CN113741152B - Substrate conveying method and device - Google Patents
Substrate conveying method and device Download PDFInfo
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- CN113741152B CN113741152B CN202010479893.8A CN202010479893A CN113741152B CN 113741152 B CN113741152 B CN 113741152B CN 202010479893 A CN202010479893 A CN 202010479893A CN 113741152 B CN113741152 B CN 113741152B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
Abstract
The invention discloses a substrate transmission method and a substrate transmission device, wherein the method comprises the following steps: the controller determines that the reference of the substrate conveying table and the reference of the workpiece table are not deviated; the substrate conveying table moves to a first station on the conveying bearing table, and the workpiece table moves to a second station on the workpiece table lifting frame; the controller determines that the first station and the first handover station have no deviation, and the second station and the second handover station have no deviation; the substrate conveying assembly adsorbs the substrate and drives the substrate to move from the substrate conveying table to a preset position on the workpiece table. According to the technical scheme provided by the embodiment of the invention, the safe transmission risk in the process of moving the substrate from the substrate conveying table to the workpiece table is reduced.
Description
Technical Field
The embodiment of the invention relates to the technical field of photoetching machines, in particular to a substrate transmission method and a substrate transmission device.
Background
In the photolithography process, after the substrate is coated with glue, the substrate needs to be moved from the substrate transfer stage to the workpiece stage for an exposure process.
In the process that the substrate moves to the workpiece platform from the substrate conveying platform in the prior art, the substrate is difficult to ensure not to be damaged in the process that the substrate moves to the workpiece platform from the substrate conveying platform because the plane size of the substrate is large and the thickness is thin.
Disclosure of Invention
In view of this, embodiments of the present invention provide a substrate transfer method and apparatus, which reduce the risk of safe transfer during the substrate moving from the substrate transfer table to the workpiece table.
In a first aspect, an embodiment of the present invention provides a substrate transmission method, including:
the controller determines that the reference of the substrate conveying table and the reference of the workpiece table are not deviated;
the substrate conveying table moves to a first station on the conveying bearing table, and the workpiece table moves to a second station on the workpiece table lifting frame;
the controller determines that the first station is not deviated from a first handover station and the second station is not deviated from a second handover station;
the substrate conveying assembly adsorbs the substrate and drives the substrate to move from the substrate conveying table to a preset position on the workpiece table.
In a second aspect, the present invention provides a substrate transfer apparatus, comprising:
a substrate transfer table and a workpiece table;
the transmission bearing platform and the workpiece platform hanging frame; the transmission bearing table is positioned on one side of the workpiece table lifting frame, the substrate conveying table is positioned on the transmission bearing table, is in sliding connection with the transmission bearing table and can move to a first station on the transmission bearing table, and the workpiece table is positioned on the workpiece table lifting frame, is in sliding connection with the workpiece table lifting frame and can move to a second station on the workpiece table lifting frame;
the controller is used for determining that the reference of the substrate conveying table and the reference of the workpiece table are not deviated, determining that the first station and the first transfer station are not deviated, and determining that the second station and the second transfer station are not deviated;
and the substrate conveying assembly is arranged on the substrate conveying table and used for adsorbing the substrate and driving the substrate to move from the substrate conveying table to the preset position on the workpiece table.
According to the technical scheme provided by the embodiment of the invention, the safety and the accuracy of the substrate transmission process are ensured from two aspects, on the first aspect, after the controller confirms that the reference of the substrate transmission platform and the reference of the workpiece platform are not deviated, the substrate transmission platform moves to a first station on the transmission bearing platform, and the workpiece platform moves to a second station on the workpiece platform lifting frame; in a second aspect, the controller confirms that the first station is not offset from the first hand-off station and that the second station is not offset from the second hand-off station. After meeting the two conditions, the substrate conveying assembly is arranged on the substrate conveying table and used for adsorbing the substrate and driving the substrate to move to the preset position on the workpiece table, so that the actual position and the deviation of the preset position of the substrate are reduced, the safety and the accuracy of the substrate conveying process are improved, and the safety and the accuracy of the substrate conveying process are improved.
Drawings
Fig. 1 is a flowchart of a substrate transferring method according to an embodiment of the present invention;
FIG. 2 is a flow chart of another substrate transferring method according to an embodiment of the present invention;
fig. 3 is a flowchart of another substrate transferring method according to an embodiment of the present invention;
FIG. 4 is a flowchart illustrating another substrate transferring method according to an embodiment of the present invention;
FIG. 5 is a flowchart illustrating another substrate transferring method according to an embodiment of the present invention;
FIG. 6 is a flowchart illustrating another substrate transferring method according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a substrate transport apparatus according to an embodiment of the present invention;
FIG. 8 is an enlarged view of area A3 of FIG. 7;
fig. 9 is a left side view of a substrate transfer apparatus shown in fig. 7;
fig. 10 is a schematic structural diagram of a first locking portion according to an embodiment of the present invention;
fig. 11 is a schematic structural view of a second locking portion according to an embodiment of the present invention;
fig. 12 is a schematic structural diagram of another substrate transportation device according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
As in the prior art described in the background art, it is difficult to ensure that the substrate is not damaged during the movement from the substrate transfer table to the workpiece table. . Because of the large planar size and the small thickness of the substrate, there is a risk in safely transporting the substrate. Typically, the substrate has a length of about 3150 mm, a width of about 2850 mm and a thickness of about 1 mm. And the workpiece platform is positioned on the workpiece platform lifting frame, the workpiece platform lifting frame is positioned on the shock absorber, the shock absorber can move in multiple degrees of freedom, and whether the workpiece platform is static relative to the ground or not can not be guaranteed. The substrate transfer table is positioned above the transmission bearing table, and the transmission bearing table is static relative to the ground, so the reference of the workpiece table and the reference of the substrate transfer table cannot be guaranteed to be the same. In addition, the substrate needs to be moved from the substrate transfer table to the workpiece table, whether the substrate transfer table reaches the first handover station in advance, and whether the workpiece table reaches the second handover station, which may have deviations during the movement. Therefore, in the process of moving the substrate from the substrate conveying table to the workpiece table in the prior art, the actual position of the substrate and the preset position of the substrate often deviate greatly, so that the risk of safe transmission of the substrate is increased.
