CN113741351A - Motor servo control system hysteresis control method based on improved play operator - Google Patents

Motor servo control system hysteresis control method based on improved play operator Download PDF

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CN113741351A
CN113741351A CN202111019375.9A CN202111019375A CN113741351A CN 113741351 A CN113741351 A CN 113741351A CN 202111019375 A CN202111019375 A CN 202111019375A CN 113741351 A CN113741351 A CN 113741351A
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ultrasonic motor
control system
hysteresis
chip circuit
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CN113741351B (en
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傅平
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Minjiang University
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Abstract

The invention provides a motor servo control system hysteresis control method based on an improved play operator, which considers that hysteresis has symmetry when torque output is in a proper state in the design of the existing ultrasonic motor servo control system, and has a certain error when a periodic repeated signal is controlled. In order to improve the accuracy of the following performance, an ultrasonic motor servo control scheme based on the improved play operator symmetry compensation control is designed. The accuracy of the control system on the hysteresis can be effectively improved based on the improved play operator symmetric compensation control, the influence degree of the system on the uncertainty is further reduced, and the torque and speed control of the motor can obtain better dynamic characteristics.

Description

Motor servo control system hysteresis control method based on improved play operator
Technical Field
The invention relates to the technical field of motor controllers, in particular to a motor servo control system hysteresis control method based on an improved play operator.
Background
In the design of the existing ultrasonic motor servo control system, when the speed tracks a periodic signal, the torque-speed relation of the periodic signal presents a hysteresis characteristic, so that certain errors exist in the ascending and descending intervals when the same signal is tracked. The general play operator can only compensate for the simpler hysteresis characteristics. Chinese patent 201710223807 proposes a symmetric hysteretic control method for an ultrasonic motor servo control system based on a Stop operator, but further research shows that the control method has limited types of compensatory hysteresis characteristics, too large computation amount and too complex model, and needs a fast processor and memory for practical use, and further improvement and optimization.
Disclosure of Invention
In the design of the existing ultrasonic motor servo control system, when the torque output is in a proper state, the hysteresis has symmetry, and certain errors exist in the control of periodic repeated signals. In order to improve the accuracy of the following performance, the invention designs an ultrasonic motor servo control scheme based on the improved play operator symmetric compensation control. Based on the improved play operator, the control efficiency of the system can be effectively improved, the accuracy of the control system on the hysteresis is improved, the influence degree of the system on the uncertainty is further reduced, and the torque and speed control of the motor can obtain better repetitive characteristics.
The invention specifically adopts the following technical scheme:
a motor servo control system hysteresis control method based on an improved play operator is characterized in that:
the adopted symmetric hysteresis compensation control is based on a dynamic equation of an ultrasonic motor driving system:
Figure BDA0003241620230000011
wherein A isp＝-B/J,BP＝J/Kt＞0,CP-1/J; b is damping coefficient, J is moment of inertia, KtIs a current factor, Tf(v) As frictional resistance torque, TLFor the load moment, U (t) is the output moment of the motor, θr(t) is a position signal measured by a photoelectric encoder;
when the load moment of the motor is moderate, the hysteresis of the motor moment-speed characteristic has symmetry, and in order to reduce the influence caused by the phenomenon and reduce the operation amount, an improved generalized play operator is used for performing compensation control on the hysteresis;
let 0 be t0＜t1＜…tN＝tEIs [0, tE]V (t) is the input signal, Fmγr[v](t) is a hysteresis systemAn output signal of the system; input function v at each [ t ]i,ti+1]Monotonic in the interval, any input v (t) e Ce[0，tE]The improved generalized play operator threshold r is defined as:
Figure BDA0003241620230000021
Figure BDA0003241620230000022
Figure BDA0003241620230000023
wherein t isi＜t≤ti+1I is more than or equal to 0 and less than or equal to N-1, max represents that the two-number comparison is maximum, and min represents that the two-number comparison is minimum; gamma rayl(v-r) and γr(v + r) are two strictly increasing envelope functions, and the lag shape of the improved generalized play operator is limited by the two envelope functions; the solution of the improved generalized play operator threshold is: gamma rayl(v-r)＝0，γr(v + r) ═ 0, each corresponding to
Figure BDA0003241620230000024
And
Figure BDA0003241620230000025
the boundary of the improved generalized play operator is an envelope function gamma [ v ] v shifted along the gx/v (t) axis]Envelope function gamma [ v ]]Are the same in shape and boundary;
Πm[v](t) model definition as an improved generalized play operator
Figure BDA0003241620230000026
By weighted integration, i.e.
