CN110879579A - Reduction furnace sequence control method based on DCS (distributed control System) of polycrystalline silicon production device - Google Patents
Reduction furnace sequence control method based on DCS (distributed control System) of polycrystalline silicon production device Download PDFInfo
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- CN110879579A CN110879579A CN201911096301.8A CN201911096301A CN110879579A CN 110879579 A CN110879579 A CN 110879579A CN 201911096301 A CN201911096301 A CN 201911096301A CN 110879579 A CN110879579 A CN 110879579A
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- 238000000034 method Methods 0.000 title claims abstract description 22
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 claims abstract description 5
- 230000009194 climbing Effects 0.000 claims abstract description 4
- 238000002360 preparation method Methods 0.000 claims abstract description 4
- 238000010926 purge Methods 0.000 claims abstract description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 3
- 239000001257 hydrogen Substances 0.000 claims 3
- 229910052739 hydrogen Inorganic materials 0.000 claims 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims 1
- 239000005052 trichlorosilane Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 abstract 1
- 229920005591 polysilicon Polymers 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
- G05D27/02—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00 characterised by the use of electric means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a reduction furnace sequence control method based on a DCS (distributed control System) of a polycrystalline silicon production device, which comprises the following specific program operation steps of: s1, an initial purge sequence control routine; s2, pressure check sequence control program; s3, a gas replacement sequence control program; s4, main reaction preparation sequence control program; s5, a material feeding climbing program and a step switching program in the main reaction stage; s6, a main reaction stopping sequence control program; s7, nitrogen replacement sequence control program; and S8, vacuum-pumping sequence control program. The invention realizes a high-degree automatic sequence control program, does not need frequent manual operation, obviously reduces the operation frequency and labor intensity of staff, reduces the interference of human factors, ensures the safe and stable operation of the reduction furnace, and simultaneously realizes continuous and stable feeding in the production process of polycrystalline silicon by the automatic control program, thereby obviously improving the stability of product quality.
Description
Technical Field
The invention relates to the technical field of automatic control, in particular to a reduction furnace sequence control method based on a DCS (distributed control System) of a polycrystalline silicon production device.
Background
The reduction furnace is driven in the polycrystalline silicon industry, the normal operation, the process operations such as parking need high quality operating personnel manual operation, carry out initial clean-up when driving, gas replacement, the pressure leakage inspection, observe vacuum tube line pressure, adjust the flow of each part, normal operation TCS, require to accomplish material balance and energy balance during H2 feeding, slow parking in all aspects is taken into account in the parking process and is prevented to cause the harm to equipment, complex operation, the work load is big, especially, many reduction furnaces are driven simultaneously, normal operation and parking, cause the maloperation easily, and because operating personnel control horizontal difference, the difference of reduction furnace operation is bigger, be unfavorable for the steady operation of apparatus for producing and the steady promotion of product quality.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a reduction furnace sequence control method based on a DCS (distributed control System) of a polycrystalline silicon production device, which realizes full-automatic control of the reduction furnace and improves the automatic operation level of enterprises.
In order to achieve the purpose, the invention adopts the following technical scheme:
a reduction furnace sequence control method based on a DCS system of a polycrystalline silicon production device comprises the following specific program operation steps:
s1, initial purge sequence control program: automatically opening a relevant valve by a program, vacuumizing to a specified pressure, keeping the specified pressure unchanged or not decreasing within a specified time, and automatically running the next step by the program or operating by an operator;
s2, pressure check sequence control program: the program automatically opens the relevant valve to charge to the specified pressure, the specified pressure is stable and the error is within the allowable range in the specified time, and the program automatically runs the next step or is operated by an operator;
s3, gas replacement sequence control program: the program automatically opens the relevant valves to pressurize to a specified pressure, then releases the pressure to the specified pressure, starts to execute the vacuumizing program to the specified pressure, and automatically runs the next step or is operated by an operator within specified times after repeating the steps;
s4, main reaction preparation sequence control program: the program automatically opens the relevant valves to release the pressure to the specified pressure and then pressurizes the pressure to the specified pressure, and after the steps are repeated within the specified times, the program pressurizes the pressure to the specified pressure and automatically runs the next step or is operated by an operator;
s5, a material feeding climbing program and a step switching program in the main reaction stage: the program automatically opens related valves, materials start to continuously and stably rise and feed at a specified feeding amount per hour according to a set prescription until the running time is finished, and the program automatically runs the next step or is operated by an operator;
s6, main reaction stop sequence control program: program closing the relevant valve;
s7, nitrogen replacement sequence control program: the program automatically opens the relevant valve to pressurize to the specified pressure and then releases the pressure to the specified pressure, and after the steps are repeated within the specified times, the program pressurizes to the specified pressure and automatically runs the next step or is operated by an operator;
s8, vacuum sequence control program: the program automatically opens the relevant valve to vacuumize to the specified pressure, the specified pressure is not changed or reduced within the specified time, the pressure is automatically released to the specified pressure within the specified times after the steps are repeated, and the program automatically runs the next step or is operated by an operator.