In view of the above technical problems, an embodiment of the present invention provides the following technical solutions:
fig. 1 is a flowchart of a substrate transferring method according to an embodiment of the present invention. Referring to fig. 1, the substrate transfer method includes the steps of:
Referring to fig. 7, in the substrate transport apparatus, the stage 20 is positioned on a stage lifting frame 40, and the stage lifting frame 40 is positioned on a damper, which can move with multiple degrees of freedom. The substrate transfer stage 10 is located above the transport stage 30, and the transport stage 30 is stationary relative to the ground. If the reference of the substrate transfer table 10 and the reference of the workpiece table 20 have a deviation, the accuracy of the subsequent substrate transfer table 10 and the subsequent workpiece table 20 moving to their respective handover stations cannot be guaranteed, and in the substrate transmission process, the actual position and the preset position of the substrate have a large deviation, which increases the risk of safe substrate transmission. Therefore, in the present embodiment, before the substrate transfer table 10 and the workpiece stage 20 move to the respective delivery stations, it is necessary to ensure that the reference of the substrate transfer table 10 and the reference of the workpiece stage 20 are not deviated.
And step 120, moving the substrate conveying table to a first station on the transmission bearing table, and moving the workpiece table to a second station on the workpiece table lifting frame.
Referring to fig. 7, the substrate transfer platform 10 includes an upper substrate transfer stage 11 and a lower substrate transfer stage 12, and the upper substrate transfer stage 11 and the lower substrate transfer stage 12 are fixed in relative positions and parallel to the transport stage 30 as a whole, and are slidably coupled to the transport stage 30 to slide on the transport stage 30 in the X direction. The work stage 20 is located on the work stage hanger frame 40, and is slidable in the X direction and the Y direction on the work stage hanger frame 40.
Specifically, referring to fig. 7, the substrate transfer platform 10 includes an upper substrate transfer stage 11 and a lower substrate transfer stage 12, and the relative positions of the upper substrate transfer stage 11 and the lower substrate transfer stage 12 are unchanged, and are parallel to the transfer stage 30 as a whole, and are slidably connected to the transfer stage 30, and slide on the transfer stage 30 along the X direction. The work stage 20 is positioned on the work stage suspension frame 40, and is slidable in the X direction and the Y direction on the work stage suspension frame 40. If the first station and the first handover station A1 have deviations and/or the second station and the second handover station A2 have deviations, the actual position and the preset position of the substrate have larger deviations in the substrate transmission process, so that the risk of safe substrate transmission is increased. Therefore, when the substrate transfer platform 10 is located at the first station and the workpiece stage 20 is located at the second station, it is required to determine that the first station is not deviated from the first transfer station A1, and the second station is not deviated from the second transfer station A2.
It should be noted that, referring to fig. 7, the substrate conveying assembly adsorbs the substrate and drives the substrate to move from the substrate conveying table to the preset position on the workpiece table specifically includes: the substrate transfer assembly adsorbs the substrate and drives the substrate from the substrate transfer table to the at least one pad 23 on the workpiece table 20. Air at the contact part of the bonding pad 23 and the substrate can be extracted to adsorb the substrate at the bonding pad 23.
According to the technical scheme, the safety and the accuracy of the substrate transmission process are ensured from two aspects, on the first aspect, after the controller confirms that the reference of the substrate transmission platform 10 and the reference of the workpiece platform 20 are not deviated, the substrate transmission platform 10 moves to the first station on the transmission bearing platform 30, and the workpiece platform 20 moves to the second station on the workpiece platform lifting frame 40; in a second aspect, the controller confirms that the first station is not offset from the first handoff station and that the second station is not offset from the second handoff station. After meeting the two conditions, the substrate conveying assembly is arranged on the substrate conveying table 10 and used for adsorbing the substrate and driving the substrate to move to the preset position on the workpiece table 20 from the substrate conveying table 10, so that the deviation between the actual position and the preset position of the substrate is reduced, and the safety and the accuracy of the substrate conveying process are improved.
In the above-described configuration, before the substrate transfer table 10 and the workpiece table 20 move to the respective delivery stations, it is necessary to ensure that the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are not deviated. A specific scheme for ensuring that the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are not deviated by a plurality of displacement detecting assemblies and controllers will be described in detail below. Alternatively, referring to fig. 2, the step 110 of the controller determining that the datum of the substrate transfer table and the datum of the workpiece table are not deviated comprises:
Referring to fig. 7, 8 and 9, the first displacement detecting assembly 501, disposed on the transport carrier 30, is a first reference point A4 for detecting a first displacement of the workpiece stage suspension frame 40 relative to the transport carrier 30 in a first direction (Z direction), wherein the first direction (Z direction) is parallel to the first surface 301, the first surface 301 is a surface of the transport carrier 30 adjacent to the side of the workpiece stage suspension frame 40, and the first direction is the Z direction.
And 1102, detecting a second displacement of a second reference point on the workpiece table lifting frame relative to the transmission bearing table in the first direction by a second displacement detection assembly, wherein the first reference point and the second reference point are positioned on the first surface.
Referring to fig. 7, 8 and 9, a second displacement detecting assembly 502, a second reference point A5 disposed on the transport carrier 30, is used for detecting a second displacement of the workpiece table drop frame 40 relative to the transport carrier in a first direction (Z direction), wherein the first reference point A4 and the second reference point A5 are located on the first surface 301.
1103, detecting a first displacement of the workpiece platform lifting frame relative to the transmission bearing platform in a second direction by a third displacement detection assembly, wherein the second direction is parallel to a second plane and perpendicular to the first direction, the second plane is a surface of the transmission bearing platform adjacent to the first surface, and the second direction is perpendicular to a direction in which the first handover station points to the second handover station.
Referring to fig. 7, 8 and 9, a third displacement detecting assembly 503 is disposed on the transport carrier 30 and is configured to detect a first reference point A4 on the transport carrier 30, wherein the first reference point A4 is used for detecting a first displacement of the workpiece stage suspension frame 40 relative to the transport carrier 30 in a second direction (X direction), the second direction (X direction) is parallel to the second plane 302 and perpendicular to the first direction (Z direction), the second plane 302 is a surface of the transport carrier adjacent to the first surface 301, and the second direction (X direction) is perpendicular to a direction in which the first handover station A1 points to the second handover station A2.
And 1104, detecting a second displacement of the workpiece table lifting frame relative to the transmission bearing table in a second direction by a fourth displacement detection assembly.
Referring to fig. 7, 8 and 9, a fourth displacement detecting assembly 504, which is a second reference point A5 provided on the transport carrier 30, detects a second displacement of the workpiece table hoist frame 40 in the second direction (X direction) with respect to the transport carrier 30.
Illustratively, the first displacement detecting element 501, the second displacement detecting element 502, the third displacement detecting element 503 and the fourth displacement detecting element 504 may be capacitive sensors or inductive sensors.
