CN113741599A - Blowing-out control process for reduction furnace, system thereof and computer readable storage medium - Google Patents
Blowing-out control process for reduction furnace, system thereof and computer readable storage medium Download PDFInfo
- Publication number
- CN113741599A CN113741599A CN202111129293.XA CN202111129293A CN113741599A CN 113741599 A CN113741599 A CN 113741599A CN 202111129293 A CN202111129293 A CN 202111129293A CN 113741599 A CN113741599 A CN 113741599A
- Authority
- CN
- China
- Prior art keywords
- furnace
- reduction furnace
- valve
- current value
- blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
- G05D27/02—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00 characterised by the use of electric means
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Inorganic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a blowing-out control process for a reduction furnace, a system thereof and a computer readable storage medium, wherein H is respectively subjected to blowing-out starting and blowing-out stages2The air input, the TCS air input and the current value are subjected to program control, then the whole blowing-out process is completed after cooling and gas replacement, during actual operation, an automatic intelligent control program can be realized according to the control process requirement, and the product quality and safety problems caused by factors such as inconvenient operation of personnel or misoperation are greatly reduced.
Description
Technical Field
The invention belongs to the technical field of polycrystalline silicon reduction furnace control, and particularly relates to a reduction furnace blowing control process, a system and a computer readable storage medium thereof.
Background
The reduction furnace process is an important process link in the production process of the polycrystalline silicon. In the reducing furnace process, high-purity trichlorosilane is vaporized to form saturated steam, the saturated steam and high-purity hydrogen are mixed in proportion and then are sent into a reducing furnace under the condition of specified temperature and flow, chemical vapor deposition reaction is carried out on the surface of a high-temperature silicon core electrified in the reducing furnace, crystalline silicon is deposited on the surface of the silicon core to enable the diameter of the silicon rod to be continuously increased until the silicon rod reaches the specified diameter, and then the furnace is shut down to take out the silicon rod. In the deposition process of the polycrystalline silicon in the reduction furnace, factors such as heating current, material flow, pressure, air flow distribution and the like of the reduction furnace have great influence on the quality of the silicon rod, so that the operation process of the reduction furnace needs to be controlled finely and strictly.
The operation process of the reduction furnace comprises blowing-in, operation and blowing-out, wherein the blowing-out process of the reduction furnace is very complex and comprises various links such as power reduction before blowing-out, power reduction and gas reduction during blowing-out, hydrogen empty burning, current reduction, hydrogen blowing promotion and the like, and the operation in the links can influence factors such as current, material flow, pressure, air flow distribution and the like in the reduction furnace. However, the blow-out process of the existing reduction furnace still adopts manual operation of personnel, and therefore, the following problems still exist:
(1) the shutdown process is easy to deviate or inconvenient in parameter adjustment by personnel operation, such as: when the air flow control in the furnace deviates or the parameter is not adjusted timely during blowing out, the air flow fluctuation is large, fish scales grow on the surface of the silicon rod, the temperature difference in the furnace is further influenced, and the risk of cracking the rod and even turning the furnace down is caused.
(2) The specific control parameters of the blowing-out process are controlled by personnel operation, and misoperation conditions are easy to occur, such as: the reduction furnace is subjected to pressure building due to the fact that the valve is turned off incorrectly, and the safety valve jumps; or the wrong hydrogen valve is closed, so that the silicon rod atomizes fish scales and even burrs, and the product quality is influenced; or the cooling water valve is turned off by mistake, so that the pipeline is dried, the safety valve jumps or the heating is continued to cause leakage, and the like.
(3) The safety confirmation items of the blowing-out process are confirmed by operators, so that safety accidents caused by forgetting or furnace dismantling time is easily caused.
Based on the above situation, in the actual production process, in order to improve the quality of the polycrystalline silicon product and avoid the situations of product quality reduction and safety accidents caused by manual operation of personnel, it is key to reasonably and accurately control the blow-out process of the existing reduction furnace.