Figure BDA0003241620230000027
Wherein p is0Is a normal number which is a constant number,
Figure BDA0003241620230000028
means to improve generalized play operator when r is 0
Figure BDA0003241620230000029
p (r) is a density function; II typem[v](t) model for any given input v (t) e Cm[0，tE]Is a Lipschitz series; r is an upper limit value of the threshold R.
Further, a load curve based on the initial load curve φ and the inverse model
Figure BDA00032416202300000210
Symmetry to obtain
Figure BDA00032416202300000211
The initial load curve φ is expressed as:
Figure BDA0003241620230000031
where γ (r) is the input function, and the envelope function γ is selected according to the input data rangel(r) and γrOne of (r); theta is an integral variable and the integral range is 0, r](ii) a When selecting the envelope function gamma v]Time, linear function gamma v]＝v；
Πm[v](t) the inverse of the model analysis is shown below,
Figure BDA0003241620230000032
wherein g is0Is a normal number, g (r) is a density function, beta is an envelope function,
Figure BDA0003241620230000033
is an improved generalized play operator with a threshold q and an envelope function β; q isThe upper limit value of the threshold q;
load curve of inverse model
Figure BDA0003241620230000034
The loading curve of (c) is:
Figure BDA0003241620230000035
the derivative formula of the method is shown in the specification,
Figure BDA0003241620230000036
Figure BDA0003241620230000037
is that
Figure BDA0003241620230000038
The time derivatives are, similarly, β '(q), β' (r- η) the time derivatives of β (q), β (r- η). The derivatives of these two loading curves are substituted into equation (6) to obtain,
Figure BDA0003241620230000039
and
β[v]＝γ-1[v] (12)
Πm[v](t) inverse of the model:
Figure BDA00032416202300000310
Figure BDA00032416202300000311
is p0The density function g (q) is obtained by the following equation (6)
Figure BDA00032416202300000312
Further, describing hysteresis as the sum of N operators, pim[v](t) the model is written as,
Figure BDA0003241620230000041
where N is the number of improved generalized play operators, riIs the ith threshold, and r satisfies 0 ═ r0<r1<···<rN＝R。
Further, describing hysteresis as the sum of N operators, pim[v](t) writing the inverse model to,
Figure BDA0003241620230000042
where N is the number of improved generalized play operators, qiIs that the ith threshold satisfies 0 ═ q0<q1<...<qN＝Q；
The parameters to be calculated in the inverse model are g0，β[v]，qiAnd g (q)i) (ii) a Thus, the initial loading curve and its inverse r ∈ [ r ]j,rj+1) And q ∈ [ q ]j,qj+1) Is recorded as:
Figure BDA0003241620230000043
Figure BDA0003241620230000044
r∈[rj,rj+1) And q ∈ [ q ]j,qj+1) The derivative of the loading curve is:
Figure BDA0003241620230000045
Figure BDA0003241620230000046
obtained from formula (6):
Figure BDA0003241620230000047
thus, there are:
Figure BDA0003241620230000048
and
β[v]＝γ-1[v] (21)
the threshold of the inverse model operator is:
Figure BDA0003241620230000051
the compound is obtained by using the formula (6) again,
Figure BDA0003241620230000052
density function g (q) of inverse modelj) Is composed of
Figure BDA0003241620230000053
Thus using a given model, its inverse
Figure BDA0003241620230000054
Can be realized according to the steps.
The system is stable as demonstrated by stability theory. The use of compensation control allows the system torque speed characteristics to approach a linear relationship.
The ultrasonic motor servo control system is characterized in that hysteresis compensation control is carried out by adopting the motor servo control system hysteresis control method based on the improved play operator, and the ultrasonic motor servo control system comprises a base and an ultrasonic motor arranged on the base; an output shaft at one side of the ultrasonic motor is connected with the photoelectric encoder, and an output shaft at the other side of the ultrasonic motor is connected with an inertial load of the flywheel; the output shaft of the flywheel inertial load is connected with the torque sensor through a coupler; and the signal output end of the photoelectric encoder and the signal output end of the torque sensor are respectively connected to a control system.