It should be noted that the directions of the displacement vectors detected by the first displacement detecting element 501 and the third displacement detecting element 503 are opposite. The second displacement detecting element 502 and the fourth displacement detecting element 504 have the same displacement vector direction. And the workpiece platform hanging frame 40 is provided with two baffles 41, the purpose of detecting the displacement of the workpiece platform hanging frame 40 in the first direction and the displacement in the second direction relative to the transmission bearing platform 30 can be achieved by detecting the relative movement of the baffles 41 relative to the first displacement detection assembly 501, the second displacement detection assembly 502, the third displacement detection assembly 503 and the fourth displacement detection assembly 504.
The XYZ coordinate system of the transfer stage 30 is used as a reference. Specifically, the first displacement in the first direction is smaller than or equal to the first preset value, and the second displacement in the first direction is smaller than or equal to the first preset value, which proves that the workpiece table lifting frame 40 does not have Z-direction deviation relative to the transport carrier table 30 and does not rotate around the X-direction. The difference between the first displacement in the first direction and the second displacement in the first direction is smaller than or equal to the second preset value, which proves that the workpiece stage lifting frame 40 does not rotate around the Y direction relative to the transport bearing table 30.
The first displacement in the second direction is smaller than or equal to the first preset value, and the second displacement in the second direction is smaller than or equal to the first preset value, which proves that the workpiece table lifting frame 40 has no deviation in the X direction relative to the transport bearing table 30 and does not rotate around the Z direction.
It should be noted that, the subsequent locking assembly fixes the substrate transfer table 10 at the first transfer station A1 and fixes the workpiece table 20 at the second transfer station A2, so as to ensure that there is no Y-direction deviation of the workpiece table suspension frame 40 with respect to the transport carrier table 30.
Therefore, the first displacement in the first direction is less than or equal to the first preset value, the second displacement in the first direction is less than or equal to the first preset value, a difference between the first displacement in the first direction and the second displacement in the first direction is less than or equal to the second preset value, the first displacement in the second direction is less than or equal to the first preset value, and the second displacement in the second direction is less than or equal to the first preset value, the controller determines that the reference of the workpiece table 20 and the reference of the substrate transfer table 10 are not deviated.
In the above technical solution, the reference of the substrate transfer table and the reference of the workpiece table are not deviated, the substrate transfer table 10 reaches the first station, and the workpiece table 20 reaches the second station; after confirming that the first station and the first handover station A1 have no deviation and the second station and the second handover station A2 have no deviation, the substrate transfer assembly is disposed on the substrate transfer table 10, and is configured to adsorb the substrate and drive the substrate to move from the substrate transfer table 10 to a preset position on the workpiece table 20. Specifically, the technical scheme that the first station is not deviated from the first handover station A1 and the second station is not deviated from the second handover station A2 through the cooperation of the in-place detection assembly and the controller is described below.
Optionally, referring to fig. 3, the step 130 controller determining that the first station is not offset from the first transfer station and that the second station is not offset from the second transfer station comprises:
Referring to fig. 7, a first in-position detecting assembly 14 is disposed on the substrate transfer table 10 for detecting a first distance between a third reference point A6 on the substrate transfer table and a fourth reference point A7 at the first transfer station A1.
And step 1302, the second in-place detection component detects a second distance from a fifth reference point on the workpiece table to a sixth reference point at the second transfer station.
Referring to fig. 7, a second in-position detecting assembly 21 is disposed on the workpiece stage 20, and is configured to detect a second distance from a fifth reference point A8 on the workpiece stage 20 to a sixth reference point A9 at the second transfer station A2 when the workpiece stage 20 reaches the second station.
And step 1303, detecting a third distance between the front end of the plate fork fixed on the substrate conveying table and a seventh reference point on the workpiece table by a third in-place detection assembly.
Referring to fig. 7, the third in-place detecting unit 22 is disposed at the seventh reference point a10 on the workpiece table suspension frame 40, and is configured to detect a third distance between the front end of the plate fork 15 fixed to the substrate transfer table and the seventh reference point a10 on the workpiece table suspension frame 40.
In step 1304, the first distance is smaller than or equal to a third preset value, the second distance is smaller than or equal to a fourth preset value, and the third distance is smaller than or equal to a fifth preset value, and the controller determines that the first station and the first handover station are not deviated and the second station and the second handover station are not deviated.
Specifically, the first distance is smaller than or equal to a third preset value, which indicates that the first station and the first handover station have no deviation, the second distance is smaller than or equal to a fourth preset value, and the second station and the second handover station have no deviation; the third distance is smaller than or equal to the fifth preset value, that is, the front end of the plate fork 15 fixed on the substrate conveying table reaches the seventh reference point a10 on the workpiece table hanging frame 40, which further illustrates that the first station has no deviation from the first handover station A1, and the second station has no deviation from the second handover station A2.
In the above technical solution, the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are not deviated, the substrate transfer table 10 reaches the first station, and the workpiece table 20 reaches the second station; after confirming that the first station and the first handover station A1 are not deviated and the second station and the second handover station A2 are not deviated, the substrate transfer assembly is disposed on the substrate transfer table 10, and is configured to adsorb the substrate and drive the substrate to move from the substrate transfer table 10 to a preset position on the workpiece table 20. Since the substrate transfer table 10 and the workpiece table 20 are movable, a locking assembly is required to fix the substrate transfer table 10 at the first handover station A1 and the workpiece table 20 at the second handover station A2 during the substrate transfer process.
Optionally, referring to fig. 3, before the step 140 of adsorbing the substrate by the substrate conveying assembly and driving the substrate to move from the substrate conveying table to the preset position on the workpiece table, the method further includes:
The following describes how the locking assembly fixes the substrate transfer table 10 at the first transfer station A1 and fixes the workpiece table 20 at the second transfer station A2.
Optionally, referring to fig. 4, the step 1305, the fixing the substrate transferring table on the transmission bearing table by the locking assembly, and the fixing the workpiece table on the workpiece table hanging frame includes:
Referring to fig. 7, 10 and 11, the locking assembly includes a first locking portion 50 and a second locking portion 51; the first locking portion 50 is disposed on the transport stage 30, and is used to lock the substrate transfer stage 10 at the first transfer station A1 on the transport stage 30.
And step 13052, locking the workpiece table at the second transfer station on the workpiece table lifting frame by the first locking unit and the second locking unit of the second locking part.