In the prior art, the invention patent with publication number CN108394905A discloses a full-automatic stable operation method of a reduction furnace, during the blow-out period of the reduction furnace, the opening of hydrogen and trichlorosilane feeding regulating valves is reduced in a gradient manner according to a preset hydrogen and trichlorosilane material dropping curve, the current input into a silicon rod is reduced in a gradient manner according to a preset current dropping curve, and the processes of replacement of nitrogen and hydrogen and taking away of residual materials and heat in the furnace are sequentially performed, so that the flow and the current amount of reaction materials can be smoothly and uniformly reduced. The method realizes the stable operation of the material flow during the blowing-out operation of the reduction furnace to a certain extent through the stable adjustment of the opening of the valve, but still lacks a reasonable control process of the blowing-out process of the reduction furnace, so the invention patent with the publication number of CN102608913A discloses a blowing-out control system and a method of the reduction furnace for producing polycrystalline silicon, the process parameters of the blowing-out of the reduction furnace, such as the blowing-out time and the blowing-out temperature, are optimized by calculating the maximum magnetic force and the minimum release stress applied to the silicon rod after the silicon rod is grown, and the system controls the reduction furnace to blow out according to the blowing-out time and the blowing-out temperature. However, in actual operation, the calculated current time to be blown out is not always the optimal time consumed by operation, and meanwhile, the gas phase temperature and the silicon rod temperature are changed due to the size of the silicon rod and the gas amount, rather than unified and constant data, so that the blowing out cannot be normally completed by adopting the method for controlling the blowing out of the reduction furnace, and meanwhile, the energy consumption of the system in operation cannot be reduced.
Disclosure of Invention
The invention aims to provide a blowing-out control process for a reduction furnace, which is used for respectively carrying out H blowing out control on H according to the stages of starting blowing out control and blowing out control2The invention also provides a furnace blowing control system of the reducing furnace and a computer readable storage medium, which can realize automatic intelligent control program according to the control process requirements, thereby greatly reducing the product quality and safety problems caused by inconvenient operation or misoperation of personnel and other factors.
The invention is realized by the following technical scheme: a blowing-out control process for a reduction furnace comprises the following steps:
s1, starting to blow out the furnace, and respectively controlling H of the reduction furnace2Air inlet valve, TCS feed valve and current value are adopted to reduce H of reduction furnace2Air intake amount, TCS air intake amount and current value;
s2, blowing out the furnace, gradually closing the TCS feed valve, and simultaneously controlling H of the reduction furnace2Air intake valve and current value to continuously reduce H of reduction furnace2The amount of intake air and the current value are maintained at H2The air inflow and the current value enable the reduction furnace to be in idle combustion, the current value is continuously reduced to the end point value, and then the power is cut off;
s3, cooling replacement, namely controlling the furnace barrel water to cool the reduction furnace, and controlling the H of the reduction furnace2And after the air inlet valve is closed, sending the waste gas in the reduction furnace to the leaching device, and replacing the gas in the reduction furnace.
In the step S1, H of the reduction furnace is controlled2At the time of air inlet valve, H at the time of starting blowing out is judged2Amount of intake air, when H2Intake air amount greater than 1400Nm3at/H, control H2The air intake amount is reduced to 1400Nm in 120min3H, when H2Intake air amount less than 1400Nm3At/h, control is not executed;
when a TCS feed valve of the reduction furnace is controlled, the TCS air inflow when blowing-out is started is judged, and when the TCS air inflow is more than 500Nm3When the air/h is over, the TCS air inflow is controlled to be reduced to 500Nm within 120min3H, when TCS intake air quantity is less than 500Nm3At/h, control is not executed;
when the current value of the reduction furnace is controlled, the current value when the furnace is stopped is judged, when the current value is larger than 1400A, the current value is controlled to be reduced to 1400A within 120min, and when the current value is smaller than 1400A, the control is not executed.