Further, control system includes ultrasonic motor drive control circuit, ultrasonic motor drive control circuit includes control chip circuit and driver chip circuit, photoelectric encoder's signal output part with the corresponding input of control chip circuit is connected, the output of control chip circuit with the corresponding input of driver chip circuit is connected, in order to drive the driver chip circuit, the drive frequency adjustment signal output part and the drive half-bridge circuit adjustment signal output part of driver chip circuit respectively with the corresponding input of ultrasonic motor is connected.
Furthermore, the system establishment of the whole controller improves the play operator to process the hysteresis mathematical model, so that the hysteresis of the servo system is minimized while the identification dynamic error is reduced. The hysteresis of the servo system is minimized while the identification dynamic error is reduced, so that better input/output control efficiency can be obtained.
Further, control system's hardware circuit includes ultrasonic motor drive control circuit, ultrasonic motor drive control circuit includes control chip circuit and driver chip circuit, photoelectric encoder's signal output part with the corresponding input of control chip circuit is connected, the output of control chip circuit with the corresponding input of driver chip circuit is connected, in order to drive the driver chip circuit, driver chip circuit's drive frequency adjustment signal output part and drive half-bridge circuit adjustment signal output part respectively with ultrasonic motor's corresponding input is connected.
Further, the coupling is an elastic coupling.
Furthermore, the ultrasonic motor, the photoelectric encoder and the torque sensor are fixed on the base through an ultrasonic motor fixing support, a photoelectric encoder fixing support and a torque sensor fixing support respectively.
Compared with the prior art, the method and the optimal scheme thereof can effectively improve the control efficiency of the system based on the improved play operator symmetric compensation control, further reduce the influence degree of the system on uncertainty, and obtain better dynamic characteristics for the torque and speed control of the motor.
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The invention is described in further detail below with reference to the following figures and detailed description:
FIG. 1 is a schematic diagram of a servo control system of an ultrasonic motor according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a control circuit according to an embodiment of the present invention.
In the figure, 1-photoelectric encoder, 2-photoelectric encoder fixing bracket, 3-ultrasonic motor output shaft, 4-ultrasonic motor, 5-ultrasonic motor fixing bracket, 6-ultrasonic motor output shaft, 7-flywheel inertial load, 8-flywheel inertial load output shaft, 9-elastic coupling, 10-torque sensor, 11-torque sensor fixing bracket, 12-base, 13-control chip circuit, 14-driving chip circuit, 15, 16, 17-A, B, Z phase signal output by photoelectric encoder, 18, 19, 20, 21-driving frequency adjusting signal generated by driving chip circuit, 22-driving half-bridge circuit adjusting signal generated by driving chip circuit, 23, 24, 25, 26, 27, 28-driving chip circuit signal generated by controlling chip circuit, 29-ultrasonic motor drive control circuit.
Detailed Description
In order to make the features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail as follows:
the ultrasonic motor control system adopted in this embodiment, as shown in fig. 1, includes a base 12 and an ultrasonic motor 4 disposed on the base 12, an output shaft 3 on one side of the ultrasonic motor 4 is connected with a photoelectric encoder 1, an output shaft 6 on the other side is connected with a flywheel inertial load 7, an output shaft 8 of the flywheel inertial load 7 is connected with a torque sensor 10 through an elastic coupling 9, and a signal output end of the photoelectric encoder 1 and a signal output end of the torque sensor 10 are respectively connected to the control system.
The ultrasonic motor 4, the photoelectric encoder 1 and the torque sensor 10 are fixed on the base 12 through the ultrasonic motor fixing support 5, the photoelectric encoder fixing support 2 and the torque sensor fixing support 11 respectively.
As shown in fig. 2, the control system includes an ultrasonic motor driving control circuit 29, the ultrasonic motor driving control circuit 29 includes a control chip circuit 13 and a driving chip circuit 14, a signal output end of the photoelectric encoder 1 is connected to a corresponding input end of the control chip circuit 13, an output end of the control chip circuit 13 is connected to a corresponding input end of the driving chip circuit 14 to drive the driving chip circuit 14, and a driving frequency adjusting signal output end and a driving half-bridge circuit adjusting signal output end of the driving chip circuit 14 are respectively connected to corresponding input ends of the ultrasonic motor 4. The driving chip circuit 14 generates a driving frequency adjusting signal and a driving half-bridge circuit adjusting signal to control the frequency, the phase and the on-off of A, B two-phase PWM output by the ultrasonic motor. Controlling the starting and stopping of the ultrasonic motor by switching on and off the output of the PWM wave; the optimal operation state of the motor is adjusted by adjusting the frequency of the output PWM wave and the phase difference of the two phases.