Referring to fig. 7, 10 and 11, the second locking portion 51 includes a first locking unit 52 and a second locking unit 53, the first locking unit 52 being provided on the work table hoist frame 40, the second locking unit 53 being provided on the work table 20, the first locking unit 52 and the second locking unit 53 for locking the work table 20 at the second transfer station A2 on the work table hoist frame 40.
Specifically, the transmission bearing table 30 is provided with parallel sliding rails 303, and the substrate transfer table 10 is provided with grooves matched with the sliding rails, so that the substrate transfer table 10 and the transmission bearing table 30 can be slidably connected. The first locking portion 50 is disposed at a slide rail on the transport carrier 30, and is used to lock the substrate transfer table 10 at the first handover station A1 on the transport carrier 30. The first locking portion 50 restricts the substrate transfer table 10 from sliding on the parallel slide rails 303 in the locked state. The first locking portion 50 does not restrict the slider of the substrate transport table 10 from sliding on the parallel slide rails 303 in the unlocked state.
The second locking portion 51 includes a first locking unit 52 and a second locking unit 53, the second locking unit 53 is a hole formed in the workpiece table 20, the first locking unit 52 is a cylinder provided on the workpiece table hanger frame, the cylinder is located in the hole when the workpiece table 20 moves to the second station without deviation from the second transfer station, and the first locking unit 52 and the second locking unit 53 are used to lock the workpiece table 20 at the second transfer station A2 on the workpiece table hanger frame 40.
In the above technical solution, when the substrate conveying platform 10 is located at the first handover station A1 and the workpiece table 20 is located at the second handover station A2, the substrate conveying assembly is disposed on the substrate conveying platform 10 for adsorbing the substrate and driving the substrate to move from the substrate conveying platform 10 to the preset position on the workpiece table 20. But there is one section distance between first articulated station A1 and the second handing-over station A2, if base plate conveying subassembly, adsorb the base plate, and drive the base plate and directly move the preset position on work piece platform 20 from base plate conveying platform 10, the base plate can sink because of the effect of gravity between first articulated station and the second handing-over station, if there is not the part of support, when moving to work piece platform 20, has the risk of being collided with. Therefore, the embodiment of the present invention proposes to dispose the transfer air bearing table 60 between the first and second transfer stations, and to support the substrate during the movement of the substrate from the substrate transfer table 10 to a predetermined position on the workpiece table 20.
Optionally, referring to fig. 5, in step 140, the substrate conveying assembly adsorbs the substrate, and the driving the substrate to move from the substrate conveying table to the preset position on the workpiece table includes:
and 1401, the substrate conveying assembly adsorbs the substrate and drives the substrate to move to one side of the substrate conveying table close to the workpiece table.
At step 1402, the controller determines that the height of the transport air bearing table is a safe height.
Referring to fig. 12, the transmission air bearing table 60 is used for the substrate transmission assembly to adsorb the substrate, and drives the substrate to move to one side of the substrate transmission table close to the workpiece table, and the height of the transmission air bearing table 60 is a safe height, so as to generate an air film 61; the air film 61 is used to lift up the substrate 70 and to bring the substrate 70 to a predetermined position on the work stage 20.
Specifically, the substrate conveying table 10 is provided with a plurality of guide roller rows 13, and the plurality of guide roller rows 13 can drive the substrate 70 to move in the Y direction. The conveying air floating table 60 is arranged between the first handover station A1 and the second handover station A2, and the air film 61 jacks up the substrate 70 in the process that the substrate 70 moves from the substrate conveying table 10 to the preset position on the workpiece table 20, so that the substrate 70 is not scratched while the supporting effect is achieved.
In the above technical solution, the air film 61 may be generated only by the transmission air bearing table 60 if it is required to ensure that the vertical distance between the transmission air bearing table 60 and the substrate transfer table 10 is greater than or equal to a preset distance; the substrate transfer assembly adsorbs the substrate and drives the substrate to move from the substrate transfer stage 10, through the transmission air bearing stage 60, to a predetermined position on the workpiece stage 20. Therefore, the embodiment of the invention also provides the following technical scheme:
alternatively, referring to fig. 6, the step 1402 of the controller determining that the height of the transfer air bearing table is a safe height includes:
in step 14021, the distance detecting unit detects a vertical distance between the transport air bearing table and the substrate transfer table.
Referring to fig. 12, a distance detecting assembly 80 is provided on the substrate transfer stage 10 to detect a vertical distance between the transport air bearing and the substrate transfer stage.
In step 14022, if the vertical distance is greater than or equal to the predetermined distance, the controller determines that the height of the transport air bearing table is a safe height.
Specifically, the vertical distance between the transport air bearing table 60 and the substrate transfer table 10 is greater than or equal to a preset distance, and the transport air bearing table 60 may generate the air film 61; the substrate conveying assembly adsorbs the substrate, and drives the substrate to move from the substrate conveying table 10, and the substrate moves to a preset position on the workpiece table 20 through the transmission air bearing table 60, so that the substrate 70 is prevented from being collided in the process that the substrate 70 moves from the substrate conveying table 10 to the transmission air bearing table 60.
Based on the same inventive concept, an embodiment of the present invention further provides a substrate transmission apparatus, and fig. 7 is a schematic structural diagram of the substrate transmission apparatus provided in the embodiment of the present invention.
Referring to fig. 7, the substrate transfer apparatus includes: a substrate transfer stage 10 and a workpiece stage 20; a transport carrier 30 and a workpiece table hanger frame 40; the transmission bearing table 30 is positioned on one side of the workpiece table hanging frame 40, the substrate conveying table 10 is positioned on the transmission bearing table 30, is in sliding connection with the transmission bearing table 30 and can move to a first station on the transmission bearing table 30, and the workpiece table 20 is positioned on the workpiece table hanging frame 40, is in sliding connection with the workpiece table hanging frame 40 and can move to a second station on the workpiece table hanging frame 40; a controller for determining that the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are not deviated; the controller is also configured to determine that the first station is not offset from the first handoff station and that the second station is not offset from the second handoff station. And the substrate conveying assembly is arranged on the substrate conveying table 10 and used for adsorbing the substrate and driving the substrate to move from the substrate conveying table 10 to a preset position on the workpiece table 20.
According to the technical scheme, the safety and the accuracy of the substrate transmission process are ensured from two aspects, on the first aspect, after the controller confirms that the reference of the substrate transmission platform 10 and the reference of the workpiece platform 20 are not deviated, the substrate transmission platform 10 moves to the first station on the transmission bearing platform 30, and the workpiece platform 20 moves to the second station on the workpiece platform lifting frame 40; in a second aspect, the controller confirms that the first station is not offset from the first handoff station and that the second station is not offset from the second handoff station. After meeting the two conditions, the substrate conveying assembly is arranged on the substrate conveying table 10 and used for adsorbing the substrate and driving the substrate to move to the preset position on the workpiece table 20 from the substrate conveying table 10, so that the safety and the accuracy of the substrate conveying process are improved, and the phenomenon that the actual position of the substrate and the preset position are deviated greatly frequently can be avoided, and the risk of safe substrate conveying is increased.