In the step S2, when blowing out, the TCS feed valve is gradually closed within 10min, and H of the reduction furnace is controlled simultaneously2Intake valve and current value, H within 30min2The intake air amount is reduced to 800Nm3The current value decreased to 1200A.
In the step S2, the reduction furnace is empty-fired for 50min, the current value is reduced to 500A within 60min, and the reduction furnace power supply is cut off.
In step S3, the step of cooling down the reduction furnace includes:
A. closing the furnace barrel water feeding regulating valve within 2min, closing the furnace barrel water feeding cut-off valve, and stopping heating the furnace barrel;
B. opening the furnace barrel drainage relief valve, closing the furnace barrel drainage relief valve after the temperature of the furnace barrel return water is reduced to 145 ℃, and opening the furnace-stopping upper drainage valve to cool the furnace barrel;
and closing the water feeding adjusting valve of the chassis within C.5min, closing the water feeding stop valve of the chassis, and stopping heating the chassis.
In the step S3, after the power is cut off for 240min, H of the reduction furnace is controlled2Air intake valve, 1min will H2The intake air amount is reduced to 200-300Nm3After the exhaust system communication valve is closed, H is closed again2And the air inlet valve is used for decompressing the gas in the reducing furnace to the recovery system, closing a gas mixing valve of the reducing furnace during decompression, stopping decompression when the pressure of the reducing furnace is 20Kpa, disconnecting the recovery system, opening a waste gas leaching valve, leaching the residual gas in the reducing furnace through a leaching device, controlling leaching time to be 30min, and closing the waste gas leaching valve after leaching is finished.
In the step S3, the gas in the reduction furnace is replaced by:
A. opening a nitrogen stamping valve to stamp the reduction furnace for one time, closing the nitrogen stamping valve when the pressure of the reduction furnace is more than 300Kpa, opening a waste gas leaching valve to release the pressure to a leaching device, and closing the waste gas leaching valve when the pressure of the reduction furnace is higher than the pressure of the leaching device by 20Kpa to finish one-time pressure release;
B. after the vacuum pump is started, controlling the vacuum valve to open, vacuumizing the reduction furnace, and closing the vacuum pump and the vacuum valve when the pressure of the reduction furnace is less than-30 Kpa to finish primary vacuumizing;
C. and (8) repeating the three steps A, B, and finishing the replacement of the gas in the reducing furnace after three times of pressure relief and vacuum pumping.
A furnace blowing control system for a reduction furnace comprises a storage, a processor and a computer program stored in the processor for running, wherein the processor executes the computer program to realize the furnace blowing control process.
A computer readable storage medium storing a computer program which, when executed by a processor, implements a furnace shutdown control process as in any one of the above.
Compared with the prior art, the invention has the following advantages and beneficial effects:
(1) the invention divides the prior blowing-out process into two stages of blowing-out starting and blowing-out, and when blowing-out is started, the opening of the valve and the current setting of the reduction electric are accurately controlled through an intelligent control program, so that H of the reduction furnace is controlled in the stage of blowing-out starting2The control of air inflow, TCS air inflow and current value is more stable, and then the furnace enters the blowing-out stage to respectively control the TCS feed valve and the H2The air inlet valve and the current value are controlled, and stable and accurate operation control is realized by controlling H2The air input, the TCS air input and the current value are set at different end values in two stages of starting and stopping, so that the furnace stopping process is further optimized, the quality of polycrystalline silicon products is improved, the material consumption is saved, and the process cost is reduced.
(2) According to the invention, the automatic control in the blowing-out process of the reduction furnace can be realized by utilizing an intelligent control program, the problems of excessive personnel operation and frequent intervention in the blowing-out process of the reduction furnace are solved, the workload of personnel is reduced, and misoperation is prevented.