In the embodiment, the system of the whole controller is established by improving the play operator to process the hysteresis mathematical model, so that the hysteresis of the servo system is minimized while the identification dynamic error is reduced, and better input and output control efficiency can be obtained.
The dynamic equation for an ultrasonic motor drive system can be written as:
Figure BDA0003241620230000071
wherein A isp＝-B/J,BP＝J/Kt＞0,CP-1/J; b is damping coefficient, J is moment of inertia, KtIs a current factor, Tf(v) As frictional resistance torque, TLFor the load moment, U (t) is the output moment of the motor, θrAnd (t) is a position signal measured by a photoelectric encoder.
When the load torque of the motor is moderate, the hysteresis of the torque-speed characteristic of the motor has symmetry, and in order to reduce the influence caused by the phenomenon and reduce the operation amount, an improved generalized play operator is used for performing compensation control on the hysteresis.
Let 0 be t0＜t1＜…tN＝tEIs [0, tE]V (t) is the input signal,
Figure BDA0003241620230000081
is the output signal of the hysteresis system. Input function v at each [ t ]i,ti+1]Monotonic in the interval, any input v (t) e Ce[0，tE]The improved generalized play operator threshold r is defined as:
Figure BDA0003241620230000082
Figure BDA0003241620230000083
Figure BDA0003241620230000084
wherein t isi＜t≤ti+1I is more than or equal to 0 and less than or equal to N-1, max represents that the two-number comparison is maximum, and min represents that the two-number comparison is minimum.
γl(v-r) and γr(v + r) improved generalized play operator lag shape for two strictly growing envelope functionsThe shape is limited by two envelope functions. The solution of the improved generalized play operator threshold is gammal(v-r)＝0，γr(v + r) ═ 0, each of which is
Figure BDA0003241620230000085
And
Figure BDA0003241620230000086
if γ (0) is chosen to be 0, the threshold of the improved generalized play operator is ± r. Furthermore, the boundary of the improved generalized play operator is an envelope function γ [ v ] shifted along the gx/v (t) axis]Envelope function gamma [ v ]]Are identical in shape and boundary.
Πm[v](t) model definition as an improved generalized play operator
Figure BDA0003241620230000087
The weighted integral of (a), namely:
Figure BDA0003241620230000088
wherein p is0Is a normal number which is a constant number,
Figure BDA0003241620230000089
means to improve generalized play operator when r is 0
Figure BDA00032416202300000810
p (r) is a density function. II typem[v](t) model for any given input v (t) e Cm[0，tE]Is a Lipschitz series.
Load curve based on initial load curve phi and inverse model
Figure BDA00032416202300000811
And (3) symmetry to obtain:
Figure BDA00032416202300000812
the load curve φ may be expressed as:
Figure BDA00032416202300000813
γ (r) is an input function, and when the envelope function γ [ v ] is selected, the linear function γ [ v ] is equal to v.
Πm[v](t) the model analytical inverse is as follows:
Figure BDA0003241620230000091
wherein g is0Is a normal number, g (r) is a density function, beta is an envelope function,
Figure BDA0003241620230000092
is an improved generalized play operator with a threshold q and an envelope function β.