Preferably, when the whole program is running, an operator can execute the running or jumping of the program according to the actual situation, the whole program can run automatically, and the operator can decide the automatic running or manual running of the program according to the actual situation.
Compared with the prior art, the invention has the beneficial effects that:
the automatic control program realizes high-degree automatic sequence control program, does not need frequent manual operation, obviously reduces the operation frequency and labor intensity of staff, realizes safe interlocking of process parameters of the reduction furnace, automatically enters an emergency treatment operation program when abnormal conditions occur, reduces the safety risk of abnormal conditions of the reduction furnace caused by improper manual monitoring or misoperation, ensures safe and stable operation of the reduction furnace, simultaneously realizes continuous and stable feeding in the production process of polycrystalline silicon by the automatic control program, reduces human factor interference, and further obviously improves the stability of product quality.
Drawings
FIG. 1 is a sequence control operation picture program diagram of a reduction furnace of the reduction furnace sequence control method based on a DCS system of a polysilicon production device according to the present invention;
FIG. 2 is a configuration diagram of a sequence control starting program of the method for controlling the sequence of the reduction furnace based on the DCS system of the polysilicon production device according to the present invention;
FIG. 3 is a gate valve state diagram of a switching valve of the reduction furnace sequence control method based on the DCS system of the polysilicon production device according to the present invention;
FIG. 4 is a state diagram of a valve for determining the reduction furnace sequence control method based on the DCS system of the polysilicon production device;
FIG. 5 is a valve state diagram of the regulator valve in each of the procedures of the present invention;
FIGS. 6, 7 and 8 are second pressure checking sequence control program diagrams of the reduction furnace sequence control method based on the DCS system of the polysilicon production apparatus according to the present invention;
FIG. 9 is a program diagram of replacement times of the method for controlling the sequence of the reduction furnace based on the DCS system of the polysilicon production apparatus according to the present invention;
fig. 10 is a configuration diagram of an end program of the sequential control method for the reduction furnace based on the DCS system of the polysilicon production apparatus according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-10, a reduction furnace sequence control method based on a DCS system of a polysilicon production apparatus includes the following specific program operation steps:
s1, initial purge sequence control program: automatically opening a relevant valve by a program, vacuumizing to a specified pressure, keeping the specified pressure unchanged or not decreasing within a specified time, and automatically running the next step by the program or operating by an operator;
s2, pressure check sequence control program: the program automatically opens the relevant valve to charge to the specified pressure, the specified pressure is stable and the error is within the allowable range in the specified time, and the program automatically runs the next step or is operated by an operator;
s3, gas replacement sequence control program: the program automatically opens the relevant valves to pressurize to a specified pressure, then releases the pressure to the specified pressure, starts to execute the vacuumizing program to the specified pressure, and automatically runs the next step or is operated by an operator within specified times after repeating the steps;
s4, main reaction preparation sequence control program: the program automatically opens the relevant valves to release the pressure to the specified pressure and then pressurizes the pressure to the specified pressure, and after the steps are repeated within the specified times, the program pressurizes the pressure to the specified pressure and automatically runs the next step or is operated by an operator;
s5, a material feeding climbing program and a step switching program in the main reaction stage: the program automatically opens related valves, materials start to continuously and stably rise and feed at a specified feeding amount per hour according to a set prescription until the running time is finished, and the program automatically runs the next step or is operated by an operator;
s6, main reaction stop sequence control program: program closing the relevant valve;
s7, nitrogen replacement sequence control program: the program automatically opens the relevant valve to pressurize to the specified pressure and then releases the pressure to the specified pressure, and after the steps are repeated within the specified times, the program pressurizes to the specified pressure and automatically runs the next step or is operated by an operator;
s8, vacuum sequence control program: the program automatically opens the relevant valve to vacuumize to the specified pressure, the specified pressure is not changed or reduced within the specified time, the pressure is automatically released to the specified pressure within the specified times after the steps are repeated, and the program automatically runs the next step or is operated by an operator.