In conclusion, the invention provides an automatically controlled blowing process of a reduction furnace, which solves a series of operation errors or deviations when a person operates the reduction furnace to blow out by improving the blowing process of the reduction furnace and combining an intelligent control program, realizes the stabilization and accurate control of the blowing process of the reduction furnace, can improve the product quality, shortens the blowing-out time by about 1 hour, and has the obvious advantages of synergy and production improvement.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Example 1:
the embodiment is a blowing-out control process for a reduction furnace.
The method is characterized in that the blowing process of the reducing furnace is controlled through an automatic control program and an intelligent control program, and the method comprises the following specific steps:
the method comprises the following steps: beginning to shut down the furnace
After the silicon rod growth is finished, starting an automatic control program, and carrying out H-shaped reduction furnace by an intelligent control program2And judging the air inflow amount, the TCS air inflow amount and the current value as follows:
when H is present2H of the inlet valve2Intake air amount greater than 1400Nm3During the period of/H, the intelligent control program automatically calculates the slope according to the starting point value and the preset end point value and period, obtains the valve opening (slope formula, the same below) uniformly controlled according to time, and sends the instruction to the automatic control program to control H2Opening of the inlet valve to H2The air intake quantity is uniformly reduced to 1400Nm within 120min3H; when H is present2Intake air amount less than 1400Nm3At/h, control is not executed.
When the TCS air inflow is more than 500Nm3When the pressure is in the range of 500Nm within 120min, the intelligent control program sends the command to the automatic control program to control the valve opening of the TCS air inlet valve and make the TCS air inlet amount be reduced to 500Nm within 120min3H; when the TCS air inflow is less than 500Nm3At/h, control is not executed;
when the current value is larger than 1400A, the intelligent control program sends an instruction to the automatic control program to control the current passing through the silicon rod in the reduction furnace, so that the current value is uniformly reduced to 1400A within 120 min; when the current value is less than 1400A, the control is not executed.
Step two: blowing out
The intelligent control program sends instructions to the automatic control program according to preset time and end point values to respectively control the TCS feed valve and the H2The control process of the opening of the air inlet valve and the current of the reduction furnace is as follows:
when the furnace is stopped, the TCS feed valve is gradually closed within 10min, so that the TCS air inflow is uniformly reduced and returns to zero; controlling H of the reduction furnace while blowing out2Intake valve and current value of H2The air input is uniformly reduced to 800Nm within 30min3The current value is uniformly reduced to 1200A within 30 min.
When the TCS air inflow is zero, H2Intake air amount is 800Nm3And h, under the condition that the current value is 1200A, controlling the reduction furnace to be empty for 50min, then controlling the current value of the reduction furnace to enable the current value to be uniformly reduced to 500A within 60min, then cutting off the power supply of the reduction furnace, and stopping the furnace.
Step three: replacement by cooling
(1) Cooling down
When the current value of the power supply of the reduction furnace is less than 1A, the intelligent control program sends an instruction to the automatic control program to control the furnace drum water to cool the reduction furnace, and the specific control steps are as follows:
A. slowly closing the furnace barrel water feeding regulating valve within 2min, closing the furnace barrel water feeding cut-off valve, and stopping heating the furnace barrel;
B. opening the furnace barrel drainage relief valve, closing the furnace barrel drainage relief valve after the temperature of the furnace barrel return water is reduced to 145 ℃, and opening the furnace-stopping upper drainage valve to cool the furnace barrel;
and gradually closing the water feeding adjusting valve of the chassis within C.5min, closing the water feeding stop valve of the chassis, stopping heating the chassis, and cooling.