Load curve
Figure BDA0003241620230000093
Has a loading curve of
Figure BDA0003241620230000094
The derivative formula of the method is shown in the specification,
Figure BDA0003241620230000095
the derivatives of these two loading curves are substituted into (6) to obtain,
Figure BDA0003241620230000096
and
β[v]＝γ-1[v] (12)
Πm[v](t) the inverse of the model can be written as:
Figure BDA0003241620230000097
with (6) the density function g (q),
Figure BDA0003241620230000098
in practical applications, the lag can be approximately described as the sum of N operators. Therefore, pim[v](t) the model can be written as,
Figure BDA0003241620230000099
where N is the number of improved generalized play operators, riIs the ith threshold, r satisfies 0 ═
r0<r1<···<rNR, and pim[v](t) the inverse model is written as:
Figure BDA0003241620230000101
where N is the number of improved generalized play operators, qiIs that the ith threshold satisfies 0 ═ q0<q1<...<qNQ. The parameters to be calculated in the inverse model are g0，β[v]，qiAnd g (q)i). Thus, the initial loading curve and its inverse r ∈ [ r ]j,rj+1) And q ∈ [ q ]j,qj+1) Is recorded as:
Figure BDA0003241620230000102
Figure BDA0003241620230000103
r∈[rj,rj+1) And q ∈ [ q ]j,qj+1) The derivative of the loading curve is:
Figure BDA0003241620230000104
Figure BDA0003241620230000105
from (4-12)
Figure BDA0003241620230000106
Thereby to obtain
Figure BDA0003241620230000107
And
β[v]＝γ-1[v] (21)
the threshold of the inverse model operator is:
Figure BDA0003241620230000108
the compound is obtained by the method (6) again,
Figure BDA0003241620230000111
density function g (q) of inverse modelj) Comprises the following steps:
Figure BDA0003241620230000112
thus using a given model, its inverse
Figure BDA0003241620230000113
Can be realized according to the steps.
The system is stable as demonstrated by stability theory. The use of compensation control allows the system torque speed characteristics to approach a linear relationship.
The present invention is not limited to the above-mentioned preferred embodiments, and various other forms of the hysteresis control method of the motor servo control system based on the improved play operator can be derived by anyone who follows the teaching of the present invention.

Claims (8)

1. A motor servo control system hysteresis control method based on an improved play operator is characterized in that:
the adopted symmetric hysteresis compensation control is based on a dynamic equation of an ultrasonic motor driving system:
Figure FDA0003241620220000011
wherein A isp＝-B/J,BP＝J/Kt＞0,CP-1/J; b is damping coefficient, J is moment of inertia, KtIs a current factor, Tf(v) As frictional resistance torque, TLFor the load moment, U (t) is the output moment of the motor, θr(t) is a position signal measured by a photoelectric encoder;
let 0 be t0＜t1＜…tN＝tEIs [0, tE]V (t) is the input signal,
Figure FDA0003241620220000012
is the output signal of the hysteresis system; input function v at each [ t ]i,ti+1]Monotonic in the interval, any input v (t) e Ce[0，tE]The improved generalized play operator threshold r is defined as:
Figure FDA0003241620220000013
Figure FDA0003241620220000014
Figure FDA0003241620220000015
wherein t isi＜t≤ti+1I is more than or equal to 0 and less than or equal to N-1, max represents that the two-number comparison is maximum, and min represents that the two-number comparison is minimum; gamma rayl(v-r) and γr(v + r) are two strictly increasing envelope functions, and the lag shape of the improved generalized play operator is limited by the two envelope functions; the solution of the improved generalized play operator threshold is: gamma rayl(v-r)＝0，γr(v + r) ═ 0, each corresponding to
Figure FDA0003241620220000016
And
Figure FDA0003241620220000017
the boundary of the improved generalized play operator is an envelope function gamma [ v ] v shifted along the gx/v (t) axis]Envelope function gamma [ v ]]Are the same in shape and boundary;
Πm[v](t) model definition as an improved generalized play operator
Figure FDA0003241620220000018
By weighted integration, i.e.
Figure FDA0003241620220000019
Wherein p is0Is a normal number which is a constant number,
Figure FDA0003241620220000021
means to improve generalized play operator when r is 0
Figure FDA0003241620220000022
p (r) is a density function; II typem[v](t) model for any given input v (t) e Cm[0，tE]Is a Lipschitz series; r is an upper limit value of the threshold R.