In the substrate transfer apparatus, the stage 20 is located on the stage hanger frame 40, and the stage hanger frame 40 is located on the damper, which is movable with multiple degrees of freedom. The substrate transfer stage 10 is located above the transport stage 30, and the transport stage 30 is stationary relative to the ground. If the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are deviated, the accuracy of the subsequent movement of the substrate transfer table 10 and the workpiece table 20 to the respective transfer station cannot be guaranteed, and the deviation between the actual position and the preset position of the substrate is large in the substrate transfer process, so that the risk of safe substrate transfer is increased. Therefore, in the present embodiment, it is necessary to ensure that the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are not deviated before the substrate transfer table 10 and the workpiece table 20 move to the respective delivery stations.
The substrate transfer platform 10 includes an upper substrate transfer stage 11 and a lower substrate transfer stage 12, and the upper substrate transfer stage 11 and the lower substrate transfer stage 12 are fixed in relative positions and parallel to the transfer stage 30 as a whole, and are slidably connected to the transfer stage 30 to slide on the transfer stage 30 in the X direction. The work stage 20 is located on the work stage hanger frame 40, and is slidable in the X direction and the Y direction on the work stage hanger frame 40. If the first station has a deviation with the first handover station A1 and/or the second station has a deviation with the second handover station A2, in the substrate transmission process, the actual position and the preset position of the substrate have a large deviation, which causes the substrate to be worn and affects the accuracy of the subsequent exposure process. Therefore, when the substrate transfer platform 10 is located at the first station and the workpiece stage 20 is located at the second station, it is required to determine that the first station is not deviated from the first handover station, and the second station is not deviated from the second handover station.
As can be seen, the substrate transfer process is as follows: the substrate conveying assembly is arranged on the substrate conveying table 10 and used for adsorbing the substrate and driving the substrate to move from the substrate conveying table 11 to a preset position on the workpiece table 20; alternatively, the substrate transfer assembly adsorbs the substrate and moves the substrate from the workpiece stage 20 to the substrate under-stage transfer stage 12. The substrate upper transfer stage 11 and the substrate lower transfer stage 12 are identical in structure, and the operation process is the reverse process.
In the above-described configuration, before the substrate transfer table 10 and the workpiece stage 20 move to the respective delivery stations, it is necessary to ensure that the reference of the substrate transfer table 10 and the reference of the workpiece stage 20 are not deviated. A specific scheme for ensuring that the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are not deviated by a plurality of displacement detecting assemblies and controllers will be described in detail below. Fig. 8 is an enlarged view of the area A3 in fig. 7. Fig. 9 is a left side view of a substrate transfer apparatus shown in fig. 7.
Optionally, referring to fig. 7, 8 and 9, the substrate transport apparatus further includes a first displacement detecting assembly 501, disposed on the transport carrier 30, and configured to detect a first displacement of the workpiece stage suspension frame 40 relative to the transport carrier 30 in a first direction (Z direction), wherein the first direction (Z direction) is parallel to the first surface 301, the first surface 301 is a surface of the transport carrier 30 adjacent to the workpiece stage suspension frame 40, and the first direction is the Z direction; a second displacement detecting assembly 502, disposed on the transport carrier 30, for detecting a second displacement of the workpiece stage drop frame 40 in a first direction (Z direction) relative to the transport carrier, wherein the first reference point A4 and the second reference point A5 are located on the first surface 301; a third displacement detecting assembly 503, disposed at the first reference point A4 on the transmission bearing platform 30, for detecting a first displacement of the workpiece platform suspension frame 40 relative to the transmission bearing platform 30 in a second direction (X direction), where the second direction (X direction) is parallel to the second plane 302 and perpendicular to the first direction (Z direction), the second plane 302 is a surface of the transmission bearing platform adjacent to the first surface 301, and the second direction (X direction) is perpendicular to a direction in which the first handover station A1 points to the second handover station A2; a fourth displacement detecting assembly 504, disposed on the second reference point A5 of the transport carrier 30, for detecting a second displacement of the workpiece stage suspension frame 40 in the second direction (X direction) relative to the transport carrier 30;
the controller is used for determining that the difference value between the first displacement in the first direction and the second displacement in the first direction is smaller than or equal to a first preset value, the first displacement in the second direction is smaller than or equal to the first preset value, and the second displacement in the second direction is smaller than or equal to the first preset value, so that the condition that the reference of the workpiece table 20 and the reference of the substrate conveying table 10 are not deviated is determined, the first signal input end of the controller is electrically connected with the signal output end of the first displacement detection assembly 501, the second signal input end of the controller is electrically connected with the signal output end of the second displacement detection assembly 502, the third signal input end of the controller is electrically connected with the signal output end of the third displacement detection assembly 503, and the fourth signal input end of the controller is electrically connected with the signal output end of the fourth displacement detection assembly 504.
Illustratively, the first displacement detecting element 501, the second displacement detecting element 502, the third displacement detecting element 503 and the fourth displacement detecting element 504 may be capacitive sensors or inductive sensors.
It should be noted that the directions of the displacement vectors detected by the first displacement detecting element 501 and the third displacement detecting element 503 are opposite. The second displacement detecting element 502 and the fourth displacement detecting element 504 have the same displacement vector direction. And the workpiece platform hanging frame 40 is provided with two baffles 41, the purpose of detecting the displacement of the workpiece platform hanging frame 40 in the first direction and the displacement in the second direction relative to the transmission bearing platform 30 can be achieved by detecting the relative movement of the baffles 41 relative to the first displacement detection assembly 501, the second displacement detection assembly 502, the third displacement detection assembly 503 and the fourth displacement detection assembly 504.
The XYZ coordinate system of the transfer stage 30 is used as a reference. Specifically, the first displacement in the first direction is smaller than or equal to the first preset value, and the second displacement in the first direction is smaller than or equal to the first preset value, which proves that the workpiece table lifting frame 40 does not have Z-direction deviation relative to the transport carrier table 30 and does not rotate around the X-direction. The difference between the first displacement in the first direction and the second displacement in the first direction is smaller than or equal to the second preset value, which proves that the workpiece table hanging frame 40 does not rotate around the Y direction relative to the transport bearing table 30.