(2) Exhaust gas leaching
The intelligent control program further confirms that the valves between the cooling water pipeline and the furnace barrel and the chassis are closed, and the automatic furnace shutdown is completed for 240 min. Sending an instruction to an automatic control program, and entering an exhaust gas leaching process, wherein the control is as follows:
controlling H of reduction furnace2Air intake valve, 1min will H2The intake air amount is uniformly reduced to 200-300Nm3After the exhaust system communication valve is closed, H is closed again2An intake valve. Intelligent control program monitoring H2When the air input is zero, the recovery system is started, the gas in the reduction furnace is decompressed to the recovery system, the mixed gas valve of the reduction furnace is closed during decompression, the material valve is prevented from leaking into the reduction furnace, when the pressure difference between the reduction furnace and the recovery system is less than 20Kpa, the decompression is stopped, the recovery system is disconnected,and opening the nitrogen stamping valve and the waste gas leaching valve, leaching the residual gas in the reduction furnace through the leaching device, controlling the leaching time to be 30min, and closing the nitrogen stamping valve and the waste gas leaching valve after leaching is finished.
(3) Gas replacement
After the waste leaching is finished, the intelligent control program continuously sends an instruction to the automatic control program to enter a gas replacement process, and the control is as follows:
A. the nitrogen ram valve is opened to carry out one-time ram on the reduction furnace, and the nitrogen gas inlet amount is set to be 500-550Nm3Closing the nitrogen stamping valve when the pressure of the reducing furnace is more than 300Kpa, opening the waste gas leaching valve, releasing the pressure to the leaching device, closing the waste gas leaching valve when the pressure of the reducing furnace is higher than the pressure of the leaching device by 20Kpa, monitoring and confirming the conditions of all valves through an intelligent control program, and completing one-time pressure release;
B. after the vacuum pump is started, controlling the vacuum valve to open, vacuumizing the reduction furnace, and closing the vacuum pump and the vacuum valve when the pressure of the reduction furnace is less than-30 Kpa to finish primary vacuumizing;
C. and (8) repeating the three steps A, B, and finishing the replacement of the gas in the reducing furnace after three times of pressure relief and vacuum pumping.
Example 2:
the embodiment is a furnace blowing control system for a reduction furnace.
The equipment mainly comprises a memory, a processor and a computer program stored on the processor for running, wherein the processor executes the computer program to realize the blowing-out control process described in embodiment 1. .
Example 3:
the present embodiment is a computer-readable storage medium.
The computer-readable storage medium stores a computer program that, when executed by a processor, implements the furnace shut-down control process described in embodiment 1.
The electric and DCS system modification was performed on a certain reduction furnace of the existing reduction hall, and after the modification, the blow-out process of the reduction furnace was controlled according to the method described in example 1, and the data thereof is shown in table 1 below, compared with the blow-out process before the modification of the reduction furnace.
Before transformation, manual operation is adopted when the reduction furnace is blown out, the specific control steps, the temperature, the time and other data are the same as those in the embodiment 1, and the data refer to group one. After the reduction furnace is modified, the automatic blowing-out control is carried out on the reduction furnace by adopting the blowing-out process described in the embodiment 1, and the data of the automatic blowing-out control is shown in a group two, a group three and a group four. (the blowing-out process of each group is the control process of the same reducing furnace before and after modification, and the process control of each time the reducing furnace is opened and the growth process is consistent)
TABLE 1
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are included in the scope of the present invention.
Claims (9)
1. A blowing-out control process for a reduction furnace is characterized by comprising the following steps: the method comprises the following steps:
s1, starting to blow out the furnace, and respectively controlling H of the reduction furnace2Air inlet valve, TCS feed valve and current value are adopted to reduce H of reduction furnace2Air intake amount, TCS air intake amount and current value;
s2, blowing out the furnace, gradually closing the TCS feed valve, and simultaneously controlling H of the reduction furnace2Air intake valve and current value to continuously reduce H of reduction furnace2The amount of intake air and the current value are maintained at H2The air inflow and the current value enable the reduction furnace to be in idle combustion, the current value is continuously reduced to the end point value, and then the power is cut off;
s3, cooling replacement, namely controlling the furnace barrel water to cool the reduction furnace, and controlling the H of the reduction furnace2And after the air inlet valve is closed, sending the waste gas in the reduction furnace to the leaching device, and replacing the gas in the reduction furnace.
