcogenide glass precision molding preform aiming at the defects, which can improve the weather resistance of chalcogenide glass molded products and prevent the surface of chalcogenide glass from carrying out interface reaction with a mold or air to form white fog or poor adhesion during the molding process, thereby improving the appearance quality of the products.
The technical solution of the invention is as follows: a molding pretreatment method of a chalcogenide glass precision molding preform is characterized by comprising the following steps: before the chalcogenide glass precision molding preform is molded, a protective layer is formed on the surface of the chalcogenide glass precision molding preform through physical coating.
The protective layer in the technical scheme of the invention is a coating film layer formed on the surface of the chalcogenide glass precision die pressing preform by adopting a physical sputtering method or a physical evaporation method.
The technical scheme of the invention is that the film coating film layer is an infrared antireflection film or an infrared diamond film.
The shape of the chalcogenide glass precision die-pressing preform in the technical scheme of the invention is spherical, lens, rod, strip or block.
The chalcogenide glass precision die pressing preform is prepared from Ge-Se-As, Ge-Se-Sb, Se-As or other chalcogenide system glass.
The technical scheme of the invention is that a physical vapor deposition method is used for forming the infrared antireflection film on the surface of the chalcogenide glass precision die pressing preform.
The technical proposal of the invention is to form an infrared diamond film on the surface of a chalcogenide glass precision die pressing preform by using a physical sputtering method.
The physical vapor deposition method in the technical scheme of the invention comprises the following steps: cleaning the chalcogenide glass precision die-pressing preform for 5 minutes in high-frequency ultrasonic cleaning equipment, spin-drying at high speed and then putting into a film coating machine; putting infrared anti-reflection coating material into a coating machine, vacuumizing a coating chamber to 3 multiplied by 10-4Pa, purging with argon for 30 minutes, and baking at 100 ℃ for 3 hours to obtain the chalcogenide glass precision die-pressing preform with the infrared antireflection film plated on the surface.
The physical sputtering method in the technical scheme of the invention comprises the following steps: cleaning the chalcogenide glass precision die-pressing preform for 5 minutes in high-frequency ultrasonic cleaning equipment, spin-drying at high speed and then putting into a film coating machine; placing infrared diamond film material in a film coating machine, vacuumizing a film coating chamber to 3 multiplied by 10-4Pa, sweeping for 30 minutes by argon gas, baking for 3 hours at 120 ℃ to obtain the infrared diamond film plated on the surfaceThe chalcogenide glass precision press-molding preform of (1).
In the invention, before the chalcogenide glass precision molding preform is molded, a protective layer is formed on the surface of the chalcogenide glass precision molding preform through physical coating, so that the chalcogenide glass precision molding preform is put into a precision molding die during molding and is molded under the conventional molding conditions (the environment is N-containing)299.999 percent, 10ppm of oxygen content, 230 ℃ of molding temperature, 150Kgf of pressure and 20min of molding period), preparing a molded product, placing the molded product in the air for 10h, observing the appearance of the product under a 7-time microscope, wherein the surface appearance of the product is normal and no uniformly distributed white fog or poor sticking occurs.
The invention has the characteristics of preventing elements of the chalcogenide glass precision die-pressing preform from volatilizing and carrying out interface reaction with a die or air in the high-temperature forming process to form white fog or poor die adhesion, improving the yield of precision die pressing and reducing the die pressing manufacturing cost. The invention is mainly used for the treatment before the molding of the chalcogenide glass precision molding preform.
Drawings
In order to more clearly illustrate the technical solution in the implementation of the present invention, the drawings needed to be used in the embodiments will be briefly described below.
FIG. 1 is a view showing the appearance of a pre-molded article with an antireflection film layer of example 1 of the present invention.
FIG. 2 is an appearance view of a pre-molded product without film coating treatment compared with example 1.
FIG. 3 is an external view of a molded product of a preform having an infrared diamond film layer according to example 2 of the present invention.
FIG. 4 is an appearance view of a non-coating treatment preform molded product compared with example 2.
Detailed Description
The present invention will be described in further detail with reference to the following examples and the accompanying drawings.