The first displacement in the second direction is smaller than or equal to the first preset value, and the second displacement in the second direction is smaller than or equal to the first preset value, which proves that the workpiece table lifting frame 40 has no deviation in the X direction relative to the transport bearing table 30 and does not rotate around the Z direction.
It should be noted that, the subsequent locking assembly fixes the substrate transfer table 10 at the first transfer station A1 and fixes the workpiece table 20 at the second transfer station A2, so as to ensure that there is no Y-direction deviation of the workpiece table suspension frame 40 with respect to the transport carrier table 30.
Therefore, the controller is configured to determine that there is no deviation between the reference of the workpiece stage 20 and the reference of the substrate transfer stage 10, when a first displacement in the first direction is less than or equal to a first preset value, a second displacement in the first direction is less than or equal to a first preset value, a difference between the first displacement in the first direction and the second displacement in the first direction is less than or equal to a second preset value, the first displacement in the second direction is less than or equal to the first preset value, and the second displacement in the second direction is less than or equal to the first preset value.
In the above technical solution, the reference of the substrate transfer table and the reference of the workpiece table are not deviated, the substrate transfer table 10 arrives at the first station, and the workpiece table 20 arrives at the second station; after confirming that the first station and the first handover station A1 have no deviation and the second station and the second handover station A2 have no deviation, the substrate transfer assembly is disposed on the substrate transfer table 10, and is configured to adsorb the substrate and drive the substrate to move from the substrate transfer table 10 to a preset position on the workpiece table 20. Specifically, the technical scheme that the first station is not deviated from the first handover station A1 and the second station is not deviated from the second handover station A2 through the cooperation of the in-place detection assembly and the controller is described below.
Optionally, referring to fig. 7, a first in-position detecting assembly 14 is further included, disposed on the substrate transfer table 10, for detecting a first distance between a third reference point A6 on the substrate transfer table and a fourth reference point A7 at the first interface station A1; the second in-place detection assembly 21 is arranged on the workpiece table 20 and used for detecting a second distance between a fifth reference point A8 on the workpiece table 20 and a sixth reference point A9 at the second handover station A2 when the workpiece table 20 reaches the second station; the third in-place detection assembly 22 is arranged on a seventh reference point A10 on the workpiece table hanging frame 40 and is used for detecting a third distance between the front end of the plate fork 15 fixed on the substrate conveying table and the seventh reference point A10 on the workpiece table hanging frame 40; and the controller is used for determining that the first distance is smaller than or equal to a third preset value, the second distance is smaller than or equal to a fourth preset value and the third distance is smaller than or equal to a fifth preset value, the first station and the first handover station are not deviated, the second station and the second handover station are not deviated, a fifth signal input end of the controller is electrically connected with a signal output end of the first in-place detection assembly 14, a sixth signal input end of the controller is electrically connected with a signal output end of the second in-place detection assembly 21, and a seventh signal input end of the controller is electrically connected with a signal output end of the third in-place detection assembly 22.
Specifically, the first distance is smaller than or equal to a third preset value, which indicates that the first station and the first handover station have no deviation, the second distance is smaller than or equal to a fourth preset value, and the second station and the second handover station have no deviation; the third distance is smaller than or equal to the fifth preset value, that is, the front end of the plate fork 15 fixed on the substrate conveying table reaches the seventh reference point a10 on the workpiece table hanging frame 40, which further illustrates that there is no deviation between the first station and the first handover station A1, and there is no deviation between the second station and the second handover station A2.
In the above technical solution, the reference of the substrate transfer table 10 and the reference of the workpiece table 20 are not deviated, the substrate transfer table 10 reaches the first station, and the workpiece table 20 reaches the second station; after confirming that the first station and the first handover station A1 have no deviation and the second station and the second handover station A2 have no deviation, the substrate transfer assembly is disposed on the substrate transfer table 10, and is configured to adsorb the substrate and drive the substrate to move from the substrate transfer table 10 to a preset position on the workpiece table 20. Since the substrate transfer table 10 and the workpiece table 20 are movable, a locking assembly is required to fix the substrate transfer table 10 at the first handover station A1 and fix the workpiece table 20 at the second handover station A2 during the substrate transfer process.
The following describes how the locking assembly fixes the substrate transfer table 10 at the first transfer station A1 and fixes the workpiece table 20 at the second transfer station A2.
Fig. 10 is a schematic structural diagram of a first locking portion according to an embodiment of the present invention. Fig. 11 is a schematic structural diagram of a second locking portion according to an embodiment of the present invention.
Alternatively, referring to fig. 7, 10 and 11, the locking assembly comprises a first locking portion 50 and a second locking portion 51; the first locking part 50 is arranged on the transport bearing table 30 and used for locking the substrate conveying table 10 at a first handover station A1 on the transport bearing table 30; the second locking portion 51 includes a first locking unit 52 and a second locking unit 53, the first locking unit 52 being provided on the work table hanger frame 40, the second locking unit 53 being provided on the work table 20, the first locking unit 52 and the second locking unit 53 being used to lock the work table 20 at the second transfer station A2 on the work table hanger frame 40.
Specifically, the transmission bearing table 30 is provided with parallel sliding rails 303, and the substrate transfer table 10 is provided with grooves matched with the sliding rails, so that the substrate transfer table 10 and the transmission bearing table 30 can be slidably connected. The first locking portion 50 is disposed at a slide rail on the transport carrier 30, and is used to lock the substrate transfer table 10 at the first handover station A1 on the transport carrier 30. The first locking portion 50 restricts the substrate transfer table 10 from sliding on the parallel slide rails 303 in the locked state. The first locking portion 50 does not restrict the slider of the substrate transport table 10 from sliding on the parallel slide rails 303 in the unlocked state.
The second locking portion 51 includes a first locking unit 52 and a second locking unit 53, the second locking unit 53 is a hole formed in the workpiece table 20, the first locking unit 52 is a cylinder provided on the workpiece table hanger frame, the cylinder is located in the hole when the workpiece table 20 moves to the second station without deviation from the second transfer station, and the first locking unit 52 and the second locking unit 53 are used to lock the workpiece table 20 at the second transfer station A2 on the workpiece table hanger frame 40.