2. A reduction according to claim 1The furnace shutdown control process is characterized by comprising the following steps: in the step S1, H of the reduction furnace is controlled2At the time of air inlet valve, H at the time of starting blowing out is judged2Amount of intake air, when H2Intake air amount greater than 1400Nm3at/H, control H2The air intake amount is reduced to 1400Nm in 120min3H, when H2Intake air amount less than 1400Nm3At/h, control is not executed;
when a TCS feed valve of the reduction furnace is controlled, the TCS air inflow when blowing-out is started is judged, and when the TCS air inflow is more than 500Nm3When the air/h is over, the TCS air inflow is controlled to be reduced to 500Nm within 120min3H, when TCS intake air quantity is less than 500Nm3At/h, control is not executed;
when the current value of the reduction furnace is controlled, the current value when the furnace is stopped is judged, when the current value is larger than 1400A, the current value is controlled to be reduced to 1400A within 120min, and when the current value is smaller than 1400A, the control is not executed.
3. The blast control process for the reduction furnace according to claim 1, wherein: in the step S2, when blowing out, the TCS feed valve is gradually closed within 10min, and H of the reduction furnace is controlled simultaneously2Intake valve and current value, H within 30min2The intake air amount is reduced to 800Nm3The current value decreased to 1200A.
4. The blast control process for the reduction furnace according to claim 1, wherein: in step S2, the reduction furnace is empty-fired for 50min, and when the current value is reduced to 500A within 60min, the reduction furnace power supply is cut off.
5. The blast control process for the reduction furnace according to claim 1, wherein: in step S3, the step of cooling down the reduction furnace includes:
A. closing the furnace barrel water feeding regulating valve within 2min, closing the furnace barrel water feeding cut-off valve, and stopping heating the furnace barrel;
B. opening the furnace barrel drainage relief valve, closing the furnace barrel drainage relief valve after the temperature of the furnace barrel return water is reduced to 145 ℃, and opening the furnace-stopping upper drainage valve to cool the furnace barrel;
and closing the water feeding adjusting valve of the chassis within C.5min, closing the water feeding stop valve of the chassis, and stopping heating the chassis.
6. The blast control process for the reduction furnace according to claim 1, wherein: in the step S3, after the power is cut off for 240min, H of the reduction furnace is controlled2Air intake valve, 1min will H2The intake air amount is reduced to 200-300Nm3After the exhaust system communication valve is closed, H is closed again2And the air inlet valve is used for decompressing the gas in the reducing furnace to the recovery system, closing a gas mixing valve of the reducing furnace during decompression, stopping decompression when the pressure difference between the reducing furnace and the recovery system is less than 20Kpa, disconnecting the recovery system, opening a waste gas leaching valve, leaching the residual gas in the reducing furnace through a leaching device, controlling leaching time to be 30min, and closing the waste gas leaching valve after leaching is finished.
7. The blast control process for the reduction furnace according to claim 1, wherein: in the step S3, the gas in the reduction furnace is replaced by:
A. opening a nitrogen stamping valve to stamp the reduction furnace for one time, closing the nitrogen stamping valve when the pressure of the reduction furnace is more than 300Kpa, opening a waste gas leaching valve to release the pressure to a leaching device, and closing the waste gas leaching valve when the pressure of the reduction furnace is higher than the pressure of the leaching device by 20Kpa to finish one-time pressure release;
B. after the vacuum pump is started, controlling the vacuum valve to open, vacuumizing the reduction furnace, and closing the vacuum pump and the vacuum valve when the pressure of the reduction furnace is less than-30 Kpa to finish primary vacuumizing;
C. and (8) repeating the three steps A, B, and finishing the replacement of the gas in the reducing furnace after three times of pressure relief and vacuum pumping.