Example 1 is a physical vapor deposition treatment before molding of a chalcogenide glass precision molding preform.
A chalcogenide glass (IRG 206) spherical preform with the diameter of 9mm is selected, and an infrared antireflection film is formed on the surface of the preform by a physical vapor deposition method.
Cleaning the preform for 5 minutes in a high-frequency ultrasonic cleaning device, spin-drying at a high speed, and putting the preform into a film coating machine. Putting infrared anti-reflection coating material into a coating machine, vacuumizing a coating chamber to 3 multiplied by 10-4And Pa, sweeping the preform for 30 minutes by using argon, baking the preform for 3 hours at 100 ℃, and plating film materials with different thicknesses on the surface of the preform to obtain the preform with the infrared antireflection film plated on the surface.
The preform of example 1 treated with a plating film and the untreated preform compared with example 1 were simultaneously charged into a precision press-molding die under the same press-molding conditions (atmosphere containing N)299.999 percent, 10ppm of oxygen content, 230 ℃ of molding temperature, 150Kgf of pressure and 20min of molding period) to prepare a molded product.
The molded products of the coated and untreated preforms were placed in air for 10 hours, and the appearance of the products was observed under a 7-fold microscope, which is clearly different from that shown in FIGS. 1 and 2. FIG. 1 and FIG. 2 show that the anti-reflection coating coated product has a normal surface appearance, and the surface of the product without the anti-reflection coating treatment has uniformly distributed white fog (white spots). Example 1 improves the appearance quality of the product.
Example 2 is a physical sputtering process for treating a chalcogenide glass precision press-molding preform before press-molding.
A chalcogenide glass (IRG 206) spherical preform with a diameter of 9mm was selected, and an infrared diamond film was formed on the surface of the preform by a physical sputtering method.
Cleaning the preform for 5 minutes in a high-frequency ultrasonic cleaning device, spin-drying at a high speed, and putting the preform into a film coating machine. Placing infrared diamond film material in a film coating machine, vacuumizing a film coating chamber to 3 multiplied by 10-4And Pa, sweeping the preform for 30 minutes by using argon, baking the preform for 3 hours at 120 ℃, and plating film materials with different thicknesses on the surface of the preform to obtain the preform with the infrared diamond film plated on the surface.
A preform of example 2 subjected to a plating treatment and an untreated preform compared with example 2 were simultaneously charged into a precision press-molding die under the same press-molding conditions (atmosphere containing N)299.999 percent, 10ppm of oxygen content, 230 ℃ of molding temperature, 150Kgf of pressure and 20min of molding period) to prepare a molded product.
The molded products of the coated and untreated preforms were placed in air for 10 hours, and the appearance of the products was observed under a 7-fold microscope, as shown in fig. 3 and 4, which is a significant difference. Fig. 3 and 4 show that the appearance of the surface of the product coated with the infrared diamond film is normal, and the surface of the product which is not coated with the infrared diamond film is uniformly distributed with white fog (white spots). Example 2 improves the appearance quality of the product.
The protective layer formed by coating, namely the film layer, has no influence on the prepared product, and the film layer coated on the preform plays a role in the chemical reaction on the surface of the lens in the mould pressing process.
Claims (9)
1. A molding pretreatment method of a chalcogenide glass precision molding preform is characterized by comprising the following steps: before the chalcogenide glass precision molding preform is molded, a protective layer is formed on the surface of the chalcogenide glass precision molding preform through physical coating.
2. The method for treating a chalcogenide glass precision press-molding preform before press-molding according to claim 1, wherein: the protective layer is a coating film layer formed on the surface of the chalcogenide glass precision die pressing preform by adopting a physical sputtering method or a physical evaporation method.
3. The method for treating a chalcogenide glass precision press-molding preform before press-molding according to claim 2, wherein: the film coating layer is an infrared antireflection film or an infrared diamond film.
4. The method for treating a chalcogenide glass precision press-molding preform before press-molding according to any one of claims 1 to 3, wherein: the shape of the chalcogenide glass precision die-pressing preform is spherical, lens type, rod type, strip type or block type.