In the above technical solution, when the substrate conveying platform 10 is located at the first handover station A1 and the workpiece stage 20 is located at the second handover station A2, the substrate conveying assembly is disposed on the substrate conveying platform 10 for adsorbing the substrate and driving the substrate to move from the substrate conveying platform 10 to the preset position on the workpiece stage 20. But there is one section distance between first articulated station and the second handing-over station, if base plate conveying subassembly, adsorb the base plate, and drive the base plate and directly move the preset position to work piece bench 20 from base plate conveying platform 10, the base plate can sink because of the effect of gravity between first articulated station and the second handing-over station, if there is not the part of support, when moving to work piece bench 20, has the risk of being collided with. Therefore, the embodiment of the present invention proposes to dispose the transfer air bearing table 60 between the first and second transfer stations, and to support the substrate during the movement of the substrate from the substrate transfer table 10 to a predetermined position on the workpiece table 20.
Fig. 12 is a schematic structural diagram of another substrate transport apparatus according to an embodiment of the present invention.
Optionally, referring to fig. 12, the substrate transferring apparatus further includes a transferring air bearing table 60, where the transferring air bearing table is used for the substrate transferring assembly to adsorb the substrate, and drive the substrate to move to a side of the substrate transferring table close to the workpiece table, and the height of the transferring air bearing table 60 is a safe height, so as to generate an air film 61; the air film 61 is used to lift up the substrate 70 and to bring the substrate 70 to a predetermined position on the work stage 20.
Specifically, the substrate transfer table 10 is provided with a plurality of guide roller rows 13, and the plurality of guide roller rows 13 can drive the substrate 70 to move in the Y direction. The transmission air bearing table 60 is arranged between the first handover station A1 and the second handover station A2, and the air film 61 jacks up the substrate 70 in the process that the substrate 70 moves from the substrate conveying table 10 to the preset position on the workpiece table 20, so that the substrate 70 is not scratched while the substrate 70 is supported.
In the above technical solution, the air film 61 may be generated only by the transport air bearing table 60 if it is required to ensure that the vertical distance between the transport air bearing table 60 and the substrate transfer table 10 is greater than or equal to a preset distance; the substrate transfer assembly adsorbs the substrate and drives the substrate to move from the substrate transfer stage 10, through the transmission air bearing stage 60, to a predetermined position on the workpiece stage 20. Therefore, the embodiment of the invention also provides a distance detection assembly.
Alternatively, referring to fig. 12, a distance detecting assembly 80, disposed on the substrate transfer stage 10, for detecting a vertical distance between the transport air bearing stage and the substrate transfer stage; and an eighth signal input end of the controller is electrically connected with an output end of the distance detection assembly and is used for determining that the vertical distance is greater than or equal to the preset distance and the height of the transmission air bearing table is the safe height.
Specifically, the vertical distance between the transport air bearing table 60 and the substrate transfer table 10 is greater than or equal to a preset distance, and the transport air bearing table 60 may generate the air film 61; the base plate conveying assembly adsorbs the base plate, and drives the base plate to move from the base plate conveying table 10, through transmission air bearing table 60, moves to the preset position on the workpiece table 20, and in the process that the base plate 70 moves from the base plate conveying table 10 to the transmission air bearing table 60, the base plate 70 is prevented from being collided, and the safe transmission of the base plate is ensured.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (14)
1. A method of transferring a substrate, comprising:
the controller determines that the reference of the substrate conveying table and the reference of the workpiece table are not deviated;
the substrate conveying table moves to a first station on the conveying bearing table, and the workpiece table moves to a second station on the workpiece table lifting frame;
the controller determines that the first station is not deviated from a first handover station and the second station is not deviated from a second handover station;
the substrate conveying assembly adsorbs a substrate and drives the substrate to move from the substrate conveying table to a preset position on the workpiece table;
the controller determining that the reference of the substrate transfer table and the reference of the workpiece table are not deviated includes:
the first displacement detection assembly detects first displacement of the workpiece table lifting frame relative to a first reference point on the transmission bearing table in a first direction;
the second displacement detection assembly detects second displacement of a second reference point on the workpiece platform lifting frame relative to the transmission bearing platform in the first direction;
the third displacement detection assembly detects first displacement of the workpiece platform lifting frame relative to the transmission bearing platform in a second direction;
the fourth displacement detection assembly detects second displacement of the workpiece platform lifting frame relative to the transmission bearing platform in the second direction;
a first displacement in the first direction is less than or equal to a first preset value, a second displacement in the first direction is less than or equal to the first preset value, a difference between the first displacement in the first direction and the second displacement in the first direction is less than or equal to a second preset value, the first displacement in the second direction is less than or equal to the first preset value, and the second displacement in the second direction is less than or equal to the first preset value, and the controller determines that the datum of the workpiece table and the datum of the substrate transfer table are not deviated;
the controller determines that the first station is unbiased from a first handoff station and the second station is unbiased from a second handoff station including:
the first in-place detection assembly detects a first distance between a third reference point on the substrate conveying table and a fourth reference point at the first handover station;
a second in-place detection assembly detects a second distance from a fifth reference point on the workpiece table to a sixth reference point at the second handover station;
the third in-place detection assembly detects a third distance from the front end of the plate fork fixed on the substrate conveying table to a seventh reference point on the workpiece table;
the first distance is smaller than or equal to a third preset value, the second distance is smaller than or equal to a fourth preset value, the third distance is smaller than or equal to a fifth preset value, and the controller determines that the first station and the first handover station are not deviated and the second station and the second handover station are not deviated.
2. The method of claim 1,
the controller determining that the reference of the substrate transfer table and the reference of the workpiece table are not deviated includes:
the first direction is parallel to a first surface, and the first surface is the surface of the transmission bearing platform adjacent to one side of the workpiece platform lifting frame;
the first reference point and the second reference point are located on the first surface;
the second direction is parallel to a second plane and perpendicular to the first direction, the second plane is a surface of the transmission bearing table adjacent to the first surface, and the second direction is perpendicular to a direction in which the first handover station points to the second handover station.
3. The method of claim 1,
the controller determining that the first station is unbiased from a first handoff station, and that the second station is unbiased from a second handoff station includes:
a fifth signal input end of the controller is electrically connected with a signal output end of the first in-place detection assembly, a sixth signal input end of the controller is electrically connected with a signal output end of the second in-place detection assembly, and a seventh signal input end of the controller is electrically connected with a signal output end of the third in-place detection assembly.
4. The substrate transfer method according to claim 1,
the base plate conveying assembly adsorbs the base plate, drives the base plate follow the base plate conveying platform moves to still include before the preset position on the work piece platform:
and the locking assembly fixes the substrate conveying table on the transmission bearing table and fixes the workpiece table on the workpiece table lifting frame.