2. The hysteresis control method of the motor servo control system based on the improved play operator as claimed in claim 1, wherein:
load curve based on initial load curve phi and inverse model
Figure FDA0003241620220000023
Symmetry to obtain
Figure FDA0003241620220000024
The initial load curve φ is expressed as:
Figure FDA0003241620220000025
where γ (r) is the input function, and the envelope function γ is selected according to the input data rangel(r) and γrOne of (r); theta is an integral variable and the integral range is 0, r]；
Πm[v](t) the inverse of the model analysis is shown below,
Figure FDA0003241620220000026
wherein g is0Is a normal number, g (r) is a density function, beta is an envelope function,
Figure FDA0003241620220000027
is an improved generalized play operator with a threshold q and an envelope function β; q is the upper limit value of the threshold Q;
load curve of inverse model
Figure FDA0003241620220000028
The loading curve of (c) is:
Figure FDA0003241620220000029
the derivative formula of the method is shown in the specification,
Figure FDA00032416202200000210
Figure FDA00032416202200000211
is that
Figure FDA00032416202200000212
Derivatives with respect to time, like β '(q), β' (r- η) are derivatives with respect to time of β (q), β (r- η); eta is an integral variable, and the integral range is [0, q ]]The derivatives of these two loading curves are substituted into equation (6) to obtain,
Figure FDA00032416202200000213
and
β[v]＝γ-1[v] (12)
Πm[v](t) inverse of the model:
Figure FDA0003241620220000031
Figure FDA0003241620220000032
is p0The density function g (q) is obtained by equation (6):
Figure FDA0003241620220000033
3. the hysteresis control method of the motor servo control system based on the improved play operator as claimed in claim 1, wherein:
describing the lag as the sum of N operators, pim[v](t) the model is written as,
Figure FDA0003241620220000034
where N is the number of improved generalized play operators, riIs the ith threshold, and r satisfies 0 ═ r0<r1<···<rN＝R。
4. The hysteresis control method of the motor servo control system based on the improved play operator as claimed in claim 2, wherein:
describing the lag as the sum of N operators, pim[v](t) writing the inverse model to,
Figure FDA0003241620220000035
where N is the number of improved generalized play operators, qiIs that the ith threshold satisfies 0 ═ q0<q1<...<qN＝Q；
The parameters to be calculated in the inverse model are g0，β[v]，qiAnd g (q)i) (ii) a Thus, the initial loading curve and its inverse
Figure FDA0003241620220000037
And
Figure FDA0003241620220000038
is recorded as:
Figure FDA0003241620220000036
Figure FDA0003241620220000041
Figure FDA0003241620220000049
and
Figure FDA00032416202200000410
the derivative of the loading curve is:
Figure FDA0003241620220000042
Figure FDA0003241620220000043
obtained from formula (6):
Figure FDA0003241620220000044
thus, there are:
Figure FDA0003241620220000045
and
β[v]＝γ-1[v] (21)
the threshold of the inverse model operator is:
Figure FDA0003241620220000046
the compound is obtained by using the formula (6) again,
Figure FDA0003241620220000047
density function g (q) of inverse modelj) Is composed of
Figure FDA0003241620220000048
5. An ultrasonic motor servo control system is characterized in that hysteresis compensation control is carried out by adopting the motor servo control system hysteresis control method based on the improved play operator as claimed in any one of claims 1 to 4, and the ultrasonic motor servo control system comprises a base and an ultrasonic motor arranged on the base; an output shaft at one side of the ultrasonic motor is connected with the photoelectric encoder, and an output shaft at the other side of the ultrasonic motor is connected with an inertial load of the flywheel; the output shaft of the flywheel inertial load is connected with the torque sensor through a coupler; and the signal output end of the photoelectric encoder and the signal output end of the torque sensor are respectively connected to a control system.
6. The ultrasonic motor servo control system of claim 5, wherein: control system includes ultrasonic motor drive control circuit, ultrasonic motor drive control circuit includes control chip circuit and driver chip circuit, photoelectric encoder's signal output part with the corresponding input of control chip circuit is connected, the output of control chip circuit with the corresponding input of driver chip circuit is connected, in order to drive the driver chip circuit, the drive frequency adjusting signal output part and the drive half-bridge circuit adjusting signal output part of driver chip circuit respectively with the corresponding input of ultrasonic motor is connected.
7. The ultrasonic motor servo control system of claim 6, wherein: the system of the whole controller is established by improving a play operator to process a hysteresis mathematical model, so that the hysteresis of a servo system is minimized while the identification dynamic error is reduced.
8. The ultrasonic motor servo control system of claim 6, wherein: the hardware circuit of the control system comprises an ultrasonic motor drive control circuit, the ultrasonic motor drive control circuit comprises a control chip circuit and a drive chip circuit, the signal output end of the photoelectric encoder is connected with the corresponding input end of the control chip circuit, the output end of the control chip circuit is connected with the corresponding input end of the drive chip circuit to drive the drive chip circuit, and the drive frequency adjusting signal output end and the drive half-bridge circuit adjusting signal output end of the drive chip circuit are respectively connected with the corresponding input end of the ultrasonic motor.
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