8. A furnace blowing control system of a reduction furnace is characterized in that: comprising a memory, a processor and a computer program stored and run on the processor, the processor implementing the blow down control process according to any one of claims 1 to 7 when executing the computer program.
9. A computer-readable storage medium characterized by: the computer readable storage medium stores a computer program which, when executed by a processor, implements the blowout control process according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111129293.XA CN113741599B (en) | 2021-09-26 | 2021-09-26 | Blowing-out control process for reduction furnace, system thereof and computer readable storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111129293.XA CN113741599B (en) | 2021-09-26 | 2021-09-26 | Blowing-out control process for reduction furnace, system thereof and computer readable storage medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113741599A true CN113741599A (en) | 2021-12-03 |
| CN113741599B CN113741599B (en) | 2022-05-31 |
Family
ID=78741069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111129293.XA Active CN113741599B (en) | 2021-09-26 | 2021-09-26 | Blowing-out control process for reduction furnace, system thereof and computer readable storage medium |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113741599B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114212794A (en) * | 2021-12-30 | 2022-03-22 | 新疆大全新能源股份有限公司 | Production method for preparing primary polycrystalline silicon rod of electronic grade square silicon core and reduction furnace |
| CN116443881A (en) * | 2023-03-31 | 2023-07-18 | 云南通威高纯晶硅有限公司 | Method, system, computer equipment and readable storage medium for rapidly stopping polycrystalline silicon reduction furnace |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201580991U (en) * | 2009-11-16 | 2010-09-15 | 乐山乐电天威硅业科技有限责任公司 | Furnace starting and stopping treatment device for polysilicon production reduction furnace |
| CN102608913A (en) * | 2011-01-19 | 2012-07-25 | 内蒙古盾安光伏科技有限公司 | System and method for controlling blowing out of reduction furnace in production of polycrystalline silicon |
| CN103266348A (en) * | 2013-05-03 | 2013-08-28 | 江苏海翔化工有限公司 | Rapid energy saving single crystal silicon drawing furnace shutdown process |
| CN104005081A (en) * | 2014-05-28 | 2014-08-27 | 上海卡姆丹克太阳能科技有限公司 | Blowing-out cooling system and process of single crystal furnace |
| CN108394905A (en) * | 2017-02-08 | 2018-08-14 | 新特能源股份有限公司 | The full-automatic even running method of reduction furnace |
| CN110879579A (en) * | 2019-11-11 | 2020-03-13 | 青海黄河上游水电开发有限责任公司新能源分公司 | Reduction furnace sequence control method based on DCS (distributed control System) of polycrystalline silicon production device |
| CN111596636A (en) * | 2020-06-19 | 2020-08-28 | 亚洲硅业(青海)股份有限公司 | Polycrystalline silicon reduction furnace control method and device and electronic equipment |
-
2021
- 2021-09-26 CN CN202111129293.XA patent/CN113741599B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201580991U (en) * | 2009-11-16 | 2010-09-15 | 乐山乐电天威硅业科技有限责任公司 | Furnace starting and stopping treatment device for polysilicon production reduction furnace |
| CN102608913A (en) * | 2011-01-19 | 2012-07-25 | 内蒙古盾安光伏科技有限公司 | System and method for controlling blowing out of reduction furnace in production of polycrystalline silicon |
| CN103266348A (en) * | 2013-05-03 | 2013-08-28 | 江苏海翔化工有限公司 | Rapid energy saving single crystal silicon drawing furnace shutdown process |
| CN104005081A (en) * | 2014-05-28 | 2014-08-27 | 上海卡姆丹克太阳能科技有限公司 | Blowing-out cooling system and process of single crystal furnace |
| CN108394905A (en) * | 2017-02-08 | 2018-08-14 | 新特能源股份有限公司 | The full-automatic even running method of reduction furnace |
| CN110879579A (en) * | 2019-11-11 | 2020-03-13 | 青海黄河上游水电开发有限责任公司新能源分公司 | Reduction furnace sequence control method based on DCS (distributed control System) of polycrystalline silicon production device |