5. The substrate transfer method according to claim 4,
locking Assembly will the base plate conveying platform is fixed on the transmission plummer, and will the work piece platform is fixed include on the work piece platform hoisting frame:
the first locking part locks the substrate conveying table at a first joint station on the conveying bearing table;
and the first locking unit and the second locking unit of the second locking part lock the workpiece table at a second transfer station on the workpiece table lifting frame.
6. The substrate transfer method according to claim 1,
the base plate conveying assembly adsorbs the base plate, drives the base plate is followed the base plate conveying platform moves to preset position on the work piece bench includes:
the substrate conveying assembly adsorbs a substrate and drives the substrate to move to one side of the substrate conveying table close to the workpiece table;
the controller determines that the height of the transmission air bearing table is a safe height;
the vertical distance between the transmission air-bearing table and the substrate conveying table is greater than or equal to a preset distance;
the transmission air floating platform generates an air film;
and the air film jacks up the substrate and conveys the substrate to a preset position on the workpiece table.
7. The substrate transfer method according to claim 6,
the controller determining that the height of the transport air bearing table is a safe height comprises:
the distance detection assembly detects the vertical distance between the transmission air bearing table and the substrate conveying table;
the vertical distance is greater than or equal to a preset distance, and the controller determines that the height of the transmission air bearing table is a safe height.
8. A substrate transport apparatus, comprising:
a substrate transfer table and a workpiece table;
the transmission bearing platform and the workpiece platform hanging frame; the transmission bearing table is positioned on one side of the workpiece table lifting frame, the substrate conveying table is positioned on the transmission bearing table, is in sliding connection with the transmission bearing table and can move to a first station on the transmission bearing table, and the workpiece table is positioned on the workpiece table lifting frame, is in sliding connection with the workpiece table lifting frame and can move to a second station on the workpiece table lifting frame;
the controller is used for determining that the reference of the substrate conveying table and the reference of the workpiece table are not deviated, determining that the first station and the first handover station are not deviated, and determining that the second station and the second handover station are not deviated;
the substrate conveying assembly is arranged on the substrate conveying table and used for adsorbing a substrate and driving the substrate to move from the substrate conveying table to a preset position on the workpiece table;
the first displacement detection assembly is arranged on a first reference point on the transmission bearing table and used for detecting the first displacement of the workpiece table lifting frame relative to the transmission bearing table in the first direction;
the second displacement detection assembly is arranged at a second reference point on the transmission bearing platform and is used for detecting the second displacement of the workpiece platform lifting frame relative to the transmission bearing platform in the first direction;
the third displacement detection assembly is arranged on the first reference point on the transmission bearing table and is used for detecting the first displacement of the workpiece table lifting frame relative to the transmission bearing table in the second direction;
the fourth displacement detection assembly is arranged on a second reference point on the transmission bearing table and is used for detecting the second displacement of the workpiece table lifting frame relative to the transmission bearing table in the second direction;
the controller is configured to determine that a difference between a first displacement in the first direction and a second displacement in the first direction is smaller than or equal to a first preset value, the first displacement in the second direction is smaller than or equal to the first preset value, and the second displacement in the second direction is smaller than or equal to the first preset value, and determine that the reference of the workpiece table and the reference of the substrate transfer table are not deviated, where a first signal input end of the controller is electrically connected to a signal output end of the first displacement detection assembly, a second signal input end of the controller is electrically connected to a signal output end of the second displacement detection assembly, a third signal input end of the controller is electrically connected to a signal output end of the third displacement detection assembly, and a fourth signal input end of the controller is electrically connected to a signal output end of the fourth displacement detection assembly;
the first in-place detection assembly is arranged on the substrate conveying table and used for detecting a first distance between a third reference point on the substrate conveying table and a fourth reference point at the first transfer station;
the second in-place detection assembly is arranged on the workpiece table and used for detecting a second distance between a fifth reference point on the workpiece table and a sixth reference point at the second transfer station;
the third in-place detection assembly is arranged at a seventh reference point on the workpiece table and used for detecting a third distance from the front end of the plate fork fixed on the substrate conveying table to the seventh reference point on the workpiece table;
the controller is used for determining that the first distance is smaller than or equal to a third preset value, the second distance is smaller than or equal to a fourth preset value, and the third distance is smaller than or equal to a fifth preset value, and determining that the first station and the first handover station are not deviated, and the second station and the second handover station are not deviated.
9. The substrate transport apparatus according to claim 8,
the first direction is parallel to a first surface, and the first surface is the surface of the transmission bearing platform adjacent to one side of the workpiece platform lifting frame;
the first reference point and the second reference point are located on the first surface;
the second direction is parallel to a second plane and perpendicular to the first direction, the second plane is a surface of the transmission bearing table adjacent to the first surface, and the second direction is perpendicular to a direction in which the first handover station points to the second handover station.
10. The substrate transport apparatus according to claim 8,
a fifth signal input end of the controller is electrically connected with a signal output end of the first in-place detection assembly, a sixth signal input end of the controller is electrically connected with a signal output end of the second in-place detection assembly, and a seventh signal input end of the controller is electrically connected with a signal output end of the third in-place detection assembly.
11. The substrate transport apparatus according to claim 8,
the substrate conveying platform is fixed on the transmission bearing platform, and the workpiece platform is fixed on the workpiece platform lifting frame.
12. The substrate transport apparatus according to claim 11,
the locking assembly comprises a first locking part and a second locking part;
the first locking part is arranged on the transmission bearing table and used for locking the substrate conveying table at a first joint station on the transmission bearing table;
the second locking portion comprises a first locking unit and a second locking unit, the first locking unit is arranged on the workpiece platform lifting frame, the second locking unit is arranged on the workpiece platform, and the first locking unit and the second locking unit are used for locking the workpiece platform at a second transfer station on the workpiece platform lifting frame.
13. The substrate transport apparatus according to claim 8,
the substrate conveying device also comprises a conveying air floating platform, wherein the conveying air floating platform is used for generating an air film; the air film is used for jacking the substrate and conveying the substrate to a preset position on the workpiece table.
14. The substrate transport apparatus of claim 13,
the distance detection assembly is arranged on the substrate conveying table and used for detecting the vertical distance between the transmission air floating table and the substrate conveying table;
and an eighth signal input end of the controller is electrically connected with an output end of the distance detection assembly, and is used for determining that the vertical distance is greater than or equal to a preset distance and the height of the transmission air bearing table is a safe height.
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| CN202010479893.8A CN113741152B (en) | 2020-05-29 | 2020-05-29 | Substrate conveying method and device |
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| CN202010479893.8A CN113741152B (en) | 2020-05-29 | 2020-05-29 | Substrate conveying method and device |
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