The picture in fig. 1 can realize automatic start and stop of the reduction furnace, each program can be manually controlled or automatically controlled in the whole process, each operation program has the functions of start, end and pause, the necessary replacement times function and the time setting function in the operation picture are automatically controlled, an operator needs to note or remember by himself in the replacement times, the replacement times function can enable the operator to automatically repeat replacement without taking a lot of trouble and only after the operator sets the replacement times, and the program automatically goes to the next step after the set replacement times are reached; the gate valve state of the on-off valve in each routine in fig. 3, without the need for an operator to manually control the on-off valve; this routine in fig. 4 determines whether the on-off valve state has reached the set point; in fig. 5, the valve state of the regulating valve is adjusted in each procedure, and the regulating valve is not required to be manually controlled by an operator, so that the temperature, the flow, the liquid level and the pressure are more accurately and rapidly adjusted; the second pressure checking sequence control program in fig. 6, 7 and 8 can realize automatic stamping, pressure maintaining, checking whether the pressure is qualified or not, and automatically re-maintaining the pressure if the pressure is unqualified; in the replacement number routine of fig. 9, the operator sets the number of times that needs to be replaced, and the routine automatically determines whether the number of times of replacement has reached the set number of times, and accordingly determines whether the routine performs the next step.
According to the invention, a high-degree automatic sequence control program is realized, frequent manual operation is not needed, the operation frequency and labor intensity of staff are obviously reduced, the safety interlocking of the process parameters of the reduction furnace is realized, when an abnormal condition occurs, the program automatically enters an emergency treatment operation program, the safety risk of the abnormal condition of the reduction furnace caused by insufficient manual monitoring or misoperation is reduced, the safe and stable operation of the reduction furnace is ensured, meanwhile, the automatic control program realizes continuous and stable feeding in the production process of polycrystalline silicon, the interference of human factors is reduced, and the stability of the product quality is obviously improved.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (2)
1. The reduction furnace sequence control method based on the DCS system of the polycrystalline silicon production device is characterized by comprising the following specific program operation steps:
s1, initial purge sequence control program: the program automatically opens the vacuumizing remote switch valve to vacuumize to the specified pressure, the specified pressure is not changed or reduced within the specified time, and the program automatically runs the next step or is operated by an operator;
s2, pressure check sequence control program: the program automatically opens the nitrogen remote switch valve to charge the nitrogen to the specified pressure, the specified pressure is stable and the error is within the allowable range within the specified time, and the program automatically runs the next step or is operated by an operator;
s3, gas replacement sequence control program: the program automatically opens the nitrogen remote switch valve to pressurize to a specified pressure and then releases the pressure to the specified pressure, the vacuumizing program is started to be executed to the specified pressure, and after the steps are repeated within a specified number of times, the program automatically runs the next step or is operated by an operator;
s4, main reaction preparation sequence control program: the program automatically opens the hydrogen remote switch valve to release the pressure to the specified pressure and then pressurizes the hydrogen to the specified pressure, and after the steps are repeated within the specified times, the program pressurizes the hydrogen to the specified pressure and automatically runs the next step or is operated by an operator;
s5, a material feeding climbing program and a step switching program in the main reaction stage: automatically opening a trichlorosilane remote switch valve by a program, continuously and stably feeding materials in an upward manner at a specified feeding amount per hour according to a set prescription until the running time is finished, and automatically running the program to the next step or being operated by an operator;
s6, main reaction stop sequence control program: closing the feeding remote switch valve by a program;
s7, nitrogen replacement sequence control program: the program automatically opens the nitrogen remote switch valve to pressurize to a specified pressure and then release the pressure to the specified pressure, and after the steps are repeated within specified times, the program pressurizes to the specified pressure and automatically runs the next step or is operated by an operator;
s8, vacuum sequence control program: the program automatically opens the vacuumizing remote switch valve to vacuumize to the specified pressure, the specified pressure is not changed or reduced within the specified time, the pressure is automatically relieved to the specified pressure within the specified times after the steps are repeated, and the program automatically runs the next step or is operated by an operator.
2. The method of claim 1, wherein when the overall program is running, an operator can execute the running or skipping of the program according to actual conditions, the whole program can run automatically, and the operator can decide the automatic running or manual running of the program according to the actual conditions.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113741599A (en) * | 2021-09-26 | 2021-12-03 | 四川永祥新能源有限公司 | Blowing-out control process for reduction furnace, system thereof and computer readable storage medium |
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- 2019-11-11 CN CN201911096301.8A patent/CN110879579B/en active Active
Patent Citations (5)
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Effective date of registration: 20220610 Address after: 810000 phase II of Xining Economic and Technological Development Zone, Xining City, Qinghai Province Patentee after: NEW ENERGY BRANCH, QINGHAI UPSTREAM OF YELLOW RIVER HYDROPOWER DEVELOPMENT CO.,LTD. Patentee after: Qinghai xince Technology Co.,Ltd. Patentee after: Huanghe Hydropower Development Co., Ltd. Patentee after: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. Address before: 810000 phase II of Xining Economic and Technological Development Zone, Xining City, Qinghai Province Patentee before: NEW ENERGY BRANCH, QINGHAI UPSTREAM OF YELLOW RIVER HYDROPOWER DEVELOPMENT CO.,LTD. Patentee before: Huanghe Hydropower Development Co., Ltd. Patentee before: HUANGHE HYDROPOWER DEVELOPMENT Co.,Ltd. |