5. The method for treating a chalcogenide glass precision press-molding preform before press-molding according to any one of claims 1 to 3, wherein: the chalcogenide glass precision die pressing preform is prepared from Ge-Se-As, Ge-Se-Sb or Se-As chalcogenide glass.
6. The method for treating a chalcogenide glass precision press-molding preform before press-molding according to claim 3, wherein: and forming an infrared antireflection film on the surface of the chalcogenide glass precision die pressing preform by using a physical vapor deposition method.
7. The method for treating a chalcogenide glass precision press-molding preform before press-molding according to claim 3, wherein: an infrared diamond film is formed on the surface of the chalcogenide glass precision press-molding preform by using a physical sputtering method.
8. The pre-processing method for precision press-molding chalcogenide glass according to claim 6, wherein the physical vapor deposition method comprises the following steps: cleaning the chalcogenide glass precision die-pressing preform for 5 minutes in high-frequency ultrasonic cleaning equipment, spin-drying at high speed and then putting into a film coating machine; putting infrared anti-reflection coating material into a coating machine, vacuumizing a coating chamber to 3 multiplied by 10- 4Pa, purging with argon for 30 minutes, and baking at 100 ℃ for 3 hours to obtain the chalcogenide glass precision die-pressing preform with the infrared antireflection film plated on the surface.
9. The pre-molding treatment method for the chalcogenide glass precision molding preform according to claim 7, wherein the physical sputtering method comprises the following steps: cleaning the chalcogenide glass precision die-pressing preform for 5 minutes in high-frequency ultrasonic cleaning equipment, spin-drying at high speed and then putting into a film coating machine; placing infrared diamond film material in a film coating machine, vacuumizing a film coating chamber to 3 multiplied by 10- 4Pa, sweeping for 30 minutes by argon gas, and baking for 3 hours at 120 ℃ to obtain the chalcogenide glass precision die-pressing preform coated with the infrared diamond film on the surface.
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CN202111011852.7A CN113754304A (en) | 2021-08-31 | 2021-08-31 | Mold pressing pretreatment method for chalcogenide glass precision mold pressing preform |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115521047A (en) * | 2022-09-28 | 2022-12-27 | 宁波大学 | Production method of plane multi-level diffraction thermal imaging lens |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60210534A (en) * | 1984-04-04 | 1985-10-23 | Canon Inc | Method for forming optical element |
JPH0483724A (en) * | 1990-07-24 | 1992-03-17 | Canon Inc | Glass blank for production of optical unit and production thereof |
CN102079627A (en) * | 2009-12-01 | 2011-06-01 | 肖特玻璃科技(苏州)有限公司 | Method for processing preformed pieces before precise mold pressing |
CN102428048A (en) * | 2009-05-15 | 2012-04-25 | Hoya株式会社 | Glass material for press forming, method for manufacturing glass optical element using same, and glass optical element |
CN107130210A (en) * | 2017-05-03 | 2017-09-05 | 中国建筑材料科学研究总院 | Surface is coated with chalcogenide glass of infrared DLC protecting film and preparation method thereof |
-
2021
- 2021-08-31 CN CN202111011852.7A patent/CN113754304A/en not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60210534A (en) * | 1984-04-04 | 1985-10-23 | Canon Inc | Method for forming optical element |
JPH0483724A (en) * | 1990-07-24 | 1992-03-17 | Canon Inc | Glass blank for production of optical unit and production thereof |
CN102428048A (en) * | 2009-05-15 | 2012-04-25 | Hoya株式会社 | Glass material for press forming, method for manufacturing glass optical element using same, and glass optical element |
CN102079627A (en) * | 2009-12-01 | 2011-06-01 | 肖特玻璃科技(苏州)有限公司 | Method for processing preformed pieces before precise mold pressing |
CN107130210A (en) * | 2017-05-03 | 2017-09-05 | 中国建筑材料科学研究总院 | Surface is coated with chalcogenide glass of infrared DLC protecting film and preparation method thereof |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115521047A (en) * | 2022-09-28 | 2022-12-27 | 宁波大学 | Production method of plane multi-level diffraction thermal imaging lens |
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Application publication date: 20211207 |