| CN111596636A (en) * | 2020-06-19 | 2020-08-28 | 亚洲硅业(青海)股份有限公司 | Polycrystalline silicon reduction furnace control method and device and electronic equipment |
Non-Patent Citations (2)
| Title |
|---|
| 柯曾鹏等: "多晶硅还原炉倒棒原因探讨", 《半导体技术》 * |
| 马卓煌等: "改良西门子法多晶硅还原炉倒棒研究", 《世界有色金属》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114212794A (en) * | 2021-12-30 | 2022-03-22 | 新疆大全新能源股份有限公司 | Production method for preparing primary polycrystalline silicon rod of electronic grade square silicon core and reduction furnace |
| CN116443881A (en) * | 2023-03-31 | 2023-07-18 | 云南通威高纯晶硅有限公司 | Method, system, computer equipment and readable storage medium for rapidly stopping polycrystalline silicon reduction furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113741599B (en) | 2022-05-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113741599B (en) | Blowing-out control process for reduction furnace, system thereof and computer readable storage medium | |
| CN115594182A (en) | One-key furnace opening control method for polycrystalline silicon reduction furnace, system and computer readable storage medium thereof | |
| CN102629131A (en) | Coordinative control method for pulse-mode regulation of condensate flow to participate in frequency modulation | |
| CN109950583A (en) | A kind of control method of fuel cell system and fuel cell system hydrogen spraying valve | |
| CN103509895B (en) | The method for controlling pressure of blast furnace top that a kind of TRT stator blade and reducer unit combine | |
| CN103116371A (en) | Temperature control method for reaction kettle | |
| CN108394905B (en) | Full-automatic stable operation method for reduction furnace | |
| CN112650052A (en) | Thermal power generating unit SCR denitration control method for preventing failure of main regulation | |
| CN112648029A (en) | Coordinated control optimization method for deep peak regulation working condition of thermal power plant | |
| CN103423728A (en) | Boiler thermal state sliding-parameter shutdown method | |
| CN106916597A (en) | Dry quenched coke gas circulating system control method | |
| CN104500151B (en) | Duty control method and system during steam turbine for nuclear power station regulates | |
| CN220413447U (en) | RH vacuum treatment circulating gas adjusting and controlling device | |
| CN113741570A (en) | DCS (distributed control System) voltage stabilization control method for chlorine system in front of synthesis furnace | |
| CN113405088A (en) | Three-impulse frequency conversion automatic adjusting method | |
| CN108507365B (en) | Ignition optimization control method of sintering machine | |
| CN115394691A (en) | Control method of SiC heat treatment process | |
| CN115342639A (en) | Automatic temperature control device and method for oxygen-enriched ignition in sintering | |
| CN111975978B (en) | RDSR still kettle full-automatic energy-saving control method | |
| CN113867134A (en) | PID control dead zone adjusting method based on programmable logic controller | |
| CN115079560A (en) | Oil gas temperature control method and system for compressed air energy storage system | |
| CN108845604B (en) | Automatic feeding method for ethylene cracking furnace | |
| CN111320993B (en) | Automatic coke cooling process method and control for coke tower | |
| CN110661019A (en) | Control system and method for oxygen supply fan of HT-PEM methanol-water fuel cell combustion chamber | |
| CN113482961B (en) | Intelligent group control method for centrifugal air compressor unit based on energy efficiency real-time monitoring |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20211203 Assignee: Sichuan Yongxiang Energy Technology Co.,Ltd. Assignor: SICHUAN YONGXIANG NEW ENERGY Co.,Ltd. Contract record no.: X2023510000014 Denomination of invention: A reduction furnace shutdown control process and its system and computer-readable storage medium Granted publication date: 20220531 License type: Common License Record date: 20230816 |
|
| EE01 | Entry into force of recordation of patent licensing contract |